CN108151877A - A kind of micro-hole spectrometer and spectrum reconstruction method - Google Patents
A kind of micro-hole spectrometer and spectrum reconstruction method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
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- G—PHYSICS
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
- G01J2003/282—Modified CCD or like
Abstract
A kind of micro-hole spectrometer and spectrum reconstruction method, the spectrometer are only made of light intensity detector and a micro-hole.Spectrum to be measured is incident on micro-hole, is propagated on light intensity detector after miniature diffraction by aperture.Light intensity detector records corresponding diffraction pattern.Then data processing is carried out to record diffraction pattern with algorithm proposed by the invention, you can accurate reconstruction spectrum to be measured.Further, since the miniature complete light transmission of bore portion, so all spectral components into spectrometer can all be detected by detector, thus its spectrographic detection range with ultra-wide.Since the spectrometer of the type is integrated with, simple in structure, cost is extremely low, light-weight, small（Volume can control within 1cm × 1cm × 1cm or even smaller）Numerous advantages, the optical frequency spectrometer of the type have a wide range of applications.It is such as mounted on satellite and is used for space exploration, it might even be possible to be integrated on smart mobile phone and carry out Pesticides Testing, air pollution analyte detection, water quality monitoring and medical diagnosis etc..
Description
Technical field
The present invention relates to spectral ranges, and in particular to a kind of micro-hole spectrometer and spectrum reconstruction method.
Background technology
Spectrometer is almost the basic tool in all modern science fields, such as Material Field, chemical field, archaeology text
Fields such as object and illicit drugs inspection, public safety etc..At present, most commonly seen spectrometer is with the dispersions such as grating member in the market
Part is divided.Although this kind of spectrometer can obtain the spectral measurement effect of many precisions.It is but various for spectrometer
Improvement never stops, particularly as miniaturization, cheap, easy-to-use direction stride forward [Opt.Express 20,489-
507(2012),Appl.Phys.Lett.100,231104(2012),Nature Photon.2 161-164(2008),
Nature Commun.1,59(2010)].And the spectrometer based on absorbing filter is a kind of scheme for being especially advantageous for miniaturization.
The quantum dot light spectrometer particularly occurred in recent years.Quantum dot light spectrometer is expected to using quantum dot as absorbing filter by light
Spectrometer narrows down to coin-size [Nature 523,67-70 (2015)].But the spectrometer based on absorbing filter, absorb filter
Usually to spectral component, there are natural absorptions for wave device.Only the light of specific wavelength wavelength could pass through absorbing filter.So it makes
Into its limited spectral investigative range.The present invention proposes third class spectrum detection instrument -- miniature hole spectrometer.The spectrometer
The method instead a very simple micro-hole of traditional dispersion element utilized and absorbing filter are abandoned.
The construction of entire spectrometer is very simple, it is only necessary to one micro-hole of placement before detector.Since micro-hole is complete light transmission,
Any spectral component in spectrum to be measured is incident on micro-hole, all can pass through micro-hole and reaches detector.Thus this method is compared
There is the spectrographic detection range of ultra-wide in absorbing filter spectrometer.Since the cost that micro-hole makes than grating and absorbs filter
Cheap more of wave device, so the price of the spectrometer is especially cheap.It is at low cost due to having simultaneously with the spectrometer, it is light-weight,
The advantage of small (volume can control within 1cm × 1cm × 1cm or even smaller).The type spectrometer will promote spectrum
The development of instrument, can be widely applied on satellite, it might even be possible to be integrated to mobile phone and be used in the Pesticides Testing of vegetables, air
Pollution is without detection and medical diagnosis etc..
Invention content
In order to overcome existing spectrometer technical deficiency, it is an object of the present invention to provide a kind of micro-hole spectrometer and rebuilding spectrums
Method has many advantages, such as that small-sized, cheap, light-weight, price is low, investigative range is wide, rebuilds spectrum quickly and accurately advantage.
