CN108342707B - Curved surface particle source - Google Patents
Curved surface particle source Download PDFInfo
- Publication number
- CN108342707B CN108342707B CN201810159733.8A CN201810159733A CN108342707B CN 108342707 B CN108342707 B CN 108342707B CN 201810159733 A CN201810159733 A CN 201810159733A CN 108342707 B CN108342707 B CN 108342707B
- Authority
- CN
- China
- Prior art keywords
- curved surface
- target
- opening
- surface discharge
- discharge target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002245 particle Substances 0.000 title claims abstract description 104
- 238000001816 cooling Methods 0.000 claims abstract description 63
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 35
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 239000002184 metal Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 19
- 230000000694 effects Effects 0.000 claims abstract description 14
- 238000010894 electron beam technology Methods 0.000 claims abstract description 9
- 238000000605 extraction Methods 0.000 claims abstract description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 60
- 229910052799 carbon Inorganic materials 0.000 claims description 55
- 239000000463 material Substances 0.000 claims description 11
- 230000005389 magnetism Effects 0.000 claims description 10
- 239000002131 composite material Substances 0.000 claims description 6
- 238000000429 assembly Methods 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims description 3
- 230000017525 heat dissipation Effects 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 150000001721 carbon Chemical class 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 230000009977 dual effect Effects 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 238000000576 coating method Methods 0.000 abstract description 28
- 239000011248 coating agent Substances 0.000 abstract description 24
- 238000009413 insulation Methods 0.000 abstract description 8
- 238000002360 preparation method Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 20
- 239000013077 target material Substances 0.000 description 17
- 239000002923 metal particle Substances 0.000 description 15
- 238000000151 deposition Methods 0.000 description 13
- 230000008021 deposition Effects 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 11
- 229910002804 graphite Inorganic materials 0.000 description 9
- 239000010439 graphite Substances 0.000 description 9
- 229910052755 nonmetal Inorganic materials 0.000 description 9
- 238000001755 magnetron sputter deposition Methods 0.000 description 7
- 238000005240 physical vapour deposition Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000010297 mechanical methods and process Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000007733 ion plating Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- -1 carbon ions Chemical class 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000007737 ion beam deposition Methods 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 238000004549 pulsed laser deposition Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a curved surface particle source, which comprises a curved surface discharge target, a water cooling jacket, a binding post, an insulating jacket, a magnetic boot, (a plurality of groups of screens, an air inlet and a fixing component, wherein the curved surface discharge target is connected with negative voltage through the binding post to generate glow discharge, the shape of an electric discharge electrode is affected by the shape of an electron beam converging to generate a hollow cathode discharge effect, an anode can be a water cooling air inlet pipe or a screen, electrons can be received by positively charging the anode, the particles can be output in an accelerating way, the screen can be negatively charged and can be used as an extraction electrode of the particles, the three electrodes are matched, a large number of high-energy particles can be obtained, the discharge cathode is formed by splicing a plurality of groups of metal substrates and can be fixed on the water cooling jacket of a water cooling coil pipe through bolts, the insulating jacket can realize insulation among all the components, and the magnetic boot component is internally provided with a magnet. The invention provides high-energy particles for the preparation process of the pvd coating by utilizing the hollow cathode effect in the annular cathode discharge process.
Description
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to a curved surface particle source.
Background
Physical Vapor Deposition (PVD) is a process in which a certain raw material is subjected to physical processes such as evaporation, laser irradiation, or gas discharge to change a certain physical state (solid state to gaseous state, solid state to overflowable atomic state), and deposited on the surface of a workpiece to be plated. The state of the raw materials in the physical vapor deposition process has a great influence on the quality of the film-forming coating. For example: the material deposited in the evaporation coating process is gasified material, and only high vacuum (10 -3 pa), a larger free path of gas atoms is used for depositing the coating, the energy of the deposited atoms is low, and the quality of the coating is relatively poor; the magnetron sputtering (glow discharge) has low ionization rate of the deposition material sputtered by the ionized inert gas bombardment, low energy of sputtered atoms and loose formed coating structure; arc ion plating (arc discharge) deposits particles by arc discharge high-energy thermionic ionization between electrodes, but large particles are accompanied in the discharge process, and the structure and the performance of the coating are influenced.
At present, physical vapor deposition processes can only be realized by ion sources in order to obtain high energy particles. However, the ion source at the present stage has two problems: firstly, the power of the ion source is low, and the ion source which can not form large beam current (the conventional ion source has discharge current of 0.1-10A and low plasma density) Resulting in extremely low deposition rates; on the other hand, the ion source ionization object at the present stage is mainly inert gas (Ar) and reaction gas (C 2 H 2 ) Mainly, the deposited metal or non-metal atoms (Ti, si) cannot be ionized directly.
Diamond-like carbon films (Diamond-like carbon films) have many excellent physical and chemical properties such as high hardness, low coefficient of friction, excellent abrasion resistance, high dielectric constant, high breakdown voltage, wide band gap, chemical inertness, biocompatibility, and the like. Through years of development, DLC films have also entered the practical and industrial production stage in many fields of application. However, there are still many problems in the preparation of diamond-like coatings.
