CN108387171B - Flexible probe for detecting roughness based on capacitance method and roughness algorithm thereof - Google Patents
Flexible probe for detecting roughness based on capacitance method and roughness algorithm thereof Download PDFInfo
- Publication number
- CN108387171B CN108387171B CN201810432890.1A CN201810432890A CN108387171B CN 108387171 B CN108387171 B CN 108387171B CN 201810432890 A CN201810432890 A CN 201810432890A CN 108387171 B CN108387171 B CN 108387171B
- Authority
- CN
- China
- Prior art keywords
- flexible
- metal
- roughness
- probe
- capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000523 sample Substances 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000004422 calculation algorithm Methods 0.000 title claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 80
- 229910052751 metal Inorganic materials 0.000 claims abstract description 80
- 238000012360 testing method Methods 0.000 claims abstract description 18
- 238000005259 measurement Methods 0.000 claims abstract description 12
- 238000007747 plating Methods 0.000 claims description 12
- 230000003746 surface roughness Effects 0.000 claims description 8
- 238000005538 encapsulation Methods 0.000 claims description 6
- 239000003990 capacitor Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 5
- 238000005516 engineering process Methods 0.000 claims description 4
- 238000012937 correction Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000009471 action Effects 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 2
- 238000004382 potting Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920003051 synthetic elastomer Polymers 0.000 description 3
- 239000005061 synthetic rubber Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000009659 non-destructive testing Methods 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 241001422033 Thestylus Species 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/002—Constructional details of contacts for gauges actuating one or more contacts
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a flexible probe for detecting roughness based on a capacitance method and a roughness algorithm thereof. The front end of the flexible probe can be better attached to the surface of the metal to be tested due to the action of the flexible encapsulating structure, so that the front end can better adapt to the testing requirements of the surface of the metal to be tested with different curvatures; the standard BNC-M-50KKY connector is adopted to manufacture the probe, so that the cost is reduced; the outer edges of the two insulating layers are larger than the outer edges of the metal polar plates, so that the contact force between the flexible electrode plate and the metal of the measured object is uniform; because of the originality of the structural combination of the patent, the implementation operation is simpler and more convenient and easier than the traditional optical method and the probe contour method; and a unique roughness algorithm is adopted to combine with the measurement of the flexible probe, so that an accurate roughness value is obtained.
Description
Technical Field
The invention belongs to the technical field of roughness detection equipment, and particularly relates to a flexible probe for detecting roughness based on a capacitance method and a roughness algorithm thereof.
Background
The basic principle of measuring the roughness of the metal surface by the capacitance method is shown in fig. 1, if the upper polar plate P1 of the capacitor is used as a sensing head and the lower polar plate P2 is used as the surface of the metal part to be measured, the sensing head and the part together form a pair of flat capacitors with capacitance value of C. The capacitance C between the plates P1 and P2 is proportional to the area a between the plates and inversely proportional to the distance t between the parallel plates. That is, when the gap t between the sensing head and the surface of the part under test changes, C will change. For a rough surface, different roughness results in different gaps of contact surfaces, capacitance values C between two polar plates are different, and the roughness value can be tested by the capacitance values through theoretical analysis and test to establish a relation between the roughness and the capacitance values.
Document (1) and document (2) propose a basic structure of a capacitive sensor, using a piece of flexible material as a reference electrode plate, attaching a standard sheet electrode to a conductive synthetic rubber substrate with conductive adhesive, and insulating the conductive synthetic rubber and the sensor metal housing from each other, as shown in fig. 2.
During measurement, the flexible sensor probe contacts the surface of the part, so that the peak top line of the surface of the measured part with any shape and any curvature can be tracked, and the function of a geometric cutoff value is actually achieved, so that the influence of shape errors and surface waviness can be automatically filtered from a measurement result.
With the above correlation model, measurement of roughness can be performed.
Document (3) describes the development of a capacitive surface roughness nondestructive inspection apparatus, but the configuration of the inspection probe is not specifically described.
