CN108046245A - A kind of chemical gas phase reaction precipitation equipment for being suitable for batch and preparing graphene - Google Patents
A kind of chemical gas phase reaction precipitation equipment for being suitable for batch and preparing graphene Download PDFInfo
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- CN108046245A CN108046245A CN201810024276.1A CN201810024276A CN108046245A CN 108046245 A CN108046245 A CN 108046245A CN 201810024276 A CN201810024276 A CN 201810024276A CN 108046245 A CN108046245 A CN 108046245A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The present invention relates to a kind of chemical gas phase reaction precipitation equipments for being suitable for batch and preparing graphene,Including furnace body,Feeding machanism is equipped in furnace body,Switching mechanism,Pushing mechanism and heating arrangements,Feeding machanism includes lifting assembly,Tablet,Supply assembly and collection assembly,Supply assembly includes two support units and several feed units,Collection assembly includes two struts and several inclined plates,Switching mechanism includes the first motor,Turntable and storage box,The chemical gas phase reaction precipitation equipment for being suitable for preparing graphene in batches provides multiple substrates by feeding machanism in furnace body,Change the height and position of substrate by lifting assembly,Substrate is inserted into the storage box in switching mechanism by pushing mechanism,Change the position of substrate by switching mechanism,Substrate is heated by heating arrangements,Substrate surface is deposited on convenient for gas reaction,Prepare graphene,Then substrate is collected by collection assembly,So Xun Huan,It is prepared by the graphene for realizing batch.
Description
Technical field
The present invention relates to new material production equipment field, more particularly to a kind of chemical gas for being suitable for batch and preparing graphene
Phase reaction precipitation equipment.
Background technology
Graphene is a kind of honeycomb flat film formed in a specific way by carbon atom, and being a kind of, there are one atomic layers
The quasi- two-dimensional material of thickness does monoatomic layer graphite so being called.The common power production method of graphene is mechanical glass at present
Glass method, oxidation-reduction method, silicon carbide epitaxial growth method etc., film production method be chemical vapour deposition technique (CVD), wherein CVD
Method can prepare the graphene of high quality large area, meet the requirement of prepare with scale high-quality graphene.
CVD method is when preparing graphene, usually using nickel as substrate, carbonaceous gas is passed through in cvd furnace, such as：Nytron
Object, carbon resolve into the surface that carbon atom is deposited on nickel at high temperature, form graphene, by slight chemical etching, make graphite
Alkene film and the isolated graphene film of nickel sheet.It can be obtained by the preparation method of graphene, graphene is mainly deposited on substrate
Surface, and since batch substrate can not be heated cause that one can only be accommodated in device in existing vapor deposition reaction stove
Piece substrate so as to reduce the depositional area of graphene, reduces the yield of graphene, while in preparation process, works as substrate
On graphene deposition completely after, it is also necessary to close power supply, after waiting cooling, take out graphene and carry out strip operation, cause stone
The preparation work of black alkene is very cumbersome.
The content of the invention
The technical problem to be solved by the present invention is to：It is made to overcome the deficiencies of the prior art and provide a kind of batch that is suitable for
The chemical gas phase reaction precipitation equipment of standby graphene.