The purpose of the present invention can be by being realized with lower section equation：
A kind of micro-hole spectrometer, including shading case 2, shading case 2 is equipped with micro-hole 1, shading case 2 and detector guard box
Light intensity detector 3 is equipped between 4, on the micro-hole 1 of spectrum incidence to be measured；Diffraction occurs on micro-hole 1 for spectrum to be measured, transmission
To light intensity detector 3, light intensity detector 3 records the mutually overlapping diffraction pattern of various spectral components, after parameter determines,
Diffraction pattern of the unthreaded hole through hole of arbitrary wavelength is fixed
The light intensity detector 3 uses CCD or CMOS.
The micro-hole 1 is not limited to circular hole, can be variously-shaped hole or the combination of pattern.
The micro-hole 1 stated can be phase type optical element.
A kind of method that spectrum is rebuild by miniature hole spectrometer, using algorithm to recording at diffraction pattern
Reason detaches various mutually overlapping spectral components, and then reconstruct spectrum to be measured, which is characterized in that detailed step is such as
Under：
If the intensity spectrum of a spectrum to be measured is E (λi) (λ hereiRepresent wavelength), spectrum to be measured is incident on hole, in hole
Upper generation diffraction, CCD records corresponding diffraction pattern I, and (m Δs x, n Δ y) sees below equation (1)
Iλi(m Δs x, n Δ y) is each wavelength X in spectrum to be measurediCorresponding diffraction pattern, (m, n) represent Iλi(mΔ
Matrix coordinate in x, n Δ y), npRepresent the number containing wavelength in spectrum to be measured, E (λi) it is Iλi(own in m Δs x, n Δ y)
Pixel light intensity value and value,For the E (λ shared by single pixeli) percentage.
In equation 1, (m Δs x, n Δ y) is known (recorded by light intensity detector such as CCD to total diffraction pattern I
Come), E (λi) andIt is unknown.Once the structure determination of hole spectrometer, the size in hole and with shape and hole from detector
The distance between determine that, according to fresnel diffraction theorem, the intensity distribution I' of diffraction patternλi(m Δs x, n Δ y) is just
It is to determine, can (I' here be represented by following metric cube journeyλi(m Δs x, n Δ y) and Iλi(relationship of m Δs x, n Δ y) meets item
Part Iλi(m Δs x, n Δ y)=C0I'λi(m Δs x, n Δ y), here C0For constant, diffraction pattern distribution will not be changed)：
I ' (m Δs x, n Δ y)=| FrTλ,z{P(mΔx0,nΔy0)}|2 (4)
FrT { } represents fresnel diffraction, P (m Δs x0,nΔy0) transmittance function in hole is represented, due to P (m Δs x0,nΔ
y0) it is Given information, so we can obtain I' according to equation 4λi(m Δs x, n Δ y), because of I'λi(m Δs x, n Δ y) is
Through acquiring, so can be in the hope of according to equation (5)
So far, there was only E (λ in equation 1i) it is unknown.It is worth noting that once the structure determination of spectrometer is got off
,It is exactly a fixed parameter.In a practical situation,Can be measured and be told by the producer of production bore spectrometer makes
It need not be measured for data processing, user in user or encapsulation to software
The preset parameterAlso it can be obtained by the method tested.It can (monochromatic light can be produced by monochromator with monochromatic light
It is raw) it gradually illuminates hole and records its diffraction pattern, then calculated with equation 5Value and be supplied to user or join this
Data processing is used in number encapsulation to software.
(each pixel can form duplicate with equation (1) shape equation the diffraction pattern I in m Δs x, n Δ y)
One linear equation, due to diffraction pattern I, (for m Δs x, n Δ y) containing a large amount of pixel, these pixels may be constructed one linearly
Equation group, due to(m Δs x, n Δ y) is known, can rebuild spectrum E (λ by boundary's equation group with Ii), in ideal situation
Under, we can set npEqual to nq(n herepIt is from diffraction pattern I (selected number of pixels in m Δs x, n Δ y)), because of np
=nq, solution of equations is unique, and still, under actual conditions, measurement error is inevitable, so we can utilize
Least square method obtains approximate solution, in the case where there is noise, npNot equal to nq.Under normal circumstances, np>nq.Error amount is got over
Greatly, npValue choose it is bigger.
