CN108080222A - The air draft switching device and its method of a kind of waste collection cup - Google Patents
The air draft switching device and its method of a kind of waste collection cup Download PDFInfo
- Publication number
- CN108080222A CN108080222A CN201611042315.8A CN201611042315A CN108080222A CN 108080222 A CN108080222 A CN 108080222A CN 201611042315 A CN201611042315 A CN 201611042315A CN 108080222 A CN108080222 A CN 108080222A
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- Prior art keywords
- air
- waste collection
- outlet
- wind box
- collection cup
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The invention belongs to the technology field of wafer rotary coating, the air draft switching device and its method of specifically a kind of waste collection cup.Described device includes dividing wind box, main air duct, interface and air draft switching mechanism, wind box is wherein divided to be equipped with to divide wind box air inlet and divide wind box air outlet, described point of wind box air inlet is connected with the exhaust outlet of waste collection cup, the main air duct is equipped with main air duct air inlet, the both ends of the interface divide wind box air outlet and the main air duct air inlet to connect with described respectively, the side wall of the interface is equipped with air distribution outlet, the air draft switching mechanism is mounted on interface, for the air draft switching divided between wind box air outlet and air distribution outlet.Present invention is mainly used for the air draft air quantity switchings of each waste collection cup in the technique unit of rotary coating, can switch different exhaust air rates inside each garbage collection cup and not interfere between each other.
Description
Technical field
The invention belongs to the technology field of wafer rotary coating, specifically a kind of air draft of waste collection cup is cut
Changing device and its method.
Background technology
The capacity requirements of equipment are continuously improved in new technology and market, under similary floor space, to realize more
Production capacity will configure more technical modules, and the integrated level of technical module is continuously improved, and it is multiple configuration in a process cavity occur
The Novel rotary coat module of spin coating units.Since space is limited, the air draft of multiple spin coating units is cascaded.To wafer into
During row process, the waste collection cup of spin coating units needs to switch different air draft pressure, due to multiple waste collection cup strings
Connection, if do not processed, the air draft of each waste collection cup can influence each other, and then influence the technique effect of each spin coating units
Fruit.The air draft switching method of the present invention can be effectively prevented interfering with each other between waste collection cup, so as to ensure that technique is imitated
Fruit
The content of the invention
In view of the above-mentioned problems, air draft switching device and its side it is an object of the invention to provide a kind of waste collection cup
Method can be influenced each other with the air draft for solving the problem of multiple waste collection cups and then influence the technological effect of each spin coating units.
To achieve these goals, the present invention uses following technical scheme：
A kind of air draft switching device of waste collection cup, including dividing wind box, main air duct, interface and air draft switching mechanism,
In wind box is divided to be equipped with to divide and wind box air inlet and divide wind box air outlet, the exhaust outlet for dividing wind box air inlet and waste collection cup
Connection, the main air duct are equipped with main air duct air inlet, the both ends of the interface respectively with the wind box air outlet and described of dividing
Main air duct air inlet connects, and the side wall of the interface is equipped with air distribution outlet, and the air draft switching mechanism is mounted on interface, is used for
Air draft switching between described point of wind box air outlet and air distribution outlet.
The main air duct air inlet is equipped with air port adjustable plate, passes through the big of air port adjustable plate regulating main air road air inlet
It is small, so as to adjust the exhaust air rate size of waste collection cup.
The air draft switching mechanism includes air door regulating mechanism and air door, and the air door, which is installed in rotation on, described divides wind
It is connected between box air outlet and air distribution outlet and with air door regulating mechanism, the air door is closed by the driving of air door regulating mechanism
Described point of wind box air outlet closes the air distribution outlet.
The air door regulating mechanism is driving cylinder.
The interface is with dividing wind box or main air duct to be an integral structure.
A kind of air draft switching method of waste collection cup, when multiple spin coating units are configured in process cavity, each spin coating list
Air distribution outlet is set on the interface that is connected with main air duct of waste collection cup exhaust outlet of member, waste collection cup exhaust outlet closing or
During opening, the air distribution outlet opens or closes, and it is other useless to ensure that the closing of waste collection cup exhaust outlet does not influence by air distribution outlet
Liquid collection cups.
Connection divides wind box between each waste collection cup exhaust outlet and interface.
Air draft switching mechanism between described point of wind box and interface is set, air distribution outlet row is carried out by the air draft switching mechanism
Wind and the switching of waste collection cup exhaust outlet air draft.
The air draft switching mechanism includes air door regulating mechanism and air door, and the air door is installed in rotation on a point wind box and goes out
It is connected between air port and air distribution outlet and with air door regulating mechanism, the air door is by the driving of air door regulating mechanism, described in closing
Divide wind box air outlet or close the air distribution outlet.
Air port adjustable plate is equipped between the main air duct and interface, passes through the big of air port adjustable plate regulating main air road air inlet
It is small, so as to adjust the exhaust air rate size of waste collection cup.
Advantages of the present invention and advantageous effect are：
1. the present invention ensures each waste collection cup air draft of series connection by the adjusting of air door and the air distribution outlet of interface
Requirement can be reached, be consistent and do not influenced each other when switching.
2. present invention is mainly used for the air draft air quantity switchings of each waste collection cup in the technique unit of rotary coating, can be with
Switch different exhaust air rates inside each garbage collection cup and do not interfere between each other.
3. the present invention adjusts Board position by regulating tuyere, the air draft wind pressure one of each waste collection cup can be realized
It causes, specified parameter is can reach when can realize that each waste collection cup carries out air draft switching by adjusting the switching value of air door,
The air distribution outlet of interface section can ensure that the opening and closing of air door does not influence other waste collection cups.
Description of the drawings
Fig. 1 is the structure diagram of the present invention；
Fig. 2 is the operation principle schematic diagram of the present invention；
Fig. 3 is the connection diagram for dividing wind box and waste collection cup in the present invention.
Wherein：1 is divides wind box, and 2 be main air duct, and 3 be interface, and 4 be air distribution outlet, and 5 be air door regulating mechanism, and 6 be air port tune
Plate is saved, 7 be air door, and 8 be waste collection cup, and 9 is divide wind box air outlet, and 10 be main air inlet of air duct.
Specific embodiment
It is right in the following with reference to the drawings and specific embodiments in order to make the object, technical solutions and advantages of the present invention clearer
The present invention is described in detail.
As shown in Figs. 1-3, the air draft switching device of a kind of waste collection cup provided by the invention, including dividing wind box 1, main wind
Road 2, interface 3 and air draft switching mechanism divide wind box air inlet and divide wind box air outlet 9 wherein wind box 1 is divided to be equipped with, described to divide wind
Box air inlet is connected with the exhaust outlet of waste collection cup 8, and the main air duct 2 is equipped with main air duct air inlet 10, the interface 3
Both ends divide wind box air outlet 9 and the main air duct air inlet 10 to connect with described respectively, and the side wall of the interface 3 is equipped with air distribution
Mouth 4, the air draft switching mechanism installation on the interface 3, are cut for the air draft divided between wind box air outlet 9 and air distribution outlet 4
It changes.
Air port adjustable plate 6 is equipped at the main air duct air inlet 10, passes through 6 regulating main air road air inlet 10 of air port adjustable plate
Size, so as to adjust the exhaust air rate size of waste collection cup 8.
The air draft switching mechanism includes air door regulating mechanism 5 and air door 7, and the air door 7 is installed in rotation on described
Divide between wind box air outlet 9 and air distribution outlet 4 and be connected with air door regulating mechanism 5, the air door 7 passes through air door regulating mechanism 5
It drives, wind box air outlet 9 is divided described in closing or closes the air distribution outlet 4.
In one embodiment of the invention, the air door regulating mechanism 5 is driving cylinder.The interface 3 is with dividing wind box 1 or main
Air passage 2 is an integral structure, interface 3 or self-contained unit.Driving cylinder is used to adjust air door switch amount size.
A kind of air draft switching method of waste collection cup, when multiple spin coating units are configured in process cavity, each spin coating list
Air distribution outlet 4 on the interface 3 that the waste collection cup exhaust outlet of member is connected with main air duct 2 is set, is closed in the exhaust outlet of waste collection cup
When closing or opening, the air distribution outlet 4 opens or closes, and the closing for ensureing waste collection cup exhaust outlet by air distribution outlet 4 does not influence
Other waste collection cups.
Connection divides wind box 1 between each waste collection cup exhaust outlet and interface 3.The row of setting between described point of wind box 1 and interface 3
Wind switching mechanism carries out the switching of 4 air draft of air distribution outlet and waste collection cup exhaust outlet air draft by the air draft switching mechanism.
The air draft switching mechanism includes air door regulating mechanism 5 and air door 7, and the air door 7 is installed in rotation on a point wind
It is connected between box air outlet 9 and air distribution outlet 4 and with air door regulating mechanism 5, the drive that the air door 7 passes through air door regulating mechanism 5
It is dynamic, wind box air outlet 9 is divided described in closing or closes the air distribution outlet 4.
Air port adjustable plate 6 is equipped between the main air duct 2 and interface 3, passes through 6 regulating main air road air inlet of air port adjustable plate
10 size, so as to adjust the exhaust air rate size of waste collection cup.
In the case of connecting present invention is mainly used for multiple waste collection cup air drafts, wind box is divided to be no less than two, the row of realization
The method that wind switches and do not interfered between each waste collection cup.Wind box 1 is divided to couple with the exhaust outlet of waste collection cup 8,
Each point of wind box 1 is coupled with main air duct 2 by interface 3, and the part of interface 3 is equipped with air door, damper configuration adjusting mechanism, for adjusting
The state of rectification campaign door.
The present invention operation principle be：
By controlling air door regulating mechanism that air door can be allowed to switch opening and closing state, air door regulating mechanism can use gas
Cylinder is realized, it is also possible to which other power original papers are realized.Meanwhile air door regulating mechanism can carry out centainly under two states of air door
Adjustment.By the position of regulating tuyere adjustable plate 6, it can realize that the air draft wind pressure of each waste collection cup 8 is consistent, pass through tune
The switching value of rectification campaign door can realize that each waste collection cup 8 carries out can reach specified parameter, interface section during air draft switching
Air distribution outlet can ensure that the opening and closing of air door does not influence other waste collection cups.
The present invention the course of work be：
Door opening state, air door are located at such as the state of B in Fig. 2, this time-division wind box 1 and 2 unicom of main air duct, chamber Indoor Air
Stream is mainly by the way that, into air draft main air duct, waste collection cup is high capacity inside waste collection cup
Air door closed state, air door are located at the state of A in such as Fig. 2, wind box 1 are divided to be disconnected with main air duct 2, the air distribution outlet of interface
4 open, and chamber interior air-flow is mainly entered by air distribution outlet 4 in air draft main air duct 2, and waste collection cup 8 is low capacity.
In conclusion the present invention carries out exhaust air rate by air door regulating mechanism and air port adjustable plate to each waste collection cup
Adjustment, switches over the air draft of waste collection cup by the position for changing air door, the air door can change position, different positions
The corresponding opening and closing for dividing wind box and air distribution outlet is put, exhaust air rate is adjusted by the switching of position.
The present invention can realize that the air draft wind pressure in each waste collection cup of air draft series connection is adjustable, and waste collection cup
Between without interfering with each other, be consistent the wind pressure between each waste collection cup, and then ensure the work of each waste collection cup
Skill effect is consistent.
The foregoing is merely embodiments of the present invention, are not intended to limit the scope of the present invention.It is all in the present invention
Spirit and principle within any modification, equivalent replacement, improvement, extension etc., be all contained in protection scope of the present invention
It is interior.
Claims (10)
1. a kind of air draft switching device of waste collection cup, which is characterized in that including dividing wind box (1), main air duct (2), interface (3)
And air draft switching mechanism, divide wind box air inlet wherein wind box (1) is divided to be equipped with and divide wind box air outlet (9), it is described divide wind box into
Air port is connected with the exhaust outlet of waste collection cup, and the main air duct (2) is equipped with main air duct air inlet (10), the interface (3)
Both ends with described wind box air outlet (9) and the main air duct air inlet (10) is divided to connect respectively, on the side wall of the interface (3)
Equipped with air distribution outlet (4), the air draft switching mechanism is mounted on interface (3), divides wind box air outlet (9) and air distribution outlet for described
(4) the air draft switching between.
2. the air draft switching device of waste collection cup according to claim 1, which is characterized in that the main air duct air inlet
(10) air port adjustable plate (6) is equipped at, by the size of air port adjustable plate (6) regulating main air road air inlet (10), so as to adjust
The exhaust air rate size of waste collection cup.
3. the air draft switching device of waste collection cup according to claim 1, which is characterized in that the air draft switching mechanism
Including air door regulating mechanism (5) and air door (7), the air door (7), which is installed in rotation on, described divide wind box air outlet (9) and matches somebody with somebody
It is connected between air port (4) and with air door regulating mechanism (5), the air door (7) is closed by the driving of air door regulating mechanism (5)
Described point of wind box air outlet (9) closes the air distribution outlet (4).
4. the air draft switching device of waste collection cup according to claim 3, which is characterized in that the air door regulating mechanism
(5) it is driving cylinder.
5. the air draft switching device of waste collection cup according to claim 1, which is characterized in that the interface (3) is with dividing
Wind box (1) or main air duct (2) are an integral structure.
6. a kind of air draft switching method of waste collection cup, which is characterized in that when multiple spin coating units are configured in process cavity, often
Air distribution outlet (4) on the interface (3) that the waste collection cup exhaust outlet of a spin coating units is connected with main air duct (2) is set, is received in waste liquid
When the exhaust outlet of collection cup closes or opens, the air distribution outlet (4) opens or closes, and ensures waste collection cup by air distribution outlet (4)
The closing of exhaust outlet does not influence other waste collection cups.
7. it according to the method described in claim 6, it is characterized in that, is connected between each waste collection cup exhaust outlet and interface (3)
Divide wind box (1).
8. the method according to the description of claim 7 is characterized in that described divide setting air draft between wind box (1) and interface (3) to cut
Converting mechanism carries out the switching of air distribution outlet (4) air draft and waste collection cup exhaust outlet air draft by the air draft switching mechanism.
9. according to the method described in claim 8, it is characterized in that, the air draft switching mechanism includes air door regulating mechanism (5)
With air door (7), the air door (7) be installed in rotation on point between wind box air outlet (9) and air distribution outlet (4) and with air door tune
Mechanism (5) is saved to connect, the air door (7) by the drivings of air door regulating mechanism (5), divide described in closing wind box air outlet (9) or
Close the air distribution outlet (4).
10. according to the method described in claim 6, it is characterized in that, air port is equipped between the main air duct (2) and interface (3)
Adjustable plate (6), by the size of air port adjustable plate (6) regulating main air road air inlet (10), so as to adjust the row of waste collection cup
Air force.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611042315.8A CN108080222A (en) | 2016-11-23 | 2016-11-23 | The air draft switching device and its method of a kind of waste collection cup |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611042315.8A CN108080222A (en) | 2016-11-23 | 2016-11-23 | The air draft switching device and its method of a kind of waste collection cup |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108080222A true CN108080222A (en) | 2018-05-29 |
Family
ID=62170942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611042315.8A Pending CN108080222A (en) | 2016-11-23 | 2016-11-23 | The air draft switching device and its method of a kind of waste collection cup |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108080222A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117181560A (en) * | 2023-10-31 | 2023-12-08 | 宁波润华全芯微电子设备有限公司 | Exhaust assembly and exhaust method for gluing unit |
Citations (5)
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|---|---|---|---|---|
| CN2223133Y (en) * | 1995-03-10 | 1996-03-27 | 曾里敏 | Powder electrostatic spray dust precipitating and collecting apparatus |
| JP2001057335A (en) * | 1999-06-09 | 2001-02-27 | Tokyo Electron Ltd | Device and method for substrate treatment |
| US20020041935A1 (en) * | 2000-10-10 | 2002-04-11 | Tokyo Electron Limited | Coating unit and coating method |
| CN200940225Y (en) * | 2005-10-31 | 2007-08-29 | 上海佳田制造有限公司 | Air valve switching mechanism for ironing work bench |
| CN101650532A (en) * | 2008-08-12 | 2010-02-17 | 东京毅力科创株式会社 | Liquid processing apparatus, liquid processing method and storage medium |
-
2016
- 2016-11-23 CN CN201611042315.8A patent/CN108080222A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2223133Y (en) * | 1995-03-10 | 1996-03-27 | 曾里敏 | Powder electrostatic spray dust precipitating and collecting apparatus |
| JP2001057335A (en) * | 1999-06-09 | 2001-02-27 | Tokyo Electron Ltd | Device and method for substrate treatment |
| US20020041935A1 (en) * | 2000-10-10 | 2002-04-11 | Tokyo Electron Limited | Coating unit and coating method |
| CN200940225Y (en) * | 2005-10-31 | 2007-08-29 | 上海佳田制造有限公司 | Air valve switching mechanism for ironing work bench |
| CN101650532A (en) * | 2008-08-12 | 2010-02-17 | 东京毅力科创株式会社 | Liquid processing apparatus, liquid processing method and storage medium |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117181560A (en) * | 2023-10-31 | 2023-12-08 | 宁波润华全芯微电子设备有限公司 | Exhaust assembly and exhaust method for gluing unit |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Applicant before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180529 |
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| RJ01 | Rejection of invention patent application after publication |