CN108426650B - Temperature sensing element, temperature detection device comprising same, and temperature detection method - Google Patents
Temperature sensing element, temperature detection device comprising same, and temperature detection method Download PDFInfo
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- CN108426650B CN108426650B CN201810219373.6A CN201810219373A CN108426650B CN 108426650 B CN108426650 B CN 108426650B CN 201810219373 A CN201810219373 A CN 201810219373A CN 108426650 B CN108426650 B CN 108426650B
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- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
Abstract
The invention provides a temperature sensing element, and a temperature detection device and a temperature detection method comprising the same. A temperature sensing element comprising: a first electrode; a second electrode; and an intermediate medium including at least a droplet, the intermediate medium being disposed between the first electrode and the second electrode, and the first electrode, the second electrode, and the intermediate medium constituting a capacitor, wherein a volume of the droplet changes with a change in temperature and the change in the volume of the droplet changes a capacitance value of the capacitor. The temperature of the sensing element provided by the invention realizes the sensing of the temperature by converting the change of the temperature into the change of the capacitance value.
Description
Technical Field
The invention relates to the technical field of temperature detection, in particular to a temperature sensing element, a temperature detection device comprising the same and a temperature detection method.
Background
The temperature is a physical quantity for representing the cold and hot degree of an object, is one of seven basic physical quantities in international system of units, and has close relation with human life, industrial and agricultural production and scientific research. With the continuous improvement of the scientific and technical level, the temperature detection technology is also continuously developed. There are many temperature measuring methods, which can be mainly classified into a contact temperature measuring method and a non-contact temperature measuring method. Temperature measurement methods find application in a number of fields, in some of which, for example in the biological field, temperature changes will directly affect the activity of biomolecules in the droplets, and more specifically in biochemical assays such as the Polymerase Chain Reaction (PCR), where temperature changes in the reaction droplets are critical to the outcome of the reaction.
Disclosure of Invention
An object of the present invention is to provide a temperature sensing element and a temperature detecting device including the same, a temperature detecting method, and preferably a temperature detecting method and a temperature detecting device capable of sensitively sensing a temperature change of a detection system in biochemical detection.
According to an aspect of the present invention, there is provided a temperature sensing element including: a first electrode; a second electrode; and an intermediate medium including at least a droplet, the intermediate medium being disposed between the first electrode and the second electrode, and the first electrode, the second electrode, and the intermediate medium constituting a capacitor, wherein a volume of the droplet changes with a change in temperature and the change in the volume of the droplet changes a capacitance value of the capacitor.
Preferably, the intermediate medium further comprises: a first dielectric layer disposed between the first electrode and the droplet; and/or a second layer of insulating medium disposed between the second electrode and the droplet.
According to another aspect of the present invention, there is also provided a temperature sensing element including: a microfluidic chip comprising a first electrode and a second electrode, and the first electrode, the second electrode and an intermediate medium comprising at least a droplet form a capacitor; and a droplet disposed between the first electrode and the second electrode, wherein a volume of the droplet changes with a change in temperature and the change in volume of the droplet causes a change in a capacitance value of the capacitor.
Preferably, the microfluidic chip comprises a first layer of insulating medium disposed between the first electrode and the droplet and/or a second layer of insulating medium disposed between the second electrode and the droplet.
Preferably, in the temperature sensor element according to each of the above aspects, the liquid droplet is mercury or alcohol.
Still another aspect of the present invention provides a temperature detecting apparatus, including: any of the temperature sensing elements described above; a capacitance detection circuit configured to detect a capacitance change value of the capacitor; and a temperature obtaining unit configured to obtain a temperature change value from the detected capacitance change value based on a relationship between a capacitance change value and a temperature change value stored in advance.
Preferably, the capacitance detection circuit is a micro-capacitance detection circuit.
In another aspect, the present invention provides a temperature detection method, including: providing any one of the temperature sensing elements described above; detecting a capacitance change value of the capacitor; and obtaining a temperature change value from the detected capacitance change value based on a relationship between a previously stored capacitance change value and a temperature change value.
