CN108226197B - Electron reflectivity test platform and test method for plasma component - Google Patents
Electron reflectivity test platform and test method for plasma component Download PDFInfo
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- CN108226197B CN108226197B CN201810025140.2A CN201810025140A CN108226197B CN 108226197 B CN108226197 B CN 108226197B CN 201810025140 A CN201810025140 A CN 201810025140A CN 108226197 B CN108226197 B CN 108226197B
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- 238000012360 testing method Methods 0.000 title claims abstract description 61
- 238000002310 reflectometry Methods 0.000 title claims abstract description 18
- 238000010998 test method Methods 0.000 title abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 27
- 238000009413 insulation Methods 0.000 claims abstract description 8
- 239000012774 insulation material Substances 0.000 claims abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 238000001816 cooling Methods 0.000 abstract description 5
- 239000000498 cooling water Substances 0.000 description 10
- 230000005855 radiation Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
- G01N2223/052—Investigating materials by wave or particle radiation by diffraction, scatter or reflection reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/102—Different kinds of radiation or particles beta or electrons
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- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses an electron reflectivity test platform and a test method for a plasma component, wherein the test platform comprises a heat sink with a water pipeline, an inlet temperature sensor and an outlet temperature sensor are respectively arranged at a water inlet and a water outlet of the heat sink, the heat sink is fixedly arranged on a heat insulation plate made of heat insulation materials, a test piece made of materials to be tested is fixedly arranged above the heat sink, the test piece is provided with the test piece temperature sensors at different positions, the test piece temperature sensors are fixed on the heat insulation plate through fixing seats, the test platform is arranged in a vacuum chamber, and an electron gun is arranged in the vacuum chamber to provide electrons for scanning bombardment of an electron gun scanning area of the test piece. The invention can effectively calculate the electron reflectivity of the test piece material, and simultaneously obtain the surface temperature of the material corresponding to different electron scanning power densities under the condition of fixed cooling capacity, and the obtained result has important significance for deeply researching the sputtering problem of the material.
Description
Technical Field
The invention relates to the technical field, in particular to an electronic reflectivity test platform and a test method for a plasma component.
Background
In EAST (Experimental Advanced Superconducting Tokamak) tokamak devices, the heat facing the plasma component material is mostly caused by electron bombardment, and the consequent heat and the bombardment process itself can cause impurity sputtering facing the plasma component material, which not only reduces the concentration of reactive particles, but also cools the plasma, reducing or even stopping the reaction rate. In view of the increasing operating power and requirements of EAST, it is necessary to deeply test various properties of the material facing the plasma component, and since the heat energy of the material facing the plasma component is mainly derived from electron bombardment, it is necessary to provide a system for testing the electron reflectivity of the material suitable for EAST.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an electron reflectivity test platform and a test method for a plasma component.
The invention is realized by the following technical scheme:
the utility model provides an electron reflectivity test platform for facing plasma part, includes the vacuum chamber, is equipped with the heat sink that has the water pipe in the vacuum chamber the water inlet and the delivery port of heat sink be provided with entry temperature sensor and export temperature sensor respectively, the test piece that the fixed mounting test material that awaits measuring was made above the heat sink be equipped with test piece temperature sensor respectively in different positions department of test piece install the electron gun in the vacuum chamber, the electron gun scan area of test piece scan bombard.
The heat sink is fixedly arranged on the heat insulation board made of heat insulation materials.
The temperature sensor of the test piece is fixed on the heat insulation plate through the fixing seat.
An electron reflectance test method for a plasma-facing component, obtainable according to the law of conservation of energy:
Q L ＝Q A +Q R ，Q L ＝UI
wherein Q is L Loading power for electron gun, Q A To absorb total energy, Q R To reflect the total energy, U is the electron gun loadThe voltage, I, is the current applied by the electron gun;
the electron reflectivity q is expressed as:
q＝Q R /Q L ＝1-Q A /Q L
Q A ＝Q 1 +Q 2 +Q 3 +Q 4
wherein Q is 1 For the energy taken away by the water flow in the heat exchange, Q 2 To test the energy lost by the thermal radiation of the part, Q 3 Energy lost to heat transfer, Q 4 The energy required by the temperature rise of the test piece to reach a steady state;
in the test, the test working conditions are all steady state, so Q 4 ＝0；
Because of the use of the heat insulating plate, the energy lost by heat conduction is negligible, and the value Q is taken 3 ＝0；
Where ε is the heat radiation coefficient of the test piece material, A is the heat radiation area of the test piece, and the Stefan-Boltzmann constant C=5.67×10 -8 W/m 2 ·k 4 ，T 2 To test the surface temperature of the part, T 1 Is the ambient temperature of the vacuum chamber;
Q 1 ＝cmΔT＝c·ρvA 1 ·(T 4 -T 3 )
wherein c is the specific heat of the cooling water, m is the mass of the cooling water, deltaT is the inlet-outlet temperature difference of the cooling water, ρ is the density of the cooling water, v is the flow rate of the cooling water, A 1 T is the cross-sectional area of the cooling pipe 3 T is the water temperature of the water inlet 4 Water temperature at the water outlet;
the electron reflectance of the test piece was found to be:
t is obtained by measuring the temperature by a water inlet temperature sensor 3 Water outlet temperature sensorMeasuring the temperature by a device to obtain T 4 The temperature sensor of the test piece measures the temperature to obtain T 2 The vacuum chamber measurement system obtains T 1 The detection system of the electron gun obtains U, I, and the electron reflectivity of the test piece material can be calculated according to the measurement data.
According to the invention, the heat sink with the water pipeline is arranged on the back of the material to be measured, the heat insulation material is arranged under the heat sink to reduce errors, then the real environment of EAST is simulated in the vacuum environment to bombard the surface of the material, and the energy added in the water is measured in a steady state, so that the value of the electronic reflectivity is calculated.
The invention has the advantages that: according to the invention, through testing and calculating the electron reflectivity of the EAST facing the plasma component material, the characteristics of the plasma component material are more comprehensively known, so that indexes such as material sputtering and material temperature can be more comprehensively analyzed in an EAST operation test; meanwhile, the material temperature corresponding to different electronic scanning power densities can be obtained under the condition of fixed cooling capacity during testing, and the material temperature is directly related to material surface sputtering and chemical sputtering, so that the method has important reference significance for more deeply researching the material sputtering problem.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
As shown in figure 1, an electronic reflectivity test platform suitable for EAST facing plasma component materials comprises a heat sink 3 with a water pipeline, wherein a water inlet and a water outlet of the heat sink 3 are respectively provided with a water inlet temperature sensor 2 and a water outlet temperature sensor 7, the heat sink 3 is fixedly arranged on a heat insulation board 4 made of heat insulation materials, a test piece 8 made of materials to be tested is fixedly arranged above the heat sink 3, the test piece 8 can be in good contact with the heat sink 3 through different connection modes, the test piece 8 is provided with the test piece temperature sensor 5 at different positions, the test piece temperature sensor 5 is fixed on the heat insulation board 4 through a fixing seat 6, the test platform is arranged in a vacuum chamber 1, and an electron gun 9 is arranged in the vacuum chamber 1 to provide electron gun scanning area 10 of the test piece 8 with electrons for scanning bombardment.
The electron reflectance calculation process comprises the following steps: :
from the law of conservation of energy:
Q L ＝Q A +Q R ，Q L ＝UI
wherein Q is L Loading power for electron gun, Q A To absorb total energy, Q R For reflecting total energy, U is the voltage applied to the electron gun, and I is the current applied to the electron gun;
then the electron reflectivity
q＝Q R /Q L ＝1-Q A /Q L
Q A ＝Q 1 +Q 2 +Q 3 +Q 4
Wherein Q is 1 For the energy taken away by the water flow in the heat exchange, Q 2 To test the energy lost by the thermal radiation of the part, Q 3 Energy lost to heat transfer, Q 4 The energy required by the temperature rise of the test piece to reach a steady state;
in the test, the test working conditions are all steady state, so Q 4 ＝0；
Because the platform adopts the heat insulating plate made of heat insulating material, the energy of heat conduction is ignored, so the value Q is taken 3 ＝0；
Where ε is the heat radiation coefficient of the test piece material, A is the heat radiation area of the test piece, and the Stefan-Boltzmann constant C=5.67×10 -8 W/m 2 ·k 4 ，T 2 To test the surface temperature of the part, T 1 Is the ambient temperature of the vacuum chamber;
Q 1 ＝cmΔT＝c·ρvA 1 ·(T 4 -T 3 )
wherein c is the specific heat of the cooling water, m is the mass of the cooling water, deltaT is the inlet-outlet temperature difference of the cooling water, ρ is the density of the cooling water, and v is the cooling waterFlow rate of cooling water, A 1 T is the cross-sectional area of the cooling pipe 3 T is the water temperature of the water inlet 4 Water at the water outlet.
The electron reflectance of the test piece was found to be:
according to the design condition of the platform in the invention, the water inlet temperature sensor 2 measures the temperature to obtain T 3 The temperature sensor 7 at the water outlet measures the temperature to obtain T 4 The temperature sensor 5 of the test piece measures the temperature to obtain T 2 The measurement system of the vacuum chamber 1 obtains T 1 The detection system of the electron gun 9 obtains U, I, and the electron reflectivity of the test piece material can be calculated according to the measurement data.
Claims (3)
1. An electron reflectivity test platform for a plasma-facing component, characterized by: the vacuum chamber is internally provided with a heat sink with a water pipeline, an inlet temperature sensor and an outlet temperature sensor are respectively arranged at a water inlet and a water outlet of the heat sink, a test piece made of a material to be tested is fixedly arranged above the heat sink, the temperature sensors of the test piece are respectively arranged at different positions of the test piece, an electron gun is arranged in the vacuum chamber, and the electron gun scans and bombards an electron scanning area of the test piece.
2. The electron reflectivity testing platform for a plasma-facing component of claim 1, further comprising: the heat sink is fixedly arranged on the heat insulation board made of heat insulation materials.
3. The electron reflectivity testing platform for a plasma-facing component of claim 2, further comprising: the temperature sensor of the test piece is fixed on the heat insulation plate through the fixing seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810025140.2A CN108226197B (en) | 2018-01-11 | 2018-01-11 | Electron reflectivity test platform and test method for plasma component |
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| CN201810025140.2A CN108226197B (en) | 2018-01-11 | 2018-01-11 | Electron reflectivity test platform and test method for plasma component |
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| CN108226197A CN108226197A (en) | 2018-06-29 |
| CN108226197B true CN108226197B (en) | 2023-11-28 |
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| CN109215818B (en) * | 2018-08-22 | 2022-04-15 | 中国科学院合肥物质科学研究院 | Limiter for fusion reactor plasma and material interaction test platform |
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| KR20060072908A (en) * | 2004-12-24 | 2006-06-28 | 한국항공우주연구원 | Uniform radiant heating test device using reflector of high reflectivity |
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2018
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