CN108365776B - Wet gas generator and preparation method thereof - Google Patents
Wet gas generator and preparation method thereof Download PDFInfo
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- CN108365776B CN108365776B CN201810085693.7A CN201810085693A CN108365776B CN 108365776 B CN108365776 B CN 108365776B CN 201810085693 A CN201810085693 A CN 201810085693A CN 108365776 B CN108365776 B CN 108365776B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N3/00—Generators in which thermal or kinetic energy is converted into electrical energy by ionisation of a fluid and removal of the charge therefrom
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
- H02N11/002—Generators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
Abstract
The invention relates to a wet gas generator and a preparation method thereof. The wet gas generator comprises a substrate, a first electrode, a nanowire layer and a second electrode which are arranged in sequence, wherein the nanowire layer is arranged between the first electrode and the second electrode and is composed of nanowires which are distributed randomly. The invention also provides a preparation method of the wet gas generator. The wet gas generator provided by the invention adopts a network structure formed by nanowires, the structure has good hydrophilicity, and a large number of nano-pores contained in the structure are favorable for moisture diffusion, so that the wet gas generator has higher power output density. When the basement of moisture generator adopted flexible material to make, the cooperation had good flexible nano wire layer network structure, can make the moisture generator have good mechanical flexibility, can paste on human skin surface, human breathing state of real-time supervision, or as wearable touch electronic screen.
Description
Technical Field
The invention relates to a wet gas generator and a preparation method thereof, and belongs to the technical field of new energy power generation.
Background
In recent years, with the increasing energy crisis and environmental issues, research and application of clean, renewable energy devices have received global attention. The solar energy, the heat energy, the mechanical vibration energy, the wind energy, the sound wave energy, the biological energy and the like are used for generating electricity in succession, and the solar energy, the heat energy, the mechanical vibration energy, the wind energy, the sound wave energy, the biological energy and the like have wide application prospects in the fields of self-powered systems and wearable devices.
However, the above energy forms still have more limitations in application, for example, the solar power generation device cannot work in the absence of illumination; the mechanical vibration may reduce the reliability of the system while being used to generate electricity, and the wind power generation device cannot work under the windless condition.
Recently, moisture is being used to generate electricity as a widely existing resource in nature and biological processes, expanding the resources available to generate electricity in nature. However, the existing moisture power generation method has low output power density, and reports on mechanical flexibility of the device are less, and reports on moisture power generation in the self-powered wearable field are less.
Disclosure of Invention
In order to solve the above technical problems, an object of the present invention is to provide a wet gas generator based on nanowires, having a high power output density and a good self-power generation function.
To achieve the above object, the present invention provides a wet gas generator comprising a substrate, a first electrode, a nanowire layer and a second electrode sequentially disposed, wherein the nanowire layer is disposed between the first electrode and the second electrode and is composed of randomly distributed nanowires.
In the wet gas generator of the present invention, the first electrode, the nanowire layer and the second electrode form a sandwich power generation structure, and the first electrode and the second electrode serve as output electrodes of voltage and current of the power generation structure; in use, the structure is exposed to a moisture-laden environment, the moisture diffuses through the nanowire layer, a potential difference is generated between the first and second electrodes, and a charge flow is formed between the first and second electrodes, generating an electrical current. The moisture, which may also be referred to as moisture, may come from ambient air, human breath, human fingers, animal breath, volatile liquids, and the like.
In a specific embodiment of the present invention, randomly distributed means that the nanowires are distributed in an irregular pattern throughout the nanowire layer. When the nanowire layer exists in a manner that the nanowires are randomly distributed, the nanowires may cross each other to form a nanowire network structure, for example, as shown in fig. 2 and 3, the nanowires may form more holes (or voids) between each other (compared to the vertical arrangement), which facilitates the diffusion of moisture in the nanowire layer, and may obtain a higher power output density compared to the vertical arrangement. Preferably, in the nanowire network structure described above, the pores formed by crossing nanowires with each other have a pore size of less than 200 nm, preferably mostly less than 100 nm. The random distribution is preferably formed by electrophoretic deposition.
In the moisture generator of the present invention, it is preferable that the material of the nanowire has a positive Zeta potential or a negative Zeta potential.
In the wet gas generator of the present invention, preferably, the material of the nanowire is a material having a resistivity greater than 100 ohm-meter, and it is possible to prevent the first electrode from being short-circuited with the second electrode.