The existing DLC deposition techniques are mainly Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD), where PVD mainly includes Ion Beam Deposition (IBD), magnetron sputtering, multi-arc ion plating, pulsed laser deposition, and CVD includes hot filament Chemical Vapor Deposition (CVD) and Plasma Enhanced Chemical Vapor Deposition (PECVD), and these several techniques have some problems: ion beam deposition is low in graphite sputtering rate and second deposition rate; on one hand, the magnetron sputtering deposition has low sputtering rate, and on the other hand, the low atomic energy leads to low loose hardness of the structure; a large amount of carbon particles can be generated in the multi-arc ion plating deposition process; the pulse laser deposition has high energy consumption, poor coating uniformity and small effective deposition area; the hot wire vapor deposition technology has high deposition temperature, so that the range of a matrix material is greatly limited; PECVD effectively reduces the reaction temperature, but has lower deposition efficiency, low ionization rate of carbon atoms and insufficiently compact film-forming quality structure in the deposition process.
The existing carbon particle sources mainly comprise a gas carbon particle source, a magnetron sputtering source, a multi-arc particle plating carbon particle source, a laser carbon particle source and the like, wherein the gas carbon particle source is mainly used for ionizing hydrocarbon gas through an ion source and other plasma devices, the magnetron sputtering source is used for magnetron sputtering of a graphite target to provide carbon particles for deposition, and the multi-arc ion plating carbon particle source is used for arc discharge of the surface of the graphite target or a metal carbide target; the gas carbon particle source is low in ionization rate due to the fact that gas is required to be ionized, carbon particles are deposited on the source in the ionization process, stability of the discharge process and production continuity are affected, and frequent manual cleaning is needed; the magnetron sputtering source has low deposition rate and ionization rate, and the graphite discharge characteristic of the multi-arc ion carbon plating particle source, and the presence of large particles in the discharge process influences the application of the multi-arc ion carbon plating particle source.
Disclosure of Invention
The technical problem to be solved by the embodiment of the invention is to provide the curved surface particle source which can be efficiently deposited and has high ionization rate, and the curved surface particle source can be used as a metal particle source and a gas ion source and also can be used as a carbon particle source of a diamond-like carbon coating functional layer.
In order to achieve the above purpose, the technical scheme of the invention includes a particle source main body, the particle source main body includes a magnetic shoe component, an insulating sleeve component, a target, an electrode and a water-cooled sleeve, the target is thermally and fixedly connected to the inner side of the water-cooled sleeve, the target includes a first curved surface discharge target and a second target curved surface discharge target which are symmetrically distributed with each other, the magnetic shoe component includes a first magnetic shoe component and a second magnetic shoe component, the first magnetic shoe component and the second magnetic shoe component are respectively arranged on the outer side of the water-cooled sleeve corresponding to the first curved surface discharge target and the second target curved surface discharge target through the insulating sleeve component, a first opening and a second opening are respectively arranged between two ends of the first curved surface discharge target and the second target curved surface discharge target, the first curved surface discharge target and the second target are respectively composed of a plurality of groups of metal base tiles capable of being surface compounded with nonmetallic materials, an internal cavity of the target forms a gas ionization region, a first opening of the curved surface discharge target forms a process gas inlet, and a second opening of the curved surface discharge target forms a second opening of the target; an air inlet pipe is arranged at the first opening of the curved surface target, and an air inlet hole corresponding to the inner cavity of the target is arranged on the side wall of the air inlet pipe; the first curved surface discharge target and the second curved surface discharge target are connected with negative voltage, glow discharge can be generated, the glow discharge is influenced by the shape of the targets, and a hollow cathode discharge effect is generated by electron beam converging; the outer end of the second opening is provided with two groups of screens which are spaced from each other, wherein the screen close to the second opening is an anode screen connected with positive voltage, and the other group of screens is a leading-out electrode screen connected with negative voltage.
The arc angle of the second opening is larger than that of the first opening.
The first magnetic shoe component and the second magnetic shoe component are respectively provided with a back plate and a plurality of magnets which are fixedly arranged on the back plates and are mutually distributed in sequence, the magnets of the adjacent magnets are oppositely arranged, the first magnetic shoe component and the second magnetic shoe component form a closed magnetic field at the first opening to inhibit particle overflow, and the second opening forms a divergent magnetic field to facilitate particle ionization overflow.
The metal substrate tile of the target is one or alloy of titanium, chromium, tungsten, copper and aluminum.
The invention also provides a proposal of a second structural form, namely a central anode curved surface particle source of a diamond-like carbon coating, which comprises a particle source main body, wherein the particle source main body comprises a magnetic shoe component, an insulating sleeve component, a target material, an electrode and a water-cooling sleeve, the target material is fixedly connected with the inner side of the water-cooling sleeve in a heat conduction way, the target material is a curved surface discharge target material with an opening at one side, an inner cavity of the curved surface discharge target material forms a gas ionization region, an exit opening of particles is formed at the opening of the curved surface discharge target material, the magnetic shoe component is arranged at the outer side of the water-cooling sleeve corresponding to the curved surface discharge target material through the insulating sleeve component,
the curved surface discharge target is characterized in that the center of the gas ionization area inside the curved surface discharge target is provided with a central anode air inlet pipe which is arranged along the axial direction of the curved surface discharge target and connected with a positive voltage, the side wall of the central anode air inlet pipe is provided with a plurality of air inlet holes, the two sides of the central anode air inlet pipe are connected with a refrigerant seat for heat dissipation of the central anode air inlet pipe, and the outer end of the opening of the curved surface discharge target is provided with a leading-out electrode screen for connecting a negative voltage.
The magnetic shoe assembly comprises a back plate and a plurality of magnets which are fixedly arranged on the back plate and are mutually distributed in sequence, and magnetism between adjacent magnets is oppositely arranged, so that a closed magnetic field is formed between the adjacent magnets, the magnetism of the magnets close to two sides of an opening of the curved surface discharge target is the same, a divergent magnetic field is formed at the opening, and ionization and overflow of particles are facilitated.
The arc angle of the opening of the curved surface discharge target is 30-90 degrees.
The invention also provides a proposal of a third structural form, namely a double-screen curved surface particle source with diamond-like coating, which comprises a carbon particle source main body, wherein the carbon particle source main body comprises a magnetic shoe component, an insulating sleeve component, a target material, an electrode and a water-cooling sleeve, the target material is fixedly connected with the inner side of the water-cooling sleeve in a heat conduction way, the target material is a curved surface discharge target material with one side opening, an inner cavity of the curved surface discharge target material forms a gas ionization area, an exit opening of particles is formed at the opening of the curved surface discharge target material, the magnetic shoe component is arranged at the outer side of the water-cooling sleeve corresponding to the curved surface discharge target material through the insulating sleeve component,
the curved surface discharge target is characterized in that a central air inlet pipe is arranged in the center of an air ionization area inside the curved surface discharge target along the axial direction of the curved surface discharge target, a plurality of air outlet holes are formed in the side wall of the central air inlet pipe, water cooling seats for heat dissipation of the central air inlet pipe are connected to two sides of the central air inlet pipe, two groups of screens spaced from each other are arranged at the outer end of an opening of the curved surface discharge target, the screen near the opening is an anode screen connected with positive voltage, and the other group of screens is a leading-out electrode screen connected with negative voltage.
The magnetic shoe assembly comprises a back plate and a plurality of magnets which are fixedly arranged on the back plate and are mutually distributed in sequence, and magnetism between adjacent magnets is oppositely arranged, so that a closed magnetic field is formed between the adjacent magnets, the magnetism of the magnets close to two sides of an opening of the curved surface discharge target is the same, a divergent magnetic field is formed at the opening, and ionization and overflow of particles are facilitated.
The innovation mechanism of the invention is as follows: the curved surface discharge target is connected with negative voltage through the binding post, glow discharge can be generated, the influence of the shape of the curved surface discharge target is avoided, the electron beam convergence generates a hollow cathode discharge effect, the anode can be a central anode air inlet pipe or an anode screen, electrons can be received by positive electrification of the anode, particle output can be accelerated, the screen can be negatively electrified and can be used as a leading-out electrode of particles, a large number of high-energy particles can be obtained through matching of three electrodes, the discharge cathode can be spliced and fixed on a water-cooling sleeve by a plurality of groups of metal substrates which can be made of composite nonmetallic materials, the discharge cathode can be spliced and fixed on the water-cooling sleeve by a plurality of groups of metal substrates, the insulating sleeve is mainly insulating among all the components, and the magnet is arranged in the magnetic shoe component. The invention utilizes the hollow cathode effect in the annular cathode discharge process to provide high-energy particles for the diamond-like carbon coating.
Compared with the prior art, the diamond-like coating particle source provided by the invention has the following substantial differences and remarkable progress:
1) The cathode target material is fixed on the water-cooled tube in a mode of mechanically fixing a metal substrate tile and a metal substrate tile composite (bonding) non-metal material tile, so that the target material can be cooled efficiently on one hand, and on the other hand, metal and non-metal are sputtered together, high-energy metal particles, non-metal particles and metal non-metal composite particles can be obtained, and the problem of internal stress of a coating can be effectively solved.
2) The curved cathode design can be assembled with a plurality of closed magnetic groups, so that the target material can be efficiently utilized and the ionization effect can be improved.
3) And the annular design is adopted, large beam high-energy electrons are converged, and ionized particles are efficiently sputtered.
4) In the deposition process of the equipment, large electron beams can efficiently ionize particles, on one hand, sputtering can obtain a coating without large particles on the surface of a substrate, and on the other hand, high-energy ionized carbon particles in the preparation of the diamond-like carbon coating can reduce the existence of graphite phases and improve the quality of the diamond-like carbon coating.
5) Compared with the traditional gas ion source, the metal and nonmetal high-energy particle source can be formed in a breakthrough manner.
In a word, the curved surface particle source provided by the invention can independently finish the ionization of particles of large beam current by utilizing the annular discharge electron beam convergence technology in high vacuum and overflows from the side surface opening, so that the particles with high energy and high deposition rate and high ionization rate can be obtained on the surface of the substrate.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are required in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that it is within the scope of the invention to one skilled in the art to obtain other drawings from these drawings without inventive faculty.
FIG. 1 is a schematic cross-sectional view of a first embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a target;
FIG. 3 is a schematic view of the structure of a water jacket;
FIG. 4 is a schematic view of the structure of the shield assembly and the insulation sleeve assembly;
FIG. 5 is a schematic view of the structure of the magnetic shoe and support fixture;
FIG. 6 is a schematic cross-sectional view of a second embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a target;
FIG. 8 is a schematic view of the structure of a water jacket;
fig. 9 is a schematic view of the structure of the shield assembly and the insulation sleeve assembly;
FIG. 10 is a schematic view of the structure of a magnetic shoe and support fixture;
FIG. 11 is a schematic cross-sectional view of a third embodiment of the present invention;
FIG. 12 is a schematic structural diagram of a target;
FIG. 13 is a schematic view of the structure of a water jacket;
fig. 14 is a schematic view of the structure of the shield assembly and the insulation sleeve assembly;
FIG. 15 is a schematic view of the structure of the magnetic shoe and support fixture;
FIG. 16 is a schematic diagram of magnetic field simulation.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings, for the purpose of making the objects, technical solutions and advantages of the present invention more apparent.
The terms of direction and position in the present invention, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "top", "bottom", "side", etc., refer only to the direction or position of the drawing. Accordingly, directional and positional terms are used to illustrate and understand the invention and are not intended to limit the scope of the invention.
In order to facilitate drawing, in the curved surface discharge tube, the water-cooling back-shaped pipeline is welded on the cooling steel tube, and the targets are assembled by four groups of tiles; some parts of the diamond-like carbon coated discharge tube are not shown (magnet, external water cooling tube and external air inlet pipeline). The water cooling jacket and the water cooling seat of the invention preferably adopt water cooling jacket or water cooling seat which adopts water as cooling medium.
For a more prominent description of the advantages and features of the invention, the embodiments used in the present invention are described based on the use of particle sources in the preparation of diamond-like coatings, it being well known that the present invention can ionize different metals and non-metals with high energy, not just the metal particle source, the non-metal particle source, the metal and non-metal particle source in diamond-like coatings.
Next, a specific operation mode of the workpiece in the present invention will be described.
Example one, double sided open sided anode diamond-like coated carbon particle source
See fig. 1: the double-sided opening curved surface diamond-like carbon coated carbon particle source 10 is of a side surface double-opening structure, and comprises a curved surface discharge target 101, a water cooling jacket 102, a binding post 103, a shielding component 104, an insulating jacket 105, two groups of magnetic shoe components 106, a fixing component 107, a plurality of groups of screens 108 and an air inlet pipe 109. The water-cooling jacket 102 is a stainless steel pipe with a welded water-cooling pipe surface, the binding post 103 is assembled on the water-cooling jacket 102, the curved surface discharge target 101 is formed by splicing a plurality of groups of metal substrate tile surface composite (binding) graphite sheets and fixing the glass on the water-cooling jacket 102 through a bolt mechanical method, the insulating jacket assembly 105 comprises a plurality of insulating pieces to insulate the electrified part and the non-electric part in the whole cathode, the shielding assembly 104 is formed by 2 shielding components to shield the target surface of the cathode, the magnetic shoe assembly 106 is internally provided with a plurality of groups of magnets to form a symmetrical closed magnetic field, the fixing assembly 107 is assembled with the magnetic shoe assembly 106 through threads, the air inlet pipe 109 and the plurality of groups of screens 108 can be assembled, and the fixing assembly 107 can support and fix the whole carbon particle source 10.
See fig. 2: the curved surface discharge target 101 is formed by splicing three groups of metal substrates 1011 watts, the metal substrate 1011 watts is provided with an array threaded hole, the metal substrate 1011 can be fixed on the water cooling jacket 102 by a bolt mechanical method, and the nonmetallic material 1012 is fixed on the metal substrate 1011 by a bonding mode of a processing method of the target.
See fig. 3, 4, 5: the water-cooling jacket 102 is welded with a back-shaped cold water channel, an external electrode 103 is assembled on the water-cooling jacket 102, a shielding assembly 104 comprises an upper shielding jacket 1041 and a lower shielding jacket 1042, the upper shielding jacket 1041 and the lower shielding jacket 1042 are assembled with clamping positions, an insulating jacket assembly 105 comprises an insulating sealing head 1051, a first curved insulating clamping sleeve 1052, a second curved insulating clamping sleeve 1053, an insulating plug 1054 and an electrode insulating jacket (not shown in the figure and sleeved on the external electrode), the first curved insulating clamping sleeve 1052 and the second curved insulating clamping sleeve 1053 are assembled on the water-cooling jacket 102 to insulate the water-cooling jacket 102 from the magnetic shoe assembly 106, the insulating sealing head 1051 is sleeved on the upper end and the lower end of the water-cooling jacket 102 and the end face of the insulating plug 1054 to insulate the water-cooling jacket 102 from the shielding assembly 104, the upper shielding jacket 1041 and the lower shielding jacket 1042 are sleeved on the insulating sealing head 1051, and the magnetic shoe assembly 106 consists of a magnetic shoe and a back plate screwed with the magnetic shoe assembly; the support fixing assembly 107 comprises a cathode fixing insulating plate 1071 and a cathode fixing plate 1072, the cathode fixing plate is fastened on the cathode shielding assembly 104 through bolts, the cathode fixing insulating plate 1071 is arranged in the middle, one end of the cathode fixing plate 1072 is welded with an external air pipe sleeve 1073, an air inlet pipe 109 can be assembled for distributing process air, the effect of air flow can be utilized, the overflow of carbon particle flow is facilitated, the opposite side of the cathode fixing plate 1072 is welded with a screen fixing sleeve, and a fixing end 1081, an insulating ceramic plate 1082, an extraction electrode screen 1083 and an anode screen 1084 can be assembled. One set of magnet shoe assemblies 106 is provided with four sets of magnets NSNS, and the other set of magnet shoe assemblies 106 is provided with three sets of magnets SNS, which can form a closed magnetic field at the small-angle opening to inhibit particle overflow, and form a divergent magnetic field at the large-angle opening to facilitate ionization overflow of particles.
See fig. 1-5: the carbon particle source 10 of the diamond-like coating with the double-side opening curved surface is connected with negative voltage (300 v-500 v) through a binding post 103 in a vacuum state, glow power generation is carried out under high vacuum (0.1-1.0 Pa), argon gas serving as process gas is ionized and collides with the surface of the target 101, metal particles and carbon particles are sputtered out, electron beams are converged in the discharging process of the annular tube, a large amount of ionized metal particles and carbon particles are subjected to the effect of a magnetic field, the ionized metal particles and carbon particles are overflowed from a large-angle opening under the influence of airflow and an extraction electrode screen 1083, negative bias is applied to the surface of a base material, and metal ions and carbon ions are deposited on the surface of a base body under the effect of an electric field, so that the diamond-like coating is obtained.
Embodiment two, center anode curved surface diamond-like carbon coated carbon particle source
See fig. 6: a central anode curved surface diamond-like carbon particle source 11 is of a single-side opening structure, and the opening angle is 30 。 -90 。 The cathode comprises a curved surface discharge target 111, a water cooling jacket 112, a binding post 113, a shielding component 114, an insulating jacket 115, a magnetic shoe component 116, a fixing component 117, a screen 118 and an air inlet pipe 119, wherein the water cooling jacket 112 is a stainless steel pipe with the surface welded thereon, the binding post 113 is assembled on the water cooling jacket 112, the curved surface discharge target 111 is formed by splicing a plurality of groups of metal substrate tile surface composite (binding) graphite sheets and is fixed on the water cooling jacket 112 through a bolt mechanical method, the insulating jacket 115 comprises a plurality of insulating pieces for insulating the whole cathode inner electrified components from non-electric components, the shielding component 114 comprises three shielding pieces for shielding the cathode target surface, the magnetic shoe component 116 is internally provided with a plurality of groups of magnets to form a closed magnetic field, the fixing component 117 is used for fixing the whole cathode, the screen 118 is assembled on the fixing component as an extraction electrode, and the air inlet pipe 119 is assembled on the fixing component for both ends with a water-cooled anode air inlet pipe.
See fig. 7: the target 111 is formed by splicing three groups of metal substrate 1111 tiles, the metal substrate tile 1111 is provided with an array threaded hole, the metal substrate tile 1111 can be fixed on the water cooling jacket 112 by a bolt mechanical method, and the nonmetallic material 10112 is fixed on the metal substrate tile 1111 in a bonding mode by a processing method of the target.
See fig. 8, 9: the water-cooling jacket 112 is welded with a steel pipe to form a back-shaped cold water channel, the binding post 113 is assembled on the water-cooling jacket 112, the shielding assembly 114 comprises an upper end shielding jacket 1141, a lower end shielding jacket 1142, the insulating jacket assembly 115 comprises an electrode insulating jacket 1151, an insulating sealing head 1152, a plane insulating jacket 1153 and a curved surface insulating cover 1154, the curved surface insulating cover 1154 is assembled on the water-cooling jacket 112 to insulate the water-cooling jacket 112 from the magnetic shoe 116, the insulating sealing head 1152 is sleeved on the upper end and the lower end of the water-cooling jacket 112 and the plane insulating jacket 1153 is sleeved on the end face of the water-cooling jacket 112 to insulate the shielding assembly 114, the upper end shielding jacket 1141 and the lower end shielding jacket 1142 are sleeved on the insulating sealing head 1142, the magnetic shoe assembly 116 comprises a magnet seat 1161 and a back plate 1162. Nine groups of magnets NSNSNSNSN are assembled on the magnetic shoe 116, on one hand, closed magnetic force lines can be formed between the two groups of magnets, and on the other hand, the two groups of magnets closest to the opening have the same polarity, so that open magnetic force lines are formed, and the ionization and overflow of particles are facilitated.
See fig. 10: the fixing component 117 (floating potential) fixes the magnetic shoe 116 through a screw and fixes the whole cathode through a water cooling seat 1191 through a screw thread of the air inlet 119, and a screen 118 can be assembled on the fixing component 117 through a ceramic gasket 1171 and a pressing sheet 1181 to serve as an extraction pole. The whole cathode can be fixed and clamped by the insulating sheet and fixing component 117 sleeved on the air inlet pipe 119 and the water cooling seat 1191 fixed by threads.
