CN108493136A - Support jig and dry ecthing device structure - Google Patents
Support jig and dry ecthing device structure Download PDFInfo
- Publication number
- CN108493136A CN108493136A CN201810388427.1A CN201810388427A CN108493136A CN 108493136 A CN108493136 A CN 108493136A CN 201810388427 A CN201810388427 A CN 201810388427A CN 108493136 A CN108493136 A CN 108493136A
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- China
- Prior art keywords
- supporting lever
- support
- mechanical arm
- blind hole
- lever
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/3288—Maintenance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A kind of support jig of present invention offer and dry ecthing device structure.The support jig includes pedestal (11), vertically setting and the first supporting lever (13) being fixedly connected with pedestal (11), the support end (17) for being vertically nested in the second supporting lever (15) being flexibly connected in the first supporting lever (13) and with the first supporting lever (13) and being vertically arranged and being fixedly connected with the second supporting lever (15).The support jig is applied in dry ecthing equipment, can support mechanical arm when replacing the rubber ring in dry ecthing equipment on mechanical arm, dismounting screw, occurred level degree is abnormal after preventing mechanical arm stress, saves manpower, improves operating efficiency；Second supporting lever (15) can be moved up and down relative to the first supporting lever (13) to adjust bearing height, and second supporting lever (15) be marked with indicate height graduation mark (151), the height of mechanical arm can be confirmed by means of graduation mark (151).
Description
Technical field
The present invention relates to display manufacture technology field more particularly to a kind of support jigs and dry ecthing device structure.
Background technology
With the development of information-intensive society, demand of the people to display device is increased, and liquid crystal display has been pushed
(Liquid Crystal Display, LCD) and organic light emitting diode display (Organic Light Emitting
Diode, OLED) industry fast development.
Whether LCD display or OLED display include a thin-film transistor array base-plate (Thin Film
Transistor Array Substrate, TFT Array Substrate), etching is during making tft array substrate
One critical processes.Etch process is divided into dry ecthing (Dry Etch) technique and wet etching (Wet according to the physical state of etchant
Etch) technique, wherein dry etching process are to obtain plasma by exciting or dissociating etching gas molecule, utilize plasma
It does radio frequency (Radio Frequency, RF) and bombards the technology being etched to film.
Dry ecthing procedure carries out in dry ecthing equipment.Please refer to Fig. 1 and Fig. 2, existing dry ecthing equipment is true
The built-in robot 200 for being useful for transmission glass substrate of empty transmission cavity 100, the robot 200 are equipped with several elongated bars
The mechanical arm 201 of shape, the mechanical arm 201 are the critical pieces of bearing glass substrate.The upper table of each mechanical arm 201
It has been screwed multiple rubber rings (Pad O-ring) 202 on face, has generated frictional force by the multiple rubber ring 202 to protect
Demonstrate,proving mechanical arm 201 will not there is a phenomenon where glass substrate relative mechanical arms 201 to slide during transmitting glass substrate.
Rubber ring 202 on the mechanical arm 201 will be replaced after a period of use.Since rubber ring 202 is
It is screwed on mechanical arm 201, to replace rubber ring 202, must just dismount screw.In existing technical conditions
Under, when replacing the rubber ring 202 on mechanical arm 201, dismounting screw, need the bottom that mechanical arm 201 is manually lived with hand rest
Portion, levelness is abnormal variation after preventing 201 stress of mechanical arm, not only labor intensive, but also operating efficiency is relatively low.
Invention content
The purpose of the present invention is to provide a kind of support jigs, can replace the rubber in dry ecthing equipment on mechanical arm
Mechanical arm is supported when cushion rubber, dismounting screw, occurred level degree is abnormal after preventing mechanical arm stress, saves manpower, improves and makees
Industry efficiency.
Another object of the present invention is to provide a kind of dry ecthing device structures, can be in the rubber on replacing mechanical arm
Mechanical arm is supported when circle, dismounting screw, occurred level degree is abnormal after preventing mechanical arm stress, saves manpower, improves operation
Efficiency.
To achieve the above object, present invention firstly provides a kind of support jig, including pedestal, vertically setting and with
The first supporting lever that the pedestal is fixedly connected, be vertically nested in first supporting lever and with first support
Second supporting lever of thick stick flexible connection and the support end for being vertically arranged and being fixedly connected with second supporting lever.
Second supporting lever is marked with the graduation mark for indicating height.
