CN108044130A - A kind of metal multiaspect scan prism processing method of achievable on-line checking - Google Patents

A kind of metal multiaspect scan prism processing method of achievable on-line checking Download PDF

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Publication number
CN108044130A
CN108044130A CN201711320966.3A CN201711320966A CN108044130A CN 108044130 A CN108044130 A CN 108044130A CN 201711320966 A CN201711320966 A CN 201711320966A CN 108044130 A CN108044130 A CN 108044130A
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auto
scanning plane
collimation
light
light path
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CN108044130B (en
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黄启泰
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Suzhou Zebra Optical Technology Co ltd
Suzhou University
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Suzhou Zebra Optical Technology Co ltd
Suzhou University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B5/00Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B25/00Accessories or auxiliary equipment for turning-machines
    • B23B25/06Measuring, gauging, or adjusting equipment on turning-machines for setting-on, feeding, controlling, or monitoring the cutting tools or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B9/00Automatic or semi-automatic turning-machines with a plurality of working-spindles, e.g. automatic multiple-spindle machines with spindles arranged in a drum carrier able to be moved into predetermined positions; Equipment therefor
    • B23B9/02Automatic or semi-automatic machines for turning of stock
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/04Prisms

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a kind of metal multiaspect scan prism processing methods of achievable on-line checking, solve the problems, such as that multiple clamping position error influences scanning face angle degree of finish precision;Light path is positioned by auto-collimation and calibrated bolck accurately controls the corner of shaft, the adjustment auto-collimation light path on the basis of metal multiaspect the first scanning plane of scan prism processed simultaneously, rotating shaft, as long as auto-collimation positions light path and realizes auto-collimation with n-th of side on calibrated bolck, then auto-collimation light path and n-th of scanning plane of the first scanning plane also realize auto-collimation;Metal multiaspect scan prism on-line checking and processing can be completed independent of high precision numerical control shaft in the use of the technical program on two axis lathes, greatly improve processing efficiency, machining accuracy and processing uniformity.

Description

A kind of metal multiaspect scan prism processing method of achievable on-line checking
Technical field
The invention belongs to optical processing technology fields, and in particular to a kind of processing method of multiaspect scan prism.
Background technology
Multiaspect scan prism has multiple reflectings surface, is the core light in the laser equipments such as scanner, duplicator, code reader Learn device.It is typically mounted in the rotation axis of motor during use, is rotated by the high speed of multiaspect scan prism, it can be achieved that big model It encloses, ultrahigh speed, scanned in high precision with the laser beam of high duplication, the factors such as angle precision, surface quality will directly affect Scanning accuracy and effect, thus it is very high to the angle requirement on machining accuracy of its each reflecting surface.
The processing of country's multiaspect scan prism relies primarily on the numerically controlled lathe with shaft and realizes at present, can once process number Measure limited, angle precision between each face is ensured by the precision of numerical control shaft.The multiaspect scanning processed on numerically controlled lathe During prism, in order to ensure the angle precision between each scanning plane, it is necessary to which clamped one time completes all side processing.It detects each During scanning plane angle, if using being detected under line, if some scanning plane angle is overproof, it is necessary to clamping again, to scanning rib Mirror is processed again, necessarily introduces new position error during clamping again, is that processing efficiency is low, detection efficiency is also low;In addition criticize Homogeneity of product is poor during amount processing, seriously affects the stability of assembling equipment.
The content of the invention
It is an object of the invention to solve the position error of the introducing of multiple clamping to influence each scanning plane angle precision in angle The problem of.
