CN108169872A - A kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus - Google Patents
A kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus Download PDFInfo
- Publication number
- CN108169872A CN108169872A CN201711475116.0A CN201711475116A CN108169872A CN 108169872 A CN108169872 A CN 108169872A CN 201711475116 A CN201711475116 A CN 201711475116A CN 108169872 A CN108169872 A CN 108169872A
- Authority
- CN
- China
- Prior art keywords
- flexible hinge
- screw thread
- retarder
- flexible
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Telescopes (AREA)
- Transmission Devices (AREA)
Abstract
The invention discloses a kind of high-precisions based on flexible hinge, high stable reflector adjusting apparatus, including at least three flexible support mechanisms, flexible support mechanism structure is consistent, including motor, flexible hinge, difference screw thread retarder and displacement sensor, motor is placed in the both ends of axis, motor is fixedly connected at the cage connection of difference screw thread retarder with flexible hinge, it opposite can be slided between the shell of difference screw thread retarder, flexible hinge shape is eight-sided formation, four faces of orthogonal direction are non-deformable mounting surface, in addition other four faces are deformable thin-slab structure to flexible hinge;Motor drives difference screw thread speed reducer housing to be axially moved, and then flexible hinge deformable sheet is driven to change angle, it realizes moving radially for the non-deformable mounting surface of flexible hinge, is adjusted by the three-dimensional between flexible support mechanism, realize the adjustment to being mounted on the speculum on non-deformable mounting surface.
Description
Technical field
The present invention relates to a kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus, belong to precision machinery
Field, the adjustment link available for the requirement of the high precision high stability of space optical remote camera and ground precision instrument.
Background technology
In most cases urban tour ism is during the adjustment of ground, by general multi-dimensional adjustment platform or industry
Mirror assembly is adjusted in place by mechanical arm, passes through the side of gasket between the structural body of reconditioning mirror assembly and optical instrument
Formula is effectively fixed by mirror assembly, then removes general adjustment mechanism.The advantages of program is to realize that simply shortcoming is
Remaining position deviation can be generated in component fixation procedure, in addition which is disposable adjustment, can not carry out in-orbit amendment;
The country has research institute using Hexapod types platform mechanism as mirror adjustment mechanism, which is adjustment a little
Degree of freedom is flexible, precision is high, can theoretically realize by the adjustment of tune speculum six-freedom degree, but six freedom of the mechanism
Have very strong coupling between degree, control process is complicated, and organization volume weight is big and mechanical environmental characteristics are poor, there is presently no
The practical application example of rail.
Invention content
The technology of the present invention solves the problems, such as:In order to overcome the deficiencies of the prior art, a kind of height based on flexible hinge is provided
Precision, high stable reflector adjusting apparatus realize that mirror assembly is in-orbit and the adjustment of the three degree of freedom on ground.
The present invention technical solution be:
A kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus, including at least three flexible support machines
Structure, flexible support mechanism structure is consistent, is placed in including motor, flexible hinge, difference screw thread retarder and displacement sensor, motor
The both ends of axis, motor are fixedly connected at the cage connection of difference screw thread retarder with flexible hinge, difference screw thread retarder
Shell between opposite can slide,
Flexible hinge shape is eight-sided formation, and four faces of orthogonal direction are non-deformable mounting surface, and flexible hinge is another
Other outer four faces are deformable thin-slab structure;
Motor drives difference screw thread speed reducer housing to be axially moved, and then flexible hinge deformable sheet is driven to change angle
Degree realizes moving radially for the non-deformable mounting surface of flexible hinge, is adjusted, is realized to peace by the three-dimensional between flexible support mechanism
The adjustment of speculum on non-deformable mounting surface.
In four non-deformable mounting surfaces of orthogonal direction two opposite faces respectively with motor and difference screw thread retarder
Be fixedly connected at cage connection, other two opposite face is connected with displacement measurement face, displacement sensor by with displacement measurement face
Contact perceive flexible hinge radial displacement variation.
Difference screw thread retarder is dual redundant, and is fixedly and coaxially connected.
Twice reverse thread is provided on axis, the rotation of motor drives the shaft rotation of difference screw thread retarder to move, passes through difference
Divide the tumbler of screw thread retarder that difference screw thread speed reducer housing is driven to be axially moved.
Two-dimensional rotary is realized using the combination of motion in one dimension radially of each flexible support mechanism and is being moved radially
Under unanimous circumstances, axially it is moved one-dimensionally along speculum, realizes and the three-dimensional of speculum is adjusted.
The thickness of deformable sheet is 1-2mm.
Flexible support mechanism is three, and three is distributed in hexagonal angle.
