CN108120409B - Film thickness measuring apparatus and film thickness measuring method - Google Patents
Film thickness measuring apparatus and film thickness measuring method Download PDFInfo
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- CN108120409B CN108120409B CN201711421791.5A CN201711421791A CN108120409B CN 108120409 B CN108120409 B CN 108120409B CN 201711421791 A CN201711421791 A CN 201711421791A CN 108120409 B CN108120409 B CN 108120409B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a film thickness measuring method, which comprises the following steps: setting the distance between the two first probes; measuring the thickness of the color bar by using the two first probes respectively; and judging whether the first probe falls in the interval between the two color bars or not, and when one of the first probes falls in the interval between the two color bars, taking the thickness measured by the other first probe as the actual thickness of the color bar. The invention also discloses a film thickness measuring device. When the thickness of the color bar is measured, the plurality of probes are adopted to respectively detect different parts of the film layer, and the distance between the probes is preset, so that the probes do not need to be deliberately aligned to specific parts of the color bar before the thickness of the film layer is detected, the condition of inaccurate measurement caused by point position deviation of the probes can be avoided, the working efficiency is improved, and the measurement precision is ensured.
Description
Technical Field
The invention relates to the technical field of display, in particular to a film thickness measuring device and a film thickness measuring method.
Background
At present, the production of liquid crystal panels is mainly divided into Array (Array substrate) process, CF (color filter substrate) process, Cell (liquid crystal Cell) process, and Module (Module) process. The main part of the CF process is to fabricate a color substrate, giving color to the display we see.
The film thickness of a color film substrate needs to be measured after the color film substrate is formed, a mainly used measuring machine is an SP (surface profile) machine, the SP machine is mainly used for monitoring the film thickness of a product, and the principle of the SP machine is that the film thickness is measured by utilizing an electric signal generated by a height difference generated by a probe sliding on a color stripe film of a pixel under a certain pressure. However, the accuracy is low, namely when the measuring position of the probe is located near the black matrix between two adjacent color bars, the point position of the probe can shift and slide onto the black matrix during measurement, so that measurement is inaccurate, and therefore the existing requirements are difficult to meet, especially for a 4K high-definition panel, automatic measurement cannot be performed basically, only a manual measurement mode can be adopted, which not only causes labor waste, but also greatly reduces the measuring efficiency.
Disclosure of Invention
In view of the defects in the prior art, the invention provides a film thickness measuring device and a film thickness measuring method, which can realize automatic measurement of film thickness, avoid unnecessary probe positioning process and improve measuring efficiency.
In order to achieve the purpose, the invention adopts the following technical scheme:
a film thickness measurement method using at least two first probes for measurement, comprising:
setting the distance between the two first probes so that the distance between the two first probes satisfies the following conditions: d is not equal to m + L + n + B, wherein D is the distance between the two first probes, L is the length of the color bar, B is the distance between two adjacent color bars along the length direction of the color bar, and m and n are natural numbers;
the two first probes are used for measuring the thickness of the color bar respectively, and the process of measuring the thickness of the color bar by the first probes comprises the following steps:
the two first probes respectively approach to the color bars and vertically penetrate through the color bars;
calculating the displacement of the first probe at two moments when the first probe contacts the color bar and penetrates through the color bar, wherein the displacement is the measured thickness of the color bar;
and judging whether the first probe falls in the interval between the two color bars or not, and when one of the first probes falls in the interval between the two color bars, taking the thickness measured by the other first probe as the actual thickness of the color bar.
As one embodiment, the distance between two first probes satisfies the following condition: d ═ M +0.5 × L + B, where M is a natural number.
As one embodiment, the film thickness measuring method further includes: and when the two first probes do not fall in the interval between the two color bars, comparing the two measured thicknesses of the color bars with a preset thickness range respectively, and taking the thickness closer to the preset thickness range as the actual thickness of the color bars.
As an embodiment, the first probe includes a pressure sensor and a displacement sensor, and during the process of measuring the thickness of the color bar by the first probe, two moments when the first probe contacts the color bar and penetrates the color bar are judged by comparing pressure abrupt change conditions of the pressure sensor, and a displacement difference between the two moments acquired by the displacement sensor is taken as the measured thickness of the color bar.
As one embodiment, at least one second probe is identical to the first probe in structure and is spaced from the first probe, and a distance between the second probe and the adjacent first probe satisfies: d 'is not equal to m + L + n B, and D' is a distance between the second probe and the adjacent first probe.
Another object of the present invention is to provide a film thickness measuring device, which includes a carrier for placing a color bar and at least two first probes having a pressure sensor and a displacement sensor, wherein the first probes are disposed above the carrier and can move toward and away from the carrier, and are used for obtaining the thickness of the color bar according to a pressure sudden change signal of the pressure sensor and a displacement signal of the displacement sensor during the process of inserting and penetrating the color bar; the distance between at least two first probes satisfies the following conditions: d is not equal to m + L + n + B, wherein D is the interval between two first probes, L is the length of the color bar, B is the interval between two adjacent color bars along the length direction of the color bar, and m and n are natural numbers.
As one embodiment, the distance between two first probes satisfies the following condition: d ═ M +0.5 × L + B, where M is a natural number.
As one embodiment, the film thickness measuring apparatus further includes an adjusting mechanism, and the adjusting mechanism is configured to adjust a distance between two adjacent first probes.
In one embodiment, the length of the color bar is 20-60 μm.
As one embodiment, the film thickness measuring apparatus further includes at least one second probe, the second probe has the same structure as the first probe and is spaced from the first probe, and a distance between the second probe and the adjacent first probe satisfies: d 'is not equal to m + L + n B, and D' is a distance between the second probe and the adjacent first probe.
When the thickness of the color bar is measured, the plurality of probes are adopted to respectively detect different parts of the film layer, and the distance between the probes is preset, so that the probes do not need to be deliberately aligned to specific parts of the color bar before the thickness of the film layer is detected, the condition of inaccurate measurement caused by point position deviation of the probes can be avoided, the working efficiency is improved, and the measurement precision is ensured.
Drawings
FIG. 1 is a schematic view of a film thickness measurement position according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the position of a probe according to an embodiment of the present invention;
FIG. 3 is a schematic view of a film thickness measuring method according to an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 and 2, the film thickness measuring method according to the embodiment of the present invention uses at least two first probes 20 to measure the film thickness, and the film thickness measuring method mainly includes:
s01, setting the distance between the two first probes 20 such that the distance D between the two first probes 20 satisfies: d is not equal to m + L + n + B, wherein L is the length of the color bar 1, B is the distance between two adjacent color bars along the length direction of the color bar, and m and n are natural numbers; here, only two first probes 20 are needed to ensure that one first probe 20 does not shift to the black matrix between two color bars all the time, and therefore, the pitches of other first probes 20 can be set at will, and of course, it is preferable that the pitches between all the first probes 20 satisfy the requirement of the above formula;
s02, using the two first probes 20 to measure the thickness of the color bar 1, respectively, wherein the process of measuring the thickness of the color bar 1 by the first probes 20 includes:
the two first probes 20 respectively approach to the color bar 1 and vertically penetrate through the color bar 1;
calculating the displacement of the first probe 20 at two moments when the first probe 20 contacts the color bar 1 and penetrates through the color bar 1, wherein the displacement is the measured thickness of the color bar 1;
s03, determining whether the first probe 20 falls in the interval between the two color bars 1, and if one of the first probes 20 falls in the interval between the two color bars 1, performing the following step S04: the thickness measured by the other first probe 20 is taken as the actual thickness of the color bar 1; when neither of the two first probes 20 falls within the interval between the two color bars 1, the following step S05 is performed: the two thicknesses of the color bar 1 obtained by measurement are respectively compared with the preset thickness range, and the thickness closer to the preset thickness range is taken as the actual thickness of the color bar 1.
Referring to fig. 3, since the distance between two first probes 20 is preset before the detection, so that at least one first probe 20 is not located in the black matrix 2 between two adjacent color bars 1, nor in the area near the black matrix 2 beside any color bar 1, it can be ensured that at least one probe can detect the actual film thickness. At the region that two probes are not corresponding in black matrix 2 between color bar 1, also when near black matrix, the point location skew can not appear in two probes, and at this moment, this application regards as the actual thickness of color bar 1 with the thickness of measurement that is more close to predetermined thickness range, and the testing result is more accurate. In the prior art, the detection mode adopting the single probe is often only suitable for the color bar with longer length, and through the arrangement, the length of the color bar 1 suitable for the detection mode of the embodiment can cover 20-60 μm, and can cover smaller color bar size, namely, the detection mode is suitable for the display panel with higher resolution, and the detection precision is also higher.
As one of the more preferred embodiments, the distance between the two first probes 20 satisfies: d ═ M +0.5 × L + B, where M is a natural number, as shown in fig. 2 and 3, when one of the first probes 20 is located beside the black matrix 2 (the portion indicated by the line B in fig. 1), and the other first probe 20 is located at a portion near the middle of the color stripe 1 (the portion indicated by the line a in fig. 1), the detection result at this portion is closer to the actual thickness of the color stripe 1.
Specifically, the first probe 20 includes a pressure sensor and a displacement sensor, and during the process that the first probe 20 measures the thickness of the color bar 1, two moments when the first probe 20 contacts the color bar 1 and penetrates through the color bar 1 are judged by contrasting pressure sudden change conditions of the pressure sensor, and a displacement difference between the two moments obtained by the displacement sensor is used as the measured thickness of the color bar 1.
In addition, the number of the probes is not limited to two, for example, there is at least one second probe beside the first probe 20, the second probe has the same structure as the first probe 20 and is spaced apart from the first probe 20, and the distance D' between the second probe and the adjacent first probe 20 satisfies: d' ≠ m L + n B. That is, the first probe 20 and the second probe are linearly arranged along the length direction of the color bar 1, and when the number of the probes is greater than two, the detection results of a plurality of probes far from the black matrix 2 can be compared, and the measured thickness closest to the predetermined thickness range is selected as the actual thickness of the color bar 1. Alternatively, the detection results of the probes distant from the black matrix 2 may be averaged, and the average may be used as the actual thickness of the color bar 1.
Correspondingly, the film thickness measuring device for detecting the thickness of the color bar mainly comprises a carrier 10 for placing the color bar 1, two first probes 20 with pressure sensors and displacement sensors and an adjusting mechanism, wherein the first probes 20 are arranged above the carrier 10 and can move towards and away from the carrier 10, and are used for obtaining the thickness of the color bar 1 according to pressure mutation signals of the pressure sensors and displacement signals of the displacement sensors in the process of inserting and penetrating the color bar 1; the adjusting mechanism is used for adjusting the distance between two adjacent first probes 20. To accommodate different length colour bars 1. Wherein, the distance D between the two first probes 20 satisfies: d ≠ m + L + n B, more preferably the spacing D satisfies: d ═ M +0.5 × L + B, where M is a natural number.
For example, when the probe is not in contact with the color bar, the reading of the pressure sensor is 0, when the probe is in contact with the color bar, the reading of the pressure sensor changes suddenly, in the process of continuing to penetrate the probe, the reading of the pressure sensor is always kept in a certain range, when the probe continues to penetrate through the bottom surface of the color bar, the reading of the pressure sensor suddenly decreases and changes suddenly again, or the reading is increased and changes suddenly due to the fact that the probe continuously penetrates through the carrying platform 10, and the displacement moved by the probe penetrating through the color bar can be obtained by reading the displacement reading change of the displacement sensor in the first sudden increase and first sudden decrease processes, so that the thickness of the color bar can be detected.
Further, the film thickness measuring device further comprises at least one second probe, the second probe has the same structure as the first probe 20 and is arranged at an interval with the first probe 20, and the distance between the second probe and the adjacent first probe 20 satisfies the following conditions: d 'is not equal to m + L + n B, D' is the distance between the second probe and the adjacent first probe 20. The first probe 20 and the second probe are linearly arranged along the length direction of the color bar 1, when the number of the probes is more than two, the detection results of a plurality of probes far away from the black matrix 2 can be compared, and the measured thickness closest to the preset thickness range is selected as the actual thickness of the color bar 1. Alternatively, the detection results of the probes distant from the black matrix 2 may be averaged, and the average may be used as the actual thickness of the color bar 1.
When the thickness of the color bar is measured, the plurality of probes are adopted to respectively detect different parts of the film layer, and the distance between the probes is preset, so that the probes do not need to be deliberately aligned to specific parts of the color bar before the thickness of the film layer is detected, the condition of inaccurate measurement caused by point position deviation of the probes can be avoided, the working efficiency is improved, and the measurement precision is ensured.
The foregoing is directed to embodiments of the present application and it is noted that numerous modifications and adaptations may be made by those skilled in the art without departing from the principles of the present application and are intended to be within the scope of the present application.
Claims (10)
1. A film thickness measurement method, characterized in that it uses at least two first probes (20) for measurement, comprising:
setting the distance between the two first probes (20) so that the distance between the two first probes (20) satisfies the following conditions: d is not equal to m + L + n + B, wherein D is the distance between the two first probes (20), L is the length of the color bar (1), B is the distance between two adjacent color bars along the length direction of the color bar, and m and n are natural numbers;
the thickness of the color bar (1) is measured by two first probes (20), and the process of measuring the thickness of the color bar (1) by the first probes (20) comprises the following steps:
the two first probes (20) respectively approach to the color bar (1) and vertically penetrate through the color bar (1);
calculating the displacement of the first probe (20) at two moments when the first probe (20) contacts the color bar (1) and penetrates through the color bar (1), wherein the displacement is the measured thickness of the color bar (1);
and judging whether the first probe (20) falls in the interval between the two color bars (1), and when one first probe (20) falls in the interval between the two color bars (1), taking the thickness measured by the other first probe (20) as the actual thickness of the color bar (1).
2. The film thickness measuring method according to claim 1, wherein a distance between two first probes (20) satisfies: d ═ M +0.5 × L + B, where M is a natural number.
3. The film thickness measurement method according to claim 1, further comprising: when the two first probes (20) do not fall in the interval between the two color bars (1), comparing the two measured thicknesses of the color bars (1) with the preset thickness range respectively, and taking the thickness closer to the preset thickness range as the actual thickness of the color bars (1).
4. The film thickness measuring method according to claim 1, wherein the first probe (20) includes a pressure sensor and a displacement sensor, and during the process of measuring the thickness of the color bar (1) by the first probe (20), two moments when the first probe (20) contacts the color bar (1) and penetrates the color bar (1) are judged by comparing sudden changes in pressure of the pressure sensor, and a displacement difference between the two moments obtained by the displacement sensor is taken as the measured thickness of the color bar (1).
5. A film thickness measuring method according to any one of claims 1 to 4, wherein at least one second probe is identical in structure to the first probe (20) and spaced apart from the first probe (20), and the spacing between the second probe and the adjacent first probe (20) is such that: d 'is not equal to m + L + n + B, and D' is the spacing between the second probe and the adjacent first probe (20).
6. The film thickness measuring device is characterized by comprising a carrier (10) for placing a color bar (1) and at least two first probes (20) with pressure sensors and displacement sensors, wherein the first probes (20) are arranged above the carrier (10) and can move towards and away from the carrier (10) and are used for obtaining the thickness of the color bar (1) according to pressure mutation signals of the pressure sensors and displacement signals of the displacement sensors in the process of inserting and penetrating the color bar (1); the spacing between at least two of the first probes (20) is such that: d is not equal to m + L + n + B, wherein D is the distance between the two first probes (20), L is the length of the color bar (1), B is the distance between two adjacent color bars along the length direction of the color bar, and m and n are natural numbers.
7. The film thickness measuring apparatus according to claim 6, wherein the distance between the two first probes (20) satisfies: d ═ M +0.5 × L + B, where M is a natural number.
8. The film thickness measuring apparatus according to claim 6, further comprising an adjusting mechanism for adjusting a distance between two adjacent first probes (20).
9. The film thickness measuring apparatus according to claim 6, wherein the length of the color bar (1) is 20 to 60 μm.
10. A film thickness measuring apparatus according to any one of claims 6 to 9, further comprising at least one second probe having the same structure as the first probe (20) and spaced apart from the first probe (20), wherein the second probe is spaced apart from the adjacent first probe (20) by a distance satisfying: d 'is not equal to m + L + n + B, and D' is the spacing between the second probe and the adjacent first probe (20).
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| CN109751961A (en) * | 2019-01-07 | 2019-05-14 | 成都中电熊猫显示科技有限公司 | A kind of the point automatic adjusting method and thicknesses of layers measuring device of film thickness measuring instrument |
| CN117990028B (en) * | 2024-02-03 | 2024-06-21 | 广东天泰工程检测有限公司 | Method and system for detecting pile bottom sediment thickness of concrete filling foundation pile |
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