Preferably, the detecting a capacitance change value of the capacitor includes: connecting the capacitor to a capacitance detection circuit; a capacitance change value of the capacitor is detected by a capacitance detection circuit.
Preferably, the capacitance detection circuit is a micro-capacitance detection circuit.
The invention has the beneficial effects that: the intermediate medium arranged between the first electrode and the second electrode of the temperature sensing element at least comprises a liquid drop, and the temperature sensing is realized by utilizing the characteristic that the volume of the liquid drop changes along with the temperature change, namely, the liquid drop has expansion or contraction effect along with the temperature change, so that the corresponding area of the liquid drop and the first electrode and the corresponding area of the liquid drop change along with the temperature change, and finally the capacitance value of the temperature sensing element changes, so that the temperature change is converted into the capacitance value change.
Drawings
Fig. 1 is a schematic structural view of a temperature sensing element 100 of an embodiment of the present invention, and shows a structural change of the temperature sensing element 100 according to a change in temperature T.
Fig. 2 is a schematic structural diagram of a temperature sensing element 200 according to another embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a temperature sensing element 200' according to another embodiment of the present invention.
Fig. 4 is a block diagram of a temperature detection apparatus 400 according to an embodiment of the present invention.
Fig. 5 is a schematic flow chart of a temperature detection method according to an embodiment of the present invention.
Fig. 6 is an equivalent circuit diagram of the temperature sensing element 200' in the embodiment shown in fig. 3.
Detailed Description
Various aspects and features of the disclosure are described herein with reference to the drawings. These and other characteristics of the invention will become apparent from the following description of a preferred form of embodiment, given as a non-limiting example, with reference to the accompanying drawings.
The specification may use the phrases "in one embodiment," "in another embodiment," "in yet another embodiment," or "in other embodiments," which may each refer to one or more of the same or different embodiments in accordance with the disclosure. Note that, throughout the specification, the same reference numerals denote the same or similar elements, and an unnecessary repetitive description is omitted. Furthermore, the singular reference of an element in the embodiments does not exclude the plural reference of such elements.
As is known, the capacitance calculation formula is C ═ S/d, where ∈ is the dielectric constant of the medium, S is the capacitance area, and is related to the shape and size, and d is the height of the capacitor. The inventor of the invention researches and finds that: if the liquid drop is used as an intermediate medium of the capacitor, because the liquid drop has the characteristic of volume expansion or contraction along with temperature change under normal conditions, the corresponding area S between the liquid drop and the plate of the capacitor is changed due to the change of the volume of the liquid drop when the temperature is changed, and the change of the corresponding area S causes the change of the capacitance value according to a capacitance calculation formula. The inventors have constructed the temperature sensing element of the present invention using this characteristic.
Fig. 1 is a schematic structural view of a temperature sensing element 100 of an embodiment of the present invention, and shows a structural change of the temperature sensing element 100 according to a change in temperature T. As shown in fig. 1, the temperature sensing element 100 includes: a first electrode 101, a second electrode 102, and an intermediate medium 103. The intermediate medium 103 is arranged between the first electrode 101 and the second electrode 102, and the intermediate medium 103 comprises at least a droplet 1031. When there is a potential difference between the first electrode 101 and the second electrode 102, the first electrode 101 and the second electrode 102 are not electrically connected due to the presence of the intermediate medium 103, and thus the first electrode 101, the second electrode 102, and the intermediate medium 103 constitute a capacitor.
In the embodiment of the present invention, when the intermediate medium 103 includes only the liquid droplets 1031, the liquid droplets 1031 may be implemented as an insulating liquid, such as purified water, and various types of oils, such as natural mineral oil, silicone oil, and vegetable oil.
The above structure allows the temperature sensing element 100 including the first electrode 101, the second electrode 102, and the intermediate medium 103 to have the characteristics of a variable capacitor.
Specifically, as shown in fig. 1, when the temperature T changes (as indicated by the dashed arrow), the change (e.g., expansion or contraction) in the volume of the droplet 1031 causes the corresponding area of the first and second electrodes 101 and 102 to change, i.e., the projected area of the droplet 1031 on the surfaces of the first and second electrodes 101 and 102 changes, thereby generating a change in capacitance and achieving temperature sensing.
In some embodiments of the present invention, the shapes of the first electrode 101 and the second electrode 102 are not limited to the shapes shown in the drawings, and may be plate-shaped or curved, and various shapes may be applicable as long as the intermediate medium 103 can be disposed between the first electrode 101 and the second electrode 102. The arrangement of the first electrode 101 and the second electrode 102 need not be a horizontal arrangement as defined in fig. 1, but may also be an inclined or even vertical arrangement.
In some embodiments of the present invention, the material of the liquid drop 1031 may be a liquid with a large thermal expansion coefficient, such as mercury, alcohol, etc., so that the capacitance change has a larger value for a temperature change of the same magnitude, and thus the capacitance change is more easily detected, and the sensitivity of the temperature sensing element may be improved accordingly. However, other liquids having a low thermal expansion coefficient may be used as the liquid droplets, and a capacitance detection circuit having a high capacitance detection accuracy may be used to achieve a high temperature detection accuracy. Thus, it will be understood by those skilled in the art that the materials of the droplets are not limited to those specifically enumerated herein.
In one embodiment of the present invention, when the droplet 1031 is a conductive liquid such as mercury, in order to maintain the characteristics of the capacitor of the temperature sensing element 100, a first insulating medium layer (not shown) is disposed between the droplet 1031 and the first electrode 101, or a second insulating medium layer (not shown) is disposed between the droplet 1031 and the second electrode 102, or both of the first insulating medium layer and the second insulating medium layer are disposed in the temperature sensing element 100. So that the first electrode 101 and the second electrode 102 are not in conduction even when there is a potential difference between the first electrode 101 and the second electrode 102.
In yet another embodiment of the temperature sensing element 100, a first hydrophobic layer may be further disposed between the droplet 1031 and the first insulating medium layer, or a second hydrophobic layer may be disposed between the droplet 1031 and the second insulating medium layer, or both the first hydrophobic layer and the second hydrophobic layer may be disposed in a case where the first insulating medium layer and the second insulating medium layer are disposed.
In the embodiment of fig. 1, a droplet 1031 is shown in contact with first electrode 101 and second electrode 102. However, in a variant embodiment of the temperature sensing element 100, the liquid droplet 1031 may be provided in contact with, for example, the second electrode 102 or an insulating dielectric layer on the second electrode 102, but not in contact with the first electrode 101 or an insulating dielectric layer on the first electrode 101. As a further variant of the above variant, it will be appreciated by a person skilled in the art that the liquid droplet 1031 may be provided in contact with, for example, the first electrode 101 or an insulating dielectric layer on the first electrode 101, but not in contact with the second electrode 102 or an insulating dielectric layer on the second electrode 102. Such variations are intended to fall within the scope of the claims of this application.
The first dielectric layer may be a single dielectric layer or may be composed of multiple dielectric layers, as may the second dielectric layer.
The embodiment of the invention also provides a temperature sensing element, which comprises a microfluidic chip and liquid drops. The microfluidic chip comprises a first electrode and a second electrode, and the first electrode, the second electrode and an intermediate medium at least comprising a droplet form a capacitor, and the droplet is arranged between the first electrode and the second electrode. The volume of the droplet changes with temperature and the change in volume of the droplet causes a change in the capacitance value of the capacitor.
Fig. 2 is a schematic structural diagram of a temperature sensing element 200 according to another embodiment of the present invention. As shown in fig. 2, the temperature sensing element 200 includes a microfluidic chip 201 and a droplet 202. The microfluidic chip 201 includes a first substrate 2011 and a second substrate 2012; a first electrode 2013 fixed to the first substrate 2011; a second electrode 2014 fixed to the second substrate 2012 so as to face the first electrode 2013; a first dielectric layer 2015 fixed to a side of the first electrode 2013 facing the second electrode 2014; and a second dielectric layer 2016 fixed to a side of the second electrode 2014 facing the first electrode 2013. The droplet 202 has a property of expanding or contracting in volume with a change in temperature and is provided between the first dielectric layer 2015 and the second dielectric layer 2016.
The first dielectric layer 2015 can be a dielectric layer, can be a single dielectric or can be comprised of multiple dielectrics, as can the second dielectric layer.
With this embodiment, when the temperature changes, the change (e.g., expansion or contraction) in the volume of the liquid droplet 202 causes the corresponding areas of the first electrode 2013 and the second electrode 2014 of the microfluidic chip 201 to change, i.e., the projected areas of the liquid droplet 202 on the first electrode 2013 and the second electrode 2014 change, thereby generating a change in capacitance. Thus, the microfluidic chip 201 and the droplet 202 can form a variable capacitor to function as a temperature sensor.
In another embodiment of the present invention, as shown in fig. 3, a temperature sensing element 200' is provided, which differs from the temperature sensing element 200 of the previous embodiment in that the microfluidic chip 201 further comprises a first hydrophobic layer 2017 disposed between the first dielectric layer 2015 and the droplet 202 and a second hydrophobic layer 2018 disposed between the second dielectric layer 2016 and the droplet 202.
Applying a driving voltage between the first electrode and the second electrode of the microfluidic chip (e.g. grounding one of the first electrode and the second electrode, switching the other electrode into a driving potential) can drive the droplet to a specific position in the microfluidic chip. The provision of the hydrophobic layer facilitates driving the droplet 202 within the microfluidic chip 201 to a position where a temperature measurement is desired, thereby enabling more accurate measurement of temperature changes during, for example, a chemical reaction.
Of course, the temperature change may be detected by directly dropping the droplet at a specific position in the microfluidic chip, instead of applying a driving voltage between the first substrate and the second substrate.
The droplet is preferably a liquid having a large thermal expansion coefficient such as mercury or alcohol, but a droplet (also referred to as a reaction droplet or a controlled droplet) which is handled when the microfluidic chip is normally used may be used. In addition, by applying a driving voltage between the first substrate and the second substrate of the microfluidic chip, the liquid drop can be driven to a specific position in the microfluidic chip to detect the temperature change of the specific position, which is very suitable for the requirements of biochemical reaction and the like by using the microfluidic chip in practical application.
Next, as shown in fig. 4, a temperature detection apparatus 400 according to an embodiment of the present invention is provided, including: the temperature sensing element, the capacitance detection circuit 401, and the temperature obtaining unit 402 of one of the above embodiments.
The capacitance detection circuit 401 detects a capacitance change value of the capacitor in the temperature sensor element. The temperature obtaining unit 402 obtains a temperature change value from the capacitance change value detected by the capacitance detection circuit 401 based on a relationship between a capacitance change value and a temperature change value stored in advance.
By means of this embodiment, the detection of the temperature is achieved indirectly.
The capacitance detection circuit 401 may be any type of capacitance detection circuit as long as it can detect a capacitance change value of a capacitor in the temperature sensing element.
In a preferred embodiment, a capacitance detection circuit capable of sensitively detecting a change in a capacitance change value of a capacitor in a temperature sensing element is used, for example: a micro capacitance detection circuit.
The micro-capacitance detection circuit has various implementations. Common implementations of the micro-capacitance detection circuit include: an oscillation circuit (oscillation method), a continuous time voltage reading method, a differential pulse width modulation circuit, a switched capacitor charge integration method, and the like.
As an example of the micro capacitance detection circuit, a minute capacitance may be measured using an oscillation method. The principle is as follows: the temperature sensing element is regarded as a capacitance type sensor, the temperature sensing element and an external element form an oscillating circuit, the frequency of the oscillating circuit changes along with the change of the measured capacitance, the change of the frequency is converted into the change of the amplitude through a frequency discriminator, and after the change of the amplitude is amplified, a voltage signal which is the same as the change rule of the measured capacitance can be obtained.
For example, in the paper "oscillating type micro-capacitance detection circuit [ J ] electronic test, 2011(1):50-53, shao shu et al", an oscillating type micro-capacitance detection circuit is proposed, a capacitive sensor and an external element form an oscillating circuit, an oscillating signal with frequency change is processed and converted into change of voltage amplitude, and the change of capacitance is inversely calculated after the change is acquired by a singlechip AD. The temperature sensing element of the embodiment of the invention is used as a capacitance sensor (capacitance C) in the article and is connected into a capacitance detection circuit, so that the capacitance change value of the temperature sensing element can be detected. It should be noted that this example is not intended to limit the present invention, and other types of micro capacitance detection circuits are equally applicable to the present invention.
In some embodiments, the obtained temperature change value is a desired physical quantity. While in other embodiments it is desirable to be able to obtain a final temperature value. At this time, the correspondence between the reference capacitance value and the reference temperature value may be experimentally determined in advance. When the temperature change value is obtained, the temperature value can be determined based on the relation "temperature value is the reference temperature value + temperature change value".
Next, as shown in fig. 5, a temperature detecting method according to an embodiment of the present invention is provided, including: providing a temperature sensing element of an embodiment; detecting a capacitance change value of the temperature sensing element; and obtaining a temperature change value from the detected capacitance change value based on a relationship between a previously stored capacitance change value and a temperature change value.
In another embodiment of the present invention, a method for detecting a capacitance change value of a capacitor in a temperature sensing element includes the following steps:
connecting a capacitor in the temperature sensing element to a capacitance detection circuit;
the capacitance change value of the capacitor in the temperature sensing element is detected by a capacitance detection circuit.
In some embodiments, the capacitance detection circuit is a micro-capacitance detection circuit.
In one embodiment, a method for temperature detection based on a digital microfluidic chip is provided. The chip includes upper and lower substrates. The electrode of the upper substrate is connected with a zero electrode, when the electrode of the lower substrate is provided with driving voltage, the electrode, the dielectric layer and the liquid drop arranged in the middle of the digital micro-fluidic chip form a series capacitor structure, and the size of the capacitor is in direct proportion to the dead area of the capacitor; when the temperature of the detection system changes, the liquid drops expand with heat and contract with cold, the size of the liquid drops changes, and the capacitance value of the capacitor structure is influenced, and the change of the capacitance value can be monitored by an external micro-capacitor detection circuit; based on this, can reach the purpose of temperature detection.
The temperature detection principle of the embodiment of the present invention is explained with reference to fig. 3: the digital microfluidic chip 201 has an upper substrate 2011 (i.e., a first substrate) and a lower substrate 2012 (i.e., a second substrate). When the temperature of the liquid drop 202 changes or the target component in the liquid drop undergoes biochemical reaction to absorb heat, the volume of the liquid drop slightly changes due to expansion with heat and contraction with cold, so that the capacitance value of the plate capacitor changes, the result of the change of the capacitance value is fed back to an external micro-capacitance detection circuit, a linear curve is made for the relationship between the change of the temperature value and the change of the capacitance value, when the change of the capacitance value is known, the change of the temperature value can be obtained according to the linear curve, and the detection of the temperature is indirectly realized.
As shown in fig. 6, is an equivalent circuit diagram of the temperature sensing element (digital microfluidic chip-droplet) 200 in the embodiment shown in fig. 3, the electrodes 2013, 2014, the dielectric layers 2015, 2016, the hydrophobic layers 2017, 2018 and the droplet 202 placed in the middle of the digital microfluidic chip 201 form a series capacitor structure, dielectric layers 2015 and 2016 and hydrophobic layers 2017 and 2018 are each equivalent to a capacitor, wherein the equivalent capacitance with the dielectric layers 2015, 2016 as dielectric is denoted by Ca and the equivalent capacitance with the hydrophobic layers 2017, 2018 as dielectric is denoted by Cb, the droplet 202 has a certain conductivity, a parallel capacitor Cc and resistor R are formed, which, when the droplet 202 "expands and contracts" due to temperature changes, causes a change in the droplet area, thereby causing a change in capacitance value, which can be detected by a peripheral microcapacitor detection circuit.
In the embodiment, the temperature change of the detection system can be sensed by utilizing the principle that the volume of the liquid drop is influenced by the temperature change so as to cause the change of the capacitance value; the temperature sensing element in the embodiment has a simple structure and a wide application range, and can realize trace, quick and sensitive detection.
By providing the embodiment, when the micro-fluidic chip is used for biochemical reaction, the micro-fluidic chip can be used for monitoring the temperature change in real time, other types of temperature detection devices are not needed, the implementation scheme of temperature detection is simplified, the temperature detection is facilitated, the functions of the micro-fluidic chip are expanded, and the temperature detection is directly performed in the micro-fluidic chip, so that the detection result is more reliable and sensitive.
In another variant embodiment, the method for detecting temperature based on a digital microfluidic chip may further include the steps of: the droplet is driven to a specific position in the microfluidic chip by applying a driving voltage between the first substrate and the second substrate of the microfluidic chip. And after the liquid drop reaches a specific position in the microfluidic chip, detecting the capacitance change value of the capacitor. This embodiment can detect temperature changes at specific locations in the microfluidic chip, and therefore temperature detection is more accurate.
The above embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and the scope of the present invention is defined by the claims. Various modifications and equivalents may be made by those skilled in the art within the spirit and scope of the present invention, and such modifications and equivalents should also be considered as falling within the scope of the present invention.
Claims (8)
1. A temperature sensing element, comprising:
a first electrode;
the second electrode is an electrode array consisting of a plurality of electrodes; and
an intermediate medium comprising at least a droplet of an electrically conductive liquid, the intermediate medium being disposed between the first electrode and the second electrode, and the first electrode, the second electrode and the intermediate medium constituting a capacitor, wherein,
the volume of the drop changes with temperature and the change in volume of the drop causes a change in the capacitance value of the same capacitor; wherein the content of the first and second substances,
the intermediate medium further comprises:
a first dielectric layer disposed between the first electrode and the droplet; and the combination of (a) and (b),
a second insulating medium layer disposed between the second electrode and the droplet;
a first hydrophobic layer disposed between the droplet and the first insulating medium layer;
and the second hydrophobic layer is arranged between the liquid drop and the second insulating medium layer.
2. A temperature sensing element, comprising:
the microfluidic chip comprises a first electrode and a second electrode, wherein the second electrode is an electrode array formed by a plurality of electrodes; and
a droplet of a conductive liquid, the droplet disposed between the first electrode and the second electrode, wherein,
the first electrode, the second electrode and the intermediate medium at least comprising the liquid drop form a capacitor, the volume of the liquid drop changes along with the temperature change, and the change of the volume of the liquid drop causes the capacitance value of the same capacitor to change; wherein the content of the first and second substances,
the micro-fluidic chip comprises a first insulating medium layer arranged between the first electrode and the liquid drop and a second insulating medium layer arranged between the second electrode and the liquid drop; the device also comprises a first hydrophobic layer arranged between the liquid drop and the first insulating medium layer and a second hydrophobic layer arranged between the liquid drop and the second insulating medium layer.
3. A temperature sensing element according to claim 1 or 2, wherein
The droplets are mercury.
4. A temperature detection device, comprising:
a temperature sensing element according to any one of claims 1 to 3;
a capacitance detection circuit configured to detect a capacitance change value of the capacitor; and
a temperature obtaining unit configured to obtain a temperature change value from the detected capacitance change value based on a relationship between a capacitance change value and a temperature change value stored in advance.
5. The apparatus of claim 4, wherein
The capacitance detection circuit is a micro-capacitance detection circuit.
6. A method of detecting temperature, comprising:
providing a temperature sensing element according to any one of claims 1 to 3;
detecting a capacitance change value of the capacitor; and
and obtaining a temperature change value according to the detected capacitance change value based on a relationship between the capacitance change value and the temperature change value stored in advance.
7. The method of claim 6, wherein the detecting a capacitance change value of the capacitor comprises:
switching the capacitor into a capacitance detection circuit;
and detecting the capacitance change value of the capacitor by using the capacitance detection circuit.
8. The method of claim 7, wherein
The capacitance detection circuit is a micro-capacitance detection circuit.
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