CN108177047B - The processing unit (plant) detection device and processing method of larger size panel strip optical element - Google Patents
The processing unit (plant) detection device and processing method of larger size panel strip optical element Download PDFInfo
- Publication number
- CN108177047B CN108177047B CN201711352614.6A CN201711352614A CN108177047B CN 108177047 B CN108177047 B CN 108177047B CN 201711352614 A CN201711352614 A CN 201711352614A CN 108177047 B CN108177047 B CN 108177047B
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- China
- Prior art keywords
- optical element
- lath
- detection device
- strip optical
- plant
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0018—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor for plane optical surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
- B24B13/0055—Positioning of lenses; Marking of lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
A kind of processing unit (plant), detection device and the processing method of larger size panel strip optical element, the device includes that the processing unit (plant) includes assorted cold dishes formula frock clamp, standard single shaft polishing machine and detection device, the detection device includes the components such as vertical interferometer, computer control terminal and adjustable carrying vehicle, the present invention realizes lath-shaped optical element assorted cold dishes formula more than one piece and disposably processes, and realizes the whole disk surface testing of lath-shaped optical element of above-mentioned assorted cold dishes.The invention is suitable for the batch machining and detection of larger size panel strip optical element, has high-efficient, at low cost feature.
Description
Technical field
The present invention relates to the processing of lath-shaped optical element, especially a kind of processing unit (plant) of larger size panel strip optical element
Detection device and processing method.
Background technique
Lath-shaped optical element is in fields such as high power laser system, laser manufacture, increasing material manufacturing, space optics and military affairs
More and more extensive application is obtained.Current lath-shaped optical element develops towards big radius-thickness ratio and large scale direction.Currently
Lath-shaped optical element face deformation occurs since the influence of self weight is easy to be deformed in process；In addition plus
Work mode generally uses monolithic cooked mode, and processing efficiency is extremely low and stability, consistency are poor.
Summary of the invention
The purpose of the present invention is to provide a kind of processing unit (plant) detection device of larger size panel strip optical element and processing
Method, he overcomes current lath-shaped optical element, especially heavy caliber lath-shaped optical element monolithic, and processing efficiency is low, processing
Process face deformationization is big, can not achieve the defect of mass processing.The present invention utilizes special frock clamp and detection device, real
Show lath-shaped optical element assorted cold dishes formula more than one piece disposably to process and whole disk surface testing, high in machining efficiency, processing cost is low, can
Realize the mass processing of lath-shaped optical element.
Technical scheme is as follows:
A kind of processing unit (plant) and detection device of larger size panel strip optical element, it is characterized in that the processing unit (plant) includes
Assorted cold dishes formula frock clamp and standard single shaft polishing machine；The assorted cold dishes formula frock clamp includes: tightening member, workpiece substrate and upper disk machine
Structure；Lath-shaped optical element to be processed is bonded on the workpiece substrate, and the workpiece substrate and the upper disc mechanism are logical
Tightening member is crossed to link together；
The detection device includes: standard mirror assembly, for the adjustable carrying of whole plate strip optical element placement to be measured
Vehicle, computer control terminal, vertical interferometer, face shape display end and workbench；The standard mirror assembly and the vertical interference
Instrument is fixedly connected to be placed in rack from bottom to top and be used cooperatively, and has a through-hole on the work top, successively sets
Computer control terminal, rack, face shape display end are set, the vertical interferometer and standard mirror assembly are located at the upper of the through-hole
Side, the vertical interferometer and face shape display end are connected with the computer control terminal respectively, and the adjustable carrying vehicle is set
Under the work top and it is located at below the vertical interferometer.
Parallel via holes are provided on the workpiece substrate, are grasped convenient for the heat dissipation of lath-shaped optical element process and lower wall
Make；The size of workpiece substrate can be adjusted according to the length and width of lath-shaped optical element.
The vertical interferometer is using vertical structure and is furnished with linear guide, can be before and after guide rail is in table plane
Side-to-side movement, convenient for measuring the face graphic data of whole plate strip optical element different zones to be measured.
The height of the adjustable carrying vehicle and feeding are adjustable, convenient for detection；It is additionally equipped with idler wheel and retaining mechanism, is convenient for
Motion and standstill.
Larger size panel strip optics is processed using the processing unit (plant) and detection device of above-mentioned larger size panel strip optical element
The method of element, it is characterized in that this method includes the following steps:
1) workpiece substrate is lain on workbench, the uniform stationing glue special on workpiece substrate；By lath-shaped light
Element is uniform, parallel arrangement carries out assorted cold dishes on the workpiece substrate；Whole disk is formed after glue dries, workpiece cement
Lath-shaped optical element overturns the whole plate strip optical element, and the upper disc mechanism is fitted in the work
The workpiece substrate and upper disc mechanism are fixed together by the bottom of part substrate using tightening member；
2) workpiece for the entire frock clamp that assorted cold dishes are completed is placed on to the polishing of the standard single shaft polishing machine down
On disk, the stylus of standard single shaft polishing machine is attached with upper disc mechanism；
3) starting standard single shaft polish electromechanical source, fill polishing fluid, pair assorted cold dishes formula more than one piece lath-shaped optical element (3) into
The disposable processing of row；
4) uniaxial machine out of service, by under frock clamp whole disc picking, with deionized water by the whole plate strip optics
It after element is rinsed well, is placed on adjustable carrying vehicle, shifts the underface of the vertical interferometer by adjustable carrying vehicle；It opens
It moves the computer control terminal and face shape display end and opens surface testing software, adjust the vertical interferometer and standard mirror
The pitch angle and distance of component, and the height of whole plate strip optical element to be measured is adjusted, until on the face shape display end
It shows clearly face shape interference fringe and records data, complete surface testing；
5) when the surface testing of whole plate strip optical element is unsatisfactory for requiring, then return step 2), when whole plate strip
The surface testing of optical element is met the requirements, then is entered in next step
6) by the lath-shaped optical element lower wall.
The invention has the advantages that
1) frock clamp and detection device are utilized, lath-shaped optical element assorted cold dishes formula more than one piece is realized and disposably adds
Work and whole disk surface testing, high in machining efficiency, processing cost is low, it can be achieved that the mass of lath-shaped optical element is processed.
2) vertical interferometer of the present invention, which can be realized, all around moves, and can realize face shape dynamic detection.
Detailed description of the invention
Fig. 1 is larger size panel strip optical element of the present invention processing assorted cold dishes formula frock clamp schematic diagram used；
Fig. 2 is larger size panel strip optical element on-line quick detection schematic device；
In Fig. 1: 1- tightening member, 2- workpiece substrate, 3- lath-shaped optical element, the upper disc mechanism of 4-；
In Fig. 2: 5- standard mirror assembly, 6- whole plate strip optical element to be measured, 7- is adjustable carrying vehicle, the control of 8- computer
End, the vertical interferometer of 9-, the face 10- shape display end, 11- workbench；
Specific embodiment
Below with reference to embodiment and attached drawing, the invention will be further described, but protection model of the invention should not be limited with this
It encloses.
Refering to fig. 1 and Fig. 2, as seen from the figure, the processing unit (plant) and detection device of larger size panel strip optical element of the present invention,
The processing unit (plant) includes assorted cold dishes formula frock clamp and standard single shaft polishing machine；The assorted cold dishes formula frock clamp include: tightening member 1,
Workpiece substrate 2 and upper disc mechanism 4；Lath-shaped optical element 3 to be processed is bonded on the workpiece substrate 2, the workpiece base
Plate 2 is linked together with the upper disc mechanism 4 by tightening member 1；
The detection device includes standard mirror assembly 5, adjustable carrying vehicle 7, computer control terminal 8, vertical interferometer 9, face
Shape display end 10 and workbench 11；The standard mirror assembly 5 is fixedly connected with juxtaposition with the vertical interferometer 9 from bottom to top
In being used cooperatively in rack, there is a through-hole on 11 face of workbench, set gradually computer control terminal 8, rack, face
Shape display end 10, the vertical interferometer 9 and standard mirror assembly 5 are located at the top of the through-hole, the vertical interference
Instrument 9 and face shape display end 10 are connected with the computer control terminal 8 respectively, and the adjustable carrying vehicle 7 is placed in the work
The lower section of the vertical interferometer 9 under 11 face of platform.
Parallel via holes are provided on the workpiece substrate 2, heat dissipation and lower wall convenient for lath-shaped optical element process
Operation；The size of workpiece substrate 2 can be adjusted according to the length and width of lath-shaped optical element.
The vertical interferometer 9 is using vertical structure and is furnished with linear guide, can be before guide rail is in table plane
Side-to-side movement afterwards, convenient for measuring the face graphic data of whole 6 different zones of plate strip optical element to be measured.
The height of the adjustable carrying vehicle 7 and feeding are adjustable, convenient for detection；It is additionally equipped with idler wheel and retaining mechanism, just
In motion and standstill.
Larger size panel strip optics is processed using the processing unit (plant) and detection device of above-mentioned larger size panel strip optical element
The method of element, this method include the following steps:
1) workpiece substrate 2 is lain on workbench, the uniform stationing glue special on workpiece substrate 2；By lath-shaped
Optical element 3 is uniform, parallel arrangement carries out assorted cold dishes on the workpiece substrate 2；It is formed after glue dries, workpiece cement
One whole plate strip optical element 6 including workpiece substrate 2, the whole plate strip optical element 6 is overturn, will be described
Upper disc mechanism 4 be fitted in the bottom of the workpiece substrate 2, using tightening member 1 by the workpiece substrate 2 and upper disk machine
Structure 4 is fixed together；
2) workpiece for the entire frock clamp that assorted cold dishes are completed is placed on to the polishing of the standard single shaft polishing machine down
On disk, the stylus of standard single shaft polishing machine and upper disc mechanism 4 are attached；
3) starting standard single shaft polish electromechanical source, fill polishing fluid, pair assorted cold dishes formula more than one piece lath-shaped optical element 3 carry out
Disposable processing；
4) uniaxial machine out of service, by under frock clamp whole disc picking, with deionized water by the whole plate strip optics
After element 6 is rinsed well, be placed on adjustable carrying vehicle 7, shifted by adjustable carrying vehicle 7 the vertical interferometer 9 just under
Side；The starting computer control terminal 8 and face shape display end 10 simultaneously open surface testing software, adjust the vertical interferometer
9 and standard mirror assembly 5 pitch angle and distance, and the height of whole plate strip optical element 6 to be measured is adjusted, until the face
Clearly face shape interference fringe is shown on shape display end 10 and records data, completes surface testing；
5) when the surface testing of whole plate strip optical element 6 is unsatisfactory for requiring, then return step 2), when whole plate strip
The surface testing of optical element 6 is met the requirements, then is entered in next step
6) by the lath-shaped optical element lower wall.
Experiment shows that the present invention overcomes current lath-shaped optical elements, especially heavy caliber lath-shaped optical element list
Processing efficiency is low for piece, process face deformationization is big, can not achieve the defect of mass processing.The present invention is according to lath-shaped optics
The characteristics of element is processed realizes the assorted cold dishes formula processing of lath-shaped optical element using special frock clamp, every time can be real
Existing more than ten piece element simultaneous processings, and the stability and consistency processed are good.In addition, according to above-mentioned assorted cold dishes formula cooked mode,
Vertical interference checking device has been invented again, has realized the not disc on-line checking of whole disk workpiece, greatly improves detection effect
Rate.
Maximum feature of the invention is to realize the processing of whole disc type and detection of lath-shaped optical element, is greatly improved
Processing efficiency reduces processing cost, it can be achieved that the mass of the class component is processed.
Using special frock clamp and detection device, realizes lath-shaped optical element assorted cold dishes formula more than one piece and disposably process
High in machining efficiency with whole disk surface testing, processing cost is low, it can be achieved that the mass of lath-shaped optical element is processed.
Claims (5)
1. a kind of processing unit (plant) and detection device of larger size panel strip optical element, it is characterised in that the processing unit (plant) includes spelling
Disc type frock clamp and standard single shaft polishing machine；The assorted cold dishes formula frock clamp includes: tightening member (1), workpiece substrate (2) and upper
Disc mechanism (4)；Lath-shaped optical element (3) to be processed is bonded on the workpiece substrate (2), the workpiece substrate (2) with
The upper disc mechanism (4) is linked together by tightening member；
The detection device includes: standard mirror assembly (5), for adjustable the holding of whole plate strip optical element (6) placement to be measured
Carrier vehicle (7), computer control terminal (8), vertical interferometer (9), face shape display end (10) and workbench (11)；The standard microscope group
Part (5) is fixedly connected to be placed in rack from bottom to top and be used cooperatively with the vertical interferometer (9), in the workbench
(11) there is a through-hole on face, set gradually computer control terminal (8), rack, face shape display end (10), the vertical interference
Instrument (9) and standard mirror assembly (5) are located at the top of the through-hole, the vertical interferometer (9) and face shape display end (10)
It is connected respectively with the computer control terminal (8), the adjustable carrying vehicle (7) is placed in described under described workbench (11) face
Vertical interferometer (9) below.
2. the processing unit (plant) and detection device of larger size panel strip optical element according to claim 1, it is characterised in that
Parallel via holes are provided on the workpiece substrate (2), are operated convenient for the heat dissipation of lath-shaped optical element process and lower wall；Work
The size of part substrate (2) can be adjusted according to the length and width of lath-shaped optical element.
3. the processing unit (plant) and detection device of larger size panel strip optical element according to claim 1, it is characterised in that
The vertical interferometer (9) is simultaneously furnished with linear guide using vertical structure, can along guide rail in table plane all around
Movement, convenient for measuring the face graphic data of whole plate strip optical element (6) different zones to be measured.
4. the processing unit (plant) and detection device of larger size panel strip optical element according to claim 1, it is characterised in that
The height of the adjustable carrying vehicle (7) and feeding are adjustable, convenient for detection；It is additionally equipped with idler wheel and retaining mechanism, convenient for movement
With it is static.
5. the processing unit (plant) and detection device using the described in any item larger size panel strip optical elements of Claims 1-4 4 add
The method of work larger size panel strip optical element, it is characterised in that this method includes the following steps:
1) workpiece substrate (2) is lain on workbench, the uniform stationing glue special on workpiece substrate (2)；By lath-shaped
Optical element (3) is uniform, parallel arrangement carries out assorted cold dishes on the workpiece substrate (2)；After glue dries, workpiece cement
Whole plate strip optical element (6) is formed, the whole plate strip optical element (6) is overturn, by the upper disc mechanism
(4) it is fitted in the bottom of the workpiece substrate (2), using tightening member (1) by the workpiece substrate (2) and upper disc mechanism
(4) it is fixed together；
2) workpiece for the entire frock clamp that assorted cold dishes are completed is placed on down on the polishing disk of the standard single shaft polishing machine,
The stylus of standard single shaft polishing machine and upper disc mechanism (4) are attached；
3) starting standard single shaft polish electromechanical source, fill polishing fluid, pair assorted cold dishes formula more than one piece lath-shaped optical element (3) carry out one
Secondary property processing；
4) uniaxial machine out of service, by under frock clamp whole disc picking, with deionized water by the whole plate strip optical element
(6) it after rinsing well, is placed on adjustable carrying vehicle (7), shifts the vertical interferometer (9) by adjustable carrying vehicle (7)
Underface；The starting computer control terminal (8) and face shape display end (10) simultaneously open surface testing software, adjust described erect
The pitch angle and distance of formula interferometer (9) and standard mirror assembly (5), and adjust the height of whole plate strip optical element (6) to be measured
Degree completes surface testing until showing clearly face shape interference fringe on the face shape display end (10) and recording data；
5) when the surface testing of whole plate strip optical element (6) is unsatisfactory for requiring, then return step 2), when whole plate strip light
The surface testing for learning element (6) is met the requirements, then is entered in next step
6) by the lath-shaped optical element lower wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711352614.6A CN108177047B (en) | 2017-12-15 | 2017-12-15 | The processing unit (plant) detection device and processing method of larger size panel strip optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711352614.6A CN108177047B (en) | 2017-12-15 | 2017-12-15 | The processing unit (plant) detection device and processing method of larger size panel strip optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108177047A CN108177047A (en) | 2018-06-19 |
| CN108177047B true CN108177047B (en) | 2019-10-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711352614.6A Active CN108177047B (en) | 2017-12-15 | 2017-12-15 | The processing unit (plant) detection device and processing method of larger size panel strip optical element |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3905163A (en) * | 1974-03-06 | 1975-09-16 | Tropel | Lens making method |
| JPS618269A (en) * | 1984-06-22 | 1986-01-14 | Canon Inc | Curved-face polishing machine |
| CN101918176A (en) * | 2008-01-10 | 2010-12-15 | 株式会社纳米光学能量 | Be used to make the manufacture method of grinding attachment, optical element of optical element and the micrometric measurement device that the shape/size of the mould that is used to make optical element or optical element is carried out micrometric measurement |
| CN102435420A (en) * | 2011-09-20 | 2012-05-02 | 浙江师范大学 | Method for detecting intermediate frequency errors of optical element |
| CN202271259U (en) * | 2011-08-19 | 2012-06-13 | 上海中晶企业发展有限公司 | High-precision spherical polishing machine |
| CN203636544U (en) * | 2013-12-31 | 2014-06-11 | 焦作市巡返特种玻璃厂 | Glass edge grinding machine |
| CN106565105A (en) * | 2016-11-04 | 2017-04-19 | 中国科学院上海光学精密机械研究所 | Full-aperture film-coating clamp for large-dimension optical component |
-
2017
- 2017-12-15 CN CN201711352614.6A patent/CN108177047B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3905163A (en) * | 1974-03-06 | 1975-09-16 | Tropel | Lens making method |
| JPS618269A (en) * | 1984-06-22 | 1986-01-14 | Canon Inc | Curved-face polishing machine |
| CN101918176A (en) * | 2008-01-10 | 2010-12-15 | 株式会社纳米光学能量 | Be used to make the manufacture method of grinding attachment, optical element of optical element and the micrometric measurement device that the shape/size of the mould that is used to make optical element or optical element is carried out micrometric measurement |
| CN202271259U (en) * | 2011-08-19 | 2012-06-13 | 上海中晶企业发展有限公司 | High-precision spherical polishing machine |
| CN102435420A (en) * | 2011-09-20 | 2012-05-02 | 浙江师范大学 | Method for detecting intermediate frequency errors of optical element |
| CN203636544U (en) * | 2013-12-31 | 2014-06-11 | 焦作市巡返特种玻璃厂 | Glass edge grinding machine |
| CN106565105A (en) * | 2016-11-04 | 2017-04-19 | 中国科学院上海光学精密机械研究所 | Full-aperture film-coating clamp for large-dimension optical component |
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| Publication number | Publication date |
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| CN108177047A (en) | 2018-06-19 |
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