CN108227758B - Non-contact double-shaft inclination control device based on voice coil motor - Google Patents
Non-contact double-shaft inclination control device based on voice coil motor Download PDFInfo
- Publication number
- CN108227758B CN108227758B CN201810190282.4A CN201810190282A CN108227758B CN 108227758 B CN108227758 B CN 108227758B CN 201810190282 A CN201810190282 A CN 201810190282A CN 108227758 B CN108227758 B CN 108227758B
- Authority
- CN
- China
- Prior art keywords
- voice coil
- inclination
- coil motor
- flat plate
- adder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001914 filtration Methods 0.000 claims abstract description 23
- 238000002955 isolation Methods 0.000 claims abstract description 16
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 14
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 11
- 230000000694 effects Effects 0.000 abstract description 5
- 238000002474 experimental method Methods 0.000 abstract description 4
- 230000004044 response Effects 0.000 abstract description 4
- 238000013461 design Methods 0.000 abstract description 3
- 230000008859 change Effects 0.000 abstract description 2
- 238000003825 pressing Methods 0.000 abstract description 2
- 230000007246 mechanism Effects 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005291 magnetic effect Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Vibration Prevention Devices (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
The invention discloses a non-contact double-shaft inclination control device based on a voice coil motor, and relates to the technical field of precision machinery and modern control. The device comprises a base; the device is provided with a horizontal platform, an inclination angle measuring module, an amplifying and filtering module, a current amplifier and an audio motor; the two voice coil motors are respectively arranged at the left side and the front side of the circular flat plate and are 90 degrees each other; the inclination sensor and the reference voltage are respectively connected with an adder, and the adder, the amplifying and filtering module, the current amplifier, the voice coil motor and the horizontal platform are sequentially connected. The device adopts a non-contact design, and does not influence the vibration isolation effect of the controlled table-board while performing inclination control; the response speed is high; in principle, has universal applicability. The device has simple structure and obvious pressing effect of inclination change, can be widely applied to systems sensitive to inclination such as attitude calibration and crane arm angle control, and can be applied to precision measurement experiments requiring vibration isolation by adopting a non-contact structure.
Description
Technical Field
The invention relates to the technical field of precision machinery and modern control, in particular to a non-contact double-shaft inclination control device based on a voice coil motor.
Background
With the development of precision measurement and precision machinery, it is important to reduce the inclination of the horizontal platform on which the equipment and experimental facilities are installed. For example, in laser interferometry experiments, tilt angle variations on the order of 100mrad (micro-arc) can have a significant impact on the measurement results. In industrial production, small angular variations can create large offset distances for long baseline processing and inspection equipment.
The actuating device in the current tilting control device mostly adopts a contact type structure, such as an air spring and the like. The devices are contacted with the horizontal platform through a medium (such as compressed air), so that the damping is large, the oscillation period is long, the reversion is slow, the response frequency is low, the air spring is high in cost and short in service life, a corresponding exhaust control device is required to be arranged, the structure is complex, and the use is relatively troublesome.
In some precision measurement experiments, the vibration isolation effect of the controlled platform is damaged because the platform needs active or passive vibration isolation, and the contact type inclination control inevitably generates connection with certain strength. The voice coil motor is just provided with a non-contact characteristic as an actuating mechanism, so that the interference on the stability of the table top caused by contact collision of the actuating mechanism and the table top is avoided, which cannot be realized by the contact type device. The voice coil motor is adopted as an executive device, and the voice coil motor has the advantages of high acceleration, high speed, rapid response and the like, and the characteristics are difficult to realize by adopting a contact device.
The voice coil motor is a device which generates force based on interaction of current and magnetic field, and attention is paid to avoiding interference of surrounding magnetic environment to the voice coil motor in the use process.
Disclosure of Invention
The invention aims to overcome the defects and shortcomings of the existing contact type horizontal control technology and provide a non-contact type double-shaft inclination control device based on a voice coil motor.
The invention has simple mechanical structure part and large expandable space, the servo circuit and the control method can be used in other similar feedback control systems, and the method has universal applicability in principle.
The invention adopts the voice coil motor as an actuating mechanism to perform active tilting control, forms a tilting control device which has simple structure, modularization and easy integration, and obtains a stable tilting active control device.
The purpose of the invention is realized in the following way:
based on the prior servo technology, the design and improvement of an external actuating mechanism are used for overcoming the difficulties existing in the contact type inclination control device.
Specifically, the device comprises a base;
the device is provided with a horizontal platform, an inclination angle measuring module, an amplifying and filtering module, a current amplifier and an audio motor;
the horizontal platform comprises a round flat plate and two active vibration isolation tables which are connected up and down;
the inclination angle measurement module comprises an inclination sensor, a reference voltage, an adder and a two-dimensional horizontal adjustment frame;
the amplifying and filtering module comprises a filtering circuit and a positive-phase amplifier which are connected front and back;
the voice coil motor comprises a connecting piece, a neodymium iron boron strong magnet, an I-shaped cylinder and an oxygen-free copper enameled wire;
the positions and the connection relations are as follows:
a horizontal platform is arranged on the base;
the two voice coil motors are respectively arranged at the left side and the front side of the circular flat plate and are 90 degrees each other;
from bottom to top, the neodymium iron boron strong magnet, the connecting piece and the bottom surface of the round flat plate are connected in sequence; the I-shaped cylinder is connected with the table top of the base; the neodymium iron boron strong magnet is inserted into the I-shaped cylinder, and an oxygen-free copper enameled wire is wound outside the I-shaped cylinder;
the inclination sensor, the two-dimensional horizontal adjusting frame and the table top of the circular flat plate are sequentially arranged from top to bottom;
the inclination sensor and the reference voltage are respectively connected with an adder, and the adder, the amplifying and filtering module, the current amplifier, the voice coil motor and the horizontal platform are sequentially connected.
The device has the following advantages and positive effects:
(1) the non-contact design is adopted, so that the vibration isolation effect of the controlled table top is not influenced while the inclination control is performed;
(2) the response speed is high;
(3) in principle, has universal applicability.
In a word, this device simple structure, the suppression effect is obvious in the change of slope, but wide application in sensitive system of slope such as attitude calibration and crane arm angle control, this device adopts non-contact structure simultaneously, can be applied to the precision measurement experiment that needs vibration isolation.
Drawings
FIG. 1 is a block diagram of the structure of the present device;
FIG. 2-1 is a schematic view (front view) of the structure of the present device;
fig. 2-2 are schematic structural views (top views) of the present device;
in the figure:
00-base;
10-a horizontal platform, wherein the horizontal platform is provided with a plurality of horizontal supporting plates,
11-an active vibration isolation table, 12-a circular flat plate;
20-a tilt angle measuring module,
21-an inclination sensor, 22-a reference voltage, 23-an adder and 24-a two-dimensional horizontal adjusting frame;
30-an amplifying and filtering module,
31-a filter circuit, 32-an in-phase amplifier;
40-a current amplifier;
50-a voice coil motor,
51-connecting piece, 52-neodymium iron boron strong magnet, 53-I-shaped cylinder and 54-oxygen-free copper enameled wire.
Fig. 3 is a tilt control graph.
Detailed Description
The present device is described in detail below with reference to the attached drawings and examples:
1. structure of the device
1. Overall (L)
As shown in fig. 1, 2-1 and 2-2, the device comprises a base 00;
a horizontal water table 10, an inclination angle measuring module 20, an amplifying and filtering module 30, a current amplifier 40 and a voice coil motor 50 are arranged;
the horizontal platform 10 comprises a round flat plate 12 and two active vibration isolation tables 11 which are connected up and down;
the inclination angle measurement module 20 comprises an inclination sensor 21, a reference voltage 22, an adder 23 and a two-dimensional horizontal adjustment frame 24;
the amplifying and filtering module 30 comprises a filtering circuit 31 and a normal phase amplifier 32 which are connected in front-back;
the voice coil motor 50 comprises a connecting piece 51, a neodymium iron boron strong magnet 52, an I-shaped cylinder 53 and an oxygen-free copper enameled wire 54;
the positions and the connection relations are as follows:
a horizontal platform 10 is placed on the base 00;
the two voice coil motors 50 are respectively arranged at the left side and the front side of the circular flat plate 12 and are 90 degrees each other;
the neodymium iron boron strong magnet 52, the connecting piece 51 and the bottom surface of the round flat plate 12 are sequentially connected from bottom to top; the I-shaped cylinder 53 is connected with the table top of the base 00; the neodymium iron boron strong magnet 52 is inserted into the I-shaped cylinder 53, and an oxygen-free copper enameled wire 54 is wound outside the I-shaped cylinder 53;
the inclination sensor 21, the two-dimensional horizontal adjusting frame 24 and the table top of the circular flat plate 12 are placed in sequence from top to bottom;
the tilt sensor 21 and the reference voltage 22 are connected to an adder 23, respectively, and the adder 23, the amplifying and filtering module 30, the current amplifier 40, the voice coil motor 50, and the horizontal stage 10 are connected in this order.
The working mechanism is as follows:
the control loop is formed by sequentially connecting an inclination angle measuring module 20, an amplifying and filtering module 30, a current amplifier 40 and a voice coil motor 50;
the tilt sensor 21 and the voice coil motor 50 serve as sensors and actuators for tilt detection and cancellation;
the inclination sensor 21 outputs a direct current offset of 5V and an alternating current inclination signal, and the reference voltage 22 compensates the direct current offset output by the inclination sensor 21 through the adder 23 to obtain an error signal; the error signal is sequentially filtered by a filter circuit 31, the gain of a high-frequency part is reduced, the loop stability is improved, and then a larger gain is obtained by a normal-phase amplifier 32; the amplified error signal passes through the current amplifier 40 and then enters an I-shaped cylinder 53 (solenoid) wound by an oxygen-free copper enameled wire 54, and electromagnetic force is generated on the NdFeB ferromagnetic wire 52 to counteract the inclination of the table top.
Specifically, when the level of the circular flat plate 12 changes, the inclination sensor 21 obtains an inclination signal (a);
the inclination sensor 21 and the reference voltage 22 are respectively connected with an adder 23, and the inclination signal (a) and the signal (b) output by the reference voltage 22 are added to obtain an error signal (c) for detection and processing;
the output end of the adder 23, the filter circuit 31 and the in-phase amplifier 32 are sequentially connected, and the error signal (c) is amplified and filtered to obtain a control voltage (d);
the output end of the in-phase amplifier 32 is connected with the current amplifier 40, and converts the control voltage (d) into a large current (e) to be output so as to drive the voice coil motor 50;
the voice coil motor 50 counteracts its tilting by acting electromagnetic force on the table top of the circular flat plate 12, lifting or lowering the side edge of the table top.
2. Functional component
0) Base 00
The base 00 is used for placing the horizontal platform 10, the voice coil motor 50 and the like.
1) Horizontal platform 10
The horizontal platform 10 comprises an active vibration isolation platform 11 and a circular flat plate 12;
the circular flat plate 12 is arranged above the active vibration isolation table 11, so that the circular flat plate 12 and the base form elastic connection, and the interference of the vibration of the ground on the inclination is reduced.
(1) Active vibration isolation table 11
The active vibration isolation stage 11 may employ a commercial active vibration isolation platform, such as the active vibration isolation platform model VCM-S400.
(2) Round flat plate 12
The round plate 12 was made of an aluminum alloy having a diameter of 76cm, a thickness of 7cm and a weight of 106kg.
2) Inclination measurement module 20
The inclination measurement module 20 includes an inclination sensor 21, a reference voltage 22, an adder 23, and a two-dimensional leveling frame 24.
(1) Inclination sensor 21
The tilt sensor 21 may be a commercially available tilt sensor such as a dual axis tilt sensor model BWH-520.
(2) Reference voltage 22
The reference voltage 22 uses the integrated circuit LT1021 as a reference to obtain a more accurate reference voltage.
(3) Two-dimensional leveling frame 24
The two-dimensional leveling frame 24 is a common piece.
The two-dimensional level adjustment frame 24 is fixed to the tilt sensor 21, and functions to adjust the level of the tilt sensor 21 in a stationary state.
3) Amplification and filtering module 30
The amplifying and filtering module 30 includes a filtering circuit 31 and an in-phase amplifier 32.
The filter circuit 31 and the in-phase amplifier 32 are both common circuits.
The amplification and filtering module 30 is used for amplification and filtering of signals.
The filter circuit 31 is used for carrying out preliminary amplification and filtering on the signals to obtain enough gain and filter out resonance peaks of high frequency so as to ensure the stability of a loop.
The in-phase amplifier 32 further amplifies the filtered signal to obtain a larger gain.
4) Current amplifier 40
The operational amplifier in the current amplifier 40 is OPA541AP, and the maximum output current reaches 10A, and the amplified signal can be converted into a large current to drive the voice coil motor 50.
5) Voice coil motor 50
The voice coil motor 50 (actuator) includes a connector 51, a neodymium iron boron strong magnet 52, an i-shaped cylinder 53, and an oxygen-free copper enameled wire 54.
(1) Neodymium iron boron strong magnet 52
The strong nd-fe-b magnet 52 is composed of two pieces of nd-fe-b magnet with a diameter of 48mm and a thickness of 19mm, and is fixed on the circular flat plate 12 through the connecting piece 51 to apply a force to the circular flat plate 02.
(2) I-shaped cylinder 53
The i-shaped cylinder 53 is made of aluminum, has an inner diameter 5mm larger than that of the neodymium-iron-boron strong magnet 52, and can effectively avoid contact between the two.
(3) Oxygen-free copper enameled wire 54
The oxygen-free copper enameled wire 54 is wound on the I-shaped cylinder 53 for 640 turns, so that enough electromagnetic force can be generated for the magnet, and excessive power consumption caused by excessive turns of the coil is avoided.
2. Method for operating a device
(1) The inclination sensor 21 is fixed on the two-dimensional horizontal adjusting frame 24, and the two-dimensional horizontal adjusting frame 24 is arranged on the horizontal platform 10 to be controlled to detect the inclination of the horizontal platform 10;
(2) the power supply of each part of the device is turned on, the two-dimensional horizontal adjusting frame 24 is adjusted to enable the inclination sensor 21 to output a horizontal reference signal, and the value of the reference voltage 22 is adjusted to counteract the direct-current offset voltage of the inclination sensor 21 so that the direct current output by the inclination measuring module 20 is small;
(3) adjusting the gain of the amplifier in the amplifying and filtering module 30 to a minimum;
(4) the gain of the current amplifier 40 is added a small amount to ensure a small resonance suppression effect;
(5) after the system is stabilized, the feedback control loop is closed, and the gain of the current amplifier 40 is gradually increased until the pressing effect is optimal, and the system does not oscillate.
3. Results of actual measurement
FIG. 3 shows the application of a periodic force to the circular plate 12 to output a tilt signal with a period of 0.02 s; firstly, realizing inclination control through a closed loop, monitoring an error signal output by an inclination measurement module 20, then disconnecting a connecting line between a current amplifier 40 and a voice coil motor 50, enabling a system to be open loop, and then monitoring the error signal output by the inclination measurement module 20; it was found that the tilt was changed by about + -400 mrad (micro-arc degree) at the time of open loop, and about + -90 mrad (micro-arc degree) at the time of closed loop control, and the tilt was suppressed by approximately 5 times.
Claims (1)
1. A non-contact double-shaft inclination control device based on a voice coil motor is characterized in that:
the device comprises a base (00);
the device is provided with a horizontal platform (10), an inclination angle measuring module (20), an amplifying and filtering module (30), a current amplifier (40) and a voice coil motor (50);
the horizontal platform (10) comprises a round flat plate (12) and two active vibration isolation tables (11) which are connected up and down;
the inclination angle measurement module (20) comprises an inclination sensor (21), a reference voltage (22), an adder (23) and a two-dimensional horizontal adjustment frame (24);
the amplifying and filtering module (30) comprises a filtering circuit (31) and a normal phase amplifier (32) which are connected in front-back mode;
the voice coil motor (50) comprises a connecting piece (51), a neodymium iron boron strong magnet (52), an I-shaped cylinder (53) and an oxygen-free copper enameled wire (54);
the positions and the connection relations are as follows:
a horizontal platform (10) is arranged on the base (00);
the two voice coil motors (50) are respectively arranged at the left side and the front side of the circular flat plate (12) and are 90 degrees each other;
the neodymium iron boron strong magnet (52), the connecting piece (51) and the bottom surface of the round flat plate (12) are sequentially connected from bottom to top; the I-shaped cylinder (53) is connected with the table top of the base (00); the neodymium iron boron strong magnet (52) is inserted into the I-shaped cylinder (53), and an oxygen-free copper enameled wire (54) is wound outside the I-shaped cylinder (53);
the inclination sensor (21), the two-dimensional horizontal adjusting frame (24) and the table top of the circular flat plate (12) are sequentially arranged from top to bottom;
the inclination sensor (21) and the reference voltage (22) are respectively connected with the adder (23), and the adder (23), the amplifying and filtering module (30), the current amplifier (40), the voice coil motor (50) and the horizontal platform (10) are sequentially connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810190282.4A CN108227758B (en) | 2018-03-08 | 2018-03-08 | Non-contact double-shaft inclination control device based on voice coil motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810190282.4A CN108227758B (en) | 2018-03-08 | 2018-03-08 | Non-contact double-shaft inclination control device based on voice coil motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108227758A CN108227758A (en) | 2018-06-29 |
| CN108227758B true CN108227758B (en) | 2023-11-03 |
Family
ID=62667186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810190282.4A Active CN108227758B (en) | 2018-03-08 | 2018-03-08 | Non-contact double-shaft inclination control device based on voice coil motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108227758B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111443735B (en) * | 2020-03-25 | 2023-10-24 | 浙江大华技术股份有限公司 | Method, device and system for maintaining posture of vehicle-mounted pan-tilt camera |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05202981A (en) * | 1991-07-29 | 1993-08-10 | Showa Electric Wire & Cable Co Ltd | Active vibration-isolating device |
| US6021991A (en) * | 1997-03-19 | 2000-02-08 | Canon Kabushiki Kaisha | Active anti-vibration apparatus |
| CN102394548A (en) * | 2011-09-22 | 2012-03-28 | 北京航空航天大学 | Voice coil vibration isolating/vibration suppressing structure and control method thereof |
| CN102537196A (en) * | 2010-12-24 | 2012-07-04 | 上海微电子装备有限公司 | Active vibration damping system as well as vibration damping unit and absolute displacement measuring device thereof |
| CN102705434A (en) * | 2012-06-25 | 2012-10-03 | 江西连胜科技有限公司 | Ultralow frequency active vibration isolation device and control method thereof |
| CN102943839A (en) * | 2012-10-24 | 2013-02-27 | 华中科技大学 | Precision positioning vibration isolation platform |
| CN103047512A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Magnetic suspension vibration isolation platform on basis of zero-position reference of springs and laser auto-collimation measurement |
| CN103047513A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Gas-magnetic vibration isolation platform on basis of magnetic suspension zero-position reference and laser auto-collimation measurement |
| KR101584700B1 (en) * | 2014-08-26 | 2016-01-15 | 주식회사 대일시스템 | Active vibration control apparatus |
| WO2017160999A1 (en) * | 2016-03-15 | 2017-09-21 | Technical Manufacturing Corporation | User-tuned, active vibration-isolation system |
| CN207908983U (en) * | 2018-03-08 | 2018-09-25 | 中国科学院武汉物理与数学研究所 | A kind of contactless bi-axial tilt control device based on voice coil motor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2261530A1 (en) * | 2009-06-12 | 2010-12-15 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | An active vibration isolation and damping system |
-
2018
- 2018-03-08 CN CN201810190282.4A patent/CN108227758B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05202981A (en) * | 1991-07-29 | 1993-08-10 | Showa Electric Wire & Cable Co Ltd | Active vibration-isolating device |
| US6021991A (en) * | 1997-03-19 | 2000-02-08 | Canon Kabushiki Kaisha | Active anti-vibration apparatus |
| CN102537196A (en) * | 2010-12-24 | 2012-07-04 | 上海微电子装备有限公司 | Active vibration damping system as well as vibration damping unit and absolute displacement measuring device thereof |
| CN102394548A (en) * | 2011-09-22 | 2012-03-28 | 北京航空航天大学 | Voice coil vibration isolating/vibration suppressing structure and control method thereof |
| CN102705434A (en) * | 2012-06-25 | 2012-10-03 | 江西连胜科技有限公司 | Ultralow frequency active vibration isolation device and control method thereof |
| CN102943839A (en) * | 2012-10-24 | 2013-02-27 | 华中科技大学 | Precision positioning vibration isolation platform |
| CN103047512A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Magnetic suspension vibration isolation platform on basis of zero-position reference of springs and laser auto-collimation measurement |
| CN103047513A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Gas-magnetic vibration isolation platform on basis of magnetic suspension zero-position reference and laser auto-collimation measurement |
| KR101584700B1 (en) * | 2014-08-26 | 2016-01-15 | 주식회사 대일시스템 | Active vibration control apparatus |
| WO2017160999A1 (en) * | 2016-03-15 | 2017-09-21 | Technical Manufacturing Corporation | User-tuned, active vibration-isolation system |
| CN207908983U (en) * | 2018-03-08 | 2018-09-25 | 中国科学院武汉物理与数学研究所 | A kind of contactless bi-axial tilt control device based on voice coil motor |
Non-Patent Citations (2)
| Title |
|---|
| 基于音圈电机驱动的新型柔顺光学振动台设计分析;王宏峰 等;《现代电子技术》;第38卷(第24期);第156-158, 162页 * |
| 音圈电机直流驱动电路设计;邵琳达 等;《科技创新与应用》(第24期);第12-14页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108227758A (en) | 2018-06-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9574953B2 (en) | Magnetic force sensor | |
| US5765800A (en) | Vibration damping apparatus | |
| KR101647315B1 (en) | Arrangement and method for converting an input signal into an output signal and for generating a predefined transfer behavior between said input signal and said output signal | |
| KR101300024B1 (en) | Absolute displacement detection method and absolute displacement sensor using the method | |
| US20110127400A1 (en) | Active vibration isolation system having an inertial reference mass | |
| US8352086B2 (en) | Combined motion sensor for use in feedback control systems for vibration isolation | |
| CN108227758B (en) | Non-contact double-shaft inclination control device based on voice coil motor | |
| CN113653734B (en) | Magnetic suspension bearing rotor and base vibration suppression test system | |
| CN102705434A (en) | Ultralow frequency active vibration isolation device and control method thereof | |
| CN105805203A (en) | Vibration damper and vibration damping method | |
| CN100429424C (en) | System and method for active vibration isolation and active vibration cancellation | |
| CN111133503A (en) | Acoustic transducer and magnetizing current controller | |
| CN116511981A (en) | Milling robot processing vibration suppression device | |
| CN207908983U (en) | A kind of contactless bi-axial tilt control device based on voice coil motor | |
| CN108679141B (en) | Multi-degree-of-freedom active vibration isolation device and method | |
| JP2000234646A (en) | Vibration control device | |
| JP2007010342A (en) | Low-frequency zone gain doubling control for magnetically-supported balance device | |
| EP1176325A2 (en) | Magnetic bearing apparatus | |
| JP2003150250A (en) | Vibration suppressing device | |
| CN114814267B (en) | Low-frequency expanding circuit of magnetoelectric speed sensor and control method | |
| JPH04341424A (en) | Magnetic levitation apparatus | |
| Wu et al. | Study on fuzzy control algorithm for magnetic levitated platform | |
| KR200298316Y1 (en) | System of microphone with reduced howling | |
| JP2003021190A (en) | Active vibration resistant device | |
| WO2024030576A1 (en) | Method and apparatus for reducing reaction forces in loudspeakers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |