CN108020747A - Inductor off position detection device and detection method - Google Patents
Inductor off position detection device and detection method Download PDFInfo
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- CN108020747A CN108020747A CN201711159040.0A CN201711159040A CN108020747A CN 108020747 A CN108020747 A CN 108020747A CN 201711159040 A CN201711159040 A CN 201711159040A CN 108020747 A CN108020747 A CN 108020747A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
The present invention relates to a kind of device for detecting breaking inductor off position to be measured.Including electrode of substrate and capacitive detection module.Wherein, electrode of substrate is used between breaking inductor to be measured form capacitance structure, and capacitive detection module is used for the size for detecting and obtaining the capacitance formed between breaking inductor and substrate to be measured.By setting capacitance structure is formed between electrode of substrate and breaking inductor to be measured, and two opposite polarity voltage ends of capacitive detection module are connected respectively to using electrode of substrate as the electrode that one of electrode of the structure of capacitance is formed with breaking inductor to be measured, it can realize the quick size measured and obtain the capacitance formed between breaking inductor and substrate to be measured.The present invention also provides a kind of breaking inductor off position detection method to be measured.The distance between breaking inductor off positions to be measured and two termination electrodes are judged by two sections of capacitance ratio between inductance coil and electrode of substrate in breaking inductor to be measured.
Description
Technical field
The present invention relates to detection technique field, more particularly to a kind of inductor off position detection device and detection side
Method.
Background technology
Inductor open circuit is a kind of common form of inductor failure.Check that the mode of inductor open circuit has at present：Arteries and veins
Punching, microscopic observation, X-ray examination method etc..Impulse method test off position is to prolong electric wire by pulse current to transmit, disconnected
Waypoint reflects, the feedback time of pulse current and the product of electromagnetic wave propagation speed, it is possible to determine that the position of trip point.
But impulse method is commonly used to the trip point position of test long distance delivery circuit, is not suitable for short-range inductor trip point
Detection.Microscopic observation is to judge the position of open circuit by amplifying the gap of off position, when commonly used to analyze PCB
The situation of plate surface electric conductor open circuit, and for the feelings of LTCC (low-temperature co-fired ceramics) electronic component (such as inductor) internal break
Condition, due to there is the solid matters such as ceramics or ferrite to block, it is difficult to be directly observed internal break with microscope.X-ray inspection
Machine is by X-ray transmission principle, observes electrodes of electronic components open circuit conditions.But when only electric conductor open circuit is apparent, X-ray
Just easily observe trip point.In breaking gap very little, x-ray flaw detector by resolution ratio due to being limited, it is difficult to observe
Breaking gap.
The content of the invention
Based on this, the present invention provides a kind of inspection for the off position that can easily and accurately detect breaking inductor to be measured
Survey device.
In addition, also provide a kind of detection method of inductor off position.
A kind of inductor off position detection device, including：
Electrode of substrate, electrode of substrate are used to form capacitance structure between breaking inductor to be measured；
Capacitive detection module, capacitive detection module are used to detecting and obtaining shape between breaking inductor and electrode of substrate to be measured
Into capacitance size.
In one of the embodiments, the one side of electrode of substrate towards breaking inductor to be measured is provided with the first insulating layer.
In one of the embodiments, electrode of substrate is provided with the second insulating layer backwards to the one side of breaking inductor to be measured.
In one of the embodiments, capacitive detection module is at least provided with the first connectivity port and second connection end mouth；
The electric polarity of first connectivity port is opposite with the electric polarity of second connection end mouth；
First connectivity port is electrically connected with electrode of substrate；
Second connection end mouth is used to be electrically connected with the termination electrode of breaking inductor to be measured.
In one of the embodiments, capacitive detection module is additionally provided with the 3rd connectivity port；
The electric polarity of first connectivity port is opposite with the electric polarity of the 3rd connectivity port；
Second connection end mouth is used to be electrically connected with the first termination electrode of breaking inductor to be measured；
3rd connectivity port is used to be electrically connected with the second termination electrode of breaking inductor to be measured.
In one of the embodiments, capacitive detection module is additionally provided with power supply and controlling switch；
Power supply is used to provide voltage with the capacitance that electrode of substrate is formed to breaking inductor to be measured；
Controlling switch is used for Switching power and provides voltage to second connection end mouth and the 3rd connectivity port respectively.
In one of the embodiments, electrode of substrate is metallic plate or graphite cake.
The device of above-mentioned detection breaking inductor off position to be measured, by setting electrode of substrate and breaking inductor to be measured
In capacitance structure is formed between two sections of inductance coils, and pass through capacitive detection module and measure electrode of substrate and breaking inductor to be measured
In capacitance size is formed between two sections of inductance coils.The influence factor of capacitance size can be utilized to combine breaking inductor to be measured
In two sections of measurement capacitances between inductance coil and electrode of substrate quickly judge breaking inductor off position to be measured with it is to be measured
The distance between breaking two termination electrodes of inductor.
A kind of inductor off position detection method, method include：
Breaking inductor to be measured to be measured is placed on an electrode of substrate and forms capacitance structure；
Detect and record the capacitance size between breaking inductor and electrode of substrate to be measured；
The position of breaking inductor open circuit to be measured is judged according to the capacitance size between breaking inductor to be measured and electrode of substrate
Put.
In one of the embodiments, judging the specific method of breaking inductor off position to be measured includes：
Detect and record the first capacitance in breaking inductor to be measured between first segment inductance coil and electrode of substrate；
Detect and record the second capacitance in breaking inductor to be measured between second segment inductance coil and electrode of substrate；
Judge that off position breaks with to be measured in breaking inductor to be measured according to the ratio of the first capacitance and the second capacitance
The distance between two termination electrodes of road inductor；
Alternatively, judging the specific method of breaking inductor off position to be measured includes：
Detect and record any one section of capacitance between inductance coil and electrode of substrate in breaking inductor to be measured；
Capacitance between the inductor and electrode of substrate identical and intact according to the specification with being measured under the same terms
Ratio, judges the distance between two termination electrodes of off position and breaking inductor to be measured in breaking inductor to be measured.