In the moisture generator of the present invention, preferably, the nanowire layer is hydrophilic. More preferably, the nanowire layer has a contact angle (or wetting angle) with water θ ≦ 60 °. The nanowire layer has good hydrophilicity, and can promote diffusion of moisture and the like in the nanowire layer, thereby improving power output density.
In the wet gas generator of the present invention, the thickness of the nanowire layer may be controlled to be 1 to 100 micrometers, preferably 5 to 20 micrometers. The thickness of the nanowire layer versus voltage is shown in fig. 13.
In the wet gas generator of the present invention, the nanowires used may be titanium oxide nanowires and/or zinc oxide nanowires. The diameter of the nanowires is preferably 70-300 nm.
In the moisture generator of the present invention, the substrate, the first electrode, and the second electrode may be each in a layered or film form. The thickness of the substrate can be controlled to be 10-5000 microns. The first electrode and the second electrode may have a thickness of 0.05 to 100 micrometers, respectively.
In the wet gas generator of the present invention, a common substrate material, such as a pure metal, an alloy, a polymer material, or an inorganic material, may be used for the substrate. Wherein, the pure metal suitable for the substrate can be gold, silver, platinum, aluminum, nickel, copper, titanium, chromium or tin, etc.; materials for the alloy of the substrate may be selected from at least two of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, and tin; suitable high molecular materials may be one selected from the group consisting of polyethylene terephthalate, polyethylene naphthalate, polyimide, polytetrafluoroethylene, polyvinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, polyvinylidene chloride, polychlorinated ether, polymethyl methacrylate, polyvinyl alcohol, polyisobutylene, polyvinyl formal, polyacrylonitrile, polycarbonate, polybutylene terephthalate, polyethylene naphthalate, polyvinylidene fluoride, polydimethyl dichloride, xylylene cyclics, ethylene-vinyl acetate copolymers, perfluoroethylene-propylene copolymers, acrylonitrile-butadiene-styrene terpolymers, vinyl chloride-vinyl acetate copolymers, and the like; suitable inorganic materials for the substrate may be ceramics or glass, wherein the ceramics are preferably selected from at least one of boron oxide, silicon dioxide, aluminum oxide, magnesium oxide, zirconium oxide, silicon nitride, aluminum nitride, gallium nitride, boron nitride, titanium nitride, boron carbide, silicon carbide, titanium carbide and titanium boride.
The flexibility of the existing flexible devices such as flexible circuit boards is only a flexible substrate, and the flexibility of the whole device is not considered, the related performance of the devices is reduced to a certain extent after the devices are bent for many times, and the flexibility of the existing moisture generator is not concerned basically. The moisture generator can adopt a flexible material substrate and is matched with structures such as a nanowire layer (the nanowire layer also has good flexibility), so that the moisture generator has overall flexibility, and the performances such as output voltage and the like of the moisture generator are not obviously reduced after ten thousand mechanical bending. The flexible material substrate can be made of polyethylene terephthalate, polyimide, polyethylene terephthalate, polyethylene naphthalate, polytetrafluoroethylene, polyvinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, polyvinylidene chloride and the like.
In the moisture generator of the present invention, the first electrode and the second electrode are output electrodes of voltage and current as a power generation structure, any conventional electrode material may be used, and the first electrode and the second electrode may be in a layered or film form, for example: the first and second electrodes include Indium Tin Oxide (ITO) thin films, graphene thin films, silver nanowire film coatings, or layers or thin films formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or alloys thereof. The first electrode and the second electrode may be made of the same material or different materials.
The invention also provides a preparation method of the wet gas generator, which comprises the following steps:
forming a first electrode on a substrate;
forming a nanowire layer on the surface of the first electrode;
and forming a second electrode on the surface of the nanowire layer.
In the preparation of the wet gas generator, the first electrode and the second electrode can be prepared by deposition by any one of pulse laser deposition, molecular beam epitaxy, magnetron sputtering, ion plating, vacuum evaporation, chemical vapor deposition, electroplating, chemical wet method and template method. The nanowire layer may be formed by an electrophoretic deposition method, a Drop-casting method (Drop-casting), or a spin-coating method. Compared with a liquid drop coating method and a spin coating method, when an electrophoretic deposition method is adopted, the prepared nanowire layer can be more uniform and more compact, the short circuit between the first electrode and the second electrode can be avoided, and in addition, the preparation process has higher efficiency.
In the above preparation method, preferably, the formation of the nanowire layer by the electrophoretic deposition method is performed according to the following steps:
dispersing the nano wire in a solvent to obtain nano wire sol;
placing the substrate with the first electrode in the sol, and inserting another conductive substrate to enable one side of the substrate with the first electrode to be opposite to the conductive substrate;
and applying voltage between the substrate and the conductive substrate to deposit the nanowires on the surface of the first electrode, taking out the nanowires, and drying to form a nanowire layer.
The invention also provides a respiration sensor which comprises the moisture generator. The moisture generator is arranged near the nasal cavity or the oral cavity of a person and used for monitoring the breathing frequency of the person in real time. The output voltage of the moisture generator is related to the breathing frequency and the breathing intensity, and the output voltage can be used for representing the breathing frequency of a human body, and the specific working principle is as follows: when the exhaled gas contacts with the nanowire layer in the moisture generator, ions in the moisture diffuse in a channel (namely holes and gaps) formed by the nanowires, so that the ions preferentially flow in the channel, and a potential difference is formed between the first electrode and the second electrode. When a human body inhales, moisture in the nanowire channel is evaporated and separated, and the voltage between the first electrode and the second electrode is reduced accordingly. When the human body breathes periodically, a corresponding periodic electrical signal can be generated between the first electrode and the second electrode of the moisture generator. Information about the breathing frequency and the breathing depth of the human body can be obtained by analyzing the frequency and the size of the electric signal. Meanwhile, the moisture generator has good shape adaptability, and the generated voltage can be directly used for analyzing the breathing condition of the human body without additional circuit driving, so that the self-driven wearable biological breathing detection has important application prospect in the aspects of future medical monitoring, sleep quality detection and the like.
In the case of a respiration sensor, the base material of the moisture generator is preferably a material which is non-toxic to the human body (or animal body), has good adhesion to the skin, and has shape adaptability, and particularly, the base material which is in direct contact with the human face preferably satisfies the above conditions, such as a polymethylsiloxane film or a polyethylene terephthalate film.
The invention also provides a finger touch sensor comprising the moisture generator. When used with a finger touch sensor, the moisture generator may detect a human finger touch. The output voltage of the moisture generator is related to the pressing frequency and the pressing pressure of the finger, and the electric signal output by the generator can be used for representing whether the finger is pressed or not. The specific working principle is as follows: when a human body presses the moisture generator, moisture of the skin of the finger is diffused to the generator, and when the moisture is in contact with the nanowire layer, ions in the moisture are diffused in a channel formed by the nanowire, so that the ions preferentially flow in the channel, and a potential difference is formed between the first electrode and the second electrode. When the human finger leaves the moisture generator, the moisture in the nanowire channel evaporates and separates, and the voltage between the first electrode and the second electrode decreases accordingly. The pressing condition of the human finger can be obtained by analyzing the frequency and the magnitude of the electric signal. Meanwhile, the voltage generated by the moisture power generation can be directly used for detecting the pressing of the human finger without additional circuit driving, and the self-driven human finger touch sensor has a wide application prospect in the aspect of touch pads.
The wet gas generator provided by the invention adopts a network structure formed by nanowires, the structure has good hydrophilicity, and a large number of nano-pores contained in the structure are favorable for moisture diffusion, so that the wet gas generator has higher power output density. In addition, the moisture generator is composed of a three-dimensional stacking structure of the first electrode, the nanowire layer and the second electrode, and the device is compact in structure, easy to prepare, low in cost and easy to process and manufacture in a large scale. When the substrate of the moisture generator is made of flexible materials, the substrate is matched with a nanowire layer network structure with good flexibility, so that the moisture generator has good mechanical flexibility, can be used as a sensor to be attached to the surface of the skin of a human body, and can monitor the breathing state of the human body in real time or be used as a wearable touch electronic screen; because the sensor can output the voltage related to the humidity, and the intrinsic voltage can represent the breathing or touch state, no extra circuit is needed for driving when the sensor works, and the sensor is particularly suitable for a self-powered system.
Drawings
Fig. 1 is a schematic structural view of a wet gas generator provided in embodiment 1.
FIG. 2 is a scanning electron microscope image of a titanium dioxide nanowire network structure.
Fig. 3 is a cross-sectional view of a titania nanowire network structure.
Fig. 4 is a graph of the wetting angle test results of water droplets on a titania nanowire network structure.
FIG. 5 is a graph of the voltage and current output results of the wet gas generator of example 1 in a wet gas environment.
Fig. 6 is a schematic view of the mechanical bending process of the wet gas generator of embodiment 1.
Fig. 7 is a graph of the voltage output results of the wet gas generator of example 1 after mechanical bending.
Fig. 8 is the voltage output of the wet gas generator of example 2 in a wet gas environment.
FIG. 9 is a cross-sectional view of a vertically grown titanium dioxide nanowire array synthesized by a hydrothermal method in a comparative example.
Fig. 10 is a wetting angle of water on a vertically grown titanium dioxide nanowire array.
Fig. 11 is a graph of the voltage output of the respiration monitoring sensor during respiration of a human body.
Fig. 12 is a graph showing the voltage output of the finger-pressing sensor during the pressing process of the human finger.
FIG. 13 is a thickness versus voltage curve for a nanowire layer.
Detailed Description
The technical solutions of the present invention will be described in detail below in order to clearly understand the technical features, objects, and advantages of the present invention, but the present invention is not limited to the practical scope of the present invention.
Example 1
The present embodiment provides a wet gas generator having a structure as shown in fig. 1. The moisture generator comprises a substrate 1, a first electrode 2, a nanowire layer 3, a second electrode 4, wherein:
the substrate is a flexible substrate, the material is polyethylene terephthalate, the size is 1 cm multiplied by 1 cm, and the thickness is 50 micrometers;
the first electrode is a layer, which is an indium tin oxide film, and the thickness of the first electrode is 300 nanometers;
the nanowire layer is made of titanium dioxide nanowires, the diameters of the titanium dioxide nanowires are 70-300 nanometers, and the thickness of the nanowire layer is 10 micrometers; the nano wires are mutually crossed to form a titanium dioxide nano wire network structure; the morphology of the titanium dioxide nanowires and the cross section of the coating are respectively shown in fig. 2 and 3; the titanium dioxide nanowire network structure has good hydrophilicity, and the wetting angle of the titanium dioxide nanowire network structure and water is 13 degrees, as shown in FIG. 4;
the second electrode is a layer made of aluminum and has a thickness of 100 nm.
The wet gas generator is prepared according to the following steps:
forming a first electrode on a substrate by adopting a magnetron sputtering method;
forming a nanowire layer on the surface of the first electrode by adopting an electrophoretic deposition method;
forming a second electrode on the surface of the nanowire layer by adopting an electron beam evaporation method;
the nanowire layer is formed by the following specific steps:
(1) 0.5 g of titanium dioxide nanowire was dispersed in an organic solvent (a mixed solution of 250 ml of alcohol, 4 ml of acetone and 2 ml of water) and sufficiently stirred until completely dispersed to form a titanium dioxide nanowire sol.
(2) The substrate on which the first electrode was formed was placed in the sol, a titanium substrate having a thickness of 100 μm was placed in parallel at a distance of 5 mm from the substrate, a constant voltage of 30 volts was applied between the substrate and the titanium plate, and the substrate was taken out after 1 minute of deposition.
(3) And placing the substrate in a heating furnace at 100 ℃ for 12 hours, and drying to obtain a titanium dioxide nanowire layer and form a nanowire network structure.
The actual test of the wet gas generator based on the titanium dioxide nanowire structure obtained in example 1 is specifically carried out according to the following steps:
the wet gas generator is arranged in a cavity with controllable humidity, and when the relative humidity in the cavity is increased from 10% to 95%, the output voltage of the wet gas generator can reach about 0.5 volt in a short time; when the relative humidity in the cavity is reduced to 10%, the output voltage of the moisture generator is about 0 volt; when the relative humidity in the cavity rises to 95% again, the wet gas generator output voltage again reaches about 0.5 volts, as shown in graph a in fig. 5.
Testing the short-circuit current of the wet gas generator: when the relative humidity in the cavity rises from 10% to 95%, the short-circuit current of the wet gas generator can reach about 8 microamperes in a short time. When the relative humidity in the cavity drops to 10%, the output voltage of the moisture-driven generator is about 0 microampere, as shown in graph b of fig. 5.
By calculation it can be found that: the output power density of the wet gas generator of this embodiment is 4. mu.W/cm-2。
The moisture generator was tested for bend resistance in a manner as shown in fig. 6, with a bend radius of 6 mm. In the mechanical bending process of more than 1 ten thousand times, the voltage output of the moisture generator is shown in fig. 7, and no obvious reduction occurs, which indicates that the moisture generator based on the titanium dioxide nanowire network structure has better mechanical flexibility.
Example 2
The present embodiment provides a wet gas generator having a structure as shown in fig. 1. The moisture generator comprises a substrate 1, a first electrode 2, a nanowire layer 3, a second electrode 4, wherein:
the substrate is glass with the thickness of 1 mm, and the size of the substrate is 1 cm multiplied by 1 cm;
the first electrode is layered and is fluorine-doped tin oxide with the thickness of 300 nanometers;
the nanowire layer is made of titanium dioxide nanowires, the diameters of the titanium dioxide nanowires are 70-300 nanometers, and the thickness of the nanowire layer is 10 micrometers;
the second electrode is a layer made of aluminum and has a thickness of 100 nm.
The wet gas generator is prepared according to the following steps:
forming a first electrode on a substrate by adopting a magnetron sputtering method;
forming a nanowire layer on the surface of the first electrode by electrophoretic deposition, which comprises the following steps
(1) Dispersing 0.5 g of titanium dioxide nanowires in an organic solvent (a mixed solution consisting of 250 ml of alcohol, 4 ml of acetone and 2 ml of water), and fully stirring until the titanium dioxide nanowires are completely dispersed to form titanium dioxide nanowire sol;
(2) placing a substrate pole in the sol, taking a titanium substrate with the thickness of 100 microns, placing the titanium substrate in parallel at a position 5 mm away from the substrate, applying a constant voltage of 30 volts between the substrate and the titanium plate, depositing for 1 minute, and taking out the substrate;
(3) placing the substrate in a heating furnace at 100 ℃ for 12 hours and drying to obtain a titanium dioxide nanowire layer and form a nanowire network structure;
and forming a second electrode with the thickness of 100 nanometers on the surface of the nanowire layer by adopting an electron beam evaporation method.
The actual test of the wet gas generator based on the titanium dioxide nanowire structure obtained in example 2 is specifically carried out according to example 1:
the wet gas generator is arranged in a cavity with controllable humidity, and when the relative humidity in the cavity is increased from 10% to 95%, the output voltage of the wet gas generator can reach about 0.5 volt in a short time; when the relative humidity in the cavity is reduced to 10%, the output voltage of the moisture generator is about 0 volt; when the relative humidity in the cavity rises to 95% again, the moisture generator output voltage again reaches about 0.5 volts, as shown in fig. 8.
Comparative example
The titanium dioxide nanowire obtained by electrophoretic deposition in example 2 was replaced by a hydrothermal method to obtain a titanium dioxide nanowire array perpendicular to the substrate, and the cross section of the titanium dioxide nanowire array is shown in fig. 9. Fig. 9 shows the case where nanowires are vertically grown and the density of nanowires is high, and the wetting angle of water on the vertical nanowire array is 80 degrees, as shown in fig. 10, thereby it can be illustrated that the hydrophilicity of the vertically aligned array of titanium dioxide nanowires is inferior to that of the electrophoretically deposited nanowire network structure.
And forming a second electrode with the thickness of 100 nanometers on the surface of the nanowire layer by adopting an electron beam evaporation method.
The actual test of the wet gas generator based on the titanium dioxide nanowire structure obtained in the comparative example is specifically carried out according to the following example 1:
the humidity generator is arranged in a cavity with controllable humidity, and when the relative humidity in the cavity rises from 10% to 95%, the output voltage of the humidity generator can reach about 0.015 volt in a short time; when the relative humidity in the chamber drops to 10%, the moisture generator output voltage is about 0 volts. Compared with a wet gas generator adopting a titanium dioxide nanowire network structure, the wet gas generator adopting the array with the vertically arranged titanium dioxide nanowires has the output voltage of only 3% of that of the wet gas generator adopting the titanium dioxide nanowire network structure in the same wet gas environment.
Example 3
The moisture generator of embodiment 1 can be attached near the nasal cavity or oral cavity of a human body for monitoring the respiratory rate of the human body in real time. The output voltage of the moisture generator is related to the breathing rate and the breathing intensity, and the output voltage can be used to characterize the breathing rate of the person.
The moisture generator of example 1 was attached as a sensor at a distance of 8 mm from the nasal cavity, and the voltage output across the sensor varied with the breathing of a healthy person as shown in fig. 11. Therefore, the frequency of the voltage pulse signal output by the sensor is consistent with the breathing frequency of the human body, and the voltage pulses can be clearly separated. The voltage signal generated by the sensor can be used for representing the breathing condition without being powered by an external power supply.
Example 4
The transformable moisture generator of embodiment 1 can detect a touch of a human finger. The output voltage of the moisture generator is related to the pressing frequency and the pressing pressure, and the electric signal output by the generator can be used for representing whether the finger is pressed or not. The moisture generator is attached to the surface of the skin of a human body, the electrodes are led out by using copper wires, and the voltage at two ends of the device is measured in real time in the process of pressing the nanowire network structure by fingers. The finger presses the generator about every 1.5 seconds or so, with a pressure of about 4 kilopascals, and a voltage pulse signal having an amplitude of about 150 millivolts can be measured across the device, as shown in fig. 12. The adjacent voltage pulses do not overlap, and the pulses can be clearly distinguished, so that the response speed of the sensor is high.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the present invention. It is intended that the present invention cover such alternatives, modifications, variations, and improvements as may be made without departing from the spirit and scope of the invention.
Claims (64)
1. A wet gas generator, which comprises a substrate, a first electrode, a nanowire layer and a second electrode which are arranged in sequence, wherein the nanowire layer is arranged between the first electrode and the second electrode and is composed of nanowires which are randomly distributed, and the nanowires are intersected with each other to form a nanowire network structure; the moisture is also referred to as water vapor;
wherein the material of the nanowire has a positive Zeta potential or a negative Zeta potential;
in use, the nanowire network structure is exposed to a moisture environment, the moisture diffuses through the nanowire layer, a potential difference is generated between the first electrode and the second electrode, and a charge flow is formed between the first electrode and the second electrode, thereby generating an electric current.
2. The wet gas generator of claim 1, wherein said random distribution is that the nanowires are distributed in an irregular pattern throughout the nanowire layer.
3. The wet gas generator of claim 2, wherein pores formed by nanowires crossing each other in said nanowire network structure have a pore diameter of less than 200 nm.
4. The wet gas generator of claim 1, wherein the material of the nanowires is a material having a resistivity greater than 100 ohm-meters.
5. The wet gas generator according to any of claims 1-4, wherein the nanowire layer is hydrophilic.
6. The wet gas generator of claim 5, wherein the nanowire layer has a contact angle θ ≦ 60 ° with water.
7. The wet gas generator according to any of claims 1-4, 6, wherein the nanowires are titanium oxide nanowires and/or zinc oxide nanowires.
8. The wet gas generator of claim 5, wherein the nanowires are titanium oxide nanowires and/or zinc oxide nanowires.
9. The wet gas generator according to any of claims 1-4, 6, 8, wherein the nanowire layer has a thickness of 1-100 microns.
10. The wet gas generator of claim 9, wherein the nanowire layer has a thickness of 5-20 microns.
11. The wet gas generator of claim 5, wherein the nanowire layer has a thickness of 1-100 microns.
12. The wet gas generator of claim 11, wherein the nanowire layer has a thickness of 5-20 microns.
13. The wet gas generator of claim 7, wherein the nanowire layer has a thickness of 1-100 microns.
14. The wet gas generator of claim 13, wherein the nanowire layer has a thickness of 5-20 microns.
15. The wet gas generator according to any of claims 1-4, 6, 8, 10-14, wherein the nanowires have a diameter of 70-300 nanometers.
16. The wet gas generator of claim 5, wherein the nanowires have a diameter of 70-300 nanometers.
17. The wet gas generator of claim 7, wherein the nanowires have a diameter of 70-300 nanometers.
18. The wet gas generator of claim 9, wherein the nanowires have a diameter of 70-300 nanometers.
19. A wet gas generator according to any of claims 1-4, 6, 8, 10-14, 16-18, wherein said substrate is in the form of a layer or film;
the first electrode and the second electrode are both in a layered or film shape.
20. The wet gas generator of claim 19, wherein the substrate has a thickness of 10-5000 microns.
21. The wet gas generator of claim 19, wherein the thickness of said first and second electrodes is 0.05-100 microns, respectively.
22. The wet gas generator of claim 5, wherein said substrate is in the form of a layer or film;
the first electrode and the second electrode are both in a layered or film shape.
23. The wet gas generator of claim 22, wherein the substrate has a thickness of 10-5000 microns.
24. The wet gas generator of claim 22, wherein the thickness of said first and second electrodes is 0.05-100 microns, respectively.
25. The wet gas generator of claim 7, wherein said substrate is in the form of a layer or film;
the first electrode and the second electrode are both in a layered or film shape.
26. The wet gas generator of claim 25, wherein the substrate has a thickness of 10-5000 microns.
27. The wet gas generator of claim 25, wherein the thickness of said first and second electrodes is 0.05-100 microns, respectively.
28. The wet gas generator of claim 9, wherein said substrate is in the form of a layer or film;
the first electrode and the second electrode are both in a layered or film shape.
29. The wet gas generator of claim 28, wherein the substrate has a thickness of 10-5000 microns.
30. The wet gas generator of claim 28, wherein the thickness of said first and second electrodes is 0.05-100 microns, respectively.
31. The wet gas generator of claim 15, wherein said substrate is in the form of a layer or film;
the first electrode and the second electrode are both in a layered or film shape.
32. The wet gas generator of claim 31, wherein the substrate has a thickness of 10-5000 microns.
33. The wet gas generator of claim 31, wherein the thickness of said first and second electrodes is 0.05-100 microns, respectively.
34. The wet gas generator according to claim 1, wherein the material of the substrate is a pure metal, an alloy, a polymer material or an inorganic material.
35. The wet gas generator of claim 34, wherein said pure metal is gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, or tin;
the alloy is made of at least two materials selected from gold, silver, platinum, aluminum, nickel, copper, titanium, chromium and tin;
the high polymer material is selected from one of polyethylene terephthalate, polyethylene naphthalate, polyimide, polytetrafluoroethylene, polyvinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, polyvinylidene chloride, polychlorinated ether, polymethyl methacrylate, polyvinyl alcohol, polyisobutylene, polyvinyl formal, polyacrylonitrile, polycarbonate, polybutylene terephthalate, polyethylene naphthalate, polyvinylidene fluoride, polydifluorodichloroethylene, dimethylbenzene dimer, ethylene-vinyl acetate copolymer, perfluoroethylene-propylene copolymer, acrylonitrile-butadiene-styrene terpolymer and vinyl chloride-vinyl acetate copolymer;
the inorganic material is ceramic or glass.
36. The wet gas generator of claim 35, wherein the ceramic is selected from at least one of boron oxide, silicon dioxide, aluminum oxide, magnesium oxide, zirconium oxide, silicon nitride, aluminum nitride, gallium nitride, boron nitride, titanium nitride, boron carbide, silicon carbide, titanium carbide, and titanium boride.
37. The wet gas generator of claim 19, wherein the material of the substrate is a pure metal, an alloy, a polymer material, or an inorganic material.
38. The wet gas generator of claim 37, wherein the pure metal is gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, or tin;
the alloy is made of at least two materials selected from gold, silver, platinum, aluminum, nickel, copper, titanium, chromium and tin;
the high polymer material is selected from one of polyethylene terephthalate, polyethylene naphthalate, polyimide, polytetrafluoroethylene, polyvinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, polyvinylidene chloride, polychlorinated ether, polymethyl methacrylate, polyvinyl alcohol, polyisobutylene, polyvinyl formal, polyacrylonitrile, polycarbonate, polybutylene terephthalate, polyethylene naphthalate, polyvinylidene fluoride, polydifluorodichloroethylene, dimethylbenzene dimer, ethylene-vinyl acetate copolymer, perfluoroethylene-propylene copolymer, acrylonitrile-butadiene-styrene terpolymer and vinyl chloride-vinyl acetate copolymer;
the inorganic material is ceramic or glass.
39. The wet gas generator of claim 38, wherein the ceramic is selected from at least one of boron oxide, silicon dioxide, aluminum oxide, magnesium oxide, zirconium oxide, silicon nitride, aluminum nitride, gallium nitride, boron nitride, titanium nitride, boron carbide, silicon carbide, titanium carbide, and titanium boride.
40. The wet gas generator according to any of claims 20-33, wherein the material of the substrate is a pure metal, an alloy, a polymer material or an inorganic material.
41. The wet gas generator of claim 40, wherein said pure metal is gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, or tin;
the alloy is made of at least two materials selected from gold, silver, platinum, aluminum, nickel, copper, titanium, chromium and tin;
the high polymer material is selected from one of polyethylene terephthalate, polyethylene naphthalate, polyimide, polytetrafluoroethylene, polyvinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, polyvinylidene chloride, polychlorinated ether, polymethyl methacrylate, polyvinyl alcohol, polyisobutylene, polyvinyl formal, polyacrylonitrile, polycarbonate, polybutylene terephthalate, polyethylene naphthalate, polyvinylidene fluoride, polydifluorodichloroethylene, dimethylbenzene dimer, ethylene-vinyl acetate copolymer, perfluoroethylene-propylene copolymer, acrylonitrile-butadiene-styrene terpolymer and vinyl chloride-vinyl acetate copolymer;
the inorganic material is ceramic or glass.
