CN108406574A - A kind of chemical mechanical polishing device - Google Patents
A kind of chemical mechanical polishing device Download PDFInfo
- Publication number
- CN108406574A CN108406574A CN201810469877.3A CN201810469877A CN108406574A CN 108406574 A CN108406574 A CN 108406574A CN 201810469877 A CN201810469877 A CN 201810469877A CN 108406574 A CN108406574 A CN 108406574A
- Authority
- CN
- China
- Prior art keywords
- type pipe
- fixedly connected
- storage box
- mechanical polishing
- chemical mechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention discloses a kind of chemical mechanical polishing devices, belong to grinding device field, a kind of chemical mechanical polishing device, including storage box, the upper end of the storage box offers big circular groove, small cylindrical tank and L-type slot, and big circular groove, small cylindrical tank and L-type slot are in angular distribution, it is fixedly connected with electric expansion column in the big circular groove, the upper end of the electric expansion column is rotatably connected to column spinner, the upper end of the column spinner is fixedly connected with grinding table, it is placed with milling bar on the grinding table, the storage box outer end offers through-hole, it is inserted with positioning pin in the through-hole, one end of L-type pipe is hinged on the positioning pin, the inner end of the L-type pipe is connected with fluid reservoir, the upper end of the fluid reservoir is fixedly connected with liquid pump, the threaded upper ends of the liquid pump are connected with elastic hose, the right end of the liquid pump is connected with liquid valve door.It may be implemented to store in each section device after grinding.
Description
Technical field
The present invention relates to grinding device fields, more specifically to a kind of chemical mechanical polishing device.
Background technology
In wafer manufacture, with the diminution of the upgrading of process technique, conducting wire and grid size, photoetching technique is to crystal column surface
Planarization requirement it is higher and higher, IBM Corporation introduced in development CMOS products in 1985, and was successfully applied in nineteen ninety
In the DRAM productions of 64MB.After nineteen ninety-five, CMP technique is developed rapidly, and is widely used in semiconductor industry.Chemical machine
Tool grinding, which is also known as, to be chemically-mechanicapolish polished, and principle is that chemical attack effect and mechanical removal act on the processing technology being combined,
It is the technology that surface global planarization uniquely may be implemented in current mechanical processing.
But since mechanical lapping equipment used at present is not an independent individual, made with several devices
With just with being manually placed in box or on desktop after having used, easy by one of those or several loss, now offer is a kind of
Chemical mechanical polishing device, it may be implemented to store in each section device after grinding, each portion after effective solution grinding
The storage problem of separating device.
Invention content
1. technical problems to be solved
For problems of the prior art, the purpose of the present invention is to provide a kind of chemical mechanical polishing device, it can be with
Each section device after grinding is stored in realization.
2. technical solution
To solve the above problems, the present invention adopts the following technical scheme that.
A kind of chemical mechanical polishing device, including storage box, the upper end of the storage box offer big circular groove, small cylindrical tank and
L-type slot, and big circular groove, small cylindrical tank and L-type slot are in angular distribution, and electric expansion column is fixedly connected in the big circular groove, it is described
The upper end of electric expansion column is rotatably connected to column spinner, and the upper end of the column spinner is fixedly connected with grinding table, the grinding table
On be placed with milling bar, the storage box outer end offers through-hole, and positioning pin is inserted in the through-hole, is cut with scissors on the positioning pin
It is connected to one end of L-type pipe, the inner end of the L-type pipe is connected with fluid reservoir, and the upper end of the fluid reservoir is fixedly connected with liquid pump,
The threaded upper ends of the liquid pump are connected with elastic hose, and the right end of the liquid pump is connected with liquid valve door, the upper end of the liquid pump
It is fixedly connected with fixed plate, and fixed plate is located on the left of elastic hose, it is horizontal between the fixed plate and the inner wall of L-type pipe to connect
Two pairs of cross bars are connected to, the cross bar slidably connects the same slide plate, and slide plate is located on the right side of elastic hose, in the slide plate
Portion opens up fluted, and the outer end of the L-type pipe offers threaded hole, and the threaded hole internal thread is connected with threaded rod, the spiral shell
The right end of rasp bar is rotatably connected to turntable, and the left end of the threaded rod is inserted in a groove.
Preferably, hinge connection has box cover, box cover to prevent thing in box from losing on the storage box, the box cover lower face
It is fixedly connected with protective plate, inner-box device is protected not damage.
Preferably, the threaded one end of the remotely located pin of the elastic hose is connected with liquid outlet, and the liquid outlet is located at L
The outside of type pipe, and liquid outlet diameter is more than elastic hose, and lapping liquid is facilitated to drip.
Preferably, one end of inlet is fixedly connected on the fluid reservoir, and the other end of inlet runs through L-type pipe
Tube wall is threadedly coupled with flow container lid, is filled after facilitating lapping liquid to be finished.
