CN108226243A - A kind of nitrogen dioxide sensor based on graphene - Google Patents
A kind of nitrogen dioxide sensor based on graphene Download PDFInfo
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- CN108226243A CN108226243A CN201711490138.4A CN201711490138A CN108226243A CN 108226243 A CN108226243 A CN 108226243A CN 201711490138 A CN201711490138 A CN 201711490138A CN 108226243 A CN108226243 A CN 108226243A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
- G01N27/308—Electrodes, e.g. test electrodes; Half-cells at least partially made of carbon
Abstract
The present invention relates to a kind of nitrogen dioxide sensors based on graphene, the nitrogen dioxide sensor is thick-film type, uses ceramic substrate as substrate, is equipped on the ceramic substrate and inserts finger electrode, it inserts and refers to electrode equipped with sensitive thin film, the sensitive thin film is ZnO nano piece and Au/SnO2The mixture of/RGO composite materials.
Description
Technical field
The present invention relates to gas sensor technical field more particularly to a kind of nitrogen dioxide sensors based on graphene.
Background technology
With the adjustment of the industrial structure, various environmental problems also become increasingly severeer, and industrial waste gas, vehicle exhaust etc. are big
Amount discharge all can cause the toxic and harmful gas such as various nitrogen oxides, sulfide to be constantly discharged into air, excessive dioxy
Change nitrogen other than forming acid rain, except haze, also result in excessive O3It is formed, is then destroyed ozone layer, in addition, two
Nitrogen oxide also results in the formation of photochemical fog.
Nitrogen dioxide sensor is to poisonous and hazardous NO2The important tool of detection, at present, for NO2Gas sensor
Research is concentrated mainly on the materials such as metal-oxide semiconductor (MOS), solid electrolyte, however, above-mentioned material is needed in higher temperature
Lower work, increases the in-fighting of sensor, also, for sensor miniaturization, it is integrated make troubles, in addition, its selectivity and
Stability still needs to improve.
Invention content
For technical problems, the present invention such as operating temperature existing for above-mentioned nitrogen dioxide sensor is higher, sensitivity is poor
A kind of nitrogen dioxide sensor based on graphene is intended to provide, it is set forth above to solve the problems, such as.
A kind of nitrogen dioxide sensor based on graphene, the nitrogen dioxide sensing are provided in the embodiment of the present invention
Device is thick-film type, uses ceramic substrate as substrate, is equipped on the ceramic substrate and inserts finger electrode, and slotting finger electrode is equipped with sensitive thin
Film, the sensitive thin film are ZnO nano piece and Au/SnO2The mixture of/RGO composite materials.
Preferably, the Au/SnO2/ RGO composite materials are prepared by hydro-thermal method, which is in two-dimensional sheet
Structure, Au and SnO2It is nano-particle, is uniformly supported on graphene surface.
The technical solution that the embodiment of the present invention provides can include the following benefits：
Sensitive thin film is based on ZnO nano piece and Au/SnO in the nitrogen dioxide sensor of the present invention2/ RGO composite materials
Mixture, the senor operating temperature at room temperature, have good sensitivity and faster response recovery time, are titanium dioxide
The application of nitrogen sensor provides more more options.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partly become from the following description
It obtains significantly or is recognized by the practice of the present invention.It should be understood that above general description and following detailed description are only
It is exemplary and explanatory, the present invention can not be limited.
Description of the drawings
Using attached drawing, the invention will be further described, but the embodiment in attached drawing does not form any limit to the present invention
System, for those of ordinary skill in the art, without creative efforts, can also obtain according to the following drawings
Other attached drawings.
Fig. 1 is the structure diagram of nitrogen dioxide sensor of the present invention.
Wherein, 10- ceramic substrates, 11- insert finger electrode, 12- sensitive thin films.
Specific embodiment
Here exemplary embodiment will be illustrated in detail, example is illustrated in the accompanying drawings.Following description is related to
During attached drawing, unless otherwise indicated, the same numbers in different attached drawings represent the same or similar element.Following exemplary embodiment
Described in embodiment do not represent and the consistent all embodiments of the present invention.On the contrary, they be only with it is such as appended
The example of the consistent device and method of some aspects being described in detail in claims, of the invention.
The embodiment of the present invention is related to a kind of nitrogen dioxide sensor based on graphene, and the senor operating temperature is in room
Under temperature, there is good sensitivity and faster response recovery time, the application for nitrogen dioxide sensor provides more multiselect
It selects.
With reference to Fig. 1, nitrogen dioxide sensor of the present invention is thick-film type, ceramic substrate 10 is used as substrate, at this
Ceramic substrate, which is equipped with to insert, refers to electrode 11, inserts finger electrode 11 and is equipped with sensitive thin film 12, which is 0.15mm,
The sensitive thin film 12 is ZnO nano piece and Au/SnO2The mixture of/RGO composite materials.
In the prior art, the nitrogen dioxide sensor based on INVENTIONConventional metal-oxide needs to work at a higher temperature,
Sensor in-fighting is increased, and the nitrogen dioxide sensor based on grapheme material is expected to realize and work at room temperature；Graphene
It is a kind of novel carbon material, since its special atomic structure and complicated band structure make it have characteristic of semiconductor simultaneously
And metallic character, and with excellent electron transmission performance, be widely used in developing room temperature nitrogen dioxide sensor.But due to
There are dangling bonds, such as hydroxyl, carboxyl, epoxy group for graphene surface, the absorption of gas molecule are limited, based on pure state graphene
The nitrogen dioxide sensor of material shows the shortcomings of poor, sensitivity is low, response recovery time is long to gas-selectively, and passes through
After being adulterated to graphene, graphene can be obviously improved to NO2Sensitivity.And it is current, using traditional gas sensitive, such as it is expensive
Metal, metal oxide, conducting polymer etc. are grapheme modified and form ternary complex by them and are widely used in and carry
The sensing capabilities of high graphene-based nitrogen dioxide sensor using the above method, can not only play each ingredient quick to gas
The advantage of sense, and the physicochemical properties of graphene-based material can be adjusted so as to improve sensing capabilities.Graphene composite wood
Material has been widely used for the research of gas sensor, but at room temperature graphene-based nitrogen dioxide sensor there are still poor selectivity,
The problems such as sensitivity is low, response recovery time is long.
Based on above-mentioned background, in technical solution of the present invention, the sensitive thin film is ZnO nano piece and Au/SnO2/RGO
The mixture of composite material, and the mixture have passed through the processing of plasma, on the basis of the two combination so that described
Sensitive thin film produces unexpected technique effect so that the sensitive performance of sensor greatly improves.
Specifically, it is by Au/SnO in the above-mentioned sensitive thin film of the present invention2/ RGO dispersant liquid drops are coated onto ZnO nano piece table
Face, and by the processing of plasma, so as to form the sensor sensing film；The Au/SnO2/ RGO composite woods
Material is dispersed in ZnO nano piece surface, and graphene sheet layer is combined with ZnO nano piece；The Au/SnO2/ RGO composite materials
In, RGO is in lamella, Au and SnO2For nano-particle, modify on lamella RGO surfaces, which constitutes the Au/
SnO2The natural dispersive mechanism of/RGO composite materials so that the Au/SnO2/ RGO composite materials and NO2Contact area increases
Add, produce unexpected technique effect, improve transducer sensitivity；In addition, redox graphene (RGO) and ZnO
Nanometer sheet, SnO2, Au combine, by doped graphene, regulate and control the semiconducting behavior of graphene, can be obviously improved graphene-based
The sensitivity characteristic of nitrogen dioxide sensor；Above-mentioned combination is to NO2Sensitization is played, improves the transmission of electronics in sensitive material
Rate produces unexpected technique effect.
Specifically, in sensitive thin film described in technical solution of the present invention, the ZnO nano piece and Au/SnO2/ RGO composite woods
The mass ratio of material is 4:1.In technical solution of the present invention, further by controlling quality when doping so that the sensitive material
Produce unexpected technique effect so that the sensitive performance of sensor greatly improves.
Specifically, the ZnO nano piece is prepared by hydro-thermal method.
Zinc oxide is a kind of semi-conducting material of good performance, and large-scale application is in necks such as air-sensitive, photoelectricity, photocatalysis
Domain, in gas sensitive field, zinc oxide is one of three big gas sensitives, is widely used in the air-sensitive detection of ethyl alcohol etc., and existing
There are no zinc oxide and graphene are combined as NO at room temperature in technology2The technical solution of gas sensor sensitive material.This
In inventive technique scheme, by the way that Zinc oxide nano sheet is combined with graphene, regulate and control the semiconducting behavior of graphene, produce meaning
Technique effect unexpectedly improves the sensing capabilities of sensitive material.
Specifically, the Au/SnO2/ RGO composite materials are prepared by hydro-thermal method, which is in two-dimensional sheet
Structure, Au and SnO2It is nano-particle, is uniformly supported on graphene surface；The Au nano particle diameters are 10nm；Institute
State SnO2Nano particle diameter is 5nm；In the composite material, Au, SnO2Mass ratio with RGO is 7:5:4.
In the composite material, by adulterating Au and SnO in graphene surface2Nano-particle improves sensitive material
Electron transfer rate so that composite material has porous structure, meanwhile, the SnO of N-shaped2Between nano-particle and the graphene of p-type
P-n junction is formed, so as to improve sensitivity characteristic.
The preparation process of nitrogen dioxide sensor of the present invention is：
Step 1, ZnO nano piece is prepared
The urea of 3.5g and the zinc acetate of 1g are taken respectively, and urea and zinc acetate are dissolved in 40ml goes in example water, is formed
Then mixed solution stirs 50min, mixed solution is transferred in the conical flask of 100ml after stirring, conical flask is put in sealing
In baking oven, 8h is kept the temperature at 95 DEG C, then natural cooling, will precipitation centrifugation, washing, then in 60 DEG C of dry 3h, finally, will sink
Form sediment 320 DEG C of calcining 2h in Muffle furnace, obtains the ZnO nano piece powder；
Step 2, Au/SnO is prepared2/ RGO composite materials
A) graphite oxide is prepared
The preparation of GO is completed by improved Hummers methods：First, by the graphite powder of 0.1g and the dense sulphur of 2.3ml
Acid solution mixes, and is stirred at room temperature for 24 hours, then, the sodium nitrate of 10mg is added in mixture and continues to stir 40min, so
Afterwards, mixture is placed in ice bath, is slowly added to 0.3g potassium permanganate thereto, after object to be mixed stirs evenly, it is carried out
35-40 DEG C of heating water bath processing 40min, until reacting sticky, is slow added into 4.6ml distilled water, and said mixture is existed
Heating stirring 15min at 75 DEG C, finally, it is anti-to terminate that the hydrogenperoxide steam generator of 14ml distilled water and 1ml are added in into mixture
It should；Then, gained mixture is cleaned repeatedly with distilled water, until solution is in neutrality, then will to be deposited on solution bottom not oxidized
The graphite powder of stripping and the GO piece layer separations by oxidation stripping dispersion in aqueous solution, dried GO is dispersed in again
The GO solution of a concentration of 1.0mg/ml is configured in example water；
B) Au/SnO is prepared2/ RGO composite materials
The above-mentioned GO solution of 1ml is added in 40ml distilled water, then by SnCl4·5H2O is added in the dispersion liquid of GO,
Solution, is then transferred in the hydrothermal reaction kettle of 50ml by ultrasonic disperse 30min, and 180 DEG C of reactions in an oven are put after sealing
12h centrifuges products therefrom, obtains In2O3/ RGO dispersion liquids；
Au nano-particles are added to above-mentioned In again2O3In/RGO dispersion liquids, mixed solution is heated to 100 DEG C of reactions
60min, products therefrom are centrifuged, wash, and obtain the Au/SnO2/ RGO composite material dispersion liquids；
Step 3, corona treatment
By Au/SnO obtained above2/ RGO composite material dispersant liquid drops are coated onto ZnO nano piece powder surface, grinding
60min, be ultrasonically treated 20min, be uniformly mixed it, then, mixture is subjected to the processing of low temperature radio frequency argon plasma, wait from
Sub- generating means is inductive coupling, and working frequency 15.24MHz, power 350W, air pressure 45Pa, gas flow rate is
22sccm, processing time 40min；
In technical solution of the present invention, by Au/SnO2/ RGO composite material dispersant liquid drops are coated onto ZnO nano piece powder surface,
The graphene sheet layer can be effectively adsorbed on Zinc oxide nano sheet surface, further increase specific surface area, in addition, mixture passes through
Argon plasma processing is crossed, the surface nature of composite material can be effectively improved, increase surface-active, for improving NO2It is sensitive
Degree, reduction minimal detectable concentration produce unexpected technique effect.
Step 4, nitrogen dioxide sensor is prepared
By step 3 plasma treated mixture with example water being gone to be uniformly mixed in right amount, ground in mortar
Gained paste is coated on the ceramic bases surface for inserting finger electrode by 10min, after dry, obtained the nitrogen dioxide and is passed
Sensor；
Specifically, the slotting finger electrode is Au electrodes, Au electrode lines width is 0.1mm, refers to spacing as 0.15mm, inserts and refer to
Thickness of electrode is 0.1~0.2mm.
Embodiment
In the present embodiment, the nitrogen dioxide sensor is thick-film type, ceramic substrate is used as substrate, in the ceramic substrate
It is equipped with to insert and refers to electrode, insert finger electrode and be equipped with sensitive thin film, which is 0.15mm, and the sensitive thin film is
ZnO nano piece and Au/SnO2The mixture of/RGO composite materials；The ZnO nano piece and Au/SnO2The quality of/RGO composite materials
Than being 4:1.
Prepared by the ZnO nano piece hydro-thermal method.
The Au/SnO2/ RGO composite materials are prepared by hydro-thermal method, and the composite material is in two-dimensional sheet structure, Au
And SnO2It is nano-particle, is uniformly supported on graphene surface；The Au nano particle diameters are 10nm；The SnO2It receives
Rice corpuscles grain size is 5nm；In the composite material, Au, SnO2Mass ratio with RGO is 7:5:4.
The preparation process of nitrogen dioxide sensor described in the present embodiment is：
Step 1, ZnO nano piece is prepared
The urea of 3.5g and the zinc acetate of 1g are taken respectively, and urea and zinc acetate are dissolved in 40ml goes in example water, is formed
Then mixed solution stirs 50min, mixed solution is transferred in the conical flask of 100ml after stirring, conical flask is put in sealing
In baking oven, 8h is kept the temperature at 95 DEG C, then natural cooling, will precipitation centrifugation, washing, then in 60 DEG C of dry 3h, finally, will sink
Form sediment 320 DEG C of calcining 2h in Muffle furnace, obtains the ZnO nano piece powder；
Step 2, Au/SnO is prepared2/ RGO composite materials
A) graphite oxide is prepared
The preparation of GO is completed by improved Hummers methods：First, by the graphite powder of 0.1g and the dense sulphur of 2.3ml
Acid solution mixes, and is stirred at room temperature for 24 hours, then, the sodium nitrate of 10mg is added in mixture and continues to stir 40min, so
Afterwards, mixture is placed in ice bath, is slowly added to 0.3g potassium permanganate thereto, after object to be mixed stirs evenly, it is carried out
35-40 DEG C of heating water bath processing 40min, until reacting sticky, is slow added into 4.6ml distilled water, and said mixture is existed
Heating stirring 15min at 75 DEG C, finally, it is anti-to terminate that the hydrogenperoxide steam generator of 14ml distilled water and 1ml are added in into mixture
It should；Then, gained mixture is cleaned repeatedly with distilled water, until solution is in neutrality, then will to be deposited on solution bottom not oxidized
The graphite powder of stripping and the GO piece layer separations by oxidation stripping dispersion in aqueous solution, dried GO is dispersed in again
The GO solution of a concentration of 1.0mg/ml is configured in example water；
B) Au/SnO is prepared2/ RGO composite materials
The above-mentioned GO solution of 1ml is added in 40ml distilled water, then by SnCl4·5H2O is added in the dispersion liquid of GO,
Solution, is then transferred in the hydrothermal reaction kettle of 50ml by ultrasonic disperse 30min, and 180 DEG C of reactions in an oven are put after sealing
12h centrifuges products therefrom, obtains In2O3/ RGO dispersion liquids；
Au nano-particles are added to above-mentioned In again2O3In/RGO dispersion liquids, mixed solution is heated to 100 DEG C of reactions
60min, products therefrom are centrifuged, wash, and obtain the Au/SnO2/ RGO composite material dispersion liquids；
Step 3, corona treatment
By Au/SnO obtained above2/ RGO composite material dispersant liquid drops are coated onto ZnO nano piece powder surface, grinding
60min, be ultrasonically treated 20min, be uniformly mixed it, then, mixture is subjected to the processing of low temperature radio frequency argon plasma, wait from
Sub- generating means is inductive coupling, and working frequency 15.24MHz, power 350W, air pressure 45Pa, gas flow rate is
22sccm, processing time 40min；
In technical solution of the present invention, by Au/SnO2/ RGO composite material dispersant liquid drops are coated onto ZnO nano piece powder surface,
The graphene sheet layer can be effectively adsorbed on Zinc oxide nano sheet surface, further increase specific surface area, in addition, mixture passes through
Argon plasma processing is crossed, the surface nature of composite material can be effectively improved, increase surface-active, for improving NO2It is sensitive
Degree, reduction minimal detectable concentration produce unexpected technique effect.
Step 4, nitrogen dioxide sensor is prepared
By step 3 plasma treated mixture with example water being gone to be uniformly mixed in right amount, ground in mortar
Gained paste is coated on the ceramic bases surface for inserting finger electrode by 10min, after dry, obtained the nitrogen dioxide and is passed
Sensor；
Specifically, the slotting finger electrode is Au electrodes, Au electrode lines width is 0.1mm, refers to spacing as 0.15mm, inserts and refer to
Thickness of electrode is 0.1~0.2mm.
Reference examples 1
Compared to above-described embodiment, ZnO nano piece is not provided in the sensitive thin film.
Reference examples 2
Compared to above-described embodiment, the Au/SnO of the sensitive thin film2Au nano-particles are not provided with in/RGO composite materials.
Reference examples 3
Compared to above-described embodiment, the Au/SnO of the sensitive thin film2SnO is not provided with in/RGO composite materials2Nanoparticle
Son.
Reference examples 4
Compared to above-described embodiment, the sensitive thin film does not pass through plasma treatment.
Nitrogen dioxide sensor of the present invention is tested using gas-sensitive property tester：First by certain density target gas
Body is injected into sealing test chamber, treats that object gas after mixing, then by nitrogen dioxide sensor is put into the air in chamber
In test chamber.
The sensitivity of nitrogen dioxide sensor, response recovery time etc. use this field usual definition in the present invention.
First, the sensor obtained respectively to embodiment and reference examples is at room temperature to the NO of 5ppm2Carry out response test,
Test result is as follows table：
It can be seen that the sensor that embodiment obtains is respectively provided with clear superiority in sensitivity, response recovery time, produces
Unexpected technique effect.Then, by nitrogen dioxide sensor obtained by embodiment to the NO of 1ppm2Carry out response test, hair
Existing sensitivity is still up to 23.1, reduces NO2Minimal detectable concentration.
The foregoing is merely the preferred modes of the present invention, are not intended to limit the invention, all spirit and original in the present invention
Within then, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.
Claims (9)
1. a kind of nitrogen dioxide sensor based on graphene, the nitrogen dioxide sensor is thick-film type, using ceramic substrate
It for substrate, is equipped on the ceramic substrate and inserts finger electrode, inserted finger electrode and be equipped with sensitive thin film, which is characterized in that the sensitivity
Film is ZnO nano piece and Au/SnO2The mixture of/RGO composite materials.
A kind of 2. nitrogen dioxide sensor based on graphene according to claim 1, which is characterized in that the Au/
SnO2/ RGO composite materials are prepared by hydro-thermal method, which is in two-dimensional sheet structure, Au and SnO2It is nanoparticle
Son is uniformly supported on graphene surface.
3. a kind of nitrogen dioxide sensor based on graphene according to claim 2, which is characterized in that Au nanometers described
Particle diameter is 10nm.
A kind of 4. nitrogen dioxide sensor based on graphene according to claim 2, which is characterized in that the SnO2It receives
Rice corpuscles grain size is 5nm.
A kind of 5. nitrogen dioxide sensor based on graphene according to claim 2, which is characterized in that the Au/
SnO2In/RGO composite materials, Au, SnO2Mass ratio with RGO is 7:5:4.
A kind of 6. nitrogen dioxide sensor based on graphene according to claim 1, which is characterized in that sensitive thin film
In, the ZnO nano piece and Au/SnO2The mass ratio of/RGO composite materials is 4:1.
7. a kind of nitrogen dioxide sensor based on graphene according to claim 1, which is characterized in that the sensitivity is thin
Film thickness is 0.15mm.
A kind of 8. nitrogen dioxide sensor based on graphene according to claim 1, which is characterized in that the titanium dioxide
The preparation process of nitrogen sensor is：
Step 1, ZnO nano piece is prepared
The urea of 3.5g and the zinc acetate of 1g are taken respectively, and urea and zinc acetate are dissolved in 40ml goes in example water, forms mixing
Then solution stirs 50min, mixed solution is transferred in the conical flask of 100ml after stirring, conical flask is placed in baking by sealing
In case, 8h is kept the temperature at 95 DEG C, then natural cooling, will precipitation centrifugation, washing, then in 60 DEG C of dry 3h, finally, will be deposited in
320 DEG C of calcining 2h, obtain the ZnO nano piece powder in Muffle furnace；
Step 2, Au/SnO is prepared2/ RGO composite materials
A) graphite oxide is prepared
The preparation of GO is completed by improved Hummers methods：First, it is the concentrated sulfuric acid of the graphite powder of 0.1g and 2.3ml is molten
Liquid mixes, and is stirred at room temperature for 24 hours, then, the sodium nitrate of 10mg is added in mixture and continues to stir 40min, then, will
Mixture is placed in ice bath, is slowly added to 0.3g potassium permanganate thereto, and after object to be mixed stirs evenly, 35-40 is carried out to it
DEG C heating water bath processing 40min, until reacting sticky, be slow added into 4.6ml distilled water, and by said mixture at 75 DEG C
Heating stirring 15min finally, the hydrogenperoxide steam generator of 14ml distilled water and 1ml is added in into mixture to terminate reaction；So
Afterwards, gained mixture with distilled water is cleaned repeatedly, until solution is in neutrality, then the not oxidized stripping in solution bottom will be deposited on
Graphite powder and the GO piece layer separations by oxidation stripping dispersion in aqueous solution, example water is dispersed in by dried GO again
In be configured to the GO solution of a concentration of 1.0mg/ml；
B) Au/SnO is prepared2/ RGO composite materials
The above-mentioned GO solution of 1ml is added in 40ml distilled water, then by SnCl4·5H2O is added in the dispersion liquid of GO, ultrasound
Disperse 30min, then solution is transferred in the hydrothermal reaction kettle of 50ml, 180 DEG C of reaction 12h in an oven are put after sealing, it will
Products therefrom centrifuges, and obtains In2O3/ RGO dispersion liquids；
Au nano-particles are added to above-mentioned In again2O3In/RGO dispersion liquids, mixed solution is heated to 100 DEG C of reaction 60min,
Products therefrom is centrifuged, washs, and obtains the Au/SnO2/ RGO composite material dispersion liquids；
Step 3, corona treatment
By Au/SnO obtained above2/ RGO composite material dispersant liquid drops are coated onto ZnO nano piece powder surface, grinding 60min, surpass
Sonication 20min is uniformly mixed it, then, mixture is carried out the processing of low temperature radio frequency argon plasma, plasma fills
It is set to inductive coupling, working frequency 15.24MHz, power 350W, air pressure 45Pa, gas flow rate 22sccm, during processing
Between be 40min；
Step 4, nitrogen dioxide sensor is prepared
By step 3 plasma treated mixture with example water is gone to be uniformly mixed in right amount, 10min is ground in mortar,
Gained paste is coated on the ceramic bases surface for inserting finger electrode, after dry, obtains the nitrogen dioxide sensor.
A kind of 9. nitrogen dioxide sensor based on graphene according to claim 8, which is characterized in that the slotting finger electricity
Extremely Au electrodes, Au electrode lines width are 0.1mm, refer to spacing as 0.15mm, insert and refer to thickness of electrode as 0.1~0.2mm.
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Application publication date: 20180629 |