CN108377107A - Three-degree-of-freedom spherical stator ultrasonic motor stator matrix and its motivational techniques - Google Patents
Three-degree-of-freedom spherical stator ultrasonic motor stator matrix and its motivational techniques Download PDFInfo
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- CN108377107A CN108377107A CN201810326358.1A CN201810326358A CN108377107A CN 108377107 A CN108377107 A CN 108377107A CN 201810326358 A CN201810326358 A CN 201810326358A CN 108377107 A CN108377107 A CN 108377107A
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- 239000011159 matrix material Substances 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 21
- 210000002683 foot Anatomy 0.000 claims abstract description 32
- 239000000919 ceramic Substances 0.000 claims abstract description 22
- 230000010287 polarization Effects 0.000 claims abstract description 6
- 230000010355 oscillation Effects 0.000 claims description 31
- 238000002604 ultrasonography Methods 0.000 abstract description 3
- 230000005611 electricity Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Three-degree-of-freedom spherical stator ultrasonic motor stator matrix and its motivational techniques, are related to piezoelectric ultrasonic motor technical field.The present invention be in order to solve the problems, such as existing multiple degrees of freedom rotary-type Driven by Ultrasonic Motors foot less, driving capability is insufficient, it is complicated it is not compact, be difficult to realize miniaturization.The outer surface of piezoelectric ceramic ball shell is along the x-axis direction, it is symmetrically arranged the electrode compartments of a pair of of x-axis direction along the y-axis direction and along the z-axis direction, the electrode compartments of the electrode compartments in a pair of of y-axis direction and a pair of of z-axis direction, white space between all electrode compartments is non-electrode region, the polarization direction of each pair of electrode compartments is identical, it polarizes along sphere diameter thickness direction all electrode compartments, eight driving foots are evenly arranged on non-electrode region, eight driving foots and the space quadrature of all electrode compartments are 45 °, the axis of each driving foot and the space phase angle of xoy planes are 45 °.It is for making multiple freedom degrees ultrasound motor.
Description
Technical field
The present invention relates to a kind of Three-degree-of-freedom spherical stator ultrasonic motor stator matrix and its motivational techniques, and it is super to belong to piezoelectricity
Sound technical field of motors.
Background technology
Piezoelectric ultrasonic motor is a kind of inverse piezoelectric effect using piezoelectric ceramics, is motivated in supersonic range in the elastomer
Vibration, form the particle movement with particular track in surface of elastomer specified point or specific region, so by stator, turn
The microscopic motion of particle is converted into the macroscopic motion of rotor by the friction coupling between son, is had low speed high torque, is not necessarily to speed change
Mechanism, without electromagnetic interference, fast response time and the advantages that cut off self-lock.
But traditional multiple freedom degrees ultrasound motor exist driving foot less, driving capability is insufficient, it is complicated and not compact,
The problem of being difficult to realize miniaturization.
Invention content
The present invention is that the rotary-type Driven by Ultrasonic Motors of existing multiple degrees of freedom is sufficient less, driving capability is insufficient, knot in order to solve
Structure complexity is not compact, is difficult to realize the problem of minimizing.Three-degree-of-freedom spherical stator ultrasonic motor stator matrix is now provided.
Three-degree-of-freedom spherical stator ultrasonic motor stator matrix, it includes that piezoelectric ceramic ball shell 1 and eight drive foot 2,
The outer surface of piezoelectric ceramic ball shell 1 has been symmetrically arranged a pair along the x-axis direction, along the y-axis direction and along the z-axis direction
The electrode compartments 5 of x-axis direction, the electrode compartments 6 in a pair of of y-axis direction and a pair of of z-axis direction electrode compartments 7,
White space between all electrode compartments is non-electrode region 4,
The polarization direction of each pair of electrode compartments is identical, and all electrode compartments are polarized along sphere diameter thickness direction,
Eight driving foots 2 are evenly arranged on non-electrode region 4, electrode compartments 5, the y of eight driving foots 2 and x-axis direction
The space quadrature of the electrode compartments 6 of axis direction and the electrode compartments 7 in z-axis direction is 45 °, the axis of each driving foot with
The space phase angle of xoy planes is 45 °.