The method of described reconstruction spectrum to be measured be by by each pixel of diffraction pattern as basic point come the side of structure
Journey group is to solve.
Linear solving equations that the method for described reconstruction spectrum to be measured is made up of pixels multiple in diffraction imaging or
Over-determined systems are completed.
Compared with prior art, the beneficial effects of the invention are as follows：
1st, price is low.Since the making of micro-hole is extremely simple, need to only be worn with card punch in lighttight material quotient miniature
Hole.So the price of entire spectrometer is concentrated mainly on the price (price for being equivalent to a detector) of detector.
2nd, small in volume.Because it is shorter that micro-hole and the distance of detection can be that 1cm is even foreshortened to.It is so entire
Spectrometer can be as most it is as compact.The making of micro-hole can select the material of light weight.Now CCD on the market or
CMOS is also very light, thus the weight of entire spectrometer can accomplish tens grams.
3rd, wide spectral region.As described above, miniature bore portion is complete light transmission, the spectral line all into spectrometer is all
Detector can be reached, detect in this way almost it is unrestricted (traditional wave filter be all only allow a finite bandwidth penetrate
Wave filter, so spectrographic detection range is also conditional).This method by the investigative range of spectrometer be increased to one it is very high
Height.That is the investigative range of detector and for this spectrometer detection range.
4th, high diffraction efficiency.Into spectrometer light almost entirely collected by detector, thus the diffraction of the spectrometer
Efficiency is close to 100%.
5th, the high efficiency of light energy utilization.We can be by adding the method increase of lens to enter spectrometer before micro-hole
Light beam.We on material can beat several micro-holes and increase into light, it might even be possible to increase light-inletting quantity with pure phase bit unit.
Description of the drawings
Fig. 1 is the schematic diagram of spectrometer of the present invention；
Fig. 2 is spectral simulation experimental measurements of the present invention；
Fig. 3 is spectrometer resolution analysis result of the present invention；
Fig. 4 is the spectrometer health noise performance analysis result of the present invention；
Wherein, 1 is micro-hole；2 be shading case；3 be light intensity detector；4 be detector guard box；
Specific embodiment party equation
Particular content in order to better understand the present invention and implementation process, below in conjunction with Figure of description, to implementing
The detailed process of miniature unthreaded hole spectrometer is described in detail.
As shown in Figure 1, a kind of light path system of miniature spectrometer, including micro-hole, shading case, detector and detector
Protection cap forms.The beam orthogonal of spectrum to be measured is incident on micro-hole, and diffraction occurs on micro-hole.By being placed on micro-hole
The detector of back records corresponding diffraction pattern.Then using algorithm of the present invention to diffraction pattern at
Reason, you can rebuild spectrum.In Fig. 1 a, micro-hole and detector distance are diffraction distance, can arbitrarily choose (as in the case of, go out
Consider in spectrometer geometric dimension, it is suitable that diffraction distance, which generally takes 1cm).The effect of shading case mainly prevent stray light into
Enter spectrometer and interference is generated to spectrometer.Detector protection cap one be in order to instrument appearance consider, second is that prevent detector by
To extraneous collsion damage.Fig. 1 b illustrate the detection process of spectrum, are divided into two stages：1. the acquisition of diffraction pattern；It is incident
Diffraction occurs on micro-hole for spectrum, has detector to record corresponding diffraction pattern.2. the later data processing of diffraction pattern,
Diffraction pattern is subjected to data processing with the method for the invention, reconstructs spectrum to be measured.
Embodiment 1
Embodiment one demonstrates the validity when present invention carries out spectral measurement.The survey of spectral measurement is carried out using the present invention
The results are shown in Figure 2 for amount.In this real-time example, Fig. 2 a are the micro-hole in spectrometer, and the size of Fig. 2 a is 1.024 × 1.024mm.
Fig. 2 b are the structure chart of spectrometer, and the distance of micro-hole CCD in spectrometer is 1cm.The number of arrays of CCD is 256 × 256 pictures
Element, the size of each pixel is 4 μm.Solid line portion in Fig. 2 d and Fig. 2 f distinguishes two curves of spectrum to be measured.Fig. 2 c and Fig. 2 e is
The corresponding diffraction pattern of two spectrum difference to be measured.We choose 300 respectively in two width diffraction patterns (Fig. 2 c and 2e)
Pixel is used for equationof structure group.By solving equations, the curve of spectrum has been rebuild.Small rectangle in Fig. 2 d and Fig. 2 f is the light rebuild
Spectrum point.As can be seen that rebuild spectrum meet with original spectrum it is very good.
Embodiment 2
Embodiment 2 illustrates the resolution ratio of spectrometer.If the green line part in Fig. 3 a and Fig. 3 b is two spectrum to be measured.Two
There are one the peaks of 2nm and 4nm respectively for a spectrum.Above-mentioned company spectrum is measured using this spectrum, measurement result such as Fig. 3 c
Shown in Fig. 3 d.It will be seen that the peak of two 2nm and 4nm can be clearly seen in reconstructed results.
Embodiment 3
Embodiment 3 illustrates the noise resistance performance of algorithm for reconstructing of the present invention.In noise resistance test, the spectrum in Fig. 2 a
As spectrum to be measured.The diffraction pattern of the spectrum measured in embodiment 3 is obtained by following square equation simulation：
Here εrand,iIt is random number, obeys the normal distribution that variance is σ=0.1.We select in diffraction pattern Fig. 2 c
360 pixel structure equation groups has been taken to rebuild spectrum.As noise SNR=96db, rebuild spectrum and original spectrum meets
Especially good (as shown in fig. 4 a).As SNR=90db, the error for rebuilding spectrum and original spectrum is especially small (as shown in Figure 4 b).
As SNR=85db, the error of reconstructed results increases, reconstructed results or it is good in spite of some noises exist (as scheme
Shown in 4c).As SNR=80db, again plus result starts to become larger, but the discrimination that two peak values will be appreciated also that is (such as Fig. 4 d institutes
Show).
Claims (9)
1. a kind of micro-hole spectrometer, including shading case (2), which is characterized in that shading case (2) is equipped with micro-hole (1), shading case
(2) light intensity detector (3) is equipped between detector guard box (4), on micro-hole (1) hole of spectrum incidence to be measured；Light to be measured
On micro-hole (1) diffraction occurs for spectrum, is transmitted on light intensity detector (3), light intensity detector (3) records various spectral components
Mutually overlapping diffraction pattern, after parameter determines, diffraction pattern of the unthreaded hole through hole of arbitrary wavelength is fixed.
2. a kind of micro-hole spectrometer according to claim 1, which is characterized in that the light intensity detector (3) uses
CCD or CMOS.
3. a kind of micro-hole spectrometer according to claim 1, which is characterized in that the micro-hole (1) is can adopt
With variously-shaped hole or this pattern.
4. a kind of micro-hole spectrometer according to claim 1, which is characterized in that the micro-hole (1) may be used
Phase type optical element.
5. a kind of micro-hole spectrometer according to claim 1, which is characterized in that using algorithm to recording diffraction pattern
It is handled, various mutually overlapping spectral components is detached, and then reconstruct spectrum to be measured.
Algorithm is as follows：If the intensity spectrum of a spectrum to be measured is E (λi) (λ hereiRepresent wavelength), spectrum to be measured
It is incident on hole, diffraction occurs on hole, CCD records corresponding diffraction pattern I (m Δs x, n Δ y)：
Wherein, Iλi(m Δs x, n Δ y) is each wavelength X in spectrum to be measurediCorresponding diffraction pattern, (m, n) represent Iλi(m
Matrix coordinate in Δ x, n Δ y), nqRepresent the number containing wavelength in spectrum to be measured, E (λi) it is Iλi(institute in m Δs x, n Δ y)
Have pixel light intensity value and value,For the E (λ shared by single pixeli) percentage.In equation (1), total diffraction pattern I
(m Δs x, n Δ y) is known (being recorded by light intensity detector such as CCD), E (λi) andIt is unknown.Once hole spectrometer
Structure determination, the size in hole and will be determined therewith from the distance between detector with shape and hole.According to fresnel diffraction
Theorem, the intensity distribution I' of diffraction patternλi(m Δs x, n Δ y) is just to determine, can represent (I' here by equation belowλi(m
Δ x, n Δ y) and Iλi(relationship of m Δs x, n Δ y) meets condition Iλi(m Δs x, n Δ y)=C0I'λi(m Δs x, n Δ y), C0It is normal
Number will not change diffraction pattern distribution)：
I ' (m Δs x, n Δ y)=| FrTλ,z{P(mΔx0,nΔy0)}|2 (4)
FrT { } represents fresnel diffraction, P (m Δs x0,nΔy0) represent the transmittance function in hole.Due to P (m Δs x0,nΔy0) it is
Information is known, so we can obtain I' according to equation 4λi(mΔx,nΔy).Because I'λi(m Δs x, n Δ y) has been acquired,
It so can be in the hope of according to equation (5)
So far, it acquiresOnly have E (λ in equation (1)i) it is unknown.It is worth noting that the once structure determination of spectrometer
Get off,It is exactly a fixed parameter, in a practical situation,It can be measured and accused by the producer of production bore spectrometer
Tell that user is without measuring for data processing in user or encapsulation to software
6. a kind of method that spectrum is rebuild by miniature hole spectrometer according to claim 1, which is characterized in that also may be used
Experimentally obtain preset parameterGradually micro-hole is illuminated using monochromatic light (monochromatic light can be generated by monochromator) simultaneously
Corresponding diffraction pattern is recorded, is then calculated with equation (5)Value and be supplied to user or by the parameter encapsulate to
Data processing is used in software.
A kind of 7. miniature hole spectrometer according to claim 1, which is characterized in that diffraction pattern I (m the Δs x, n
Each pixel can form and the duplicate linear equation of equation (1) shape equation in Δ y).Due to diffraction pattern I (m Δs
For x, n Δ y) containing a large amount of pixel, these pixels may be constructed a system of linear equations, due to(m Δs x, n Δ y) is with I
Know, can spectrum E (λ be rebuild by boundary's equation groupi), in the ideal case, we can set npEqual to nq(n herepBe from
Diffraction pattern I (selected number of pixels in m Δs x, n Δ y)), because of np=nq, solution of equations be it is unique, it is still, real
In the case of border, measurement error is inevitable, so we can utilize least square method to obtain approximate solution, is there is noise
In the case of, npNot equal to nq.Under normal circumstances, np>nq.Error amount is bigger, npValue choose it is bigger.
8. a kind of method that spectrum is rebuild by miniature hole spectrometer according to claim 1, which is characterized in that described
The method of reconstruction spectrum to be measured be by the way that each pixel of diffraction pattern is built equation group to solve as basic point.
9. a kind of method that spectrum is rebuild by miniature hole spectrometer according to claim 1, which is characterized in that described
Reconstruction spectrum to be measured the linear solving equations that are made up of pixels multiple in diffraction imaging of method or over-determined systems come
It completes.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095188A (en) * | 2019-04-02 | 2019-08-06 | 杭州盗火者科技有限公司 | A kind of spectrum restoring method, device and computer readable storage medium |
| CN110118750A (en) * | 2019-05-13 | 2019-08-13 | 江南大学 | Hand-held spectrophotometer based on smart phone |
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| US5731874A (en) * | 1995-01-24 | 1998-03-24 | The Board Of Trustees Of The Leland Stanford Junior University | Discrete wavelength spectrometer |
| CN1411285A (en) * | 2000-12-18 | 2003-04-16 | 中国科学院光电技术研究所 | Calibration method of electric charge coupler response linearity |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095188A (en) * | 2019-04-02 | 2019-08-06 | 杭州盗火者科技有限公司 | A kind of spectrum restoring method, device and computer readable storage medium |
| CN110095188B (en) * | 2019-04-02 | 2021-07-16 | 杭州盗火者科技有限公司 | Spectrum reduction method and device and computer readable storage medium |
| CN110118750A (en) * | 2019-05-13 | 2019-08-13 | 江南大学 | Hand-held spectrophotometer based on smart phone |
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