CN108390665B

CN108390665B - All-solid-state square wave pulse generator

Info

Publication number: CN108390665B
Application number: CN201810245917.6A
Authority: CN
Inventors: 程新兵; 陈绒; 杨建华
Original assignee: National University of Defense Technology
Current assignee: National University of Defense Technology
Priority date: 2018-03-23
Filing date: 2018-03-23
Publication date: 2021-05-25
Anticipated expiration: 2038-03-23
Also published as: CN108390665A

Abstract

The invention relates to a square wave pulse generator, in particular to an all-solid-state square wave pulse generator based on a fractional ratio saturable pulse transformer and a Marx generator, and belongs to the field of pulse power. The pulse generator consists of a charging module, a pulse boosting module, a pulse forming module and a load module; the invention can not only reduce the primary side working voltage and the secondary side saturation inductance of the pulse transformer, but also realize the compact integration of the pulse transformer and the magnetic switch; the magnetic switch is used for replacing a gas switch in the traditional Marx generator, so that the service life and the repetition frequency of the whole system are greatly improved; the high-voltage silicon stack is used for replacing an isolation inductor in the traditional Marx generator, so that the pre-pulse problem is effectively eliminated; meanwhile, the quasi square wave pulse with high quality and good flat top can be output through the anti-resonance network, complete solid state and miniaturization of the system are achieved, the size is small, the weight is light, transportation and practicability are facilitated, a multi-switch series structure of the high-voltage pulse generator is avoided, and the service life can be prolonged.

Description

All-solid-state square wave pulse generator

Technical Field

The invention relates to a square wave pulse generator, in particular to an all-solid-state square wave pulse generator based on a fractional-ratio saturable pulse transformer (FRSPT) and a Marx generator, and belongs to the field of pulse power.

Background

The pulse power technology is an electro-physical technology for rapidly compressing, converting or directly releasing the energy of an electric field or a magnetic field with higher density stored slowly to a load, and is drawn by the current and future development requirements, and the development direction of the pulse power technology comprises high power, high efficiency, high repetition frequency, solid state, integration compactness and the like. The high-power, high-repetition-frequency and long-life switching technology is the key for realizing the high repetition frequency and long life of the pulse power device. The switches can be classified into two categories according to the energy storage form of the pulse power device: closing switch and opening switch(ii) a They can be classified into gas switches, liquid switches, solid state switches, and the like according to the kind of insulating material used. The switches commonly used in the pulse power devices at present mainly include gas spark gap switches, semiconductor switches (including thyristors, Insulated Gate Bipolar Transistors (IGBTs), Metal Oxide Semiconductor Field Effect Transistors (MOSFETs), etc.), and magnetic switches. In combination, gas switches and vacuum switches are very ablative and have a short life (<10⁵Second), large jitter, slow insulation recovery, when the repetition frequency works, an external blowing system needs to be introduced to assist the switch in recovering the insulation capability; for a high-power semiconductor switch, limited by the current technical level and manufacturing process, a single-tube high-power switch is difficult to be directly applied to high-voltage/large-current occasions of dozens of kV/dozens of kA, dozens or even hundreds of switching tubes are usually required to be used in series-parallel connection, so that the manufacturing cost of a pulse power device is improved, and the synchronous control of the switch is challenged. Compared with the prior art, the magnetic switch has the advantages of high repetition frequency, long service life, strong current capacity and the like, is particularly suitable for the high-voltage/large-current field of more than dozens of kV/dozens of kA, and accords with the development direction of the future pulse power technology.

The magnetic switch is a high-power solid-state switch which utilizes the transformation of a magnetic core from an unsaturated state to a saturated state to complete the sudden change of an inductor so as to realize the on-off control function of a circuit and has high repetition frequency and long service life, and is firstly proposed by British scholars Melville]Electric Engineers Journal of the institute of,1951 (6):179- & 181 ]. In the technical reports, a common K-level (K is an integer, K is more than or equal to 1) magnetic pulse compression circuit is composed of an energy storage capacitor C₀Switch S₀Resonant inductance L₀Intermediate stage capacitor C₁～C_K-1Capacitor C of discharging_KAnd a magnetic switch MS_i(i ═ 1,2, …, K) and the load composition. Energy storage capacitor C₀At the switch S₀After closing, through the inductor L₀Capacitor C₁Charging, in the middleStage capacitor C₁～C_K-1And magnetic switch MS₁～MS_K-1Subjecting the pulses to abrupt compression, C_K，MS_KA discharge loop is provided for the capacitor. The common K-level magnetic pulse compression circuit comprises K-level magnetic compression units, wherein each level of magnetic compression unit comprises 1 capacitor C_iAnd 1 magnetic switch MS_i(i ═ 1,2, …, K). The main working process is as follows: the external power supply firstly supplies the energy storage capacitor C₀Charging in a capacitor C₀Control switch S when full charge₀Closure, C₀Through an inductance L₀A capacitor C for the 1 st magnetic compression unit₁Resonant charging due to magnetic switching MS₁Unsaturated and has large impedance, which is equivalent to open circuit, and the 2 nd stage magnetic compression unit stage capacitor C₂The voltage on is almost constant and is maintained at zero, MS₁The current in (1) is also approximately zero, MS₁The voltage across is approximately equal to C₁The voltage of (c). The 1 st level magnetic compression unit level capacitor C is enabled to be reasonable in design₁When the voltage on reaches the maximum value, the magnetic switch MS₁Saturation, requiring that its saturation inductance is much smaller than the resonance inductance L₀Capacitor C₁By magnetic switch MS₁Rapidly moving to the 2 nd-stage magnetic compression unit stage capacitor C₂Charging; … …, according to the same rule, until the last stage of magnetic compression unit stage capacitance C_KThe charging reaches the maximum value, and the last stage of magnetic switch MS_KSaturation, capacitance C_KBy magnetic switch MS_KRapidly discharging to the load. Due to the requirement of the i-th magnetic switch MS_iThe saturation inductance is far less than the i-1 magnetic switch MS_iSaturated inductance of (i ═ 1,2, …, K), i.e. L_Si<<L_Si-1The pulse energy is effectively compressed. The circuit form has the advantages of simple structure, stable operation and the like, but is limited by the performance of the magnetic material, and the compression ratio (G) of each stage of magnetic compression unit_i＝U_i+1/U_i) Typically less than 10 and requires an additional reset circuit to ensure proper operation of the magnetic switch. Meanwhile, because the magnetic switch is not an ideal switch and the impedance of the non-saturation state is not infinite, a certain pre-pulse is inevitably formed on the load in the charging process. More importantly, albeit radicalThe magnetic pulse compression network of the magnetic switch can amplify pulse current, but does not have the function of boost conversion, and in order to realize the output of pulse high voltage, the magnetic switch still needs to be used with a pulse transformer, a laminated wire or an induced voltage adder and the like.

