CN108110083A - A kind of graphite boat saturation process of solar cell - Google Patents
A kind of graphite boat saturation process of solar cell Download PDFInfo
- Publication number
- CN108110083A CN108110083A CN201711226025.3A CN201711226025A CN108110083A CN 108110083 A CN108110083 A CN 108110083A CN 201711226025 A CN201711226025 A CN 201711226025A CN 108110083 A CN108110083 A CN 108110083A
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- Prior art keywords
- saturation
- graphite boat
- graphite
- silicon nitride
- boat
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 105
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 105
- 239000010439 graphite Substances 0.000 title claims abstract description 105
- 238000000034 method Methods 0.000 title claims abstract description 46
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 37
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 37
- 238000001035 drying Methods 0.000 claims abstract description 22
- 238000009434 installation Methods 0.000 claims abstract description 15
- 238000007747 plating Methods 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 5
- 239000010703 silicon Substances 0.000 claims abstract description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 36
- 229910021529 ammonia Inorganic materials 0.000 claims description 18
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 16
- 229910000077 silane Inorganic materials 0.000 claims description 16
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 14
- 239000000919 ceramic Substances 0.000 claims description 9
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 9
- 229910052573 porcelain Inorganic materials 0.000 claims description 9
- 229920006395 saturated elastomer Polymers 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- -1 silicon Alkane Chemical class 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 3
- 238000012797 qualification Methods 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 6
- 230000002000 scavenging effect Effects 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a kind of graphite boat saturation process of solar cell, processing step includes removal silicon nitride layer, rinsing, drying, assembling, again saturation graphite boat, saturation graphite boat and plated film.The graphite boat saturation process of the solar cell; graphite boat card is protected so as to reach by installation card point protection component; long-time silicon nitride layer saturation first is carried out to graphite boat piece; secondary plating boat saturation after stuck point protection component is removed again; it is combined using two kinds of saturation modes and saturation fully has been carried out to graphite boat piece; in turn avoid influence of the stuck point partial silicon nitride plated film to cell piece color in long-time saturation history; generate the more uniform monolithic no color differnece of silicon chip film-coated color; plated film colour consistency improves, so as to substantially increase the qualification rate of finished battery.
Description
Technical field
The invention belongs to technical field of solar batteries, and in particular to a kind of graphite boat saturation process of solar cell.
Background technology
At present, polysilicon solar cell technique has reached its maturity, and realizes standardized production, main technological steps are such as
Under：Acid corrosion making herbs into wool → diffusion → wet etching → PECVD coated with antireflection film → silk-screen printing → sintering → testing, sorting.
Wherein, PECVD coating process plays a decisive role to the color appearance of solar battery sheet, and the saturation quality of graphite boat is direct
Influence the uniformity of plated film color.Graphite boat saturation mode is a traditional saturation process in industry, after this technique saturation
Graphite boat service life is shorter, first five boat color distortion is larger after new boat saturation after cleaning, and mainly color distortion is deposited greatly in piece
In the thin bad order in the red center of silicon chip edge, bad order ratio is up to more than 80%.Graphite boat using the present invention is satisfied
And method, new boat plated film color uniformity consistency can be made good, color distortion in piece caused by greatly reducing new boat uses this
Method can reduce plating boat cost, and the component used in saturation graphite boat may be reused for ceramic jacket in graphite boat component.
The content of the invention
It is an object of the invention to provide a kind of graphite boat saturation process of solar cell, to solve above-mentioned background technology
The problem of middle proposition.
To achieve the above object, the present invention provides following technical solution：The graphite boat saturation process of solar cell, including
Remove silicon nitride layer, rinsing, drying, assembling, saturation, again dismounting, saturation and plated film.