The above references:
(1) Yuan Changliang, ding Zhihua, wu Wentang. Surface roughness and its measurement, beijing: mechanical industry Press, 1989, p169-171;
(2) Guo Suzhen the surface roughness is measured by capacitance method, mechanically processed by cold working 1992.06;
(3) Building sensitive bead Yan Reng spring. Development of capacitive surface roughness nondestructive testing device. Nondestructive testing 1996.10;
the problems of the above technology are:
1. the polar plate is supported by conductive synthetic rubber and is conductive, but when the conductive rubber is pressed, the general impedance can be changed, so that measurement errors are caused.
2. The design of the metal shell is provided, but whether the metal shell is grounded or not is not expressed, and if the metal shell is not grounded, the test precision is seriously affected by environmental electromagnetic interference;
3. there is no accurate and complete set of roughness calculation algorithms.
Disclosure of Invention
The invention aims to solve the problems and provide a flexible probe for detecting roughness based on a capacitance method and a roughness algorithm thereof.
The invention realizes the above purpose through the following technical scheme:
a flexible probe for detecting roughness based on a capacitance method, which performs capacitance value measurement between the flexible probe and a metal to be detected through a capacitance tester, comprises:
a flexible electrode plate;
the inner inserting needle is electrically connected with the flexible electrode plate at one end;
the first end of the inner core of the supply connector is electrically connected with the other end of the interpolation needle, the second end of the inner core of the supply connector is electrically connected with the first test end of the capacitance tester, and the tested metal is electrically connected with the second test end of the capacitance tester;
the metal shielding shell completely covers the inner pin, the electric connection part of one end of the inner pin and the flexible electrode plate, and the electric connection part of the first end of the inner core of the supply connector and the other end of the inner pin;
the flexible encapsulating structure is used for encapsulating the connecting structure between the interposer and the flexible electrode plate and enabling the flexible electrode plate to have elasticity.
The front end of the flexible probe can be better attached to the surface of the metal to be tested due to the action of the flexible encapsulating structure, so that the flexible probe can better adapt to the testing requirements of different curvatures of the metal to be tested.
Specifically, the flexible electrode plate comprises a metal electrode layer, two insulating layers and two printed board gold-plating plugs, wherein the metal electrode layer, the two printed board gold-plating plugs and the connecting wires are clamped by the two insulating layers, the first ends of the two printed board gold-plating plugs are respectively electrically connected with two ends of the metal electrode layer through the wires, and one ends of the interpolation pins are respectively welded with the second ends of the two printed board gold-plating plugs.
Preferably, the outer edges of the two insulating layers are larger than the outer edges of the metal polar plates.
So that the contact force between the flexible electrode plate and the metal of the measured object is uniform.
Preferably, the thickness of the flexible electrode plate is 0.15mm.
Preferably, the metal shielding shell is of a cylindrical structure, the upper end and the lower end of the cylindrical structure are provided with through holes, the middle part of the supply connector is fixed at the through holes at the upper end of the metal shielding shell, and the metal electrode layer is arranged outside the through holes at the lower end of the metal shielding shell; the flexible encapsulating structure is arranged in the metal shielding shell and encapsulates one ends of the flexible electrode plate, the interposer pin and the supply connector.
The metal shielding shell is used for electromagnetic shielding and structural body support, and the interior of the metal shielding shell is filled with silica gel in a filling manner, so that the structural body support function is also achieved.
Preferably, the supply connector is a standard BNC-M-50KKY connector.
And the standard BNC-M-50KKY connector is adopted to manufacture the flexible probe, so that the production cost is reduced.
Preferably, the housing of the supply connector is grounded.
