CN108257892A - The locking method of the door of vacuum chamber and vacuum chamber - Google Patents
The locking method of the door of vacuum chamber and vacuum chamber Download PDFInfo
- Publication number
- CN108257892A CN108257892A CN201711458470.2A CN201711458470A CN108257892A CN 108257892 A CN108257892 A CN 108257892A CN 201711458470 A CN201711458470 A CN 201711458470A CN 108257892 A CN108257892 A CN 108257892A
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- Prior art keywords
- door
- container
- vacuum chamber
- lid
- control device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67236—Apparatus for manufacturing or treating in a plurality of work-stations the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a kind of locking method of the door of vacuum chamber and vacuum chamber, further improves the safety in the operator of the internal work of the manufacturing device of FPD etc..Transfer chamber (10) includes container, top plate (13), exhaust apparatus (41), door (32), electromagnetic lock and control device (51).Container, which has, to be stored by the space of processing substrate, has upper opening on top.Top plate (13) is opened and closed upper opening.Exhaust apparatus (41) in container to being exhausted.Door (32) is arranged on the side of container, is opened when operator enters in container.(32) carry out lock and unlock to electromagnetic lock on the door.Control device (51) control electromagnetic lock, it is made to be opened using top plate (13) and hinders top plate (13) closing upper opening stop part be mounted on upper opening as condition by door (32) unlock.
Description
Technical field
Various aspects of the invention and embodiment are related to the locking method of the door of vacuum chamber and vacuum chamber.
Background technology
The known inside for making container is vacuum state, using processing gas imported in container etc., to being configured in container
Implemented by processing substrate as defined in processing manufacture the device of semiconductor devices.In addition, in recent years, in order to inhibit semiconductor device
The manufacture cost of part has the trend to be maximized by processing substrate.The manufacturing device of semiconductor devices is also large-scale as a result,
Change.
When the manufacturing device enlargement of semiconductor devices, in the case where carrying out the maintenance inside device, operate sometimes
Person, which enters in device, to be worked more efficiently.It is known in the case where operator enters in device and is worked, in order to ensure
The safety of operator when the oxygen concentration in portion is reached more than defined value in the device, will unlock for entering the door inside device
Technology.
Existing technical literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2009-194358 bulletins
Invention content
The technical problem that the invention wants to solve
In the manufacturing device of semiconductor devices, operator can enter inside device, still, operator's energy in work
It is enough to see that the situation in device is more from inlet port.Therefore, do not notice that operator stays in the device and the door quilt of inlet port
The situation of closing is less.But the device of manufacture flat-panel monitor (FPD) substrate etc., the device phase with manufacturing semiconductor devices
Than being large-scale.In addition, in recent years, the size of FPD also has the trend of enlargement, the manufacturing device of FPD also has enlargement
Trend.Accordingly, there exist the operators that the inside of the manufacturing device in FPD works to see in device from inlet port
Situation.Therefore, do not notice that operator stays in the device and the door of inlet port is closed sometimes.So the manufacture such as FPD fills
In the device for putting such large size, it is desirable that further Security Countermeasures.
One aspect of the present invention includes container, lid, exhaust apparatus, door, upper lock section and control device.Container has storage
By the space of processing substrate, there is opening portion on top.It covers to be opened and closed opening portion.Exhaust apparatus in container to being exhausted.
Door is arranged on the side of container, is opened when operator is entered in container.Upper lock section carries out lock and unlock on the door.Control dress
Put the upper lock section of control so that on this lock section using cover intervention component that is open and hindering lid closed peristome mounted on opening portion as
Condition is unlocked on the door.
Invention effect
Various aspects and embodiment according to the present invention, can further improve in the inside of the manufacturing device of FPD etc.
The safety of the operator to work.
Description of the drawings
Fig. 1 is the stereogram for an example for representing transfer chamber.
Fig. 2 is the exploded perspective view of an example of the transfer chamber for representing the state that top plate has opened.
Fig. 3 is the amplification sectional view for an example for representing to be installed with the flange near the position of stop part.
Fig. 4 is the amplification sectional view for representing to be mounted with an example of the flange of the state of stop part.
Fig. 5 is the enlarged drawing for an example for representing the babinet near door.
Fig. 6 is the figure for the detailed example for representing sticking department and protruding portion.
Fig. 7 is the figure for an example for representing the state that the bar of door is locked.
Fig. 8 is the sectional view for an example for representing the state that the bar of door is locked.
Fig. 9 is the figure for an example for representing the door towards the outside side of transfer chamber.
Figure 10 is the figure for an example for representing the door towards the inside side of transfer chamber.
Figure 11 is the exploded perspective view for an example for representing door.
Figure 12 is the flow chart of an example of the unlock processing for representing door when operator is entered in transfer chamber.
Figure 13 is the flow chart of an example of the locking treatment for representing door when operator exits out of transfer chamber.
Figure 14 is the figure of an example of the hardware for representing control device.