Beneficial effects of the present invention are:
The electrode compartments of the electrode compartments of the x-axis direction of the application, the electrode compartments in y-axis direction and z-axis direction are in space
Upper to be mutually perpendicular to each other, space quadrature is 90 °, when applying voltage to two axis top electrode subregion therein, due to
For two pairs of electrodes subregion there are space quadrature, the two groups of nutation type mode of oscillations motivated spatially differ 90 ° of phase angles,
By the superposition of two groups of nutation type mode of oscillations, to have driving rotor to be rotated around third axis in the sufficient end formation of driving
Ellipse motion driven track;The reverse drive to rotor can be realized in phase relation by changing two-way driving voltage.
It is rotary-type super that the Three-degree-of-freedom spherical stator ultrasonic motor stator matrix of the application solves existing multiple degrees of freedom
Acoustic-electric machine driving foot is less, driving capability is insufficient, complicated not compact, the problems such as being difficult to realize miniaturization, and the application changes biography
System multiple freedom degrees ultrasound rotor is the normality of sphere.The application is the stator of ball-type, and the application is inclined using ball-type stator
The combination that pendulum-type vibrates mode of oscillation comes rotation of the driving motor rotor around three orthogonal directions, and the driving in each direction
All be by eight driving foot simultaneously participate in driving complete, have it is simple and compact for structure, be easy to minimize and produce in batches etc. it is excellent
Point.
Description of the drawings
Fig. 1 is that the overall structure of the Three-degree-of-freedom spherical stator ultrasonic motor stator matrix described in specific implementation mode one is shown
It is intended to,
The dimensional structure diagram for the piezoelectric ceramic ball shell that Fig. 2 is made of electrode zone and non-electrode region,
Fig. 3 is the polarization direction of the electrode compartments of the electrode compartments of x-axis direction, the electrode compartments in y-axis direction and z-axis direction
Schematic diagram,
Fig. 4 is the wiring schematic diagram that the electrode compartments in y-axis direction and the electrode compartments in z-axis direction are applied with driving voltage,
Fig. 5 is the wiring schematic diagram that the electrode compartments of x-axis direction and the electrode compartments in z-axis direction are applied with driving voltage,
Fig. 6 is the wiring schematic diagram that the electrode compartments of x-axis direction and the electrode compartments in y-axis direction are applied with driving voltage.
Specific implementation mode
Specific implementation mode one:Present embodiment is illustrated referring to figs. 1 to Fig. 3, three described in present embodiment are freely
Ball-type stator ultrasonic motor stator matrix is spent, it includes that piezoelectric ceramic ball shell 1 and eight drive foot 2,
The outer surface of piezoelectric ceramic ball shell 1 has been symmetrically arranged a pair along the x-axis direction, along the y-axis direction and along the z-axis direction
The electrode compartments 5 of x-axis direction, the electrode compartments 6 in a pair of of y-axis direction and a pair of of z-axis direction electrode compartments 7,
White space between all electrode compartments is non-electrode region 4,
The polarization direction of each pair of electrode compartments is identical, and all electrode compartments are polarized along sphere diameter thickness direction,
Eight driving foots 2 are evenly arranged on non-electrode region 4, electrode compartments 5, the y of eight driving foots 2 and x-axis direction
The space quadrature of the electrode compartments 6 of axis direction and the electrode compartments 7 in z-axis direction is 45 °, the axis of each driving foot with
The space phase angle of xoy planes is 45 °.
In present embodiment, the electrode compartments 5 of a pair of of x-axis direction, the electrode compartments 6 in a pair of of y-axis direction and a pair of of z-axis side
To electrode compartments 7 form electrode zone 3, eight driving foots 2 are evenly arranged on non-electrode region 4, and each driving foot 2 is set
It sets on non-electrode region 4 adjacent with three electrode compartments at the same time, two opposite drivings of each electrode compartments peripheral location
The axis of foot 2 is mutually perpendicular to.It is such to arrange the Ellipse motion driven track for advantageously forming higher amplitudes, while symmetrical driving foot
Be conducive to improve the stability of stator base.