The pedestal and the first supporting lever are integrated；Second supporting lever is integrated with support end；The branch
Support end offer an open-top, bottom lock straight slot.
First supporting lever offers an open-top, the blind hole of bottom lock, and second supporting lever is nested in institute
It states in blind hole, and is clearance fit between second supporting lever and the blind hole.
First supporting lever is with the second supporting lever by the way that only screw is flexibly connected admittedly；
Described only screw passes through the hole wall of the blind hole to resist second supporting lever admittedly, can realize first support
The connection of thick stick and the second supporting lever；It is described that only screw passes through the hole wall of the blind hole to loosen second supporting lever, Neng Gouyun admittedly
Perhaps described second supporting lever moves up and down relative to first supporting lever.
The present invention also provides a kind of dry ecthing device structures, including：
Vacuum transmission cavity；
Robot in the vacuum transmission cavity for transmitting substrate；The robot includes several for carrying base
The mechanical arm of plate is fixed with multiple rubber rings on the mechanical arm upper surface；
And the support jig in the vacuum transmission cavity；The support jig includes pedestal, vertically sets
Set and be fixedly connected with the pedestal the first supporting lever, be vertically nested in first supporting lever and with described
Second supporting lever of one supporting lever flexible connection and the branch for being vertically arranged and being fixedly connected with second supporting lever
Support end；
When replacing the rubber ring on the mechanical arm, the support jig is placed in below the mechanical arm to support this
Mechanical arm.
Second supporting lever is marked with the graduation mark for indicating height.
The pedestal and the first supporting lever are integrated；Second supporting lever is integrated with support end；The branch
Support end offer an open-top, bottom lock straight slot, the width of the width of the straight slot and the mechanical arm coincide.
First supporting lever offers an open-top, the blind hole of bottom lock, and second supporting lever is nested in institute
It states in blind hole, and is clearance fit between second supporting lever and the blind hole.
First supporting lever is with the second supporting lever by the way that only screw is flexibly connected admittedly；
Described only screw passes through the hole wall of the blind hole to resist second supporting lever admittedly, can realize first support
The connection of thick stick and the second supporting lever；It is described that only screw passes through the hole wall of the blind hole to loosen second supporting lever, Neng Gouyun admittedly
Perhaps described second supporting lever moves up and down relative to first supporting lever.
Beneficial effects of the present invention：A kind of support jig provided by the invention, including pedestal, the first supporting lever, second
Support thick stick and support end, second supporting lever be vertically nested in first supporting lever and with described first
Support thick stick flexible connection；The support jig is applied in dry ecthing equipment, enough to replace the rubber in dry ecthing equipment on mechanical arm
Mechanical arm is supported when cushion rubber, dismounting screw, occurred level degree is abnormal after preventing mechanical arm stress, saves manpower, improves and makees
Industry efficiency；Second supporting lever can be moved up and down relative to first supporting lever to adjust bearing height, and described
Second supporting lever is marked with the graduation mark for indicating height, and the height of mechanical arm can be confirmed by means of the graduation mark.This hair
Robot and above-mentioned support for transmitting substrate are arranged in vacuum transmission cavity and controls for a kind of dry ecthing device structure of bright offer
Tool, the support jig can on the mechanical arm for replacing the robot rubber ring, dismounting screw when support manipulator
Arm, occurred level degree is abnormal after preventing mechanical arm stress, saves manpower, improves operating efficiency, and controlled by means of the support
Graduation mark on second supporting lever of tool can confirm the height of mechanical arm.
Description of the drawings
For further understanding of the features and technical contents of the present invention, it please refers to below in connection with the detailed of the present invention
Illustrate and attached drawing, however, the drawings only provide reference and explanation, is not intended to limit the present invention.
In attached drawing,
Fig. 1 is the front view of existing dry ecthing equipment；
Fig. 2 is the vertical view of existing dry ecthing equipment；
Fig. 3 is the front view of the support jig of the present invention；
Fig. 4 is corresponding to the sectional view at A-A in Fig. 3；
Fig. 5 is the front view of the dry ecthing device structure of the present invention；
Fig. 6 is corresponding to the sectional view at B-B in Fig. 5；
Fig. 7 is the vertical view of the dry ecthing device structure of the present invention.
Specific implementation mode
Further to illustrate the technological means and its effect of the invention taken, below in conjunction with the preferred implementation of the present invention
Example and its attached drawing are described in detail.
Please refer to Fig. 3 and Fig. 4, present invention firstly provides a kind of support jig, including pedestal 11, vertically set
Set and be fixedly connected with the pedestal 11 the first supporting lever 13, be vertically nested in first supporting lever 13 and with
The second supporting lever 15 that first supporting lever 13 is flexibly connected and vertically setting and with second supporting lever 15
The support end 17 being fixedly connected.
Preferably, 13 integral production of the pedestal 11 and the first supporting lever, second supporting lever 15 and support end 17
Integral production.
Specifically, first supporting lever 13 offers an open-top, the blind hole of bottom lock 131, described second
Support thick stick 15 is nested in the blind hole 131.
Specifically, first supporting lever 13 is flexibly connected with the second supporting lever 15 by only consolidating screw 19.It is described
Only consolidating screw 19 passes through the hole wall of the blind hole 131 to resist second supporting lever 15, can realize first supporting lever 13
With the connection of the second supporting lever 15；It is described that only screw 19 passes through the hole wall of the blind hole 131 to loosen second supporting lever 15 admittedly,
Second supporting lever 15 can allow for move up and down relative to first supporting lever 13 to adjust and second support
The height for the support end 17 that thick stick 15 is fixedly connected.
Further, be clearance fit between second supporting lever 15 and the blind hole 131, i.e., the blind hole 131 with
There are the gaps of very little between second supporting lever 15, described in this way after only screw 19 loosens second supporting lever 15 admittedly,
Second supporting lever 15 just can swimmingly move up and down along the blind hole 131 relative to first supporting lever 13.
Specifically, it is described support end 17 offer an open-top, bottom lock straight slot 171.
It is worth noting that, second supporting lever 15 is marked with the graduation mark 151 for indicating height, for showing the branch
The height residing for end 17 is supportted, and the scale value of the graduation mark 151 gradually increases from top to bottom, is similar to traditional height body
The graduation mark of height is indicated on weight scale.Wait for that second supporting lever 15, first supporting lever 13 relatively moves to precalculated position,
After only consolidating screw 19 described in locking, the support end 17 can be confirmed by means of the graduation mark on second supporting lever 15
Residing height.
Fig. 5 to Fig. 7 is please referred to, the support jig is in dry ecthing equipment, dry ecthing equipment to be in its vacuum transmission cavity 3
Equipped with the robot 5 for transmitting substrate, the robot 5 includes several mechanical arms 51 for bearing substrate, the machine
Tool arm has been screwed multiple rubber rings 52 on 51 upper surface, generates frictional force by the multiple rubber ring 52 to protect
Demonstrate,proving mechanical arm 51 will not there is a phenomenon where glass substrate relative mechanical arms 51 to slide during transmitting glass substrate.
Rubber ring 52 on the mechanical arm 51 will be replaced after a period of use.Replacing the mechanical arm
When rubber ring 52 on 51, dismounting screw, which is placed in 51 lower section of the mechanical arm, first loosens the only screw admittedly
19 make second supporting lever 15 move up and down relative to first supporting lever 13 along the blind hole 131, thus by institute
State support end 17 be adjusted to it is suitable highly contact the lower surface of the mechanical arm 51, then lock the only screw 19 admittedly
It can realize support of the support jig to the mechanical arm 51, prevent occurred level degree after 51 stress of the mechanical arm
It is abnormal, manpower is saved, operating efficiency is improved；It is by means of the graduation mark 151 on the second supporting lever 15 of the support jig simultaneously
It can confirm the height of suffered mechanical arm 51, it is time saving and energy saving.
Please refer to Fig. 5 to Fig. 7, the present invention also provides a kind of dry ecthing device structures, including：Vacuum transmission cavity 3 is set
In the robot 5 in the vacuum transmission cavity 3 and the support jig 1 in the vacuum transmission cavity 3.
The robot 5 is for transmitting substrate.The robot 5 includes several mechanical arms 51 for bearing substrate,
The mechanical arm has been screwed multiple rubber rings 52 on 51 upper surface, and friction is generated by the multiple rubber ring 52
To ensure mechanical arm 51 during transmitting glass substrate the sliding of glass substrate relative mechanical arm 51 will not occur for power
Phenomenon.
The support jig 1 includes pedestal 11, is vertically arranged and be fixedly connected with the pedestal 11 first
Support thick stick 13 is vertically nested in second be flexibly connected in first supporting lever 13 and with first supporting lever 13
Support thick stick 15 and the support end 17 for being vertically arranged and being fixedly connected with second supporting lever 15.
Preferably, 13 integral production of the pedestal 11 and the first supporting lever, second supporting lever 15 and support end 17
Integral production.
Specifically, first supporting lever 13 offers an open-top, the blind hole of bottom lock 131, described second
Support thick stick 15 is nested in the blind hole 131.
Specifically, first supporting lever 13 is flexibly connected with the second supporting lever 15 by only consolidating screw 19.It is described
Only consolidating screw 19 passes through the hole wall of the blind hole 131 to resist second supporting lever 15, can realize first supporting lever 13
With the connection of the second supporting lever 15；It is described that only screw 19 passes through the hole wall of the blind hole 131 to loosen second supporting lever 15 admittedly,
Second supporting lever 15 can allow for move up and down relative to first supporting lever 13 to adjust and second support
The height for the support end 17 that thick stick 15 is fixedly connected.
Further, be clearance fit between second supporting lever 15 and the blind hole 131, i.e., the blind hole 131 with
There are the gaps of very little between second supporting lever 15, described in this way after only screw 19 loosens second supporting lever 15 admittedly,
Second supporting lever 15 just can swimmingly move up and down along the blind hole 131 relative to first supporting lever 13.
Specifically, it is described support end 17 offer an open-top, bottom lock straight slot 171.Preferably, described logical
The width of slot 171 and the width of the mechanical arm 51 coincide, and the width of certain straight slot 171 can also be slightly larger than the machine
The width of tool arm 51.
It is worth noting that, second supporting lever 15 is marked with the graduation mark 151 for indicating height, for showing the branch
The height residing for end 17 is supportted, and the scale value of the graduation mark 151 gradually increases from top to bottom, is similar to traditional height body
The graduation mark of height is indicated on weight scale.Wait for that second supporting lever 15, first supporting lever 13 relatively moves to precalculated position,
After only consolidating screw 19 described in locking, the support end 17 can be confirmed by means of the graduation mark on second supporting lever 15
Residing height.
Rubber ring 52 on the mechanical arm 51 will be replaced after a period of use.Replacing the mechanical arm
When rubber ring 52 on 51, dismounting screw, the support jig 1 is placed in 51 lower section of the mechanical arm, first loosens described only solid
Screw 19 makes second supporting lever 15 move up and down relative to first supporting lever 13 along the blind hole 131, to
The support end 17 is adjusted to and suitably highly makes the manipulator to contact the lower surface of the mechanical arm 51
The lower part of arm 51 is put into the straight slot 171 of the support end 17, then locks that described only screw 19 just can realize the branch admittedly
Support of the jig 1 to the mechanical arm 51 is supportted, occurred level degree is abnormal after preventing 51 stress of the mechanical arm, saves people
Power improves operating efficiency；It can confirm institute by means of the graduation mark 151 on the second supporting lever 15 of the support jig 1 simultaneously
It is time saving and energy saving by the height of mechanical arm 51.
In conclusion the support jig of the present invention, including pedestal, the first supporting lever, the second supporting lever and support end,
Second supporting lever is vertically nested in first supporting lever and is flexibly connected with first supporting lever；The branch
It supports jig to be applied in dry ecthing equipment, enough branch when replacing the rubber ring in dry ecthing equipment on mechanical arm, dismounting screw
Mechanical arm is supportted, occurred level degree is abnormal after preventing mechanical arm stress, saves manpower, improves operating efficiency；Described second
Support thick stick can be moved up and down relative to first supporting lever to adjust bearing height, and second supporting lever is marked with table
The graduation mark for showing height can confirm the height of mechanical arm by means of the graduation mark.The dry ecthing device structure of the present invention,
Robot and above-mentioned support jig for transmitting substrate is set in vacuum transmission cavity, and the support jig can replace institute
Mechanical arm is supported when stating the rubber ring on the mechanical arm of robot, dismounting screw, water occurs after preventing mechanical arm stress
Pingdu is abnormal, saves manpower, improves operating efficiency, and by means of the graduation mark on the second supporting lever of the support jig
Confirm the height of mechanical arm.
The above for those of ordinary skill in the art can according to the technique and scheme of the present invention and technology
Other various corresponding change and deformations are made in design, and all these change and distortions should all belong to the claim of the present invention
Protection domain.
Claims (10)
1. a kind of support jig, which is characterized in that including pedestal (11), be vertically arranged and fixed with the pedestal (11)
The first supporting lever (13) of connection, be vertically nested in first supporting lever (13) and with first supporting lever
(13) the second supporting lever (15) being flexibly connected and vertically setting are simultaneously fixedly connected with second supporting lever (15)
Support end (17).
2. support jig as described in claim 1, which is characterized in that second supporting lever (15), which is marked with, indicates height
Graduation mark (151).
3. support jig as described in claim 1, which is characterized in that the pedestal (11) is one with the first supporting lever (13)
's；Second supporting lever (15) is integrated with support end (17)；The support end (17) offer an open-top,
The straight slot (171) of bottom lock.
4. support jig as described in claim 1, which is characterized in that first supporting lever (13) offers a top and opens
It puts, the blind hole of bottom lock (131), second supporting lever (15) is nested in the blind hole (131), and second support
It is clearance fit between thick stick (15) and the blind hole (131).
5. support jig as claimed in claim 4, which is characterized in that first supporting lever (13) and the second supporting lever (15)
By the way that only screw (19) is flexibly connected admittedly；
Described only screw (19) passes through the hole wall of the blind hole (131) to resist second supporting lever (15) admittedly, can realize institute
State the connection of the first supporting lever (13) and the second supporting lever (15)；The hole only consolidated screw (19) and pass through the blind hole (131)
Wall loosens second supporting lever (15), and second supporting lever (15) can allow for be done relative to first supporting lever (13)
It moves up and down.
6. a kind of dry ecthing device structure, which is characterized in that including：
Vacuum transmission cavity (3)；
Robot (5) in the vacuum transmission cavity (3) for transmitting substrate；The robot (5) includes several is used for
The mechanical arm (51) of bearing substrate is fixed with multiple rubber rings (52) on mechanical arm (51) upper surface；
And the support jig (1) in the vacuum transmission cavity (3)；The support jig (1) includes pedestal (11), along perpendicular
Histogram to be arranged and be fixedly connected with the pedestal (11) the first supporting lever (13), be vertically nested in described first
It supports the second supporting lever (15) being flexibly connected in thick stick (13) and with first supporting lever (13) and is vertically arranged simultaneously
The support end (17) being fixedly connected with second supporting lever (15)；
When replacing rubber ring (52) on the mechanical arm (51), the support jig (1) is placed in the mechanical arm (51)
Lower section is to support the mechanical arm (51).
7. dry ecthing device structure as claimed in claim 6, which is characterized in that second supporting lever (15) is marked with expression
The graduation mark (151) of height.
8. dry ecthing device structure as claimed in claim 6, which is characterized in that the pedestal (11) and the first supporting lever (13)
It is integrated；Second supporting lever (15) is integrated with support end (17)；The support end (17) offers a top
Portion is open, bottom lock straight slot (171), and the width of the straight slot (171) coincide with the width of the mechanical arm (51).
9. dry ecthing device structure as claimed in claim 6, which is characterized in that first supporting lever (13) offers a top
Portion is open, bottom lock blind hole (131), and second supporting lever (15) is nested in the blind hole (131), and described second
It is clearance fit between supporting lever (15) and the blind hole (131).
10. dry ecthing device structure as claimed in claim 9, which is characterized in that first supporting lever (13) and second
Support thick stick (15) is by the way that only screw (19) is flexibly connected admittedly；
Described only screw (19) passes through the hole wall of the blind hole (131) to resist second supporting lever (15) admittedly, can realize institute
State the connection of the first supporting lever (13) and the second supporting lever (15)；The hole only consolidated screw (19) and pass through the blind hole (131)
Wall loosens second supporting lever (15), and second supporting lever (15) can allow for be done relative to first supporting lever (13)
It moves up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810388427.1A CN108493136A (en) | 2018-04-26 | 2018-04-26 | Support jig and dry ecthing device structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810388427.1A CN108493136A (en) | 2018-04-26 | 2018-04-26 | Support jig and dry ecthing device structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108493136A true CN108493136A (en) | 2018-09-04 |
Family
ID=63314158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810388427.1A Pending CN108493136A (en) | 2018-04-26 | 2018-04-26 | Support jig and dry ecthing device structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108493136A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109533969A (en) * | 2018-11-09 | 2019-03-29 | 深圳市华星光电半导体显示技术有限公司 | A kind of support wheel jig and transmission device |
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