42. The wet gas generator of claim 41, wherein the ceramic is selected from at least one of boron oxide, silicon dioxide, aluminum oxide, magnesium oxide, zirconium oxide, silicon nitride, aluminum nitride, gallium nitride, boron nitride, titanium nitride, boron carbide, silicon carbide, titanium carbide, and titanium boride.
43. The wet gas generator of claim 1, wherein the substrate is a flexible material substrate.
44. The wet gas generator according to claim 43, wherein the flexible material substrate is selected from the group consisting of polyethylene terephthalate, polyimide, polyethylene naphthalate, polytetrafluoroethylene, polyvinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, and polyvinylidene chloride.
45. The wet gas generator of claim 34, wherein the substrate is a flexible material substrate.
46. The wet gas generator according to claim 45, wherein the flexible material substrate is selected from the group consisting of polyethylene terephthalate, polyimide, polyethylene naphthalate, polytetrafluoroethylene, polyvinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, and polyvinylidene chloride.
47. The wet gas generator according to any of claims 35-39, 41-42, wherein the substrate is a flexible material substrate.
48. The wet gas generator according to claim 47, wherein the flexible material substrate is selected from the group consisting of polyethylene terephthalate, polyimide, polyethylene naphthalate, polytetrafluoroethylene, polyvinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, and polyvinylidene chloride.
49. The wet gas generator of claim 40, wherein the substrate is a flexible material substrate.
50. The wet gas generator of claim 49, wherein the flexible material substrate is selected from the group consisting of polyethylene terephthalate, polyimide, polyethylene naphthalate, polytetrafluoroethylene, polyvinylidene fluoride, polyamide, polyvinyl chloride, polydimethylsilane, polystyrene, polyethylene, and polyvinylidene chloride.
51. A wet gas generator according to any of claims 1-4, 6, 8, 10-14, 16-18, 20-39, 41-46, 48-50, wherein said first electrode comprises an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or alloys thereof;
the second electrode includes an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or an alloy thereof.
52. The wet gas generator of claim 5, wherein said first electrode comprises an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or alloys thereof;
the second electrode includes an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or an alloy thereof.
53. The wet gas generator of claim 7, wherein said first electrode comprises an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or alloys thereof;
the second electrode includes an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or an alloy thereof.
54. The wet gas generator of claim 9, wherein said first electrode comprises an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or alloys thereof;
the second electrode includes an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or an alloy thereof.
55. The wet gas generator of claim 15, wherein said first electrode comprises an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or alloys thereof;
the second electrode includes an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or an alloy thereof.
56. The wet gas generator of claim 19, wherein said first electrode comprises an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or alloys thereof;
the second electrode includes an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or an alloy thereof.
57. The wet gas generator of claim 40, wherein said first electrode comprises an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or alloys thereof;
the second electrode includes an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or an alloy thereof.
58. The wet gas generator of claim 47, wherein said first electrode comprises an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or alloys thereof;
the second electrode includes an indium tin metal oxide thin film, a graphene thin film, a silver nanowire film coating, or a layer or thin film formed of one of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium, tin, or an alloy thereof.
59. The method of making a wet gas generator according to any of claims 1-58, comprising the steps of:
forming a first electrode on a substrate;
forming a nanowire layer on the surface of the first electrode;
and forming a second electrode on the surface of the nanowire layer.
60. The production method according to claim 59, wherein the nanowire layer is formed by an electrophoretic deposition method, a droplet coating method, or a spin coating method.
61. The method of claim 60, wherein the step of forming the nanowire layer by electrophoretic deposition comprises the steps of:
dispersing the nano wire in a solvent to obtain nano wire sol;
placing the substrate with the first electrode in the sol, and inserting another conductive substrate to enable one side of the substrate with the first electrode to be opposite to the conductive substrate;
and applying voltage between the substrate and the conductive substrate to deposit the nanowires on the surface of the first electrode, taking out the nanowires, and drying to form a nanowire layer.
62. A respiration sensor comprising the moisture generator of any one of claims 1-58.
63. The respiratory sensor of claim 62, wherein the moisture generator is disposed near a nasal cavity or an oral cavity of the person.
64. A finger touch sensor comprising the moisture generator of any one of claims 1-58.
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| CN201810085693.7A CN108365776B (en) | 2018-01-29 | 2018-01-29 | Wet gas generator and preparation method thereof |
| PCT/CN2019/073180 WO2019144931A1 (en) | 2018-01-29 | 2019-01-25 | Moisture power generator and preparation method therefor |
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| WO2019144931A1 (en) | 2019-08-01 |
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