In view of the fact that the magnetic switch in the first background art does not have the function of voltage boosting conversion, researchers adopt compact integration of the magnetic switch and the Pulse Transformer, and a typical device of the magnetic switch is a common Saturable Pulse Transformer (SPT) (hereinafter referred to as a second background art), and the basic working principle is as follows: when the magnetic core of the transformer is in an unsaturated state, the SPT secondary winding is normally coupled and boosted; and after the magnetic core is saturated, the secondary winding is in saturation conduction as a magnetic switch to control the discharging process of the branch where the secondary winding is located. Thus, the SPT has the dual function of both a pulse transformer and a magnetic switch. Researchers of the institute of electrical and technology in the Chinese academy of sciences develop a pulse modulator by adopting a two-stage SPT pulse compression system and a magnetic switch with a sharpening effect, high-voltage pulses with the amplitude of 45-62 kV, the pulse width of 70ns and the leading edge of 30ns are output on a load of 307-1000 omega, and the repetition frequency reaches 2 kHz. Among them, the magnetic switch MS1 for sharpening is the key to obtaining a fast leading edge pulse. Zhang D, Zhou Y, Wang J, et al.a compact, high repetition-rate, nano-controlled pulse generator based on magnetic pulse compression system [ J ]. IEEE Transactions on electronics and Electrical Insulation,2011,18(4):1151-1157 ]. Different from the traditional magnetic pulse compression network, the pulse compression system based on the SPT utilizes the double resonance condition of the pulse transformer to gradually reduce the load capacitance of the transformer, so that the resonance charging and discharging periods are gradually compressed. However, the SPT in the above-mentioned common winding form is only used as a polarity reversal switch for discharging the load capacitor of the transformer, and the requirements for the magnetic switching performance (especially, the reduction of the secondary saturation inductance and the sharpening of the leading edge of the pulse) are not high. In order to obtain a boosting factor larger than 10 times, the number of turns of the secondary winding of the ordinary SPT will be larger than 10 turns, thereby causing the saturation inductance of the secondary winding to be larger than 5 muh and even reach the order of 10 muh, the discharge inversion period of the capacitor and the leading edge of the main pulse will be significantly elongated. Therefore, the compactness of pulse transformers and magnetic switches realized by common SPTs is very limited. Although the additional steep magnetic switch is added in the system to perform steep clipping on the front edge of the main pulse, the pulse flat top and the steep back edge cannot be improved, and meanwhile, the additional independent magnetic switch also increases the volume and the weight of the system and is not beneficial to the compactness and the integration of the system. Therefore, the search for a novel winding mode to realize the high step-up ratio and the low secondary saturation inductance of the pulse transformer has great significance for truly realizing the integration compactness and the long service life of the pulse power device.

In order to improve the SPT with the common winding form in the second technical background, which is difficult to consider both high voltage Ratio and low secondary Saturable inductance, researchers at the university of national defense technology propose Fractional Ratio Saturable Pulse Transformers (FRSPT) (hereinafter referred to as third technical background), [ Rong Chen, Jianhuaa Yang, Xinbing Cheng, et al]Rev.sci.instrum, 2017,88(3): 103302-. The pulse boosting module adopts 5 annular iron-based amorphous magnetic cores with central axes symmetrical to form an FRSPT; the pulse forming module is composed of a main capacitor C₁A shaping capacitor C₂And a shaping inductor L₂Two sections of anti-resonance networks are formed; through boosting and modulation, the third technical background is that quasi square wave pulses with voltage amplitude of 27kV, pulse width of 1.6 mus and flat top of about 700ns can be output on a 3500 omega matched load when a primary side is charged with 400V, and the quasi square wave pulses can stably operate at a repetition frequency of 50 Hz. However, due to the limitation of the magnetic material and the FRSPT primary side semiconductor switch, even with the help of a high-power transformer, the third technical background is difficult to realize voltage output of more than 50kV, and meanwhile, the impedance transformation of the transformer enables the matching impedance of the whole system to be multiplied; technical background three, variable inductance L_VFor reducing pre-pulses, L, formed on the load during charging_VConsisting of a high-voltage coil wound on a closed magnetic coreAnd a reset coil is wound at the same time and is connected with a direct-current reset power supply. Variable inductance L when the main capacitor is charged_VThe inductor is small, so that pre-pulse on a load during charging can be reduced; and variable inductance L when the main capacitor discharges_VThe pulse forming module is large in inductance and can be guaranteed to work normally. However, the experimental results show that there are still more than 2kV pre-pulses on the load, i.e. the technical background three does not completely solve the pre-pulse problem mentioned in the technical background one. Therefore, the scheme provided by the third technical background is improved, so that the method can be really applied to the high-voltage field of dozens of kV to hundreds of kV, and has important practical significance for realizing extremely low pre-pulse and high-quality square wave output.

In the above-mentioned background art, the common winding form of the SPT is difficult to give consideration to both high step-up ratio and low secondary saturation inductance, and it is difficult to output a fast leading edge pulse, the FRSPT adopting the novel structural form can not be really applied to the high voltage field of several tens kV to hundreds kV alone, and the prepulse on the load becomes an important factor that limits the three applications of the technical background due to the inherent property of the magnetic switch. Aiming at the problems that the system boost ratio is low and the load prepulse is difficult to eliminate in the third technical background, the invention provides a low-cost all-solid-state square-wave generator which adopts an FRSPT cascade Marx generator, adopts high-voltage silicon stack isolation, and utilizes Metal-Oxide piezoresistor (MOV) to rigidize the output waveform flat top so as to realize low-voltage input (<1kV), low saturated inductance, miniaturization and compactness and automatic magnetic core resetting.

Disclosure of Invention

The invention aims to solve the technical problems that the SPT in the existing structure form is difficult to consider high step-up ratio and low secondary saturation inductance, the FRSPT in the novel winding form can not be really applied to the high-voltage field of dozens of kV to hundreds of kilovolts by being used alone, and the pulse generator based on the FRSPT can not completely eliminate the pre-pulse effect on the load, and provides a Marx generator based on FRSPT cascade connection, which is used as a control switch of a Marx generator series discharge loop and adopts the technical scheme of high-voltage silicon stack isolation. Meanwhile, in order to harden flat top, a low-cost all-solid-state square wave generator which is provided with an MOV and a load in parallel and realizes low voltage input (<1kV), low saturation inductance, miniaturization and compactness and automatic magnetic core resetting is provided.

The invention adopts the following technical scheme:

an all-solid-state square wave pulse generator is composed of a charging module, a pulse boosting module, a pulse forming module and a load module; the charging module is used as an energy supply module of the pulse generator, charges the pulse forming module through the pulse boosting module and provides automatic reset current for a fractional ratio saturable transformer (FRSPT) magnetic core in the pulse boosting module; the pulse boosting module is formed by cascading an FRSPT and a Marx generator, wherein on one hand, the FRSPT is used as a pulse transformer to carry out resonance charging on the Marx generator, and on the other hand, the FRSPT is used as a control switch of a series discharging loop of the Marx generator; the pulse forming module is used for forming quasi square wave pulses with reasonable waveform front and back edge time and good flat top; the load module is formed by connecting a Metal Oxide Varistor (MOV) and a resistive load in parallel, and the MOV is used for further shaping the waveform due to good nonlinear volt-ampere characteristics of the MOV and rigidizes the flat top of the quasi square wave pulse;

the charging module consists of a DC stabilized voltage power supply and an isolation inductor L₀₁、L₀₂、…、L_0N(N is more than or equal to 1) primary side capacitor C₀₁、C₀₂、…、C_0NAnd switch S₀₁、S₀₂、…、S_0NAnd an FRSPT primary winding; the DC stabilized power supply is a primary capacitor C₀₁、C₀₂、…、C_0NProviding energy according to the primary capacitance C₀₁、C₀₂、…、C_0NThe charging voltage determines the working voltage and the working current of the direct current stabilized power supply; isolation inductor L₀₁、L₀₂、…、L_0NFor protection, in a primary side capacitor C_0nWhen the (N is 1,2, …, N) fails, the primary capacitors in other branches can be protected; primary side capacitor C₀₁、C₀₂、…、C_0NA primary side energy storage capacitor used as FRSPT; switch S₀₁、S₀₂、…、S_0NThe primary side capacitor is used for controlling the time for discharging the FRSPT; the working process of the charging module is as follows: DC voltage stabilizationPower supply passes through isolation inductor L₀₁、L₀₂、…、L_0NTo primary side capacitor C₀₁、C₀₂、…、C_0NCharging, when FRSPT needs to be charged, switch S₀₁、S₀₂、…、S_0NSynchronously conducting to discharge the primary capacitor; because the current in the charging process and the current in the discharging process both flow through the primary winding of the FRSPT, and the directions of the charging current and the discharging current are opposite, the charging module can be arranged on the primary side capacitor C₀₁、C₀₂、…、C_0NProviding an automatic reset current to the FRSPT core after the charging period of (a);

the pulse boosting module consists of an FRSPT and an m-level Marx generator (m is a positive integer); the FRSPT consists of a transformer inner core, a primary winding and a secondary winding; the transformer inner core is composed of N magnetic cores and corresponding insulating sleeves and is rotationally symmetrical about a central axis of the transformer; the N magnetic cores are all magnetic rings with the same size, each magnetic ring is wound into a ring shape by a thin-film coil made of an iron-based amorphous material and then is poured and packaged by a glass fiber reinforced plastic material; because the magnetic core has certain conductivity, the insulating sleeve is processed by adopting a ring-shaped polypropylene material and is sleeved outside the magnetic core for insulation; the magnetic core and the insulating sleeve sleeved outside the magnetic core jointly form a transformer inner core, and N transformer inner cores are stacked along the central symmetry axis direction of the transformer and sequentially provided with a first block, a second block, … and an Nth block from top to bottom; in order to ensure uniform excitation, the FRSPT primary winding part of the invention is composed of two groups of completely same primary sub-windings, the two groups of primary sub-windings have axial symmetry about the central axis of the transformer, each group of primary sub-windings is composed of a 1 st primary sub-winding, a 2 nd primary sub-winding, … … and an Nth primary sub-winding, the N paths of primary sub-windings are wound by adopting high-voltage wires with withstand voltage of more than 10kV, and the number of turns is N_pTurns; the 1 st path of primary sub-winding penetrates through the top of the 1 st transformer inner core, surrounds the 1 st inner core from the inside and then penetrates out of the gap between the bottom of the 1 st inner core and the top of the 2 nd inner core; the 2 nd primary sub-winding penetrates through a gap between the top of the 2 nd transformer core and the bottom of the 1 st transformer core, surrounds the 2 nd transformer core from the inside, and then penetrates through the bottom of the 2 nd transformer core and the 3 rd transformer corePenetrating out of a gap at the top of the inner core, … …, and penetrating out of the bottom of the inner core of the Nth block of transformer after the Nth primary sub-winding penetrates through the gap between the top of the inner core of the Nth block of transformer and the bottom of the inner core of the (N-1) th block of transformer from the same rule and surrounds the Nth inner core from the inside; input end of 1 st path primary sub-winding and 1 st path control switch S₀₁The input end of the 2 nd primary sub-winding is connected with the 2 nd control switch S₀₂… …, the input end of the Nth primary sub-winding is connected with the Nth control switch S_0NThe output ends of the N primary sub-windings are all connected in parallel to serve as the total output end to be grounded; the secondary winding of the FRSPT consists of a 1 st group of secondary windings, a 2 nd group of secondary windings, … … and an mth group of secondary windings (m is more than or equal to 1), each group of secondary windings comprises j (j is a positive integer) paths of wire-wound secondary sub-windings which are connected in parallel, the j paths of secondary sub-windings share a magnetic core, are sequentially arranged along the circumferential direction and are wound by adopting a high-voltage wire with the withstand voltage of more than 10kV, and the number of winding turns of each path of secondary sub-winding is N_sTurns; a 1 st path of secondary sub-winding of the 1 st group of secondary winding penetrates through the top of the 1 st transformer core, penetrates out of the bottom of the N th transformer core after surrounding all the N transformer cores, a 2 nd path of secondary sub-winding of the 1 st group of secondary winding penetrates through the top of the 1 st transformer core, penetrates out of the bottom of the N th transformer core after surrounding all the N blocks of cores, … …, a jth path of secondary sub-winding of the 1 st group of secondary winding penetrates through the top of the 1 st transformer core, penetrates out of the bottom of the N th transformer core after surrounding all the N blocks of cores, … …, according to the rule, until a jth path of secondary sub-winding of the m group of secondary winding penetrates through the top of the 1 st transformer core, penetrates out of the bottom of the N block of transformer core after surrounding all the N blocks of cores, and the secondary windings totally complete the wiring of the m multiplied by j paths of secondary;

the m-stage Marx generator of the invention is composed of a 1 st group of Marx generator stage capacitors C₁₁And an isolated silicon stack unit D₁₁And the 2 nd group of Marx generator stage capacitor C₂₂And an isolated silicon stack unit D₂₂… …, m group Marx generator stage capacitance C_1mAnd an isolated silicon stack unit D_1mEach group of stage capacitors are formed by connecting a plurality of single ceramic capacitors with the voltage resistance of 50kV/2nF in parallelThe number of ceramic capacitors connected in parallel is determined by the stage capacitance C_1mDetermining the capacitance of (c); each group of isolated silicon stacks adopts a cylindrical high-voltage silicon stack with a monomer of 50kV/3 kA; group 1 stage capacitor C₁₁One end of the secondary winding is connected with the output high-voltage end of the 1 st group of secondary windings of the FRSPT, and the other end of the secondary winding is connected with the 1 st group of isolation silicon stack D₁₁Positive electrodes connected to each other, group 1 isolation silicon stack D₁₁The negative electrode of the secondary winding is grounded together with the output low-voltage end of the FRSPT 1 st group of secondary windings; group 2 stage capacitor C₁₂One end of the second group of secondary windings is connected with the output high-voltage end of the FRSPT group 2 secondary winding, and the other end of the second group of secondary windings is connected with the isolation silicon stack D of the group 2₁₂Anode connected, group 2 isolation silicon stack D₁₂The negative pole of the secondary winding and the output low-voltage end of the secondary winding of the 2 nd group of the FRSPT are connected with the isolated silicon stack D of the 1 st group₁₁The positive electrode of (1); group 3 stage capacitor C₁₃One end of the second group of the secondary windings is connected with the output high-voltage end of the FRSPT group 3, and the other end of the second group of the secondary windings is connected with the isolation silicon stack D of the group 3₁₃Anode connected, group 3 isolation silicon stack D₁₃The negative pole of the secondary winding and the output low-voltage end of the 3 rd group secondary winding of the FRSPT are connected with the 2 nd group isolation silicon stack D₁₂… …, according to such a law, up to the m-th group of capacitors C_1mOne end of the second group of the secondary windings is connected with the output high-voltage end of the mth group of the secondary windings of the FRSPT, and the other end of the second group of the secondary windings is connected with the mth group of the isolation silicon stack D_1mPositive electrodes connected, m-th group of isolation silicon stacks D_1mThe negative pole of the (m) th group of isolation silicon stacks D and the output low-voltage end of the mth group of secondary windings of the FRSPT are connected with the (m-1) th group of isolation silicon stacks D_1(m-1)Positive electrode of (1), m-th group of isolated silicon stacks D_1mThe positive electrode of the pulse generator is used as a high-voltage output end of the m-level Marx generator and is connected with the pulse forming module through a high-voltage wire;

the pulse forming module is composed of a main capacitor C₁A main inductor L₁And (Q-1) section shaping network consisting of Q section antiresonance network, wherein the shaping network is composed of shaping capacitors C connected in parallel₂And a shaping inductor L₂Shaping capacitor C connected in parallel₃And a shaping inductor L₃…, shaping capacitor C connected in parallel_QAnd a shaping inductor L_QAre connected in series; one end of the first shaping network is connected with the high-voltage output end of the m-level Marx generator, and the other end of the first shaping network is connected with one end of the second shaping network; the other end of the second shaping network is connected to a third shaping network, … …According to the rule, one end of the No. (Q-1) section shaping network is connected with one end of the No. (Q-1) section shaping network, and the other end of the No. (Q) section shaping network is connected with the load module; main inductance L₁Is connected with the (Q-1) section shaping network in series, and in practical engineering, the main capacitor C does not need to be connected practically₁And main inductance L₁Main capacitor C₁Can use the stage capacitor C in the m-stage Marx generator_1q(q is 1,2, …, m) in series capacitance during discharge, and a main inductance L₁The loop inductance in the circuit can be used for replacement; because the pulse forming module only needs to be matched with the main capacitor C₁And other capacitors or inductors are only used for adjusting the output waveform without charging the output waveform, so that the insulation requirement on the capacitor can be greatly reduced, and the output of high-voltage quasi square wave pulse with good flat-top stability is realized.

The load module is composed of a Metal Oxide Varistor (MOV) and a parallel resistive load, the MOV is formed by connecting a plurality of cylindrical zinc oxide resistance sheets in series, abnormal overvoltage in a circuit is sensed and limited by utilizing special nonlinear volt-ampere characteristics (the resistance value is sensitively changed along with external voltage), so that the effect of flattening is achieved, and the number of the zinc oxide resistance sheets connected in series is determined by the output voltage on the load.

Further, the primary side controls the switch S₀₁、S₀₂、…、S_0NThyristor switches or IGBTs and the like can be adopted, the isolation silicon stacks in the m-grade Marx generator are packaged in vacuum by epoxy resin, and the surface of the isolation silicon stacks has corrosion resistance.

Further, the magnetic ring of the magnetic core in the transformer inner core of the pulse boosting module can also be made of an iron-based nanocrystalline material.

In practical application, in order to reduce implementation difficulty, two or three sections of anti-resonance networks can be adopted to realize high-quality high-voltage quasi square wave output, and the main capacitor, the shaping capacitor, the main inductor and the shaping inductor can be determined according to the pulse width and the characteristic impedance of required output.

The two sections of anti-resonance networks have simple structures, the parameters of the output waveform circuit are convenient to adjust, and the circuit parameters can be calculated by the following formula:

compared with two-section networks, the three-section anti-resonance network has shorter time of the front edge and the back edge of the output waveform, but has more circuit parameters needing to be adjusted, and the circuit parameters can be determined by the following formula:

wherein: τ is the pulse width of the output quasi square wave, and ρ is the characteristic impedance of the pulse forming module. The number of network nodes can be reasonably selected according to specific application requirements.

Because the FRSPT primary adopts a winding structure with a fractional ratio, the voltage boost ratio is (N)_p/N):N_s＝N_p:N×N_sIn particular, when the primary sub-winding is a single turn wire-wound winding, the voltage step-up ratio is 1: NXN_sThe primary winding is single turn and the secondary winding is N compared with the common primary winding _s1 of the turns: n is a radical of_sFor the transformer, the FRSPT of the invention increases the voltage by the multiple of N_sThe multiple improvement is NXN_sCompared with the traditional pulse transformer, the FRSPT has the advantages of simple structure, small volume, capability of realizing the miniaturization and integration of the pulse transformer and the magnetic switch, capability of reducing the primary working voltage, small secondary saturation inductance, high step-up ratio and the like, can be used in a miniaturized pulse power device, can quickly convert the magnetic core between a saturated state and a non-saturated state during the step-up, and is used as a main switch to discharge the load.

The working process of the invention is as follows: charging module pair primary side capacitor C₀₁、C₀₂、…、C_0NCharging to a certain voltage, switching on and off₀₁、S₀₂、…、S_0NWhen the system is closed, the primary side capacitor discharges the FRSPT of the pulse boosting module, and the FRSPT boosts the voltage to the capacitors C of each stage of the Marx generator₁₁，C₁₂，……，C_1mCharging, when Marx generator each stage capacitor C₁₁，C₁₂，……，C_1mWhen the charging is carried out to a certain voltage, FRSPT magnetic saturation is carried out, the Marx generator is connected in series to discharge, and the capacitor C in the module is formed through pulse₁、C₂、…、C_QInductance L₁、L₂、…、L_QAnd outputting microsecond-level square wave pulses after modulation, and finally obtaining microsecond-level high-voltage square wave pulses on a load through further MOV shaping.

Compared with the prior art, the invention has the main technical advantages that:

1. the invention realizes the dual functions of the pulse transformer and the magnetic switch by utilizing the Fractional Ratio Saturable Pulse Transformer (FRSPT), realizes the compact integration of the pulse transformer with large transformation ratio and the magnetic switch, and simultaneously avoids the voltage-sharing problem of improving the working voltage of the device by adopting a mode of connecting a plurality of switches in series;

2. because the fractional ratio saturable pulse transformer is used, the working voltage of the primary side of the transformer is effectively reduced, so that the primary side can adopt high-power switches such as IGBT (insulated gate bipolar transistor) or thyristor and the like, and the solid stating and the compacting of a system are facilitated; meanwhile, the saturation inductance of the secondary side of the transformer is reduced, and effective pulse compression can be realized;

3. in the invention, the FRSPT is used for replacing a gas switch in the Marx generator, thereby avoiding electrode ablation and shaking of the gas switch in the traditional Marx generator and prolonging the service life of the pulse generator;

4. the switch is closed by the forced saturation of the magnetic core without adding a complex trigger and control circuit, the magnetic core is forced to be saturated by a volt-second product (the volt-second product is the maximum voltage pulse width before the magnetic core is saturated and is equal to the product of the saturation magnetic flux density of the magnetic core, the number of turns and the effective sectional area of the magnetic core), and all the switches are closed accurately and synchronously;

5. the high repetition frequency and the long service life of the magnetic switch per se ensure that the repetition frequency and the service life of the magnetic switch are also greatly improved, and the anti-interference capability of the system is strong;

6. the circuit connection in the invention considers the characteristic that the circuit connection form of the primary side is combined with the zero-crossing turn-off of the thyristor, so that the currents flowing through the windings of the FRSPT magnetic core are opposite in the charging and discharging processes to complete the reset without an additional reset system;

7. in the invention, the high-voltage silicon stack is adopted to replace an inductor which plays an isolation role in the traditional Marx generator, so that the prepulse problem on the load in the technical background III is basically eliminated;

8. the pulse forming module of the invention adopts the anti-resonance network to overcome the defect of poor flat-top stability of the output waveform of the traditional pulse forming network, and the FRSPT secondary saturated inductor and the series capacitor of the Marx generator during discharging can be used as the main capacitor and the main inductor of the anti-resonance circuit, thereby realizing the unification of low pre-pulse effect and quasi square wave output.