Reference numeral
10 transfer chambers
11 babinets
110 sticking departments
111 protruding portions
112 rollers
113 padlock hasps
12 side walls
120 sensors
121 sensors
122 electromagnetic locks
123 start to switch
124 Resetting Switchings
13 top plates
14 bottom plates
15 side walls
16 side walls
17 upper openings
18 side walls
20 conveyances are open
21 conveyances are open
22 flanges
220 recess portions
23 lower openings
24 exhaust outlets
30 sensors
31 maintenances are open
32
320 frame parts
321 lids
322 openings
323 fixed components
324 handles
325 recess portions
326 protrusions
327 holes
328 nuts
329 holes
33 stop parts
330 recess portions
34 bars
35 openings
40 pipings
41 exhaust apparatus
50 cables
51 control devices
510 CPU
511 RAM
512 ROM
513 auxilary units
514 communication I/F
515 input and output I/F
516 medium I/F
517 recording mediums
52 loudspeakers
53 light-emitting devices
60 sensors
61 actuators
62 locking plates.
Specific embodiment
Vacuum chamber disclosed by the invention includes container, the 1st lid, exhaust apparatus, door, upper lock section and control device.Container
With storing by the space of processing substrate, there is the 1st opening portion on top.1st lid is for the 1st opening portion of opening and closing.Exhaust apparatus
To being exhausted in container.Door is arranged on the side of container, is opened when operator is entered in container.Upper lock section on the door into
Row lock and unlock.The upper lock section of control device control so that lock section is opened with the 1st lid and the 1st lid closing the 1st is hindered to open on this
The intervention component of oral area has been mounted on the 1st opening portion and has been unlocked on the door for condition.
In addition, in an embodiment of vacuum chamber disclosed by the invention, door can be provided with 2 in the side of container
More than a.
In addition, opening and closing test section, standard-sized sheet test section and alarm portion can also be included in vacuum chamber disclosed by the invention.It opens
Close the opening and closing that test section detects each.Standard-sized sheet test section detects the full-gear of each.Alarm portion utilizes sound and light
At least any one sends out alarm.Control device controls alarm portion when detecting the opening of at least any by opening and closing test section
Alarm is sent out until detecting the full-gear of whole doors.
In addition, vacuum chamber disclosed by the invention, in one embodiment, the removal of forbidding intervening component is further included
Prohibition unit, for control device when the full-gear for detecting whole doors, control prohibition unit makes its removal for forbidding intervening component.
In addition, in an embodiment of vacuum chamber disclosed by the invention, control device is when whole doors is closed, control
Prohibition unit processed makes it release forbidding for the removal of intervention component.
In addition, in an embodiment of vacuum chamber disclosed by the invention, the upper lock section of control device control makes it to be situated between
Enter component to be closed and door is locked for condition from the removal of the 1st opening portion and the 1st lid.
In addition, in an embodiment of vacuum chamber disclosed by the invention, door includes：Frame portion with the 2nd opening portion
Part；The 2nd lid that 2nd opening portion of frame part is closed；With the fixed component that the 2nd lid is fixed on to frame part, fixed component exists
Door be closed in the state of by operator from the manual operation carried out in face of the inside side of container, by the 2nd cover relative to
The fixed of frame part releases.
In addition, in the locking method of the door of vacuum chamber disclosed by the invention, vacuum chamber includes：It is handled with storage
Substrate it is space, top have opening portion container；It is opened and closed the lid of opening portion；The exhaust being exhausted in container is filled
It puts；Be provided in the side of container 2 or more, enter for operator multiple doors in container；The door of vacuum chamber
Locking method includes：With the open opening portion of lid, and the intervention component of lid closed peristome is hindered to be mounted on opening portion as item
Part, unlock each the step of；When having opened at least any, using sound and light at least any one send out alarm until
Whole doors becomes the step of full-gear；When whole doors becomes full-gear, control forbids intervening the removal of component
Prohibition unit is come the step of forbidding intervening the removal of component；When whole doors is turned off, control prohibition unit releases intervention component
The step of forbidding of removal；The step of door is locked for condition is closed with being removed and covering to intervene component from opening portion.
Hereinafter, the embodiment party based on the locking method of the door of vacuum chamber and vacuum chamber disclosed in attached drawing detailed description
Formula.In addition, the locking method of the door of vacuum chamber disclosed in the present application and vacuum chamber is not limited by following present embodiment.
[composition of transfer chamber 10]
Fig. 1 is the stereogram for an example for representing transfer chamber 10.Fig. 2 is the conveyance chamber for representing the state that top plate opens
The exploded perspective view of one example of room 10.Transfer chamber 10 in present embodiment is for example in the vacuum processing system of multi-chamber type
It is used in system, the vacuum flush system of above-mentioned multi-chamber type is used for being lost as by the FPD of processing substrate with glass substrate
The processing at quarter etc..Transfer chamber 10 is an example of vacuum chamber.As FPD for example including liquid crystal display (LCD), shine
Diode (LED) display, electroluminescent (Electro Luminescence；EL) display, vacuum fluorescence announcer
(Vacuum Fluorescent Display；VFD), plasm display panel (PDP) etc..
Transfer chamber 10 in present embodiment, such as depicted in figs. 1 and 2, including：Have to transport quilt in inside
Handle the babinet 11 in the conveyance space of substrate；With can freely install or remove the upper opening 17 with the top of babinet 11 connects
The top plate 13 of conjunction.Top plate 13 is an example of the first lid.In addition, mechanical arm (Robot arm) etc. is provided in babinet 11
Carrying device.
Babinet 11 is formed such as the metal aluminium, stainless steel, steel material.Babinet 11 includes：Form transfer chamber 10
Bottom bottom plate 14；A pair of sidewalls 15a and 15b being vertically formed with bottom plate 14；Be vertically formed with bottom plate 14 one
To side wall 16a and 16b.
Conveyance opening 20a is formed in side wall 16a.It is untreated to be located in side wall 16a such as load lock chamber interfaces
Reason substrate is moved to from load locking room in transfer chamber 10 via conveyance with opening 20a, is handed off to and is arranged in babinet 11
Carrying device.It is moved out in addition, treated by processing substrate by carrying device from transfer chamber 10 is interior through conveyance with opening 20a
To load locking room.
In addition, it is formed with conveyance opening 20b in the side wall 16b of babinet 11 and side wall 16a opposite sides.In side wall
16b such as joining process chambers, from load locking room move in it is untreated by processing substrate by carrying device through conveyance with opening
Mouth 20b is moved in processing chamber housing, by processing chamber housing to by the defined processing of processing substrate implementation etching etc..In addition,
Being moved out by processing substrate by carrying device through conveyance with opening 20b to transfer chamber 10 for processing has been carried out in processing chamber housing
It is interior.
Near the upper end of babinet 11, such as shown in Fig. 2, it is provided with the flange 22 of babinet 11.Top plate 13 is by babinet 11
Upper opening 17 close when, by 22 top support plate 13 of flange.Furthermore it is preferred that o-ring is configured between flange 22 and top plate 13
Deng seal member.Thereby, it is possible to improve the air-tightness in transfer chamber 10.Flange 22 is provided with detection 17 quilt of upper opening
The sensor 30 that top plate 13 is closed.In present embodiment, sensor 30 is, for example, non-contacting Proximity Sensor
(Proximity sensor, proximity sensor).In addition, sensor 30 can also use contact sensor.Based on sensor 30
Testing result be output to aftermentioned control device 51.
It is formed with to set the lower openings 23 of carrying device and exhaust outlet 24 in the bottom plate 14 of babinet 11.In exhaust outlet
24 connect exhaust apparatus 41 through piping 40.Conveyance space in transfer chamber 10 can be decompressed to by regulation by exhaust apparatus 41
Vacuum degree.
In addition, it is respectively formed with conveyance opening 21 in the side wall 15a and 15b of babinet 11.Babinet 11 side wall 15a and
The respective faces of 15b such as joining process chamber.Also, from load locking room move in it is untreated by processing substrate by conveyance fill
It puts and is moved in processing chamber housing via conveyance opening 21, by processing chamber housing to being implemented as defined in etching etc. by processing substrate
Processing.In addition, be carried out in processing chamber housing processing by processing substrate, be open and 21 moved out via conveyance by carrying device
Into transfer chamber 10.
In addition, the side wall 12 at the two of babinet 11 be provided with maintenance opening 31, the maintenance be open 31 be in order into
Maintenance in row transfer chamber 10 etc. and be used for the opening that operator enters in transfer chamber 10.It is provided in maintenance opening 31
For opening and closing the door 32 safeguarded with opening 31.Maintenance opening 31 is closed using door 32, thus quilt in transfer chamber 10
It remains airtight.In addition, in the present embodiment, maintenance opening 31 and door 32 are arranged on each side wall 12 of babinet 11, but
It is that, as other modes, maintenance opening 31 and door 32 can also be arranged on other side walls of babinet 11.
In the case where operator enters in transfer chamber 10, in order to be taken into outer gas, such as shown in Fig. 2, utilize lifting
Machine etc. slings top plate 13 upward, and the upper opening 17 of babinet 11 is opened.Also, babinet 11 upper opening 17 it is convex
Edge 22 installs stop part 33.By installing stop part 33 in flange 22, even if top plate 13 mistakenly covers the feelings to upper opening 17
Under condition, gap is also formed between babinet 11 and top plate 13.Thereby, it is possible to prevent stopping up for the operator in transfer chamber 10
Breath.In addition, be installed with stop part 33 to conclusively show, preferably the obvious color or style of surface fluorescent color etc. be
Color has a degree of size.Stop part 33 is an example for intervening component.
Fig. 3 be represent for stop part 33 is installed position near flange 22 an example amplification sectional view.Fig. 4
Expression is mounted with the amplification sectional view of an example of the flange 22 of the state of stop part 33.Such as shown in figure 3, in flange 22
It is formed with the recess portion 220 for installing stop part 33.In the bottom of recess portion 220, be provided in recess portion 220 for detecting whether
It is mounted with the sensor 60 of stop part 33.In addition, the side wall in recess portion 220 is provided with actuator 61, by making locking plate 62
It is mobile, the stop part 33 in recess portion 220 is locked.
The recess portion 330 for receiving locking plate 62 is formed in the side of stop part 33.For example, as shown in figure 4, in recess portion
In the case that stop part 33 is installed in 220, is detected by sensor 60 and be mounted with stop part 33.The detection knot of sensor 60
Fruit is output to aftermentioned control device 51.Also, actuator 61 makes locking plate 62 be moved to stop part 33.As a result, for example such as
Shown in Fig. 4, locking plate 62 is inserted into the recess portion 330 of stop part 33, to forbid the removal of stop part 33.Based on actuator 61
The movement of the locking plate 62 of progress is controlled by aftermentioned control device 51.Actuator 61 and locking plate 62 are one of prohibition unit
Example.
In addition, in present embodiment, such as shown in Fig. 2, side wall 12 at the two of the babinet 11 of transfer chamber 10, respectively
There are one doors 32 for setting.As described above, by setting multiple doors 32 in transfer chamber 10, even if can not be opened in a door 32
In the case of, the operator in transfer chamber 10 will not be held in transfer chamber 10, can easily be escaped from other doors 32
It is de-.
In addition, in the present embodiment, in the setting of transfer chamber 10 there are two door 32, door 32 can also set three with
On.In addition, each door 32 is preferably provided at the position for being arranged distant from other doors 32 as possible, such as it is arranged on transfer chamber 10
Side wall in opposite side wall.Even if the operator in transfer chamber 10 is difficult to go under a 32 Zhuan Condition of door as a result,
It can easily and rapidly be escaped to the outside of transfer chamber 10 from other doors 32.
Fig. 5 is the enlarged drawing for an example for representing the babinet 11 near door 32.In door 32 and the babinet for being provided with door 32
11 side wall 12, be provided with for detect door 32 opening and closing sensor 120 and 121.Detection based on sensor 120 and 121
As a result it is output to aftermentioned control device 51.Sensor 120 and 121 is an example for being opened and closed test section.In addition, setting
There is the side wall 12 of the babinet 11 of door 32, be provided with and start switch 123 and Resetting Switching 124.Start switch 123 and Resetting Switching
124 act on is explained later.In addition, in the present embodiment, start switch 123 and Resetting Switching 124 is arranged on babinet 11
Side wall 12, as other modes, another side wall of babinet 11 can be arranged on by starting switch 123 and Resetting Switching 124.
In addition, in the side wall 12 for the babinet 11 for being provided with door 32, it is provided with the electricity for carrying out lock and unlock on the door 32
Magnetic padlock 122.It is controlled in the lock and unlock of the door 32 carried out based on electromagnetic lock 122 by aftermentioned control device 51.Electromagnetic lock 122
It is an example of upper lock section.
The bar 34 operated when door 32 is provided with operator's shutter door 32.Opening 35 is formed in bar 34.In electromagnetic lock 122
During as unlocked state, operator makes bar 34 be rotated up in the side of the arrow A of Fig. 5, and door 32 is opened in the direction of arrowb.
The side wall 18 of babinet 11 near door 32 is provided with sticking department 110 and protruding portion 111.
Fig. 6 is the figure of an example of the details for representing sticking department 110 and protruding portion 111.Sticking department 110 has can be with
The mode movement mutually left and two rollers 112a and 112b being exerted a force on the direction to contact with each other by spring etc..
Door 32 is opened, and the bar 34 of door 32 is packed between roller 112a and 112b, and roller 112a and 112b are moved in a manner of mutually leaving as a result,
It is dynamic.
Also, the bar 34 of door 32 is packed between roller 112a and 112b, and thus bar 34 reaches roller 112a and 112b and babinet
Between 11 side wall 18.At this point, the protruding portion 111 for being arranged on the side wall 18 of babinet 11 penetrates through the opening 35 of bar 34.Also, such as
As shown in fig. 7, by the active force of spring etc., roller 112a and 112b are in contact with each other again.Bar 34 is locked as a result, maintains door
32 full-gear.Sensor (not shown) is provided in sticking department 110, is capable of the lock-out state of detection bar 34.Based on lock
Determine the testing result that the sensor in portion 110 obtains and be output to aftermentioned control device 51.Sensor in sticking department 110 is
One example of standard-sized sheet test section.In addition, by stayed pole 34 or door 32 with the side wall 18 away from babinet 11, it can be easy
Ground releases the lock-out state of the bar 34 based on sticking department 110.
Such as shown in figure 8, it is formed with opening in protruding portion 111.In a state that by sticking department 110, bar 34 is locked,
Padlock hasp (Padlock Hasp) 113 is installed in the opening of protruding portion 111.It is hung in padlock hasp 113 with transporting chamber
The corresponding padlock of key of each Self managements such as the operator, the overseer of monitor operation person that work in room 10.Thereby, it is possible to
Prevent the full-gear of door 32 from unintentionally being released.
[construction of door 32]
Then, illustrate the construction of door 32.Fig. 9 is an example for representing the door 32 in face of the outside side of transfer chamber 10
Figure.Figure 10 is the figure for an example for representing the door 32 in face of the inside side of transfer chamber 10.Figure 11 represents door 32
The exploded perspective view of one example.
Door 32 has frame part 320, lid 321 and fixed component 323.Opening 322 is formed in frame part 320.Lid 321
Area is bigger than the area of opening 322.Lid 321 is an example of the 2nd lid.It is used in addition, being formed in the side of frame part 320
Receive the recess portion 325 of the electromagnetic lock 122.
Such as it as shown in figure 11, is provided in lid 321 and forms threaded protrusion 326 in substantial middle.Protrusion 326 via
Opening 322 is formed through the hole in the hole of the substantial middle of fixed component 323 327 and the substantial middle for being formed in handle 324
329.Also, nut 328 is installed in the protrusion 326 for having penetrated through handle 324.Lid 321 is fixed by fixed component 323 as a result,
In frame part 320, such as form Fig. 9 and door shown in Fig. 10 32.Furthermore it is preferred that O is configured between frame part 320 and lid 321
The seal member of type ring etc..Thereby, it is possible to improve the air-tightness between frame part 320 and lid 321.
In door 32, when making the rotation of handle 324, nut 328 comes off, and releases by fixed component 3 to lid 321 and frame part
320 fixation.Thereby, it is possible to detach lid 321 and fixed component 323, from the gap Jiang Gai of frame part 320 and fixed component 323
321 press to the external of transfer chamber 10, and protrusion 326 is detached from from the hole of fixed component 323 327, and lid 321 is de- from frame part 320
It falls.The opening 322 of frame part 320 opens as a result,.
In a state that door 32 is closed, handle 324 is located at the inside of transfer chamber 10.Even if handle 324 does not use work
The hand of tool employment also can easily rotate.Handle 324 is rotated from the inside of transfer chamber 10, thus the behaviour in transfer chamber 10
Author can pass through door 32 without opening door 32.Therefore, even if the operator in transfer chamber 10 is closed for some reason
In the case of entering in transfer chamber 10, the operator in transfer chamber 10 also can easily escape out of transfer chamber 10.
Fig. 1 is returned to continue to explain.Transfer chamber 10 is connect via cable 50 with control device 51.Control device 51 is via electricity
Cable 50 receives the signal from the various sensors for being arranged on transfer chamber 10, and is controlled in transfer chamber 10 via cable 50
Each portion.
In addition, control device 51 is connected with loudspeaker 52 and light-emitting device 53.Control device 51 is for example opened in any door 32
When putting, alarm is sent out by the sound from loudspeaker 52 or come the light of selfluminous device 53 or the two, until complete
The door 32 in portion becomes full-gear or the door 32 of whole is closed.Whether door 32 is opened, according to from being arranged on each door 32
The testing result that sensor 120 and 121 exports judges.In addition, whether door 32 is full-gear, according to being arranged on each door 32
Near sticking department 110 whether lock the bar 34 of door 32 to judge.The sound sent out from loudspeaker 52 be buzzer, melody,
Sound to call attention to etc..In addition, the volume of sound sent out from loudspeaker 52 is for example preferably in more than 80dB.In addition, it shines
Switching of glittering, different colours light that device 53 passes through light etc. sends out alarm.Loudspeaker 52 and light-emitting device 53 are alarm portions
An example.
[action of transfer chamber 10]
Figure 12 is the flow chart of an example of the unlock processing for representing the door 32 when operator enters in transfer chamber 10.
Each processing shown in Figure 12 is mainly carried out by control device 51.In addition, before operator is entered in transfer chamber 10, lead to
Cross the manual operation of operator, controlled the cut-out to the tie breaker of the power supply of carrying device and to conveyance chamber
Closing of the valve of supply gas etc. in room 10.Also, operator, which presses to be arranged near door 32, starts switch 123.It controls as a result,
Device 51 processed starts the action shown in Figure 12 and aftermentioned Figure 13.
First, control device 51 monitors that judgement starts whether switch 123 is pressed from 123 signals that send out of switch are started
(S100).(the S100 in the case where starting switch 123 and being pressed：It is), control device 51 performs the stopping control of energy resource supply
(S101).In step S101, the cut-out to the power supply of carrying device is carried out and to transfer chamber by control device 51
Closing of the solenoid valve of supply gas etc. in 10.Above-mentioned processing can be carried out by the manual operation of operator, still, in step
In rapid S101, can also closing to the power supply of carrying device and air supply valve etc. be carried out by electric control again.By
This, can reliably perform closing to the power supply of carrying device and air supply valve etc..
Then, control device 51 judges whether upper opening 17 is opened based on the testing result exported from sensor 30
(S102).It is sling upward by crane etc. in top plate 13, when upper opening 17 is opened, sensor 30 detects upper opening
17 opening.(the S102 in the case where being judged as that upper opening 17 is opened：It is), control device 51 is based on defeated from sensor 60
The testing result gone out judges whether be mounted with stop part 33 (S103) in upper opening 17.When stop part 33 is inserted into flange
When in 22 recess portion 220, detect that stop part 33 has been mounted to upper opening 17 by sensor 60.