See fig. 6-10: the carbon particle source 11 of the diamond-like carbon coating with the curved surface of the central anode is connected with negative voltage (300 v-500 v) through the binding post 113 in a vacuum state, glow power generation is carried out under high vacuum (0.1-1.0 Pa), argon gas serving as process gas is ionized and collides with the surface of the target 111, metal particles and carbon particles are sputtered, electron beams are converged in the discharging process of the annular tube, a large amount of ionized metal particles and carbon particles are subjected to the effect of a magnetic field, the ionized metal particles and carbon particles are influenced by the central anode and the leading-out pole, negative bias is applied to the surface of the base material, and the metal ions and the carbon ions are deposited on the surface of the base body under the effect of an electric field, so that the diamond-like carbon coating is obtained.
Embodiment III, side Anode curved surface Diamond-like coating carbon particle Source
See fig. 11: a carbon particle source 12 with a central anode and a curved diamond-like coating has a single-side opening structure with an opening angle of 30 。 -90 。 The cathode comprises a curved surface discharge target 121, a water cooling jacket 122, a binding post 123, a shielding assembly 124, an insulating jacket 125, a magnetic shoe assembly 126, a fixing assembly 127, two groups of screens 128 and an air inlet pipe 129, wherein the water cooling jacket 122 is a stainless steel pipe, the surface of the water cooling jacket is welded with the water cooling pipe, the binding post 123 is assembled on the water cooling jacket 122, the target 121 is formed by splicing a plurality of groups of metal substrate tile surface composite (binding) graphite sheets and is fixed on the water cooling jacket 122 through a bolt mechanical method, the insulating jacket 125 comprises a plurality of insulating pieces for insulating the whole cathode inner electrified part from the non-electrified part, the shielding assembly 124 comprises three shielding pieces for shielding the cathode target surface, the magnetic shoe assembly 126 is internally provided with a plurality of groups of magnets to form a closed magnetic field, the fixing assembly 127 is used for fixing the whole cathode, the two groups of screens 128 are assembled on the fixing assembly, one group of screens 1284 is used as an extraction electrode, the other group of screens 1283 is used as an anode, and the air inlet pipe 119 is used as an air inlet pipe assembled on the fixing assembly 127.
See fig. 12: the target 111 is formed by splicing three groups of metal substrate 1111 tiles, the metal substrate tile 1111 is provided with an array threaded hole, the metal substrate tile 1111 can be fixed on the water cooling jacket 112 by a bolt mechanical method, and the graphite 10112 is fixed on the metal substrate tile 1111 in a mode of compounding by a processing method of the target.
See fig. 13, 14: the water-cooling jacket 122 steel pipe welding returns font cold water course, the terminal 123 assembly is on water-cooling jacket 122, shielding assembly 124 includes upper and lower both ends shielding cover 1241, terminal surface shielding cover 1242, insulating cover 125 includes electrode insulation cover 1251, insulating head 1252, plane insulation cover 1253, curved surface insulating cover 1254 cover assembly makes water-cooling jacket 122 and magnetism boots 126 between insulating, insulating head 1252 suit is on water-cooling jacket 122 upper and lower both ends and plane insulation cover 1253 suit water-cooling jacket 122 terminal surface makes water-cooling jacket 122 and shielding assembly 124 between insulating head 1252, upper and lower both ends shielding cover 1241 suit is on insulating head 1252, terminal surface shielding cover 1242 is fixed on upper and lower both ends shielding cover 1241, magnetism boots 126 include magnet holder 1261 and backplate 1262. The magnetic shoe assembly 126 is provided with nine groups of magnets NSNSNSNSN, on one hand, closed magnetic force lines can be formed between the two groups of magnets, and on the other hand, the two groups of magnets closest to the opening have the same polarity, so that open magnetic force lines are formed, and the ionization and overflow of particles are facilitated.
See fig. 15: the fixing component 127 (floating potential) fixes the magnetic shoe component 126 through screws and the whole cathode through a thread fixing base 1291 of the air inlet 129, and a screen 1283 can be assembled on the fixing component 127 through a ceramic gasket 1271 and a pressing piece 1281 to serve as an anode, and a screen 1284 serves as a leading-out pole. The insulation sheet and fixing component 127 and the thread fixing base 1291 sleeved on the air inlet 129 can fix and clamp the whole cathode.
See fig. 11-15: the carbon particle source 11 of the side anode curved surface diamond-like coating is connected with negative voltage (300 v-500 v) through a binding post 113 in a vacuum state, glow power generation is carried out under high vacuum (0.1-1.0 Pa), argon gas serving as process gas is ionized and collides with the surface of the target 111, metal particles and carbon particles are sputtered, electron beams are converged in the discharging process of the annular tube, a large amount of ionized metal particles and carbon particles are subjected to the effect of a magnetic field, the ionized metal particles and carbon particles are influenced by the side anode and the leading-out pole, negative bias is applied to the surface of the base material, and the metal ions and the carbon ions are deposited on the surface of the base body under the effect of an electric field, so that the diamond-like coating is obtained.
Fig. 16 shows a simulation of the magnetic field in the single-opening diamond-like carbon particle source with curved surface in the second and third embodiments, wherein the number of magnets placed in the magnetic shoes in the carbon particle source is more than or equal to three, nine groups of magnets are used for simulation in the simulation, the magnets are arranged as NSNSNSNSN, and a divergent magnetic field is formed at the opening, which is beneficial to the overflow of particles.
The foregoing disclosure is illustrative of the present invention and is not to be construed as limiting the scope of the invention, which is defined by the appended claims.
Claims (7)
1. The utility model provides a double-opening curved surface particle source, includes the particle source main part, this particle source main part is including magnetic shoe subassembly, insulating cover subassembly, target, electrode and water-cooled jacket, target heat conduction fixed connection in the water-cooled jacket inboard, its characterized in that: the target comprises a first curved surface discharge target and a second target curved surface discharge target which are symmetrically distributed, the magnetic shoe assembly comprises a first magnetic shoe assembly and a second magnetic shoe assembly, the first magnetic shoe assembly and the second magnetic shoe assembly are respectively arranged on the outer sides of water cooling sleeves corresponding to the first curved surface discharge target and the second target curved surface discharge target through insulating sleeve assemblies, a first opening and a second opening are respectively arranged between two ends of the first curved surface discharge target and the second target curved surface discharge target, the first curved surface discharge target and the second target curved surface discharge target are respectively composed of a plurality of groups of metal substrate tiles or a plurality of groups of metal substrate tile surface composite nonmetallic materials, an inner cavity of the target forms a gas ionization region, a first opening of the curved surface discharge target forms a process gas inlet, and a second opening of the curved surface discharge target forms a particle outlet; an air inlet pipe is arranged at the first opening of the curved surface discharge target, and an air inlet hole corresponding to the inner cavity of the target is arranged on the side wall of the air inlet pipe; the first curved surface discharge target and the second curved surface discharge target are connected with negative voltage, glow discharge can be generated, the glow discharge is influenced by the shape of the targets, and a hollow cathode discharge effect is generated by electron beam converging; two groups of screens which are spaced from each other are arranged at the outer end of the second opening, wherein the screen close to the second opening is an anode screen connected with positive voltage, and the other group of screens is a leading-out electrode screen connected with negative voltage;
the radian angle of the second opening is larger than that of the first opening;
the first magnetic shoe assembly and the second magnetic shoe assembly comprise a back plate and a plurality of magnets which are fixedly arranged on the back plate and are mutually distributed in sequence, the magnets adjacent to each other are oppositely arranged, the first magnetic shoe assembly and the second magnetic shoe assembly form a closed magnetic field at the first opening to inhibit particle overflow, and a divergent magnetic field is formed at the second opening to facilitate particle ionization overflow.
2. The dual-opening curved particle source of claim 1, wherein: the metal substrate tile of the target is one of titanium, chromium, tungsten, copper and aluminum or alloy thereof.
3. The utility model provides a central positive pole curved surface particle source, includes the particle source main part, this particle source main part is including magnetic shoe subassembly, insulating cover subassembly, target, electrode and water-cooled jacket, target heat conduction fixed connection in the water-cooled jacket inboard, its characterized in that: the target is a curved surface discharge target with one side opening, the inner cavity of the curved surface discharge target forms a gas ionization region, the opening of the curved surface discharge target forms an exit port of particles, the magnetic shoe component is arranged at the outer side of the water cooling jacket corresponding to the curved surface discharge target through the insulating jacket component,
the gas ionization area center of inside of curved surface target that discharges is provided with along the axial direction of curved surface target that discharges and is connected with positive voltage's central positive pole intake pipe, is provided with a plurality of ventholes on the lateral wall of this central positive pole intake pipe, and the both sides of this central positive pole intake pipe are connected with the radiating water-cooling seat of being used for central positive pole intake pipe, the outer end of the opening part of curved surface target that discharges be provided with and connect the extraction electrode screen cloth of negative voltage.
4. A central anode curved particle source according to claim 3, wherein: the magnetic shoe assembly comprises a back plate and a plurality of magnets which are fixedly arranged on the back plate and are mutually arranged in sequence, and magnetism between adjacent magnets is oppositely arranged, so that a closed magnetic field is formed between the adjacent magnets, the magnetism of the magnets close to two sides of the opening of the curved surface discharge target is the same, a divergent magnetic field is formed at the opening, and ionization and overflow of particles are facilitated.
5. A central anode curved particle source according to claim 3, wherein: the arc angle of the opening of the curved surface discharge target is 30-90 degrees.
6. The utility model provides a double screen cloth curved surface particle source, includes the carbon particle source main part, this carbon particle source main part is including magnetic shoe subassembly, insulating cover subassembly, target, electrode and water-cooled jacket, target heat conduction fixed connection in the water-cooled jacket inboard, its characterized in that: the target is a curved surface discharge target with one side opening, the inner cavity of the curved surface discharge target forms a gas ionization region, the opening of the curved surface discharge target forms an exit port of particles, the magnetic shoe component is arranged at the outer side of the water cooling jacket corresponding to the curved surface discharge target through the insulating jacket component,
the curved surface discharge target is characterized in that a central air inlet pipe is arranged in the center of an air ionization area inside the curved surface discharge target along the axial direction of the curved surface discharge target, a plurality of air inlet holes are formed in the side wall of the central air inlet pipe, water cooling seats for heat dissipation of the central air inlet pipe are connected to two sides of the central air inlet pipe, two groups of screens spaced from each other are arranged at the outer end of an opening of the curved surface discharge target, the screen close to the opening is an anode screen connected with positive voltage, and the other group of screens is a leading-out electrode screen connected with negative voltage.
7. A dual screen curved particle source as defined in claim 6, wherein: the magnetic shoe assembly comprises a back plate and a plurality of magnets which are fixedly arranged on the back plate and are mutually arranged in sequence, and magnetism between adjacent magnets is oppositely arranged, so that a closed magnetic field is formed between the adjacent magnets, the magnetism of the magnets close to two sides of the opening of the curved surface discharge target is the same, a divergent magnetic field is formed at the opening, and ionization and overflow of particles are facilitated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810159733.8A CN108342707B (en) | 2018-02-26 | 2018-02-26 | Curved surface particle source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810159733.8A CN108342707B (en) | 2018-02-26 | 2018-02-26 | Curved surface particle source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108342707A CN108342707A (en) | 2018-07-31 |
| CN108342707B true CN108342707B (en) | 2023-10-31 |
Family
ID=62959418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810159733.8A Active CN108342707B (en) | 2018-02-26 | 2018-02-26 | Curved surface particle source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108342707B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1397660A (en) * | 2002-04-16 | 2003-02-19 | 北京科技大学 | Non-magentic shielding type ferromagnetic target as sputter cathode |
| KR20050109766A (en) * | 2004-05-17 | 2005-11-22 | 세메스 주식회사 | Apparatus for depositing having curved surface target |
| CN102017076A (en) * | 2007-11-20 | 2011-04-13 | 摩赛科结晶公司 | Amorphous group III-V semiconductor material and preparation thereof |
| WO2015051277A2 (en) * | 2013-10-04 | 2015-04-09 | Intevac, Inc. | Method and apparatus to produce high density overcoats |
| CN208308951U (en) * | 2018-02-26 | 2019-01-01 | 温州职业技术学院 | A kind of surface particle source |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6835290B2 (en) * | 2002-02-13 | 2004-12-28 | Seagate Technology Llc | System and method for controlling thin film defects |
-
2018
- 2018-02-26 CN CN201810159733.8A patent/CN108342707B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1397660A (en) * | 2002-04-16 | 2003-02-19 | 北京科技大学 | Non-magentic shielding type ferromagnetic target as sputter cathode |
| KR20050109766A (en) * | 2004-05-17 | 2005-11-22 | 세메스 주식회사 | Apparatus for depositing having curved surface target |
| CN102017076A (en) * | 2007-11-20 | 2011-04-13 | 摩赛科结晶公司 | Amorphous group III-V semiconductor material and preparation thereof |
| WO2015051277A2 (en) * | 2013-10-04 | 2015-04-09 | Intevac, Inc. | Method and apparatus to produce high density overcoats |
| CN208308951U (en) * | 2018-02-26 | 2019-01-01 | 温州职业技术学院 | A kind of surface particle source |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108342707A (en) | 2018-07-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6350356B1 (en) | Linear magnetron arc evaporation or sputtering source | |
| CN108396295B (en) | Curved surface magnetron sputtering cathode, closed magnetic field coating magnetron sputtering equipment and application method thereof | |
| CN109778136B (en) | Method for preparing diamond-like coating by adopting thermionic plasma technology | |
| US4810347A (en) | Penning type cathode for sputter coating | |
| CN206956141U (en) | A kind of magnetron sputtering coater | |
| JPH0645872B2 (en) | Cathode type magnetron device | |
| CN111455336A (en) | Electromagnetic field enhanced magnetron sputtering device and method for preparing diamond-like carbon coating | |
| US3616452A (en) | Production of deposits by cathode sputtering | |
| CN107794496A (en) | Magnetic-controlled sputtering coating equipment and magnetron sputtering coating method | |
| US4620081A (en) | Self-contained hot-hollow cathode gun source assembly | |
| CN206494965U (en) | Multifunctional vacuum ion plating equipment | |
| CN114481025A (en) | ta-C deposition coating method | |
| EP2811509A1 (en) | Electronic configuration for magnetron sputter deposition systems | |
| CN108342707B (en) | Curved surface particle source | |
| JPH01168862A (en) | Apparatus and method for especially producing glass sheet for adhesion of membrane to transparent support | |
| CN211367703U (en) | Magnetron sputtering coating machine for depositing DLC film | |
| JP7038366B2 (en) | Single beam plasma source | |
| CN112210752A (en) | Magnetron sputtering technology for depositing DLC film and film coating machine | |
| CN208308951U (en) | A kind of surface particle source | |
| JPH0372067A (en) | Arc discharge type evaporator having a plurality of evaporating crucibles | |
| Goncharov et al. | Plasma devices based on the plasma lens—A review of results and applications | |
| CN115354289A (en) | Ion source auxiliary deposition system, deposition method and vacuum coating equipment | |
| CN110797242B (en) | Cold cathode electron gun device for coating film | |
| CN109686631B (en) | Array porous hollow cathode discharge electron source | |
| US6432286B1 (en) | Conical sputtering target |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |