CN108241393A - Control system, control method and the household electrical appliance of radio temperature sensor - Google Patents
Control system, control method and the household electrical appliance of radio temperature sensor Download PDFInfo
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- CN108241393A CN108241393A CN201611232958.9A CN201611232958A CN108241393A CN 108241393 A CN108241393 A CN 108241393A CN 201611232958 A CN201611232958 A CN 201611232958A CN 108241393 A CN108241393 A CN 108241393A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
- G05D23/24—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element having a resistance varying with temperature, e.g. a thermistor
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Abstract
The invention discloses a kind of control system of radio temperature sensor, radio temperature sensor includes the temperature measurement module and wireless transport module of mutual signal connection, and the control system of radio temperature sensor includes：Acquisition module, for obtaining preset temperature value, and the current temperature value measured according to acquisition of preset thermometric period temperature measurement module；Comparison module, for current temperature value and preset temperature value to be compared；Suspend mode control module, for when current temperature value is less than preset temperature value, control wireless transport module to enter the sleep pattern for stopping sending temperature value；Control module is sent, for when current temperature value reaches preset temperature value, control wireless transport module to send current temperature value.The invention also discloses a kind of household electrical appliance of the control system of the control method and employing wireless temperature sensor of radio temperature sensor.Technical scheme of the present invention is intended to reduce the power consumption of radio temperature sensor.
Description
Technical field
The present invention relates to radio temperature sensor technical field more particularly to a kind of control systems of radio temperature sensor
The household electrical appliance of system, the control method of radio temperature sensor and the application radio temperature sensor.
Background technology
Existing household electrical appliance, such as electromagnetic oven commonly use radio temperature sensor as temperature detection and transmitting element.It is logical
Normal radio temperature sensor includes measuring the temperature measurement module of temperature and the wireless transport module for sending temperature value.Institute
Modulus (Analog Digital, AD) value of temperature measurement module detection electric signal is stated, and is determined according to preset table by AD values
Temperature value.But in the prior art, the temperature measurement module in radio temperature sensor usually persistently obtains current temperature value,
And wireless transport module is also that persistently the temperature value received is sent, and thus leads to the power consumption of radio temperature sensor
Greatly.
Invention content
It is a primary object of the present invention to provide a kind of control system of radio temperature sensor, it is intended to reduce wireless temperature
The power consumption of sensor.
To achieve the above object, in the control system of radio temperature sensor provided by the invention, the wireless temperature passes
Sensor includes the temperature measurement module and wireless transport module of the connection of mutual signal, the control system packet of the radio temperature sensor
It includes：
Acquisition module for obtaining preset temperature value, and obtains the temperature measurement module according to the preset thermometric period and measures
Current temperature value；
Comparison module, for the current temperature value and the preset temperature value to be compared；
Suspend mode control module, for when the current temperature value is less than the preset temperature value, controlling the wireless biography
Defeated module enters the sleep pattern for stopping sending temperature value；
Control module is sent, for when the current temperature value reaches the preset temperature value, controlling the wireless biography
Defeated module sends the current temperature value.
Preferably, the suspend mode control module is further used for：
After the sleeping time of the wireless transport module default sleeping time is reached, control the wireless transport module into
Enter to send the sending mode of temperature value.
Preferably, the default sleeping time is more than the thermometric period, and no more than sleeping time threshold value.
Preferably, the acquisition module includes：
Acquiring unit, for obtaining the current AD values of the temperature measurement module measurement, the AD according to the preset thermometric period
It is worth the modulus value for the temperature measurement module；
First computing unit, for calculating the current resistive value of the temperature sensor according to the current AD values；
Second computing unit, for the current temperature value to be calculated according to the current resistive value.
In addition, to achieve the above object, it is described wireless the present invention also provides a kind of control method of radio temperature sensor
Temperature sensor includes the temperature measurement module and wireless transport module of the connection of mutual signal, the controlling party of the radio temperature sensor
Method includes the following steps：
Preset temperature value is obtained, and the current temperature value of the temperature measurement module measurement is obtained according to the preset thermometric period；
The current temperature value and the preset temperature value are compared；
When the current temperature value is less than the preset temperature value, the wireless transport module is controlled to enter stopping and is sent
The sleep pattern of temperature value；
When the current temperature value reaches the preset temperature value, the wireless transport module is controlled to send described current
Temperature value.
Preferably, it is described when the current temperature value is less than the preset temperature value, control the wireless transport module
Into after the sleep pattern for stopping sending temperature value, further include：
After the sleeping time of the wireless transport module default sleeping time is reached, control the wireless transport module into
Enter to send the sending mode of temperature value.
Preferably, the current temperature value that the temperature measurement module measurement is obtained according to the preset thermometric period, including：
The current AD values of the temperature measurement module measurement are obtained according to the preset thermometric period, the AD values are the thermometric mould
The modulus value of block；
The current resistive value of the temperature sensor is calculated according to the current AD values；
The current temperature value is calculated according to the current resistive value.
In addition, to achieve the above object, the present invention also provides a kind of household electrical appliance, including radio temperature sensor and described
The control system of radio temperature sensor, the radio temperature sensor include the temperature measurement module of mutual signal connection and wireless biography
Defeated module.
In the inventive solutions, preset temperature value is first obtained, and the survey is obtained according to the preset thermometric period
The current temperature value that warm module measures, then the current temperature value and the preset temperature value are compared, when described current
When temperature value is less than the preset temperature value, the wireless transport module is controlled to enter the sleep pattern for stopping sending temperature value,
When the current temperature value reaches the preset temperature value, the wireless transport module is controlled to send the current temperature value,
Therefore, the power consumption of the wireless transport module can be reduced by the sleep pattern, so as to reduce the wireless temperature sensing
The power consumption of device.
Description of the drawings
Fig. 1 is the high-level schematic functional block diagram of the control system first embodiment of radio temperature sensor of the present invention；
Fig. 2 is the high-level schematic functional block diagram of the control system fourth embodiment of radio temperature sensor of the present invention；
Fig. 3 is the flow diagram of the control method first embodiment of radio temperature sensor of the present invention；
Fig. 4 is the flow diagram of the control method second embodiment of radio temperature sensor of the present invention；
Fig. 5 is the flow diagram of the control method 3rd embodiment of radio temperature sensor of the present invention.
The object of the invention is realized, the embodiments will be further described with reference to the accompanying drawings for functional characteristics and advantage.
Specific embodiment
It should understand, the specific embodiments described herein are merely illustrative of the present invention, is not intended to limit the present invention.
Referring to Fig. 1, to achieve the above object, the first embodiment of the present invention provides a kind of control of radio temperature sensor
System processed, the radio temperature sensor include the temperature measurement module and wireless transport module of the connection of mutual signal, the wireless temperature
The control system of degree sensor includes：
Acquisition module 10 for obtaining preset temperature value, and obtains the temperature measurement module according to the preset thermometric period and surveys
The current temperature value of amount；
Comparison module 20, for the current temperature value and the preset temperature value to be compared；
Suspend mode control module 30, it is described wireless for when the current temperature value is less than the preset temperature value, controlling
Transmission module enters the sleep pattern for stopping sending temperature value；
Control module 40 is sent, it is described wireless for when the current temperature value reaches the preset temperature value, controlling
Transmission module sends the current temperature value.
In the inventive solutions, preset temperature value is first obtained, and the survey is obtained according to the preset thermometric period
The current temperature value that warm module measures, then the current temperature value and the preset temperature value are compared, when described current
When temperature value is less than the preset temperature value, the wireless transport module is controlled to enter the sleep pattern for stopping sending temperature value,
When the current temperature value reaches the preset temperature value, the wireless transport module is controlled to send the current temperature value,
Therefore, the power consumption of the wireless transport module can be reduced by the sleep pattern, so as to reduce the wireless temperature sensing
The power consumption of device.
The control system of the radio temperature sensor can be used for any required reduction radio temperature sensor power consumption
Device, for example, household electrical appliance.
In the present embodiment, for the ease of introduce, hereinafter with the control system of the radio temperature sensor in
For electromagnetic oven.
The wireless transport module can be that wireless radio frequency modules, zigbee modules, infrared module, bluetooth module etc. are arbitrary
Module with wireless transmission function, type are not limited.
When the control system of the radio temperature sensor is in electromagnetic oven, by the current temperature value with it is described pre-
If temperature value is compared, it can be determined that whether current electromagnetic stove enters working condition.When the current temperature value reaches described
During preset temperature, it is believed that electromagnetic oven comes into working condition, and the heating region of electromagnetic oven has heated up, when described current
When temperature value is less than the preset temperature, it is believed that electromagnetic oven does not enter working condition, for example, electromagnetic oven does not access power supply or place
In dormant state.
When electromagnetic oven does not enter working condition, do not need to control the temperature conditions of electromagnetic oven, therefore, electromagnetic oven
Temperature control modules also without the current temperature value for obtaining electromagnetic oven, temperature display module can not also work as electromagnetic oven
Preceding temperature value is shown, at this point, system controls the wireless transport module to enter suspend mode, although the temperature measurement module is pressed
Current temperature value is persistently detected according to the preset thermometric period, but the wireless transport module does not send temperature data to described
Temperature control modules or temperature display module.
Wireless transport module power consumption in the state of transmission data is maximum, and therefore, the suspend mode can be to avoid
Wireless transport module power consumption caused by due to lasting transmission data, so as to extend battery life.
In order to judge whether electromagnetic oven enters working condition by the method that temperature compares, the preset temperature value is preferably
More than the temperature value of room temperature.
Further, when electromagnetic oven is in firm starting state or in the state of cooling, at this moment user may not be needed pair
Electromagnetic oven carries out close temperature control, for example, when the temperature of electromagnetic oven is in less than 40 DEG C, with its normal heating temperature value
It differs larger, therefore, the wireless transport module can also be controlled to be in sleep state at this time.
In the present embodiment, the preset temperature value is preferably 35-50 DEG C.
After the current temperature value detected reaches the preset temperature value, judge that electromagnetic oven enters working condition,
Then the temperature control modules of electromagnetic oven need to obtain the current temperature value of electromagnetic oven to realize the temperature control to electromagnetic oven.This
When, the wireless transport module is in sending mode, and the sending mode refers to that the wireless transport module will measure every time
To current temperature value sent.
The current temperature value can be sent to temperature control modules to realize automatic temperature-adjusting by the wireless transport module
Control can also be sent to temperature display module and carry out temperature display, to provide temperature controlled reference to the user.
Improve as further, the thermometric period can also be adjusted according to temperature-measuring results.For example, when preset times
It, can be by the thermometric cycle stretch-out of the temperature measurement module, the lower limit temperature when temperature-measuring results are respectively less than preset lower limit temperature
Less than the preset temperature value；It, can also be by the survey when the temperature-measuring results of preset times are more than preset ceiling temperature
The thermometric cycle time of warm module, so that user more precisely obtains current temperature value, the ceiling temperature is more than described pre-
If temperature value.
The first embodiment of the control system of radio temperature sensor based on the present invention, wireless temperature of the invention sensing
In the second embodiment of the control system of device, the suspend mode control module 30 is further used for：
After the sleeping time of the wireless transport module default sleeping time is reached, control the wireless transport module into
Enter to send the sending mode of temperature value.
The sleep state of the wireless transport module is not unlimitedly to continue, but when reaching the default sleep
Between after realize the wake-up of the wireless transport module.
In order to realize the effect for reducing power consumption and the temperature conditions for grasping electromagnetic oven, the default sleeping time
It should not set long, electromagnetic oven is not to be exceeded from room temperature to the time for stablizing heated condition in longest.
In general, the time interval that the wireless transport module sends temperature data is several milliseconds to hundreds of milliseconds,
In the present embodiment, the default sleeping time can be the arbitrary duration of 1s to 20s, therefore, into after sleep state, the nothing
Line transmission module can be waken up in the arbitrary duration of 1s to 20s, so as to effectively realize the purpose for reducing power consumption.
The second embodiment of the control system of radio temperature sensor based on the present invention, wireless temperature of the invention sensing
In the 3rd embodiment of the control system of device, the default sleeping time is more than the thermometric period, and no more than sleeping time
Threshold value.
In order to recognize the temperature change of electromagnetic oven at any time, the thermometric period of the temperature measurement module should be very short.Such as
Sleeping time is preset described in fruit less than or equal to the thermometric period, then the effect for reducing power consumption is not achieved, it is readily appreciated that, it is described
Default sleeping time was more advantageous to reducing power consumption more than the thermometric period.And the default sleeping time can not be unlimited
It is extended, thus the default sleeping time simultaneously should also meet the condition no more than sleeping time threshold value.The sleeping time
Threshold value can in 1s to 20s arbitrary value.
Referring to Fig. 2, the first embodiment of the control system of the radio temperature sensor based on the present invention to third is implemented
Any one in example, in the fourth embodiment of the control system of radio temperature sensor of the invention, the acquisition module 10
Including：
Acquiring unit 11, it is described for obtaining the current AD values of the temperature measurement module measurement according to the preset thermometric period
AD values are the modulus value of the temperature measurement module；
First computing unit 12, for calculating the current resistive value of the temperature sensor according to the current AD values；
Second computing unit 13, for the current temperature value to be calculated according to the current resistive value.
Obtain the current AD values that the temperature measurement module measures according to the preset thermometric period, after according to the current AD values meter
The current resistive value of the temperature sensor is calculated, and the current temperature can further be calculated according to the current resistive value
Angle value.
In addition, referring to Fig. 3, to achieve the above object, the first embodiment of the present invention provides a kind of wireless temperature sensing
The control method of device, the radio temperature sensor includes the temperature measurement module and wireless transport module of mutual signal connection, described
The control method of radio temperature sensor includes the following steps：
Step S10 obtains preset temperature value, and obtains the current of the temperature measurement module measurement according to the preset thermometric period
Temperature value；
The current temperature value and the preset temperature value are compared by step S20；
Step S30 when the current temperature value is less than the preset temperature value, controls the wireless transport module to enter
Stop sending the sleep pattern of temperature value；
Step S40 (not shown) when the current temperature value reaches the preset temperature value, controls the wireless transmission
Module sends the current temperature value.
In the inventive solutions, preset temperature value is first obtained, and the survey is obtained according to the preset thermometric period
The current temperature value that warm module measures, then the current temperature value and the preset temperature value are compared, when described current
When temperature value is less than the preset temperature value, the wireless transport module is controlled to enter the sleep pattern for stopping sending temperature value,
When the current temperature value reaches the preset temperature value, the wireless transport module is controlled to send the current temperature value,
Therefore, the power consumption of the wireless transport module can be reduced by the sleep pattern, so as to reduce the wireless temperature sensing
The power consumption of device.
The control system of the radio temperature sensor can be used for any required device for reducing radio temperature sensor,
For example, household electrical appliance.
In the present embodiment, for the ease of introduce, hereinafter with the control system of the radio temperature sensor in
For electromagnetic oven.
The wireless transport module can be that wireless radio frequency modules, zigbee modules, infrared module, bluetooth module etc. are arbitrary
Module with wireless transmission function, type are not limited.
When the control system of the radio temperature sensor is in electromagnetic oven, by the current temperature value with it is described pre-
If temperature value is compared, it can be determined that whether current electromagnetic stove enters working condition.When the current temperature value reaches described
During preset temperature, it is believed that electromagnetic oven comes into working condition, and the heating region of electromagnetic oven has heated up, when described current
When temperature value is less than the preset temperature, it is believed that electromagnetic oven does not enter working condition, for example, electromagnetic oven does not access power supply or place
In dormant state.
When electromagnetic oven does not enter working condition, do not need to control the temperature conditions of electromagnetic oven, therefore, electromagnetic oven
Temperature control modules also without the current temperature value for obtaining electromagnetic oven, temperature display module can not also work as electromagnetic oven
Preceding temperature value is shown, at this point, system controls the wireless transport module to enter suspend mode, although the temperature measurement module is pressed
Current temperature value is persistently detected according to the preset thermometric period, but the wireless transport module does not send temperature data to described
Temperature control modules or temperature display module.
Wireless transport module power consumption in the state of transmission data is maximum, and therefore, the suspend mode can be to avoid
Wireless transport module power consumption caused by due to lasting transmission data, so as to extend battery life.
In order to judge whether electromagnetic oven enters working condition by the method that temperature compares, the preset temperature value is preferably
More than the temperature value of room temperature.
Further, when electromagnetic oven is in firm starting state or in the state of cooling, at this moment user may not be needed pair
Electromagnetic oven carries out close temperature control, for example, when the temperature of electromagnetic oven is in less than 40 DEG C, with its normal heating temperature value
It differs larger, therefore, the wireless transport module can also be controlled to be in sleep state at this time.
In the present embodiment, the preset temperature value is preferably 35-50 DEG C.
After the current temperature value detected reaches the preset temperature value, judge that electromagnetic oven enters working condition,
Then the temperature control modules of electromagnetic oven need to obtain the current temperature value of electromagnetic oven to realize the temperature control to electromagnetic oven.This
When, the wireless transport module is in sending mode, and the sending mode refers to that the wireless transport module will measure every time
To current temperature value sent.
The current temperature value can be sent to temperature control modules to realize automatic temperature-adjusting by the wireless transport module
Control can also be sent to temperature display module and carry out temperature display, to provide temperature controlled reference to the user.
Improve as further, the thermometric period can also be adjusted according to temperature-measuring results.For example, when preset times
It, can be by the thermometric cycle stretch-out of the temperature measurement module, the lower limit temperature when temperature-measuring results are respectively less than preset lower limit temperature
Less than the preset temperature value；It, can also be by the survey when the temperature-measuring results of preset times are more than preset ceiling temperature
The thermometric cycle time of warm module, so that user more precisely obtains current temperature value, the ceiling temperature is more than described pre-
If temperature value.
Referring to Fig. 4, the first embodiment of the control method of the radio temperature sensor based on the present invention, nothing of the invention
In the second embodiment of the control method of line temperature sensor, further included after step S30：
Step S50 after the sleeping time of the wireless transport module default sleeping time is reached, controls the wireless biography
Defeated module enters the sending mode for sending temperature value.
The sleep state of the wireless transport module is not unlimitedly to continue, but when reaching the default sleep
Between after realize the wake-up of the wireless transport module.
In order to realize the effect for reducing power consumption and the temperature conditions for grasping electromagnetic oven, the default sleeping time
It should not set long, electromagnetic oven is not to be exceeded from room temperature to the time for stablizing heated condition in longest.
In general, the time interval that the wireless transport module sends temperature data is several milliseconds to hundreds of milliseconds,
In the present embodiment, the default sleeping time can be the arbitrary duration of 1s to 20s, therefore, into after sleep state, the nothing
Line transmission module can be waken up in the arbitrary duration of 1s to 20s, so as to effectively realize the purpose for reducing power consumption.
Referring to Fig. 5, the first embodiment of the control method of the radio temperature sensor based on the present invention or the second implementation
, it is described according to preset survey in step S10 in the 3rd embodiment of the control method of radio temperature sensor of the invention
Thermoperiod obtains the current temperature value that the temperature measurement module measures, including：
Step S11 obtains the current AD values of the temperature measurement module measurement according to the preset thermometric period, and the AD values are institute
State the modulus value of temperature measurement module；
Step S12 calculates the current resistive value of the temperature sensor according to the current AD values；
The current temperature value is calculated according to the current resistive value in step S13.
In order to recognize the temperature change of electromagnetic oven at any time, the thermometric period of the temperature measurement module should be very short.Such as
Sleeping time is preset described in fruit less than or equal to the thermometric period, then the effect for reducing power consumption is not achieved, it is readily appreciated that, it is described
Default sleeping time was more advantageous to reducing power consumption more than the thermometric period.And the default sleeping time can not be unlimited
It is extended, thus the default sleeping time simultaneously should also meet the condition no more than sleeping time threshold value.The sleeping time
Threshold value can in 1s to 20s arbitrary value.
Obtain the current AD values that the temperature measurement module measures according to the preset thermometric period, after according to the current AD values meter
The current resistive value of the temperature sensor is calculated, and the current temperature can further be calculated according to the current resistive value
Angle value.
In addition, to achieve the above object, a kind of household electrical appliance of also offer of the invention, including radio temperature sensor and institute
State the control system of radio temperature sensor, the radio temperature sensor includes the temperature measurement module of mutual signal connection and wireless
Transmission module.
The household electrical appliance can be electromagnetic oven, electric cooker and electric chafing dish etc. have heating function household electrical appliances or
Refrigerator, air-conditioning etc. have the household electrical appliances of refrigerating function.
It these are only the preferred embodiment of the present invention, be not intended to limit the scope of the invention, it is every to utilize this hair
The equivalent structure or equivalent flow shift that bright specification and accompanying drawing content are made directly or indirectly is used in other relevant skills
Art field, is included within the scope of the present invention.
Claims (8)
1. a kind of control system of radio temperature sensor, which is characterized in that the radio temperature sensor includes mutual signal
The temperature measurement module and wireless transport module of connection, the control system of the radio temperature sensor include：
Acquisition module for obtaining preset temperature value, and obtains working as the temperature measurement module measurement according to the preset thermometric period
Preceding temperature value；
Comparison module, for the current temperature value and the preset temperature value to be compared；
Suspend mode control module, for when the current temperature value is less than the preset temperature value, controlling the wireless transmission mould
Block enters the sleep pattern for stopping sending temperature value；
Control module is sent, for when the current temperature value reaches the preset temperature value, controlling the wireless transmission mould
Block sends the current temperature value.
2. the control system of radio temperature sensor according to claim 1, which is characterized in that the suspend mode control module
It is further used for：
After the sleeping time of the wireless transport module default sleeping time is reached, the wireless transport module is controlled to enter hair
Send the sending mode of temperature value.
3. the control system of radio temperature sensor according to claim 2, which is characterized in that the default sleeping time
More than the thermometric period, and no more than sleeping time threshold value.
4. the control system of radio temperature sensor as claimed in any of claims 1 to 3, which is characterized in that institute
Acquisition module is stated to include：
Acquiring unit, for obtaining the current AD values of the temperature measurement module measurement according to the preset thermometric period, the AD values are
The modulus value of the temperature measurement module；
First computing unit, for calculating the current resistive value of the temperature sensor according to the current AD values；
Second computing unit, for the current temperature value to be calculated according to the current resistive value.
5. a kind of control method of radio temperature sensor, which is characterized in that the radio temperature sensor includes mutual signal
The temperature measurement module and wireless transport module of connection, the control method of the radio temperature sensor include the following steps：
Preset temperature value is obtained, and the current temperature value of the temperature measurement module measurement is obtained according to the preset thermometric period；
The current temperature value and the preset temperature value are compared；
When the current temperature value is less than the preset temperature value, the wireless transport module is controlled to enter stopping and sends temperature
The sleep pattern of value；
When the current temperature value reaches the preset temperature value, the wireless transport module is controlled to send the Current Temperatures
Value.
6. the control method of radio temperature sensor according to claim 5, which is characterized in that described to work as the current temperature
Angle value be less than the preset temperature value when, control the wireless transport module enter stop send temperature value sleep pattern it
Afterwards, it further includes：
After the sleeping time of the wireless transport module default sleeping time is reached, the wireless transport module is controlled to enter hair
Send the sending mode of temperature value.
7. the control method of radio temperature sensor according to claim 5 or 6, which is characterized in that described according to default
The thermometric period obtain the current temperature value that the temperature measurement module measures, including：
The current AD values of the temperature measurement module measurement are obtained according to the preset thermometric period, the AD values are the temperature measurement module
Modulus value；
The current resistive value of the temperature sensor is calculated according to the current AD values；
The current temperature value is calculated according to the current resistive value.
8. a kind of household electrical appliance, which is characterized in that including radio temperature sensor and such as any one institute in Claims 1-4
The control system for the radio temperature sensor stated, the radio temperature sensor include the temperature measurement module and nothing of mutual signal connection
Line transmission module.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113143034A (en) * | 2020-01-17 | 2021-07-23 | 浙江绍兴苏泊尔生活电器有限公司 | Control method of wireless temperature measurement module |
| CN113959569A (en) * | 2021-10-25 | 2022-01-21 | 京东方科技集团股份有限公司 | Temperature measurement method and device, temperature measurement equipment and storage medium |
| CN115341199A (en) * | 2022-08-19 | 2022-11-15 | 江苏实为半导体科技有限公司 | Cavity temperature control system based on multi-cavity CVD equipment |
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