CN108393103A - A kind of achievable drop size does not depend on the micro-fluidic chip of flow - Google Patents
A kind of achievable drop size does not depend on the micro-fluidic chip of flow Download PDFInfo
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- CN108393103A CN108393103A CN201810176538.6A CN201810176538A CN108393103A CN 108393103 A CN108393103 A CN 108393103A CN 201810176538 A CN201810176538 A CN 201810176538A CN 108393103 A CN108393103 A CN 108393103A
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- drop
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
- B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
Abstract
The invention discloses the micro-fluidic chips that a kind of achievable drop size does not depend on flow, belong to micro fluidic chip technical field.The micro-fluidic chip protrudes the influence of interfacial tension and geometric configuration to drop formation, reduces dependence of the drop size to speed.The micro-fluidic chip includes upper channel structure, middle layer and lower channel structure.Upper channel is made of discrete phase channel, continuous phase channel, drop formation chamber, drop observation chamber connection；Test number (TN) is reduced using field mouthful method simultaneously, determines the optimal geometric parameter structure of drop formation chamber.This chip enables drop stable homogeneous to generate, and does not depend on the variation of two phase flow, contributes to the driving limitation for breaking through drop formation, expands the velocity interval that chip performance remains stable, microlayer model two phase flow is enable to be suitable for different drive conditions.
Description
Technical field
Microlayer model under being induced the present invention is based on interfacial tension generates channel design, and design one kind can meet drop size not
Dependent on the micro-fluidic chip of flow, belong to micro fluidic chip technical field.
Background technology
Micro-fluidic chip refers to being using microchannel (size be tens of to hundreds of microns) processing or manipulation minute fluid
The involved Science and Technology of system is one and is related to chemistry, fluid physics, microelectronics, new material, biology and biomedical work
The emerging cross discipline of journey.Compared with traditional analysis platform, can effectively it be dropped using the microlayer model prepared by micro-fluidic chip
Less amount is used only in low experimental cost in experiment, can greatly save the use of expensive biochemical reagents, has monodispersity
It is good；It is controllable precise, uniform in size；It is fast (tens thousand of hertz, per second to produce a drops up to a hundred) to generate frequency；Mixing is abundant, reacts
Time is fast；The advantages such as flux height, no cross contamination.In DNA and polymerase chain reaction analysis, blood testing, crystallization of protein, list
The fields such as cell culture, particle synthesis are widely used.
Droplet in Experiment microflow control technique depends on the accurate flow rate of liquid that mating driving equipment is provided at present, causes micro-
The generation of drop is especially prominent to the dependence of speed.It is fast simple manual that this not only so that microflow control technique is difficult to be suitable for
Operation limits it in the application for detecting and reacting etc., moreover, the flowing velocity that common driving equipment provides has fluctuation
Property, the performance for be easy to causeing micro-fluidic chip is unstable.Therefore, it is necessary to weaken drop microflow control technique to want flow rate accuracy
It asks, converts unstable driving input condition to stable output as a result, to expand the applicable flow rates of micro-fluidic chip.
Taguchi's method be it is a kind of low cost, high benefit quality engineering method, it emphasize the raising of product quality be not by examine, and
It is to pass through design.Taguchi's method can analyze the sensibility of each geometric parameter, determine best parameter group, it is to be based on L9 just
Hand over array (Orthogonal Array) test realize parameter optimization, using L9 orthogonal arrays make quantity needed for analysis from
34581 reduce to 9, can greatly reduce experimental quantities.
The flowing velocity of liquid is to influence the function of drop micro-fluidic chip by changing two-phase interface stress.Multiphase flow
During dynamic, reduction and the relevant active force of flowing velocity, the interface that prominent geometry and flow media physical parameter determine
Tension can reduce influence of the two-phase flow speed to drop formation and flow behavior.Therefore, the present invention realizes that one kind can make drop
Micro-fluidic chip under the size induction based on interfacial tension smaller to speed dependence, and using Taguchi's method to channel geometry
Size carries out perfect, obtains optimal chip structure.The chip helps to break through the driving limitation of drop formation, expands chip performance
Stable velocity interval is maintained, microlayer model two phase flow is enable to be suitable for different drive conditions.
Invention content
Microchannel structure under being induced the present invention is based on interfacial tension is utilized by changing the geometric dimension of channel design
Taguchi's method tests to obtain the sensibility of each geometric parameter, and purpose obtains a kind of achievable drop size and do not depend on the micro- of flow
Fluidic chip.
The technical solution adopted by the present invention is the micro-fluidic chip under a kind of induction based on interfacial tension, the micro-fluidic chip
Microchannel structure under being induced based on interfacial tension obtains optimal argument structure by changing geometric parameter.
The micro-fluidic chip includes upper layer microchannel 1, intermediate layer film 2, lower layer microchannel 3；Upper layer microchannel 1 include from
Dephasing channel 4, discrete phase entrance 5, continuous phase channel 6, continuous phase entrance 7, driving phase channel 8, driving phase entrance 9, drop life
Coelosis 10, main channel 11, drop observation chamber 12, outlet 13；
Lower layer microchannel 3 includes groove 14.Discrete phase channel 4 and 6 one end of continuous phase channel are separately connected discrete phase entrance 5
With continuous phase entrance 7；Discrete phase channel 4 and 6 other end of continuous phase channel are commonly connected on drop formation chamber 10；Drop formation
10 other end of chamber connects main channel 11；Drop is commonly connected to behind 9 connection driving phase channel 8 of driving phase entrance with main channel 11 to see
Survey one end of chamber 12；Drop observes 12 other end connection outlet 13 of chamber.Upper layer microchannel 1 and intermediate layer film 2 pass through ultraviolet light
Plasma bonder carries out bonding connection, then the groove 14 in lower layer microchannel 3 is aligned to the drop formation chamber of upper layer microchannel 1
10, lower layer microchannel 3 is carried out with intermediate layer film 2 to be bonded connection.
It is passed through PDMS prefabricated reagents in lower layer microchannel 3, presses to upper layer microchannel 1, it will using thermosetting method
PDMS prefabricated reagents are fixed, and curved wall is formed in the bottom of drop formation chamber 10.When two-phase fluid flows, channel arc
Wall surface keeps discrete phase different in the curvature of rear and front end, when laplace pressure difference can not continue to be balanced by interface deformation, from
Dephasing forms drop.Discrete phase is formed during drop, and since flow resistance is relatively small, interfacial tension plays a leading role, and is determined
The critical condition of drop fracture.
In view of two phase flow is to drips very little in the structure, to ensure that drop can pass through, do not seen in drop
It surveys in chamber 12 and stops, therefore the access driving phase channel 8 at drop observation chamber 12.Drop sight is not arranged for conventional microscale channel simultaneously
Chamber 12 is surveyed, but curved wall is formed on the bottom of drop formation chamber 10, and certain difficulty is caused to the measurement of drop size and motion morphology
Degree, therefore main channel 11 is connected after drop formation chamber 10, drop is connected behind main channel 11 and observes chamber 12, and data is facilitated to survey
Amount.
Upper layer microchannel 1, intermediate layer film 2 and lower layer microchannel 3 are made of PDMS material.
The production process of the micro-fluidic chip is as follows：
1) upper layer microchannel 1, lower layer microchannel 3 and centre containing channel design are made respectively in such a way that PDMS is poured
Layer film 2 is the PDMS film for getting rid of system using centrifugal force on silicon chip.
2) the upper layer microchannel 1 of cast molding and intermediate layer film 2 are bonded using ultraviolet plasma bonder, then
Groove 14 in lower layer microchannel 3 is aligned to the drop formation chamber 10 of upper layer microchannel 1, lower layer microchannel 3 and upper layer microchannel 1
It is bonded.
3) it is passed through PDMS prefabricated reagents in groove 14, presses to upper layer microchannel 1, it is using thermosetting method that PDMS is pre-
Reagent processed is fixed, and curved wall is formed, and obtains the microchannel structure under interfacial tension induction.
The specific work process of the micro-fluidic chip is as follows：Discrete phase liquid is flowed into from discrete phase entrance 5, continuous phase liquid
It is flowed into from continuous phase entrance 7；Discrete phase liquid and continuous phase liquid cross at drop formation chamber 10, the life of discrete phase liquid ruptures
At drop and with continuous phase liquid toward downstream flow, drop is entered by main channel and observes chamber 12, eventually by outlet 13
Flow out chip.
Description of the drawings
Fig. 1 is the three-dimensional general outline signal for the micro-fluidic chip that a kind of achievable drop size of the present invention does not depend on flow
Figure.
Fig. 2 is the cross-sectional view for the micro-fluidic chip that a kind of achievable drop size of the present invention does not depend on flow.
Fig. 3 is that a kind of upper layer microchannel for the micro-fluidic chip that achievable drop size does not depend on flow of the present invention is worked
Journey schematic diagram.
Fig. 4 is that a kind of lower layer's microchannel structure for the micro-fluidic chip that achievable drop size does not depend on flow of the present invention is shown
It is intended to.
It provides under conditions of the continuous phase flow rate of data is 50 μ L/min and measures in Fig. 5.
Fig. 6 is influence of three factors to signal-to-noise ratio.
In figure：1, upper layer microchannel；2, intermediate layer film；3, lower channel；4. discrete phase channel；5. discrete phase entrance；
6. continuous phase channel；7. continuous phase entrance；8. driving phase channel；9. driving phase entrance；10. drop formation chamber；11. main channel；
12. drop observes chamber；13. outlet；Lower channel structure includes：14. groove.
Specific implementation mode
The work of the micro-fluidic chip of flow is not depended on to a kind of achievable drop size of invention with reference to Structure Figure
Process and function and effect are described in detail.
The specific work process of this chip is as follows：Discrete phase liquid is flowed into from discrete phase entrance 5, and continuous phase liquid is from continuous
Phase entrance 7 flows into, and the two crosses in drop formation chamber 10, and discrete phase liquid ruptures generate drop and with continuous phase toward downstream
Flowing enters drop by main channel and observes chamber 12, eventually by 13 outflow chip of outlet.
Fig. 1 is the three-dimensional general outline signal for the micro-fluidic chip that a kind of achievable drop size of the present invention does not depend on flow
Figure.Fig. 2, Fig. 3 are course of work schematic diagram, and nine kinds of various sizes of microchannel structure, two kinds of fluids pass through under outer power drive
Two entrances flow into micro-fluidic chip, adjust the flowing velocity of two kinds of liquid, so that it is generated microlayer model, and keep the flow velocity one
The section time makes flow regime stablize, and continuous phase is passed through in driving phase entrance, observes chamber when drop enters drop, carries out drop formation
Record experiment.Nine groups of experiment droplet size uniformitys as shown in figure 4, the 6th group of structure dependence of the droplet size to two phase flow
Property it is smaller, it is seen that the present invention can significantly influence the generation of drop.
The cavity length l of drop formation chamber 10, housing width w are obtained using Taguchi's method, cavity expansion angle θ's is optimal
Parameter (as shown in Figure 3).It is as shown in table 1 to design three kinds of parameter factor tables.Taguchi's method orthogonal matrix experimental program such as 2 institute of table
Show.Influence of three factors obtained by 9 groups of experiments to signal-to-noise ratio is as shown in fig. 6, determine that optimized parameter is wide for 30 ° of angle of cavity expansion, cavity
Spend 0.5mm, cavity length 2.6mm.
1. parameter factors table of table
2. orthogonal matrix experimental program of table
Claims (5)
1. a kind of achievable drop size does not depend on the micro-fluidic chip of flow, which is a kind of based on interfacial tension
Micro-fluidic chip under induction, it is characterised in that：Microchannel structure under the micro-fluidic chip is induced based on interfacial tension passes through
Change geometric parameter, obtains optimal argument structure；
The micro-fluidic chip includes upper layer microchannel (1), intermediate layer film (2), lower layer microchannel (3)；It wraps upper layer microchannel (1)
Include discrete phase channel (4), discrete phase entrance (5), continuous phase channel (6), continuous phase entrance (7), driving phase channel (8), driving
Phase entrance (9), drop formation chamber (10), main channel (11), drop observation chamber (12), outlet (13)；
Lower layer microchannel (3) includes groove (14)；Discrete phase channel (4) and continuous phase channel (6) one end are separately connected discrete phase
Entrance (5) and continuous phase entrance (7)；Discrete phase channel (4) and continuous phase channel (6) other end are commonly connected to drop formation chamber
(10) on；Drop formation chamber (10) other end connects main channel (11)；Drive phase entrance (9) connect driving phase channel (8) afterwards with
Main channel (11) is commonly connected to one end of drop observation chamber (12)；Drop observes chamber (12) other end connection outlet (13)；On
Layer microchannel (1) carries out bonding by ultraviolet light plasma bonder with intermediate layer film (2) and connects, then by lower layer microchannel
(3) the drop formation chamber (10) of groove (14) alignment upper layer microchannel (1) in, by lower layer microchannel (3) and intermediate layer film
(2) bonding connection is carried out；
PDMS prefabricated reagents are passed through in lower layer microchannel (3), are pressed to upper layer microchannel (1), it will using thermosetting method
PDMS prefabricated reagents are fixed, and curved wall is formed in the bottom of drop formation chamber (10)；When two-phase fluid flows, gate arc
Shape wall surface keeps discrete phase different in the curvature of rear and front end, when laplace pressure difference can not continue to be balanced by interface deformation,
Discrete phase forms drop；Discrete phase is formed during drop, and since flow resistance is relatively small, interfacial tension plays a leading role, certainly
Determine the critical condition of drop fracture.
2. a kind of achievable drop size according to claim 1 does not depend on the micro-fluidic chip of flow, it is characterised in that：
In view of two phase flow is to drips very little in the structure, to ensure that drop can pass through, not in drop observation chamber (12)
Middle stop, therefore access driving phase channel (8) at drop observation chamber (12)；Drop observation is not arranged for conventional microscale channel simultaneously
Chamber (12), but curved wall is formed on the bottom of drop formation chamber (10), is caused centainly to the measurement of drop size and motion morphology
Difficulty, therefore main channel (11) is connected afterwards in drop formation chamber (10), drop observation chamber (12), side are connected afterwards in main channel (11)
Just DATA REASONING.
3. a kind of achievable drop size according to claim 1 does not depend on the micro-fluidic chip of flow, it is characterised in that：
Upper layer microchannel (1), intermediate layer film (2) and lower layer microchannel (3) are made of PDMS material.
4. a kind of achievable drop size according to claim 1 does not depend on the micro-fluidic chip of flow, it is characterised in that：
The production process of the micro-fluidic chip is as follows：
1) upper layer microchannel (1), lower layer microchannel (3) and centre containing channel design are made respectively in such a way that PDMS is poured
Layer film (2) is the PDMS film for getting rid of system using centrifugal force on silicon chip；
2) ultraviolet plasma bonder is used to be bonded the upper layer microchannel (1) of cast molding and intermediate layer film (2), then
By in lower layer microchannel (3) groove (14) be aligned upper layer microchannel (1) drop formation chamber (10), lower layer microchannel (3) with
Upper layer microchannel (1) is bonded；
3) PDMS prefabricated reagents are passed through in groove (14), pressed to upper layer microchannel (1), it is using thermosetting method that PDMS is pre-
Reagent processed is fixed, and curved wall is formed, and obtains the microchannel structure under interfacial tension induction.
5. a kind of achievable drop size according to claim 1 does not depend on the micro-fluidic chip of flow, it is characterised in that：
The specific work process of the micro-fluidic chip is as follows：Discrete phase liquid is flowed into from discrete phase entrance (5), and continuous phase liquid is from continuous
Phase entrance (7) flows into；Discrete phase liquid and continuous phase liquid cross at drop formation chamber (10), and discrete phase liquid ruptures generate
Drop and with continuous phase liquid toward downstream flow, drop is entered by main channel and observes chamber (12), eventually by outlet
(13) chip is flowed out.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810176538.6A CN108393103A (en) | 2018-03-03 | 2018-03-03 | A kind of achievable drop size does not depend on the micro-fluidic chip of flow |
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|---|---|---|---|
| CN201810176538.6A CN108393103A (en) | 2018-03-03 | 2018-03-03 | A kind of achievable drop size does not depend on the micro-fluidic chip of flow |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109351369A (en) * | 2018-10-23 | 2019-02-19 | 深圳市博瑞生物科技有限公司 | Microfluidic droplet generates chip |
| CN109351368A (en) * | 2018-10-23 | 2019-02-19 | 深圳市博瑞生物科技有限公司 | Micro-fluidic chip |
| CN109395788A (en) * | 2018-11-28 | 2019-03-01 | 西安交通大学 | A kind of intraluminal fluid dripping is for chip apparatus |
| CN109603932A (en) * | 2018-12-12 | 2019-04-12 | 深圳大学 | A kind of double focusing micro-fluid chip |
