CN108359936A - A kind of composite coating cutting element and preparation method thereof - Google Patents
A kind of composite coating cutting element and preparation method thereof Download PDFInfo
- Publication number
- CN108359936A CN108359936A CN201810112461.6A CN201810112461A CN108359936A CN 108359936 A CN108359936 A CN 108359936A CN 201810112461 A CN201810112461 A CN 201810112461A CN 108359936 A CN108359936 A CN 108359936A
- Authority
- CN
- China
- Prior art keywords
- composite coating
- films
- cutting element
- pellumina
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Drilling Tools (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The invention discloses a kind of composite coating cutting elements and preparation method thereof, the tool includes base material and is formed in the composite coating of the substrate surface, the composite coating includes pellumina and at least one layer Al films, the Al films and the pellumina are close to, the Al films are mantle, the pellumina is dura mater, the composite coating includes mantle and dura mater, Al films can play the role of shear band, so that certain " opposite sliding " can be generated between hard formation in the case where keeping low stress level, to alleviate the internal stress and interfacial stress of film layer, the composite coating is prepared on cutting element surface, it can make the cutting element intensity higher, it is more wear-resisting, cutting element can be greatly promoted in the durability and adaptability using process.
Description
Technical field
The present invention relates to cutting element fields, and in particular to a kind of composite coating cutting element and preparation method thereof.
Background technology
Cutting element is made of the matrix of the materials such as hard metal, cermet, ceramics, steel or high-speed steel.For
Increase life tools improve cutting characteristic, typically use CVD（Chemical vapor deposition）Or PVD（Physical vapour deposition (PVD)）Work
Single layer or multi-layer wear-resistant protective coating are prepared on matrix by skill.Common coating such as metallic hard material layer, metal aoxidize
Nitride layer etc..It can be using only CVD, using only PVD or by the combination of kinds of processes come prepares coating.
In PVD process, different process variants for example magnetron sputtering, arc evaporation, ion plating, electron beam evaporation and
It is distinct between laser ablation.Coated tool is most commonly used in PVD process is magnetron sputtering and arc evaporation.A other
In PVD process variant, and there are many modifications, such as non-pulse or pulsed magnetron sputtering or non-pulse or pulsed arc evaporation.
Invention content
Technical problem to be solved by the invention is to provide a kind of superhard, wear-resisting composite coating cutting elements and its preparation
Method.
The technical solution used in the present invention is：
A kind of composite coating cutting element, including base material and the composite coating for being formed in the substrate surface, the composite coating
Including pellumina and at least one layer Al films, the Al films and the pellumina are close to.
In some preferred embodiments, the composite coating further includes the TiN film being close to the Al films.
In further preferred embodiment, the thickness of the TiN film is 2-10nm.
In further preferred embodiment, the composite coating further includes the TiCxNyOz being close to the Al films
Film, wherein x+y+z=1.
In embodiment still more preferably, between the pellumina, the TiN film and the TiCxNyOz films
It is separated with the Al films.
In some preferred embodiments, the thickness of the Al films is 1-2.5nm.
In some preferred embodiments, the thickness of the pellumina is 4-8nm.
In some preferred embodiments, the thickness of the composite coating is 0.1-0.3 μm.
The present invention also provides the preparation method of composite coating cutting element as described above, the composite coating is to use
Plasma deposition technology is prepared.
In some preferred embodiments, the composite coating is to use magnetically controlled DC sputtering technology or cathode arc magnetic mistake
Filter technology is prepared.
The beneficial effects of the invention are as follows：
The present invention provides a kind of composite coating cutting element and preparation method thereof, which includes base material and is formed in the base
The composite coating on material surface, the composite coating include pellumina and at least one layer Al films, the Al films and the aluminium oxide
Film is close to, and the Al films are mantle, and the pellumina is dura mater, which includes mantle and dura mater, and Al films can rise
To the effect of shear band so that certain " opposite sliding " can be generated between hard formation in the case where keeping low stress level,
To alleviate the internal stress and interfacial stress of film layer, the composite coating is prepared on cutting element surface, can make the cutting element
It is intensity higher, more wear-resisting, cutting element can be greatly promoted in the durability and adaptability using process.
