CN108330453A - A kind of AlTiN/AlTiYN nanometer multilayers cutter coat and preparation method thereof - Google Patents
A kind of AlTiN/AlTiYN nanometer multilayers cutter coat and preparation method thereof Download PDFInfo
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- CN108330453A CN108330453A CN201810095030.3A CN201810095030A CN108330453A CN 108330453 A CN108330453 A CN 108330453A CN 201810095030 A CN201810095030 A CN 201810095030A CN 108330453 A CN108330453 A CN 108330453A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
Abstract
The invention belongs to cutting tool coating material technical field, a kind of AlTiN/AlTiYN nanometer multilayers cutter coat and preparation method thereof is disclosed.This method uses arc ion plating membrane technology, and the preparation of AlTiN/AlTiYN nano laminated coating cutters is realized by the rotation of sample pivoted frame and coating structure self assembly.When sample faces AlTi targets, one layer AlTiN layers of matrix deposition；When facing AlTiY targets, one layer AlTiYN layers are deposited；AlTiN layers and AlTiYN layers of alternating deposits formation AlTiN/AlTiYN nano laminated coatings.Coating composition is Al:20~32at.%, Ti:10~30at.%, Y:1~5at.%, N:45~57at.%.The thickness of AlTiN and AlTiYN modulating layers can be regulated and controled by adjusting pivoted frame revolution and autobiography speed.
Description
Technical field
The invention belongs to cutting tool coating material technical field, more particularly to a kind of AlTiN/AlTiYN nanometer multilayers cutter applies
Layer and preparation method thereof.
Background technology
The metal or nonmetallic compound that one or more layers hardness is high, wearability is good are coated on hard alloy cutter matrix
Film (such as TiC, TiAlN, Al203Deng) coated cutting tool, combine matrix high intensity, high tenacity and coating high rigidity, high abrasion
Property the advantages of, reduce the friction factor between cutter and workpiece, improve the toughness of the wearability of cutter without reducing matrix.
Therefore, cutting tool coated with hard alloy has high rigidity and excellent wearability, extends the working durability of cutter.TiN coating heatproofs
Limited, when carbide alloy coating cutter temperature in use is more than 500 DEG C, coating just starts to fail, and the heatproof of TiAlN is also 700
DEG C or so, the requirement of cutter at high speeds processing cannot be met.AlTiN is to apply the PVD cutters formed in Al element depositions to TiN
Layer.So far, by increase TiAlN, AlTiN coating in aluminium content, to enhance cutter coat high temperature resistance and
Hardness is always the important technical project of Tool Manufacturer and Coatings Corporation's concern.Since nineteen ninety-five, people are continuing always
Constantly study and improve relevant gas-phase deposition.By 2000, the ingredient of aluminium element and titanium elements ratio in AlTiN coatings
Example is increased to 3: 2 from original 1: 2, i.e. aluminium content increases to 60% from 33%.Its hardness can in terms of practical effect
Reach 36GPa, high-temperature oxidation resistant reaches 850 DEG C.But (when Tool in Cutting, local temperature is reachable with Modern High-Speed cutting requirement
1000 DEG C or so) it compares, AlTiN high-temperature oxidation resistances also need to improve.The synthesis of coating can be improved in the diversification of coating composition
Performance.Rare earth element y is to improve one of most effective element of coating high-temp inoxidizability, however when Y element is more than a certain amount of, is applied
Layer middle part facet core structure starts to change to close-packed hexagonal structure, causes coating hardness to decline, to make coated cutting tool that can not expire
The high rigidity requirement of sufficient high-speed cutting.
Using the method for forming multilayered structure, the original excellent combination mechanical property advantage of signal layer coating can made full use of
Under the conditions of, its hardness, toughness and high-temperature oxidation resistance are further increased, is the important of current raising cutter coat cutting ability
Technical measures.
Invention content
In order to overcome shortcoming and defect existing in the prior art, the primary purpose of the present invention is that providing a kind of AlTiN/
The preparation method of AlTiYN nanometer multilayer cutter coats；This method is prepared using traditional PVD technique (arc ion plating), is passed through
Nano-multilayered structures are realized in the rotation of sample pivoted frame；When sample faces AlTi targets, one layer AlTiN layers of matrix deposition；Face
When AlTiY targets, one layer AlTiYN layers are deposited；AlTiN layers more with AlTiYN layers of AlTiN/AlTiYN nanometers of alternating deposits formation
Layer coating, rotary speed speed determines the thickness of every layer of AlTiN layer and AlTiYN layers, solve the problems, such as be realization high rigidity,
High-wearing feature and the good effect of high-temperature oxidation resistance.
It is still another object of the present invention to provide a kind of AlTiN/AlTiYN nanometer multilayer knives that above-mentioned preparation method obtains
Has coating；The coating can realize the good effect of high rigidity, high-wearing feature and high-temperature oxidation resistance and the preparation technology of coating is simple,
Of low cost, adaptability is good, there is prodigious application potentiality.
The object of the invention is achieved through the following technical solutions：
A kind of preparation method of AlTiN/AlTiYN nanometer multilayers cutter coat, comprises the following specific steps that：
S1. tool matrix cleans：By tool matrix polishing treatment, then successively it is cleaned by ultrasonic 10 with acetone, alcohol~
20min, then be packed into vacuum chamber after being dried up with nitrogen；
S2.Ar and metal ion bombardment：It opens heater and is warming up to 300~500 DEG C, by vacuum chamber to vacuum degree
1.0~8.0 × 10-3Pa；The Ar gas of 200~300sccm is then passed to, work support -800~-1000V of bias is set, to chamber
Body carries out aura cleaning, 10~20min of bombardment time；Bias is down to -600~-800V again, lights AlTi targets, target current
60~150A bombards 3~15min of matrix with high energy AlTi metal cations, and activated metal matrix surface is closed with improving film-base junction
Power；
S3. depositing Al TiN transition zones：Sample adjustment is remained stationary as in front of AlTi targets, then bias is adjusted to -80~-
120V is passed through the N of 100~300sccm2Gas adjusts air pressure to 1.0~3.0Pa, deposits 5~30min, obtain AlTiN transition
Layer；
S4. nano laminated coating is deposited：It is passed through N2, adjust sample pivoted frame revolution speed, control pressure in 1.0~3.0Pa,
Light AlTi targets and AlTiY targets, 60~150A of target current, bias -60~-200V, AlTiN layers of alternating deposit and AlTiYN
Layer, 0.5~2h of sedimentation time obtain AlTiN/AlTiYN functional layers；
S5. arc power is closed, waits for that vacuum room temperature is down to room temperature, vacuum chamber is opened and takes out matrix, in matrix surface shape
At coating, as AlTiN/AlTiYN nanometer multilayers cutter coat.
Preferably, revolution speed described in step S4 is 1~5r/min.
Preferably, each element atomic percent of AlTi targets described in step S4 is Al：30~70at.%, Ti：20~
60at.%；The each element atomic percent of AlTiY targets is Al：30~70at.%, Ti：20~50at.%, Y：2~10at.%
Preferably, tool matrix described in step S1 is WC-Co hard alloy cutter.
A kind of AlTiN/AlTiYN nanometer multilayer cutter coats obtained by above-mentioned preparation method.
AlTiN/AlTiYN nanometer multilayer cutter coats include AlTiN transition zones and AlTiN/AlTiYN functional layers,
AlTiN/AlTiYN functional layers are that AlTiN and AlTiYN modulating layer alternating deposits form；The AlTiN/AlTiYN nanometer multilayers
The ingredient of cutter coat is Al:20~32at.%, Ti:10~30at.%, Y:1~5at.%, N:45~57at.%.
Preferably, the overall thickness of the AlTiN transition zones is 0.1~1 μm, the AlTiN/AlTiYN nanometer multilayers cutter
The overall thickness of coating is 2~10 μm.
Preferably, the thickness in monolayer of the AlTiN modulating layers is 2~20nm, the thickness in monolayer of the AlTiYN modulating layers
For 4~30nm.
The present invention has the following advantages and effects with respect to the prior art：
(1) present invention prepares AlTiN/AlTiYN nano laminated coating cutters using traditional PVD technique (arc ion plating),
Rare earth element y (yttrium) is introduced into coating, crystal grain thinning, while improving coating surface finish, delays the growth of oxide layer,
The adhesive force for improving oxide layer and matrix, to make coated cutting tool high-temperature oxidation resistance improve；And the nanometer in cutter coat
Multilayered structure occurs, and AlTiN nanometer layers form coherent boundary with AlTiYN nanometer layers, hinders the discrete square structure of AlTiYN coating portions
Change to close-packed hexagonal structure, the performance of AlTiN coating high rigidity is maintained, in addition, layer structure has interrupted coarse column crystal
The growth of grain makes crystal grain become smaller, while also having interrupted the continuity of hole, therefore coating has good corrosion resisting property.
(2) coated cutting tool of the present invention may be implemented to ensure while high-wearing feature, corrosion resistance and high-temperature oxidation resistance are good
The effect of high rigidity.
(3) production method of AlTiN/AlTiYN nano laminated coating cutters of the invention, using the conventional equal energy of equipment
It is enough to realize, have the advantages that simple for process, equipment requirement is low, operability is strong, adaptability is good and of low cost.
Description of the drawings
Fig. 1 is the schematic diagram that the present invention uses arc deposited device.
Fig. 2 is AlTiN/AlTiYN nanometer multilayer cutter coat SEM pictures prepared by embodiment 1.
Fig. 3 is for the structural schematic diagram of AlTiN/AlTiYN nanometer multilayer cutter coats.
Fig. 4 is the two-dimentional polishing scratch figure and wear rate figure of AlTiN single layers and AlTiN/AlTiYN nanometer multilayer cutter coats.
Fig. 5 is the SEM figures after AlTiN single layers and the oxidation of AlTiN/AlTiYN nanometer multilayer cutter coats.
Specific implementation method
With reference to embodiment, the present invention is described in further detail, and embodiments of the present invention are not limited thereto.
Embodiment 1
A kind of AlTiN/AlTiYN nanometer multilayers cutter coat, coating include that AlTiN transition zones and AlTiN/AlTiYN receive
Rice multiple function layers.Wherein, the thickness of AlTiN transition zones is 0.1 μm, the thickness of the AlTiN modulating layers in nanometer multilayer functional layer
Degree is 2nm, and the thickness of AlTiYN modulating layers is 4nm, and the atom percentage content of each element is in coating：Al:20at.%, Ti:
30at.%, Y:5at.%, N:45at.%.
By tool matrix polishing treatment, it is cleaned by ultrasonic 10min through acetone, alcohol, then vacuum chamber is packed into after being dried up with nitrogen
It is interior.It opens heater and is warming up to 300 DEG C, vacuum chamber to vacuum degree 1.0 × 10-3Pa or less.It is passed through the Ar of 300sccm
Work support bias -1000V is arranged in gas, and aura cleaning, bombardment time 10min are carried out to cavity.Bias is down to later-
600V lights AlTi targets, target current 150A, with high energy AlTi metal cations bombardment matrix 15min.Bias is adjusted to-
80V is passed through the N of 100sccm2Gas adjusts air pressure to 1.0Pa, deposits 5min, obtain AlTiN transition zones；Bias is adjusted to-
200V is passed through the N of 300sccm2Gas lights AlTi targets and AlTiY targets, target by adjusting throttle valve control air pressure in 3.0Pa
Electric current 60A, sedimentation time 0.5 hour, transfer rack revolution speed are 5r/min.After completing plated film, wait for that vacuum room temperature is down to
Room temperature opens vacuum chamber and takes out matrix, and what is formed on matrix is exactly AlTiN/AlTiYN nanometer multilayer cutter coats.
Fig. 1 is the schematic diagram that the present invention uses arc deposited device.Sample pivoted frame rotates during depositing coating, when
When sample faces AlTi targets, one layer AlTiN layers of matrix deposition；When facing column AlTiY targets, one layer AlTiYN layers are deposited；
AlTiN layers form AlTiN/AlTiYN nano laminated coatings with AlTiYN layers of alternating deposit, and rotary speed speed determines every layer
AlTiN layers and AlTiYN layers of thickness.
Fig. 2 is AlTiN/AlTiYN nanometer multilayer cutter coat SEM pictures；From figure 2 it can be seen that coating structure causes
Close, compared with column crystal, fine and close painting layer gap is narrower, and oxygen can effectively be delayed to be spread to coat inside tool matrix, improves
The antioxygenic property of coated cutting tool.
Coating testing result shows：Scarification detect binding force 80N or more, Nanoindentation detect hardness be 36GPa with
On；The coating high-temp oxidation onset temperature of the present invention makes up to 950 DEG C or so (using thermogravimetric analyzer), illustrates the knife of the present invention
Tool also has higher high temperature resistant property simultaneously.
Cutter life cutting test is carried out to the AlTiN/AlTiYN nano laminated coating cutters of the present invention：Machining condition：
4 sword of diameter 6mm slotting cutters, workpiece：K40 (92.5HRA) does milling, climb cutting, V=200m/min, feed speed 0.05mm/
Sec, radial cutting depth 0.1mm, axial cutting depth 2mm.Check the abrasion feelings of cutter flank after processing length reaches 50m
Condition.
Test result：The wear of the tool flank value of the AlTiN/AlTiYN nano laminated coating cutters of the present invention is 0.2mm.Phase
Than in existing, using TiN coating milling cutters, flank attrition value is VB=0.8mm；Compared to TiN/Al0.54Ti0.46N coatings
Milling cutter, wear of the tool flank value is VB=0.4mm, it is seen from the above data that the cutter of the present invention has higher wearability.
Embodiment 2
A kind of AlTiN/AlTiYN nano laminated coatings cutter, coating include that AlTiN transition zones and AlTiN/AlTiYN receive
Rice multiple function layers.Wherein, the thickness of AlTiN transition zones is 0.5 μm, the thickness of the AlTiN modulating layers in nanometer multilayer functional layer
Degree is 8nm, and the thickness of AlTiYN modulating layers is 14nm, and the atom percentage content of each element is in coating：Al:28at.%,
Ti:16at.%, Y:3at.%, N:53at.%.
By tool matrix polishing treatment, it is cleaned by ultrasonic 15min through acetone, alcohol, then vacuum chamber is packed into after being dried up with nitrogen
It is interior.It opens heater and is warming up to 350 DEG C, vacuum chamber to vacuum degree 5.0 × 10-3Pa or less.It is passed through the Ar of 250sccm
Work support bias -800V is arranged in gas, and aura cleaning, bombardment time 15min are carried out to cavity.Bias is down to later-
800V lights AlTi targets, target current 120A, with high energy AlTi metal cations bombardment matrix 3min.Bias is adjusted to-
100V is passed through the N of 200sccm2Gas adjusts air pressure to 2.0Pa, deposits 15min, obtain AlTiN transition zones；Bias is adjusted to-
150V is passed through the N of 300sccm2Gas, control pressure light AlTi targets and AlTiY targets in 1.5Pa, target current 80A, when deposition
Between 1 hour, transfer rack revolution speed be 2r/min.It after completing plated film, waits for that vacuum room temperature is down to room temperature, opens vacuum chamber and take
Go out matrix, what is formed on matrix is exactly AlTiN/AlTiYN nanometer multilayer cutter coats.
Coating testing result shows：Scarification detect binding force 80N or more, Nanoindentation detect hardness be 36GPa with
On；The coating high-temp oxidation onset temperature of the present invention makes up to 950 DEG C or so (using thermogravimetric analyzer), illustrates the knife of the present invention
Tool also has higher high temperature resistant property simultaneously.
Cutter life cutting test is carried out as described in Example 1, as a result shows the AlTiN/AlTiYN nanometers of the present invention
The wear of the tool flank value of laminated coating cutter is 0.18mm.
Embodiment 3
A kind of AlTiN/AlTiYN nano laminated coatings cutter, coating include that AlTiN transition zones and AlTiN/AlTiYN receive
Rice multiple function layers.Wherein, the thickness of AlTiN transition zones is 0.5 μm, the thickness of the AlTiN modulating layers in nanometer multilayer functional layer
Degree is 20nm, and the thickness of AlTiYN modulating layers is 30nm, and the atom percentage content of each element is in coating：Al:32at.%,
Ti:10at.%, Y:1at.%, N:57at.%.
By tool matrix polishing treatment, it is cleaned by ultrasonic 20min through acetone, alcohol, then vacuum chamber is packed into after being dried up with nitrogen
It is interior.It opens heater and is warming up to 500 DEG C, vacuum chamber to vacuum degree 8.0 × 10-3Pa or less.It is passed through the Ar of 200sccm
Work support -900~-1000V of bias is arranged in gas, and aura cleaning, bombardment time 20min are carried out to cavity.Bias is dropped later
To -800V, AlTi targets, target current 60A, with high energy AlTi metal cations ions bombardment matrix 15min are lighted.By bias tune
To -120V, it is passed through the N of 300sccm2Gas adjusts air pressure to 3.0Pa, deposits 30min, obtain AlTiN transition zones；It is passed through N2, control
Air pressure processed lights AlTi targets and AlTiY targets, target current 150A, bias -150V, sedimentation time 2 hours, transfer in 3.0Pa
Frame revolution speed is 5r/min.It after completing plated film, waits for that vacuum room temperature is down to room temperature, opens vacuum chamber and take out matrix, on matrix
What is formed is exactly AlTiN/AlTiYN nanometer multilayer cutter coats.
Coating testing result shows：Scarification detect binding force 80N or more, Nanoindentation detect hardness be 36GPa with
On；The coating high-temp oxidation onset temperature of the present invention makes up to 950 DEG C or so (using thermogravimetric analyzer), illustrates the knife of the present invention
Tool also has higher high temperature resistant property simultaneously.
Cutter life cutting test is carried out as described in Example 1, as a result shows the AlTiN/AlTiYN nanometers of the present invention
The wear of the tool flank value of laminated coating cutter is 0.15mm.
Fig. 3 is for the structural schematic diagram of AlTiN/AlTiYN nano laminated coating cutters.Sample during depositing coating
Product pivoted frame rotates, when sample faces AlTi targets, one layer AlTiN layers of matrix deposition；When facing AlTiY targets, one layer is deposited
AlTiYN layers；AlTiN layers form AlTiN/AlTiYN nano laminated coatings with AlTiYN layers of alternating deposit, and rotary speed speed is determined
The thickness of every layer of AlTiN layers and AlTiYN layers is determined.The coated cutting tool can realize high rigidity, high-wearing feature and high-temperature oxidation resistance
Good effect and simple for process, operability is strong, and controllability is good, of low cost, and adaptability is good, has preferable economic benefit.
Effect example：
AlTiN/AlTiYN nano laminated coatings cutter prepared by embodiment 2 and uncoated cutter, other commercially available paintings
Layer (AlTiN) cutter carries out the test comparisons such as hardness, wearability and high-temperature oxidation resistance.It is specific as follows：
(1) hardness analysis of coating
The hardness of coating is analyzed using Switzerland's (TTX-NHT2) nano-hardness tester.It takes at the 1/10 of film thickness as pressure
Enter depth, 10 different regions are chosen on institute's test sample, take its average value.It can obtain, AlTiN/AlTiYN prepared by embodiment 2
The hardness of nano laminated coating cutter is 37GPa, and the hardness of other commercially available coating (AlTiN) cutters is 32Gpa, therefore embodiment
Its hardness of AlTiN/AlTiYN nano laminated coatings cutter prepared by 2 embodiments 2 prepared is than other commercially available coatings (AlTiN)
The hardness of cutter is high.
(2) wearability test
High temperature friction experiment carries out on CSM HT-1000 type high temperature friction and wear testing machines, and Al is selected in experiment2O3Ball is (straight
Diameter is 6mm) it is secondary as friction, test condition is as follows：800 DEG C, load 2N, rotating speed 20cm/s of temperature, the number of turns 5000 are enclosed.High temperature rubs
It wipes after the test, sample polishing scratch is taken into the comparison degree of wear such as Fig. 4.As shown in Figure 4, AlTiN/AlTiYN nanometer multilayers apply
The wear rate of layer cutter is less than other commercially available coating (AlTiN) cutters, AlTiN/AlTiYN nano laminated coating cutter high temperature
Wearability significantly improves.
(3) high-temperature oxidation resistance is tested
Oxidation test carries out on tube furnace, and sample is put into tube furnace, and it is small to keep the temperature 2 in air at different temperatures
When.Experiment heating rate is set as 10 °/min, and rate of temperature fall is set as 8 °/min.After oxidation experiment, sample is taken away and is done
SEM is detected, the oxidated layer thickness after being aoxidized according to SEM map analysis samples, such as Fig. 5.Fig. 5 is AlTiN/ prepared by embodiment 2
SEM after AlTiYN nano laminated coatings cutter and other commercially available coating (AlTiN) cutters aoxidize at 900 DEG C schemes.From Fig. 5
In the oxide layers of AlTiN/AlTiYN nano laminated coating cutters prepared by embodiment 2 at 900 DEG C can be observed be less than other cities
Coating (AlTiN) cutter sold, AlTiN/AlTiYN nano laminated coating cutter high-temperature oxidation resistances significantly improve.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, it is other it is any without departing from the spirit and principles of the present invention made by changes, modifications, substitutions, combinations, simplifications,
Equivalent substitute mode is should be, is included within the scope of the present invention.
Claims (8)
1. a kind of preparation method of AlTiN/AlTiYN nanometer multilayers cutter coat, it is characterised in that comprise the following specific steps that：
S1. tool matrix cleans：By tool matrix polishing treatment, then successively it is cleaned by ultrasonic 10~20min with acetone, alcohol,
It is packed into vacuum chamber after being dried up again with nitrogen；
S2.Ar and metal ion bombardment：It opens heater and is warming up to 300~500 DEG C, by vacuum chamber to vacuum degree 1.0
~8.0 × 10-3Pa；The Ar gas of 200~300sccm is then passed to, work support -800~-1000V of bias is set, to cavity
Carry out aura cleaning, 10~20min of bombardment time；Bias is down to -600~-800V again, lights AlTi targets, target current 60
~150A bombards 3~15min of matrix with high energy AlTi metal cations, and activated metal matrix surface is closed with improving film-base junction
Power；
S3. depositing Al TiN transition zones：Sample adjustment is remained stationary as in front of AlTi targets, then bias is adjusted to -80~-120V,
It is passed through the N of 100~300sccm2Gas adjusts air pressure to 1.0~3.0Pa, deposits 5~30min, obtain AlTiN transition zones；
S4. nano laminated coating is deposited：It is passed through N2, sample pivoted frame revolution speed is adjusted, control pressure is lighted in 1.0~3.0Pa
AlTi targets and AlTiY targets, 60~150A of target current, bias -60~-200V, AlTiN layers and AlTiYN layers of alternating deposit sink
Product 0.5~2h of the time, obtain AlTiN/AlTiYN functional layers；
S5. arc power is closed, waits for that vacuum room temperature is down to room temperature, vacuum chamber is opened and takes out matrix, formed in matrix surface
Coating, as AlTiN/AlTiYN nanometer multilayers cutter coat.
2. preparation method according to claim 1, it is characterised in that：Revolution speed described in step S4 is 1~5r/min.
3. preparation method according to claim 1, it is characterised in that：The each element atom hundred of AlTi targets described in step S4
Divide than being Al：30~70at.%, Ti：20~60at.%；The each element atomic percent of AlTiY targets is Al：30~
70at.%, Ti：20~50at.%, Y：2~10at.%.
4. preparation method according to claim 1, it is characterised in that：Tool matrix described in step S1 is WC-Co hard
Alloy cutter.
5. a kind of AlTiN/AlTiYN nanometer multilayer cutters obtained by claim 1-4 any one of them preparation methods apply
Layer.
6. AlTiN/AlTiYN nanometer multilayers cutter coat according to claim 5, it is characterised in that：AlTiN/AlTiYN
Nanometer multilayer cutter coat includes AlTiN transition zones and AlTiN/AlTiYN functional layers, and AlTiN/AlTiYN functional layers are AlTiN
And AlTiYN modulating layer alternating deposits form；The ingredient of the AlTiN/AlTiYN nanometer multilayers cutter coat is Al:20~
32at.%, Ti:10~30at.%, Y:1~5at.%, N:45~57at.%.
7. AlTiN/AlTiYN nanometer multilayers cutter coat according to claim 6, it is characterised in that：The AlTiN mistakes
The overall thickness for crossing layer is 0.1~1 μm, and the overall thickness of the AlTiN/AlTiYN nanometer multilayers cutter coat is 2~10 μm.
8. AlTiN/AlTiYN nanometer multilayers cutter coat according to claim 6, it is characterised in that：The AlTiN tune
The thickness in monolayer of preparative layer is 2~20nm, and the thickness in monolayer of the AlTiYN modulating layers is 4~30nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810095030.3A CN108330453B (en) | 2018-01-31 | 2018-01-31 | AlTiN/AlTiYN nano multilayer cutter coating and preparation method thereof |
Applications Claiming Priority (1)
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