The roughness algorithm of the flexible probe for detecting roughness based on the capacitance method adopts the following formula for operation:
wherein,,
R a is roughness;
epsilon is the dielectric constant of air and is 8.85941pF/m;
s is the single-sided area of the metal electrode layer;
C a the zero point is the capacitance test point of the capacitance tester;
C 0 the flexible encapsulation structure is a capacitor when the surface roughness of the flexible encapsulation structure between the metal electrode layer and the measured metal is 0;
c is a capacitance measurement value between the flexible probe and the metal to be measured;
k is a rough surface correction coefficient; the coefficient k is an engineering experience coefficient, and the surface characteristic forms generated by different processing technologies are embodied by simplifying power functions.
The invention has the beneficial effects that:
the invention relates to a flexible probe for detecting roughness based on a capacitance method and a roughness algorithm thereof:
1. the front end of the flexible probe can be better attached to the surface of the metal to be tested due to the action of the flexible encapsulating structure, so that the front end can better adapt to the testing requirements of the surface of the metal to be tested with different curvatures;
2. the standard BNC-M-50KKY connector is adopted to manufacture the probe, so that the cost is reduced;
3. the outer edges of the two insulating layers are larger than the outer edges of the metal polar plates, so that the contact force between the flexible electrode plate and the metal of the measured object is uniform;
4. because of the originality of the structural combination of the patent, the implementation operation is simpler and more convenient and easier than the traditional optical method and the probe contour method;
5. and a unique roughness algorithm is adopted to combine with the measurement of the flexible probe, so that an accurate roughness value is obtained.
Drawings
FIG. 1 is a schematic diagram of the basic principle of measuring metal surface roughness by a capacitance method;
FIG. 2 is a schematic diagram of the prior art;
FIG. 3 is a graph showing the relationship between the capacitance and the roughness in the roughness algorithm of the present invention;
FIG. 4 is a schematic cross-sectional view of the present invention;
FIG. 5 is a schematic diagram of the working structure of the present invention;
fig. 6 is a transverse cross-sectional view of a flexible electrode plate in the present invention;
fig. 7 is a longitudinal sectional view of a flexible electrode plate in the present invention.
In the figure: 1. a supply connector; 2. a metal shield case; 3. an insertion needle; 4. a flexible potting structure; 5. a flexible electrode plate; 51. a metal electrode layer; 52. an insulating layer; 53. the printed board is gilded.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
as shown in fig. 4 and 5, a flexible probe for detecting roughness based on a capacitance method, capacitance measurement is performed between the flexible probe and a metal to be detected by a capacitance tester, including:
a flexible electrode plate 5;
the interpolation needle 3, one end of the interpolation needle 3 is electrically connected with the flexible electrode plate 5;
the first end of the inner core of the supply connector 1 is electrically connected with the other end of the interpolation needle 3, the second end of the inner core of the supply connector 1 is electrically connected with the first test end of the capacitance tester, and the tested metal is electrically connected with the second test end of the capacitance tester;
the metal shielding shell 2 is used for completely covering the metal shielding shell 2 and carrying out electromagnetic shielding on the inner pins 3, the electric connection part of one end of the inner pins 3 and the flexible electrode plate 5, and the electric connection part of the first end of the inner core of the supply connector 1 and the other end of the inner pins 3;
and a flexible potting structure 4 for encapsulating the connection structure between the interposer 3 and the flexible electrode plate 5 and giving the flexible electrode plate 5 elasticity.
The flexible potting structure 4 is made of a flexible potting material.
Flexible potting materials include, but are not limited to, silicone gel, silicone rubber.
The front end of the flexible probe can be better attached to the surface of the metal to be tested due to the action of the flexible encapsulating structure 4, so that the flexible probe can better adapt to the testing requirements of different curvatures of the metal to be tested.
As shown in fig. 6 and 7, the flexible electrode plate 5 includes a metal electrode layer 51, two insulating layers 52, two printed board gold-plating plugs 53, the two insulating layers 52 clamp the metal electrode layer 51, the two printed board gold-plating plugs 53 and connecting wires for installation, first ends of the two printed board gold-plating plugs 53 are respectively electrically connected with two ends of the metal electrode layer 51 through wires, and one ends of the interposer 3 are respectively welded with second ends of the two printed board gold-plating plugs 53.
Preferably, the outer edges of both insulating layers 52 are larger than the outer edges of the metal plates.
So that the contact force between the flexible electrode plate 5 and the metal of the measured object is uniform.
Preferably, the thickness of the flexible electrode plate 5 is 0.15mm.
Preferably, the metal shielding shell 2 is of a cylindrical structure with through holes at the upper and lower ends, the middle part of the supply connector 1 is fixed at the through hole at the upper end of the metal shielding shell 2, and the metal electrode layer 51 is arranged outside the through hole at the lower end of the metal shielding shell 2; a flexible potting structure 4 is provided within the metal shield case 2 and potting one end of the flexible electrode plate 5, the interposer 3, and the supply connector 1.
The metal shielding shell 2 is used for electromagnetic shielding and structural body support, and the interior of the metal shielding shell 2 is filled with silica gel in a filling manner, so that the structural body support function is also achieved.
Preferably, the supply connector 1 is a standard BNC-M-50KKY connector.
And the standard BNC-M-50KKY connector is adopted to manufacture the flexible probe, so that the production cost is reduced.
Preferably, the housing of the supply connector 1 is grounded.
As shown in fig. 3, the roughness algorithm of the flexible probe for detecting roughness based on the capacitance method is calculated by adopting the following formula:
wherein,,
R a is roughness;
epsilon is the dielectric constant of air and is 8.85941pF/m;
s is the single-sided area of the metal electrode layer;
C a the zero point is the capacitance test point of the capacitance tester;
C 0 the flexible encapsulation structure is a capacitor when the surface roughness of the flexible encapsulation structure between the metal electrode layer and the measured metal is 0;
c is a capacitance measurement value between the flexible probe and the metal to be measured;
k is a rough surface correction coefficient; the coefficient k is an engineering experience coefficient, and the surface characteristic forms generated by different processing technologies are embodied by simplifying power functions.
Different machining processes include turning, milling, grinding, etc. to produce surface feature morphology.
It should be noted that, for the processing surfaces with different processing characteristics, different capacitance testers and flexible probes, the engineering fitting parameters will be slightly different, and in the application, the coefficient calibration is needed first, and then the test application is performed.
When the invention works, one end of the flexible electrode plate 5 of the flexible probe is pressed on the rough surface of the tested metal, the flexible electrode plate 5 is used as one electrode, the tested metal (the tested metal can be all conductive metals) is used as the other electrode, the commercial capacitance tester is used for testing the capacitance between the two electrodes, and the roughness value of the tested surface can be obtained by combining the correlation between the roughness and the capacitance value time.
Examples: comparing the capacitance method and the stylus method for stainless steel sample blocks with different roughness, wherein a good correlation rule exists in the Ra of C in the range of 0.5-10um (as shown in figure 3), and the formula of the fitting curve is as follows:
in this example S is 50.24mm 2 ；
C in this example a Is-0.4893 pF;
c in this example 0 36.5065pF;
in this example k is 1.1591.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and their equivalents.
Claims (7)
1. A flexible probe for detecting roughness based on a capacitance method, which is used for measuring capacitance value between the flexible probe and a metal to be detected through a capacitance tester, is characterized by comprising the following components:
a flexible electrode plate;
the inner inserting needle is electrically connected with the flexible electrode plate at one end;
the first end of the inner core of the supply connector is electrically connected with the other end of the interpolation needle, the second end of the inner core of the supply connector is electrically connected with the first test end of the capacitance tester, and the tested metal is electrically connected with the second test end of the capacitance tester;
the metal shielding shell completely covers the inner pin, the electric connection part of one end of the inner pin and the flexible electrode plate, and the electric connection part of the first end of the inner core of the supply connector and the other end of the inner pin;
the flexible encapsulating structure is used for encapsulating the connecting structure between the interposer pin and the flexible electrode plate and enabling the flexible electrode plate to have elasticity;
the flexible electrode plate comprises a metal electrode layer, two insulating layers and two printed board gold-plating plugs, wherein the metal electrode layer is clamped by the two insulating layers, the two printed board gold-plating plugs and a connecting wire are installed, first ends of the two printed board gold-plating plugs are respectively electrically connected with two ends of the metal electrode layer through the wires, and one ends of the interpolation pins are respectively welded with second ends of the two printed board gold-plating plugs.
2. A flexible probe for capacitive roughness detection as claimed in claim 1, wherein: the outer edges of the two insulating layers are larger than the outer edges of the metal polar plates.
3. A flexible probe for capacitive roughness detection as claimed in any of claims 1-2, wherein: the thickness of the flexible electrode plate was 0.15mm.
4. A flexible probe for detecting roughness based on capacitance method as claimed in claim 3, wherein: the metal shielding shell is of a cylindrical structure, the upper end and the lower end of the cylindrical structure are provided with through holes, the middle part of the supply connector is fixed at the through holes at the upper end of the metal shielding shell, and the metal electrode layer is arranged outside the through holes at the lower end of the metal shielding shell; the flexible encapsulating structure is arranged in the metal shielding shell and encapsulates one ends of the flexible electrode plate, the interposer pin and the supply connector.
5. A flexible probe for capacitive roughness detection as claimed in claim 1, wherein: the supply connector is a standard BNC-M-50KKY connector.
6. A flexible probe for capacitive roughness detection as claimed in claim 1, wherein: the housing of the supply connector is grounded.
7. A roughness algorithm for a flexible probe for detecting roughness based on a capacitive method as claimed in any of the claims 1-6, characterized by using the following formula:
，
wherein,,
R a is roughness;
epsilon is the dielectric constant of air and is 8.85941pF/m;
s is the single-sided area of the metal electrode layer;
C a the zero point is the capacitance test point of the capacitance tester;
C 0 the flexible encapsulation structure is a capacitor when the surface roughness of the flexible encapsulation structure between the metal electrode layer and the measured metal is 0;
c is a capacitance measurement value between the flexible probe and the metal to be measured;
k is a rough surface correction coefficient; the coefficient k is an engineering experience coefficient, and the surface characteristic forms generated by different processing technologies are embodied by simplifying power functions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810432890.1A CN108387171B (en) | 2018-05-08 | 2018-05-08 | Flexible probe for detecting roughness based on capacitance method and roughness algorithm thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810432890.1A CN108387171B (en) | 2018-05-08 | 2018-05-08 | Flexible probe for detecting roughness based on capacitance method and roughness algorithm thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108387171A CN108387171A (en) | 2018-08-10 |
| CN108387171B true CN108387171B (en) | 2023-05-12 |
Family
ID=63071371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810432890.1A Active CN108387171B (en) | 2018-05-08 | 2018-05-08 | Flexible probe for detecting roughness based on capacitance method and roughness algorithm thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108387171B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109387685B (en) * | 2018-11-01 | 2024-04-30 | 华南理工大学 | Differential probe and non-contact voltage measurement device |
| CN109405734B (en) * | 2018-12-14 | 2023-11-21 | 中核新科（天津）精密机械制造有限公司 | Quick high-precision plane parallelism measuring device and measuring method |
| CN111174693B (en) * | 2019-12-17 | 2021-07-06 | 江苏骏茂新材料科技有限公司 | Surface flatness detection device for new material with capacitance variable control |
| CN113739693B (en) * | 2021-09-06 | 2024-01-30 | 中国工程物理研究院总体工程研究所 | Flexible hollow sphere roughness measuring head based on capacitance method |
| CN114383493B (en) * | 2022-02-28 | 2024-01-30 | 中国工程物理研究院总体工程研究所 | Non-contact metal surface non-conductive coating thickness measuring method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD297509A5 (en) * | 1990-03-13 | 1992-01-09 | Kloeden,Rolf,De | CAPACITIVE SENSOR FOR CONTACTLESS ROUGHNESS MEASUREMENT |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1282962A (en) * | 1970-10-15 | 1972-07-26 | Rolls Royce | Surface roughness measuring apparatus |
| GB2050608A (en) * | 1979-04-17 | 1981-01-07 | Elcometer Instr Ltd | Metal Surface Roughness Measuring Device |
| GB9021448D0 (en) * | 1990-10-03 | 1990-11-14 | Renishaw Plc | Capacitance sensing probe |
| CN2149602Y (en) * | 1992-09-04 | 1993-12-15 | 淮阴市产品质量监督检验所 | Electricity controlled instrument for measuring roughness of surface |
| CN101349537B (en) * | 2008-09-13 | 2010-06-16 | 陈立峰 | Detection imaging method and apparatus of metal pipe barrel thickness and inner wall roughness |
| CN103925935B (en) * | 2009-05-13 | 2017-07-07 | 辛纳普蒂克斯公司 | Capacitive sensor means |
| CN101975551B (en) * | 2010-09-17 | 2012-07-18 | 徐州中材装备重型机械有限公司 | Capacitive double measuring bar butt joint flatness detector |
| CN205909785U (en) * | 2016-06-23 | 2017-01-25 | 天津清锋宏大汽车电子有限公司 | Novel crankshaft position sensor |
| CN208313214U (en) * | 2018-05-08 | 2019-01-01 | 中国工程物理研究院总体工程研究所 | A kind of flexible probe based on capacitance method detection roughness |
-
2018
- 2018-05-08 CN CN201810432890.1A patent/CN108387171B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD297509A5 (en) * | 1990-03-13 | 1992-01-09 | Kloeden,Rolf,De | CAPACITIVE SENSOR FOR CONTACTLESS ROUGHNESS MEASUREMENT |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108387171A (en) | 2018-08-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108387171B (en) | Flexible probe for detecting roughness based on capacitance method and roughness algorithm thereof | |
| CN107340322B (en) | Nondestructive testing device and method for multi-channel triangular array planar capacitive sensor | |
| CN105548283A (en) | Uniplanar-capacitance measuring plate and capacitive detection unit | |
| CN108663564B (en) | Two-in-one sensor for high-voltage electroscope | |
| CN106404843A (en) | Electrical measurement based four-point type nondestructive test probe with adaptive adjustment | |
| CN105954340B (en) | Electrical signal collection and transmitting device for flat working electrode | |
| CN107328380B (en) | Coating thickness gauge probe | |
| CN208313214U (en) | A kind of flexible probe based on capacitance method detection roughness | |
| CN204462065U (en) | A kind of hand-held capacitance imaging probe | |
| CN204072091U (en) | A kind of probe for measuring bio-impedance | |
| CN102894967B (en) | Negative pressure hole medical body surface electrode in electrode attached plate | |
| CN115356037A (en) | Diaphragm vacuum gauge | |
| CN213875905U (en) | Capacitive sensor for cable insulation detection | |
| CN115247999A (en) | Grid sensor and method for crack propagation length monitoring based on direct writing printing | |
| CN104095631A (en) | Biological impedance measurement probe based on four-electrode model | |
| CN108007980A (en) | A kind of lubricating oil product quality detection capacitive sensing probe | |
| CN209991931U (en) | Hole surface copper integrated thickness measuring device | |
| CN208780730U (en) | A kind of Test bench of patch type capacitor | |
| CN212871385U (en) | Wireless liquid level sensor module for pure air humidifier | |
| JP2004264272A (en) | Electric conductor inspecting device and electric conductor inspection method | |
| TW201321762A (en) | Test device | |
| CN113739693B (en) | Flexible hollow sphere roughness measuring head based on capacitance method | |
| KR20110053658A (en) | Inspection apparatus and method for circuit pattern of substrate | |
| CN215415169U (en) | Temperature and humidity measuring device | |
| CN205749390U (en) | Electrical signal collection and transmitting device for flat working electrode |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |