CN108265267A - A kind of linear evaporation source and evaporation coating device - Google Patents
A kind of linear evaporation source and evaporation coating device Download PDFInfo
- Publication number
- CN108265267A CN108265267A CN201810253706.7A CN201810253706A CN108265267A CN 108265267 A CN108265267 A CN 108265267A CN 201810253706 A CN201810253706 A CN 201810253706A CN 108265267 A CN108265267 A CN 108265267A
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- China
- Prior art keywords
- baffle
- crucible body
- crucible
- inner cavity
- connecting tube
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to field of organic electroluminescence, a kind of linear evaporation source and evaporation coating device are disclosed, in the linear evaporation source, including crucible assembly, crucible assembly includes the first crucible body and the second crucible body, and at least one connection component is equipped between the first crucible body and the second crucible body；Cover, cover are equipped with multiple nozzles, and nozzle includes at least one first jet and at least one second nozzle, first baffle component is equipped at first jet and second nozzle.In above-mentioned linear evaporation source, the discharge port of nozzle is sealed by first baffle component, the waste of evaporation material is avoided, meanwhile, connection component connects the inner cavity of the first crucible body with the inner cavity of the second crucible body, the evaporation material of gasification cures deposition in the inner cavity of the crucible body of non-heated state, the excessive generation security risk of pressure in crucible assembly is avoided, the collection to the evaporation material of gasification is realized, avoids the waste of evaporation material, production capacity is improved, has saved production cost.
Description
Technical field
The present invention relates to field of organic electroluminescence, more particularly to a kind of linear evaporation source and evaporation coating device.
Background technology
At present, in OLED producing lines, using linear evaporation source to substrate carry out vapor deposition form film layer during, work as generation
When abnormal conditions cannot be deposited, cool down to crucible to terminate to be deposited, but crucible temperature is higher, temperature fall time is longer, causes
It is still to be deposited in consumable material etc. in the chamber of linear evaporation source in crucible temperature-fall period, the waste of material is caused, is increased
Production cost is added.
Invention content
It, will by first baffle component in the linear evaporation source the present invention provides a kind of linear evaporation source and evaporation coating device
The discharge port sealing of nozzle, connection component connect the inner cavity of the first crucible body with the inner cavity of the second crucible body, gasification
Evaporation material cures deposition in the inner cavity of the crucible body of non-heated state, avoids the waste of evaporation material, improves production
Can, save production cost.
In order to achieve the above objectives, the present invention provides following technical scheme：
A kind of linear evaporation source, including：
Crucible assembly, the crucible assembly include the first crucible body and the second crucible body, first crucible body
At least one inner cavity for being used to control first crucible body and second crucible are equipped between second crucible body
The inner cavity connection of ontology or the connection component disconnected；
The cover being set at the top of the crucible assembly, the cover are equipped with multiple sprays for being used to spray evaporation material
Mouth, the nozzle include the first jet that connects of at least one inner cavity with first crucible body and it is at least one with it is described
The second nozzle of the inner cavity connection of second crucible body is equipped at the first jet and the second nozzle to prevent to steam
Plate the first baffle component of material injection.
In above-mentioned linear evaporation source, it is provided with the inner cavity of controllable first crucible body and connects with the inner cavity of the second crucible body
The connection component that on-off is opened and the first baffle component for the nozzle to be controlled to be in communication with the outside or disconnect, when this is linear
When evaporation source works, in the first crucible body and the second crucible body：One is in heated condition, another is in non-heated shape
State, such as low-temperature condition or normal temperature state, at this point, do not connected between the first crucible body and the second crucible body, when being abnormal
It is still to be deposited in consumable material etc. in the inner cavity of the crucible of heated condition since temperature fall time is long when situation cannot be deposited,
At this point, being sealed the discharge port of nozzle by first baffle component, evaporation material is avoided to spray and causes to waste into the external world, together
When, connection component connects the inner cavity of the first crucible body with the inner cavity of the second crucible body, waits the vapor deposition of gasification to be deposited
Material is flowed in the inner cavity of the crucible body of non-heated state, and is cured in the inner cavity of the crucible body in non-heated state and sunk
Product, avoids the excessive generation security risk of pressure in crucible assembly, while realize the collection to the evaporation material of gasification, avoids
The waste of evaporation material, improves production capacity, has saved production cost；
In addition, when during vapor deposition, in the crucible of heated condition during evaporation material deficiency, the crucible sheet of non-heated state
Body can be used as spare crucible, and the crucible body of non-heated state is heated, will cure the earthenware for being deposited on non-heated state
Evaporation material heating in crucible ontology, continues to be deposited to display base plate, to ensure being normally carried out, such as be deposited for vapor deposition
In the process, it when the evaporation material deficiency in the first crucible body, is heated to being used for the second spare crucible body, utilizes deposition
Evaporation material in the second crucible body continues to be deposited to display base plate, to ensure being normally carried out for vapor deposition.