The advantages of the present invention over the prior art are that:
(1) present invention is designed by the flexible hinge of 3 different directions, both ensure that the degree of freedom on adjustment direction
Release, it is ensured that smaller driving moment requirement, it is ensured that speculum gapless adjusts;Simultaneously further through the distribution of three hexagonal angles
Mode ensure that the realization for being adjusted speculum overall support rigidity, and it is harsh to ensure that overall structure can be subjected to space loading
Transmitting mechanical environment;
(2) present invention is met entire component and is revolved around the bidimensional of X-axis and Y-axis using the one-dimensional straight line adjustment of three positions
Turn and adjusted along the one-dimensional translation of Z axis, adjust control process and structure design is simple, Project Realization is easy, and fully meets
Optical system in-orbit adjustment demand;
(3) single set flexible support mechanism of the invention is designed by two-way motor parallel, realizes Liang Tao mechanisms each other
Backup design greatly improves the reliability of mechanism, meets the high reliability request of urban tour ism.
Description of the drawings
Fig. 1 is flexible support mechanism structure chart of the present invention;
Fig. 2 is flexible support mechanism structure sectional view of the present invention;
Fig. 3 is reflector adjusting apparatus structure chart of the present invention;
Fig. 4 adjusts schematic diagram for reflector adjusting apparatus of the present invention.
Specific embodiment
The present invention will be described in detail below in conjunction with the accompanying drawings.
A kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus, including at least three flexible support machines
Structure, preferably flexible support mechanism are three, and three is distributed in hexagonal angle, as shown in Figure 3.
Flexible support mechanism structure is consistent, including motor 1, flexible hinge 2, difference screw thread retarder 3 and displacement sensor
4, as shown in Figure 1 and Figure 2, respectively coaxially connected with a motor 1 at the both ends of axis, the shell of motor 1 and difference screw thread retarder 3
Junction is fixedly connected with flexible hinge 2, opposite can be slided between the shell of difference screw thread retarder 3,
2 shape of flexible hinge be eight-sided formation, four faces of orthogonal direction be non-deformable mounting surface, two of which phase
Opposite is fixedly connected respectively at 3 cage connection of motor 1 and difference screw thread retarder, other two opposite face is connected with displacement survey
Amount face, displacement sensor 4 perceive the variation of 2 radial displacement of flexible hinge by the contact with displacement measurement face, and flexible hinge 2 is another
Other outer four faces are deformable thin-slab structure;
Difference screw thread retarder 3 is dual redundant, and is fixedly and coaxially connected, and twice reverse thread, motor are provided on axis
Rotation the shaft rotation of difference screw thread retarder 3 is driven to move, the tumbler for passing through difference screw thread retarder 3 drives difference screw thread to slow down
3 shell of device is axially moved, and then 2 deformable sheet of flexible hinge is driven to change angle, realizes 2 non-deformable installation of flexible hinge
Face moves radially, and is adjusted by the three-dimensional between flexible support mechanism, realizes the reflection to being mounted on non-deformable mounting surface
The high-precision adjustment of mirror.
Two-dimensional rotary is realized using the combination of motion in one dimension radially of each flexible support mechanism and is being moved radially
Under unanimous circumstances, axially it is moved one-dimensionally along speculum, realizes and the three-dimensional of speculum is adjusted.
The thickness of deformable sheet is 1-2mm, and the thickness of deformable sheet is calculated according to the carrying of structure and rigidity requirement,
Preferably 1.5mm is thick.
For the speculum that needs adjust, as shown in figure 4, respectively one adjustment of setting can Z-direction tune in tri- installation points of A, B, C
Whole adjustment mechanism can realize being rotated around X of the optical element being adjusted by the different Z-direction displacement of three installation points, be revolved around Y
Turn and the adjustment along Z axis translation three degree of freedom, three high-precision adjustment mechanisms are identical.
Operation principle of the present invention is:It will be adjusted mirror assembly and optical lens ontology is installed on by flexure hinge mechanism
On, when needing adjustment, the displacement of control circuit as desired sends the motor rotation in order-driven control motor, motor
Drive the difference thread mechanism in motor that motor is converted into axial linear motion, so as to push flexible hinge or so
Two face relative motions, hinge is caused to deform, generation be adjusted between speculum mounting surface and camera lens ontology mounting surface
Relative motion, it is final to realize to by the adjustment of driving load.
The present invention's solves the problems, such as the in-orbit adjustment of high resolution space optical remote sensing camera mirror assembly high-precision,
The mechanism by 3 points of degree of freedom to different directions discharges and solves the in-orbit adjustment work(of gapless high stability of speculum
Can, while distributed by rational degree of freedom, it ensure that mirror assembly integrally has higher support stiffness.So as to make mechanism
Mechanical environmental characteristics.And the mechanism has the function of mechanical self-latching by using difference screw thread deceleration mechanism, utilizes simultaneously
The structure type of simple and compact realizes big gearratio, improves the precision of adjustment mechanism.To solve space optics precision instrument
Enter the orbit rear optical system minor change adjustment, provide effective means.
The content not being described in detail in description of the invention belongs to the known technology of those skilled in the art.
Claims (7)
1. a kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus, it is characterised in that:It is soft including at least three
Property supporting mechanism, flexible support mechanism structure is consistent, including motor (1), flexible hinge (2), difference screw thread retarder (3) and position
Displacement sensor (4),
Motor (1) is placed in the both ends of axis, motor (1) with the cage connection of difference screw thread retarder (3) at it is solid with flexible hinge 2
It is fixed to connect, it opposite can be slided between the shell of difference screw thread retarder 3,
Flexible hinge (2) shape be eight-sided formation, four faces of orthogonal direction be non-deformable mounting surface, flexible hinge (2)
In addition other four faces are deformable thin-slab structure;
Motor drives difference screw thread retarder (3) shell to be axially moved, and then flexible hinge (2) deformable sheet is driven to change angle
Degree realizes moving radially for flexible hinge (2) non-deformable mounting surface, is adjusted, realized by the three-dimensional between flexible support mechanism
To being mounted on the adjustment of the speculum on non-deformable mounting surface.
2. a kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus as described in claim 1, feature exist
In:In four non-deformable mounting surfaces of orthogonal direction two opposite faces respectively with motor (1) and difference screw thread retarder (3)
Be fixedly connected at cage connection, other two opposite face is connected with displacement measurement face, displacement sensor (4) by with displacement measurement
The contact in face perceives the variation of flexible hinge (2) radial displacement.
3. a kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus as described in claim 1, feature exist
In:Difference screw thread retarder (3) is dual redundant, and is fixedly and coaxially connected.
4. a kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus as claimed in claim 3, feature exist
In:Twice reverse thread is provided on axis, the rotation of motor drives the shaft rotation of difference screw thread retarder (3) to move, passes through difference
The tumbler of screw thread retarder (3) drives difference screw thread retarder (3) shell to be axially moved.
5. a kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus as described in claim 1, feature exist
In:Two-dimensional rotary is realized using the combination of motion in one dimension radially of each flexible support mechanism and is being moved radially unanimously
In the case of, it is axially moved one-dimensionally along speculum, realizes and the three-dimensional of speculum is adjusted.
6. a kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus as described in claim 1, feature exist
In:The thickness of deformable sheet is 1-2mm.
7. a kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus as described in claim 1, feature exist
In:Flexible support mechanism is three, and three is distributed in hexagonal angle.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711475116.0A CN108169872B (en) | 2017-12-29 | 2017-12-29 | High-precision and high-stability reflector adjusting device based on flexible hinge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711475116.0A CN108169872B (en) | 2017-12-29 | 2017-12-29 | High-precision and high-stability reflector adjusting device based on flexible hinge |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108169872A true CN108169872A (en) | 2018-06-15 |
CN108169872B CN108169872B (en) | 2020-09-18 |
Family
ID=62519846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201711475116.0A Active CN108169872B (en) | 2017-12-29 | 2017-12-29 | High-precision and high-stability reflector adjusting device based on flexible hinge |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN108169872B (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109031585A (en) * | 2018-08-31 | 2018-12-18 | 北京空间机电研究所 | A kind of fixed device of mirror support and its flexible support |
CN110687657A (en) * | 2019-09-23 | 2020-01-14 | 上海大学 | High-precision corner control flexible adjusting device |
CN110727077A (en) * | 2019-10-09 | 2020-01-24 | 中国航空工业集团公司洛阳电光设备研究所 | Centroid driving focusing mechanism based on flexible hinge |
CN110888220A (en) * | 2019-11-11 | 2020-03-17 | 中国科学院上海技术物理研究所 | Method for accurately adjusting installation position of turning reflector |
CN111474662A (en) * | 2020-06-04 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity horizontal focusing mechanism with compact structure |
CN111474663A (en) * | 2020-06-04 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity vertical focusing mechanism with compact structure |
CN114967115A (en) * | 2022-04-27 | 2022-08-30 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040189969A1 (en) * | 2003-03-14 | 2004-09-30 | Makoto Mizuno | Drive mechanism, exposure device, optical equipment, and device manufacturing method |
US20050046979A1 (en) * | 2003-06-24 | 2005-03-03 | Dave Hiley | Precision mirror displacement assembly |
CN102636859A (en) * | 2012-03-31 | 2012-08-15 | 中国科学院长春光学精密机械与物理研究所 | Optical element obliqueness adjusting mechanism with high load-bearing capacity |
CN103576283A (en) * | 2013-12-04 | 2014-02-12 | 中国工程物理研究院总体工程研究所 | Rapid reflective mirror system based on flexible supports |
CN103901576A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Fine adjustment mechanism of movable lens |
CN107065113A (en) * | 2017-05-18 | 2017-08-18 | 中国科学院长春光学精密机械与物理研究所 | High-precision six-freedom degree optical module pose adjusting apparatus |
-
2017
- 2017-12-29 CN CN201711475116.0A patent/CN108169872B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040189969A1 (en) * | 2003-03-14 | 2004-09-30 | Makoto Mizuno | Drive mechanism, exposure device, optical equipment, and device manufacturing method |
US20050046979A1 (en) * | 2003-06-24 | 2005-03-03 | Dave Hiley | Precision mirror displacement assembly |
CN102636859A (en) * | 2012-03-31 | 2012-08-15 | 中国科学院长春光学精密机械与物理研究所 | Optical element obliqueness adjusting mechanism with high load-bearing capacity |
CN103901576A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Fine adjustment mechanism of movable lens |
CN103576283A (en) * | 2013-12-04 | 2014-02-12 | 中国工程物理研究院总体工程研究所 | Rapid reflective mirror system based on flexible supports |
CN107065113A (en) * | 2017-05-18 | 2017-08-18 | 中国科学院长春光学精密机械与物理研究所 | High-precision six-freedom degree optical module pose adjusting apparatus |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109031585A (en) * | 2018-08-31 | 2018-12-18 | 北京空间机电研究所 | A kind of fixed device of mirror support and its flexible support |
CN109031585B (en) * | 2018-08-31 | 2020-11-20 | 北京空间机电研究所 | Reflector supporting and fixing device and flexible support thereof |
CN110687657A (en) * | 2019-09-23 | 2020-01-14 | 上海大学 | High-precision corner control flexible adjusting device |
CN110727077A (en) * | 2019-10-09 | 2020-01-24 | 中国航空工业集团公司洛阳电光设备研究所 | Centroid driving focusing mechanism based on flexible hinge |
CN110888220A (en) * | 2019-11-11 | 2020-03-17 | 中国科学院上海技术物理研究所 | Method for accurately adjusting installation position of turning reflector |
CN111474662A (en) * | 2020-06-04 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity horizontal focusing mechanism with compact structure |
CN111474663A (en) * | 2020-06-04 | 2020-07-31 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity vertical focusing mechanism with compact structure |
CN111474663B (en) * | 2020-06-04 | 2021-10-22 | 中国科学院长春光学精密机械与物理研究所 | High-rigidity vertical focusing mechanism with compact structure |
CN114967115A (en) * | 2022-04-27 | 2022-08-30 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
CN114967115B (en) * | 2022-04-27 | 2023-05-02 | 中国科学院西安光学精密机械研究所 | Large-stroke phase-shifting scanning device based on voice coil motor drive |
Also Published As
Publication number | Publication date |
---|---|
CN108169872B (en) | 2020-09-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN108169872A (en) | A kind of high-precision based on flexible hinge, high stable reflector adjusting apparatus | |
US5355743A (en) | Robot and robot actuator module therefor | |
US5986827A (en) | Precision tip-tilt-piston actuator that provides exact constraint | |
US9694501B2 (en) | Parallel link robot | |
CN105643604B (en) | A kind of submissive system of four-degree-of-freedom fine motion | |
JP5184839B2 (en) | Piezoelectric motor and camera device | |
CN107329231B (en) | Adjustable reflector Bipod flexible supporting structure, supporting device and adjusting method thereof | |
CN100372657C (en) | 3-degree-of-freedom 6-UPS tri-translational parallel robot | |
CN102794662B (en) | Six-degree-of-freedom position posture full-decoupling adjustable clamp | |
CN107932522B (en) | Five degree of freedom optical fabrication equipment and its working method | |
CN106886227A (en) | A kind of six degree of freedom high accuracy adjustment alignment system based on 6RRRPRR | |
EP3072789B1 (en) | Machine tool with walking apparatus | |
EP0347846A2 (en) | Actuator | |
TWI569285B (en) | Positioning stage | |
CN108413206B (en) | Six degree of freedom based on stroke amplifying mechanism driving decouples submissive parallel connection platform | |
CN103386680B (en) | A kind of parallel two degrees of freedom indicator device | |
Gloess et al. | Challenges of extreme load hexapod design and modularization for large ground-based telescopes | |
CN106838568A (en) | Series-parallel connection Three Degree Of Freedom cradle head mechanism | |
CN106990647B (en) | Industrial camera pose adjusting device | |
JP5582432B1 (en) | Helical scanning mechanism and three-dimensional positioning device | |
JP2002043820A (en) | Antenna- or radar-mounted driving unit | |
JP2000326272A (en) | Robot device | |
JP2969624B2 (en) | Translation device | |
CN103286778A (en) | Two-DOF (two degrees of freedom) rotation decoupling parallel mechanism | |
CN107617890B (en) | It is a kind of with the redundantly driven parallel bed executing agency for evading Strange properties |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |