CN108336909A - A kind of vacuum DC glow cleaning power supply - Google Patents
A kind of vacuum DC glow cleaning power supply Download PDFInfo
- Publication number
- CN108336909A CN108336909A CN201810089465.7A CN201810089465A CN108336909A CN 108336909 A CN108336909 A CN 108336909A CN 201810089465 A CN201810089465 A CN 201810089465A CN 108336909 A CN108336909 A CN 108336909A
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- Prior art keywords
- circuit
- electrically connected
- input terminal
- output end
- transformer
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
- H02M5/40—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc
- H02M5/42—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters
- H02M5/44—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac
- H02M5/453—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal
- H02M5/458—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
- H02M1/088—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters for the simultaneous control of series or parallel connected semiconductor devices
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Inverter Devices (AREA)
Abstract
The invention discloses a kind of vacuum DC glows to clean power supply, is related to power technique fields.Including rectification circuit, the first filter circuit, IGBT full bridge inverters, transformer, master control borad and the second filter circuit, to the supplying power for input end of rectification circuit, the input terminal of the output end of rectification circuit and the first filter circuit is electrically connected three-phase alternating current；The input terminal of master control borad and IGBT full bridge inverters is electrically connected；Master control borad includes sampling module, error amplifier, single chip machine controlling circuit and pwm control circuit.High Level AC Voltage is passed sequentially through rectification circuit, the first filter circuit, IGBT full bridge inverters, transformer and the second filter circuit by the present invention, and this process is controlled by master control borad, finally export the certain alternating current of stable frequency, the effective inner surface for having cleaned vacuum chamber, good Vacuumwall Conditioning is provided for Tokamak discharge, and improves the stability of Current Voltage and the working efficiency of power supply.
Description
Technical field
The invention belongs to power technique fields, and power supply is cleaned more particularly to a kind of vacuum DC glow.
Background technology
Plasma glow cleaning technique is the professional application of the plasma technique of rising in recent years, which realizes
Cleaning to impurity particle under vacuum environment in fixed container, cardinal principle are that placement two is parallel in closed container
Electrode plate, and inert gas is added, neutral atom or molecule are excited using the electronics of generation, and the particle being excited is by exciting
State can give off energy in the form of light when dropping back to ground state, and the plasma in closed container is realized to vacuum environment
Cleaning.
But aura cleaning power supply will appear in the process of work, not electric during the gas between substrate is ionized
From neutral atom and other impurities can then be deposited on substrate surface, influence the Tokamak discharge of power supply, and then influence electricity
The working efficiency in source, therefore a kind of vacuum DC glow cleaning power supply that requires study.
Invention content
The purpose of the present invention is to provide a kind of vacuum DC glows to clean power supply, and High Level AC Voltage is controlled by master control borad
The certain alternating current of stable frequency is exported after rectified filtering, full-bridge inverting and transformation, solves existing cleaning power supply because in
Property atomic deposition is unable to make the carry out Tokamak discharge of power efficient, in turn results in the low problem of power work efficiency.
In order to solve the above technical problems, the present invention is achieved by the following technical solutions：
The present invention is inverse for a kind of vacuum DC glow cleaning power supply, including rectification circuit, the first filter circuit, IGBT full-bridges
Become circuit, transformer, master control borad and the second filter circuit, three-phase alternating current is to the supplying power for input end of rectification circuit, the rectification
The input terminal of the output end of circuit and the first filter circuit is electrically connected, output end and the IGBT full-bridges of first filter circuit
The input terminal of inverter circuit is electrically connected, and the output end of the IGBT full bridge inverters and the input terminal of transformer electrically connect
It connects, the output end of the transformer is electrically connected with the input terminal of the second filter circuit and master control borad respectively；Second filtering
The output end of circuit carries out electricity output；The input terminal of the master control borad and IGBT full bridge inverters is electrically connected；The master
Control plate includes sampling module, error amplifier, single chip machine controlling circuit, pwm control circuit and HL402 driving circuits, described to adopt
The input terminal of egf block and the output end of transformer are electrically connected, the input of the output end and error amplifier of the sampling module
End is electrically connected, and the output end of the error amplifier and the input terminal of single chip machine controlling circuit are electrically connected, the microcontroller
The output end of control circuit and the input terminal of pwm control circuit are electrically connected, the output end and HL402 of the pwm control circuit
The input terminal of driving circuit is electrically connected, the input terminal of the output end and IGBT full bridge inverters of the HL402 driving circuits
It is electrically connected.
Further, the sampling module includes current detection circuit and voltage detecting circuit, the current detection circuit
Input terminal and voltage detecting circuit input terminal with the output end of transformer be electrically connected, the current detection circuit it is defeated
The output end of outlet and voltage detecting circuit is electrically connected with error amplifier respectively.
Further, the transformer uses three-phase transformer.
Further, the IGBT full bridge inverters use voltage source type inverter.
The invention has the advantages that：
1, the present invention by High Level AC Voltage by passing sequentially through rectification circuit, the first filter circuit, IGBT full-bridge inverting electricity
Road, transformer and the second filter circuit, and this process is controlled by master control borad, finally exports the certain alternating current of stable frequency,
Vacuum chamber internal surface hydrogen concentration and part carbon oxygen impurities are effectively reduced, the inner surface of vacuum chamber has been cleaned, is tokamak
Electric discharge provides good Vacuumwall Conditioning, improves the working efficiency of power supply.
2, master control borad of the present invention acquires output alternating current by sampling module, and by voltage and current and given Current Voltage
It is compared, and error signal is amplified through error amplifier, finally by single chip machine controlling circuit to pwm control circuit
Instruction is assigned, and then makes HL402 driving circuits driving IGBT full bridge inverters that phase shift occur, effectively reduces output exchange
The error of electricity, improves the stability of Current Voltage.
Certainly, it implements any of the products of the present invention and does not necessarily require achieving all the advantages described above at the same time.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, will be described below to embodiment required
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is the circuit block diagram that a kind of vacuum DC glow of the present invention cleans power supply.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained all other without creative efforts
Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1, the present invention be a kind of vacuum DC glow clean power supply, including rectification circuit, the first filter circuit,
IGBT full bridge inverters, transformer, master control borad and the second filter circuit,
Three-phase alternating current is to the supplying power for input end of rectification circuit, the input of the output end of rectification circuit and the first filter circuit
End is electrically connected, and the output end of the first filter circuit is electrically connected with the input terminal of IGBT full bridge inverters, and IGBT full-bridges are inverse
The input terminal of the output end and transformer that become circuit is electrically connected, the output end input with the second filter circuit respectively of transformer
End and master control borad are electrically connected, and alternating current is effectively converted to direct current by rectification circuit, and filters off electricity through the first filter circuit
Ripple in pressure effectively eliminates the AC portion in DC voltage so that output voltage ripple coefficient reduces, and IGBT is complete
Direct current effectively can be converted to alternating current by bridge inverter circuit, and stable certain frequency is obtained through the second filter circuit
Alternating current；
The output end of second filter circuit carries out electricity output；
The input terminal of master control borad and IGBT full bridge inverters is electrically connected, and master control borad is used to improve the stabilization of electric current output
Degree, and reduce the error of electric current output.
Master control borad includes sampling module, error amplifier, single chip machine controlling circuit, pwm control circuit and HL402 driving electricity
The output end of road, the input terminal of sampling module and transformer is electrically connected, the output end of sampling module and error amplifier it is defeated
Enter end to be electrically connected, the output end of error amplifier and the input terminal of single chip machine controlling circuit are electrically connected, microcontroller control electricity
The output end on road and the input terminal of pwm control circuit are electrically connected, output end and the HL402 driving circuits of pwm control circuit
Input terminal is electrically connected, and the output end of HL402 driving circuits is electrically connected with the input terminal of IGBT full bridge inverters, samples mould
Block is compared by electric current in Acquisition Circuit and voltage and with given value, and error amplification, monolithic are carried out through error amplifier
Machine control circuit assigns instruction to pwm control circuit, makes HL402 driving circuits driving IGBT full bridge inverters that phase shift occur,
Come reduce output alternating current error, improve the stability of Current Voltage.
Wherein, sampling module includes current detection circuit and voltage detecting circuit, the input terminal and electricity of current detection circuit
The input terminal of detection circuit is pressed to be electrically connected with the output end of transformer, output end and the voltage detecting electricity of current detection circuit
The output end on road is electrically connected with error amplifier respectively, and current detection circuit and voltage detecting circuit are used to detect the electricity exported
Stream and voltage.
Wherein, transformer uses three-phase transformer.
Wherein, IGBT full bridge inverters use voltage source type inverter.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one implementation of the present invention
In example or example.In the present specification, schematic expression of the above terms may not refer to the same embodiment or example.
Moreover, particular features, structures, materials, or characteristics described can be in any one or more of the embodiments or examples to close
Suitable mode combines.
Present invention disclosed above preferred embodiment is only intended to help to illustrate the present invention.There is no detailed for preferred embodiment
All details are described, are not limited the invention to the specific embodiments described.Obviously, according to the content of this specification,
It can make many modifications and variations.These embodiments are chosen and specifically described to this specification, is in order to preferably explain the present invention
Principle and practical application, to enable skilled artisan to be best understood by and utilize the present invention.The present invention is only
It is limited by claims and its full scope and equivalent.
Claims (4)
1. a kind of vacuum DC glow cleans power supply, it is characterised in that：Including rectification circuit, the first filter circuit, IGBT full-bridges
Inverter circuit, transformer, master control borad and the second filter circuit；
Three-phase alternating current is to the supplying power for input end of rectification circuit, the input of the output end of the rectification circuit and the first filter circuit
End is electrically connected, and the output end of first filter circuit is electrically connected with the input terminal of IGBT full bridge inverters, described
The input terminal of the output ends of IGBT full bridge inverters and transformer is electrically connected, and the output end of the transformer is respectively with second
The input terminal and master control borad of filter circuit are electrically connected；
The output end of second filter circuit carries out electricity output；
The input terminal of the master control borad and IGBT full bridge inverters is electrically connected；
The master control borad includes sampling module, error amplifier, single chip machine controlling circuit, pwm control circuit and HL402 driving electricity
Road, the input terminal of the sampling module and the output end of transformer are electrically connected, and output end and the error of the sampling module are put
The input terminal of big device is electrically connected, and the output end of the error amplifier and the input terminal of single chip machine controlling circuit are electrically connected,
The output end of the single chip machine controlling circuit and the input terminal of pwm control circuit are electrically connected, the output of the pwm control circuit
End and the input terminal of HL402 driving circuits are electrically connected, output end and the IGBT full bridge inverters of the HL402 driving circuits
Input terminal be electrically connected.
2. a kind of vacuum DC glow according to claim 1 cleans power supply, which is characterized in that the sampling module includes
Current detection circuit and voltage detecting circuit, the input terminal of the current detection circuit and the input terminal of voltage detecting circuit with
The output end of transformer is electrically connected, the output end of the current detection circuit and the output end of voltage detecting circuit respectively with accidentally
Poor amplifier is electrically connected.
3. a kind of vacuum DC glow according to claim 1 cleans power supply, which is characterized in that the transformer uses three
Phase transformer.
4. a kind of vacuum DC glow according to claim 1 cleans power supply, which is characterized in that the IGBT full-bridge invertings
Circuit uses voltage source type inverter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810089465.7A CN108336909A (en) | 2018-01-30 | 2018-01-30 | A kind of vacuum DC glow cleaning power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810089465.7A CN108336909A (en) | 2018-01-30 | 2018-01-30 | A kind of vacuum DC glow cleaning power supply |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108336909A true CN108336909A (en) | 2018-07-27 |
Family
ID=62926230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810089465.7A Pending CN108336909A (en) | 2018-01-30 | 2018-01-30 | A kind of vacuum DC glow cleaning power supply |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108336909A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101295922A (en) * | 2008-06-13 | 2008-10-29 | 北京中星微电子有限公司 | Soft starting device capable of implementing linear control |
| CN202019305U (en) * | 2011-03-07 | 2011-10-26 | 黄山市金屹电源制造有限公司 | High-frequency plasma load cleaning power supply device based on full bridge phase shift |
| CN206211865U (en) * | 2016-12-12 | 2017-05-31 | 成都金创立科技有限责任公司 | Dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas |
| CN107579662A (en) * | 2017-10-25 | 2018-01-12 | 吉林大学 | A kind of double-plasma ion source discharge power supply |
-
2018
- 2018-01-30 CN CN201810089465.7A patent/CN108336909A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101295922A (en) * | 2008-06-13 | 2008-10-29 | 北京中星微电子有限公司 | Soft starting device capable of implementing linear control |
| CN202019305U (en) * | 2011-03-07 | 2011-10-26 | 黄山市金屹电源制造有限公司 | High-frequency plasma load cleaning power supply device based on full bridge phase shift |
| CN206211865U (en) * | 2016-12-12 | 2017-05-31 | 成都金创立科技有限责任公司 | Dielectric barrier discharge plasma processes the high-power high voltage power supply of organic exhaust gas |
| CN107579662A (en) * | 2017-10-25 | 2018-01-12 | 吉林大学 | A kind of double-plasma ion source discharge power supply |
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Legal Events
| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20200622 Address after: 242700 room 108, building 4, 2nd Street, Huangshan West Road, Tunxi District, Huangshan City, Anhui Province Applicant after: Jin Guowei Address before: 230000 C-1, R & D building, KB4-4 block, high tech Zone, Hefei, Anhui, 802, 804, 807. Applicant before: ANHUI JINYI POWER TECHNOLOGY Co.,Ltd. |
|
| TA01 | Transfer of patent application right | ||
| CB02 | Change of applicant information |
Address after: 230000 C-1, R & D building, KB4-4 block, high tech Zone, Hefei, Anhui, 802, 804, 807. Applicant after: Jin Guowei Address before: 242700 room 108, building 4, 2nd Street, Huangshan West Road, Tunxi District, Huangshan City, Anhui Province Applicant before: Jin Guowei |
|
| CB02 | Change of applicant information | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180727 |
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| RJ01 | Rejection of invention patent application after publication |