CN108176640A - A kind of drying means for improving laser gyro cavity cleaning degree - Google Patents
A kind of drying means for improving laser gyro cavity cleaning degree Download PDFInfo
- Publication number
- CN108176640A CN108176640A CN201711142522.5A CN201711142522A CN108176640A CN 108176640 A CN108176640 A CN 108176640A CN 201711142522 A CN201711142522 A CN 201711142522A CN 108176640 A CN108176640 A CN 108176640A
- Authority
- CN
- China
- Prior art keywords
- cavity
- laser gyro
- drying means
- cleaning
- ethyl alcohol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/14—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects using gases or vapours other than air or steam, e.g. inert gases
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/06—Carrying-off electrostatic charges by means of ionising radiation
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Micromachines (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses a kind of drying means for improving laser gyro cavity cleaning degree, belong to optical element cleaning field, and this method effectively avoids housing surface from being secondarily contaminated, and improves the cleanliness factor after cavity cleaning.Drying means rinses cavity using the deionized water of heat this method mainly after laser gyro cavity cleaning, absolute ethyl alcohol is made fully to be infiltrated in housing surface again, finally high pure nitrogen is blown using ion wind gun to air-dry absolute ethyl alcohol, the moisture and dust avoided in natural air falls on housing surface, eliminate housing surface electrostatic, it is ensured that element surface not adsorbent particles in the drying process.
Description
Technical field
The invention belongs to optical element cleaning technique fields, are related to cleanliness factor after a kind of raising laser gyro cavity cleans
Drying means.
Background technology
Laser gyro has very extensive as accurate inertial navigation device in fields such as Aeronautics and Astronautics, navigation and guided missiles
Application.The core of laser gyro is the resonant cavity of an internal holes line structure complexity, and cavity passes through optical cement, indium weldering side
Formula is assembled with speculum, electrode combination, needs that the vibratory impulse of space adverse circumstances can be born after assembling.If it is dirty to there is residual in cavity
Object is contaminated, the adhesive force of parts and cavity will be reduced, influences the sealing performance of resonator, therefore the cleanliness factor of cavity is to restrict to swash
The key factor of optical circulator reliability and stability.
At present, the cleaning method of laser gyro cavity is mainly the mechanism and chemistry using ultrasonic cleaning apparatus
Emulsification and the sequence of chemical reaction of cleaning agent, are realized to various organic matters remaining after optical manufacturing, inorganic particle, metal
The pollutants such as ion effectively remove, and processing is finally dried, and obtain clean optical cavity.Drying process is as cavity group
Last sequence before dress, deals with improperly and is easy to cause secondary pollution to cleaning process.
Common drying means has hot blast drying, high temperature drying, freeze-drying, slow lifting certainly after laser gyro cavity cleans
The methods of right drying and fiber cloth wipe, these methods often result in cavity for the water solvent cleaning technique generally used at present
Remained on surface water mark mark, and adsorb some dirt particles since surface generates electrostatic, in some instances it may even be possible to postorder is caused to remove two
Cause the generation of beauty defects during secondary pollutant.
Invention content
A kind of drying means after being cleaned the purpose of the present invention is to provide laser gyro cavity, effectively avoids housing surface
It is secondarily contaminated, improves the cleanliness factor after cavity cleaning.
Drying means after laser gyro cavity cleaning proposed by the present invention, the device needed include：Cavity cleans tooling,
Deionized water heating equipment has container, the High Purity Nitrogen gas cylinder of lid, ion wind gun.Its process includes the following steps：
(1) laser gyro cavity after cleaning is placed on scavenger to load onto, hand-held tooling goes heat of the cavity in flowing
It is rinsed under ionized water, the temperature of hot deionized water is 60 DEG C~70 DEG C, and washing time is 1min~3min；
(2) quantitative absolute ethyl alcohol is measured, is poured into the container of lid；
(3) laser gyro cavity is placed in absolute ethyl alcohol and impregnates by (hand-held tooling), soaking time 2min~5min, leaching
Covered container lid during bubble；
(4) ion wind gun with nitrogen cylinder is connect, adjusts the pressure reducer of nitrogen cylinder, reach the wind-force of ion wind gun
150grams~180grams；
(5) (hand-held tooling) takes out cavity from absolute ethyl alcohol, and cavity surrounding is blown with the ion wind gun of connection nitrogen cylinder
Gas, until housing surface absolute ethyl alcohol thoroughly air-dries；
(6) ion wind gun is closed, cavity is placed in hundred grades of clean Storage Cabinets and is stored.
Deionized water index/rank as described above is EW- I or EW- II.
The rank of absolute ethyl alcohol as described above is MOS grades or electron level.
Ion wind gun as described above is Simco-Ion Top Gun or other similar models, using AC ionization techniques, is carried
It for stable positive and negative charge, is blown out by compressed nitrogen, is neutralized the electrostatic on body surface, achieve the purpose that eliminate electrostatic.
The beneficial effects of the present invention are：
Compared with drying means after the cleaning of currently used optical element, after laser gyro cavity cleaning proposed by the present invention
Drying means rinses cavity using the deionized water of heat, reduces housing surface tension, improves the wetability of housing surface,
Absolute ethyl alcohol is made fully to be infiltrated in housing surface, then absolute ethyl alcohol is dried up by high pure nitrogen, is avoided in natural air
Moisture and dust fall on housing surface, while eliminate housing surface electrostatic using the ion that ion wind gun generates, it is ensured that element table
Face not adsorbent particles in the drying process, avoid the secondary pollution in drying process, the surface improved after cavity cleaning is clean
Cleanliness.
Description of the drawings
Fig. 1 cleans tooling for cavity.
Fig. 2 a are surface of the cavity after hot blast drying；
Fig. 2 b are cavity by dried surface in embodiment 1；
Fig. 3 a are surface of the cavity after lifting spontaneously dry slowly；
Fig. 3 b are cavity by dried surface in embodiment 2.
1- shadoofs, 2- pedestals, 3- is water stain, 4- adsorption particles.
Specific embodiment
With reference to embodiment, present invention is described.
Embodiment 1：
A kind of drying means for improving cleanliness factor after laser gyro cavity cleans, includes the following steps：
(1) cavity after cleaning is placed on scavenger to load onto, hold tooling by cavity flowing hot deionized water
It is rinsed under (EW- II), temperature 60 C, time 3min；
(2) quantitative absolute ethyl alcohol is measured, is poured into the container of lid；
(3) cavity is placed in absolute ethyl alcohol (MOS grades) by hand-held tooling impregnates, time 2min, on soaking process middle cover
Container lid；
(4) ion wind gun with nitrogen cylinder is connect, adjusts the pressure reducer of nitrogen cylinder, reach the wind-force of ion wind gun
160grams；
(5) it holds tooling and cavity is taken out from absolute ethyl alcohol, blown with the ion wind gun of connection nitrogen cylinder to cavity surrounding,
Until housing surface absolute ethyl alcohol thoroughly air-dries；
(6) ion wind gun is closed, cavity is placed in hundred grades of clean Storage Cabinets and is stored.
Implementation result is analyzed：Dried laser gyro cavity takes out in hundred grades of clean Storage Cabinets after storage 10min,
On hundred grades of clean work stations, by bright light torch light source, with housing surface is observed under the stereomicroscope for amplifying 20 times, it can't see
Water mark and mark are remained, has no the dust and particle of absorption, surface is not secondary polluted.
Embodiment 2：
A kind of drying means for improving cleanliness factor after laser gyro cavity cleans, includes the following steps：
(7) cavity after cleaning is placed in tooling, hold tooling by cavity flowing hot deionized water (EW- I)
Lower flushing, 65 DEG C of temperature, time 2min；
(8) quantitative absolute ethyl alcohol is measured, is poured into the container of lid；
(9) cavity is placed in absolute ethyl alcohol (electron level) by hand-held tooling impregnates, time 3min, on soaking process middle cover
Container lid；
(10) ion wind gun with nitrogen cylinder is connect, adjusts the pressure reducer of nitrogen cylinder, reach the wind-force of ion wind gun
180grams；
(11) it holds tooling and cavity is taken out from absolute ethyl alcohol, cavity surrounding is blown with the ion wind gun of connection nitrogen cylinder
Gas, until housing surface absolute ethyl alcohol thoroughly air-dries；
(12) ion wind gun is closed, cavity is placed in hundred grades of clean Storage Cabinets and is stored.
Implementation result is analyzed：Dried laser gyro cavity takes out in hundred grades of clean Storage Cabinets after storage 10min,
On hundred grades of clean work stations, by bright light torch light source, with housing surface is observed under the stereomicroscope for amplifying 20 times, it can't see
Water mark and mark are remained, has no the dust and particle of absorption, surface is not secondary polluted.
Cavity cleans tooling, abbreviation tooling, including shadoof and pedestal.The multiple macropores of pedestal circumference uniform distribution.
Claims (10)
1. improve the drying means of cleanliness factor after laser gyro cavity cleaning, which is characterized in that include the following steps：
(1) laser gyro cavity after cleaning is placed on scavenger to load onto, hold tooling by cavity flowing hot deionization
Underwater to rinse, the temperature of hot deionized water is 60 DEG C~70 DEG C, and washing time is 1min~3min；
(2) quantitative absolute ethyl alcohol is measured, is poured into the container of lid；
(3) laser gyro cavity is placed in absolute ethyl alcohol and impregnated, soaking time 2min~5min holds on soaking process middle cover
Device lid；
(4) ion wind gun with nitrogen cylinder is connect, adjusts the pressure reducer of nitrogen cylinder, the wind-force of ion wind gun is made to reach 150grams
~180grams；
(5) cavity is taken out from absolute ethyl alcohol, is blown with the ion wind gun of connection nitrogen cylinder to cavity surrounding, until housing surface
Absolute ethyl alcohol thoroughly air-dries；
(6) ion wind gun is closed, cavity is placed in hundred grades of clean Storage Cabinets and is stored.
2. the drying means according to claim 1 for improving cleanliness factor after laser gyro cavity cleans, which is characterized in that root
Deionized water index levels are EW- I or EW- II.
3. improve the drying means of cleanliness factor after laser gyro cavity cleaning, which is characterized in that the rank of absolute ethyl alcohol is MOS grades
Or electron level.
4. improve the drying means of cleanliness factor after laser gyro cavity cleaning, which is characterized in that put laser gyro cavity
Enter absolute ethyl alcohol and all use tooling during taking out.
5. improve the drying means of cleanliness factor after laser gyro cavity cleaning, which is characterized in that using ion wind gun, make what is blown
Electrostatic on body surface is neutralized.
6. improve the drying means of cleanliness factor after laser gyro cavity cleaning, which is characterized in that by the laser gyro cavity after cleaning
Body is placed on scavenger and loads onto, and holds tooling by cavity under the hot deionized water of flowing in flushing process, hot deionized water
Temperature is 60 DEG C, washing time 3min.
7. improve the drying means of cleanliness factor after laser gyro cavity cleaning, which is characterized in that by the laser gyro cavity after cleaning
Body is placed on scavenger and loads onto, and holds tooling by cavity under the hot deionized water of flowing in flushing process, hot deionized water
Temperature is 65 DEG C, washing time 2min.
8. improve laser gyro cavity cleaning after cleanliness factor drying means, which is characterized in that by cavity be placed on MOS grades it is anhydrous
It is impregnated in ethyl alcohol, soaking time 2min.
9. improve laser gyro cavity cleaning after cleanliness factor drying means, which is characterized in that by cavity be placed on electron level without
It is impregnated in water-ethanol, soaking time 3min.
10. improve the drying means of cleanliness factor after laser gyro cavity cleaning, which is characterized in that connect ion wind gun and nitrogen cylinder
It connects, adjusts the pressure reducer of nitrogen cylinder, the wind-force of ion wind gun is made to reach 160grams.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711142522.5A CN108176640A (en) | 2017-11-17 | 2017-11-17 | A kind of drying means for improving laser gyro cavity cleaning degree |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711142522.5A CN108176640A (en) | 2017-11-17 | 2017-11-17 | A kind of drying means for improving laser gyro cavity cleaning degree |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108176640A true CN108176640A (en) | 2018-06-19 |
Family
ID=62545018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711142522.5A Pending CN108176640A (en) | 2017-11-17 | 2017-11-17 | A kind of drying means for improving laser gyro cavity cleaning degree |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108176640A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109622503A (en) * | 2018-12-04 | 2019-04-16 | 天津津航技术物理研究所 | A kind of lossless cleaning method after laser gyro cavity optical manufacturing |
| CN111921976A (en) * | 2020-07-15 | 2020-11-13 | 中国电子科技集团公司第二十四研究所 | Method for improving cleaning quality of wedge welding cleaver |
| CN114289872A (en) * | 2022-03-07 | 2022-04-08 | 西安中科华芯测控有限公司 | Method for assembling ultrafast laser mirror for miniature laser gyroscope |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101175579A (en) * | 2005-05-13 | 2008-05-07 | Sez股份公司 | Method for drying a surface |
| CN106341992B (en) * | 2005-06-15 | 2010-08-04 | 中国航空工业第六一八研究所 | Laser gyro cavity and battery lead plate cleaning method |
| CN102151670A (en) * | 2010-12-31 | 2011-08-17 | 苏州市东元光电科技有限公司 | Method for cleaning and drying glass sheet |
| CN103111442A (en) * | 2013-02-27 | 2013-05-22 | 江苏华兰药用新材料股份有限公司 | Film washer |
| CN103186036A (en) * | 2013-04-08 | 2013-07-03 | 常州同泰光电有限公司 | Simple mask-cleaning method |
| CN105340057A (en) * | 2013-04-30 | 2016-02-17 | 康宁股份有限公司 | Method of cleaning glass substrates |
| US20160079097A1 (en) * | 2011-04-15 | 2016-03-17 | Stmicroelectronics S.R.L. | Apparatus for processing semiconductor wafers, in particular for carrying out a polymers removal process step |
| CN106862114A (en) * | 2017-02-09 | 2017-06-20 | 同济大学 | A kind of cleaning method before lbo crystal surface coating |
-
2017
- 2017-11-17 CN CN201711142522.5A patent/CN108176640A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101175579A (en) * | 2005-05-13 | 2008-05-07 | Sez股份公司 | Method for drying a surface |
| CN106341992B (en) * | 2005-06-15 | 2010-08-04 | 中国航空工业第六一八研究所 | Laser gyro cavity and battery lead plate cleaning method |
| CN102151670A (en) * | 2010-12-31 | 2011-08-17 | 苏州市东元光电科技有限公司 | Method for cleaning and drying glass sheet |
| US20160079097A1 (en) * | 2011-04-15 | 2016-03-17 | Stmicroelectronics S.R.L. | Apparatus for processing semiconductor wafers, in particular for carrying out a polymers removal process step |
| CN103111442A (en) * | 2013-02-27 | 2013-05-22 | 江苏华兰药用新材料股份有限公司 | Film washer |
| CN103186036A (en) * | 2013-04-08 | 2013-07-03 | 常州同泰光电有限公司 | Simple mask-cleaning method |
| CN105340057A (en) * | 2013-04-30 | 2016-02-17 | 康宁股份有限公司 | Method of cleaning glass substrates |
| CN106862114A (en) * | 2017-02-09 | 2017-06-20 | 同济大学 | A kind of cleaning method before lbo crystal surface coating |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109622503A (en) * | 2018-12-04 | 2019-04-16 | 天津津航技术物理研究所 | A kind of lossless cleaning method after laser gyro cavity optical manufacturing |
| CN111921976A (en) * | 2020-07-15 | 2020-11-13 | 中国电子科技集团公司第二十四研究所 | Method for improving cleaning quality of wedge welding cleaver |
| CN111921976B (en) * | 2020-07-15 | 2022-02-01 | 中国电子科技集团公司第二十四研究所 | Method for improving cleaning quality of wedge welding cleaver |
| CN114289872A (en) * | 2022-03-07 | 2022-04-08 | 西安中科华芯测控有限公司 | Method for assembling ultrafast laser mirror for miniature laser gyroscope |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108176640A (en) | A kind of drying means for improving laser gyro cavity cleaning degree | |
| CN102886367B (en) | Cleaning method for precise aluminium alloy components | |
| CN103100539B (en) | Device and method for decontaminating surface of optical element | |
| CN107460487B (en) | High pressure oxygen inner wall of the pipe cleaning by degreasing method | |
| JPH03140485A (en) | Method and device for degreasing and washing | |
| CN102899674B (en) | Cleaning method of precise stainless steel parts under high vacuum and strong radiation environment | |
| CN105215008B (en) | Extract the gas nozzle structure of cleaning residual gas | |
| CN103111441A (en) | Device and method for cleaning partial pollutant on surfaces of clean materials | |
| CN103184463A (en) | Acid dipping device used for nuclear rod jacketing tube and having function of preventing acid wash from leaking | |
| JP2009248060A (en) | Cleaning apparatus | |
| KR100911657B1 (en) | The dry decontamination apparatus of radioactive metallic waste and method thereof | |
| CN103008293B (en) | Tiny hole cleaning method | |
| US20040052680A1 (en) | Treatment of environmental unit atmosphere and/or interior with generation of radicals | |
| CN106583950A (en) | Laser cutting machine movable type smoke exhaust device | |
| TW202330114A (en) | Drying system for silicon wafers includes a slow pull-up tank and a gas purging device | |
| CN107607556B (en) | Multistage plays the Inner surface test method of perpendicular hydraulic cylinder cylinder barrel | |
| CN211100539U (en) | Sample loading device for transmission electron microscope plasma cleaning instrument | |
| CN106341992B (en) | Laser gyro cavity and battery lead plate cleaning method | |
| DE102020208429A1 (en) | PROCESS AND SYSTEM FOR CLEANING OBJECTS FOR USE IN VACUUM SYSTEMS AND / OR OPTICAL EQUIPMENT FOR MICROLITHOGRAPHY | |
| CN203927947U (en) | A kind of three wastes treatment pond comprehensive utilization system for tail-gas | |
| JP2005188791A (en) | Vacuum drying device | |
| CN109719081A (en) | A kind of cleaning method of devitrified glass | |
| JPH03249983A (en) | Method and device for washing article | |
| CN112827927A (en) | Chemical cleaning process for bearing | |
| CN204712302U (en) | A kind of plastic cement process gas cyclic processing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180619 |
|
| RJ01 | Rejection of invention patent application after publication |