Preferably, the connection component includes：
For the multiple connecting tubes for connecting the inner cavity of first crucible body with the inner cavity of second crucible body；
With the one-to-one second baffle component of the connecting tube, per a pair of mutual corresponding connecting tube and described the
In two baffle plate assemblies, when the second baffle component in the closure state, the connection duct occlusion is to disconnect first earthenware
The inner cavity of the inner cavity of crucible ontology and second crucible body, when the second baffle component in the open state, the company
Unlatching is taken over to connect the inner cavity of first crucible body and the inner cavity of second crucible body.
Preferably, in every a pair of mutual corresponding connecting tube and the second baffle component, the second baffle group
Part includes for the second baffle of the port sealing to the connecting tube and for driving the second of the second baffle movement to drive
Dynamic component.
Preferably, second driving part is solenoid valve.
Preferably, in every a pair of mutual corresponding connecting tube and the second baffle component, the second baffle group
Part includes being set to the first sub- baffle of described connecting tube one end and is set to the second sub- baffle of the connecting tube other end.
Preferably, in each described second baffle component has the first sub- baffle and the second sub- baffle, when described
When one sub- baffle and the second sub- baffle are in closed state, the first sub- baffle and the second sub- baffle carry opposite pole
The magnetism of property.
Preferably, in every a pair of mutual corresponding nozzle and the first baffle component, the first baffle component
The first driving including being used for the first baffle of the discharge port sealing to the nozzle and for driving the first baffle movement
Component.
Preferably, first driving part is solenoid valve.
Preferably, the connecting tube is made of Titanium, and the inner wall of the connecting tube is equipped with copper plate.
The present invention also provides a kind of evaporation coating device, including any one linear evaporation described in above-mentioned technical proposal
Source.
Description of the drawings
Fig. 1 is the structure diagram of linear evaporation source provided by the invention.
Icon：The first crucible bodies of 1-；The second crucible bodies of 2-；3- covers；4- first jets；5- second nozzles；6-
One baffle plate assembly；7- connection components；71- connecting tubes；72- second baffle components.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment shall fall within the protection scope of the present invention.
It please refers to Fig.1, linear evaporation source provided in an embodiment of the present invention, including：
Crucible assembly, crucible assembly include the first crucible body 1 and the second crucible body 2, the first crucible body 1 and second
Between crucible body 2 be equipped with it is at least one for control the first crucible body 1 inner cavity connected with the inner cavity of the second crucible body 2 or
The connection component 7 of disconnection；
The cover 3 being set at the top of crucible assembly, cover 3 are equipped with multiple nozzles for being used to spray evaporation material, nozzle
In the first jet 4 and at least one and the second crucible body 2 connected including at least one inner cavity with the first crucible body 1
The second nozzle 5 of chamber connection is equipped with the first baffle for evaporation material to be prevented to spray at first jet 4 and second nozzle 5
Component 6.