A kind of metal multiaspect scan prism processing method of achievable on-line checking, specific technical solution are as follows:
1) processing criterion block step:One piece of precision of processing is better than the multifaceted prism of the design parameter of metal multiaspect scan prism As calibrated bolck, the scanning plane number of the metal multiaspect scan prism is denoted as N, the side number on calibrated bolck is also N;
2) calibrated bolck is fixed in the shaft of automatically controlled turntable, wherein on the calibrated bolck arbitrary side method Line direction is vertical with the shaft of automatically controlled turntable;
3) by metal multiaspect scan prism mirror embryo to be processed also clamping in the shaft of the automatically controlled turntable, wherein metal Multiaspect scan prism mirror embryo cross section normal direction is parallel with the shaft of automatically controlled turntable;
4) auto-collimation positioning light path is built on lathe, and automatically controlled turntable is mounted on platen, described in rotation By first side alignment auto-collimation positioning light path of the calibrated bolck, described automatically controlled turn is fixed with lockable mechanism for automatically controlled turntable The shaft of platform;It gets on the bus in the metal multiaspect scan prism mirror embryo and cuts out the first scanning plane;
5) auto-collimation light path is built on lathe, first side of calibrated bolck is directed at the auto-collimation positioning light path When, on the basis of the first scanning plane of metal multiaspect scan prism, adjustment auto-collimation light path makes to be reflected by the first scanning plane Reflected light and incident light overlap;
6) the automatically controlled turntable is rotated, n-th of side of calibrated bolck is aligned the auto-collimation positions light path, more in metal Surface scan prism mirror embryo, which is got on the bus, cuts out n-th of scanning plane;When n-th of side of calibrated bolck is directed at the auto-collimation positioning light path, If the incident light of the auto-collimation light path and the reflected light reflected by n-th of the surface sweeping of metal multiaspect scan prism are misaligned, The reflected light of n-th scanning plane and incident light angle error are fed back into lathe and carry out error compensation processing, and again to n-th Scan facing;If the incident light of auto-collimation light path is overlapped with the reflected light reflected by n-th of surface sweeping, the first scanning plane and The angle of n-th scanning plane meets the requirements;Wherein n is successively increased from 2 to N.That brings has the technical effect that:N-th is machined to sweep Behind face, it can directly judge whether the angular error of the machined surface and the first scanning plane conforms to by auto-collimation light path Ask, if undesirable, need not clamping again, directly using angular deviation as the error compensation file of lathe again to N scanning plane turnery processing effectively avoids again influence of the position error to angle precision of clamping.
In order to reduce cutting output, can metal multiaspect scan prism mirror embryo be first fabricated to metal of the angular error less than 2 degree Then polyhedron is directly lathed optical surface with diamond fly cutter turning technology according to above-mentioned technical proposal.
Above-mentioned technical proposal can also the turning on a longer metal multiaspect scan prism mirror embryo, treat that all sides all add After work is good, multiple metal multiaspect scan prisms are directly obtained by cutting technique.
In above-mentioned technical proposal:The calibrated bolck is more better than the glass of the design parameter of metal multiaspect scan prism for precision Face prism.
In above-mentioned technical proposal:Conventional Cold-forming process processing, processing criterion block can be used in the glass multifaceted prism Angular error, tower are poor between each surface of Shi Yange controls.
In above-mentioned technical proposal:Through hole is set on calibrated bolck, and the shaft of the through hole on the calibrated bolck and automatically controlled turntable is coaxial Mode assemble fixation.
In above-mentioned technical proposal:Through hole is also provided on the metal multiaspect scan prism mirror base to be processed, and is penetrated The shaft of automatically controlled turntable.
In above-mentioned technical proposal:The auto-collimation positioning light path is auto-collimation collimator.
One preferred embodiment:The parallel light laser of described auto-collimation positioning optical routing, spectroscope, plane mirror, as Screen composition, wherein the directional light that parallel light laser projects is incident to spectroscope, the light of dichroic mirror is used as to be hung down with reference to light It is incident to after the straight plane mirror reflection being positioned in light path as screen, the light that spectroscope transmits is incident to described as detection light Any one side of calibrated bolck;The automatically controlled turntable is rotated, detection light, to as shielding, is formed dry by the offside reflection on as screen Relate to striped.The light path is actually michelson interferometer optical path, can be with the automatically controlled turntable of more precise control by interference fringe Shaft rotary corner.
It can also be replaced with CCD as screen, the interference fringe of reference light and detection light is imaged in CCD, is entirely being processed Monitor the variation of interference fringe in real time in the process.It so can more easily observe and turning for automatically controlled turntable is controlled in process Whether axis rotates.The real-time change information of the interference fringe can also be fed back to when carrying out turnery processing with lathe Lathe carries out real-time error compensation.Such processing belongs to closed loop processing technique, it is possible to implement is changed by interference fringe and converted For the attitudes vibration of the shaft of automatically controlled turntable, this real-time change information is fed back into machining tool, can further improve and add Work precision.