The technical solution adopted by the present invention to solve the technical problems is：A kind of chemistry for being suitable for batch and preparing graphene
Gas phase reaction precipitation equipment, including furnace body, bell, air inlet pipe, air outlet pipe and controller, the bell is arranged on the upper of furnace body
Side, the air inlet pipe are arranged on the one side of furnace body, and the air outlet pipe and controller are arranged at the opposite side of furnace body, the control
Device is located at the top of air outlet pipe, and the controller is equipped with display screen and several control buttons, feeding machine is equipped in the furnace body
Structure, switching mechanism, pushing mechanism and heating arrangements, the heating arrangements and pushing mechanism are arranged at the close air inlet pipe of furnace body
One side inner wall on, the heating arrangements are located at the top of pushing mechanism, and the feeding machanism is arranged on the in vivo bottom of stove,
The switching mechanism is arranged on the top of feeding machanism；
The feeding machanism includes lifting assembly, tablet, supply assembly and collection assembly, and the lifting assembly is arranged on flat
The lower section of plate, the supply assembly are arranged on the one side of the close air inlet pipe of the top of tablet, and the mobile phone component is arranged on flat
The top opposite side of plate, the supply assembly include two support units and several feed units, the feed unit from upper and
Under be evenly distributed between two support units, the support unit includes two montants, and the bottom of the montant is fixed on flat
On plate, the feed unit includes substrate and two pressure pins, and the pressure pin is corresponded with support unit, the both ends of the pressure pin
It is fixedly connected respectively with two montants, the substrate is erected on two pressure pins；
The collection assembly includes two struts and several inclined plates, and the bottom of the strut is fixed on tablet, described oblique
Plate is evenly distributed on from top to down between two struts, and the both ends of the inclined plate are fixedly connected respectively with two struts, described oblique
One end of the separate switching mechanism of plate is equipped with limiting plate；
The switching mechanism is arranged between supply assembly and collection assembly, and the switching mechanism includes the first motor, turns
Disk and storage box, first motor are fixed on the inner wall of furnace body, and first motor is sequentially connected with turntable, the storage
Box is fixed on turntable, and first motor is stepper motor, and the step angle of first motor is 90 °.
Preferably, in order to which tablet is driven to lift, the lifting assembly includes driving unit, fixed block, movable block, flexible
Frame, hinged block, slip ring and slide, the fixed block are fixed on the in vivo bottom of stove, and the driving unit connects with movable block transmission
It connects, the shape of the slide is U-shaped, and the both ends of the slide and hinged block are each attached to the lower section of tablet, and the slip ring is arranged
On slide, the both sides of the bottom of the expansion bracket are hinged respectively with fixed block and movable block, and the two of the top of the expansion bracket
Side is hinged respectively with hinged block and slip ring.
Preferably, in order to which movable block is driven to move, the driving unit includes the second motor and the second drive shaft, described
Second motor is located at the one side of the separate fixed block of movable block, and second motor is fixed on the in vivo bottom of stove, and described second
Drive shaft is arranged between the second motor and fixed block, and second motor and the second drive shaft are sequentially connected, and described second drives
The periphery of moving axis is equipped with external screw thread, and the movable block is set in the second drive shaft, and internal thread is equipped in the movable block, described
Internal thread in movable block matches with the external screw thread in the second drive shaft.
Preferably, for the ease of detection tablet and the distance of the in vivo bottom of stove, the lower section of the tablet is equipped with distance
Sensor.
Preferably, in order to lift flatbed horizontal, the feeding machanism further includes locating rod, the bottom of the locating rod
The in vivo bottom of stove is fixed on, the tablet is arranged on the securing lever.
Preferably, in order to by supply assembly substrate push-in storage box in, the pushing mechanism include the 3rd motor,
First connecting rod, second connecting rod, third connecting rod and pushing block, the 3rd motor are fixed on the inner wall of furnace body, the 3rd motor
It is sequentially connected with one end of first connecting rod, the other end of the first connecting rod is cut with scissors by one end of second connecting rod and third connecting rod
It connects, the other end of the third connecting rod is fixedly connected with pushing block.
Preferably, in order to fix the moving direction of third connecting rod, the pushing mechanism includes retainer ring, the retainer ring
It is fixed on the inner wall of furnace body, the Fixing shrink ring is located on third connecting rod.
Preferably, in order to realize the heating to substrate, the heating arrangements include the 4th motor, driving wheel, fixing axle,
Frame and infrared lamp, the 4th motor are fixed on the inner wall of furnace body, and the 4th motor is sequentially connected with driving wheel, institute
It states fixing axle to fix on the drive wheel, the fixing axle is arranged in frame, and the infrared lamp is fixed on the close of frame and cuts
The one side of converting mechanism.