The polarization direction of each pair of electrode compartments is identical;Electrode zone 3 on 1 surface of all piezoelectric ceramic ball shells is along sphere diameter
Thickness direction polarizes.Such be disposed with motivates identical frequency conducive to ball-type stator base in three mutually orthogonal directions
Beat mode of oscillation.
Specific implementation mode two:The excitation of Three-degree-of-freedom spherical stator ultrasonic motor stator matrix described in present embodiment
Method is realized based on the Three-degree-of-freedom spherical stator ultrasonic motor stator matrix described in specific implementation mode one, the excitation side
Method can encourage Three-degree-of-freedom spherical stator ultrasonic motor stator matrix realize three-degree-of-freedom motion, three degree of freedom include around x,
The ELLIPTIC REVOLUTION of y and z-axis;
The motivational techniques that Three-degree-of-freedom spherical stator ultrasonic motor stator matrix driving motor rotor is rotated around x-axis:
The electrode compartments 7 of electrode compartments 6 and z-axis direction to y-axis direction respectively apply a phase driving voltage, make piezoelectric ceramics
Spherical shell 1 generates the nutation type mode of oscillation along y and z-axis direction, to be superimposed along the nutation type mode of oscillation in y and z-axis direction, makes
2 ends of foot must be driven, which to be formed, has driving rotor around the Ellipse motion driven track that x-axis rotates;
The motivational techniques that Three-degree-of-freedom spherical stator ultrasonic motor stator matrix driving motor rotor is rotated around y-axis:
The electrode compartments 7 of electrode compartments 5 and z-axis direction to x-axis direction respectively apply a phase driving voltage, make piezoelectric ceramics
Spherical shell 1 generates the nutation type mode of oscillation along x and z-axis direction, to be superimposed along the nutation type mode of oscillation in x and z-axis direction, makes
2 ends of foot must be driven, which to be formed, has driving rotor around the Ellipse motion driven track that y-axis rotates;
The motivational techniques that Three-degree-of-freedom spherical stator ultrasonic motor stator matrix driving motor rotor is rotated around z-axis:
The electrode compartments 6 of electrode compartments 5 and y-axis direction to x-axis direction respectively apply a phase driving voltage, make piezoelectric ceramics
Spherical shell 1 generates the nutation type mode of oscillation along x and y-axis direction, to be superimposed along the nutation type mode of oscillation in x and y-axis direction, makes
2 ends of foot must be driven, which to be formed, has driving rotor around the Ellipse motion driven track that z-axis rotates.
In present embodiment, by the alternating voltage for applying nutation type resonant frequency to x-axis direction electrode compartments 5, you can
Nutation type mode of oscillation along the x-axis direction is motivated in ball-type stator base;By giving y-axis direction electrode compartments 6 to apply partially
The alternating voltage of pendulum-type resonant frequency, you can nutation type mode of oscillation along the y-axis direction is motivated in ball-type stator base;It is logical
Cross the alternating voltage for applying nutation type resonant frequency to z-axis direction electrode compartments 7, you can motivate edge in ball-type stator base
The nutation type mode of oscillation in z-axis direction;
Electricity is encouraged when applying the two-way that phase difference is 90 ° to y-axis direction electrode compartments 6 and z-axis direction electrode compartments 7 simultaneously
When pressure, since two pairs of electrodes subregion is there are space quadrature, the two groups of nutation type mode of oscillations motivated spatially differ
90 ° of phase angles have driving rotor around x-axis by the superposition of two groups of nutation type mode of oscillations to be formed in the sufficient end of driving
The Ellipse motion driven track of rotation;
Electricity is encouraged when applying the two-way that phase difference is 90 ° to x-axis direction electrode compartments 5 and z-axis direction electrode compartments 7 simultaneously
When pressure, since two pairs of electrodes subregion is there are space quadrature, the two groups of nutation type mode of oscillations motivated spatially differ
90 ° of phase angles have driving rotor around y-axis by the superposition of two groups of nutation type mode of oscillations to be formed in the sufficient end of driving
The Ellipse motion driven track of rotation;
Electricity is encouraged when applying the two-way that phase difference is 90 ° to x-axis direction electrode compartments 5 and y-axis direction electrode compartments 6 simultaneously
When pressure, since two pairs of electrodes subregion is there are space quadrature, the two groups of nutation type mode of oscillations motivated spatially differ
90 ° of phase angles have driving rotor around z-axis by the superposition of two groups of nutation type mode of oscillations to be formed in the sufficient end of driving
The Ellipse motion driven track of rotation;
The reverse drive to rotor can be realized in phase relation by changing two-way driving voltage.
Specific implementation mode three:Present embodiment is illustrated with reference to Fig. 4, present embodiment is to specific implementation mode two
The motivational techniques of the Three-degree-of-freedom spherical stator ultrasonic motor stator matrix are described further, in present embodiment, to y
The electrode compartments 6 of axis direction and the electrode compartments 7 in z-axis direction apply the driving voltage that amplitude is 60V, and a phase amplitude is 60V
Reverse voltage positive and negative anodes be separately connected the electrode compartments 6 in a pair of of y-axis direction, another phase amplitude is that the reverse voltage of 60V is positive and negative
Pole is separately connected the electrode compartments 7 in a pair of of z-axis direction.
In present embodiment, as shown in figure 4, a phase amplitude is the positive U of the reverse voltage of 60VA+Connect the electricity in y-axis direction
The spherical shell outer surface of a subregion in pole subregion 6, a phase amplitude are the cathode U of the reverse voltage of 60VA-Connect the electricity in y-axis direction
The spherical shell outer surface of another subregion in pole subregion 6 so that piezoelectric ceramic ball shell 1 generates nutation type along the y-axis direction and vibrates mould
State;Another phase amplitude is the positive U of the reverse voltage of 60VB+It connects in the electrode compartments 7 in z-axis direction outside the spherical shell of a subregion
Surface, a phase amplitude are the cathode U of the reverse voltage of 60VB-Connect the spherical shell of another subregion in the electrode compartments 7 in z-axis direction
Outer surface so that piezoelectric ceramic ball shell 1 generates nutation type mode of oscillation along the z-axis direction;To along the beat of y and z-axis direction
Formula mode of oscillation is superimposed so that 2 ends of driving foot, which are formed, has driving rotor around the Ellipse motion driven track that x-axis rotates.
Specific implementation mode four:Present embodiment is illustrated with reference to Fig. 5, present embodiment is to specific implementation mode two
The motivational techniques of the Three-degree-of-freedom spherical stator ultrasonic motor stator matrix are described further, in present embodiment, to x
The electrode compartments 5 of axis direction and the electrode compartments 7 in z-axis direction apply the driving voltage that amplitude is 60V, and a phase amplitude is 60V
Reverse voltage positive and negative anodes be separately connected the electrode compartments 5 of a pair of of x-axis direction, another phase amplitude is that the reverse voltage of 60V is positive and negative
Pole is separately connected the electrode compartments 7 in a pair of of z-axis direction.
In present embodiment, as shown in figure 5, a phase amplitude is the positive U of the reverse voltage of 60VA+Connect the electricity of x-axis direction
The spherical shell outer surface of a subregion in pole subregion 5, a phase amplitude are the cathode U of the reverse voltage of 60VA-Connect the electricity of x-axis direction
The spherical shell outer surface of another subregion in pole subregion 5 so that piezoelectric ceramic ball shell 1 generates nutation type along the x-axis direction and vibrates mould
State;Another phase amplitude is the positive U of the reverse voltage of 60VB+It connects in the electrode compartments 7 in z-axis direction outside the spherical shell of a subregion
Surface, a phase amplitude are the cathode U of the reverse voltage of 60VB-Connect the spherical shell of another subregion in the electrode compartments 7 in z-axis direction
Outer surface so that piezoelectric ceramic ball shell 1 generates nutation type mode of oscillation along the z-axis direction;To along the beat of x and z-axis direction
Formula mode of oscillation is superimposed so that 2 ends of driving foot, which are formed, has driving rotor around the Ellipse motion driven track that y-axis rotates.
Specific implementation mode five:Present embodiment is illustrated with reference to Fig. 6, present embodiment is to specific implementation mode two
The motivational techniques of the Three-degree-of-freedom spherical stator ultrasonic motor stator matrix are described further, in present embodiment, to z
The electrode compartments 5 of axis direction and the electrode compartments 6 in y-axis direction apply the driving voltage that amplitude is 60V, and a phase amplitude is 60V
Reverse voltage positive and negative anodes be separately connected the electrode compartments 5 in a pair of of z-axis direction, another phase amplitude is that the reverse voltage of 60V is positive and negative
Pole is separately connected the electrode compartments 6 in a pair of of y-axis direction.
In present embodiment, as shown in fig. 6, a phase amplitude is the positive U of the reverse voltage of 60VA+Connect the electricity of x-axis direction
The spherical shell outer surface of a subregion in pole subregion 5, a phase amplitude are the cathode U of the reverse voltage of 60VA-Connect the electricity of x-axis direction
The spherical shell outer surface of another subregion in pole subregion 5 so that piezoelectric ceramic ball shell 1 generates nutation type along the x-axis direction and vibrates mould
State;Another phase amplitude is the positive U of the reverse voltage of 60VB+It connects in the electrode compartments 6 in y-axis direction outside the spherical shell of a subregion
Surface, a phase amplitude are the cathode U of the reverse voltage of 60VB-Connect the spherical shell of another subregion in the electrode compartments 6 in y-axis direction
Outer surface so that piezoelectric ceramic ball shell 1 generates nutation type mode of oscillation along the y-axis direction;To along the beat of x and y-axis direction
Formula mode of oscillation is superimposed so that 2 ends of driving foot, which are formed, has driving rotor around the Ellipse motion driven track that z-axis rotates;
By changing x-axis direction electrode compartments 5,7 driving voltage of y-axis direction electrode compartments 6 or z-axis direction electrode compartments
Phase relation, the negative sense by driving motor rotor around x-axis, y-axis or z-axis rotate.
Claims (5)
1. Three-degree-of-freedom spherical stator ultrasonic motor stator matrix, which is characterized in that it includes piezoelectric ceramic ball shell (1) and eight
Driving foot (2),
The outer surface of piezoelectric ceramic ball shell (1) has been symmetrically arranged a pair of of x along the x-axis direction, along the y-axis direction and along the z-axis direction
The electrode compartments (5) of axis direction, the electrode compartments (6) in a pair of of y-axis direction and a pair of z-axis direction electrode compartments (7),
White space between all electrode compartments is non-electrode region (4),
The polarization direction of each pair of electrode compartments is identical, and all electrode compartments are polarized along sphere diameter thickness direction,
Eight driving foots (2) are evenly arranged on non-electrode region (4), the electrode compartments of eight driving foots (2) and x-axis direction
(5), the space quadrature of the electrode compartments (7) of the electrode compartments (6) and z-axis direction in y-axis direction is 45 °, each driving foot
The space phase angle of axis and xoy planes be 45 °.
2. the motivational techniques of Three-degree-of-freedom spherical stator ultrasonic motor stator matrix, this method is based on described in claim 1
What Three-degree-of-freedom spherical stator ultrasonic motor stator matrix was realized, which is characterized in that the motivational techniques can encourage Three Degree Of Freedom
Ball-type stator ultrasonic motor stator matrix realizes three-degree-of-freedom motion, and three degree of freedom includes the ELLIPTIC REVOLUTION around x, y and z axes;
The motivational techniques that Three-degree-of-freedom spherical stator ultrasonic motor stator matrix driving motor rotor is rotated around x-axis:
The electrode compartments (7) of electrode compartments (6) and z-axis direction to y-axis direction respectively apply a phase driving voltage, make piezoelectric ceramics
Spherical shell (1) generates the nutation type mode of oscillation along y and z-axis direction, to be superimposed along the nutation type mode of oscillation in y and z-axis direction,
Have driving rotor around the Ellipse motion driven track that x-axis rotates so that driving foot (2) end is formed;
The motivational techniques that Three-degree-of-freedom spherical stator ultrasonic motor stator matrix driving motor rotor is rotated around y-axis:
The electrode compartments (7) of electrode compartments (5) and z-axis direction to x-axis direction respectively apply a phase driving voltage, make piezoelectric ceramics
Spherical shell (1) generates the nutation type mode of oscillation along x and z-axis direction, to be superimposed along the nutation type mode of oscillation in x and z-axis direction,
Have driving rotor around the Ellipse motion driven track that y-axis rotates so that driving foot (2) end is formed;
The motivational techniques that Three-degree-of-freedom spherical stator ultrasonic motor stator matrix driving motor rotor is rotated around z-axis:
The electrode compartments (6) of electrode compartments (5) and y-axis direction to x-axis direction respectively apply a phase driving voltage, make piezoelectric ceramics
Spherical shell (1) generates the nutation type mode of oscillation along x and y-axis direction, to be superimposed along the nutation type mode of oscillation in x and y-axis direction,
Have driving rotor around the Ellipse motion driven track that z-axis rotates so that driving foot (2) end is formed.
3. the motivational techniques of Three-degree-of-freedom spherical stator ultrasonic motor stator matrix according to claim 2, to y-axis direction
Electrode compartments (6) and the electrode compartments (7) in z-axis direction apply the driving voltage that amplitude is 60V, a phase amplitude is 60V
Reverse voltage positive and negative anodes are separately connected the electrode compartments (6) in a pair of of y-axis direction, and another phase amplitude is that the reverse voltage of 60V is positive and negative
Pole is separately connected the electrode compartments (7) in a pair of of z-axis direction.
4. the motivational techniques of Three-degree-of-freedom spherical stator ultrasonic motor stator matrix according to claim 2, to x-axis direction
Electrode compartments (5) and the electrode compartments (7) in z-axis direction apply the driving voltage that amplitude is 60V, a phase amplitude is 60V
Reverse voltage positive and negative anodes are separately connected the electrode compartments (5) of a pair of of x-axis direction, and another phase amplitude is that the reverse voltage of 60V is positive and negative
Pole is separately connected the electrode compartments (7) in a pair of of z-axis direction.
5. the motivational techniques of Three-degree-of-freedom spherical stator ultrasonic motor stator matrix according to claim 2, to x-axis direction
Electrode compartments (5) and the electrode compartments (6) in y-axis direction apply the driving voltage that amplitude is 60V, a phase amplitude is 60V
Reverse voltage positive and negative anodes are separately connected the electrode compartments (5) in a pair of of z-axis direction, and another phase amplitude is that the reverse voltage of 60V is positive and negative
Pole is separately connected the electrode compartments (6) in a pair of of y-axis direction.
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH04145877A (en) * | 1990-10-03 | 1992-05-19 | Fukoku Co Ltd | Multi-axis control motor |
CN102355103A (en) * | 2011-09-20 | 2012-02-15 | 北京航空航天大学 | Electromagnetic-piezoelectric-mixed-driving-based three-degree-of-freedom spherical motor |
BR102013021911A2 (en) * | 2013-08-28 | 2015-11-17 | Maxilaser Indústria Metalúrgica Ltda | threaded ball joint for modular furniture composition |
CN107517022A (en) * | 2017-08-04 | 2017-12-26 | 上海交通大学 | A kind of ultrasound electric machine with two degrees of freedom based on three PZT (piezoelectric transducer) combined-stators |
CN105932903B (en) * | 2016-06-14 | 2018-01-05 | 南京理工大学 | A kind of bullet arrangement for deflecting based on spherical multi-freedom piezoelectric actuator |
-
2018
- 2018-04-12 CN CN201810326358.1A patent/CN108377107B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04145877A (en) * | 1990-10-03 | 1992-05-19 | Fukoku Co Ltd | Multi-axis control motor |
CN102355103A (en) * | 2011-09-20 | 2012-02-15 | 北京航空航天大学 | Electromagnetic-piezoelectric-mixed-driving-based three-degree-of-freedom spherical motor |
BR102013021911A2 (en) * | 2013-08-28 | 2015-11-17 | Maxilaser Indústria Metalúrgica Ltda | threaded ball joint for modular furniture composition |
CN105932903B (en) * | 2016-06-14 | 2018-01-05 | 南京理工大学 | A kind of bullet arrangement for deflecting based on spherical multi-freedom piezoelectric actuator |
CN107517022A (en) * | 2017-08-04 | 2017-12-26 | 上海交通大学 | A kind of ultrasound electric machine with two degrees of freedom based on three PZT (piezoelectric transducer) combined-stators |
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