Optimal technical scheme:The auto-collimation light path is sent out by parallel light laser, with the parallel light laser The vertical scale composition of the directional light that goes out, when first side of calibrated bolck is directed at the auto-collimation positioning light path, with the gold On the basis of the first scanning plane for belonging to multiaspect scan prism, adjustment zero diopter laser makes by the reflected light of the first scanning plane reflection and enters It penetrates light to overlap, reading of the record reflected light on scale, the position at the reading is the reference position of auto-collimation light path;Step It is rapid 6) in, rotate the automatically controlled turntable, n-th of side of calibrated bolck is aligned the auto-collimation positions light path, in metal multiaspect Scan prism mirror embryo, which is got on the bus, cuts out n-th of scanning plane;N-th position of the reflected light of n-th of scanning plane on scale is recorded at this time, N-th position of the reflected light of n-th of scanning plane on scale is overlapped with reference position described in step 5), then metal multiaspect scans First scanning plane of prism and the angle of the n-th scanning plane are equal to the angle of first side and n-th of side of calibrated bolck.It brings Effect be can by position of the reflection light point on scale easily judge processing scanning plane angle whether meet the requirements.
In above-mentioned technical proposal, the n-th position of the reflected light of n-th of scanning plane of metal multiaspect scan prism on scale With when reference position is misaligned described in step 5), measuring its bias h between reference position of the n-th position, surveyors' staff The distance between n-th scanning plane L, angle beta=arcsin (h/L) between the reflected light and incident light of n-th scanning plane, Angular deviation between n-th of the scanning plane and the first scanning plane of metal multiaspect scan prism is β/2.The program is substantially to use The amplification principle of optical lever has been arrived, small angular error has been amplified, and angular error is converted into the bias on scale, it can Angular deviation is measured with quantitative online, this angular error can be fed back to numerically-controlled machine tool, compensation processing, which further improves, sweeps Retouch the angle precision in face.
In order to adapt to batch machining, more preferably scheme is:In above-mentioned technical proposal, automatically controlled turntable described in step 2) Shaft is connected by linkage mechanism with several driven spindles, all can at least one metal multiaspect of clamping on each driven spindle Scan prism mirror embryo, when the shaft rotation of automatically controlled turntable, the driven spindle also rotates equal angular;In the step 3) Simultaneously by multiple metal multiaspect scan prism mirror embryo clampings to be processed on the driven spindle;The step 4) is on lathe Auto-collimation positioning light path is built, and automatically controlled turntable is mounted on platen, the automatically controlled turntable is rotated, by the standard First side alignment auto-collimation positioning light path of block fixes the shaft of the automatically controlled turntable with lockable mechanism;In institute's clamping Metal multiaspect scan prism mirror embryo to be processed, which is got on the bus, cuts out the first scanning plane.It can all be installed in so each shaft multiple to be added Work metal multiaspect scan prism mirror embryo, and more driven spindles can be connected by linkage, it can thus realize and criticize Amount processing, it can also be ensured that consistent with a batch Product Precision, this has been considerably improved the stability of institute's completed knocked down products.
Description of the drawings
Fig. 1 metal multiaspect scan prism machining sketch charts;
Fig. 2 multiple-rotor batch machining metal multiaspect scan prism schematic diagrames;
A kind of auto-collimation positioning light path schematic diagrams of Fig. 3;
A kind of auto-collimation light path schematic diagrames of Fig. 4;
Wherein:The automatically controlled turntables of 1-, 2- calibrated bolcks, 3- metal multiaspect scan prism mirror embryos, the shaft of the automatically controlled turntables of 4-, 5- is certainly Collimation positioning light path, the automatically controlled turntable supports of 6-, 7- lockable mechanisms, 8- linkage mechanisms, 9- driven spindles, the parallel light lasers of 10-, 11- spectroscopes, 12- reference lights, 13- detection lights, 14- plane mirrors, 15- picture screens, 16- auto-collimation light paths, 17- marks Ruler, the incident light of n-th of scanning plane of 18-, the reflected light 19 of n-th of scanning plane of 19-, the benchmark position of 20- auto-collimation light paths It puts, n-th position of the 21- reflected lights on scale, the theoretical position of n-th of scanning plane of 22-;The n-th positions of h- itself and reference position Between bias, the distance between L- scales and n-th scanning plane, between the reflected light and incident light of β-n-th scanning planes Angle.
Specific embodiment
In order to illustrate more clearly of invention, it is further described with reference to the accompanying drawings and embodiments
Embodiment one:
A kind of metal multiaspect scan prism processing method of achievable on-line checking, shown in attached drawing 1, specific technical solution is such as Under:
1) processing criterion block step:One piece of precision of processing is better than the multifaceted prism of the design parameter of metal multiaspect scan prism As calibrated bolck 2, the scanning plane number of the metal multiaspect scan prism is denoted as N, the side number on calibrated bolck is also N;
2) calibrated bolck is fixed in the shaft 4 of automatically controlled turntable 1, wherein on the calibrated bolck arbitrary side normal Direction is vertical with the shaft of automatically controlled turntable;
3) by metal multiaspect scan prism mirror embryo 3 to be processed also clamping in the shaft of the automatically controlled turntable, wherein gold It is parallel with the shaft of automatically controlled turntable to belong to multiaspect scan prism mirror embryo cross section normal direction;
4) auto-collimation positioning light path 5 is built on lathe, and automatically controlled turntable is mounted on platen, described in rotation By first side alignment auto-collimation positioning light path of the calibrated bolck, described automatically controlled turn is fixed with lockable mechanism for automatically controlled turntable The shaft of platform;It gets on the bus in the metal multiaspect scan prism mirror embryo and cuts out the first scanning plane;
5) auto-collimation light path is built on lathe, first side of calibrated bolck is directed at the auto-collimation positioning light path When, on the basis of the first scanning plane of metal multiaspect scan prism, adjustment auto-collimation light path makes to be reflected by the first scanning plane Reflected light and incident light overlap;
6) the automatically controlled turntable is rotated, n-th of side of calibrated bolck is aligned the auto-collimation positions light path, more in metal Surface scan prism mirror embryo, which is got on the bus, cuts out n-th of scanning plane;When n-th of side of calibrated bolck is directed at the auto-collimation positioning light path, If the incident light of the auto-collimation light path and the reflected light reflected by n-th of the surface sweeping of metal multiaspect scan prism are misaligned, The reflected light of n-th scanning plane and incident light angle error are fed back into lathe and carry out error compensation processing, and again to n-th Scan facing;If the incident light of auto-collimation light path is overlapped with the reflected light reflected by n-th of surface sweeping, the first scanning plane and The angle of n-th scanning plane meets the requirements;Wherein n is successively increased from 2 to N.
Embodiment two:
A kind of metal multiaspect scan prism processing method of attached achievable on-line checking shown in Fig. 2, specific technical solution It is as follows:
1) processing criterion block step:One piece of precision of processing is better than the multifaceted prism of the design parameter of metal multiaspect scan prism As calibrated bolck 2;
2) calibrated bolck is fixed in the shaft 4 of automatically controlled turntable 1, wherein the cross section normal direction of calibrated bolck and electricity The shaft for controlling turntable is parallel;The shaft 2 of automatically controlled turntable 1 is connected by linkage mechanism 8 with several driven spindles 9, each from On turn axis all can at least one metal multiaspect scan prism mirror embryo 3 of clamping, when automatically controlled turntable shaft rotation when, it is described from Turn axis also rotates equal angular;
3) by multiple metal multiaspect scan prism mirror embryo clampings to be processed on the driven spindle;Wherein metal multiaspect Scan prism mirror embryo cross section normal direction is parallel with the shaft of automatically controlled turntable;
4) auto-collimation positioning light path 5 is built on automatically controlled turntable support 6, automatically controlled turntable is mounted on platen, The automatically controlled turntable is rotated, any one side alignment auto-collimation positioning light path of the calibrated bolck is fixed with lockable mechanism 7 The shaft of the automatically controlled turntable and all driven spindles;The fixed metal in the shaft of the automatically controlled turntable and driven spindle Multiaspect scan prism mirror embryo, which gets on the bus to cut out, sweeps the first scanning plane.
5) auto-collimation light path is built on lathe
On the basis of first scanning plane, adjustment auto-collimation light path make by the first scanning plane reflection reflected light and Incident light overlaps;
6) the automatically controlled turntable is rotated successively, and n-th of side of calibrated bolck is aligned the auto-collimation positions light path, in gold Category multiaspect scan prism mirror embryo, which is got on the bus, cuts out n-th of scanning plane;The incident light of the auto-collimation light path is anti-by n-th of surface sweeping When the reflected light penetrated and misaligned incident light, by the reflected light of n-th scanning plane and incident light angle error feed back to lathe into Row error compensation, and again to n-th of scanning facing;The light that the incident light of auto-collimation light path is reflected by n-th of surface sweeping When being overlapped with incident light, the angle of the first scanning plane and the n-th scanning plane meets the requirements;Wherein 2≤n≤N.
Embodiment three:
On the basis of one technical solution of embodiment, the auto-collimation positions light path 5 as shown in figure 3, by parallel light laser 10th, spectroscope 11, plane mirror 14, as screen 15 composition, wherein parallel light laser project directional light be incident to spectroscope, The light of dichroic mirror is divided as being incident to after the plane mirror reflection being placed vertically with reference to light 12 in light path as screen The light of mirror transmission is incident to any one side of the calibrated bolck as detection light 13;Rotate the automatically controlled turntable, detection light By the offside reflection to as screen 15, interference fringe is formed on as screen.The light path is actually michelson interferometer optical path, is passed through Interference fringe can be with the shaft rotary corner of the automatically controlled turntable of more precise control.
Example IV:
On the basis of one technical solution of embodiment, as shown in figure 4, the auto-collimation light path 16 is by parallel ray laser Device, the scale 17 vertical with the parallel light laser directional light sent form, described in first side alignment of calibrated bolck Auto-collimation position light path when, on the basis of the first scanning plane of the metal multiaspect scan prism, adjustment zero diopter laser make by The reflected light and incident light of first scanning plane reflection overlap, reading of the record reflected light on scale, and the position at the reading is The reference position 20 of auto-collimation light path;
In step 6), the automatically controlled turntable is rotated, n-th of side of calibrated bolck is aligned the auto-collimation positions light path, It gets on the bus in metal multiaspect scan prism mirror embryo and cuts out n-th of scanning plane;The reflected light of n-th of scanning plane is recorded at this time on scale The n-th position 21, the n-th position of the reflected light of n-th of scanning plane on scale overlaps with reference position described in step 5), then First side of first scanning plane of metal multiaspect scan prism and the angle of the n-th scanning plane equal to calibrated bolck and n-th of side The angle in face.
If the theoretical position 22 for processing obtained n-th of scanning plane and n-th of scanning plane is misaligned, metal multiaspect scans N-th position of the reflected light 19 of n-th of scanning plane of prism on scale and reference position described in step 5) are misaligned, measure The distance between its bias h between reference position of n-th position, surveyors' staff and n-th scanning plane L, n-th of scanning plane Reflected light 19 and incident light 18 between angle beta=arcsin (h/L), n-th scanning plane of metal multiaspect scan prism with Angular deviation between first scanning plane is β/2.
The principle of the scheme of above-mentioned technology is to position light path by auto-collimation and calibrated bolck accurately controls the corner of shaft, Since metal multiaspect scan prism mirror embryo to be processed and calibrated bolck clamping are in same root shaft, at the same it is more with the metal processed Adjustment auto-collimation light path on the basis of the first scanning plane of Surface scan prism, rotating shaft, as long as auto-collimation positioning light path and mark Auto-collimation is realized in n-th of side on quasi- block, then auto-collimation light path and n-th of scanning plane of the first scanning plane should also be realized Auto-collimation can illustrate the angle precision that each side of calibrated bolck is accurately replicated on metal multiaspect scan prism at this time.This Metal multiaspect scan prism can be completed independent of high precision numerical control shaft in the use of technical solution on two axis lathes Processing, the position error for solving the problems, such as the introducing of multiple clamping in the prior art influence each scanning plane angle precision in angle, Greatly improve processing efficiency, machining accuracy and processing uniformity.
The technical solution is not only applicable to multiaspect scan prism, could be applicable to multiaspect special-shaped glass prism, such as the side of prism Face is spherical surface or aspherical, in order to accurately control the optical axis direction in each face of multiaspect special-shaped glass prism, can also first be processed each A face is the optical axis angle of the plane calibrated bolck identical with multiaspect special-shaped glass prism optical axis angle, and the optical axis angle of calibrated bolck is passed through The technical program is copied on multiaspect special-shaped glass prism.
The technical program unspecified part belongs to technology well known to those skilled in the art.

Claims (10)

1. a kind of metal multiaspect scan prism processing method of achievable on-line checking, comprises the following steps:
1) processing criterion block step:One piece of precision of processing is better than the multifaceted prism conduct of the design parameter of metal multiaspect scan prism The scanning plane number of the metal multiaspect scan prism is denoted as N by calibrated bolck, and the side number on calibrated bolck is also N;
2) calibrated bolck is fixed in the shaft of automatically controlled turntable, wherein on the calibrated bolck arbitrary side normal side To vertical with the shaft of automatically controlled turntable;
3) by metal multiaspect scan prism mirror embryo to be processed also clamping in the shaft of the automatically controlled turntable, wherein metal multiaspect Scan prism mirror embryo cross section normal direction is parallel with the shaft of automatically controlled turntable;
4) auto-collimation positioning light path is built on lathe, and automatically controlled turntable is mounted on platen, is rotated described automatically controlled By first side alignment auto-collimation positioning light path of the calibrated bolck, the automatically controlled turntable is fixed with lockable mechanism for turntable Shaft;It gets on the bus in the metal multiaspect scan prism mirror embryo and cuts out the first scanning plane;
5) auto-collimation light path is built on lathe, when first side of calibrated bolck is directed at the auto-collimation positioning light path, On the basis of the first scanning plane of metal multiaspect scan prism, adjustment auto-collimation light path makes by the anti-of the first scanning plane reflection It penetrates light and incident light overlaps;
6) the automatically controlled turntable is rotated, n-th of side of calibrated bolck is aligned the auto-collimation positions light path, is swept in metal multiaspect It retouches prism mirror embryo and gets on the bus and cut out n-th of scanning plane;When n-th of side of calibrated bolck is directed at the auto-collimation positioning light path, if institute It is misaligned to state incident light and the reflected light reflected by n-th of the surface sweeping of metal multiaspect scan prism of auto-collimation light path, by n-th The reflected light and incident light angle error of a scanning plane feed back to lathe and carry out error compensation processing, and n-th is scanned again Facing;If the incident light of auto-collimation light path is overlapped with the reflected light reflected by n-th of surface sweeping, the first scanning plane and n-th The angle of scanning plane meets the requirements;Wherein n is successively increased from 2 to N.
2. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 1, it is characterised in that: The calibrated bolck is glass multifaceted prism of the precision better than the design parameter of metal multiaspect scan prism.
3. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 2, it is characterised in that: The glass multifaceted prism is processed using conventional Cold-forming process.
4. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 1, it is characterised in that: Through hole is set on calibrated bolck, and the mode coaxial with the shaft of automatically controlled turntable of the through hole on the calibrated bolck assembles fixation.
5. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 4, it is characterised in that: Through hole is also provided on the metal multiaspect scan prism mirror base to be processed, and penetrates the shaft of automatically controlled turntable.
6. the metal multiaspect scan prism processing method of the achievable on-line checking according to one of Claims 1 to 5, special Sign is:The auto-collimation positioning light path is auto-collimation collimator.
7. the metal multiaspect scan prism processing method of the achievable on-line checking according to one of Claims 1 to 5, special Sign is:The parallel light laser of described auto-collimation positioning optical routing, beam expanding lens, plane mirror, are formed as screen spectroscope, The directional light that wherein parallel light laser projects is incident to spectroscope after expanding, and the light of dichroic mirror is used as with reference to light quilt It is incident to after being disposed vertically the reflection of the plane mirror in light path as screen, the light of spectroscope transmission is incident to institute as detection light State any one side of calibrated bolck;The automatically controlled turntable is rotated, detection light, to as shielding, is formed by the offside reflection on as screen Interference fringe.
8. the metal multiaspect scan prism processing method of the achievable on-line checking according to one of claim 1-5, special Sign is:
Auto-collimation light path described in step 5) is by parallel light laser, the directional light sent with the parallel light laser Vertical scale composition, when first side of calibrated bolck is directed at the auto-collimation positioning light path, is scanned with the metal multiaspect On the basis of first scanning plane of prism, adjustment zero diopter laser makes to be overlapped by the reflected light of the first scanning plane reflection and incident light, Record reading of the reflected light on scale, the position at the reading is the reference position of auto-collimation light path;
In step 6), the automatically controlled turntable is rotated, n-th of side of calibrated bolck is aligned the auto-collimation positions light path, in gold Category multiaspect scan prism mirror embryo, which is got on the bus, cuts out n-th of scanning plane;Of the reflected light of n-th of scanning plane on scale is recorded at this time N positions, the n-th position of the reflected light of n-th of scanning plane on scale are overlapped with reference position described in step 5), then metal is more First scanning plane of Surface scan prism and the angle of the n-th scanning plane are equal to the angle of first side and n-th of side of calibrated bolck Degree.
9. the metal multiaspect scan prism processing method of achievable on-line checking according to claim 8, it is characterised in that: N-th position of the reflected light of n-th of scanning plane of metal multiaspect scan prism on scale and reference position described in step 5) When misaligned, its bias h between reference position of the n-th position is measured, the distance between surveyors' staff and n-th scanning plane L, angle beta=arcsin (h/L) between the reflected light and incident light of n-th scanning plane, n-th of metal multiaspect scan prism Angular deviation between scanning plane and the first scanning plane is β/2.
10. the metal multiaspect scan prism processing method of the achievable on-line checking according to one of Claims 1 to 5, It is characterized in that:
The shaft of automatically controlled turntable described in the step 2) is connected by linkage mechanism with several driven spindles, each from On turn axis all can at least one metal multiaspect scan prism mirror embryo of clamping, when automatically controlled turntable shaft rotation when, it is described from Turn axis also rotates equal angular;
Simultaneously by multiple metal multiaspect scan prism mirror embryo clampings to be processed on the driven spindle in the step 3);
The step 4) builds auto-collimation positioning light path on lathe, and automatically controlled turntable is mounted on platen, rotates By first side alignment auto-collimation positioning light path of the calibrated bolck, the electricity is fixed with lockable mechanism for the automatically controlled turntable Control the shaft of turntable;It gets on the bus in the metal multiaspect scan prism mirror embryo to be processed of institute's clamping and cuts out the first scanning plane.
CN201711320966.3A 2017-12-12 2017-12-12 A kind of metal multi-panel scan prism processing method of achievable on-line checking Active CN108044130B (en)

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CN113985420A (en) * 2021-12-28 2022-01-28 四川吉埃智能科技有限公司 Method for compensating scanning light path error of laser radar inclined by 45 degrees
CN114971508A (en) * 2021-11-17 2022-08-30 图达通智能科技(苏州)有限公司 Prism manufacturing method, system, computer device and computer readable storage medium

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EP1739483A3 (en) * 2005-06-28 2011-12-28 FUJIFILM Corporation Positive photosensitive composition and pattern forming method using the same
CN202877727U (en) * 2012-09-14 2013-04-17 武汉市凯瑞迪激光技术有限公司 Roller type surface laser texturing machining device
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SU706813A1 (en) * 1975-06-13 1979-12-30 Предприятие П/Я Р-6681 Spectrozonal panoramic photographic camera
EP1739483A3 (en) * 2005-06-28 2011-12-28 FUJIFILM Corporation Positive photosensitive composition and pattern forming method using the same
KR100967655B1 (en) * 2008-06-03 2010-07-07 씨큐트로닉스 (주) An optical type fingerprint input device and thereof using method
CN202877727U (en) * 2012-09-14 2013-04-17 武汉市凯瑞迪激光技术有限公司 Roller type surface laser texturing machining device
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114971508A (en) * 2021-11-17 2022-08-30 图达通智能科技(苏州)有限公司 Prism manufacturing method, system, computer device and computer readable storage medium
CN113985420A (en) * 2021-12-28 2022-01-28 四川吉埃智能科技有限公司 Method for compensating scanning light path error of laser radar inclined by 45 degrees
CN113985420B (en) * 2021-12-28 2022-05-03 四川吉埃智能科技有限公司 Method for compensating scanning light path error of laser radar inclined by 45 degrees

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