CN108414786A - A kind of two-wire photodiode array device and particle velocity measure method - Google Patents
A kind of two-wire photodiode array device and particle velocity measure method Download PDFInfo
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- CN108414786A CN108414786A CN201810078235.0A CN201810078235A CN108414786A CN 108414786 A CN108414786 A CN 108414786A CN 201810078235 A CN201810078235 A CN 201810078235A CN 108414786 A CN108414786 A CN 108414786A
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- 239000002245 particle Substances 0.000 title claims abstract description 71
- 238000000034 method Methods 0.000 title claims description 16
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 230000005622 photoelectricity Effects 0.000 claims description 8
- 238000003491 array Methods 0.000 abstract description 9
- 230000003287 optical effect Effects 0.000 description 19
- 238000012545 processing Methods 0.000 description 11
- 238000003384 imaging method Methods 0.000 description 9
- 230000003321 amplification Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000003199 nucleic acid amplification method Methods 0.000 description 7
- 230000006872 improvement Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000012634 optical imaging Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
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- 230000005611 electricity Effects 0.000 description 1
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- 238000012544 monitoring process Methods 0.000 description 1
- 230000005433 particle physics related processes and functions Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/64—Devices characterised by the determination of the time taken to traverse a fixed distance
- G01P3/68—Devices characterised by the determination of the time taken to traverse a fixed distance using optical means, i.e. using infrared, visible, or ultraviolet light
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
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- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
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Abstract
The invention discloses a kind of two-wire photodiode array device, the two-wire photodiode array device is that the identical photodiode array unit of two row specifications and characteristics is encapsulated out on one piece of photo electric sensitive element；The two-wire photodiode array includes the first photodiode array unit disposed in parallel and the second photodiode array unit, for realizing the measurement to particle rapidity.The present invention is greatly reduced the distance of two groups of photodiode arrays, can more accurately be measured particle rapidity by integrated two groups of the photodiode array on single photosensitive element.
Description
Technical field
The present invention relates to particle measurement fields, and in particular to a kind of two-wire photodiode array device and particle rapidity
Measurement method.
Background technology
There is all sizes and variform particle in nature, such as water dust, raindrop and ice crystal in cloud, sea
Seawater drop on ocean, the volcanic ash etc. of Sand-dust aerosols and volcanic eruption in sandstorm.Size, shape to these particles
Have great importance to the development and change process for understanding corresponding natural phenomena with accurately measuring for physical parameters such as terminal-velocitys.
One of the main method of particle measurement is optical measurement method at present, be particularly may be divided into based on optical scattering
Measuring technique and measuring technique based on optical imagery.Measuring technique based on optical scattering can measure the size of particle, but
It is that can not obtain the concrete shape information of particle, and the particle size range measured is limited.The measuring technique of optical imagery can not only
Enough measure the size of particle, additionally it is possible to which the image for recording particle, the shape that particle can be obtained according to the image of particle are believed
Breath.
The particle measurement technology of optical imagery mainly has particle imaging measuring device based on single line battle array and is based on CCD phases
The particle imaging measuring device of machine.Particle imaging measuring device based on CCD camera can carry out the size and shape of particle
Accurate imaging, but particle rapidity can not be measured；In addition, CCD camera limits it since its framing rate is limited
In the application of high density high speed scene.Particle imaging measuring device based on single line battle array, can to particle size, shape and
Speed measures, but since the sample rate of its particle picture is prefabricated, can not be matched, be led with the speed of particle
Cause the particle picture measured by it that prodigious deviation can occur, this also highly impacts it and measures the standard of particle physics parameter
True property.Also there is the measurement for carrying out particle rapidity using two single line battle arrays at present, but utilizes the measurement particle speed of two single line battle arrays
When spending, due to element itself limitation so that the distance of two linear arrays farther out, when measurement, is highly prone to external environment, such as wind
Influence, in addition, separation component can deposit error when mounted, lead to the limited accuracy of particle velocity measure, precision
It is not high.
Invention content
It is an object of the invention to overcome current Optical imaging measurement technology in precision present on particle velocity measure
Not high defect devises a kind of two-wire photodiode array device, which can not only be imaged particle, also
The speed of particle can effectively be measured.
To achieve the goals above, the present invention provides a kind of two-wire photodiode array device, the two-wire photoelectricity
Diode array device is that the identical photodiode array of two row specifications and characteristics is encapsulated out on one piece of photo electric sensitive element
Unit；The two-wire photodiode array includes the first photodiode array unit disposed in parallel and the second photoelectricity two
Pole pipe array element, for realizing the measurement to particle diameter and its speed.
As a kind of improvement of above-mentioned apparatus, the photodiode array unit is made of N number of photodiode；Its
In, 32≤N≤512.
As a kind of improvement of above-mentioned apparatus, the light-receiving surface of the photodiode is square, size dimension range
It is 25 μm~200 μm.
As a kind of improvement of above-mentioned apparatus, the first photodiode array unit and the second photodiode battle array
The value range of the distance s of column unit is 1mm~10mm.
Based on above-mentioned two-wire photodiode array device, the present invention also provides a kind of particle velocity measure method,
The method includes：When particle is by two-wire photodiode array device, obtains and pass through the first photodiode array list
The time difference of member and the second photodiode array unit, further according to the first photodiode array unit and the second light
The distance s of electric diode array element, calculates the speed of particle.
As a kind of improvement of the above method, the method specifically includes：
It, should when first passing through the first photodiode array unit when there is laser beam of the particle Jing Guo light source output
Unit can export a pulse indication signal to fpga chip, and fpga chip can record the time for receiving the pulse at this time
t1；When particle continues to fly, when reaching the second photodiode array unit, the unit export a pulse indication signal to
The moment can be denoted as time t2 by fpga chip, fpga chip；The speed v of particle can be obtained after being computed：
Advantage of the invention is that：
The present invention greatly reduces two groups of photoelectricity by integrated two groups of the photodiode array on single photosensitive element
The distance of diode array can more accurately measure particle rapidity.
Description of the drawings
Fig. 1 is the schematic diagram of the measuring device of the present invention；
Fig. 2 is the schematic diagram that tests the speed of apparatus of the present invention；
Fig. 3 is the schematic diagram of the measuring device of the present invention；
Fig. 4 is the schematic diagram of the optical system of the present invention；
Fig. 5 is the schematic diagram of the optical lens group of the equal proportion of the optical imagery module of the present invention；
Fig. 6 is the schematic diagram of the optical lens group of 4 times of the amplification of the optical imagery module of the present invention；
Fig. 7 is the schematic diagram of the analog signal processing of the present invention.
Specific implementation mode
The present invention is described in detail in the following with reference to the drawings and specific embodiments.
The measuring principle of measuring device of the particle based on twin-line array of the present invention is：Utilize a branch of collimation, light distribution
More uniform laser after optical imaging system direct irradiation on the photosensitive element with two row photodiode arrays,
Two row photodiode array parallelly distribute ons, distance are fixed.When have particle pass through laser beam area when can block laser beam simultaneously
Through optical system imaging on the photosensitive element with two row photodiode arrays, with certain two row photoelectricity two of frequency pair
Pole pipe array is carried out at the same time scanning, after the signal after scanning is handled using subsequent circuit, selects any light battle array signal
Complete particle picture can be obtained by being combined, as shown in Figure 1.In addition, particle has when passing through two photodiode arrays
Have that the regular hour is poor, and the distance of two photodiode arrays is fixed, as shown in Fig. 2, therefore by measuring this
Time difference can obtain the speed that particle passes through instrument sample region, as shown in formula (1)：
As shown in figure 3, a kind of particle measurement device based on twin-line array, described device includes optical system, two-wire photoelectricity
Diode array, photoelectric signal collection processing circuit and data processing and display module.
As shown in figure 4, the optical system includes：Light source, laser beam shaping module and image optics module；It is described
Light source is the semiconductor laser that a wavelength is 660nm, after optical shaping, one collimation of laser output, light intensity point
The uniform circular laser beam of cloth, the imaged optical module direct irradiation of the light beam is on two-wire photodiode array.
Wherein, the light source is the semiconductor laser that a wavelength is 660nm, and one collimation of output, light distribution are uniform
Circular laser beam；The laser beam shaping module is a lens, for collimating the laser beam of semiconductor laser
For a parallel laser beam；The optical imagery module uses the optical imaging concept of Kepler telescope, defeated from laser
Go out to the convex lens by choosing suitable parameter in the light path of detector element receiving plane so as to sample district center, i.e., two visit
Test arm intermediate point is object plane, and object on it can be clearly imaged in the plane using detector receiving plane as image planes,
And imaging is undistorted.It is fixed in entire light path, by configuring the lens of different parameters, may be implemented to object
The imaging of different resolution.In practical application, the lens combination of two sets of different parameters can be selected, is realized respectively to particle
Equal proportion imaging and 4 times amplification be imaged.
The size of particle, the parameters such as shape can be got according to particle picture.
As shown in figure 5, the form that the optical imagery module is combined using convex lens and concavees lens, convex lens realize
It reduces, concavees lens realize amplification, and the ratio of last image and particle size is 1:1.
As shown in fig. 6, the optical imagery module uses the assembled scheme of biconvex lens, first convex lens realization etc.
Ratio enlargement, second convex lens realize 4 times of enlargement ratios.
The photoelectric signal collection processing circuit includes：Analog signal processing and FPGA control circuit；The two-wire
Photodiode array exports a current signal proportional to laser intensity, and the current signal is by front end signal conditioning electricity
Lu Houhui is converted to the binary signal that can be directly acquired by FPGA control circuit, which is handled through FPGA control circuit
It can be compressed afterwards with certain data format, by gigabit Ethernet mouth, compressed data can be uploaded to data processing
And display module is handled, shown and is stored.The data processing and display module are run on host computer.
The analog signal processing is mainly that the faint transient signal generated to photodiode array carries out soon
Fast response processing, and it is supplied to one binary signal of FPGA control circuit of rear end.
As shown in fig. 7, the analog signal processing includes：Transimpedance amplifier U1, rear class signal amplification circuit
U2, partial pressure emitter following circuit U 3 and comparison circuit U4.
Wherein, the Transimpedance amplifier U1 is used to the current signal that photodiode exports being converted to voltage signal；
The rear class signal amplification circuit U2 is for the voltage signal of the output of Transimpedance amplifier U1 to be amplified, after meeting
Continuous processing needs；The partial pressure emitter following circuit U 3 is used to provide a threshold reference potential being compared for comparison circuit U4；
The comparison circuit U4 for being compared to applied signal voltage, output voltage only there are two types of possible state, high level or
Person's low level indicates low level if indicating high level with 1 with 0, then whether the output of comparison circuit U4 just goes out with particle
The state now blocked is mapped.In the present embodiment, when laser directly shines, light intensity that two-wire photodiode array receives
Threshold voltage of the half of the voltage value of generation as the sensor tributary unit comparison circuit, i.e., with two-wire photodiode
Array received to laser intensity be weakened more than half when indicate particle there is event.
The FPGA control circuit selects core cells of the fpga chip EP2C35F672C6N as entire circuit, and complete
At the high-speed computations such as particle terminal-velocity and particle picture data compression coding.The configuration of configuration module PROM EPCS16 storage systems
Information, ADC chips TLC549 are used to read in the working condition of instrument, and each 64bits information of two linear arrays is through exclusion level conversion
After sequentially input fpga chip, be acquired by fpga chip.When there is particle to occur, described device can be to two-wire photoelectricity two
The particle moment occurs for the first time in pole pipe array to be done operation and calculates the terminal-velocity of particle, and is updated sample rate and carried out to particle picture
Acquisition, and collected particle picture data are subjected to compression storage, three road monitoring voltage values can be acquired after being filled with a frame,
It is transmitted toward host computer in a manner of network transmission together with image data.
The two-wire photodiode array is complete to encapsulate out two row specifications and characteristics on one piece of photo electric sensitive element
Consistent photodiode array unit, including the first photodiode array unit and the second photodiode array unit；
The distance s of two photodiode array units is fixed, and the value range of s is 1mm~10mm, the photodiode array
Unit is made of N number of photodiode；Wherein, 32≤N≤512.The light-receiving surface of the photodiode is square, side
Long size range is 25 μm~200 μm；When the amplification factor of image optics module is 1, the resolution ratio Res of instrument is 100
μm, the measurement range of instrument is 100~6400 μm at this time；When the amplification factor of image optics module is 4, the resolution of instrument
Rate Res is 25 μm, ranging from 25~1600 μm of the measurement particle size of instrument.When particle from top to bottom passes through the first photoelectricity two
When pole pipe array element, which can export a pulse signal to fpga chip, when fpga chip can be by this because of light intensity reduction
It engraves as time t1；When particle continues to fall, and reaches the second photodiode array unit, which can equally export one
The moment can be denoted as time t2 by a pulse indication signal to fpga chip, fpga chip.
It should be noted last that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting.Although ginseng
It is described the invention in detail according to embodiment, it will be understood by those of ordinary skill in the art that, to the technical side of the present invention
Case is modified or replaced equivalently, and without departure from the spirit and scope of technical solution of the present invention, should all be covered in the present invention
Right in.
Claims (6)
1. a kind of two-wire photodiode array device, which is characterized in that the two-wire photodiode array device is one
The identical photodiode array unit of two row specifications and characteristics is encapsulated out on block photo electric sensitive element；Two pole of two-wire photoelectricity
Pipe array includes the first photodiode array unit disposed in parallel and the second photodiode array unit, for realizing right
The measurement of particle rapidity.
2. two-wire photodiode array device according to claim 1, which is characterized in that the photodiode array
Unit is made of N number of photodiode, wherein 32≤N≤512.
3. two-wire photodiode array device according to claim 2, which is characterized in that the photodiode by
Smooth surface is square, ranging from 25 μm~200 μm of size dimension.
4. two-wire photodiode array device according to claim 2, which is characterized in that first photodiode
The value range of the distance s of array element and the second photodiode array unit is 1mm~10mm.
5. a kind of particle velocity measure side that the two-wire photodiode array device based on described in one of claim 1-4 is realized
Method, the method includes：When particle is by two-wire photodiode array device, obtains and pass through the first photodiode array
The time difference of unit and the second photodiode array unit, further according to the first photodiode array unit and the second light
The distance s of electric diode array element, calculates the speed of particle.
6. particle velocity measure method according to claim 5, which is characterized in that the method specifically includes：
When there is laser beam of the particle Jing Guo light source output, when first passing through the first photodiode array unit, the unit
A pulse indication signal can be exported to fpga chip, fpga chip can record the time t1 for receiving the pulse at this time；When
Particle continues to fly, and when reaching the second photodiode array unit, which exports a pulse indication signal and give FPGA cores
The moment can be denoted as time t2 by piece, fpga chip；The speed v of particle can be obtained after being computed：
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810078235.0A CN108414786B (en) | 2018-01-26 | 2018-01-26 | Double-line photodiode array device and particle speed measuring method |
| FI20205820A FI130492B (en) | 2018-01-26 | 2018-02-11 | Dual line diode array device and measurement method and measurement device for particle velocity |
| PCT/CN2018/076211 WO2019144443A1 (en) | 2018-01-26 | 2018-02-11 | Dual wire diode array device and measurement method and measurement device for particle velocity |
| US16/960,900 US11828905B2 (en) | 2018-01-26 | 2018-02-11 | Dual line diode array device and measurement method and measurement device for particle velocity |
Applications Claiming Priority (1)
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|---|---|---|---|
| CN201810078235.0A CN108414786B (en) | 2018-01-26 | 2018-01-26 | Double-line photodiode array device and particle speed measuring method |
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| CN108414786B CN108414786B (en) | 2020-03-27 |
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Cited By (1)
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| CN110174347A (en) * | 2019-05-28 | 2019-08-27 | 中国科学院大气物理研究所 | The broken particles recognition methods of the arrival time interval threshold of time-varying during a kind of airborne measurement |
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