In above-mentioned linear evaporation source, it is provided with the inner cavity of controllable first crucible body 1 and the inner cavity of the second crucible body 2
Connection or the connection component 7 disconnected and the first baffle component 6 for nozzle to be controlled to be in communication with the outside or disconnect, when this is linear
When evaporation source works, in the first crucible body 1 and the second crucible body 2：One is in heated condition, another is in non-heated
State, such as low-temperature condition or normal temperature state at this point, not connected between the first crucible body 1 and the second crucible body 2, work as generation
When abnormal conditions cannot be deposited, since temperature fall time is long, still waited in the inner cavity of the crucible of heated condition in consumable material
Vapor deposition at this point, being sealed the discharge port of nozzle by first baffle component 6, avoids evaporation material from spraying and wave is caused into the external world
Take, meanwhile, connection component 7 connects the inner cavity of the first crucible body 1 with the inner cavity of the second crucible body 2, waits gas to be deposited
The evaporation material of change is flowed in the inner cavity of the crucible body of non-heated state, and the inner cavity of the crucible body in non-heated state
Middle curing deposition, avoids the excessive generation security risk of pressure in crucible assembly, while realize to the evaporation material of gasification
It collects, avoids the waste of evaporation material, improve production capacity, saved production cost；
In addition, when during vapor deposition, in the crucible of heated condition during evaporation material deficiency, the crucible sheet of non-heated state
Body can be used as spare crucible, the crucible body of non-heated state be heated, that is, curing is deposited on to the crucible sheet of non-heated state
Evaporation material heating in body, continues to be deposited to display base plate, to ensure being normally carried out for vapor deposition, such as in vapor deposition process
In, it when the evaporation material deficiency in the first crucible body, is heated to being used for spare the second crucible body, using being deposited on the
Evaporation material in two crucible bodies continues to be deposited to display base plate, to ensure being normally carried out for vapor deposition.
Specifically, crucible assembly is tightly connected with cover.
Above-mentioned cover is located at the top of crucible assembly, and the area of section of cover horizontal direction is more than crucible body level side
To area of section so that multiple nozzles can be set in cover, to improve efficiency that display base plate is deposited.
Specifically, cover is equipped with multiple first jets and multiple second nozzles, the quantitative range of first jet for 2-
10, the quantitative range of second nozzle is 2-10, in the present embodiment, it is preferable that first jet and second nozzle in cover
It is each provided with 9.
The respectively setting 9 of the quantity of above-mentioned first jet and second nozzle, when display base plate is deposited, keeps higher
Vapor deposition efficiency.
Specifically, connection component 7 includes：
For the multiple connecting tubes 71 for connecting the inner cavity of the first crucible body 1 with the inner cavity of the second crucible body 2；
With 71 one-to-one second baffle component 72 of connecting tube, every a pair of mutual corresponding connecting tube 71 and second baffle
In component 72, when second baffle component 72 in the closure state, connecting tube 71 close with disconnect the first crucible body 1 inner cavity
With the inner cavity of the second crucible body 2, when second baffle component 72 in the open state, connecting tube 71 opens to connect the first earthenware
The inner cavity of crucible ontology 1 and the inner cavity of the second crucible body 2.
In above-mentioned connection component 7, the evaporation material that multiple connecting tubes 71 improve gasification is set to enter non-heated state
Speed in crucible body, and then improve to the cured efficiency of evaporation material that gasifies；
In addition, second baffle component is arranged at the port of connecting tube, when the first crucible body and the second crucible body need
When connecting, second baffle component open, one end of connecting tube is made to be connect with the inner cavity of the first crucible body, connecting tube it is another
End is connect with the inner cavity of the second crucible body；When the connection that disconnection inner cavity is needed between the first crucible body and the second crucible body
When, two ports of connecting tube are sealed by second baffle component so that the first crucible body and connecting tube, the second crucible sheet
Body is disconnected with connecting tube.
Specifically, per in a pair of mutual corresponding connecting tube 71 and second baffle component 72, second baffle component 72 includes
The second driving part for the second baffle of the port sealing to connecting tube 71 and for second baffle to be driven to move.
In above-mentioned second baffle component 72, second baffle is driven to move by the second driving part, so as to fulfill passing through the
Sealing or opening of two baffles to connecting tube 71.
Specifically, the second driving part is solenoid valve.
Specifically, per in a pair of mutual corresponding connecting tube 71 and second baffle component 72, second baffle component 72 includes
It is set to the first sub- baffle of 71 one end of connecting tube and is set to the second sub- baffle of 71 other end of connecting tube.
In above-mentioned second baffle component 72, the first sub- baffle plate setting is connected with to control in one end of connecting tube 71
First solenoid valve of the first sub- baffle movement, the second sub- baffle plate setting and are connected with to control in the other end of connecting tube 71
The second solenoid valve of second sub- baffle movement, by the cooperation of the first sub- baffle and the second sub- baffle, realizes the first crucible body 1
With the second crucible body 2 connect and disconnection.
Specifically, in each second baffle component 72 has the first sub- baffle and the second sub- baffle, when the first son gear
When plate and the second sub- baffle are in closed state, the magnetism of the first sub- baffle and the second sub- baffle with opposite polarity.
In above-mentioned second baffle component 72, when the first sub- baffle and the second sub- baffle are closed, due to first
The magnetism of sub- baffle and the second sub- baffle belt opposite polarity, there are attractions between the first sub- baffle and the second sub- baffle, improve
First sub- baffle and the second sub- baffle are to the sealing effect of connecting tube 71.
Specifically, the area of the above-mentioned first sub- baffle and the second sub- baffle is more than the opening area of connection pipe port, to carry
High first sub- baffle and the second sub- baffle prevent the evaporation material of gasification during normal vapor deposition to the sealing effect of connecting tube
It flows in the crucible body of non-heated state, influences that efficiency is deposited.
Specifically, per in a pair of mutual corresponding nozzle and first baffle component 6, first baffle component 6 include for pair
The first baffle of the discharge port sealing of nozzle and the first driving part for first baffle to be driven to move.
In above-mentioned first baffle component 6, the driving first baffle movement of the first driving part realizes first baffle to nozzle
The sealing of discharge port and opening.
Specifically, the area of above-mentioned first baffle is more than the opening area of the discharge outlet of nozzle, to improve first baffle
To the sealing function of nozzle, when there are abnormal conditions during vapor deposition, nozzle is sealed, avoids the wave of evaporation material
Take.
Specifically, the first driving part is solenoid valve.
Specifically, connecting tube 71 is made of Titanium, and the inner wall of connecting tube 71 is equipped with copper plate.
The inner wall of above-mentioned connecting tube 71 uses copper plate, since copper has good heat conductivity, can effectively prevent being deposited
Material cures in connecting tube 71 causes connecting tube 71 to block, and improves stability and the safety of device.
Specifically, the area of section of above-mentioned connecting tube is rectangular, oval or round, due to perimeter of section it is equal when, circle
The area of tee section is maximum, it is preferable that and the area of section of connecting tube is circle, improves the through-rate of the evaporation material of gasification,
To improve the curing efficiency of gasification evaporation material.
The embodiment of the present invention additionally provides a kind of evaporation coating device, including any one linear evaporation in above-described embodiment
Source.
Obviously, those skilled in the art can carry out the embodiment of the present invention various modification and variations without departing from this hair
Bright spirit and scope.In this way, if these modifications and changes of the present invention belongs to the claims in the present invention and its equivalent technologies
Within the scope of, then the present invention is also intended to include these modifications and variations.
Claims (10)
1. a kind of linear evaporation source, which is characterized in that including：
Crucible assembly, the crucible assembly include the first crucible body and the second crucible body, first crucible body and institute
State be equipped between the second crucible body it is at least one for controlling the inner cavity of first crucible body and second crucible body
Inner cavity connection or disconnect connection component；
The cover being set at the top of the crucible assembly, the cover are equipped with multiple nozzles for being used to spray evaporation material, institute
It states nozzle and includes the first jet that connects of at least one inner cavity with first crucible body and at least one and described second
The second nozzle of the inner cavity connection of crucible body is equipped at the first jet and the second nozzle to prevent vapor deposition material
Expect the first baffle component of injection.
2. linear evaporation source according to claim 1, which is characterized in that the connection component includes：
For the multiple connecting tubes for connecting the inner cavity of first crucible body with the inner cavity of second crucible body；
With the one-to-one second baffle component of the connecting tube, the mutual corresponding connecting tube of every a pair and the second gear
In plate component, when the second baffle component in the closure state, the connection duct occlusion is to disconnect the first crucible sheet
The inner cavity of the inner cavity of body and second crucible body, when the second baffle component in the open state, the connecting tube
It opens to connect the inner cavity of first crucible body and the inner cavity of second crucible body.
3. linear evaporation source according to claim 2, which is characterized in that per a pair of mutual corresponding connecting tube and institute
It states in second baffle component, the second baffle component includes the second baffle and use for the port sealing to the connecting tube
In the second driving part for driving the second baffle movement.
4. linear evaporation source according to claim 3, which is characterized in that second driving part is solenoid valve.
5. linear evaporation source according to claim 2, which is characterized in that per a pair of mutual corresponding connecting tube and institute
It states in second baffle component, the second baffle component includes being set to the first sub- baffle of described connecting tube one end and be set to
Second sub- baffle of the connecting tube other end.
6. linear evaporation source according to claim 5, which is characterized in that each described second baffle component have
In one sub- baffle and the second sub- baffle, when the described first sub- baffle and the second sub- baffle are in closed state, described first
Sub- baffle and the second sub- baffle carry the magnetism of opposite polarity.
7. linear evaporation source according to claim 1, which is characterized in that per a pair of mutual corresponding nozzle and described
In first baffle component, the first baffle component includes the first baffle for being sealed to the discharge port of the nozzle and is used for
Drive the first driving part of the first baffle movement.
8. linear evaporation source according to claim 7, which is characterized in that first driving part is solenoid valve.
9. linear evaporation source according to claim 2, which is characterized in that the connecting tube is made of Titanium, the company
The inner wall taken over is equipped with copper plate.
10. a kind of evaporation coating device, which is characterized in that including such as claim 1-9 any one of them linear evaporation source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810253706.7A CN108265267B (en) | 2018-03-26 | 2018-03-26 | Linear evaporation source and evaporation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810253706.7A CN108265267B (en) | 2018-03-26 | 2018-03-26 | Linear evaporation source and evaporation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108265267A true CN108265267A (en) | 2018-07-10 |
| CN108265267B CN108265267B (en) | 2020-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810253706.7A Active CN108265267B (en) | 2018-03-26 | 2018-03-26 | Linear evaporation source and evaporation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108265267B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110846622A (en) * | 2019-11-11 | 2020-02-28 | 深圳市华星光电半导体显示技术有限公司 | Vapor deposition apparatus and control method thereof |
| WO2020047821A1 (en) * | 2018-09-07 | 2020-03-12 | 深圳大学 | Crucible apparatus and method for preparing aluminum nitride crystal |
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| DE10341914A1 (en) * | 2003-09-11 | 2005-04-14 | Forschungszentrum Karlsruhe Gmbh | Device for producing thin layers of coating components/elements, alloys or compounds on a substrate comprises a cylindrical pot, a cylindrical tube, a substrate heater, a lid, a radiation shield, and a source for the coating components |
| CN100385035C (en) * | 2002-06-07 | 2008-04-30 | 索尼株式会社 | Method for forming organic thin film |
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| CN103290365A (en) * | 2013-06-21 | 2013-09-11 | 苏州方昇光电装备技术有限公司 | A linear evaporation source |
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| EP1260605A1 (en) * | 2001-05-23 | 2002-11-27 | Junji Kido | Vapour deposition system and process |
| CN100385035C (en) * | 2002-06-07 | 2008-04-30 | 索尼株式会社 | Method for forming organic thin film |
| DE10341914A1 (en) * | 2003-09-11 | 2005-04-14 | Forschungszentrum Karlsruhe Gmbh | Device for producing thin layers of coating components/elements, alloys or compounds on a substrate comprises a cylindrical pot, a cylindrical tube, a substrate heater, a lid, a radiation shield, and a source for the coating components |
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| Publication number | Publication date |
|---|---|
| CN108265267B (en) | 2020-01-21 |
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