CN108130525B - Trimethyl aluminum metering and conveying device - Google Patents
Trimethyl aluminum metering and conveying device Download PDFInfo
- Publication number
- CN108130525B CN108130525B CN201810075901.5A CN201810075901A CN108130525B CN 108130525 B CN108130525 B CN 108130525B CN 201810075901 A CN201810075901 A CN 201810075901A CN 108130525 B CN108130525 B CN 108130525B
- Authority
- CN
- China
- Prior art keywords
- pipeline
- tma
- discharging
- evaporation tank
- pneumatic valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 title claims abstract description 10
- 238000007599 discharging Methods 0.000 claims abstract description 28
- 230000008020 evaporation Effects 0.000 claims abstract description 24
- 238000001704 evaporation Methods 0.000 claims abstract description 24
- 239000007788 liquid Substances 0.000 claims abstract description 21
- 238000007664 blowing Methods 0.000 claims abstract description 20
- 230000001502 supplementing effect Effects 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 5
- 238000012423 maintenance Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 3
- 239000006052 feed supplement Substances 0.000 abstract 7
- 238000010926 purge Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
- C23C16/20—Deposition of aluminium only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Pipeline Systems (AREA)
- Air Transport Of Granular Materials (AREA)
Abstract
The invention discloses a trimethylaluminum metering and conveying device, which comprises: the device comprises a bearing sensor, a TMA evaporation tank arranged on the bearing sensor, a discharging pipeline and a feeding pipeline which are connected with the TMA evaporation tank, and a blowing pipeline which is connected with the discharging pipeline; the TMA evaporation tank is provided with a temperature sensor and a liquid level sensor; the discharging pipeline is provided with a mass flowmeter, the mass flowmeter is provided with a bypass pneumatic valve and a second discharging pneumatic valve connected with the outlet end; the outlet end of the air blowing pipeline is provided with an air blowing pneumatic valve; the feed supplement pipeline is provided with feed supplement pneumatic valve, and the feed supplement pipeline is connected to manual feed supplement mouth through manual feed supplement valve, and parallelly connected is connected to automatic feed supplement mouth through automatic feed supplement valve simultaneously. The pressure in the TMA evaporation tank is constant through accurate temperature control, the TMA steam is controlled to accurately control the amount of the TMA, the control accuracy is high, the process is relatively simple and convenient, the pipeline is not easy to block, and the maintenance is relatively convenient.
Description
Technical Field
The invention relates to metering and conveying equipment, in particular to a trimethylaluminum metering and conveying device.
Background
Trimethylaluminum (Trimethyl Aluminum, TMA for short, with molecular formula of C 3 H 9 Al) is colorless transparent liquid at normal temperature and normal pressure, has extremely strong reactivity, can spontaneously ignite in air and can instantaneously ignite; react with alcohol and acid with active hydrogen; react strongly with water, even in cold waterExplosive decomposition reactions can also occur and methane can be formed, sometimes with ignition.
TMA is needed when the surface of the silicon battery piece is coated with alumina in the photovoltaic industry, so that the conveying safety of the TMA is particularly important, and the traditional conveying mode in the prior art is as follows:
1. the disadvantage of using inert gases such as nitrogen and argon as carrier gases, by mixing or bubbling, and then indirectly calculating the amount of TMA by metering the TMA mixture is: the mixing ratio of TMA and carrier gas is affected by factors such as pressure, temperature and the like, the actually passing TMA amount cannot be accurately measured, and the control precision is low;
2. the TMA liquid flow control is adopted, gasification and mixing are carried out, and the defects are that: the control process is complex, the pipeline is easy to be blocked, and the maintenance is inconvenient.
Disclosure of Invention
In order to solve the technical problems, the invention provides a trimethylaluminum metering and conveying device, which comprises:
the device comprises a bearing sensor, a TMA evaporation tank arranged on the bearing sensor, a discharging pipeline and a feeding pipeline connected with the TMA evaporation tank, and a blowing pipeline connected with the discharging pipeline;
the TMA evaporation tank is provided with a temperature sensor and a liquid level sensor;
the discharging pipeline is provided with a mass flowmeter, the mass flowmeter is provided with a bypass pneumatic valve, and a second discharging pneumatic valve is arranged at the connecting outlet end;
an air blowing pneumatic valve is arranged at the outlet end of the air blowing pipeline;
the feeding pipeline is provided with a feeding pneumatic valve, and is connected to the manual feeding port through the manual feeding valve, and simultaneously connected in parallel to the automatic feeding port through the automatic feeding valve.
The outlet end of the blowing pipeline is connected to the discharging pipeline at the inlet end of the mass flowmeter.
And a discharging pneumatic valve I is arranged on the discharging pipeline between the outlet end of the blowing pipeline and the inlet end of the discharging pipeline.
The outlet end of the feeding pipeline is positioned at the bottom end of the TMA evaporation tank, and the inlet end of the discharging pipeline is positioned at the top end of the TMA evaporation tank.
Through the technical scheme, the invention has the following advantages:
(1) The pressure in the TMA evaporation tank is constant through accurate temperature control, and the amount of TMA is accurately controlled through control of TMA steam, so that the control accuracy is high and can be within +/-1%;
(2) The weight of TMA is monitored on line in real time through a bearing sensor, the precision is 10 g, and automatic liquid supplementing can be carried out in real time according to production requirements;
(3) Monitoring the temperature of the TMA system in real time through a temperature sensor, wherein the precision is +/-1 ℃;
(4) Liquid supplementing function: the automatic liquid supplementing device has the functions of automatic liquid supplementing and manual liquid supplementing, and can automatically supplement liquid according to the set weight each time in the automatic state of the system;
(5) Automatic purging function: the system can automatically purge the control device and the pipeline, so that the service life and the maintenance period of the device are prolonged;
(6) The TMA evaporation tank and the bearing sensor have an explosion-proof function;
(7) Alarm function:
(1) TMA level alarm (low, normal, high, ultra high);
(2) and (3) temperature alarm: upper and lower limit temperatures;
(3) smoke alarm;
(4) abnormal fluid infusion and the like.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the description of the embodiments will be briefly described below.
Fig. 1 is a schematic structural diagram of a trimethylaluminum metering and conveying device according to an embodiment of the present invention.
The figures represent the numbers:
11. load-bearing sensor 12.TMA evaporation tank 13. Temperature sensor
14. Liquid level sensor 21, discharge pipeline 22, discharge pneumatic valve I
23. Bypass pneumatic valve 24, mass flowmeter 25, discharge pneumatic valve two
31. Air blowing pipeline 32, air blowing pneumatic valve 41 and material supplementing pipeline
42. Feeding pneumatic valve 43, manual feeding port 44, manual feeding valve
45. Automatic feed supplementing valve
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Referring to fig. 1, the trimethylaluminum metering and conveying device provided by the present invention includes: the solar cell film coating device comprises a bearing sensor 11, a TMA evaporation tank 12 arranged on the bearing sensor 11, a discharge pipeline 21 and a material supplementing pipeline 41 which are connected with the TMA evaporation tank 12, and a blowing pipeline 31 which is connected with the discharge pipeline 21, wherein the outlet end of the material supplementing pipeline 41 is positioned at the bottom end of the TMA evaporation tank 12, the inlet end of the discharge pipeline 21 is positioned at the top end of the TMA evaporation tank 12, and the outlet end of the discharge pipeline 21 is connected to a solar cell film coating process cavity through a control device; the TMA evaporation pot 12 has a temperature sensor 13 and a liquid level sensor 14; the discharging pipeline 21 is provided with a mass flowmeter 24, the mass flowmeter 24 is provided with a bypass pneumatic valve 23 and a second discharging pneumatic valve 25 connected with the outlet end; the outlet end of the air blowing pipeline 31 is provided with an air blowing pneumatic valve 32; the feed line 41 is provided with a feed pneumatic valve 42 and the feed line 41 is connected to a manual feed port 43 through a manual feed valve 44 while being connected in parallel to an automatic feed port through an automatic feed valve 45.
Wherein, the outlet end of the air blowing pipeline 31 is connected to the discharging pipeline 21 at the inlet end of the mass flowmeter 24, and a discharging pneumatic valve I22 is arranged on the discharging pipeline 21 between the outlet end of the air blowing pipeline 31 and the inlet end of the discharging pipeline 21.
The pressure in the TMA evaporation tank 12 is constant through accurate temperature control, and the amount of TMA is accurately controlled through control of TMA steam, so that the control accuracy is high and can be within +/-1%; the weight of TMA is monitored on line in real time through the bearing sensor 11, the precision is 10 g, and automatic liquid supplementing can be carried out according to the production requirement in real time; the temperature sensor 13 is used for monitoring the temperature of the TMA system in real time, and the precision is +/-1 ℃; the automatic liquid supplementing device has the functions of automatic liquid supplementing and manual liquid supplementing, and can automatically supplement liquid according to the set weight each time in the automatic state of the system; the automatic purging function is realized, the system can automatically purge the control device and the pipeline, and the service life and the maintenance period of the device are prolonged; the TMA evaporation pot 12 and the load bearing sensor 11 have an explosion-proof function; the alarm device has the alarm function: (1) the TMA weight alarm (low, normal and high) is realized through the detection function of the bearing sensor 11; (2) the TMA liquid level alarm (low, normal, high and ultrahigh) is realized through the alarm detection function of the liquid level sensor 14; (3) the upper and lower limit detection alarm of the temperature is realized through the temperature sensor 13; (4) and can realize smoke alarm, abnormal liquid supplementing and other alarms.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to the embodiments described above will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (1)
1. A trimethylaluminum metering and transporting apparatus, comprising:
the device comprises a bearing sensor, a TMA evaporation tank arranged on the bearing sensor, a discharging pipeline and a feeding pipeline connected with the TMA evaporation tank, and a blowing pipeline connected with the discharging pipeline;
the outlet end of the material supplementing pipeline is positioned at the bottom end of the TMA evaporation tank, and the inlet end of the material discharging pipeline is positioned at the top end of the TMA evaporation tank;
a discharging pneumatic valve I is arranged on the discharging pipeline between the outlet end of the blowing pipeline and the inlet end of the discharging pipeline;
the TMA evaporation tank is provided with a temperature sensor and a liquid level sensor;
the discharging pipeline is provided with a mass flowmeter, the mass flowmeter is provided with a bypass pneumatic valve, and a second discharging pneumatic valve is arranged at the connecting outlet end;
the outlet end of the air blowing pipeline is connected to the discharging pipeline at the inlet end of the mass flowmeter, and an air blowing pneumatic valve is arranged at the outlet end of the air blowing pipeline;
the feeding pipeline is provided with a feeding pneumatic valve, and is connected to the manual feeding port through the manual feeding valve, and simultaneously connected in parallel to the automatic feeding port through the automatic feeding valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810075901.5A CN108130525B (en) | 2018-01-26 | 2018-01-26 | Trimethyl aluminum metering and conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810075901.5A CN108130525B (en) | 2018-01-26 | 2018-01-26 | Trimethyl aluminum metering and conveying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108130525A CN108130525A (en) | 2018-06-08 |
| CN108130525B true CN108130525B (en) | 2024-04-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810075901.5A Active CN108130525B (en) | 2018-01-26 | 2018-01-26 | Trimethyl aluminum metering and conveying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108130525B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110158057B (en) * | 2019-06-05 | 2024-05-03 | 承德石油高等专科学校 | PECVD process chamber branch pipeline device and gas circuit system thereof |
| CN111153590B (en) * | 2019-12-31 | 2022-03-25 | 江苏通鼎光棒有限公司 | Germanium tetrachloride tympanic bulla device of high accuracy |
| CN114686854B (en) * | 2022-03-31 | 2023-09-01 | 晶澳太阳能有限公司 | Source supply system and source supply method for tubular film plating equipment |
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| TW200402480A (en) * | 2002-04-09 | 2004-02-16 | Wafermasters Inc | Source gas delivery |
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| CN106006525A (en) * | 2016-05-18 | 2016-10-12 | 上海正帆科技股份有限公司 | Safe delivery device for trimethylaluminum |
| DE202017003314U1 (en) * | 2017-06-22 | 2017-07-19 | Centrotherm Photovoltaics Ag | Device for providing trimethylaluminum |
| CN207760427U (en) * | 2018-01-26 | 2018-08-24 | 常州比太黑硅科技有限公司 | A kind of trimethyl aluminium metering and conveying device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5690498B2 (en) * | 2009-03-27 | 2015-03-25 | ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． | Method for depositing a film on a substrate and apparatus for delivering a vaporized precursor compound |
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2018
- 2018-01-26 CN CN201810075901.5A patent/CN108130525B/en active Active
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|---|---|---|---|---|
| TW200402480A (en) * | 2002-04-09 | 2004-02-16 | Wafermasters Inc | Source gas delivery |
| CN103572258A (en) * | 2012-07-18 | 2014-02-12 | 罗门哈斯电子材料有限公司 | Vapor delivery device, methods of manufacture and methods of use thereof |
| CN203782033U (en) * | 2013-12-25 | 2014-08-20 | 中天科技精密材料有限公司 | Germanium tetrachloride high-accuracy supply device |
| CN104989952A (en) * | 2015-07-22 | 2015-10-21 | 广东汉能薄膜太阳能有限公司 | Continuous and stable high-purity chemical conveying system and method |
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Also Published As
| Publication number | Publication date |
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| CN108130525A (en) | 2018-06-08 |
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