CN108088811B - Method for measuring concentration of each component in mixed gas by terahertz waves - Google Patents
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- CN108088811B CN108088811B CN201711440920.5A CN201711440920A CN108088811B CN 108088811 B CN108088811 B CN 108088811B CN 201711440920 A CN201711440920 A CN 201711440920A CN 108088811 B CN108088811 B CN 108088811B
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- 238000000034 method Methods 0.000 title claims abstract description 49
- 239000007789 gas Substances 0.000 claims abstract description 139
- 238000000862 absorption spectrum Methods 0.000 claims abstract description 51
- 238000010521 absorption reaction Methods 0.000 claims abstract description 39
- 238000010606 normalization Methods 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims description 20
- 238000001228 spectrum Methods 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- FVSKHRXBFJPNKK-UHFFFAOYSA-N propionitrile Chemical compound CCC#N FVSKHRXBFJPNKK-UHFFFAOYSA-N 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 4
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 description 4
- 238000001307 laser spectroscopy Methods 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- LVZWSLJZHVFIQJ-UHFFFAOYSA-N Cyclopropane Chemical compound C1CC1 LVZWSLJZHVFIQJ-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
- G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
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- Life Sciences & Earth Sciences (AREA)
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention provides a method for measuring the concentration of each component in mixed gas by terahertz waves, which is characterized by comprising the following steps of: step one, detecting multiple single gases respectively by using terahertz waves to obtain an absorption spectrum of each gas, setting characteristic peak information of each single gas according to a first preset rule, and storing all the characteristic peak information as a characteristic peak information base; step two, detecting the gas to be detected by using terahertz waves to obtain an absorption spectrum, and performing normalization processing on the absorption spectrum to obtain a normalized absorption spectrum; comparing the normalized absorption spectrum with a characteristic peak information base to judge the name of the gas contained in the gas to be detected; and step four, selecting a specific characteristic peak segment of each judgment gas from the characteristic peak information base according to the judged gas name and a second preset rule, selecting a target absorption peak segment of the same frequency band from the normalized absorption spectrum, and calculating the concentration of the judgment gas according to the peak-valley heights of the two peak segments.
Description
Technical Field
The invention relates to a quantitative detection method for mixed gas, in particular to a method for measuring the concentration of each component in the mixed gas by terahertz waves.
Background
In the prior art, two methods are used for detecting the concentration of each component in the mixed gas, namely, the detection is carried out through a gas chromatography, and the detection is carried out through a laser spectroscopy. Gas chromatography requires a large number of samples, and a huge trace amount of analysis, and also requires calibration, which is cumbersome to operate. Laser spectroscopy, while having good sensitivity, is subject to doppler broadening effects, which makes the range of substances detectable narrow.
Disclosure of Invention
The present invention has been made to solve the above problems, and an object of the present invention is to provide a method for measuring the concentration of each component in a mixed gas by terahertz waves.
The invention provides a method for measuring the concentration of each component in mixed gas by terahertz waves, which is characterized by comprising the following steps of: step one, detecting multiple single gases respectively by using terahertz waves to obtain an absorption spectrum of each single gas, setting characteristic peak information of each single gas according to a first preset rule, and storing the characteristic peak information of all the single gases as a characteristic peak information base; step two, detecting the gas to be detected by using terahertz waves to obtain an absorption spectrum of the gas to be detected, and carrying out normalization processing on the absorption spectrum to obtain a normalized absorption spectrum; comparing the normalized absorption spectrum with a characteristic peak information base to judge the name of the gas contained in the gas to be detected; and step four, selecting a specific characteristic peak segment of each judgment gas from the characteristic peak information base according to the judged gas name and a second preset rule, selecting a target absorption peak segment with the same frequency band as the specific characteristic peak segment from the normalized absorption spectrum, and calculating the concentration of each judgment gas in the gas to be detected according to the peak-valley height of the specific characteristic peak segment and the peak-valley height of the target absorption peak segment.
In the method for measuring the concentration of each component in the mixed gas by the terahertz wave provided by the invention, the method can also have the following characteristics: wherein, the calculation formula of the concentration of each judgment gas in the gas to be measured in the step four is
Wherein C is the concentration of the gas in the gas to be measured, P0Is the pressure intensity, I/I, in a container containing the gas to be measured0Is to determine the ratio of the absorption intensity of the gas to that of the corresponding single gas, and the ratio is equal to the ratio of the peak-to-valley height of the target absorption peak segment to the specific characteristic peak segment, VcIs the volume, V, of the container containing the gas to be measuredbIs the total volume of the gas to be measured, TbIs the thermodynamic temperature, T, of the gas to be measuredcIs the thermodynamic temperature, P, of the container containing the gas to be measuredatmIs atmospheric pressure.
In the method for measuring the concentration of each component in the mixed gas by the terahertz wave provided by the invention, the method can also have the following characteristics: wherein the frequency band of the terahertz wave is 210 GHz-270 GHz.
In the method for measuring the concentration of each component in the mixed gas by the terahertz wave provided by the invention, the method can also have the following characteristics: wherein the detected detection pressure is 10 mTorr.
In the method for measuring the concentration of each component in the mixed gas by the terahertz wave provided by the invention, the method can also have the following characteristics: wherein the first predetermined rule is: when the band broadening of the absorption peak segment of the absorption spectrum is 5MHz, the absorption peak segment is set as characteristic peak information, and the characteristic peak information of each single gas includes 5 absorption peak segments.
In the method for measuring the concentration of each component in the mixed gas by the terahertz wave provided by the invention, the method can also have the following characteristics: the method comprises the following steps of obtaining a normalized absorption spectrum, obtaining a second derivative spectrum corresponding to the normalized absorption spectrum, and obtaining a second derivative spectrum corresponding to the normalized absorption spectrum, wherein the first step further comprises the step of processing the absorption spectrum by using a fitting method to obtain the second derivative spectrum corresponding to the absorption spectrum, and the characteristic peak information of each single gas is set according to a first preset rule.
In the method for measuring the concentration of each component in the mixed gas by the terahertz wave provided by the invention, the method can also have the following characteristics: the characteristic peak information base comprises a plurality of single gases at least including all the gases of the gas to be detected.
In the method for measuring the concentration of each component in the mixed gas by the terahertz wave provided by the invention, the method can also have the following characteristics: in the second step, normalization processing is to divide the absorption spectrum by the absorption spectrum obtained by using the terahertz source coupling signal as the direct current signal and detecting the vacuum with the terahertz wave in the same frequency band as the terahertz wave to obtain a normalized absorption spectrum.
In the method for measuring the concentration of each component in the mixed gas by the terahertz wave provided by the invention, the method can also have the following characteristics: wherein the second predetermined rule is: when the band broadening of the absorption peak segment is the minimum band broadening in the characteristic peak information, the absorption peak segment is set as a specific characteristic peak segment of the judgment gas.
Action and Effect of the invention
According to the method for measuring the concentration of each component in the mixed gas by the terahertz waves, the terahertz waves are used for respectively detecting a plurality of single gases to obtain the absorption spectrum of each single gas, and a fingerprint library is established according to the absorption spectrum. The absorption spectrum of the gas to be detected is obtained through detection of the same terahertz waves, and then the name of the gas contained in the gas to be detected is determined through comparison with a fingerprint library. Specific characteristic peak segments and target absorption peak segments are selected and the concentration of each component of the strip gas is specifically calculated through the respective peak-to-valley heights. That is, the identification of the gas is based on spectral patterns, absorption intensity, and frequency (band). The method has high precision because the uniqueness of the spectral features further determines the specificity of detection.
In addition, the method does not need to carry out daily calibration on the detection system, so the method is very convenient to use in practice. Moreover, the range of detectable gas species by the method is far larger than that by laser spectroscopy.
Detailed Description
In order to make the technical means, the creation features, the achievement purposes and the effects of the present invention easy to understand, the following embodiments specifically describe the method for measuring the concentration of each component in the mixed gas by the terahertz wave of the present invention.
In the present embodiment, the method for measuring the concentrations of the components in the mixed gas by the terahertz wave has the following steps:
step one, pure propionitrile gas is stored in a detection cavity, the initial temperature of the propionitrile gas is controlled to be the same as the room temperature (about 293K), the pressure in the detection cavity is controlled to be 10mTorr, the temperature in the detection cavity is controlled to be 333K, terahertz light in a frequency range of 210 GTHz-270 GTHz passes through the detection cavity under the standard atmospheric pressure (about 760000mTorr), and the absorption spectrum of the propionitrile is obtained.
And step two, obtaining a second derivative spectrum of the absorption spectrum of the propionitrile by using a Fourier series fitting method. And setting the characteristic peak information of the propionitrile according to a first preset rule. In this embodiment, the first predetermined rule is: when the band broadening of the absorption peak segment of the second derivative spectrum is 5MHz, the absorption peak segment is set as the characteristic peak information. The characteristic peak information of the propionitrile can comprise 3-10 absorption peak fragments. In this example, the characteristic peak information of propionitrile includes 5 absorption peak fragments.
And step three, repeating the step one and the step two to the plurality of pure gases to detect and obtain the characteristic peak information of the plurality of pure gases, and correspondingly storing the characteristic peak information of all the pure gases to obtain a characteristic peak information base. In the present embodiment, the characteristic peak information base includes characteristic peak information of propionitrile, cyclopropane sulfide, sulfur dioxide, difluoromethane, and ethanol.
And step four, repeating the step to detect the gas to be detected to obtain the absorption spectrum of the gas to be detected. In this embodiment, the gas to be measured is any two or more of propionitrile, cyclopropane sulfide, sulfur dioxide, and difluoromethane. And (3) normalizing the absorption spectrum of the gas to be detected to obtain a normalized absorption spectrum, namely dividing the absorption spectrum by the terahertz wave using the terahertz source coupling signal as the direct current signal, and detecting the absorption spectrum obtained after vacuum under the detection conditions with the other detection conditions being the same as those in the first step, so as to obtain the normalized absorption spectrum. And obtaining a normalized second derivative spectrum by using a Fourier series fitting method for the normalized absorption spectrum.
And step five, comparing the normalized absorption spectrum with the characteristic peak information base to judge the name of the gas contained in the gas to be detected.
And step six, selecting a specific characteristic peak segment of each judgment gas from the characteristic peak information base according to a second preset rule according to the judged gas name, wherein the second preset rule is that when the frequency band broadening of the absorption peak segment is the minimum frequency band broadening in the characteristic peak information corresponding to the judgment gas, the absorption peak segment is set as a specific characteristic peak segment of the judgment gas. And selecting a target absorption peak segment with the same frequency band as the specific characteristic peak segment from the normalized second derivative spectrum. Defining the ratio of the peak-to-valley height of the target absorption peak segment and the specific characteristic peak segment of the determination gas as the ratio of the absorption intensity of the determination gas to the absorption intensity of the corresponding single gasThat is to say that the two ratios are equal. The concentration of each judgment gas in the gas to be measured is calculated according to the following formula:
wherein C is the concentration of the gas in the gas to be measured, P0Is the pressure in the sensing chamber (10 mTorr in this example), I/I0Is to determine the ratio of the absorption intensity of the gas to the absorption intensity of the corresponding single gas, VcIs the volume of the detection chamber, VbIs the total volume of the gas to be measured, TbIs the thermodynamic temperature (293K in this example), T, of the gas to be measuredcThermodynamic temperature of the detection chamber (333K in this example), PatmIs atmospheric pressure (760000 mTorr in this example).
Effects and effects of the embodiments
According to the method for measuring the concentration of each component in the mixed gas by the terahertz waves, the terahertz waves are used for respectively detecting a plurality of single gases to obtain the absorption spectrum of each single gas, and a fingerprint library is established according to the absorption spectrum. The absorption spectrum of the gas to be detected is obtained through detection of the same terahertz waves, and then the name of the gas contained in the gas to be detected is determined through comparison with a fingerprint library. Specific characteristic peak segments and target absorption peak segments are selected and the concentration of each component of the strip gas is specifically calculated through the respective peak-to-valley heights. That is, the identification of the gas is based on spectral patterns, absorption intensity, and frequency (band). The method has high precision because the uniqueness of the spectral features further determines the specificity of detection.
In addition, the method does not need to carry out daily calibration on the detection system, so the method is very convenient to use in practice. Moreover, the range of detectable gas species by the method is far larger than that by laser spectroscopy.
Further, the concentration of each judgment gas in the gas to be measured can be calculated by substituting the peak-to-valley height of the specific characteristic peak segment and the peak-to-valley height of the target absorption peak segment into a formula.
Furthermore, the frequency band of the terahertz waves is 210 GHz-270 GHz, and the method for measuring the concentration of each component in the mixed gas by the terahertz waves in the frequency band has a more accurate detection effect.
Further, the characteristic peak information includes 5 absorption peak segments, which can be used to more accurately determine the name of the gas contained in the measured gas.
Furthermore, fitting method processing is used for both the absorption spectrum and the normalized absorption spectrum, the obtained second derivative spectrum and the normalized second derivative spectrum are narrowed and sharpened compared with absorption peaks before processing, peaks close to frequency bands are separated, background effect and matrix effect are inhibited, scattering influence is eliminated, and resolution and sensitivity are improved.
The above embodiments are preferred examples of the present invention, and are not intended to limit the scope of the present invention.
Claims (6)
1. A method for measuring the concentration of each component in mixed gas by terahertz waves is characterized by comprising the following steps:
step one, a terahertz wave is used for respectively detecting multiple single gases to obtain an absorption spectrum of each single gas, characteristic peak information of each single gas is set according to a first preset rule, and the characteristic peak information of all the single gases is stored as a characteristic peak information base;
step two, detecting the gas to be detected by the terahertz waves to obtain an absorption spectrum of the gas to be detected, and carrying out normalization processing on the absorption spectrum to obtain a normalized absorption spectrum;
comparing the normalized absorption spectrum with the characteristic peak information base to judge the name of the gas contained in the gas to be detected;
step four, selecting a specific characteristic peak segment of each judgment gas from the characteristic peak information base according to a second preset rule according to the judged gas name, selecting a target absorption peak segment with the same frequency band as the specific characteristic peak segment from the normalized absorption spectrum, and calculating the concentration of each judgment gas in the gas to be measured according to the peak-valley height of the specific characteristic peak segment and the peak-valley height of the target absorption peak segment,
wherein the calculation formula of the concentration of each judgment gas in the gas to be measured in the fourth step is
Wherein C is the concentration of the judgment gas in the gas to be measured, P0Is the pressure, I/I, in the container containing the gas to be measured0Is the ratio of the absorption intensity of the judgment gas to the absorption intensity of the corresponding single gas, and is equal to the ratio of the peak-to-valley height of the target absorption peak segment to the specific characteristic peak segment, VcIs the volume, V, of the container containing the gas to be measuredbIs the total volume, T, of the gas to be measuredbIs the thermodynamic temperature, T, of the gas to be measuredcIs the thermodynamic temperature, P, of the container containing the gas to be measuredatmIs atmospheric pressure;
the first predetermined rule is: setting the absorption peak segment as characteristic peak information when the band broadening of the absorption peak segment of the absorption spectrum is 5MHz,
the characteristic peak information for each of the single gases includes 5 absorption peak segments,
the second predetermined rule is: when the band broadening of an absorption peak segment is the minimum band broadening in the characteristic peak information, the absorption peak segment is set as a specific characteristic peak segment of the judgment gas.
2. The method for measuring the concentrations of the components in the mixed gas by using the terahertz waves as claimed in claim 1, wherein:
the frequency band of the terahertz waves is 210 GHz-270 GHz.
3. The method for measuring the concentrations of the components in the mixed gas by using the terahertz waves as claimed in claim 1, wherein:
wherein the detected detection pressure is 10 mTorr.
4. The method for measuring the concentrations of the components in the mixed gas by using the terahertz waves as claimed in claim 1, wherein:
wherein, the first step further comprises the steps of processing the absorption spectrum by a fitting method to obtain a corresponding second derivative spectrum, setting characteristic peak information of each single gas according to a first preset rule,
and step two, processing the normalized absorption spectrum by using a fitting method to obtain a corresponding normalized second derivative spectrum.
5. The method for measuring the concentrations of the components in the mixed gas by using the terahertz waves as claimed in claim 1, wherein:
wherein the plurality of single gases contained in the characteristic peak information base at least comprise all the gases of the gas to be detected.
6. The method for measuring the concentrations of the components in the mixed gas by using the terahertz waves as claimed in claim 1, wherein:
in the second step, the normalization processing is to divide the absorption spectrum by an absorption spectrum obtained by using a terahertz source coupling signal as a direct current signal and detecting a vacuum with a terahertz wave in the same frequency band as the terahertz wave, so as to obtain the normalized absorption spectrum.
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