| CN109682574A (en) * | 2019-01-14 | 2019-04-26 | 北京工业大学 | The device and method of flow resistance when a kind of real-time measurement microlayer model/bubble moves in the channel |
| CN109718874A (en) * | 2018-12-22 | 2019-05-07 | 北京工业大学 | A kind of separation influences the micro-fluidic chip of drop internal flow behavior variable |
| CN110496657A (en) * | 2019-09-11 | 2019-11-26 | 苏州大学 | A kind of micro-fluidic chip and preparation method thereof forming liquid metal droplet |
| CN111250009A (en) * | 2018-12-03 | 2020-06-09 | 成都市银隆新能源有限公司 | Method for preparing lithium ion battery material by using microfluidic technology |
| CN112304950A (en) * | 2020-10-06 | 2021-02-02 | 清华大学 | Micro-droplet observation device and micro-droplet image recognition method based on shape matching |
| CN112657565A (en) * | 2020-12-17 | 2021-04-16 | 京东方科技集团股份有限公司 | Microfluidic channel, control method thereof, microfluidic chip and analysis device |
| CN113853249A (en) * | 2019-04-12 | 2021-12-28 | 巴黎科学与文学基金会 | Emulsion preparation micro-fluidic device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109351368A (en) * | 2018-10-23 | 2019-02-19 | 深圳市博瑞生物科技有限公司 | Micro-fluidic chip |
| CN109351368B (en) * | 2018-10-23 | 2021-04-30 | 深圳市博瑞生物科技有限公司 | Micro-fluidic chip |
| CN109351369B (en) * | 2018-10-23 | 2021-01-26 | 深圳市博瑞生物科技有限公司 | Microfluidic droplet generation chip |
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| CN109395788A (en) * | 2018-11-28 | 2019-03-01 | 西安交通大学 | A kind of intraluminal fluid dripping is for chip apparatus |
| CN109395788B (en) * | 2018-11-28 | 2024-04-09 | 西安交通大学 | Chip device for preparing liquid drops in tube |
| CN111250009A (en) * | 2018-12-03 | 2020-06-09 | 成都市银隆新能源有限公司 | Method for preparing lithium ion battery material by using microfluidic technology |
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| WO2020119282A1 (en) * | 2018-12-12 | 2020-06-18 | 深圳大学 | Dual-focus microfluid chip |
| CN109603932A (en) * | 2018-12-12 | 2019-04-12 | 深圳大学 | A kind of double focusing micro-fluid chip |
| CN109718874A (en) * | 2018-12-22 | 2019-05-07 | 北京工业大学 | A kind of separation influences the micro-fluidic chip of drop internal flow behavior variable |
| CN109718874B (en) * | 2018-12-22 | 2021-03-19 | 北京工业大学 | Micro-fluidic chip for separating and influencing flow behavior variables inside liquid drops |
| CN109682574B (en) * | 2019-01-14 | 2020-10-27 | 北京工业大学 | Device and method for measuring flow resistance of micro-droplets/bubbles in motion in channel in real time |
| CN109682574A (en) * | 2019-01-14 | 2019-04-26 | 北京工业大学 | The device and method of flow resistance when a kind of real-time measurement microlayer model/bubble moves in the channel |
| CN113853249A (en) * | 2019-04-12 | 2021-12-28 | 巴黎科学与文学基金会 | Emulsion preparation micro-fluidic device |
| CN110496657A (en) * | 2019-09-11 | 2019-11-26 | 苏州大学 | A kind of micro-fluidic chip and preparation method thereof forming liquid metal droplet |
| CN110496657B (en) * | 2019-09-11 | 2022-04-22 | 苏州大学 | Microfluidic chip capable of forming liquid metal droplets and preparation method thereof |
| CN112304950A (en) * | 2020-10-06 | 2021-02-02 | 清华大学 | Micro-droplet observation device and micro-droplet image recognition method based on shape matching |
| CN112657565A (en) * | 2020-12-17 | 2021-04-16 | 京东方科技集团股份有限公司 | Microfluidic channel, control method thereof, microfluidic chip and analysis device |
| CN112657565B (en) * | 2020-12-17 | 2022-08-19 | 京东方科技集团股份有限公司 | Microfluidic channel, control method thereof, microfluidic chip and analysis device |
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