(the S103 in the case where stop part 33 has been installed in upper opening 17：It is), control device 51 controls each door 32
Electromagnetic lock 122, whole doors 32 is unlocked (S104).As described above, it is opened with upper opening 17 and pacified in upper opening 17
Stop part 33 is filled with as condition, door 32 is unlocked, thereby, it is possible to prevent from remaining in transfer chamber 10 it is airtight in the state of,
Operator is entered in transfer chamber 10.
Then, control device 51 performs the stopping control (S105) of energy resource supply again.In step S105, pass through control
Device 51 carry out again the cut-out to the power supply of carrying device and into transfer chamber 10 solenoid valve of supply gas pass
It closes.Closing of power supply and air supply valve to carrying device etc. is being manually operated and is being held in step S101
Row, still, in order to ensure the reliability of the stopping of energy resource supply, is held again in step S105 also by control device 51
Row.
Then, control device 51 is sentenced with reference to the testing result exported from the sensor 120 and 121 for being arranged on each door 32
Whether any door 32 that breaks has been opened (S106).(the S106 in the case where any door 32 has opened：It is), control device 51 controls
The actuator 61 of flange 22 is arranged on, stop part 33 is made to lock (S107) by locking plate 62.Thereby, it is possible to prevent in operator
After being entered in transfer chamber 10 via open door 32, stop part 33 is removed from flange 22.
Then, control device 51 by the sound from loudspeaker 52, come the light of selfluminous device 53 or both,
Start to alarm (S108).Then, control device 51 is based on the detection exported from the sticking department 110 being arranged near each door 32
As a result, judge whether whole doors 32 is full-gear (S109).When exist without become full-gear door 32 when (S109：
It is no), control device 51 continues to alarm.
On the other hand, (the S109 when whole doors 32 becomes full-gear：It is), 51 stop alarm of control device
(S110).Also, operator installs padlock hasp 113 in the protruding portion 111 of the opening of recess portion 330 that perforation has been locked.And
And padlock is installed on padlock hasp 113 respectively with the related related personnel that works.Then, operator enters conveyance chamber
It starts to work in room 10.
Figure 13 is the flow of an example of the locking treatment for representing the door 32 when operator exits out of transfer chamber 10
Figure.Each processing shown in Figure 13 is mainly carried out by control device 51.In addition, before door 32 is locked, the related personnel of work
The padlock for being respectively mounted on padlock hasp 113 is removed, padlock hasp 113 is removed from protruding portion 111.Also, the recess portion 330 of door 32
It is removed, door 32 can be closed from sticking department 110.
First, control device 51 is sentenced based on the testing result exported from the sticking department 110 being arranged near each door 32
Whether the full-gear of disconnected any door 32 has been released from (S200).(the S200 when the full-gear of any door 32 has been released from：
Be), control device 51 by the sound from loudspeaker 52, come the light of selfluminous device 53 or both, start to alarm
(S201).Other operators in transfer chamber 10 are rested on as a result, are able to know that door 32 will be closed.
Also, control device 51 is sentenced with reference to the testing result exported from the sensor 120 and 121 for being arranged on each door 32
Whether whole door 32 that breaks is turned off (S202).In the 32 pent (S202 of door being not all of：It is no), control device
51 continue to alarm.
In whole doors 32 pent (S202：It is), 51 stop alarm of control device (S203).Also,
Control device 51 controls the actuator 61 for being arranged on flange 22, the latch-release of stop part 33 that will be carried out based on locking plate 62
(S204).Thereby, it is possible to remove stop part 33 from upper opening 17.Operator removes stop part 33 from upper opening 17.
Then, whether control device 51 is based on the testing result exported from sensor 60, judge stop part 33 by from upper
Portion's opening 17 removes (S205).(the S205 when stop part 33 is removed from upper opening 17：Be), control device 51 be based on from
The testing result that sensor 30 exports, judges whether upper opening 17 closes (S206).In the situation that stop part 33 has been removed
Under, object is not hindered in upper opening 17, so, top plate 13 can close upper opening 17.Top plate 13 is by loads such as cranes
It puts on upper opening 17 so that upper opening 17 is closed, is closed by sensor 30 to detect upper opening 17.
It is being judged as the pent (S206 of upper opening 17：It is), control device 51 controls the electricity of each door 32
Magnetic padlock 122 locks whole doors 32 (S207).As a result, in a state that upper opening 17 is turned off, operator can be prevented
Into in transfer chamber 10.
Then, operator presses the Resetting Switching 124 being arranged near door 32.Control device 51 is monitored from Resetting Switching
The signal of 124 outputs, judges whether Resetting Switching 124 is pressed (S208).(the S208 when Resetting Switching 124 has been pressed：
It is), control device 51 performs the releasing (S209) that energy resource supply stops control.In step S209, solved by control device 51
Cut-out except the power supply to carrying device and closing of the solenoid valve of supply gas etc. into transfer chamber 10.It is also, logical
The manual operation of operator is crossed, the cut-out to the tie breaker of the power supply of carrying device is controlled to release and to removing
Send opening of the valve of supply gas etc. in chamber 10.Thereby, it is possible to restart to be handled the processing of substrate.
In addition, in step S207, in a state that operator is rested in transfer chamber 10, in whole doors 32 by mistake
During lock, operator's manual operation in transfer chamber 10 is arranged on the handle 324 of any door 32.The frame part 320 of door 32 as a result,
Fixation with lid 321 is released from, and operator can rapidly flee from via the opening 322 of frame part 320.
[hardware of control device 51]
Figure 14 is the figure of an example of the hardware for representing control device 51.Control device 51 for example as shown in figure 14, wraps
It includes：CPU(Central Processing Unit：Central processing unit) 510, RAM (Random Access Memory：It deposits at random
Access to memory) 511, ROM (Read Only Memory：Read-only memory) 512, auxilary unit 513, communication interface (I/
F) 514, input/output interface (I/F) 515 and medium interface (I/F) 516.
CPU510 is worked based on the program for being stored in ROM512 or auxilary unit 513, carries out the control in each portion.
The bootstrap that is performed when ROM512 is stored in the startup of control device 51 by CPU510, the hardware dependent on control device 51
Program etc..
Auxilary unit 513 is, for example, HDD (Hard Disk Drive：Hard disk drive) or SSD (Solid
State Drive：Solid state disk) etc., it preserves by the CPU510 programs performed and the data that are used by the program etc..CPU510 from
Such as program of 513 reading and saving of auxilary unit in auxilary unit 513 and be loaded on RAM511, execution is filled
The program of load.Communicating, I/F514 via cable 50, from each portion of transfer chamber 10, such as sensor 30, sensor 60, believe by reception
Number and send it to CPU510, the signal that CPU510 is generated is sent to each portion, the example of transfer chamber 10 via cable 50
Such as actuator 61, electromagnetic lock 122.
The input unit of output device, keyboard and mouse of the CPU510 through input and output I/F515 control displays etc. etc..
CPU510 obtains data via input and output I/F515 from input unit.In addition, CPU510 by the data generated via input
Output I/F515 is output to output device.
Medium (multimedia) I/F516 reading and savings are stored in auxiliary and deposit in the program of recording medium 517 or data etc.
In storage device 513.Recording medium 517 is, for example, DVD (Digital Versatile Disc：Digital versatile disc), PD
(Phase change rewritable Disk：Phase-change type rewritable CD) etc. optical record medium, MO (Magneto-
Optical disk：Disk) etc. Magnetooptic recording medium, tape-shaped medium, magnetic recording media or semiconductor memory etc..This
Outside, control device 51 can be stored in program of auxilary unit 513 etc. from other devices via 50 grade acquirements of cable, will
Acquired program etc. is stored in auxilary unit 513.
The embodiment of transfer chamber 10 is explained above.Can be clear and definite from above description, removing according to the present embodiment
Chamber 10 is sent, the safety of the operator to work in the inside of the manufacturing device of FPD etc. can be further improved.
[other]
In the above-described embodiment, transfer chamber 10 is illustrated as an example of vacuum chamber.It is also, disclosed
Vacuum chamber in technology is not limited to transfer chamber 10, as long as the device handled in the processing space of vacuum state,
Or processing chamber housing, load lock chamber etc..In addition, processing chamber housing is not limited to Etaching device, or film formation device,
Reforming apparatus etc..
In addition, in the above-described embodiment, control device 51 is for example real by general computer as shown in figure 14
It is existing, but other modes are used as, control device 51 can pass through PLC (Programmable Logic Controller：It can
Programme logic controller), the logic circuit of relay etc. realizes.
In addition, in the above-described embodiment, it is hardware switch to start switch 123 and Resetting Switching 124, but as it
Its mode, start switch 123 and Resetting Switching 124 can be shown in input and output I/F515 via control device 51 with
The software switch of the touch panel display that control device 51 connects etc..
Claims (8)
1. a kind of vacuum chamber, which is characterized in that including：
With storage by processing substrate it is space, in container of the top with the 1st opening portion；
It is opened and closed the 1st lid of the 1st opening portion；
To the exhaust apparatus being exhausted in the container；
Be arranged on the container it is side, for operator enter the container in door；
The upper lock section of lock and unlock is carried out to the door；With
Control device controls the upper lock section, and the upper lock section is made to be opened with the described 1st lid and hinders the 1st lid
The intervention component for closing first opening portion unlocks the door mounted on the 1st opening portion for condition.
2. vacuum chamber as described in claim 1, it is characterised in that：
The door is provided with 2 or more in the side of the container.
3. vacuum chamber as claimed in claim 2, which is characterized in that further include：
Detect the opening and closing test section of the opening and closing of each door；
Detect the standard-sized sheet test section of the full-gear of each door；With
Using sound and light at least any one send out the alarm portion of alarm,
Control device when detecting that at least any one described door opens by the opening and closing test section, controls the alarm portion
The alarm is sent out until detecting the full-gear of whole doors.
4. vacuum chamber as claimed in claim 3, which is characterized in that further include：
Forbid the prohibition unit of the removal of the intervention component,
The control device controls the prohibition unit to forbid the intervention in the full-gear for detecting whole doors
The removal of component.
5. vacuum chamber as claimed in claim 4, it is characterised in that：
The control device controls the prohibition unit to release the removal of the intervention component when whole doors is turned off
Forbid.
6. vacuum chamber as claimed in claim 5, it is characterised in that：
The control device controls the upper lock section so that the upper lock section is open with the intervention component from the described 1st
Portion removes and the 1st lid is closed and the door is locked for condition.
7. such as vacuum chamber according to any one of claims 1 to 6, it is characterised in that：
The door includes：Frame part with the 2nd opening portion；Close the 2nd lid of the 2nd opening portion of the frame part；With
Described 2nd lid is fixed on to the fixed component of the frame part,
The fixed component is carried out in a state that the door is closed by operator from the container towards inside side
Manual operation, release it is described 2nd lid relative to the frame part fixation.
8. a kind of locking method of the door of vacuum chamber, it is characterised in that：
The vacuum chamber includes：
With storage by processing substrate it is space, in container of the top with opening portion；
It is opened and closed the lid of the opening portion；
To the exhaust apparatus being exhausted in the container；With
Be provided in the side of the container 2 or more, for operator enter the container in multiple doors；
The locking method of the door of the vacuum chamber includes：
With the open opening portion of the lid, and it is described that the intervention component for covering the closing opening portion is hindered to be mounted on
The step of opening portion is condition, unlock each door；
When at least any door has opened, using sound and light at least any one send out alarm until the whole door
The step of as full-gear；
When whole doors becomes full-gear, control forbids the prohibition unit of the removal of the intervention component to forbid removing
The step of intervention component；
When whole doors is turned off, the prohibition unit is controlled to release the step of the forbidding of removal of the intervention component；
With
It is removed with the intervention component from the opening portion and the lid is closed the step of door is locked for condition.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016254685 | 2016-12-28 | ||
| JP2016-254685 | 2016-12-28 | ||
| JP2017238256A JP7023097B2 (en) | 2016-12-28 | 2017-12-13 | How to lock the vacuum chamber and the door of the vacuum chamber |
| JP2017-238256 | 2017-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108257892A true CN108257892A (en) | 2018-07-06 |
| CN108257892B CN108257892B (en) | 2022-01-25 |
Family
ID=62845191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711458470.2A Active CN108257892B (en) | 2016-12-28 | 2017-12-28 | Vacuum chamber and method for locking vacuum chamber door |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7023097B2 (en) |
| KR (1) | KR102100018B1 (en) |
| CN (1) | CN108257892B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1925111A (en) * | 2005-09-02 | 2007-03-07 | 东京毅力科创株式会社 | Vacuum cavity chamber and vacuum processing device |
| US20090186569A1 (en) * | 2008-01-18 | 2009-07-23 | Seiko Epson Corporation | Semiconductor device manufacturing apparatus and manufacturing method |
| KR20110109077A (en) * | 2010-03-30 | 2011-10-06 | 주식회사 원익아이피에스 | Vacuum chamber |
| US20150311042A1 (en) * | 2014-04-29 | 2015-10-29 | Psk Inc. | Substrate treating apparatus |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3044507B2 (en) * | 1992-05-11 | 2000-05-22 | 株式会社名機製作所 | Safety equipment for large vacuum presses |
| JP4049281B2 (en) * | 1997-10-28 | 2008-02-20 | 株式会社日立国際電気 | Substrate processing equipment |
| JP2001326162A (en) | 2000-05-17 | 2001-11-22 | Canon Inc | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device |
| JP2006093258A (en) | 2004-09-22 | 2006-04-06 | Hitachi Kokusai Electric Inc | Substrate treatment device |
| JP4518285B2 (en) | 2008-01-18 | 2010-08-04 | セイコーエプソン株式会社 | Semiconductor device manufacturing equipment |
| JP6196890B2 (en) | 2013-11-21 | 2017-09-13 | 東京エレクトロン株式会社 | Lid member opening / closing mechanism and substrate inspection device |
-
2017
- 2017-12-13 JP JP2017238256A patent/JP7023097B2/en active Active
- 2017-12-26 KR KR1020170179357A patent/KR102100018B1/en active IP Right Grant
- 2017-12-28 CN CN201711458470.2A patent/CN108257892B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1925111A (en) * | 2005-09-02 | 2007-03-07 | 东京毅力科创株式会社 | Vacuum cavity chamber and vacuum processing device |
| US20090186569A1 (en) * | 2008-01-18 | 2009-07-23 | Seiko Epson Corporation | Semiconductor device manufacturing apparatus and manufacturing method |
| KR20110109077A (en) * | 2010-03-30 | 2011-10-06 | 주식회사 원익아이피에스 | Vacuum chamber |
| US20150311042A1 (en) * | 2014-04-29 | 2015-10-29 | Psk Inc. | Substrate treating apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20180077056A (en) | 2018-07-06 |
| JP7023097B2 (en) | 2022-02-21 |
| KR102100018B1 (en) | 2020-04-10 |
| JP2018110219A (en) | 2018-07-12 |
| CN108257892B (en) | 2022-01-25 |
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