Preferably, in order to which infrared lamp is made smoothly to lift, the heating arrangements further include spacing ring and stent, described
The shape of stent is U-shaped, and the both ends of the stent are fixed on the inner wall of furnace body, and the spacing ring is set on stent, described
Spacing ring is fixed on the one side of the separate infrared lamp of frame.
Preferably, frame departs from fixing axle in order to prevent, one end of the separate driving wheel of the fixing axle is equipped with protrusive board.
The invention has the advantages that the chemical gas phase reaction precipitation equipment that should be suitable for preparing graphene in batches passes through confession
Material mechanism provides multiple substrates in furnace body, changes the height and position of substrate by lifting assembly, is inserted substrate by pushing mechanism
Enter in the storage box in switching mechanism, change the position of substrate by switching mechanism, substrate is heated by heating arrangements, convenient for gas
Precursor reactant is deposited on substrate surface, prepares graphene, and then substrate is collected by collection assembly, so cycles, and realizes
Prepared by the graphene of batch, compared with existing feeding machanism, which is improving the same of multiple substrate reactive depositions
When, it is also convenient for being collected the substrate that deposition is completed, so as to improve the practicability of equipment.
Description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the structure diagram for being suitable for batch and preparing the chemical gas phase reaction precipitation equipment of graphene of the present invention；
Fig. 2 is the knot for being suitable for preparing the feeding machanism of the chemical gas phase reaction precipitation equipment of graphene in batches of the present invention
Structure schematic diagram；
Fig. 3 is the knot for being suitable for preparing the pushing mechanism of the chemical gas phase reaction precipitation equipment of graphene in batches of the present invention
Structure schematic diagram；
Fig. 4 is the knot for being suitable for preparing the heating arrangements of the chemical gas phase reaction precipitation equipment of graphene in batches of the present invention
Structure schematic diagram；
In figure：1. furnace body, 2. bells, 3. air inlet pipe, 4. air outlet pipes, 5. controllers, 6. display screens, 7. control buttons, 8.
Tablet, 9. montants, 10. substrates, 11. pressure pins, 12. struts, 13. inclined plates, 14. limiting plates, 15. first motors, 16. turntables, 17.
Storage box, 18. fixed blocks, 19. movable blocks, 20. expansion brackets, 21. hinged blocks, 22. slip rings, 23. slides, 24. second motors,
25. the second drive shaft, 26. range sensors, 27. locating rods, 28. the 3rd motors, 29. first connecting rods, 30. second connecting rods, 31.
Third connecting rod, 32. pushing blocks, 33. retainer rings, 34. the 4th motors, 35. driving wheels, 36. fixing axles, 37. frames, 38. infrared lamps
Pipe, 39. spacing rings, 40. stents, 41. protrusive boards.
Specific embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.These attached drawings are simplified schematic diagram, only with
Illustration illustrates the basic structure of the present invention, therefore it only shows composition related to the present invention.
As shown in Figure 1, a kind of chemical gas phase reaction precipitation equipment for being suitable for batch and preparing graphene, including furnace body 1, stove
Lid 2, air inlet pipe 3, air outlet pipe 4 and controller 5, the bell 2 are arranged on the top of furnace body 1, and the air inlet pipe 3 is arranged on furnace body
1 one side, the air outlet pipe 4 and controller 5 are arranged at the opposite side of furnace body 1, and the controller 5 is located at the upper of air outlet pipe 4
Side, the controller 5 are equipped with display screen 6 and several control buttons 7, be equipped in the furnace body 1 feeding machanism, switching mechanism,
Pushing mechanism and heating arrangements, the heating arrangements and pushing mechanism are arranged at the interior of the one side of the close air inlet pipe 3 of furnace body 1
On wall, the heating arrangements are located at the top of pushing mechanism, and the feeding machanism is arranged on the bottom in furnace body 1, the switching
Mechanism is arranged on the top of feeding machanism；
Reaction gas is passed through in furnace body 1 by the reactive deposition device when preparing graphene, passes through the control on controller 5
Button 7 processed operates equipment and runs, and inside furnace body 1, is provided reaction material by feeding machanism and is carried out the graphene for reacting generation
It collects, pushes the reaction material in feeding machanism to switching mechanism by pushing mechanism, switching mechanism adjusts the position of reaction material,
Heating arrangements is facilitated to heat reaction material, make gas that gas phase reaction deposition occur with reflection material, then switching mechanism
Position is adjusted, is collected by feeding machanism by the graphene prepared is reacted, the remaining gas of simultaneous reactions is from 4 row of air outlet pipe
Go out.
As shown in Fig. 2, the feeding machanism includes lifting assembly, tablet 8, supply assembly and collection assembly, the lifting
Component is arranged on the lower section of tablet 8, and the supply assembly is arranged on the one side of the close air inlet pipe 3 of the top of tablet 8, the hand
Thermomechanical components are arranged on the top opposite side of tablet 8, and the supply assembly includes two support units and several feed units, described
Feed unit is evenly distributed on from top to down between two support units, and the support unit includes two montants 9, the montant
9 bottom is fixed on tablet 8, and the feed unit includes substrate 10 and two pressure pins 11, the pressure pin 11 and support unit
It corresponds, the both ends of the pressure pin 11 are fixedly connected respectively with two montants 9, and the substrate 10 is erected at two pressure pins 11
On；
The collection assembly includes two struts 12 and several inclined plates 13, and the bottom of the strut 12 is fixed on tablet 8,
The inclined plate 13 is evenly distributed on from top to down between two struts 12, and the both ends of the inclined plate 13 are solid with two struts 12 respectively
Fixed connection, one end of the separate switching mechanism of the inclined plate 13 are equipped with limiting plate 13；
In feeding machanism, substrate 10 is positioned on two pressure pins 11 so that supply assembly is capable of providing more during reaction
The substrate 10 of a deposition changes the height and position of tablet 8 by lifting assembly, makes one of substrate 10 of 8 top of tablet
Sustained height is kept with pushing mechanism, the substrate 10 is pushed into switching mechanism by pushing mechanism, base is driven by switching mechanism
Piece 10 rotates, and rotates counterclockwise substrate 10, and when substrate 10 turns to vertical position by horizontal level, heating arrangements are to base
Piece 10 is heated, and gas is made to carry out deposition reaction, and the reaction time is set by the control button 7 on controller 5, anti-when reaching
After between seasonable, the substrate 10 that switching mechanism continues that deposition is driven to complete rotates, and tilts down substrate 10, substrate 10 is fallen at this time
On inclined plate 13 in collection assembly, stop that substrate 10 continues to glide using limiting plate 13, so as to the position of fixed substrate 10, realize
Feeding machanism provides reaction raw materials and the function of being collected the graphene of generation.
The switching mechanism is arranged between supply assembly and collection assembly, the switching mechanism include the first motor 15,
Turntable 16 and storage box 17, first motor 15 are fixed on the inner wall of furnace body 1, and first motor 15 is driven with turntable 16
Connection, the storage box 17 is fixed on turntable 16, and first motor 15 is stepper motor, the step pitch of first motor 15
Angle is 90 °.
In switching mechanism, by the first motor 15 turntable 16 is driven to rotate so that storage box 17 is rotated along the periphery of turntable 16,
When storage box 17 is horizontal and the opening of storage box 17 is directed at collection assembly, by pushing mechanism by one of them in supply assembly
Substrate 10 is pushed into storage box 17, and then the first motor 15 drives turntable 16 to be rotated by 90 ° counterclockwise, turns horizontal 10 angle of substrate
Become vertical, heated convenient for heating arrangements, after a period of time is reacted, the first motor 15 is rotated further, until storage box
Substrate 10 in 17 is influenced to slide downwards by gravity, until falling on the inclined plate 13 in collection assembly, is then rotated further,
Until storage box 17 completes a circular motion, make next substrate 10 in the opening alignment supply assembly of storage box 17, from
And equipment is facilitated to be heated by a pair of substrate 10, deposition reaction occurs, and then realizes that batch prepares graphene.
As shown in Fig. 2, the lifting assembly includes driving unit, fixed block 18, movable block 19, expansion bracket 20, hinged block
21st, slip ring 22 and slide 23, the fixed block 18 are fixed on the bottom in furnace body 1, and the driving unit is driven with movable block 19
Connection, the shape of the slide 23 is U-shaped, and the both ends of the slide 23 and hinged block 21 are each attached to the lower section of tablet 8, described
Slip ring 22 is set on slide 23, and the both sides of the bottom of the expansion bracket 20 are hinged with fixed block 18 and movable block 19 respectively, institute
The both sides for stating the top of expansion bracket 20 are hinged with hinged block 21 and slip ring 22 respectively.
In lifting assembly, by driving unit movable block 19 is driven to move, changed between movable block 19 and fixed block 18
Distance elongates or shortens expansion bracket 20, and slip ring 22 is made to be slided on slide 23, so as to be driven by hinged block 21 and slide 23
Tablet 8 is lifted, and changes the height and position of inclined plate 13 and substrate 10, convenient for unreacted substrate 10 is pushed into storage box 17
And the substrate 10 for depositing completion is put on inclined plate 13.
Preferably, in order to which movable block 19 is driven to move, the driving unit includes the second motor 24 and the second drive shaft
25, second motor 24 is located at the one side of the separate fixed block 18 of movable block 19, and second motor 24 is fixed in furnace body 1
Bottom, second drive shaft 25 is arranged between the second motor 24 and fixed block 18, and second motor 24 and second drives
Moving axis 25 is sequentially connected, and the periphery of second drive shaft 25 is equipped with external screw thread, and the movable block 19 is set in the second drive shaft
On 25, internal thread is equipped in the movable block 19, the external screw thread on internal thread and the second drive shaft 25 in the movable block 19
Match.Second motor 24 is run, and the second drive shaft 25 is driven to rotate, makes the threaded function in the second drive shaft 25 in movable block
Internal thread in 19, driving movable block 19 are moved along the axial direction of the second drive shaft 25, change movable block 19 and fixed block
The distance between 18.
Preferably, for the ease of the distance of the bottom in detection tablet 8 and furnace body 1, the lower section of the tablet 8 be equipped with away from
From sensor 26.
Preferably, in order to make 8 horizontal lifting of tablet, the feeding machanism further includes locating rod 27, the locating rod 27
Bottom be fixed on bottom in furnace body 1, the tablet 8 is set in locating rod 27.The liter of tablet 8 is fixed by locating rod 27
Direction is dropped, tablet 8 is made to be lifted according to fixed track.
As shown in figure 3, the pushing mechanism includes the 3rd motor 28, first connecting rod 29, second connecting rod 30, third connecting rod 31
With pushing block 32, the 3rd motor 28 is fixed on the inner wall of furnace body 1, and one end of the 3rd motor 28 and first connecting rod 29 passes
Dynamic connection, the other end of the first connecting rod 29 are hinged by second connecting rod 30 and one end of third connecting rod 31, and the described 3rd connects
The other end of bar 31 is fixedly connected with pushing block 32.
3rd motor 28 is run, and drives 29 circular motion of first connecting rod, so as to drive third connecting rod by second connecting rod 30
31 move back and forth, and while third connecting rod 31 is moved to supply assembly, are pushed into the substrate 10 on pressure pin 11 by pushing block 32
In storage box 17.
Preferably, in order to fix the moving direction of third connecting rod 31, the pushing mechanism includes retainer ring 33, described solid
Determine ring 33 to be fixed on the inner wall of furnace body 1, the retainer ring 33 is set on third connecting rod 31.Is secured using retainer ring 33
The moving direction of three-link 31 enables third connecting rod 31 to be moved back and forth along horizontal direction.
As shown in figure 4, the heating arrangements include the 4th motor 34, driving wheel 35, fixing axle 36, frame 37 and infrared lamp
Pipe 38, the 4th motor 34 are fixed on the inner wall of furnace body 1, and the 4th motor 34 is sequentially connected with driving wheel 35, described
Fixing axle 36 is fixed on driving wheel 35, and the fixing axle 36 is arranged in frame 37, and the infrared lamp 38 is fixed on frame
The one side of 37 close switching mechanism.
In heating arrangements, by the 4th motor 34 driving wheel 35 is driven to move in a circle, make fixing axle 36 along driving wheel 35
Axis rotate, change the height and position of fixing axle 36, lift so as to driver framework 37, frame 37 drives infrared lamp 38 to carry out
Lifting, infrared lamp 38 emit infrared ray, irradiate the different position of substrate 10, and substrate 10 absorbs infrared ray, and temperature rise is convenient for
The gas for being passed through furnace body 1 reacts, and graphene is made to be deposited on gas surface.
Preferably, in order to which infrared lamp 38 is made smoothly to lift, the heating arrangements further include spacing ring 39 and stent
40, the shape of the stent 40 is U-shaped, and the both ends of the stent 40 are fixed on the inner wall of furnace body 1, and the spacing ring 39 is arranged
On stent 40, the spacing ring 39 is fixed on the one side of the separate infrared lamp 38 of frame 37.
The glide direction of spacing ring 39 is secured using stent 40, frame 37 is made to drive infrared lamp 38 along fixed side
To being lifted, so as to ensure that the steady movement of infrared lamp 38.
Preferably, frame 37 departs from fixing axle 36, one end of the separate driving wheel 35 of the fixing axle 36 in order to prevent
Equipped with protrusive board 41.The scope of activities of frame 37 is limited using protrusive board 41, so as to prevent frame 37 from departing from fixing axle 36.
The chemical gas phase reaction precipitation equipment provides multiple substrates 10 by supply assembly, using pushing mechanism by substrate 10
It is inserted into the storage box 17 in switching mechanism, by switching mechanism substrate 10 is driven to rotate, substrate 10 is heated by heating arrangements,
Gas phase reaction occurs convenient for gas, graphene is made to be deposited on 10 surface of substrate, after the completion of preparation, switching mechanism continues to drive base
Piece 10 rotates, and is collected by collection assembly by the substrate 10 completed is deposited, so cycles, equipment is made to be carried out by a pair of substrate 10
Reactive deposition, it is achieved thereby that prepared by the graphene of batch.
Compared with prior art, the chemical gas phase reaction precipitation equipment that should be suitable for preparing graphene in batches passes through feeding machine
Structure provides multiple substrates 10 in the furnace body 1, changes the height and position of substrate 10 by lifting assembly, by pushing mechanism by substrate 10
It is inserted into the storage box 17 in switching mechanism, changes the position of substrate 10 by switching mechanism, substrate 10 is added by heating arrangements
Heat is deposited on 10 surface of substrate convenient for gas reaction, prepares graphene, then substrate 10 is collected by collection assembly,
So Xun Huan, prepared by the graphene for realizing batch, and compared with existing feeding machanism, which is providing multiple substrates
While 10 reactive deposition, it is also convenient for being collected the substrate 10 that deposition is completed, so as to improve the practicability of equipment.
Using above-mentioned desirable embodiment according to the invention as enlightenment, by above-mentioned description, relevant staff is complete
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property scope is not limited to the content on specification, it is necessary to determine its technical scope according to right.
Claims (10)
1. a kind of chemical gas phase reaction precipitation equipment for being suitable for batch and preparing graphene, including furnace body (1), bell (2), air inlet
Pipe (3), air outlet pipe (4) and controller (5), the bell (2) are arranged on the top of furnace body (1), and the air inlet pipe (3) is arranged on
The one side of furnace body (1), the air outlet pipe (4) and controller (5) are arranged at the opposite side of furnace body (1), controller (5) position
In the top of air outlet pipe (4), the controller (5) is equipped with display screen (6) and several control buttons (7), which is characterized in that institute
It states and feeding machanism, switching mechanism, pushing mechanism and heating arrangements is equipped in furnace body (1), the heating arrangements and pushing mechanism are equal
It is arranged on the inner wall of the one side of the close air inlet pipe (3) of furnace body (1), the heating arrangements are located at the top of pushing mechanism, institute
The bottom that feeding machanism is arranged in furnace body (1) is stated, the switching mechanism is arranged on the top of feeding machanism；
The feeding machanism includes lifting assembly, tablet (8), supply assembly and collection assembly, the lifting assembly and is arranged on flat
The lower section of plate (8), the supply assembly are arranged on the one side of the close air inlet pipe (3) of the top of tablet (8), the mobile phone component
The top opposite side of tablet (8) is arranged on, the supply assembly includes two support units and several feed units, the feed
Unit is evenly distributed on from top to down between two support units, and the support unit includes two montants (9), the montant
(9) bottom is fixed on tablet (8), and the feed unit includes substrate (10) and two pressure pins (11), the pressure pin (11)
It is corresponded with support unit, the both ends of the pressure pin (11) are fixedly connected respectively with two montants (9), substrate (10) frame
It is located on two pressure pins (11)；
The collection assembly includes two struts (12) and several inclined plates (13), and the bottom of the strut (12) is fixed on tablet
(8) on, the inclined plate (13) is evenly distributed on from top to down between two struts (12), the both ends of the inclined plate (13) respectively with
Two struts (12) are fixedly connected, and one end of the separate switching mechanism of the inclined plate (13) is equipped with limiting plate (13)；
The switching mechanism is arranged between supply assembly and collection assembly, and the switching mechanism includes the first motor (15), turns
Disk (16) and storage box (17), first motor (15) are fixed on the inner wall of furnace body (1), and first motor (15) is with turning
Disk (16) is sequentially connected, and the storage box (17) is fixed on turntable (16), and first motor (15) is stepper motor, described
The step angle of first motor (15) is 90 °.
2. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The lifting assembly includes driving unit, fixed block (18), movable block (19), expansion bracket (20), hinged block (21), slip ring (22)
With slide (23), the fixed block (18) is fixed on the bottom in furnace body (1), and the driving unit connects with movable block (19) transmission
It connects, the shape of the slide (23) is U-shaped, and the both ends of the slide (23) and hinged block (21) are each attached under tablet (8)
Side, the slip ring (22) is set on slide (23), the both sides of the bottom of the expansion bracket (20) respectively with fixed block (18) and
Movable block (19) is hinged, and the both sides on the top of the expansion bracket (20) are hinged with hinged block (21) and slip ring (22) respectively.
3. the chemical gas phase reaction precipitation equipment as claimed in claim 2 for being suitable for batch and preparing graphene, which is characterized in that
The driving unit includes the second motor (24) and the second drive shaft (25), and second motor (24) is located at movable block (19)
One side away from fixed block (18), second motor (24) are fixed on the bottom in furnace body (1), second drive shaft (25)
It being arranged between the second motor (24) and fixed block (18), second motor (24) is sequentially connected with the second drive shaft (25),
The periphery of second drive shaft (25) is equipped with external screw thread, and the movable block (19) is set in the second drive shaft (25), described
It is equipped with internal thread in movable block (19), the internal thread in the movable block (19) and the external screw thread phase in the second drive shaft (25)
Match somebody with somebody.
4. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The lower section of the tablet (8) is equipped with range sensor (26).
5. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The feeding machanism further includes locating rod (27), and the bottom of the locating rod (27) is fixed on the bottom in furnace body (1), described flat
Plate (8) is set in locating rod (27).
6. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The pushing mechanism includes the 3rd motor (28), first connecting rod (29), second connecting rod (30), third connecting rod (31) and pushing block
(32), the 3rd motor (28) is fixed on the inner wall of furnace body (1), the 3rd motor (28) and the one of first connecting rod (29)
End is sequentially connected, and the other end of the first connecting rod (29) is hinged by second connecting rod (30) and one end of third connecting rod (31),
The other end of the third connecting rod (31) is fixedly connected with pushing block (32).
7. the chemical gas phase reaction precipitation equipment as claimed in claim 7 for being suitable for batch and preparing graphene, which is characterized in that
The pushing mechanism includes retainer ring (33), and the retainer ring (33) is fixed on the inner wall of furnace body (1), the retainer ring (33)
It is set on third connecting rod (31).
8. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The heating arrangements include the 4th motor (34), driving wheel (35), fixing axle (36), frame (37) and infrared lamp (38), institute
It states the 4th motor (34) to be fixed on the inner wall of furnace body (1), the 4th motor (34) is sequentially connected with driving wheel (35), described
Fixing axle (36) is fixed on driving wheel (35), and the fixing axle (36) is arranged in frame (37), the infrared lamp (38)
It is fixed on the one side of the close switching mechanism of frame (37).
9. the chemical gas phase reaction precipitation equipment as claimed in claim 8 for being suitable for batch and preparing graphene, which is characterized in that
The heating arrangements further include spacing ring (39) and stent (40), and the shape of the stent (40) is U-shaped, the stent (40)
Both ends are fixed on the inner wall of furnace body (1), and the spacing ring (39) is set on stent (40), and the spacing ring (39) is fixed on
The one side of the separate infrared lamp (38) of frame (37).
10. the chemical gas phase reaction precipitation equipment as claimed in claim 8 for being suitable for batch and preparing graphene, feature exist
In one end of the separate driving wheel (35) of the fixing axle (36) is equipped with protrusive board (41).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810024276.1A CN108046245A (en) | 2018-01-10 | 2018-01-10 | A kind of chemical gas phase reaction precipitation equipment for being suitable for batch and preparing graphene |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810024276.1A CN108046245A (en) | 2018-01-10 | 2018-01-10 | A kind of chemical gas phase reaction precipitation equipment for being suitable for batch and preparing graphene |
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| Publication Number | Publication Date |
|---|---|
| CN108046245A true CN108046245A (en) | 2018-05-18 |
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ID=62127053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810024276.1A Withdrawn CN108046245A (en) | 2018-01-10 | 2018-01-10 | A kind of chemical gas phase reaction precipitation equipment for being suitable for batch and preparing graphene |
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| Country | Link |
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| CN (1) | CN108046245A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108862507A (en) * | 2018-06-26 | 2018-11-23 | 深圳市雷凌广通技术研发有限公司 | A kind of coagulative precipitation device of highly effective and safe |
| CN115594168A (en) * | 2022-10-29 | 2023-01-13 | 胡飞飞（Cn） | Device for preparing graphene |
-
2018
- 2018-01-10 CN CN201810024276.1A patent/CN108046245A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108862507A (en) * | 2018-06-26 | 2018-11-23 | 深圳市雷凌广通技术研发有限公司 | A kind of coagulative precipitation device of highly effective and safe |
| CN115594168A (en) * | 2022-10-29 | 2023-01-13 | 胡飞飞（Cn） | Device for preparing graphene |
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Application publication date: 20180518 |