3. advantageous effect
Compared with the prior art, the advantage of the invention is that：
（1）This programme may be implemented to store in each section device after grinding.
（2）Hinge connection has box cover, box cover to prevent thing in box from losing on storage box, and box cover lower face is fixedly connected with anti-
Backplate protects inner-box device not damage.
（3）The threaded one end of the remotely located pin of elastic hose is connected with liquid outlet, and liquid outlet is located at the outside of L-type pipe, and
Liquid outlet diameter is more than elastic hose, and lapping liquid is facilitated to drip.
（4）One end of inlet is fixedly connected on fluid reservoir, and the other end of inlet runs through L-type tube wall and liquid
Cover is threadedly coupled, and is filled after facilitating lapping liquid to be finished.
Description of the drawings
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the positive structure diagram of the present invention；
Fig. 3 is the schematic enlarged-scale view at A of the present invention.
Figure label explanation：
1 storage box, 2 grinding tables, 3 electric expansion columns, 4 milling bars, 5 column spinners, 6 big circular grooves, 61 small cylindrical tanks, 62 L-type slots, 7 L
Type pipe, 8 positioning pins, 9 fluid reservoirs, 10 elastic hoses, 11 turntables, 12 slide plates, 13 cross bars, 14 fixed plates, 15 threaded rods, 16 go out liquid
Valve, 17 liquid pumps.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention；Technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes；Obviously；Described embodiments are only a part of the embodiments of the present invention；Instead of all the embodiments, it is based on
Embodiment in the present invention；It is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment；It shall fall within the protection scope of the present invention.
Embodiment 1：
Please refer to Fig.1-3, a kind of chemical mechanical polishing device, including storage box 1, hinge connection has box cover, box cover on storage box 1
Lower face is fixedly connected with protective plate, and the upper end of storage box 1 offers big circular groove 6, small cylindrical tank 61 and L-type slot 62, and big circular groove
6, small cylindrical tank 61 and L-type slot 62 are in angular distribution, are fixedly connected with electric expansion column 3 in big circular groove 6, electric expansion column 3 it is upper
End is rotatably connected to column spinner 5, and the upper end of column spinner 5 is fixedly connected with grinding table 2, milling bar 4 is placed on grinding table 2, receives
1 outer end of case offers through-hole, and positioning pin 8 is inserted in through-hole, and one end of L-type pipe 7, L-type pipe 7 are hinged on positioning pin 8
Inner end be connected with fluid reservoir 9, the upper end of fluid reservoir 9 is fixedly connected with liquid pump 17, and the threaded upper ends connection of liquid pump 17 is flexible
The right end of hose 10, liquid pump 17 is connected with liquid valve door 16, and the threaded one end of 10 remotely located pin 8 of elastic hose is connected with out liquid
Mouthful, liquid outlet is located at the outside of L-type pipe 7, and liquid outlet diameter is more than elastic hose 10, and lapping liquid is facilitated to drip, liquid pump 17
Upper end is fixedly connected with fixed plate 14, and fixed plate 14 is respectively positioned on 10 left side of elastic hose, the inner wall of fixed plate 14 and L-type pipe 7
Between horizontal connection have two pairs of cross bars 13, cross bar 13 slidably connects the same slide plate 12, and slide plate 12 is located at elastic hose
10 right sides, the middle part of slide plate 12 open up fluted, and the outer end of L-type pipe 7 offers threaded hole, and threaded hole internal thread is connected with screw thread
The right end of bar 15, threaded rod 15 is rotatably connected to turntable 11, and the left end of threaded rod 15 is inserted in a groove, fixed on fluid reservoir 9 to connect
It is connected to one end of inlet, and the other end of inlet is threadedly coupled through 7 tube wall of L-type pipe with flow container lid 9, facilitates lapping liquid
It is filled after being finished, may be implemented to store in each section device after grinding.
In use, opening liquid valve door 16, the outflow of lapping liquid is controlled, rotates turntable 11, the screw thread being connected with turntable 11
Bar 15 can also be rotated and can also be moved to horizontal direction, and threaded rod 15 pushes slide plate 12 and moved to horizontal direction, 12 He of slide plate
Elastic hose 10 between fixed plate 14 will be extruded, to change liquid outlet quantity by squeezing the difference of degree, after use,
User can be such that grinding table 2 drops in big circular groove 6 to adjust electric expansion column 3 in observation, and milling bar 4 is solid from grinding
It removes and is placed in small cylindrical tank 61 on grinding table 2 between fixed board 14, then rotating L-type pipe 7 makes it be placed in L-type slot 62,
It finally covers box cover and completes storage work.
It is described above；It is merely preferred embodiments of the present invention；But scope of protection of the present invention is not limited thereto；
Any one skilled in the art is in the technical scope disclosed by the present invention；According to the technique and scheme of the present invention and its
It improves design and is subject to equivalent substitution or change；Should all it cover within the scope of the present invention.
Claims (4)
1. a kind of chemical mechanical polishing device, including storage box（1）, it is characterised in that：The storage box（1）Upper end offer
Big circular groove（6）, small cylindrical tank（61）With L-type slot（62）, and big circular groove（6）, small cylindrical tank（61）With L-type slot（62）In triangle point
Cloth, the big circular groove（6）Inside it is fixedly connected with electric expansion column（3）, the electric expansion column（3）Upper end be rotatably connected to rotation
Rotary column（5）, the column spinner（5）Upper end be fixedly connected with grinding table（2）, the grinding table（2）On be placed with milling bar
（4）, the storage box（1）Outer end offers through-hole, and positioning pin is inserted in the through-hole（8）, the positioning pin（8）It is upper hinged
There is L-type pipe（7）One end, the L-type pipe（7）Inner end be connected with fluid reservoir（9）, the fluid reservoir（9）Upper end fix
It is connected with liquid pump（17）, the liquid pump（17）Threaded upper ends be connected with elastic hose（10）, the liquid pump（17）Right end connect
It is connected to liquid valve door（16）, the liquid pump（17）Upper end be fixedly connected with fixed plate（14）, and fixed plate（14）Positioned at elasticity
Hose（10）Left side, the fixed plate（14）With L-type pipe（7）Inner wall between horizontal connection have two pairs of cross bars（13）, the cross
Bar（13）Slidably connect the same slide plate（12）, and slide plate（12）Positioned at elastic hose（10）Right side, the slide plate（12）
Middle part opens up fluted, the L-type pipe（7）Outer end offer threaded hole, the threaded hole internal thread is connected with threaded rod
（15）, the threaded rod（15）Right end be rotatably connected to turntable（11）, the threaded rod（15）Left end insert in a groove.
2. a kind of chemical mechanical polishing device according to claim 1, it is characterised in that：The storage box（1）Upper hinge
It is connected with box cover, the box cover lower face is fixedly connected with protective plate.
3. a kind of chemical mechanical polishing device according to claim 1, it is characterised in that：The elastic hose（10）It is separate
Positioning pin（8）Threaded one end be connected with liquid outlet, the liquid outlet is located at L-type pipe（7）Outside, and liquid outlet diameter is big
In elastic hose（10）.
4. a kind of chemical mechanical polishing device according to claim 1, it is characterised in that：The fluid reservoir（9）Upper fixation
It is connected with one end of inlet, and the other end of inlet runs through L-type pipe（7）Tube wall is threadedly coupled with flow container lid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810469877.3A CN108406574B (en) | 2018-05-16 | 2018-05-16 | Chemical mechanical polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810469877.3A CN108406574B (en) | 2018-05-16 | 2018-05-16 | Chemical mechanical polishing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108406574A true CN108406574A (en) | 2018-08-17 |
| CN108406574B CN108406574B (en) | 2023-05-30 |
Family
ID=63139702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810469877.3A Active CN108406574B (en) | 2018-05-16 | 2018-05-16 | Chemical mechanical polishing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108406574B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001351884A (en) * | 2000-06-05 | 2001-12-21 | Okamoto Machine Tool Works Ltd | Chemical mechanical polishing apparatus for substrate |
| CN204195518U (en) * | 2014-10-16 | 2015-03-11 | 中芯国际集成电路制造(北京)有限公司 | A kind of lapping device |
| CN107030589A (en) * | 2017-03-14 | 2017-08-11 | 黄河科技学院 | A kind of chemical-mechanical grinding device |
| CN107671710A (en) * | 2017-10-27 | 2018-02-09 | 隗阳 | A kind of chemical mechanical polishing device |
| CN207171777U (en) * | 2016-03-08 | 2018-04-03 | 凯斯科技股份有限公司 | Chemical mechanical polishing device |
| CN208276711U (en) * | 2018-05-16 | 2018-12-25 | 贵州大学 | A kind of chemical mechanical polishing device |
-
2018
- 2018-05-16 CN CN201810469877.3A patent/CN108406574B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001351884A (en) * | 2000-06-05 | 2001-12-21 | Okamoto Machine Tool Works Ltd | Chemical mechanical polishing apparatus for substrate |
| CN204195518U (en) * | 2014-10-16 | 2015-03-11 | 中芯国际集成电路制造(北京)有限公司 | A kind of lapping device |
| CN207171777U (en) * | 2016-03-08 | 2018-04-03 | 凯斯科技股份有限公司 | Chemical mechanical polishing device |
| CN107030589A (en) * | 2017-03-14 | 2017-08-11 | 黄河科技学院 | A kind of chemical-mechanical grinding device |
| CN107671710A (en) * | 2017-10-27 | 2018-02-09 | 隗阳 | A kind of chemical mechanical polishing device |
| CN208276711U (en) * | 2018-05-16 | 2018-12-25 | 贵州大学 | A kind of chemical mechanical polishing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108406574B (en) | 2023-05-30 |
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