Specific implementation mode
Embodiment 1：
Present embodiments provide a kind of composite coating cutting element, including base material and the compound painting for being formed in the substrate surface
Layer, the composite coating include the multilayer pellumina being staggered and Al films, and the thickness of the Al films is 2.5nm, the oxygen
The thickness for changing aluminium film is 8nm.The thickness of the composite coating is 0.1 μm.The Al films and the pellumina use DC magnetic
It controls sputtering technology to prepare, the film of different-thickness is obtained by adjusting sedimentation time and deposition velocity.The Al films are mantle, described
Pellumina is dura mater, which includes mantle and dura mater, and Al films can play the role of shear band so that between hard formation
Certain " opposite sliding " can be generated in the case where keeping low stress level, answered with the internal stress and interface of alleviating film layer
Power prepares the composite coating on cutting element surface, can make the cutting element intensity higher, more wear-resisting, can be significantly
Cutting element is promoted in the durability and adaptability using process.
Embodiment 2：
Present embodiments provide a kind of composite coating cutting element, including base material and the compound painting for being formed in the substrate surface
Layer, the composite coating include pellumina, TiN film and Al films, the TiN film and the pellumina respectively with the Al films
Two sides be close to.The thickness of the Al films is 1nm, and the thickness of the pellumina is 5nm, and the thickness of the TiN film is 10nm,
The thickness of the composite coating is 0.2 μm.The Al films, the pellumina, the TiN film use cathode arc filtering technique system
It is standby, obtain the film of different-thickness by adjusting sedimentation time and deposition velocity.The Al films are mantle, the pellumina and institute
It is dura mater to state TiN film, which includes mantle and dura mater, and Al films can play the role of shear band so that between hard formation
Certain " opposite sliding " can be generated in the case where keeping low stress level, answered with the internal stress and interface of alleviating film layer
Power, and the combination of the pellumina and the TiN film also further increases the intensity of coating, is prepared on cutting element surface
The composite coating can make the cutting element intensity higher, more wear-resisting, can greatly promote cutting element using process
Durability and adaptability.
Embodiment 2：
Present embodiments provide a kind of composite coating cutting element, including base material and the compound painting for being formed in the substrate surface
Layer, the composite coating includes pellumina, TiN film, Al films and TiCxNyOz films, wherein x+y+z=1, the TiN film, institute
It states pellumina and the TiCxNyOz films is close to the Al films, the pellumina, the TiN film and described
The Al films are separated between TiCxNyOz films.The thickness of the Al films is 1nm, and the thickness of the pellumina is 4nm, described
The thickness of TiN film is 2nm, and the thickness of the TiCxNyOz films is 6nm, and the thickness of the composite coating is 03 μm.The Al films,
The pellumina, the TiN film are prepared using cathode arc filtering technique, are obtained not by adjusting sedimentation time and deposition velocity
The film of stack pile.The Al films are mantle, and the pellumina and the TiN film are dura mater, the composite coating include mantle and
Dura mater, Al films can play the role of shear band so that can generate one in the case where keeping low stress level between hard formation
Fixed " opposite sliding ", to alleviate the internal stress and interfacial stress of film layer, and the pellumina, the TiN film and described
The combination of TiCxNyOz films also further increases the intensity of coating, prepares the composite coating on cutting element surface, can make
It is the cutting element intensity higher, more wear-resisting, cutting element can be greatly promoted in the durability and adaptability using process.
Claims (10)
1. a kind of composite coating cutting element, including base material and the composite coating for being formed in the substrate surface, which is characterized in that
The composite coating includes pellumina and at least one layer Al films, and the Al films and the pellumina are close to.
2. composite coating cutting element according to claim 1, which is characterized in that the composite coating further include with it is described
The TiN film that Al films are close to.
3. composite coating cutting element according to claim 2, which is characterized in that the thickness of the TiN film is 2-10nm.
4. composite coating cutting element according to claim 2, which is characterized in that the composite coating further include with it is described
The TiC that Al films are close toxNyOzFilm, wherein x+y+z=1.
5. composite coating cutting element according to claim 4, which is characterized in that the pellumina, the TiN film and
The TiCxNyOzThe Al films are separated between film.
6. according to claim 1-5 any one of them composite coating cutting elements, which is characterized in that the thickness of the Al films is
1-2.5nm。
7. according to claim 1-5 any one of them composite coating cutting elements, which is characterized in that the thickness of the pellumina
Degree is 4-8nm.
8. according to claim 1-5 any one of them composite coating cutting elements, which is characterized in that the thickness of the composite coating
Degree is 0.1-0.3 μm.
9. the preparation method of claim 1-8 any one of them composite coating cutting elements, which is characterized in that the compound painting
Layer is prepared using plasma deposition technology.
10. the preparation method of composite coating cutting element according to claim 9, which is characterized in that the composite coating
It is prepared using magnetically controlled DC sputtering technology or cathode arc Magnetic filter technology.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810112461.6A CN108359936A (en) | 2018-02-05 | 2018-02-05 | A kind of composite coating cutting element and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810112461.6A CN108359936A (en) | 2018-02-05 | 2018-02-05 | A kind of composite coating cutting element and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108359936A true CN108359936A (en) | 2018-08-03 |
Family
ID=63004703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810112461.6A Pending CN108359936A (en) | 2018-02-05 | 2018-02-05 | A kind of composite coating cutting element and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108359936A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101214743A (en) * | 2008-01-11 | 2008-07-09 | 株洲钻石切削刀具股份有限公司 | Coating blade for processing cast iron |
| CN101338412A (en) * | 2008-07-23 | 2009-01-07 | 西南交通大学 | Method for preparing of low stress chromium nitride multilayer hard film |
| CN101605923A (en) * | 2007-01-02 | 2009-12-16 | 特固克株式会社 | Surface treatment method to cutting element |
| CN102560344A (en) * | 2010-12-24 | 2012-07-11 | 鸿富锦精密工业（深圳）有限公司 | Hard thin film, product provided with same, and production method of product |
| CN106856658A (en) * | 2015-10-09 | 2017-06-16 | 住友电工硬质合金株式会社 | Surface-coated cutting tool |
-
2018
- 2018-02-05 CN CN201810112461.6A patent/CN108359936A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101605923A (en) * | 2007-01-02 | 2009-12-16 | 特固克株式会社 | Surface treatment method to cutting element |
| CN101214743A (en) * | 2008-01-11 | 2008-07-09 | 株洲钻石切削刀具股份有限公司 | Coating blade for processing cast iron |
| CN101338412A (en) * | 2008-07-23 | 2009-01-07 | 西南交通大学 | Method for preparing of low stress chromium nitride multilayer hard film |
| CN102560344A (en) * | 2010-12-24 | 2012-07-11 | 鸿富锦精密工业（深圳）有限公司 | Hard thin film, product provided with same, and production method of product |
| CN106856658A (en) * | 2015-10-09 | 2017-06-16 | 住友电工硬质合金株式会社 | Surface-coated cutting tool |
Non-Patent Citations (1)
| Title |
|---|
| 朱雪婷: ""A1/A12O3纳米多层膜的结构与性能研究"", 《中国优秀硕士学位论文全文数据库 工程科技Ⅰ辑》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6854241B2 (en) | Cutting tools with multi-layer PVD coating | |
| EP0842306B2 (en) | Improvements in and relating to methods for improving the sputter desposition of metal-sulphur coatings, e.g. molybdenum disulphide coatings and to improved coatings | |
| US9290847B2 (en) | Al2O3 or Al2O3-contained multilayer coatings for silicon nitride cutting tools by physical vapor deposition and methods of making the same | |
| US8119226B2 (en) | Coated cutting tool | |
| EP1914331B1 (en) | Coated cutting tool | |
| Randhawa et al. | A review of cathodic arc plasma deposition processes and their applications | |
| CN100360705C (en) | High oxidation resistance nanocrystalline-amorphous structured superhard composite film cutting tool and deposition method therefor | |
| CN110438442B (en) | Nano niobium aluminum yttrium nitride/amorphous silicon nitride biphase superhard coating and deposition method thereof | |
| CN110894605A (en) | Corrosion resistant carbon based coatings | |
| CN108118301B (en) | AlCrSiN coating with intermediate layer with gradient change of Si content and preparation method | |
| JPH1161380A (en) | Wear resistant multi-layer type hard coating film | |
| CN105312600A (en) | Coated cutting tool and method of producing coated cutting tool | |
| CN212335269U (en) | Composite coating deposited on surface of cubic boron nitride cutter and vacuum coating device | |
| CN111945111A (en) | Composite coating deposited on surface of cubic boron nitride cutter and deposition method | |
| JP3394021B2 (en) | Coated cutting tool | |
| JP3460288B2 (en) | Surface coating member with excellent wear resistance | |
| KR20100034013A (en) | Tool with multilayered metal oxide coating and method for producing the coated tool | |
| CN103243304A (en) | Method for improving mechanical property on surface of metal workpiece | |
| CN210261965U (en) | Coated cutting tool | |
| JPH07205361A (en) | Surface coating member excellent in wear resistance | |
| CN108359936A (en) | A kind of composite coating cutting element and preparation method thereof | |
| JP2009034811A (en) | Cemented carbide insert for parting, grooving and threading | |
| CN1924084A (en) | Preparation method of TiN/AlON nano multilayer coating reaction magnetron sputtering for cutting tool | |
| KR102318298B1 (en) | Hard film for cutting tools | |
| WO2002070776A1 (en) | Deposition process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180803 |