CN108050390B - Gas valve separating box and gas conveying equipment - Google Patents
Gas valve separating box and gas conveying equipment Download PDFInfo
- Publication number
- CN108050390B CN108050390B CN201810072048.1A CN201810072048A CN108050390B CN 108050390 B CN108050390 B CN 108050390B CN 201810072048 A CN201810072048 A CN 201810072048A CN 108050390 B CN108050390 B CN 108050390B
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- box body
- air inlet
- pipeline
- air
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- 230000007246 mechanism Effects 0.000 claims abstract description 22
- 239000007789 gas Substances 0.000 claims description 52
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 19
- 229910052757 nitrogen Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 238000009826 distribution Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 239000010720 hydraulic oil Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 210000003437 trachea Anatomy 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229920002943 EPDM rubber Polymers 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/005—Protection or supervision of installations of gas pipelines, e.g. alarm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
- F17D5/06—Preventing, monitoring, or locating loss using electric or acoustic means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Fluid-Driven Valves (AREA)
Abstract
The invention discloses a gas valve separating box and gas conveying equipment, and belongs to the technical field of gas conveying. The air valve separating box comprises a box body, wherein the top of the box body is provided with an air valve, a plurality of air inlets and air outlets, an air inlet and a control panel are arranged on the side face of the box body, a valve panel is arranged inside the box body, an air inlet pipeline is arranged on the valve panel, the air inlet pipeline is communicated with the air inlets, a normally-closed air main valve is arranged on the air inlet pipeline, the air main valve is connected with an air actuating mechanism, the air actuating mechanism comprises an air pipe connected with the air main valve, one end of the air pipe, which is far away from the air main valve, is connected with an electromagnetic valve, the electromagnetic valve is connected with the control panel, the on-off of the electromagnetic valve can be controlled through the on-off of a button on the control panel, and then the on-off of the air main valve can be controlled through the on-off of the button on the control panel.
Description
Technical Field
The invention relates to the technical field of gas conveying, in particular to a gas valve separating box and gas conveying equipment.
Background
In the development of modern industry and high-tech technology, almost all smart devices are free of semiconductors, and the processing of semiconductors includes deposition processes such as Chemical Vapor Deposition (CVD) of metal, dielectric and semiconductor materials, etching of surface layers, polishing of photoresist mask layers, and the like. During these processes of semiconductors, a large amount of gas is required for reaction, and a plurality of gases are required to be introduced, and each of these gases is branched and conveyed through a gas manifold (Valve Manifold Box, VMB).
The gas distribution valve box for conveying the semiconductor processing gas has very strict requirements on safety, and aims to reduce the occurrence of safety accidents as much as possible so as to obtain high-efficiency, stable and continuously improved industrial profits in the semiconductor manufacturing industry. The existing gas valve separating box is not intelligent enough, compact in structure, high in cost and poor in safety.
Disclosure of Invention
The invention aims to provide a gas valve separating box and gas conveying equipment, which have the advantages of high intelligent degree, compact structure, low cost and good reliability and safety.
In order to achieve the above object, the following technical solutions are provided,
the invention provides a gas valve separating box which comprises a box body, wherein the top of the box body is provided with a blast gate, a plurality of air inlet holes and air outlet holes, and the middle part of one side surface of the box body is provided with an air inlet;
the utility model discloses a pneumatic control device for the air conditioner, including box, valve panel, main inlet pipe, pneumatic actuating mechanism, control panel, valve panel, main inlet pipe's inlet end, the inlet port is connected, the outlet port with the venthole is connected, be provided with normally closed pneumatic main valve on the inlet pipe, pneumatic main valve is connected with pneumatic actuating mechanism, pneumatic actuating mechanism include with the trachea that pneumatic valve is connected, the trachea is kept away from pneumatic main valve's one end is connected with the solenoid valve, the solenoid valve with control panel connects, can be through the switching of button on the control panel controls the break-make electricity of solenoid valve, and then control pneumatic main valve's switching.
Further, a bracket is arranged at the lower end of the box body, the box body is of a cuboid structure, the length of the box body is 560mm, the width of the box body is 380mm, the height of the box body is 1600mm, and the height from the top end of the air valve to the top end of the box body is 230mm;
the length of the valve panel is 710mm, and the width is 480mm.
Further, a total air inlet pipeline, a reserved pipeline, a main air inlet pipeline, a diversion pipeline and an auxiliary air flow pipeline are arranged on the valve panel, the air inlet end of the total air inlet pipeline is communicated with the air inlet hole, a three-way joint is arranged at the inlet end of the total air inlet pipeline and is upwards connected with the reserved pipeline, the length range of the reserved pipeline is 60-100 mm, and the upper end of the reserved pipeline is connected with a face sealing joint; the three-way joint is downwards connected with the main air inlet pipeline, the main air inlet pipeline is connected with a diaphragm valve, four groups of shunt pipelines are connected in parallel behind the diaphragm valve, each group of shunt pipelines is sequentially connected with a pneumatic shunt valve, a pressure reducing valve, a pressure gauge and the diaphragm valve from bottom to top, the upper end of each shunt pipeline is connected with a face seal joint, the structure of each pneumatic shunt valve is the same as that of the pneumatic main valve, and the pneumatic shunt valves are respectively connected with corresponding keys of the control panel;
the air inlet end of the auxiliary air flow pipeline is connected with a face seal joint, the face seal joint is downwards and sequentially connected with a diaphragm valve, a first one-way valve and a pressure gauge, the first one-way valve is downwards in an open state and is respectively communicated with four groups of flow dividing pipelines below the pressure reducing valve, the lower part of the diaphragm valve at the upper end of the flow dividing pipeline is respectively communicated with an air outlet pipeline through the diaphragm valve, the outer end of the air outlet pipeline is connected with a vacuum generator, the upper end of the vacuum generator is communicated with an exhaust gas device through a valve, and the lower end of the vacuum generator is communicated with a driving mechanism.
Further, the lower end of the vacuum generator is connected with a nitrogen driving mechanism through a second one-way valve, the second one-way valve is in an upward opening state, the nitrogen driving mechanism inputs nitrogen into the vacuum generator, and the vacuum generator vacuumizes the auxiliary airflow pipeline.
Furthermore, an emergency stop button is further arranged on the valve panel, the emergency stop button is electrically connected with all the electromagnetic valves on the valve panel, and the emergency stop button is arranged to be of a structure recessed towards the inner side of the box body, so that the emergency stop button can be prevented from being touched; the air inlet is an air inlet fence.
Further, a box door is arranged on one side face of the box body, and the box door, the control panel and the air inlet are all arranged on the same side face of the box body;
an observation panel is further arranged on the side face, and the interior of the box body can be observed through the observation panel;
further, the observation panel comprises an observation opening arranged at the upper part of the side face of the box body and metal grid explosion-proof glass for sealing the observation opening.
Further, the air inlet hole and the air outlet hole are knock-out holes; the box body arranged around the metal grid explosion-proof glass is also provided with a lining door plate, and the color of the lining door plate can indicate the property of gas introduced into the air inlet hole;
the detection device is arranged in the box body, the alarm device is arranged outside the box body, and the detection device is in communication connection with the alarm device; the alarm device is a three-color tower lamp.
Further, a door lock is arranged on the door, and the door lock has the function of a handle;
the door closer is arranged on the door, so that the door can be automatically attracted.
Further, a differential pressure gauge is further arranged on the box body, one end of the differential pressure gauge stretches into the box body, the other end of the differential pressure gauge is arranged outside the box body, and the pressure difference inside and outside the box body can be displayed.
The invention also provides gas conveying equipment, which comprises the gas valve separating box according to any one of the technical schemes.
Compared with the prior art, the gas valve separating box is provided with the control panel, and the key on the control panel is opened and closed through the electromagnetic valve and the pneumatic main valve on the air inlet pipeline on the valve panel, so that the condition of whether gas flows or not can be controlled through the on-off of the key on the control panel; the air inlet and the air outlet of the box body are a plurality of knock-out holes, the positions of the air inlet and the air outlet can be selected according to the requirements, all valve components on the valve panel are welded by a special welding technology, the size of dead angles and the size of gaps among all parts are reduced, the size of the valve panel is greatly reduced, and the size of the box body is further greatly reduced; the valve on the valve panel has the advantages of good design reliability and high safety, and an auxiliary air flow system is designed, and because the pressure reducing valve is easy to fail and needs to be maintained, the auxiliary air flow system is used for removing air in a system pipeline after the pressure reducing valve is maintained, so that the function of the valve is more perfect and the safety is better. The intelligent control system has the advantages of high intelligent degree, compact structure, low cost, high reliability and good safety.
Drawings
Fig. 1 is a schematic view of a gas valve box according to a first embodiment of the present invention.
Fig. 2 is a schematic diagram of a gas valve box according to a first embodiment of the present invention.
Fig. 3 is a top view of a gas manifold in accordance with a first embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a valve panel according to a first embodiment of the present invention.
Fig. 5 is a schematic diagram of a valve panel according to a first embodiment of the invention.
Reference numerals: 1-a box body; 2-an air valve; 3-knockout hole; 4-an air inlet fence; 5-metal grid explosion-proof glass; 6-a control panel; 7-trichromatic tower lamps; 8-a differential pressure gauge; 9-a bracket; 10-bolts; 11-valve panel; 12-a total air inlet pipeline; 13-a main air intake line; 14-an auxiliary airflow line; 15-a diaphragm valve; 16-a pressure gauge; 17-split line; 18-pneumatic valve separation; 19-a pressure reducing valve; 20-face seal joint; 21-a first one-way valve; 22-an air outlet pipeline; 23-a vacuum generator; 24-a second one-way valve; 25-nitrogen driving mechanism; 61-emergency stop key; 1011—door; 1012-door lock; 1013-lining door panels; 1101-via.
Detailed Description
The technical scheme of the invention is further described below by the specific embodiments with reference to the accompanying drawings.
Example 1
As shown in fig. 1-3, the gas valve separating box provided by the invention comprises a box body 1, wherein the top of the box body 1 is provided with a blast gate 2, a plurality of air inlet holes and air outlet holes, and the middle part of one side surface of the box body 1 is provided with an air inlet. Specifically, the lower end of the box body 1 is a bracket 9 integrally welded, the whole box body 1 is of a cuboid structure, the length of the box body 1 is 560mm, the width of the box body 1 is 380mm, the height of the box body 1 is 1600mm, the height from the top end of the air valve 2 to the top end of the box body 1 is 230mm, the air valve 2 is connected to the top of the box body 1 through a bolt 10, the lower end of the bolt 10 extending into the box body 1 is connected with a fire-fighting spray head, and fire can be extinguished when a fire disaster occurs in the box body; the air inlet holes and the air outlet holes are knock-out holes 3, so that the positions of the air inlet and the air outlet can be selected according to assembly requirements, and convenience and flexibility are realized; the air inlet is an air inlet fence 4, the air valve 2 is communicated with the air inlet of the air draft device, and because the box body 1 is under negative pressure, air can be automatically fed through the air inlet fence 4, and then the air in the box body 1 is circulated through the air draft device connected with the air valve 2. Further, still be provided with differential pressure meter 8 on the box 1, differential pressure meter 8's one end stretches into inside box 1, and the other end is outside box 1, can show the pressure difference inside and outside box 1, because in the course of the work, must keep negative pressure state in box 1, when gas leakage or conflagration take place like this, harmful gas such as poison gas can not arrange outward, and can be taken out from blast gate 2, and the fire also can spread to the low pressure direction, can not spread to the box 1 outside and cause bigger calamity.
Further, as shown in fig. 1 and 2, a box door 1011 is provided on a side surface of the box 1 where the air inlet is provided, and an observation panel is further provided on the side surface, wherein the observation panel includes an observation opening provided on an upper portion of the side surface of the box 1 and a metal mesh explosion-proof glass 5 for closing the observation opening, and the inside of the box 1 can be observed through the observation panel. Further, the inner lining door plate 1013 is further provided on the box body 1 which is arranged around the metal mesh explosion-proof glass 5, and the color of the inner lining door plate 1013 can indicate the property of the gas which is introduced into the air inlet, for example: red indicates that the gas is flammable, explosive or oxidizing, yellow indicates that the gas is toxic or corrosive, and blue indicates that the gas is of other nature. Further, detection device is also arranged in the box body 1, an alarm device is arranged outside the box body 1, and the detection device and the alarm device are both in communication connection with the controller. In this embodiment, the detecting device includes a flame detector, a high temperature probe, a gas leakage detector and a negative pressure switch, the alarm device is a three-color tower lamp 7, the flame detector can detect whether there is flame in the box 1, the high temperature probe can detect whether the temperature in the box 1 is too high, the gas detection sensing probe can sense the proportion of air and gas in the box 1, the negative pressure switch is used for detecting whether the pressure difference between the inside and the outside of the box 1 reaches the minimum value, if there is flame, the temperature exceeds the preset temperature or the air inlet pipeline has leakage, the dangerous signal is sent to the controller, and the controller controls the three-color tower lamp 7 to flash the red lamp and buzzing on the red lamp to give secondary alarm; if the negative pressure in the box body 1 is insufficient, the negative pressure switch can send a warning signal to the controller, and the controller controls the three-color tower lamp 7 to flash the yellow lamp and buzzing on the yellow lamp to give an alarm for one stage.
Further, as shown in fig. 1, a door lock 1012 is provided on the door 1011, and the door lock 1012 can be used as a handle to open the door 1011; the door closer is arranged on the door 1011, so that the door 1011 can be automatically attracted, and the potential safety hazard can be eliminated under the condition that a person forgets to close the door 1011. Specifically, the door closer is a hydraulic door closer, the basic components of the hydraulic door closer comprise a supporting guide piece, a transmission gear, a return spring, a one-way valve, a rack plunger, a throttle valve core, a shell, an end cover, a sealing ring and a connecting rod, and the shell and the connecting rod play roles in fixing the door closer and connecting a door leaf and a door frame. The door closer has the working principle that when the door is opened, the door body drives the connecting rod to act, and the transmission gear is rotated to drive the rack plunger to move rightwards. The spring is compressed during the right movement of the plunger, and the hydraulic oil in the right chamber is also pressurized. The check valve ball body on the left side of the plunger is opened under the action of oil pressure, and hydraulic oil in the right cavity flows into the left cavity through the check valve. After the door opening process is finished, the spring is compressed in the opening process, so that the accumulated elastic potential energy is released, the plunger is pushed to the left side, the transmission gear and the door closer connecting rod are driven to rotate, and the door is closed. In the spring release process, the hydraulic oil in the left cavity of the door closer is compressed, the one-way valve is closed, and the hydraulic oil can only flow out through a gap between the shell and the plunger and flows back to the right cavity through the small hole in the plunger and the two flow passages provided with the throttle valve cores. Therefore, the hydraulic oil forms resistance to the release of the spring, namely, the buffer effect is achieved through throttling, so that the closing speed of the door is controlled. The throttle valve on the valve body can be adjusted to control the variable closing speed of different stroke sections.
Further, a control panel 6 is disposed on a side surface of the case 1, specifically, an emergency stop key 61, a pair of corresponding opening and closing keys of the main air inlet channel, a pair of corresponding four pairs of opening and closing keys of the four-component flow channel 17, a remote closing key corresponding to the five pairs of keys, a reset key and a mute key are disposed on the control panel 6, wherein the emergency stop key 61 has a longer length, and thus, is disposed in a structure recessed toward the inner side of the case 1 to prevent the key from being touched by other things when not in use.
Further, the inside of the box 1 is further provided with a valve panel 11, specifically, as shown in fig. 4 and 5, four corners of the valve panel 11 are respectively provided with a through hole 1101, and the valve panel 11 is threaded on the side wall inside the box 1 by passing through the through holes 1101 through bolts, and has a length of 710mm, a width of 480mm, a size small enough and a compact structure. The valve panel 11 is provided with a total air inlet pipeline 12, a reserved pipeline communicated with the total air inlet pipeline 12, a main air inlet pipeline 13 communicated with the total air inlet pipeline 12, four-component flow pipelines 17 communicated with the main air inlet pipeline 13 and an auxiliary air flow pipeline 14, the tail end of the total air inlet pipeline 12 is provided with a three-way joint, the reserved pipeline is connected upwards, the length range of the reserved pipeline is 60mm-100mm, the reserved pipeline can be 60mm80mm or 100mm, and the embodiment is designed to be 60mm. The upper end of the connecting surface is provided with a sealing joint 20; the three-way joint is downwards connected with the main air inlet pipeline 13, the main air inlet pipeline 13 is provided with a normally closed type pneumatic main valve, the pneumatic main valve is connected with a pneumatic actuating mechanism, the pneumatic actuating mechanism comprises an air pipe connected with the pneumatic main valve, one end of the air pipe, which is far away from the pneumatic main valve, is connected with an electromagnetic valve, the electromagnetic valve is connected with an opening key of the main air inlet pipeline 13 on the control panel 6, the on-off of the electromagnetic valve can be controlled through the opening and closing of the key on the control panel 6, and then the air inlet action of the pneumatic actuating mechanism is controlled, so that the purpose of controlling the opening and closing of the pneumatic main valve is achieved. The main air inlet pipeline 13 is also sequentially connected with a diaphragm valve 15, a pressure gauge 16 is connected to the rear of the diaphragm valve 15, four component flow distribution pipelines 17 are connected in parallel backward, each component flow distribution pipeline 17 is sequentially connected with a pneumatic flow distribution valve 18, a pressure reducing valve 19, the pressure gauge 16 and the diaphragm valve 15 from bottom to top, and the upper end of the flow distribution pipeline 17 is connected with a face seal joint 20. The pneumatic sub-valves 18 are the same as the pneumatic main valves in structure, and are respectively connected with respective pneumatic actuating mechanisms, and the pneumatic actuating mechanisms are respectively connected with corresponding keys of the control panel 6, and the structure of the pneumatic actuating mechanisms and the connection mode with the control panel 6 are the same as the pneumatic main valves, which are not described herein. In addition, the emergency stop key 61 on the control panel 6 is electrically connected with all the electromagnetic valves, and in emergency, the emergency stop key 61 can be pressed down to cut off all the electromagnetic valves, so that the whole control panel 6 stops the air intake.
The air inlet end of the auxiliary air flow pipeline 14 is connected with a face seal joint 20, the diaphragm valve 15, the first one-way valve 21 and the pressure gauge 16 are sequentially connected downwards, the first one-way valve 21 is opened downwards and is respectively communicated with four groups of flow distribution pipelines 17 below the pressure reducing valve 19, the lower part of the diaphragm valve 15 at the upper end of the flow distribution pipeline 17 is respectively communicated with the air outlet pipeline 22 through the diaphragm valve 15, the outer end of the air outlet pipeline 22 is connected with the vacuum generator 23, the upper end of the vacuum generator 23 is communicated with the waste gas device, the lower end of the vacuum generator 23 is connected with the nitrogen driving mechanism 25 through the second one-way valve 24, the second one-way valve 24 is opened upwards, the nitrogen driving mechanism 25 inputs nitrogen into the vacuum generator 23, and the vacuum generator 23 vacuumizes the auxiliary air flow pipeline 14. The diaphragm valves 15 are manual diaphragm valves, are made of EPDM diaphragm materials, are precisely cast stainless steel valve bodies, have polishing through dead-angle-free channels, have opening and closing limiting and state displaying functions, and are acid-resistant, alkali-resistant, leak-free, bacteria-free, easy to disinfect and convenient to maintain. All of the valve components described above were prepared using a swagelok welder using either an 8H or 8M model machine weld.
The control panel 6 is additionally arranged on the gas valve separating box, and the key on the control panel 6 is opened and closed with the pneumatic main valve on the gas inlet pipeline on the valve panel 11 through the electromagnetic valve, so that the condition of whether the gas flows or not can be controlled through the on-off of the key on the control panel 6; the air inlet holes and the air outlet holes of the box body 1 are a plurality of knock-out holes 3, the positions of the air inlet and the air outlet can be selected according to the requirements, all valve components on the valve panel 11 are welded by a special welding technology, the size of dead angles and the size of gaps among all parts are reduced, the size of the valve panel 11 is greatly reduced, and then the size of the box body 1 is greatly reduced; the valve on the valve panel 11 has good design reliability and high safety, and an auxiliary air flow system is designed, and because the pressure reducing valve 19 is easy to fail and needs to be maintained, the auxiliary air flow system is used for exhausting air in a system pipeline after the pressure reducing valve 19 is maintained, so that the invention has more perfect functions and better safety. The intelligent control system has the advantages of high intelligent degree, compact structure, low cost, high reliability and good safety.
Example two
The invention also provides gas conveying equipment, which comprises the gas valve separating box according to any one of the technical schemes.
It is to be understood that the above examples of the present invention are provided for clarity of illustration only and are not limiting of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.
Claims (8)
1. The gas valve separating box comprises a box body (1), wherein a wind valve (2), a plurality of air inlets and air outlets are arranged at the top of the box body (1), and an air inlet is formed in the middle of one side surface of the box body (1);
the intelligent control device is characterized in that a control panel (6) is arranged on one side face of the box body (1), a valve panel (11) is further arranged in the box body (1), a main air inlet pipeline (13) is arranged on the valve panel (11), an air inlet end of the main air inlet pipeline (13) is connected with the air inlet hole, an air outlet end of the main air inlet pipeline (13) is connected with the air outlet hole, a normally closed type pneumatic main valve is arranged on the main air inlet pipeline (13), the pneumatic main valve is connected with a pneumatic executing mechanism, the pneumatic executing mechanism comprises an air pipe connected with the pneumatic main valve, an electromagnetic valve is connected with one end, far away from the pneumatic main valve, of the air pipe, the electromagnetic valve is connected with the control panel (6), and the on-off electricity of the electromagnetic valve can be controlled through the opening and closing of a key on the control panel (6), so that the opening and closing of the pneumatic main valve are controlled.
The valve panel (11) is provided with a total air inlet pipeline (12), a reserved pipeline, a main air inlet pipeline (13), a diversion pipeline (17) and an auxiliary air flow pipeline (14), the air inlet end of the total air inlet pipeline (12) is communicated with the air inlet hole, the inlet end of the total air inlet pipeline (12) is provided with a three-way joint which is upwards connected with the reserved pipeline, the length range of the reserved pipeline is 60mm-100mm, and the upper end of the reserved pipeline is connected with a face seal joint (20); the three-way joint is downwards connected with the main air inlet pipeline (13), the main air inlet pipeline (13) is connected with a diaphragm valve (15), four groups of shunt pipelines (17) are connected in parallel behind the diaphragm valve (15), each group of shunt pipelines (17) is sequentially connected with a pneumatic shunt valve (18), a pressure reducing valve (19), a pressure gauge (16) and the diaphragm valve (15) from bottom to top, the upper end of the shunt pipeline (17) is connected with a face seal joint (20), the structure of the pneumatic shunt valve (18) is the same as that of the pneumatic main valve, and each pneumatic shunt valve (18) is respectively connected with a corresponding key of the control panel (6);
the air inlet end of the auxiliary air flow pipeline (14) is connected with a face seal joint (20), a diaphragm valve (15), a first one-way valve (21) and a pressure gauge (16) are connected downwards in sequence, the first one-way valve (21) is in an opened state downwards, the lower parts of the pressure reducing valves (19) are respectively communicated with four groups of the split flow pipelines (17), the lower parts of the diaphragm valves (15) at the upper ends of the split flow pipelines (17) are respectively communicated with an air outlet pipeline (22) through the diaphragm valve (15), the outer ends of the air outlet pipelines (22) are connected with a vacuum generator (23), the upper ends of the vacuum generator (23) are communicated with an exhaust gas device through valves, and the lower ends of the vacuum generator (23) are communicated with a driving mechanism;
a box door (1011) is arranged on one side surface of the box body (1), and the box door (1011), the control panel (6) and the air inlet are all arranged on the same side surface of the box body (1);
an observation panel is further provided on the side surface, and the inside of the case (1) can be observed through the observation panel.
2. The gas valve separating box according to claim 1, wherein a bracket (9) is arranged at the lower end of the box body (1), the box body (1) is of a cuboid structure, the length of the box body (1) is 560mm, the width of the box body is 380mm, the height of the box body (1) is 1600mm, and the height from the top end of the air valve (2) to the top end of the box body (1) is 230mm;
the valve panel (11) has a length of 710mm and a width of 480mm.
3. The gas valve separating box according to claim 1, wherein the lower end of the vacuum generator (23) is connected with a nitrogen driving mechanism (25) through a second one-way valve (24), the second one-way valve (24) is in an upward opening state, the nitrogen driving mechanism (25) inputs nitrogen into the vacuum generator (23), and the vacuum generator (23) vacuumizes the auxiliary airflow pipeline (14).
4. The gas valve separating box according to claim 1, characterized in that an emergency stop key (61) is further arranged on the control panel (6), the emergency stop key (61) is electrically connected with the electromagnetic valve of the pneumatic main valve on the valve panel (11), and the emergency stop key (61) is arranged to be concave towards the inner side of the box body (1) and can prevent touching; the air inlet is an air inlet fence (4).
5. The gas manifold according to claim 1, wherein the gas inlet and the gas outlet are knock-out holes (3);
the observation panel comprises an observation opening and metal grid explosion-proof glass (5), wherein the observation opening is arranged at the upper part of the side surface of the box body (1), and the metal grid explosion-proof glass is used for sealing the observation opening;
the box body (1) arranged around the metal grid explosion-proof glass (5) is also provided with a lining door plate (1013), and the color of the lining door plate (1013) can indicate the property of gas introduced into the air inlet hole;
a detection device is arranged inside the box body (1), an alarm device is arranged outside the box body (1), and the detection device is in communication connection with the alarm device; the alarm device is a three-color tower lamp (7).
6. The gas valve box according to claim 1, wherein a door lock (1012) is provided on the door (1011), and the door lock (1012) has a function of a handle;
the door (1011) is provided with a door closer, so that the door (1011) can be automatically attracted.
7. The gas valve separating box according to any one of claims 1-6, wherein a differential pressure gauge (8) is further arranged on the box body (1), one end of the differential pressure gauge (8) stretches into the box body (1), and the other end is arranged outside the box body (1) and can display the pressure difference inside and outside the box body (1).
8. A gas delivery apparatus comprising a gas manifold as claimed in any one of claims 1 to 7.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810072048.1A CN108050390B (en) | 2018-01-25 | 2018-01-25 | Gas valve separating box and gas conveying equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810072048.1A CN108050390B (en) | 2018-01-25 | 2018-01-25 | Gas valve separating box and gas conveying equipment |
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| CN108050390A CN108050390A (en) | 2018-05-18 |
| CN108050390B true CN108050390B (en) | 2024-03-26 |
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| CN201810072048.1A Active CN108050390B (en) | 2018-01-25 | 2018-01-25 | Gas valve separating box and gas conveying equipment |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109573602A (en) * | 2018-12-12 | 2019-04-05 | 佛山市新鹏机器人技术有限公司 | A kind of universal pneumatic enclosure |
| CN110531655A (en) * | 2019-08-07 | 2019-12-03 | 上海至纯洁净***科技股份有限公司 | A kind of gas divides clack box and its control unit and control system |
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| TW440666B (en) * | 1999-06-08 | 2001-06-16 | Air Liquide | Method and device for filling a distribution line with corrosive gas |
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| CN101093056A (en) * | 2007-01-18 | 2007-12-26 | 上海至纯洁净***科技有限公司 | Special gas storage tank |
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|---|---|---|---|---|
| TW440666B (en) * | 1999-06-08 | 2001-06-16 | Air Liquide | Method and device for filling a distribution line with corrosive gas |
| CN1782934A (en) * | 2004-11-30 | 2006-06-07 | 气体产品与化学公司 | Method and apparatus for utilizing a sequence interpreter approach to control logic of a programmable logic controller |
| CN101093056A (en) * | 2007-01-18 | 2007-12-26 | 上海至纯洁净***科技有限公司 | Special gas storage tank |
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