CN108426657A - A kind of multiple stage array pressure sensor of multiple field - Google Patents
A kind of multiple stage array pressure sensor of multiple field Download PDFInfo
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- CN108426657A CN108426657A CN201810129071.XA CN201810129071A CN108426657A CN 108426657 A CN108426657 A CN 108426657A CN 201810129071 A CN201810129071 A CN 201810129071A CN 108426657 A CN108426657 A CN 108426657A
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- electrode
- middle layer
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- empty space
- pressure sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a kind of multiple stage array pressure sensors of multiple field.Including mainly by bottom, lower empty space, middle layer, upper empty space and the top layer successively tightly stacked pressure sensitive unit constituted from top to bottom；The upper surface of bottom is set there are three circumferentially spaced equally distributed bottom electrode, three through-holes corresponding with three bottom electrode positions are equipped in lower empty space and upper empty space, middle layer lower surface is equipped with electrode under three middle layers corresponding with three bottom electrode positions respectively, middle layer upper surface is equipped with three middle layer top electrodes corresponding with three bottom electrode positions respectively, and top layer lower surface is equipped with three top layer electrodes corresponding with three bottom electrode positions respectively.The present invention can detect multiple pressure thresholds in the vertical direction of a sensing unit, improve detection efficiency, reduce manufacturing cost and difficulty, enhance the practicality.
Description
Technical field
The present invention relates to a kind of sensing devices, more particularly to a kind of multiple stage array pressure sensor of multiple field.
Background technology
Pliable pressure sensor is a kind of flexible electronic device for perceiving body surface amount of force, can be attached at
Various irregularly shaped object surfaces have a wide range of applications in fields such as medical treatment ＆ health, robot, biomethanics.With section
The development of technology, can pliable pressure sensor, which have both flexibility and the accurate functions such as pressure distributed intelligence that measure, becomes people
Focus of attention.
Currently, having done many research about pliable pressure sensor both at home and abroad, most of pliable pressure passes
Sensor is applied to detection continuous force range, and how to realize highly sensitive, the low hysteresis of the flexible touch sensation sensor, solution
Robustness, high reliability, high mechanical fatigue strength and the high spatial resolution of loading under environment are still a major challenge；On the contrary
, the rare pliable pressure sensing device for discrete type occur, testing principle is the conducting situation by sensor internal electrode
Pressure threshold is detected, suitable for the application scenario under measurement range need not be measured.This measurement limited-pressure point
Sensor, function is simple, manufactures and designs simply, and data analysis is easy, and can customize institute by the difference of material and concrete structure
The pressure value that need to be detected, does not need analogue-to-digital converters, can simplify its corresponding signal processing module, to accelerate to read
And processing speed, application prospect are very big.
Invention content
In order to simplify the structural design and manufacturing difficulty of sensor, acquisition of the enhancing sensor to key pressure information carries
Detection, transmission and the treatment effeciency of high transducing signal.The present invention proposes a kind of multiple stage array pressure sensor of multiple field, realizes
In the vertical direction of a pressure sensitive unit, multiple pressure threshold points are detected.
Technical solution is used by the present invention solves the above problems：
The present invention includes mainly by bottom, lower empty space, middle layer, upper empty space and top layer successively close layer from top to bottom
The folded pressure sensitive unit constituted；The upper surface of bottom is set there are three circumferentially spaced equally distributed bottom electrode, under
In empty space and upper empty space be equipped with three through-holes corresponding with three bottom electrode positions, middle layer lower surface be equipped with respectively with
Electrode under corresponding three middle layers in three bottom electrode positions, middle layer upper surface be equipped with respectively with three bottom electrode positions
Corresponding three middle layer top electrodes, top layer lower surface are equipped with three top layer electricity corresponding with three bottom electrode positions respectively
Pole.
Electrode, upper empty space and top under the through-hole of the bottom electrode, lower empty space, middle layer top electrode, middle layer
Layer electrode is respectively positioned on same axis.
The through-hole diameter of the lower empty space and upper empty space is equal to the electrode diameter on bottom, middle layer and top layer.
When the multiple stage array pressure sensor is pressurized, top layer electrode and middle layer top electrode first contact and obtain first pressure
Threshold value, contact obtains second pressure threshold value after electrode and bottom electrode under middle layer, to realize that multistage pressure detects.
The present invention utilizes the different height difference between top-bottom electrode structures real by multilayer through-hole-top-bottom electrode structures
The detection for having showed multiple pressure thresholds in the same sensing unit substantially increases detection effect in small size sensing unit
Rate.
Bottom electrode described in three connects signal via bottom electrode conducting wire series connection output circuit, and three middle layers power on
Pole powers on the logical input constant level signal of polar conductor series connection via middle layer, and electrode is powered on via middle layer under three middle layers
Input constant level signal is connected in polar conductor series connection, and three top layer electrodes connect letter via top layer electrode cable series connection output circuit
Number.
The flexible material that the bottom, lower empty space, middle layer, upper empty space and top layer is made includes but not limited to poly-
Dimethyl siloxane (PDMS).
Be made electrode and top layer electrode material therefor under the bottom electrode, middle layer top electrode, middle layer include but
It is not limited to nano silver wire membrane electrode (AgNWs).
The multiple stage array pressure sensor includes at least one pressure sensitive unit.
Through-hole on single layer of the present invention circumferentially the number of array distribution be include but not limited to 3, empty space and its logical
The number of hole-top-bottom electrode structures be include but not limited to 2 layers, pressure threshold vertically detection number is to include but not
It is limited to 2.
Apparatus of the present invention are not limited to specific implementation and measure two threshold values for measuring multiple pressure thresholds, and
It is sequentially discrete to measure multiple pressure thresholds.Being caused upper/lower electrode layer to be in contact by certain pressure by upper electrode makes
Conducting must be connected, to detect whether suffered external force reaches pressure threshold.
In use, when the pressure that sensor is subject to reaches minimum detection threshold value, the electricity of uppermost through-hole upper and lower
Pole contact generates electric signal output to constitute access.And so on when pressure increases enough, the through-hole upper and lower of lower layer
Electrode connection communicates composition access, generates new electric signal output.
The multiple stage array sensor of multiple field of the present invention is made of top layer, several middle layers and bottom, wherein in top layer
Lower surface, the upper and lower surface of middle layer and being evenly distributed in the upper surface for bottom have set corresponding electrode, apply with top layer upper surface
The increase of power, can successively deformation downwards so as to cause the contact of levels surface electrode, belong to a kind of progressive power and deformation pass
It passs, each layer connecting and disconnecting of the circuit situation is detected by outer detecting circuit to realize the digitized measurement of multiple pressure force threshold.
Advantage of the present invention is：
The configuration of the present invention is simple can detect multiple pressure thresholds in the vertical direction of a sensing unit.Compared to
The sensor of measurement range, multiple stage array sensor only detect interested pressure threshold point, to function, structure,
It is all simple many in test and manufacture, manufacturing cost and difficulty are reduced, it is difficult similarly to reduce subsequent Data Management Analysis
Degree, also can be by selecting the material of different Young'ss modulus of elasticity and setting the thickness of empty space come interested to customization customer
Pressure threshold point, increase the application range of sensor.
The present invention compared to common pressure sensor for, multiple stage array sensor can detect multiple in vertical direction
Pressure threshold can reduce the detection for realizing more pressure thresholds while spillage of material, enhance the practicality.
Description of the drawings
Fig. 1 is the axonometric drawing after multiple field multiple stage array pressure sensor of the present invention is mutually removed.
Fig. 2 is multiple field multiple stage array pressure sensor static map of the present invention.
Fig. 3 is multiple field multiple stage array pressure sensor first-stage dynamic schematic diagram of the present invention.
Fig. 4 is multiple field multiple stage array pressure sensor the two-stage dynamic schematic diagram of the present invention.
In figure：12, bottom, 13, bottom electrode conducting wire, 14, bottom electrode, 15, lower empty space, 16, middle layer top electrode
Conducting wire, 17, electrode under middle layer, 18, middle layer power on polar conductor, 19, middle layer, 20, middle layer top electrode, 21, on every sky
Layer, 22, top layer electrode cable, 23, top layer electrode, 24, top layer.
Specific implementation mode
The following further describes the present invention with reference to the drawings.
As shown in Figure 1, the present invention includes mainly by bottom 12, lower empty space 15, middle layer 19, upper empty space 21 and top layer
24 pressure sensitive units of tightly stacked composition from top to bottom successively；The upper surface of bottom 12 set there are three along the circumferential direction uniformly
The bottom electrode 14 of distribution, be equipped in lower empty space 15 and upper empty space 21 three corresponding with three 14 positions of bottom electrode it is logical
Hole, 19 lower surface of middle layer are equipped with electrode 17 under three middle layers corresponding with three 14 positions of bottom electrode respectively, middle layer
19 upper surfaces are equipped with three middle layer top electrodes 20 corresponding with three 14 positions of bottom electrode, 24 lower surface of top layer are equipped with respectively
Three top layer electrodes 23 corresponding with three 14 positions of bottom electrode respectively.
The through-hole diameter of lower empty space 15 and upper empty space 21 is equal to the electrode 20 on bottom 12, middle layer 19 and top layer 24
Diameter.
Bottom electrode 14 draws via the series connection of bottom electrode conducting wire 13 and is connected to outer detecting circuit, middle layer top electrode 20
The series connection extraction of polar conductor 18 is powered on via middle layer and is connected to outer detecting circuit, and electrode 17 is powered on via middle layer under middle layer
The series connection of polar conductor 16, which is drawn, is connected to outer detecting circuit, and top layer electrode 23 is drawn via the series connection of top layer electrode cable 22 and is connected to
Outer detecting circuit.
Specific implementation will arrange two layers of through-hole-top-bottom electrode structures, therefore can obtain two level pressure thresholds：
As shown in Fig. 2, when not applying pressure to top layer 24, do not deform.
As shown in figure 3, when applying low-force to top layer 24, because its flexible nature deforms, 23 He of top layer electrode
Middle layer top electrode 20 is in contact.
As shown in figure 4, when applying more energetically to top layer 24, because its flexible nature continues to deform, top layer electrode
23 and middle layer top electrode 20 be kept in contact, electrode 17 and bottom electrode 14 are in contact under middle layer.
In specific implementation, the multiple stage array pressure sensor of multiple field is composed using multiple pressure sensitive units.
The specific implementation process of the present invention is as follows：
When with the multiple stage array pressure sensor of multiple field, determining sensing is designed by pre-set pressure threshold
The structural parameters of device fix bottom 12 after making, and the upper surface of top layer 24 is to be contacted with the external world.Its state that do not stress
When, whole sectional view is as shown in Figure 2.Since the upper surface area of top layer 24 is small, it is believed that its upper surface uniform stressed.
When the power applied in top layer upper surface gradually increases, due to the flexible nature of top layer 24, with 21 through-hole of empty space
Corresponding top layer regions can occur to lower recess, when deformation is accumulated to a certain extent, top layer electrode 23 and middle layer top electrode
20 contacts, it may occur that deformation as shown in Figure 3 powers on polar conductor 18 by top layer electrode cable 22 and middle layer and realizes access,
To judge to receive a specific pressure threshold.
When applying in top layer upper surface when insisting on continuous increase, due to the transmission of power and deformation, it may occur that as shown in Figure 4
Deformation, at this moment, electrode 17 and bottom electrode 14 are in contact under middle layer, pass through electrode cable under middle layer 16 and bottom electrode
Conducting wire 13 realizes access, to judge to receive a higher pressure threshold.In conclusion realizing longitudinal two
The detection of pressure value.
In view of suffered power is uneven, use three sensing units in such a way that circumference array is distributed, three sensings are single
Simply by the presence of being in contact at one among member, that is, detects corresponding pressure signal, the reliability of measurement is improved with this.
Claims (7)
1. a kind of multiple stage array pressure sensor of multiple field, it is characterised in that：Including mainly by bottom (12), lower empty space
(15), middle layer (19), upper empty space (21) and top layer (24) pressure sensitive unit of tightly stacked composition from top to bottom successively；
The upper surface of bottom (12) is set there are three circumferentially spaced equally distributed bottom electrode (14), lower empty space (15) and upper
Three through-holes corresponding with three bottom electrode (14) positions are equipped in empty space (21), middle layer (19) lower surface is equipped with difference
Electrode (17) under three middle layers corresponding with three bottom electrode (14) positions, middle layer (19) upper surface are equipped with respectively with three
The corresponding three middle layer top electrodes (20) in a bottom electrode (14) position, top layer (24) lower surface be equipped with respectively with three bottoms
The corresponding three top layer electrodes (23) in electrode (14) position.
2. a kind of multiple stage array pressure sensor of multiple field according to claim 1, it is characterised in that：Under described every
Dead level (15) and the through-hole diameter of upper empty space (21) are equal to the electrode (20) on bottom (12), middle layer (19) and top layer (24)
Diameter.
3. a kind of multiple stage array pressure sensor of multiple field according to claim 1, it is characterised in that：The multistage battle array
When row pressure sensor is pressurized, top layer electrode (23) and middle layer top electrode (20) first contact and obtain first pressure threshold value, intermediate
The lower electrode (17) of layer and bottom electrode (14) contact obtain second pressure threshold value afterwards, to realize that multistage pressure detects.
4. a kind of multiple stage array pressure sensor of multiple field according to claim 1, it is characterised in that：Described in three
Bottom electrode (14) via bottom electrode conducting wire (13) series connection output circuit connect signal, three middle layer top electrodes (20) via
Middle layer powers on polar conductor (18) series connection and connects input constant level signal, and electrode (17) is via in middle layer under three middle layers
Input constant level signal is connected in electrode cable (16) series connection, and three top layer electrodes (23) are connected via top layer electrode cable (22)
Output circuit connects signal.
5. a kind of multiple stage array pressure sensor of multiple field according to claim 1, it is characterised in that：Described in being made
Bottom (12), lower empty space (15), middle layer (19), upper empty space (21) and top layer (24) flexible material include but not limited to
Dimethyl silicone polymer (PDMS).
6. a kind of multiple stage array pressure sensor of multiple field according to claim 1, it is characterised in that：Described in being made
Electrode (17) and top layer electrode (23) material therefor include but not under bottom electrode (14), middle layer top electrode (20), middle layer
It is limited to nano silver wire membrane electrode (AgNWs).
7. a kind of multiple stage array pressure sensor of multiple field according to claim 1, it is characterised in that：The multistage battle array
Row pressure sensor includes at least one pressure sensitive unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810129071.XA CN108426657A (en) | 2018-02-08 | 2018-02-08 | A kind of multiple stage array pressure sensor of multiple field |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810129071.XA CN108426657A (en) | 2018-02-08 | 2018-02-08 | A kind of multiple stage array pressure sensor of multiple field |
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| Publication Number | Publication Date |
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| CN108426657A true CN108426657A (en) | 2018-08-21 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007298428A (en) * | 2006-05-01 | 2007-11-15 | Yokohama Rubber Co Ltd:The | Pressure-sensitive sensor for pressure measurement of plastic material |
| CN102374911A (en) * | 2010-08-23 | 2012-03-14 | 清华大学 | Array type flexible force sensor |
| CN104508443A (en) * | 2012-06-06 | 2015-04-08 | Iee国际电子工程股份公司 | Pressure sensor, e.g. in sole for article of footwear |
| CN105606270A (en) * | 2016-01-19 | 2016-05-25 | 合肥工业大学 | Composite capacitor-resistor type full-flexibility touch and pressure sensor |
| CN106248264A (en) * | 2016-08-16 | 2016-12-21 | 中南大学 | A kind of communicate-type pressure drag array |
| CN106644194A (en) * | 2017-01-23 | 2017-05-10 | 珠海安润普科技有限公司 | Resistance type pressure sensor and wearable device |
| CN106644191A (en) * | 2017-01-23 | 2017-05-10 | 珠海安润普科技有限公司 | Pressure transducer and wearable device |
-
2018
- 2018-02-08 CN CN201810129071.XA patent/CN108426657A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007298428A (en) * | 2006-05-01 | 2007-11-15 | Yokohama Rubber Co Ltd:The | Pressure-sensitive sensor for pressure measurement of plastic material |
| CN102374911A (en) * | 2010-08-23 | 2012-03-14 | 清华大学 | Array type flexible force sensor |
| CN104508443A (en) * | 2012-06-06 | 2015-04-08 | Iee国际电子工程股份公司 | Pressure sensor, e.g. in sole for article of footwear |
| CN105606270A (en) * | 2016-01-19 | 2016-05-25 | 合肥工业大学 | Composite capacitor-resistor type full-flexibility touch and pressure sensor |
| CN106248264A (en) * | 2016-08-16 | 2016-12-21 | 中南大学 | A kind of communicate-type pressure drag array |
| CN106644194A (en) * | 2017-01-23 | 2017-05-10 | 珠海安润普科技有限公司 | Resistance type pressure sensor and wearable device |
| CN106644191A (en) * | 2017-01-23 | 2017-05-10 | 珠海安润普科技有限公司 | Pressure transducer and wearable device |
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Application publication date: 20180821 |
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