CN108037731A - A kind of frequency difference interference signal high-resolution subdivision system of phase integral operation transform - Google Patents
A kind of frequency difference interference signal high-resolution subdivision system of phase integral operation transform Download PDFInfo
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- CN108037731A CN108037731A CN201711100065.3A CN201711100065A CN108037731A CN 108037731 A CN108037731 A CN 108037731A CN 201711100065 A CN201711100065 A CN 201711100065A CN 108037731 A CN108037731 A CN 108037731A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/34—Director, elements to supervisory
- G05B2219/34242—For measurement only
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Abstract
The present invention relates to a kind of frequency difference interference signal high-resolution subdivision system of phase integral operation transform, reference signal process circuit, measuring signal process circuit is respectively completed measuring signal and the Photoelectric Detection of reference signal is changed, amplification, after filtering and shaping, export as after two-way square wave digital signal, all the way be sent into phase discriminator carry out frequency multiplication debate to, export as adding with phase place change, tally-down pulse signal, phase discriminator progress frequency multiplication debates the adding with phase place change to output, tally-down pulse signal is sent to counter, the integer of frequency difference interference signal is sent in programmable processor by counter；Another way is input to high-resolution phase detection group again at the same time, frequency difference interference signal is subjected to high-resolution phase detection, then the decimal of frequency difference interference signal is sent in programmable processor by bus, calculates processing integer pulse and fraction data is exported by bus mode.The present invention has the characteristics that fast measuring speed, high resolution, reliability are high.
Description
Technical field
The invention belongs to photoelectric detection technology field, is related to heterodyne ineterferometer method for detecting phases, particularly a kind of application
The frequency difference interference signal high-resolution subdivision system of phase integral operation transform, can be widely used for super large-scale integration processing and sets
Online on-position measure, error correction and control of standby, precision machine tool etc. etc..
Background technology
Heterodyne ineterferometer is most common long range measurements instrument in industry, is widely used in various precision machine tools, big rule
In-site measurement, error correction and the control of vlsi die process equipment etc..In theory, if not to heterodyne interferometer output signal
Processing is finely divided, then ultimate measurement accuracy only can reach the half of optical source wavelength.With the development of nano-fabrication technique,
The requirement of higher is proposed to the precision for measuring and monitoring, it is therefore necessary to which difference interference output signal is carried out at high power subdivision
Reason, subdivision function module become the core component of heterodyne ineterferometer.Traditional high power subdivision can be summarized as optics and electricity
Careful point of two ways.Since optical fine is to sacrifice interferometry speed as cost, high-subdividing number gets over high measurement speed drop
Low more, the structure of optical fine is also excessively complicated in addition, it is difficult to realizes that high power is segmented, therefore electronic fine-grained is difference interference
Major component method.And the common divided method principle based on phase locking frequency multiplying locks phase times at the same time for measurement road and benchmark road signal
Frequency is handled, by obtained after digital demodulation with the relevant double frequency pulse of displacement, its main feature is that, pulse after demodulation also can directly into
Enter motion control and realize high accuracy positioning control, but the frequency of frequency multiplication lock phase and the bandwidth of tracking are limited, the control of digital demodulation
Limited be subject to high-frequency work.And factors are also limited by based on the digital phase detection divided method for filling out pulse, therefore to measurement
The raising of precision is extremely limited.
The content of the invention
In view of the above-mentioned defects in the prior art or insufficient, it is an object of the invention to provide apply phase integral operation transform
Frequency difference interference signal high-resolution subdivision system, to solve above-mentioned technical problem, which can be greatly enhanced
The measurement accuracy of heterodyne interferometry system.
The present invention uses following technical scheme to achieve the above object：
A kind of frequency difference interference signal high-resolution subdivision system of phase integral operation transform, including reference signal processing electricity
Road, measuring signal process circuit, phase discriminator, high-resolution phase detection group, counter and programmable processor；At reference signal
Reason circuit, measuring signal process circuit be respectively completed the Photoelectric Detection conversion of measuring signal and reference signal, amplification, filter with it is whole
After shape, export as after two-way square wave digital signal, be sent into phase discriminator all the way and carry out frequency multiplication and debate to exporting as with phase place change
Add, tally-down pulse signal, phase discriminator carry out frequency multiplication debate to output with phase place change plus, tally-down pulse signal is sent to
The integer of frequency difference interference signal is sent in programmable processor by counter, the counter by bus；While another way is again
High-resolution phase detection group is input to, which carries out high-resolution phase inspection by frequency difference interference signal
Survey, then the decimal of frequency difference interference signal is sent in programmable processor by bus, last programmable processor calculates
Show that final subdivision result is exported by bus mode after processing integer pulse and fraction data.
It is as follows wherein to segment measurement accuracy calculation formula：
Wherein, n is analog-to-digital conversion digit, and the n=16 in present example, then final precision is λ/65536
(0.005nm), n are positive integer.
Phase discriminator and counter realize number system；Decimal number system is realized in high-resolution phase detection, may be programmed place
High resolution detection is realized in the output of progressively increasing that reason device completes integer and decimal.
As the further scheme of the present invention, measuring signal process circuit is by photoelectric switching circuit, operational amplification circuit, filter
Wave circuit, shaping circuit composition, the optical signal of photoelectric switching circuit receiving instrument output simultaneously convert thereof into electric signal, and computing is put
Big circuit is used to be amplified photoelectric switching circuit output electric signal, it is met subsequent conditioning circuit processing requirement, filter circuit
For filtering out the high-frequency noise in signal, shaping circuit is used to be shaped as being adapted to digitizer by the sinusoidal signal of filter circuit output
The digital pulse signal of part processing.
As the further scheme of the present invention, the high-resolution phase detection group is by exclusive or device, integrator, integrator
B, arithmetic unit, A/D converter composition, the pulse signal containing phase information that exclusive or device produces enters integrator B, if when containing
The voltage for having the output of the duty cycle increase integrator B of the pulse signal of phase information just increases therewith, while defeated with integrator A
The reference voltage gone out is sent into arithmetic unit together, which carries out scale operation output by the voltage of the output of two integrators,
It is sent into A/D converter to be changed, be then fed into programmable processor completion decimal adds computing, then remakes next comparison
Circulation；
When the voltage for the output that the duty cycle of the pulse signal containing phase information reduces integrator B just reduces therewith, together
When be sent into arithmetic unit together with the reference voltage of integrator A outputs, which carries out the voltage of the output of two integrators
Scale operation exports, and is sent into A/D converter and is changed, and be then fed into programmable processor completion decimal subtracts computing, then
Next comparison loop is remake, counter exports integer pulse into follow-up programmable place by bus in real time in this process
Device is managed, final programmable processor exports high-resolution phase detection result.
The beneficial effects of the invention are as follows：1) the frequency difference interference signal high-resolution using phase integral operation transform of the invention
Subdivision system, the processing of utilization exclusive or and integral transformation of use, which are combined, realizes that voltage then will by arithmetic unit with phase
The voltage progress scale operation of the output of two integrators is output to A/D converter and is changed, so as to fulfill high-resolution phase
Position subdivision；Subdivision accuracy can be caused to be determined by the digit of analog-to-digital conversion, so as to substantially increase subdivision accuracy so that the present invention
Meet the requirement of Precision Machining field application；
2) it is of the invention to be realized using high-speed digital circuit, than stability of traditional subdivision system with higher and reliably
Property；Have the characteristics that fast measuring speed, high resolution, reliability are high；Can be widely used for super large-scale integration process equipment,
Online on-position measure, error correction and control of precision machine tool etc. etc..
Brief description of the drawings
Fig. 1 is the frequency difference interference signal high-resolution subdivision system structure diagram of phase integral operation transform of the present invention；
Fig. 2 is that the measuring signal of the present invention pre-processes the principle schematic of circuit；
Fig. 3 is the high-resolution phase detection group principle schematic of the present invention.
Figure label：Reference signal process circuit 1, measuring signal opto-electronic conversion 2, phase discriminator 3, high-resolution phase detection
Group 4, counter 5, programmable processor 6, photoelectric switching circuit 7, amplifying circuit 8, filter circuit 9, shaping circuit 10, exclusive or device
11, integrator A 12, integrator B 13, arithmetic unit 14, A/D converter 15.
Embodiment
The present invention is further elaborated with specific embodiment below in conjunction with the accompanying drawings.
As shown in Figure 1, a kind of frequency difference interference signal high-resolution subdivision system of phase integral operation transform, including with reference to letter
Number process circuit 1, measuring signal process circuit 2, phase discriminator 3, high-resolution phase detection group 4, counter 5 and programmable processing
Device 6；Reference signal process circuit 1, measuring signal process circuit 2 are respectively completed measuring signal and the Photoelectric Detection of reference signal turns
Change, amplify, filtering and after shaping, exporting as after two-way square wave digital signal, being sent into phase discriminator 3 and carry out frequency multiplication and debate to exporting and be
With phase place change plus, tally-down pulse signal, phase discriminator 3 carry out frequency multiplication debate to output with phase place change plus, tally-down
Pulse signal is sent to counter 5, which is sent to programmable processor by bus by the integer of frequency difference interference signal
In 6；High-resolution phase detection group 4 is input to again at the same time, which carries out frequency difference interference signal high
Resolution phase detects, and then the decimal of frequency difference interference signal is sent in programmable processor 6 by bus, can finally be compiled
Thread processor 6 show that final subdivision result is exported by bus mode after calculating processing integer pulse and fraction data.
It is as follows wherein to segment measurement accuracy calculation formula：
Wherein, n is analog-to-digital conversion digit, and the n=16 in present example, then final precision is λ/65536
(0.005nm), n are positive integer.
Phase discriminator 3 and counter 5 realize number system；Decimal number system is realized in high-resolution phase detection 4, may be programmed
High resolution detection is realized in the output of progressively increasing that processor 6 completes integer and decimal, you can measures heterodyne with accurately high-resolution
The cycle of interferometer signal and phase information.
As shown in Fig. 2, measuring signal process circuit 2 is by photoelectric switching circuit 7, operational amplification circuit 8, filter circuit 9, whole
Shape circuit 10 forms, and the optical signal of 7 receiving instrument of photoelectric switching circuit output simultaneously converts thereof into electric signal, operational amplification circuit
8 are used to be amplified the output electric signal of photoelectric switching circuit 7, it is met subsequent conditioning circuit processing requirement, filter circuit 9 is used for
The high-frequency noise in signal is filtered out, shaping circuit 10 is used to be shaped as being adapted to digital device by the sinusoidal signal of filter circuit output
The digital pulse signal of processing.Reference signal process circuit 1 is identical with above-mentioned operation principle process not affected to be repeated.
As shown in figure 3, the high-resolution phase detection group 4 by exclusive or device 11, integrator A 12, integrator B 13,
Arithmetic unit 14, A/D converter 15 form, and the pulse signal containing phase information that exclusive or device 11 produces enters integrator B 13,
Increase therewith when if the voltage of the output of the duty cycle of the pulse signal containing phase information increase integrator B 13, at the same time
Arithmetic unit 14 is sent into together with the reference voltage exported with integrator A 12, the arithmetic unit 14 is by the voltage of the output of two integrators
Scale operation output is carried out, A/D converter is sent into and is changed, be then fed into the completion decimal of programmable processor 6 adds computing,
Then next comparison loop is remake；
When the voltage for the output that the duty cycle of the pulse signal containing phase information reduces integrator B 13 just reduces therewith,
Arithmetic unit 14 is sent into together with the reference voltage that integrator A 12 is exported at the same time, the arithmetic unit 14 is by the output of two integrators
Voltage carries out scale operation output, is sent into A/D converter and is changed, and is then fed into programmable processor 6 and completes subtracting for decimal
Computing, then remakes next comparison loop, after counter 5 exports integer pulse entrance by bus in real time in this process
Continuous programmable processor 6, final programmable processor 6 export high-resolution phase detection result.
The above is present pre-ferred embodiments, for the ordinary skill in the art, according to the present invention
Teaching, in the case where not departing from the principle of the present invention and spirit, the changes, modifications, replacement and the change that are carried out to embodiment
Type is still fallen within protection scope of the present invention.
Claims (5)
1. a kind of frequency difference interference signal high-resolution subdivision system of phase integral operation transform, including reference signal process circuit,
Measuring signal process circuit, phase discriminator, high-resolution phase detection group, counter and programmable processor；Reference signal processing
Circuit, measuring signal process circuit are respectively completed Photoelectric Detection conversion, amplification, filtering and the shaping of measuring signal and reference signal
Afterwards, export as after two-way square wave digital signal, be sent into all the way phase discriminator carry out frequency multiplication debate to, export for phase place change plus,
Tally-down pulse signal, phase discriminator carry out frequency multiplication debate to output with phase place change plus, tally-down pulse signal be sent to meter
The integer of frequency difference interference signal is sent in programmable processor by number device, the counter by bus；Another way is defeated again at the same time
Enter to high-resolution phase detection group, which carries out high-resolution phase inspection by frequency difference interference signal
Survey, then the decimal of frequency difference interference signal is sent in programmable processor by bus, last programmable processor calculates
Show that final subdivision result is exported by bus mode after processing integer pulse and fraction data.
2. the frequency difference interference signal high-resolution subdivision system of phase integral operation transform according to claim 1, its feature
It is, segments measurement accuracy calculation formula：
<mrow>
<mi>Re</mi>
<mi>s</mi>
<mi>o</mi>
<mi>l</mi>
<mi>u</mi>
<mi>t</mi>
<mi>i</mi>
<mi>o</mi>
<mi>n</mi>
<mo>=</mo>
<mfrac>
<mn>1</mn>
<msup>
<mn>2</mn>
<mi>n</mi>
</msup>
</mfrac>
<mo>&CenterDot;</mo>
<mfrac>
<mi>&lambda;</mi>
<mn>2</mn>
</mfrac>
</mrow>
Wherein, n is analog-to-digital conversion digit, and the n=16 in present example, then final precision is λ/65536 (0.005nm), and n is
Positive integer.
3. the frequency difference interference signal high-resolution subdivision system of phase integral operation transform according to claim 1, its feature
It is, phase discriminator and counter realize number system；Decimal number system, programmable processor are realized in high-resolution phase detection
High resolution detection is realized in the output of progressively increasing for completing integer and decimal.
4. the frequency difference interference signal high-resolution subdivision system of phase integral operation transform according to claim 1, its feature
It is, measuring signal process circuit is made of photoelectric switching circuit, operational amplification circuit, filter circuit, shaping circuit, and photoelectricity turns
Change the optical signal of circuit receiving instrument output and convert thereof into electric signal, operational amplification circuit is used for defeated to photoelectric switching circuit
Go out electric signal to be amplified, it is met subsequent conditioning circuit processing requirement, filter circuit is used to filter out the high-frequency noise in signal, whole
Shape circuit is used for the digital pulse signal that the sinusoidal signal of filter circuit output is shaped as to suitable digital device processing.
5. the frequency difference interference signal high-resolution subdivision system of phase integral operation transform according to claim 1, its feature
It is, the high-resolution phase detection group is made of exclusive or device, integrator A, integrator B, arithmetic unit, A/D converter, different
Or the pulse signal containing phase information that device produces enters integrator B, if accounting for when the pulse signal containing phase information
The empty voltage than increasing the output of integrator B just increases therewith, while is sent into computing together with the reference voltage of integrator A outputs
The voltage of the output of two integrators is carried out scale operation output by device, the arithmetic unit, is sent into A/D converter and is changed, so
That is sent into programmable processor completion decimal afterwards adds computing, then remakes next comparison loop；
When the voltage for the output that the duty cycle of the pulse signal containing phase information reduces integrator B just reduces therewith, while with
The reference voltage of integrator A outputs is sent into arithmetic unit together, which carries out ratio by the voltage of the output of two integrators
Computing exports, and is sent into A/D converter and is changed, and be then fed into programmable processor completion decimal subtracts computing, then remakes
Next comparison loop, counter is entered by bus output integer pulse in real time in this process subsequently may be programmed processing
Device, final programmable processor export high-resolution phase detection result.
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Cited By (2)
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| CN112212783A (en) * | 2020-09-21 | 2021-01-12 | 清华大学 | Phase discrimination system and method based on dynamic response time measurement method |
| CN114754680A (en) * | 2022-06-14 | 2022-07-15 | 探维科技(北京)有限公司 | Grating scale and method, device, medium and equipment for improving measurement precision of grating scale |
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