In addition, the graphite boat saturation process of solar cell of the present invention comprises the following steps：
S1, removal silicon nitride layer：Silicon nitride layer is plated using 5%-20% hydrofluoric acid solutions removal graphite boat piece；
S2, rinsing：Graphite boat piece is rinsed using pure water, rinsing 4 times every time 2 it is small when；
S3, drying：Graphite boat piece is dried with baking oven, drying temperature 80-120 degree；
S4, assembling：Graphite boat and installation card point protection component are assembled, ceramic card point protection component internal diameter is entangled graphite boat card
Point, protects all graphite stuck points according to the method, and porcelain bushing is used for that graphite stuck point border is avoided to be coated with silicon nitride film；
S5, saturation：Saturation graphite boat carries out graphite boat using PECVD plating boat saturation, and saturated gas used is ammonia and silicon
Alkane；
S6, dismounting：It removes stuck point protection component and completes boat integral installation with checking；
S7, again saturation：Satisfy again and saturation mainly is carried out to graphite clamping point, saturated gas used is ammonia and silane；
S8, plated film：It is normally carried out coating process.
The technique effect and advantage of the present invention：The graphite boat saturation process of the solar cell, passes through installation card point protection
So as to reach protection graphite boat card, stuck point protection component for ceramic jacket can recycle, first graphite boat piece is grown component
Time silicon nitride layer saturation, then by stuck point protection component removed after secondary plating boat saturation, use two kinds of saturation mode knots
Conjunction has fully carried out saturation to graphite boat piece, in turn avoids in long-time saturation history stuck point partial silicon nitride plated film to battery
The influence of piece color generates the more uniform monolithic no color differnece of silicon chip film-coated color, and plated film colour consistency improves, and plated film is done over again
Ratio reduces, and can substantially reduce saturation graphite boat cost, and new boat plated film color is uniform after saturation, colour consistency between piece inner sheet
Good, the finished battery factor of merit is promoted.
Description of the drawings
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the graphite stuck point structure diagram of the present invention；
Fig. 3 is the porcelain bushing structure diagram of the present invention.
In figure：1 graphite stuck point, 2 porcelain bushings.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment belongs to the scope of protection of the invention.
Embodiment 1
The present invention provides a kind of graphite boat saturation process of solar cell, include the following steps：
S1, removal silicon nitride layer：Silicon nitride layer is plated using 15% hydrofluoric acid solution removal graphite boat piece, when scavenging period 4 is small；
S2, rinsing：Graphite boat piece is rinsed using pure water, rinsing 4 times 8 it is small when rinse every time plus spray, for the first time rinsing 1
Hour, when second of rinsing 2 is small, when third time rinsing 2 is small, when the 3rd rinsing 3 is small；
S3, drying：The graphite boat completed to cleaning is dried with baking oven, 100 degree of drying temperature, when drying time setting 8 is small；
S4, assembling：Graphite boat and installation card point protection component are assembled, ceramic card point protection component internal diameter is entangled graphite boat card
Point, protects all graphite stuck points 1 according to the method, and porcelain bushing 2 is used for that 1 border of graphite stuck point is avoided to be coated with silicon nitride
Film；
S5, saturation：Saturation graphite boat carries out graphite boat piece using PECVD plating silicon nitride layer and carries out saturation, saturated gas used
It is ammonia and silane, saturation process time 100min, ammonia flow 4000ml/min, silane flow rate 500ml/min, radio-frequency power
4500W, process pressure 150Pa；
S6, plated film：It is normally carried out coating process.
Embodiment 2
The present invention provides a kind of graphite boat saturation process of solar cell, include the following steps：
S1, removal silicon nitride layer：Silicon nitride layer is plated using 15% hydrofluoric acid solution removal graphite boat piece, when scavenging period 4 is small；
S2, rinsing：Graphite boat piece is rinsed using pure water, rinsing 4 times 8 it is small when rinse every time plus spray, for the first time rinsing 1
Hour, when second of rinsing 2 is small, when third time rinsing 2 is small, when the 3rd rinsing 3 is small；
S3, drying：The graphite boat completed to cleaning is dried with baking oven, 100 degree of drying temperature, when drying time setting 8 is small；
S4, assembling：Graphite boat and installation card point protection component are assembled, ceramic card point protection component internal diameter is entangled graphite boat card
Point, protects all graphite stuck points 1 according to the method, and porcelain bushing 2 is used for that 1 border of graphite stuck point is avoided to be coated with silicon nitride
Film；
S5, saturation：Saturation graphite boat carries out graphite boat piece using PECVD plating silicon nitride layer and carries out saturation, saturated gas used
It is ammonia and silane, saturation process time 100min, ammonia flow 4500ml/min, silane flow rate 550ml/min, radio-frequency power
4500W, process pressure 150Pa；
S6, dismounting：It removes stuck point protection component and completes boat integral installation with checking, be ready for saturation again；
S7, again saturation：Again satisfy and to graphite boat piece saturation again to graphite stuck point 1 carry out short time saturation, make boat piece and
Stuck point plates the silicon nitride layer of different-thickness, then saturation process time 60min, ammonia flow 4000ml/min, silane flow rate respectively
500ml/min, radio-frequency power 4500W, process pressure 150Pa；
S8, plated film：It is normally carried out coating process.
Embodiment 3
The present invention provides a kind of graphite boat saturation process of solar cell, include the following steps：
S1, removal silicon nitride layer：Silicon nitride layer is plated using 15% hydrofluoric acid solution removal graphite boat piece, when scavenging period 4 is small；
S2, rinsing：Graphite boat piece is rinsed using pure water, rinsing 4 times 8 it is small when rinse every time plus spray, for the first time rinsing 1
Hour, when second of rinsing 2 is small, when third time rinsing 2 is small, when the 3rd rinsing 3 is small；
S3, drying：The graphite boat completed to cleaning is dried with baking oven, 100 degree of drying temperature, when drying time setting 8 is small；
S4, assembling：Graphite boat and installation card point protection component are assembled, ceramic card point protection component internal diameter is entangled graphite boat card
Point, protects all graphite stuck points 1 according to the method, and porcelain bushing 2 is used for that 1 border of graphite stuck point is avoided to be coated with silicon nitride
Film；
S5, saturation：Saturation graphite boat carries out graphite boat piece using PECVD plating silicon nitride layer and carries out saturation, saturated gas used
It is ammonia and silane, saturation process time 110min, ammonia flow 5500ml/min, silane flow rate 750ml/min, radio-frequency power
5500W, process pressure 250Pa；
S6, dismounting：It removes stuck point protection component and completes boat integral installation with checking, be ready for saturation again；
S7, again saturation：Again satisfy and to graphite boat piece saturation again to graphite stuck point 1 carry out short time saturation, make boat piece and
Stuck point plates the silicon nitride layer of different-thickness, then saturation process time 30min, ammonia flow 5500ml/min, silane flow rate respectively
750ml/min, radio-frequency power 5500W, process pressure 250Pa；
S8, plated film：It is normally carried out coating process.
Embodiment 4
The present invention provides a kind of graphite boat saturation process of solar cell, include the following steps：
S1, removal silicon nitride layer：Silicon nitride layer is plated using 15% hydrofluoric acid solution removal graphite boat piece, when scavenging period 4 is small；
S2, rinsing：Graphite boat piece is rinsed using pure water, rinsing 4 times 8 it is small when rinse every time plus spray, for the first time rinsing 1
Hour, when second of rinsing 2 is small, when third time rinsing 2 is small, when the 3rd rinsing 3 is small；
S3, drying：The graphite boat completed to cleaning is dried with baking oven, 100 degree of drying temperature, when drying time setting 8 is small；
S4, assembling：Graphite boat and installation card point protection component are assembled, ceramic card point protection component internal diameter is entangled graphite boat card
Point, protects all graphite stuck points 1 according to the method, and porcelain bushing 2 is used for that 1 border of graphite stuck point is avoided to be coated with silicon nitride
Film；
S5, saturation：Saturation graphite boat carries out graphite boat piece using PECVD plating silicon nitride layer and carries out saturation, saturated gas used
It is ammonia and silane, saturation process time 110min, ammonia flow 6000ml/min, silane flow rate 900ml/min, radio-frequency power
5500W, process pressure 250Pa；
S6, dismounting：It removes stuck point protection component and completes boat integral installation with checking, be ready for saturation again；
S7, again saturation：Again satisfy and to graphite boat piece saturation again to graphite stuck point 1 carry out short time saturation, make boat piece and
Stuck point plates the silicon nitride layer of different-thickness, then saturation process time 45min, ammonia flow 5500ml/min, silane flow rate respectively
750ml/min, radio-frequency power 5500W, process pressure 250Pa；
S8, plated film：It is normally carried out coating process.
Embodiment 5
The present invention provides a kind of graphite boat saturation process of solar cell, include the following steps：
S1, removal silicon nitride layer：Silicon nitride layer is plated using 15% hydrofluoric acid solution removal graphite boat piece, when scavenging period 4 is small；
S2, rinsing：Graphite boat piece is rinsed using pure water, rinsing 4 times 8 it is small when rinse every time plus spray, for the first time rinsing 1
Hour, when second of rinsing 2 is small, when third time rinsing 2 is small, when the 3rd rinsing 3 is small；
S3, drying：The graphite boat completed to cleaning is dried with baking oven, 100 degree of drying temperature, when drying time setting 8 is small；
S4, assembling：Graphite boat and installation card point protection component are assembled, ceramic card point protection component internal diameter is entangled graphite boat card
Point, protects all graphite stuck points 1 according to the method, and porcelain bushing 2 is used for that 1 border of graphite stuck point is avoided to be coated with silicon nitride
Film；
S5, saturation：Saturation graphite boat carries out graphite boat piece using PECVD plating silicon nitride layer and carries out saturation, saturated gas used
It is ammonia and silane, saturation process time 120min, ammonia flow 6000ml/min, silane flow rate 900ml/min, radio-frequency power
5500W, process pressure 350Pa；
S6, dismounting：It removes stuck point protection component and completes boat integral installation with checking, be ready for saturation again；
S7, again saturation：Again satisfy and to graphite boat piece saturation again to graphite stuck point 1 carry out short time saturation, make boat piece and
Stuck point plates the silicon nitride layer of different-thickness, then saturation process time 60min, ammonia flow 5500ml/min, silane flow rate respectively
750ml/min, radio-frequency power 5500W, process pressure 350Pa；
S8, plated film：It is normally carried out coating process.
Finally it should be noted that：The foregoing is only a preferred embodiment of the present invention, is not intended to limit the invention,
Although the present invention is described in detail with reference to the foregoing embodiments, for those skilled in the art, still may be used
To modify to the technical solution recorded in foregoing embodiments or carry out equivalent substitution to which part technical characteristic,
Within the spirit and principles of the invention, any modifications, equivalent replacements and improvements are made should be included in the present invention's
Within protection domain.
Claims (1)
1. a kind of graphite boat saturation process of solar cell, including removal silicon nitride layer, rinsing, drying, assembling, saturation, tear open
Dress, again saturation and plated film, it is characterised in that：Processing step is as follows：
S1, removal silicon nitride layer：Silicon nitride layer is plated using 5%-20% hydrofluoric acid solutions removal graphite boat piece；
S2, rinsing：Graphite boat piece is rinsed using pure water, rinsing 4 times every time 2 it is small when；
S3, drying：Graphite boat piece is dried with baking oven, drying temperature 80-120 degree；
S4, assembling：Graphite boat and installation card point protection component are assembled, ceramic card point protection component internal diameter is entangled graphite boat card
Point, protects all graphite stuck points according to the method, and porcelain bushing is used for that graphite stuck point border is avoided to be coated with silicon nitride film；
S5, saturation：Saturation graphite boat carries out graphite boat using PECVD plating boat saturation, and saturated gas used is ammonia and silicon
Alkane；
S6, dismounting：It removes stuck point protection component and completes boat integral installation with checking；
S7, again saturation：Satisfy again and saturation mainly is carried out to graphite clamping point, saturated gas used is ammonia and silane；
S8, plated film：It is normally carried out coating process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711226025.3A CN108110083A (en) | 2017-11-29 | 2017-11-29 | A kind of graphite boat saturation process of solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711226025.3A CN108110083A (en) | 2017-11-29 | 2017-11-29 | A kind of graphite boat saturation process of solar cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108110083A true CN108110083A (en) | 2018-06-01 |
Family
ID=62207918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711226025.3A Pending CN108110083A (en) | 2017-11-29 | 2017-11-29 | A kind of graphite boat saturation process of solar cell |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110523696A (en) * | 2019-09-04 | 2019-12-03 | 韩华新能源（启东）有限公司 | A kind of cleaning method of PECVD graphite boat |
| CN112795903A (en) * | 2020-12-29 | 2021-05-14 | 理想晶延半导体设备(上海)股份有限公司 | Production process applied to tubular coating equipment |
| CN113500378A (en) * | 2021-07-26 | 2021-10-15 | 浙江爱旭太阳能科技有限公司 | Method for replacing graphite boat blade staple bolt |
| CN114038937A (en) * | 2021-10-09 | 2022-02-11 | 天合光能(宿迁)光电有限公司 | Graphite boat saturation process for improving click printing of perc single crystal battery |
| CN115430652A (en) * | 2022-09-05 | 2022-12-06 | 青海黄河上游水电开发有限责任公司西宁太阳能电力分公司 | Saturation cleaning method for LPCVD quartz boat |
| CN116174377A (en) * | 2023-02-27 | 2023-05-30 | 江苏和阳新材料有限公司 | Full-automatic monocrystalline silicon wafer cleaning method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104064503A (en) * | 2014-06-19 | 2014-09-24 | 奉化拓升商贸有限公司 | Graphite boat cleaning process |
| CN105112888A (en) * | 2015-08-27 | 2015-12-02 | 常州天合光能有限公司 | Saturation method of graphite boat |
| CN107267963A (en) * | 2017-06-22 | 2017-10-20 | 通威太阳能（合肥）有限公司 | Method for improving color of PECVD (plasma enhanced chemical vapor deposition) coating film |
-
2017
- 2017-11-29 CN CN201711226025.3A patent/CN108110083A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104064503A (en) * | 2014-06-19 | 2014-09-24 | 奉化拓升商贸有限公司 | Graphite boat cleaning process |
| CN105112888A (en) * | 2015-08-27 | 2015-12-02 | 常州天合光能有限公司 | Saturation method of graphite boat |
| CN107267963A (en) * | 2017-06-22 | 2017-10-20 | 通威太阳能（合肥）有限公司 | Method for improving color of PECVD (plasma enhanced chemical vapor deposition) coating film |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110523696A (en) * | 2019-09-04 | 2019-12-03 | 韩华新能源（启东）有限公司 | A kind of cleaning method of PECVD graphite boat |
| CN112795903A (en) * | 2020-12-29 | 2021-05-14 | 理想晶延半导体设备(上海)股份有限公司 | Production process applied to tubular coating equipment |
| CN113500378A (en) * | 2021-07-26 | 2021-10-15 | 浙江爱旭太阳能科技有限公司 | Method for replacing graphite boat blade staple bolt |
| CN114038937A (en) * | 2021-10-09 | 2022-02-11 | 天合光能(宿迁)光电有限公司 | Graphite boat saturation process for improving click printing of perc single crystal battery |
| CN115430652A (en) * | 2022-09-05 | 2022-12-06 | 青海黄河上游水电开发有限责任公司西宁太阳能电力分公司 | Saturation cleaning method for LPCVD quartz boat |
| CN116174377A (en) * | 2023-02-27 | 2023-05-30 | 江苏和阳新材料有限公司 | Full-automatic monocrystalline silicon wafer cleaning method |
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Application publication date: 20180601 |
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