9. According to the invention, the flat top is further rigidized by adopting a metal oxide piezoresistor (MOV), so that square wave pulse output with higher quality and flat top than the three-phase flat top in the prior art can be obtained;

10. the whole system is composed of the solid-state element and the solid-state switch, so that the solid-state, compact and integrated pulse power generator is realized, the volume and weight of the system are greatly reduced, the repeated frequency operation capacity of the system is improved, and the system can be applied to the fields of high-power microwave sources, food, sterilization, disinfection, wastewater treatment and the like.

Drawings

The invention will be illustrated by way of example and by way of the accompanying drawings in which:

FIG. 1 is a schematic diagram of a K-level magnetic compression network circuit proposed in the background art [ Melville W S.the use of a volatile reactant as a discharge device for pulse generators [ J ]. Electrical Engineers Journal of the institute of 1951,1951 (1951) (6):179 & 181 ];

FIG. 2 is a schematic diagram of a pulse modulator circuit based on two-stage SPT pulse compression units developed under the second technical background [ Zhang D, Zhou Y, Wang J, et al.A. compression, high repetition-rate, nano-controlled pulse generator based on magnetic pulse compression system [ J ]. IEEE Transactions on semiconductors and electric instruments, 2011,18(4): 1151-;

FIG. 3 is a schematic diagram of a microsecond quasi-square wave pulse generator based on a fractional saturable pulse transformer and anti-resonant network studied in the background art "third [ Rong Chen, Jianhua Yang, Xinbing Cheng, et al, all-solid-state micro-second-range quadrature-square-wave generator based on fractional-rate saturated pulse transformer and anti-resonant network [ J ]. Rev.Sci.Instrum.,2017,88(3):103302-102 ];

FIG. 4 is a schematic diagram of an all-solid-state square wave pulse generator according to the present invention;

FIG. 5(a) is a block diagram of an embodiment of an all-solid-state square wave pulse generator with a five-core FRSPT and two anti-resonant networks according to an embodiment of the present invention;

FIG. 5(b) is a diagram of an all-solid-state square wave pulse generator system with five magnetic cores FRSPT and two anti-resonant networks according to an embodiment of the present invention;

FIG. 6(a) is an experimental output waveform of a Marx generator in an example of an all-solid-state square wave pulse generator with a five-core FRSPT and two anti-resonant networks according to an embodiment of the present invention;

FIG. 6b) is the experimental output waveform of an all-solid-state square wave pulse generator with five magnetic cores FRSPT and two anti-resonance networks without Metal Oxide Varistor (MOV) connected thereto according to the embodiment of the present invention;

fig. 7 is a comparison graph of experimental output waveforms before and after an all-solid-state square wave pulse generator with a five-core FRSPT and two anti-resonant networks is connected to an MOV according to an embodiment of the present invention.

The reference numerals in fig. 3 are explained as follows:

1 primary side capacitor, 2 fractional ratio saturable pulse transformer FRSPT, 3 primary side control thyristor switch, 4 main capacitor, 5 shaping capacitor, 6 shaping inductor, 7 high power transformer, 8 variable inductor;

the reference numerals in fig. 5 are explained as follows:

the transformer comprises a saturable pulse transformer FRSPT with a 9-fraction ratio, a 10 Marx-grade capacitor, a 11 high-voltage silicon stack, a 12 first-grade shaping capacitor, a 13 first-grade shaping inductor, a 14 second-grade shaping capacitor, a 15 second-grade shaping inductor, a 16 shell bottom plate, a 17 outer barrel, a 18 shell cover plate (output plate), a 19 fixed pull rod, a 20 second bakelite plate, a 21L-shaped connecting block, a 22 third bakelite plate and a 23 first bakelite plate.

Detailed Description

The invention will be further described with reference to the accompanying drawings.

FIG. 1 is a drawing of a background art [ Melville W S ] the use of configurable microorganisms as discharge devices for pulse generators [ J ]]The circuit schematic diagram of the K-class magnetic compression network proposed in the Journal of the institute of motion, 1951(6), 179-181. The common K-level (K is an integer, K is more than or equal to 1) magnetic switch pulse compression circuit is composed of an energy storage capacitor C₀Control switch S₀Resonant inductance L₀Intermediate stage capacitor C₁～C_K-1Capacitor C of discharging_KAnd a magnetic switch MS_i(i ═ 1,2, …, K) and the load composition. Energy storage capacitor C₀At the switch S₀After closing, through the inductor L₀Capacitor C₁Charging, intermediate stage capacitor C₁～C_K-1And magnetic switch MS₁～MS_K-1Subjecting the pulses to abrupt compression, C_K，MS_KA discharge loop is provided for the capacitor. The common K-level magnetic pulse compression circuit comprises K-level magnetic compression units, wherein each level of magnetic compression unit comprises 1 capacitor C_iAnd 1 magnetic switch MS_i(i ═ 1,2, …, K). The main working process is as follows: the external power supply firstly supplies the energy storage capacitor C₀Charging in an energy storage capacitor C₀Control switch S when full charge₀Closure, C₀Through an inductance L₀A capacitor C for the 1 st magnetic compression unit₁Resonant charging due to magnetic switching MS₁Unsaturated and has large impedance, which is equivalent to open circuit, and the 2 nd stage magnetic compression unit stage capacitor C₂The voltage on is almost constant and is maintained at zero, MS₁The current in (1) is also approximately zero, MS₁The voltage across is approximately equal to C₁The voltage of (c). The 1 st level magnetic compression unit level capacitor C is enabled to be reasonable in design₁When the voltage on reaches the maximum value, the magnetic switch MS₁Saturation, requiring that its saturation inductance is much smaller than the resonance inductance L₀Capacitor C₁By magnetic switch MS₁Rapidly to the 2 nd level magnetic pressureShrinking unit-level capacitor C₂Charging; … …, respectively; according to the same rule, the capacitor C of the last stage of magnetic compression unit_KThe charging reaches the maximum value, and the last stage of magnetic switch MS_KSaturation, capacitance C_KBy magnetic switch MS_KRapidly discharging to the load.

FIG. 2 is a schematic diagram of a pulse modulator circuit based on a two-stage SPT pulse compression unit, which is developed in the second background art [ Zhang D, Zhou Y, Wang J, et al.A. compression, high repetition-rate, nano-controlled pulse generator based on magnetic pulse compression system [ J ]. IEEE Transactions on semiconductors and electric compression, 2011,18(4):1151-1157 ], and which is composed of a resonant charging circuit and a three-stage magnetic compression network, wherein the resonant charging circuit rectifies 220V commercial power through 4 rectifying silicon stacks Q1-Q4, charges a storage capacitor C1 through a resonant inductor L1, and obtains a low-voltage and long-pulse width square wave signal on a capacitor C2 through a high-power semiconductor switch S1; the saturable pulse transformers PT1, PT2 and the magnetic switch MS1 form a three-level magnetic compression network, wherein two levels of SPT pulse compression units are used for boosting voltage, the magnetic switch MS1 plays a role in sharpening the leading edge, and finally high-voltage pulses with the amplitude of 45-62 kV, the pulse width of 70ns and the leading edge of 30ns are output on 307-1000 omega loads, and the high-impedance load and the magnetic switch playing a role in sharpening are the key points for obtaining the fast leading edge pulses.

FIG. 3 is a diagram of a microsecond quasi-square-wave pulse generator developed in the background of the invention section three [ Rong Chen, Jianhua Yang, Xinbing Cheng, et al, all-solid-state micro-connected-range-square-wave generator based on fractional-ratio saturable pulse transformer and anti-resonance network [ J ]. Rev.Sci.Instrum.,2017,88(3):103302-102 ], which is essentially composed of a pulse boosting module, a pulse forming module and a load. The pulse boosting module adopts 5 annular iron-based amorphous magnetic cores with central axes symmetrical to form a fractional ratio saturable transformer FRSPT, and two groups of primary capacitors 1 charge a pulse forming module main capacitor 4 through two groups of control switches 3 and a transformer 2; the pulse forming module is composed of two sections of anti-resonance networks consisting of a main capacitor 4, a shaping capacitor 5 and a shaping inductor 6; the variable inductor 8 is used for reducing pre-pulse formed on a load in a charging process and consists of a high-voltage coil wound on a closed magnetic core, and a reset coil is simultaneously wound on the closed magnetic core and connected with a direct-current reset power supply. When charging, the variable inductor 8 is a small inductor, so that pre-pulse on a load during charging can be reduced; the variable inductor 8 is a large inductor during discharging, so that the normal work of the pulse forming module can be ensured; the high-power transformer 7 is a square-wave transformer, and can further boost the quasi-square-wave signal obtained by the pulse forming module and perform impedance transformation. Through boosting and modulation, the pulse generator can output quasi square wave pulses with the voltage amplitude of 27kV, the pulse width of 1.6 mu s and the flat top of about 700ns on a matching load of 3500 omega when the primary side is charged with 400V, and can stably operate at the repetition frequency of 50 Hz.

Fig. 4 is a schematic diagram of an all-solid-state square wave pulse generator circuit according to the present invention. The pulse generator is composed of a charging module, a pulse boosting module, a pulse forming module and a load module. The working process of the generator is as follows: DC stabilized power supply through isolation inductor L₀₁、L₀₂、…、L_0NTo primary side capacitor C₀₁、C₀₂、…、C_0NCharging with DC current, and switching S when charging to set voltage₀₁、S₀₂、…、S_0NConducting primary side capacitor C₀₁、C₀₂、…、C_0NDischarging FRSPT, boosting the voltage of the FRSPT, and then applying the voltage to each stage of capacitor C of the Marx generator₁₁、C₁₂、…、C_1mCharging, when the magnetic core of the FRSPT is saturated, the secondary of the FRSPT is used as a magnetic switch to control each stage of capacitor C of the Marx generator₁₁、C₁₂、…、C_1mThe series connection discharges to the pulse forming module through a shaping capacitor C₂And a shaping inductor L₂Shaping capacitor C₃And a shaping inductor L₃…, shaping capacitor C_QAnd a shaping inductor L_QAfter the (Q-1) section of shaping network is modulated, a quasi square wave pulse signal with good flat top degree and strong stability is formed on the load through further adjustment and rigidization of a Metal Oxide Varistor (MOV) connected with the load in parallel.

Fig. 5 is a structural diagram (a) of an embodiment of an all-solid-state square wave pulse generator with two anti-resonant networks and a physical diagram (b) constructed according to the structural diagram in an embodiment of the present invention; the university of defense science and technology designs a 2 mu s all-solid-state high-voltage square wave pulse generator which is fixed in a cylindrical polypropylene (pp) cylinder and is divided into three layers in the whole layout, three bakelite plates (a bakelite plate 23, a bakelite plate 20 and a bakelite plate 22) are fixed on a shell bottom plate 16 through 4 threaded fixed pull rods 19, a fractional ratio saturable transformer (FRSPT)9 is fixed on the bakelite plate 23, a magnetic core part of the bakelite plate is formed by stacking 5 iron-based amorphous magnetic rings with the same size, the size of a single magnetic ring body is phi 200 multiplied by phi 90 multiplied by 25 (phi 200 represents that the outer diameter of the magnetic ring is 200, phi 90 represents that the inner diameter of the magnetic ring is 90,25 represents that the height of the magnetic ring is 25, the unit is mm, the same below), the single magnetic ring is packaged through an insulating sleeve made of a circular ring polypropylene material, the size of the sleeve is phi 206 multiplied by phi 85 multiplied by 28, and the outer part of, The inner wall thickness and the bottom wall thickness are both 2 mm. In order to ensure uniform excitation, the primary windings of the transformer are two groups which are completely the same, each group of primary windings is composed of two paths of single-turn primary sub-windings, a high-voltage wire with the diameter phi 3 is adopted to be wound on each magnetic ring independently, finally, 10 input ends of the two groups are connected in parallel to serve as a total input end to be connected with a primary side capacitor, and 10 output ends are connected in parallel to serve as a total output end to be grounded; two groups of solid capacitors are used as primary side energy storage capacitors, each group comprises three capacitors of 2kV/70 mu F of monomers connected in parallel, the primary side energy storage capacitors are 420 mu F in total, and each group of primary side capacitors are respectively connected with a thyristor control switch; the secondary winding is composed of 4 groups of completely same secondary windings, each group of secondary windings comprises 3 lines of wire-wound secondary sub-windings which are connected in parallel, the 3 lines of secondary sub-windings share a magnetic core and are sequentially arranged along the circumferential direction, the high-voltage wire with the diameter of phi 3 is also adopted for winding, the number of winding turns of each line of secondary sub-windings is 10, all 5 magnetic rings are surrounded, and therefore, the ideal voltage transformation ratio of the fractional ratio saturable transformer (FRSPT)9 is 1: 50;

the first layer and the second layer are separated by a second bakelite plate 20, and the second layer is fixed with a 4-grade Marx generator which is composed of 4 identical Marx-grade capacitors 10 and 4 single cylinders of 50kV/3kAThe high-voltage silicon stack 11 is formed, the stage capacitor 10 is formed by connecting 8 2.2nF/50kV ceramic capacitors in parallel on two copper plates, the two copper plates are fixed on a second bakelite plate 20 through an L-shaped polypropylene connecting block 21 and a screw, and the 1 st group of stage capacitors C₁₁One end of the secondary winding is connected with the output high-voltage end of the 1 st group of secondary windings of the FRSPT, and the other end of the secondary winding is connected with the 1 st group of isolation silicon stack D₁₁Positive electrodes connected to each other, group 1 isolation silicon stack D₁₁The negative electrode of the secondary winding is grounded together with the output low-voltage end of the FRSPT 1 st group of secondary windings; group 2 stage capacitor C₁₂One end of the second group of secondary windings is connected with the output high-voltage end of the FRSPT group 2 secondary winding, and the other end of the second group of secondary windings is connected with the isolation silicon stack D of the group 2₁₂Anode connected, group 2 isolation silicon stack D₁₂The negative pole of the secondary winding and the output low-voltage end of the secondary winding of the 2 nd group of the FRSPT are connected with the isolated silicon stack D of the 1 st group₁₁The positive electrode of (1); group 3 stage capacitor C₁₃One end of the second group of the secondary windings is connected with the output high-voltage end of the FRSPT group 3, and the other end of the second group of the secondary windings is connected with the isolation silicon stack D of the group 3₁₃Anode connected, group 3 isolation silicon stack D₁₃The negative pole of the secondary winding and the output low-voltage end of the 3 rd group secondary winding of the FRSPT are connected with the 2 nd group isolation silicon stack D₁₂The positive electrode of (1); group 4 stage capacitor C₁₄One end of the secondary winding is connected with the output high-voltage end of the 4 th group of secondary windings of the FRSPT, and the other end of the secondary winding is connected with the 4 th group of isolation silicon stack D₁₄Positive electrodes connected, group 4 isolation silicon stack D₁₄The negative pole of the secondary winding and the output low-voltage end of the 4 th group of secondary windings of the FRSPT are connected with the 3 rd group of isolated silicon stacks D₁₃Positive electrode of (1), and finally group 4 isolated silicon stack D₁₄The positive electrode of the Marx generator is used as an output high-voltage end of the Marx generator and is connected with the pulse forming module;

the second layer and the third layer are separated by a third bakelite plate 22, the third layer is fixed as a pulse forming module and consists of a first-stage shaping capacitor 12, a first-stage shaping inductor 13, a second-stage shaping capacitor 14 and a second-stage shaping inductor 15, and as the output impedance is designed to be rho 200 omega and the output pulse width tau is 2 mus, the pulse forming module main capacitor C is obtained by calculation₁Main inductance L of 4.35nF₁88 muH, first stage shaping capacitor C₂4.5nF, first stage shaping inductor L₂4.8 muH, second stage shaping capacitor C₃2.5nF, second stage shaping inductance L₃33.5 muH, main capacitor is discharged by Marx generatorThe capacitors 10 of each stage are connected in series; the main inductor consists of an FRSPT secondary winding saturated inductor and a loop parameter inductor; the first-stage shaping capacitor 12 is formed by connecting four capacitor groups in parallel on two copper plates, and each capacitor group is formed by connecting two single 2.2nF/50kV ceramic capacitors in series; the second-stage shaping capacitor 14 is formed by connecting two capacitor groups in parallel on two copper plates, and each capacitor group is formed by connecting two single 2.2nF/50kV ceramic capacitors in series; the first-stage shaping inductor 13 and the second-stage shaping inductor 15 are both formed by winding high-voltage wires; the whole device is packaged in the outer cylinder 17, the outer shell cover plate 18 is used as an output plate at the same time, and square wave pulses with high quality are output on matched loads.

In order to verify the characteristics of this embodiment, experiments were conducted according to the design to verify that the output voltage of the dc regulated power supply is 350V, wherein the output waveform of the 4-stage Marx generator is as shown in fig. 6(a), curve a is the charging waveform of the high-voltage end of the first-stage Marx generator, the highest charging voltage is 16.9kV, the charging time is about 15.1 μ s, and curves I, II, III, and IV are the output voltage waveforms of the low-voltage ends of the capacitors of the various stages Marx, respectively, as can be seen from the figure, the voltage boost condition of the Marx generator is good, the output voltage can be stabilized at about 57.6kV when charging at 350V, and the voltage boost ratio is about 3.4. The final output voltage was about 32.6kV at 200 Ω load, pulse width 1.93 μ s, as shown in FIG. 6 (b); in order to further harden the flat top, 4 single metal oxide piezoresistors (MOV) of 8kV/10kA are connected with the load in parallel, the output waveform on the load is shown in figure 7, and the waveform flat top is obviously improved.

According to the results, the primary side working voltage and the secondary side saturated inductance of the pulse transformer can be reduced, and the compact integration of the pulse transformer and the magnetic switch is realized; the magnetic switch is used for replacing a gas switch in the traditional Marx generator, so that ablation and shaking of the gas switch are avoided, and the service life and the repetition frequency of the whole system are greatly improved; furthermore, the high-voltage silicon stack is used for replacing an isolation inductor in the traditional Marx generator, so that the prepulse problem mentioned in the third technical background is effectively eliminated; meanwhile, the quasi square wave pulse with high quality and good flat top can be output through shaping modulation of the anti-resonance network, complete solid state and miniaturization of the system are achieved, the size is small, the weight is light, transportation and practicability are facilitated, a multi-switch series structure of the high-voltage pulse generator is avoided, and the service life can be prolonged.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

Claims

1. An all-solid-state square wave pulse generator, comprising: the pulse generator consists of a charging module, a pulse boosting module, a pulse forming module and a load module; the charging module is used as an energy supply module of the pulse generator, charges the pulse forming module through the pulse boosting module and provides automatic reset current for the fractional ratio saturable transformer magnetic core in the pulse boosting module; the pulse boosting module is formed by cascading an FRSPT and a Marx generator, wherein on one hand, the FRSPT is used as a pulse transformer to carry out resonance charging on the Marx generator, and on the other hand, the FRSPT is used as a control switch of a series discharging loop of the Marx generator; the pulse forming module is used for forming quasi square wave pulses; the load module is formed by connecting a metal oxide piezoresistor and a resistive load in parallel, and the MOV is used for further shaping the waveform due to good nonlinear volt-ampere characteristics of the MOV, so that the flat top of the quasi square wave pulse is hardened;

the charging module consists of a DC stabilized voltage power supply and an isolation inductor L₀₁、L₀₂、…、L_0NPrimary side capacitor C₀₁、C₀₂、…、C_0NAnd switch S₀₁、S₀₂、…、S_0NAnd an FRSPT primary winding, N is more than or equal to 1; the DC stabilized power supply is a primary capacitor C₀₁、C₀₂、…、C_0NProviding energy according to the primary capacitance C₀₁、C₀₂、…、C_0NThe charging voltage determines the working voltage and the working current of the direct current stabilized power supply; isolation inductor L₀₁、L₀₂、…、L_0NFor protection, in a primary side capacitor C_0nWhen a fault occurs, the primary side power in other branches can be protectedSafe, N ═ 1,2, …, N; primary side capacitor C₀₁、C₀₂、…、C_0NA primary side energy storage capacitor used as FRSPT; switch S₀₁、S₀₂、…、S_0NThe primary side capacitor is used for controlling the time for discharging the FRSPT; the working process of the charging module is as follows: DC stabilized power supply through isolation inductor L₀₁、L₀₂、…、L_0NTo primary side capacitor C₀₁、C₀₂、…、C_0NCharging, when FRSPT needs to be charged, switch S₀₁、S₀₂、…、S_0NSynchronously conducting to discharge the primary capacitor;

the pulse boosting module consists of an FRSPT and an m-level Marx generator, wherein m is a positive integer; the FRSPT consists of a transformer inner core, a primary winding and a secondary winding; the transformer inner core is composed of N magnetic cores and corresponding insulating sleeves and is rotationally symmetrical about a central axis of the transformer; the N magnetic cores are all magnetic rings with the same size, each magnetic ring is wound into a ring shape by a thin-film coil made of an iron-based amorphous material and then is poured and packaged by a glass fiber reinforced plastic material; because the magnetic core has certain conductivity, the insulating sleeve is processed by adopting a ring-shaped polypropylene material and is sleeved outside the magnetic core for insulation; the magnetic core and the insulating sleeve sleeved outside the magnetic core jointly form a transformer inner core, and N transformer inner cores are stacked along the central symmetry axis direction of the transformer and sequentially provided with a first block, a second block, … and an Nth block from top to bottom; in order to ensure uniform excitation, the FRSPT primary winding part of the invention is composed of two groups of completely same primary sub-windings, the two groups of primary sub-windings have axial symmetry about the central axis of the transformer, each group of primary sub-windings is composed of a 1 st primary sub-winding, a 2 nd primary sub-winding, … … and an Nth primary sub-winding, the N paths of primary sub-windings are wound by adopting high-voltage wires with withstand voltage of more than 10kV, and the number of turns is N_pTurns; the 1 st path of primary sub-winding penetrates through the top of the 1 st transformer inner core, surrounds the 1 st inner core from the inside and then penetrates out of the gap between the bottom of the 1 st inner core and the top of the 2 nd inner core; the 2 nd primary sub-winding penetrates through a gap between the top of the 2 nd transformer core and the bottom of the 1 st transformer core, surrounds the 2 nd transformer core from the inside, and then penetrates through the bottom of the 2 nd transformer core and the bottom of the 1 st transformer corePenetrating out of a gap at the top of the inner core of the No. 3 block, … …, according to the same rule, until the Nth primary sub-winding penetrates in the gap between the top of the inner core of the Nth transformer and the bottom of the inner core of the Nth-1 transformer, and penetrates out of the bottom of the inner core of the Nth block after surrounding the Nth inner core from the inside; input end of 1 st path primary sub-winding and 1 st path control switch S₀₁The input end of the 2 nd primary sub-winding is connected with the 2 nd control switch S₀₂… …, the input end of the Nth primary sub-winding is connected with the Nth control switch S_0NThe output ends of the N primary sub-windings are all connected in parallel to serve as the total output end to be grounded; the secondary winding of the FRSPT consists of a 1 st group of secondary windings, a 2 nd group of secondary windings, … … and an m th group of secondary windings, each group of secondary windings comprises j paths of wire-wound secondary sub-windings connected in parallel, j is a positive integer, the j paths of secondary sub-windings share a magnetic core, are sequentially arranged along the circumferential direction and are wound by adopting high-voltage wires with the withstand voltage of more than 10kV, and the number of turns of the wire of each path of secondary sub-winding is N_sTurns; a 1 st path of secondary sub-winding of the 1 st group of secondary winding penetrates through the top of the 1 st transformer core, penetrates out of the bottom of the N th transformer core after surrounding all the N transformer cores, a 2 nd path of secondary sub-winding of the 1 st group of secondary winding penetrates through the top of the 1 st transformer core, penetrates out of the bottom of the N th transformer core after surrounding all the N blocks of cores, … …, a jth path of secondary sub-winding of the 1 st group of secondary winding penetrates through the top of the 1 st transformer core, penetrates out of the bottom of the N th transformer core after surrounding all the N blocks of cores, … …, according to the rule, until a jth path of secondary sub-winding of the m group of secondary winding penetrates through the top of the 1 st transformer core, penetrates out of the bottom of the N block of transformer core after surrounding all the N blocks of cores, and the secondary windings totally complete the wiring of the m multiplied by j paths of secondary;

the m-stage Marx generator is composed of a 1 st group Marx generator stage capacitor C₁₁And an isolated silicon stack unit D₁₁And the 2 nd group of Marx generator stage capacitor C₂₂And an isolated silicon stack unit D₂₂… …, m group Marx generator stage capacitance C_1mAnd an isolated silicon stack unit D_1mEach group of level capacitor is formed by connecting a plurality of single ceramic capacitors with voltage resistance of 50kV/2nF in parallelThe number of ceramic capacitors is determined by the stage capacitance C_1mDetermining the capacitance of (c); each group of isolated silicon stacks adopts a cylindrical high-voltage silicon stack with a monomer of 50kV/3 kA; group 1 stage capacitor C₁₁One end of the secondary winding is connected with the output high-voltage end of the 1 st group of secondary windings of the FRSPT, and the other end of the secondary winding is connected with the 1 st group of isolation silicon stack D₁₁Positive electrodes connected to each other, group 1 isolation silicon stack D₁₁The negative electrode of the secondary winding is grounded together with the output low-voltage end of the FRSPT 1 st group of secondary windings; group 2 stage capacitor C₁₂One end of the second group of secondary windings is connected with the output high-voltage end of the FRSPT group 2 secondary winding, and the other end of the second group of secondary windings is connected with the isolation silicon stack D of the group 2₁₂Anode connected, group 2 isolation silicon stack D₁₂The negative pole of the secondary winding and the output low-voltage end of the secondary winding of the 2 nd group of the FRSPT are connected with the isolated silicon stack D of the 1 st group₁₁The positive electrode of (1); group 3 stage capacitor C₁₃One end of the second group of the secondary windings is connected with the output high-voltage end of the FRSPT group 3, and the other end of the second group of the secondary windings is connected with the isolation silicon stack D of the group 3₁₃Anode connected, group 3 isolation silicon stack D₁₃The negative pole of the secondary winding and the output low-voltage end of the 3 rd group secondary winding of the FRSPT are connected with the 2 nd group isolation silicon stack D₁₂… …, according to such a law, up to the m-th group of capacitors C_1mOne end of the second group of the secondary windings is connected with the output high-voltage end of the mth group of the secondary windings of the FRSPT, and the other end of the second group of the secondary windings is connected with the mth group of the isolation silicon stack D_1mPositive electrodes connected, m-th group of isolation silicon stacks D_1mThe negative electrode of the first group and the output low-voltage end of the mth group of the FRSPT are connected with the (m-1) th group of the isolation silicon stack D_1(m-1)Positive electrode of (1), m-th group of isolated silicon stacks D_1mThe positive electrode of the pulse generator is used as a high-voltage output end of the m-level Marx generator and is connected with the pulse forming module through a high-voltage wire;

the pulse forming module is composed of a main capacitor C₁A main inductor L₁And (Q-1) section shaping network consisting of Q section antiresonance network, wherein the shaping network is composed of shaping capacitors C connected in parallel₂And a shaping inductor L₂Shaping capacitor C connected in parallel₃And a shaping inductor L₃…, shaping capacitor C connected in parallel_QAnd a shaping inductor L_QAre connected in series; one end of the first shaping network is connected with the high-voltage output end of the m-level Marx generator, and the other end of the first shaping network is connected with one end of the second shaping network; the other end of the second shaping network is connected to a third shaping network, … …, which, according to this law,one end of the No. (Q-1) section of shaping network is connected with one end of the No. (Q-1) section of shaping network, and the other end of the No. (Q) section of shaping network is connected with the load module; main inductance L₁Connected in series with the (Q-1) section shaping network and provided with a main capacitor C₁Can use the stage capacitor C in the m-stage Marx generator_1qThe series capacitance during discharge is replaced, q is 1,2, …, m, and the main inductance L₁The loop inductance in the circuit can be used for replacement;

the load module is composed of MOV parallel resistive loads, the MOV is formed by connecting a plurality of cylindrical zinc oxide resistance sheets in series, the abnormal overvoltage in a circuit is sensed and limited by utilizing the special nonlinear volt-ampere characteristic that the resistance value of the MOV is sensitively changed along with the external voltage, so that the effect of flattening the flat top is achieved, and the number of the zinc oxide resistance sheets connected in series is determined by the output voltage on the loads.

2. The all-solid-state square wave pulse generator of claim 1, wherein: primary side control switch S₀₁、S₀₂、…、S_0NA thyristor switch or an IGBT is adopted, an isolation silicon stack in the m-grade Marx generator is packaged in vacuum by epoxy resin, and the surface of the isolation silicon stack has corrosion resistance.

3. The all-solid-state square wave pulse generator of claim 1, wherein: and magnetic rings of a magnetic core in an inner core of the transformer of the pulse boosting module are made of iron-based nanocrystalline materials.

4. The all-solid-state square wave pulse generator of claim 1, wherein: two or three sections of anti-resonance networks are adopted to realize high-quality high-voltage quasi square wave output, and the main capacitor, the shaping capacitor, the main inductor and the shaping inductor can be determined according to the pulse width and the characteristic impedance required to be output.

5. The all-solid-state square wave pulse generator of claim 4, wherein: the circuit parameters of the two anti-resonant networks can be calculated by the following formula:

wherein: τ is the pulse width of the output quasi square wave, and ρ is the characteristic impedance of the pulse forming module.

6. The all-solid-state square wave pulse generator of claim 4, wherein: the circuit parameters of the three-section anti-resonant network can be determined by the following formula: