CN108469319A - A kind of flexible force sensitive sensor and preparation method thereof, array device and application - Google Patents
A kind of flexible force sensitive sensor and preparation method thereof, array device and application Download PDFInfo
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- CN108469319A CN108469319A CN201810229752.3A CN201810229752A CN108469319A CN 108469319 A CN108469319 A CN 108469319A CN 201810229752 A CN201810229752 A CN 201810229752A CN 108469319 A CN108469319 A CN 108469319A
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- force sensitive
- sensitive sensor
- flexible force
- pdms
- carbon black
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
- A61B5/6843—Monitoring or controlling sensor contact pressure
Abstract
A kind of flexible force sensitive sensor and preparation method thereof, array device and application, relate generally to sensor preparing technical field.By selecting PDMS to make micro-structural film so that the low Young's modulus of PDMS improves structural elasticity, enhances wearable property and the sensitivity of flexible force sensitive sensor；Utilize the random multiplelayer microstructure of surface biomimetic, it is added significantly to the sensitivity of force-sensing sensor, enhance its sensing capability to minimal stress, to help pressure resistance type flexible force sensitive sensor being applied to the health fields such as medical monitoring, a variety of human body signals such as pulse, breathing can be monitored in real time；In addition, the preparation method of above-mentioned flexible force sensitive sensor not only has good craftsmanship and lower cost, it is suitble to large-scale production, and can get the bionic surface with different-shape, different levels, different scale, different dimensions, different function by this method.
Description
Technical field
The present invention relates to sensor preparing technical fields, in particular to a kind of flexible force sensitive sensor and its preparation
Method, array device and application.
Background technology
Electronic skin, that is, novel wearable flexible bionic touch sensor is one kind for realizing apery class tactilely-perceptible work(
The artificial flexible electronic device of energy.Human body can be imitated using what sensor technology, micro-electromechanical technology and new material technology made
The electronic device or electronic system of the functions such as skin sparing, perception, adjusting.Electronic skin by making sensitivity on flexible substrates
Electronic device simulates the sensing function of human skin, to reach or even surmount the sensing capabilities of skin, to robot,
Artificial artifucial limb, medical detect and diagnose etc. show application prospect.Tactilely-perceptible is one of major function of human skin, freely
Logical conduction haptic signal is the basic function that electronic skin needs are realized, flexible force sensitive sensor is the effective of realization tactile sensing
Device.Pressure resistance type flexible force sensitive sensor is because of its excellent characteristic and good adhesion, it is considered to be the following wearable electronic
The important component of equipment.
However, since current expensive cost, complicated manufacturing technology and lower stability limit pressure resistance type power
The practical application of dependent sensor.
Invention content
The purpose of the present invention is to provide a kind of flexible force sensitive sensor, with preferable stability, flexible
And sensitivity.
Another object of the present invention is to provide a kind of preparation method of flexible force sensitive sensor, preparation process is simple,
It is at low cost, and can mass produce.
It is quick with above-mentioned flexible force another object of the present invention is to provide a kind of application of flexible force sensitive sensor
Every advantage of sensor.
It is quick with above-mentioned flexible force another object of the present invention is to provide a kind of flexible force sensitive sensor array device
Every advantage of sensor.
The present invention, which solves its technical problem, to be realized using following technical scheme.
The present invention proposes a kind of preparation method of flexible force sensitive sensor comprising following steps：
PDMS substrates and curing agent are pressed 5:1 weight ratio mixing, obtains PDMS prepolymers；One is carried out to PDMS prepolymers
After secondary stirring, carbon black is added and carries out secondary agitation, obtains carbon black/PDMS ink head products；After secondary agitation, in vacuum
Under the conditions of remove carbon black/PDMS ink head products bubble, obtain carbon black/PDMS ink；Carbon black/PDMS ink is spun on table
Face has on the frosted glass plate mold of micro-structure, and carries out curing process, and then again by the carbon black after solidification/PDMS ink from hair
It is stripped out in glass sheet mold, obtains carbon black/PDMS film of surface micro-patterning；In carbon black/PDMS film without micro- pattern
A side surface on metal electrode is set, obtain sensor fexible film electrode；After sensor fexible film electrode is cut,
The obtained two panels sensor fexible film electrode slice of cutting is stacked, and then extraction wire and is packaged；Wherein, two panels senses
There is device fexible film electrode slice the surface of micro- pattern relatively to fit together.
The present invention also proposes a kind of flexible force sensitive sensor, and the flexible force sensitive sensor is according to the above-mentioned quick sensing of flexible force
The preparation method of device is made.
The present invention also proposes a kind of application such as above-mentioned flexible force sensitive sensor, specifically, the flexible force sensitive sensor
Applied in electronic skin.
The present invention also proposes a kind of flexible force sensitive sensor array device, which is to pass through
By what is obtained after multiple above-mentioned flexible force sensitive sensors progress overall packages and extraction wire.
Flexible force sensitive sensor of the embodiment of the present invention and preparation method thereof, array device and the advantageous effect of application are：
The embodiment of the present invention is by selecting PDMS to make micro-structural film so that the low Young's modulus of PDMS improves structure bullet
Property, enhance wearable property and the sensitivity of flexible force sensitive sensor；Using the random multiplelayer microstructure of surface biomimetic (such as hair glass
The physical arrangements such as glass piece surface micro-structure, the multiple-level surface micro-structure generated using laser engraving, and there is micron double level
The lotus leaf surface of structure, imitate the rib-like surface texture of sharkskin, the leg surface of water skipper, butterfly the biomimetic features such as wing surface
Deng), the sensitivity of force-sensing sensor is significantly increased, enhances the sensing capability to minimal stress, to which pressure resistance type flexible force is quick
Sensor application can monitor a variety of human body signals such as pulse, breathing in real time to health fields such as medical monitorings.Together
When, the preparation method of flexible force sensitive sensor provided in an embodiment of the present invention has good craftsmanship and lower cost, fits
Close large-scale production, this method also can get with different-shape, different levels, different scale, different dimension, different function
Bionic surface.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is flexible force sensitive sensor structure chart in test example；
Fig. 2 is the sectional view of flexible force sensitive sensor in test example；
Fig. 3 is inverted pyramid micro-structure in test example；
Fig. 4 is the frosted glass micro-structure in test example；
Fig. 5 is the R-t test curves of flexible force sensitive sensor in test example.
In figure：1- encapsulated layers；2- electrode layers；Carbon black/PDMS film micro-structural 3-；On 4- carbon blacks/PDMS film
Micro-structure；5- electrode layers；6- encapsulated layers.
Specific implementation mode
It in order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below will be in the embodiment of the present invention
Technical solution be clearly and completely described.The person that is not specified actual conditions in embodiment, builds according to normal condition or manufacturer
The condition of view carries out.Reagents or instruments used without specified manufacturer is the conventional production that can be obtained by commercially available purchase
Product.
Flexible force sensitive sensor of the embodiment of the present invention and preparation method thereof, array device and application are carried out below specific
Explanation.
A kind of preparation method of flexible force sensitive sensor provided in an embodiment of the present invention comprising following steps：
S1, PDMS substrates and curing agent are pressed 5:1 weight ratio mixing, obtains PDMS prepolymers；To PDMS prepolymers into
After the primary stirring of row, carbon black is added and carries out secondary agitation, obtains carbon black/PDMS ink head products；After secondary agitation,
The bubble that carbon black/PDMS ink head products are removed under vacuum condition, obtains carbon black/PDMS ink.
It should be noted that in order to ensure the good dispersion of each component in the more abundant and mixture mixed, this hair
Once stirring and secondary agitation are mechanical agitation mode in bright embodiment.Wherein, the time once stirred is 5-8min；It is secondary
The time of stirring is 30-40min.Preferably, the time once stirred is 5min；The time of secondary agitation is 30min.In addition,
When carrying out secondary agitation, carry out at normal temperatures and pressures.
Further, in order to ensure the quality of carbon black/PDMS ink, it is made to meet the performance of final flexible force sensitive sensor
It is required that the embodiment of the present invention is during obtaining carbon black/PDMS ink head products, the mixing quality of PDMS prepolymers and carbon black
Than being 15：1.
S2, carbon black/PDMS ink is spun on frosted glass plate mold of the surface with micro-structure, and carried out at solidification
Reason, and then be again stripped out the carbon black after solidification/PDMS ink from frosted glass plate mold, obtain the charcoal of surface micro-patterning
Black/PDMS film.
Further, in order to ensure that the spin coating uniformity, stability and final carbon black/PDMS of carbon black/PDMS ink are thin
The target thickness of film, in the embodiment of the present invention when carbon black/PDMS ink to be spun on frosted glass plate mold, spin speed is
600-610 per minute turns, and preferably spin speed is 600 turns per minute.
Further, in order to ensure carbon black/PDMS ink solidification effect and carbon black/PDMS film quality, the present invention
In embodiment, when carrying out curing process, condition of cure is to cure 2 hours at 70 DEG C.
It should be noted that frosted glass plate mold of the surface in the present embodiment with micro-structure is surface with bionical
The one of which of micro-structure can also be other bionical micro-structures in other embodiments, such as be generated using laser engraving more
The physical arrangements such as layer surface micro-structure, and the lotus leaf surface with micron double level structure imitate the rib-like surface of sharkskin
Structure, the leg surface of water skipper, butterfly the biomimetic features such as wing surface etc..It is emphasized that these special micro-structure energy
The sensitivity of flexible force sensitive sensor is enough significantly increased, enhances sensing capability of its pair with minimal stress, to which pressure resistance type is soft
Property force-sensing sensor is applied to the health fields such as medical monitoring, can monitor a variety of human bodies such as pulse, breathing in real time
Signal.
S3, metal electrode is set on a side surface of the carbon black/PDMS film without micro- pattern, obtains sensor fexible film
Electrode.
Further, in order to ensure to be arranged the low cost of metal electrode and the superiority of technique, the embodiment of the present invention is being set
When setting metal electrode, using MEMS magnetron sputterings or evaporation process.
After S4, sensor fexible film electrode are cut, obtained two panels sensor fexible film electrode slice will be cut
It stacks, and then extraction wire and is packaged；Wherein, two panels sensor fexible film electrode slice has the surface of micro- pattern opposite
Ground fits together.
Further, in order to ensure packaging effect, the embodiment of the present invention preferentially, Kapton glue is used when being packaged
Band is packaged.
The embodiment of the present invention also provides a kind of flexible force sensitive sensor.It should be noted that provided in an embodiment of the present invention
Flexible force sensitive sensor is that the preparation method of the flexible force sensitive sensor of above-mentioned offer according to embodiments of the present invention is made, and is had
Preferable stability, flexible, sensitivity and wearable property.
The embodiment of the present invention also provides a kind of application such as above-mentioned flexible force sensitive sensor, and specifically, the flexible force is quick
Sensor application is in electronic skin.It should be noted that being had by electronic skin prepared by the flexible force sensitive sensor preferable
Stability, flexible, sensitivity and wearable property, therefore it is with important application value.
The embodiment of the present invention also provides a kind of flexible force sensitive sensor array device, the flexible force sensitive sensor array device
It is by being obtained after multiple above-mentioned flexible force sensitive sensors are carried out overall package and extraction wire.It should be noted that
Every advantage of the specific above-mentioned flexible force sensitive sensor of flexible force sensitive sensor array device provided in an embodiment of the present invention.
The feature and performance of the present invention are described in further detail with reference to embodiments.
Embodiment 1
The present embodiment proposes a kind of preparation method of flexible force sensitive sensor comprising following steps：
First, PDMS substrates and curing agent are pressed 5:1 weight ratio mixing, obtains PDMS prepolymers；Use mechanical agitator
PDMS prepolymers are carried out after once stirring, at normal temperatures and pressures, carbon black is added and carries out secondary agitation, obtains carbon black/PDMS
Ink head product；After secondary agitation, under vacuum remove carbon black/PDMS ink head products bubble, obtain carbon black/
PDMS ink.Wherein, a mixing time is 5min, and the time of secondary agitation is 30min.
Secondly, carbon black/PDMS ink is spun on surface with 600 turns of speed per minute using spin coater has micro-structure
Frosted glass plate mold on, and carry out at 70 DEG C 2 hours curing process, and then again by the carbon black after solidification/PDMS ink
It is stripped out from frosted glass plate mold, obtains carbon black/PDMS film of surface micro-patterning.
Further, using MEMS magnetron sputterings or vapor deposition work on a side surface of the carbon black/PDMS film without micro- pattern
Metal electrode is arranged in skill, obtains sensor fexible film electrode.
Finally, two for sensor fexible film electrode being cut according to the suitable size of target, and cutting being obtained
Piece sensor fexible film electrode slice stacks, and then extraction wire and is packaged again.Wherein, two panels sensor fexible film electricity
There is pole piece the surface of micro- pattern relatively to fit together, and while encapsulating is packaged using Kapton adhesive tapes.
The present embodiment also provides a kind of flexible force sensitive sensor, and the flexible force sensitive sensor is according to the above-mentioned quick biography of flexible force
The preparation method of sensor is made, which, which is that pressure resistance type power flexible is quick, wears sensor.
The present embodiment also provides a kind of application such as above-mentioned flexible force sensitive sensor, specifically, the quick sensing of the flexible force
Device is applied in electronic skin.
The present embodiment also provides a kind of flexible force sensitive sensor array device, which is logical
It crosses after multiple above-mentioned flexible force sensitive sensors are carried out overall package and extraction wire and obtains.
Test example
In order to which the performance to the flexible force sensitive sensor in the embodiment of the present invention is tested, this test example chooses embodiment
1 carries out relevant explanation as sample and tests phenetic analysis.
Specifically, the structure feature of flexible force sensitive sensor when test and its microstructure characteristic be as shown in Figure 1, Figure 2 and Fig. 3
It is shown, wherein Fig. 1 is flexible force sensitive sensor structure chart, Fig. 2 be flexible force sensitive sensor sectional view (accordingly, Fig. 1 and
Flexible force sensitive sensor in Fig. 2 include encapsulated layer 1 and encapsulated layer 6, electrode layer 2 and electrode layer 5, micro-structural carbon black/
Micro-structure 4 on PDMS film 3 and carbon black/PDMS film), Fig. 3 is inverted pyramid micro-structure.In addition, in order to aid in illustrating
The feature of micro-structure, Fig. 4 give the micro-structure figure of frosted glass.
Further, when carrying out electrical performance testing, flexible force sensitive sensor is specifically tested in test example at one week
The change curve of resistance value under phase property active force, the results are shown in Figure 5.From fig. 5, it can be seen that the electricity of the flexible force sensitive sensor
Resistance reduces with the effect of stress, and the sensor has very high sensitivity, faster response speed and good stabilization
Property, it is suitably applied the fields such as human body signal monitoring.In addition, also being measured by experiment, which can also use
In the measurement of the deformation such as bending.
In conclusion the embodiment of the present invention is by selecting PDMS to make micro-structural film so that the low Young of PDMS
Modulus improves structural elasticity, enhances wearable property and the sensitivity of flexible force sensitive sensor；Utilize the random of surface biomimetic
Multiplelayer microstructure (such as frosted glass plate surface micro-structure, the multiple-level surface micro-structure physical arrangement generated using laser engraving, with
And the lotus leaf surface with micron double level structure, imitate the rib-like surface texture of sharkskin, the leg surface of water skipper, butterfly wing
Biomimetic features such as wing surface etc.), the sensitivity of force-sensing sensor is significantly increased, enhances the sensing capability to minimal stress, to
Help pressure resistance type flexible force sensitive sensor being applied to the health fields such as medical monitoring, such as arteries and veins can be monitored in real time
It a variety of human body signals such as fights, breathe.Meanwhile the preparation method of flexible force sensitive sensor provided in an embodiment of the present invention has well
Craftsmanship and lower cost, be suitble to large-scale production, this method also to can get with different-shape, different levels, difference
The bionic surface of scale, different dimensions, different function.
Embodiments described above is a part of the embodiment of the present invention, instead of all the embodiments.The reality of the present invention
The detailed description for applying example is not intended to limit the range of claimed invention, but is merely representative of the selected implementation of the present invention
Example.Based on the embodiments of the present invention, those of ordinary skill in the art are obtained without creative efforts
Every other embodiment, shall fall within the protection scope of the present invention.
Claims (10)
1. a kind of preparation method of flexible force sensitive sensor, which is characterized in that it includes the following steps：
PDMS substrates and curing agent are pressed 5:1 weight ratio mixing, obtains PDMS prepolymers；One is carried out to the PDMS prepolymers
After secondary stirring, carbon black is added and carries out secondary agitation, obtains carbon black/PDMS ink head products；After the secondary agitation,
The bubble that the carbon black/PDMS ink head products are removed under vacuum condition, obtains carbon black/PDMS ink；
The carbon black/PDMS ink is spun on frosted glass plate mold of the surface with micro-structure, and carries out curing process, into
And be again stripped out the carbon black after solidification/PDMS ink from the frosted glass plate mold, obtain the charcoal of surface micro-patterning
Black/PDMS film；
Metal electrode is set on a side surface of the carbon black/PDMS film without micro- pattern, obtains sensor flexible thin
Membrane electrode；
After the sensor fexible film electrode is cut, the two panels sensor fexible film electrode slice that cutting obtains is folded
It puts, and then extraction wire and is packaged；Wherein, sensor fexible film electrode slice described in two panels has the table of micro- pattern
Face relatively fits together.
2. the preparation method of flexible force sensitive sensor according to claim 1, which is characterized in that the primary stirring and institute
It is mechanical agitation mode to state secondary agitation；Wherein, the time once stirred is 5-8min；The time of the secondary agitation
For 30-40min.
3. the preparation method of flexible force sensitive sensor according to claim 1, which is characterized in that by the carbon black/
When PDMS ink is spun on the frosted glass plate mold, spin speed turns for 600-610 per minute.
4. the preparation method of flexible force sensitive sensor according to claim 1, which is characterized in that carry out the curing process
When, condition of cure is to cure 2 hours at 70 DEG C.
5. the preparation method of flexible force sensitive sensor according to claim 1, which is characterized in that the metal electrode is arranged
When, using MEMS magnetron sputterings or evaporation process.
6. the preparation method of flexible force sensitive sensor according to claim 1, which is characterized in that adopted when the encapsulation
With Kapton adhesive tapes.
7. the preparation method of the flexible force sensitive sensor according to claim 1-6 any one, which is characterized in that obtain institute
During stating carbon black/PDMS ink head products, the mass ratio of the PDMS prepolymers and the carbon black is 15：1.
8. a kind of flexible force sensitive sensor, which is characterized in that the flexible force sensitive sensor is according to claim 1-7 any one
The preparation method of the flexible force sensitive sensor is made.
9. a kind of application of flexible force sensitive sensor as claimed in claim 8, which is characterized in that the flexible force sensitive sensor
Applied in electronic skin.
10. a kind of flexible force sensitive sensor array device, which is characterized in that the flexible force sensitive sensor array device is to pass through
By what is obtained after the flexible force sensitive sensor progress overall package described in multiple claims 8 and extraction wire.
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109655180A (en) * | 2019-01-16 | 2019-04-19 | 吉林大学 | Pliable pressure sensor and preparation method thereof based on crackle array structure |
| CN109738097A (en) * | 2019-03-12 | 2019-05-10 | 中国科学技术大学 | A kind of multifunction electronic skin and preparation method thereof, plane external force detection method |
| CN110329986A (en) * | 2019-06-24 | 2019-10-15 | 华中科技大学 | A kind of Bionic flexible force snesor and preparation method thereof |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103713022A (en) * | 2013-12-07 | 2014-04-09 | 太原理工大学 | Preparation method for polydimethylsiloxane micro-thin film capacitive biosensor |
| CN105136375A (en) * | 2015-09-09 | 2015-12-09 | 宁波绿凯节能科技有限公司 | Preparation method of flexible pressure sensor having high sensitivity |
| CN105783697A (en) * | 2016-05-18 | 2016-07-20 | 郑州大学 | Flexible strain sensor with crack structure and preparation method thereof |
| CN106197731A (en) * | 2016-06-29 | 2016-12-07 | 东南大学 | A kind of inductance type temperature sensor and preparation method thereof |
| CN106197774A (en) * | 2016-07-20 | 2016-12-07 | 上海交通大学 | Flexible piezoresistive tactile sensor array and preparation method thereof |
| CN106531733A (en) * | 2016-12-21 | 2017-03-22 | 清华大学 | Flexible pressure sensor and preparation method therefor |
| CN106633891A (en) * | 2016-10-21 | 2017-05-10 | 四川大学 | Silicon rubber based porous dielectric elastomer composite material and preparation method thereof |
| CN106805954A (en) * | 2017-02-28 | 2017-06-09 | 华中科技大学 | A kind of Wearable pliable pressure sensor and preparation method thereof |
-
2018
- 2018-03-20 CN CN201810229752.3A patent/CN108469319A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103713022A (en) * | 2013-12-07 | 2014-04-09 | 太原理工大学 | Preparation method for polydimethylsiloxane micro-thin film capacitive biosensor |
| CN105136375A (en) * | 2015-09-09 | 2015-12-09 | 宁波绿凯节能科技有限公司 | Preparation method of flexible pressure sensor having high sensitivity |
| CN105783697A (en) * | 2016-05-18 | 2016-07-20 | 郑州大学 | Flexible strain sensor with crack structure and preparation method thereof |
| CN106197731A (en) * | 2016-06-29 | 2016-12-07 | 东南大学 | A kind of inductance type temperature sensor and preparation method thereof |
| CN106197774A (en) * | 2016-07-20 | 2016-12-07 | 上海交通大学 | Flexible piezoresistive tactile sensor array and preparation method thereof |
| CN106633891A (en) * | 2016-10-21 | 2017-05-10 | 四川大学 | Silicon rubber based porous dielectric elastomer composite material and preparation method thereof |
| CN106531733A (en) * | 2016-12-21 | 2017-03-22 | 清华大学 | Flexible pressure sensor and preparation method therefor |
| CN106805954A (en) * | 2017-02-28 | 2017-06-09 | 华中科技大学 | A kind of Wearable pliable pressure sensor and preparation method thereof |
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109655180B (en) * | 2019-01-16 | 2020-07-21 | 吉林大学 | Flexible pressure sensor based on crack array structure and preparation method thereof |
| CN109655180A (en) * | 2019-01-16 | 2019-04-19 | 吉林大学 | Pliable pressure sensor and preparation method thereof based on crackle array structure |
| CN109738097A (en) * | 2019-03-12 | 2019-05-10 | 中国科学技术大学 | A kind of multifunction electronic skin and preparation method thereof, plane external force detection method |
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| CN110329986B (en) * | 2019-06-24 | 2022-07-05 | 华中科技大学 | Bionic flexible force sensor and preparation method thereof |
| CN110398259A (en) * | 2019-07-19 | 2019-11-01 | 东南大学 | The flexible sensing device and preparation method of more perceptional functions |
| CN110346078A (en) * | 2019-07-30 | 2019-10-18 | 天津大学 | Capacitive pliable pressure sensor and its preparation method and application |
| CN110491989A (en) * | 2019-08-08 | 2019-11-22 | 汕头大学 | A kind of high sensitivity flexible electronic skin and preparation method thereof |
| CN113447168A (en) * | 2020-03-24 | 2021-09-28 | 北京石墨烯研究院有限公司 | Stretchable pressure sensor array |
| CN113447168B (en) * | 2020-03-24 | 2023-04-07 | 北京石墨烯研究院有限公司 | Stretchable pressure sensor array |
| CN111811703B (en) * | 2020-07-21 | 2022-04-08 | 京东方科技集团股份有限公司 | Pressure sensor and electronic device |
| CN111811703A (en) * | 2020-07-21 | 2020-10-23 | 京东方科技集团股份有限公司 | Pressure sensor and electronic device |
| CN114076647A (en) * | 2020-08-17 | 2022-02-22 | 北京石墨烯研究院 | Flexible linear pressure sensor |
| CN112067177A (en) * | 2020-08-26 | 2020-12-11 | 上海域丰传感仪器有限公司 | Piezoresistive pressure sensor and piezoresistive pressure sensing array |
| CN112754464A (en) * | 2020-12-03 | 2021-05-07 | 东华大学 | Application of MXene/fabric-based sensor with sandwich structure in respiration monitoring |
| CN112754464B (en) * | 2020-12-03 | 2022-11-04 | 东华大学 | Application of MXene/fabric-based sensor with sandwich structure in respiration monitoring |
| CN113091968A (en) * | 2021-04-06 | 2021-07-09 | 湖北工业大学 | Flexible piezoresistive sensor with multilayer structure and preparation method thereof |
| CN113670487A (en) * | 2021-07-14 | 2021-11-19 | 西南交通大学 | Composite flexible piezoresistive sensor based on bionic multilevel structure and preparation method thereof |
| CN114777968A (en) * | 2022-04-26 | 2022-07-22 | 吉林大学 | Preparation method of multi-layer flexible pressure sensor with lotus leaf microstructure |
| CN117537699A (en) * | 2024-01-09 | 2024-02-09 | 西南交通大学 | Flexible strain sensor and preparation method thereof |
| CN117537699B (en) * | 2024-01-09 | 2024-04-12 | 西南交通大学 | Flexible strain sensor and preparation method thereof |
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