In one of the embodiments, judge that the specific method of off position in breaking inductor to be measured further includes：
Detect and record the first opposite of any one section of inductance coil in breaking inductor to be measured respectively close to substrate electricity
First pair of capacitance during pole between electrode of substrate；
Detect and record the second opposite of any one section of inductance coil in breaking inductor to be measured respectively close to substrate electricity
Second pair of capacitance during pole between electrode of substrate；
According to the ratio of first pair of capacitance judge the off position of breaking inductor to be measured respectively with the first opposite two
Distance between a surface；
According to the ratio of second pair of capacitance judge the off position of breaking inductor to be measured respectively with the second opposite two
Distance between a surface.
Above-mentioned breaking inductor off position detection method to be measured, by the way that breaking inductor to be measured is placed on substrate electricity
Capacitance structure is formed on extremely, and simultaneously base plate electrode and open circuit to be measured are measured by providing voltage to the capacitance structure of formation
Capacitance size is formed in inductor between two sections of inductance coils, realizes and combines open circuit to be measured using the influence factor of capacitance size
Two sections of measurement capacitances between inductance coil and electrode of substrate quickly judge breaking inductor off position to be measured in inductor
The distance between two termination electrodes of breaking inductor to be measured.Thus, it is possible to the off position of smart decision bits breaking inductor to be measured
(coordinate), realizes simple, quick, the accurately judgement to the breaking invalid position of closed breaking inductor to be measured, after raising
Continuous grinding and polishing and the detection efficiency of X-ray detection.
Brief description of the drawings
Fig. 1 is the system schematic of the device for the detection breaking inductor off position to be measured that an embodiment provides；
Fig. 2 is the detection method flow chart for the detection breaking inductor off position to be measured that an embodiment provides；
Fig. 3 is judgement breaking the distance between the inductor off position and two termination electrode to be measured that an embodiment provides
Detection method flow chart；
Fig. 4 is distance between the judgement breaking inductor off position to be measured and two termination electrode that an embodiment provides
Another detection method flow chart；
Fig. 5 is the judgement breaking inductor off position to be measured and the detection of opposite distance between the surface that an embodiment provides
Method flow diagram；
Fig. 6 is the breaking inductor three to be measured of embodiment offer to opposite schematic diagram.
Description of reference numerals：10. capacitive detection module；20. substrate；21. the first insulating layer；22. electrode of substrate；23. the
Two insulating layers；30. open circuit inductor to be measured.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, it is right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
As shown in Figure 1, a kind of breaking inductor off position detection device to be measured, including electrode of substrate 22 and capacitance detecting
Module 10.Wherein, electrode of substrate 22 is used to form capacitance structure between breaking inductor 30 to be measured.Capacitive detection module 10 is used
In detecting and obtain the size of the capacitance formed between breaking inductor and substrate to be measured.Electrode of substrate 22 for plate-like structure or
One side close to breaking inductor to be measured is plane.
In the composition of above device, at least two opposite polarity electrodes of capacitive detection module 10, one of electrode
It is electrically connected with electrode of substrate 22, another electrode is electrically connected with breaking inductor 30 to be measured, so as to forming capacitance structure
Two electrodes provide voltage, and then measure the size of measured capacitance values.
Capacitance structure is formed between two sections of inductance coils by setting in electrode of substrate and breaking inductor to be measured, and is passed through
Capacitive detection module measures in electrode of substrate and breaking inductor to be measured and forms capacitance size between two sections of inductance coils.Can
Two sections of capacitances between inductance coil and electrode of substrate in breaking inductor to be measured are combined using the influence factor of capacitance size to survey
Value quickly judges the distance between two termination electrodes of breaking inductor off position to be measured and breaking inductor to be measured.
In one of the embodiments, as shown in Figure 1, the one side in electrode of substrate 22 close to breaking inductor to be measured is set
There is the first insulating layer 21.So set, it is on the one hand to prevent electrode of substrate 22 and the open circuit to be measured without insulating layer parcel
Inductor directly contacts to form short circuit, and cannot form capacitance structure.On the other hand it is quiet on electrode of substrate 22 in order to prevent
Positive charge in charge adsorption environment and middle conjunction or diffusion cause electric quantity loss.
In one of the embodiments, as shown in Figure 1, electrode of substrate 22 is provided with backwards to the one side of breaking inductor to be measured
Second insulating layer 23.So set, be on the one hand to prevent electrode of substrate 22 contacted with nonisulated workbench cause ground connection and
Failure.On the other hand be in order to prevent on electrode of substrate 22 electrostatic charge absorption environment in positive charge and it is middle conjunction or diffusion cause
Electric quantity loss.
In one of the embodiments, capacitive detection module 10 is at least provided with the first connectivity port and second connection end
Mouthful.Wherein, the electric polarity of the first connectivity port is opposite with the electric polarity of second connection end mouth.So set, be to be able to for
Two electrodes for forming capacitance structure provide voltage, and then measure the size of measured capacitance values.In the present solution, the first connecting pin
Mouth is used to be electrically connected with electrode of substrate 22, and second connection end mouth is used to be electrically connected with breaking inductor 30 to be measured, so that forming
Capacitance between the electrode of substrate 22 of capacitance structure and breaking inductor 30 to be measured is sized to be measured.
In one of the embodiments, as shown in Figure 1, capacitive detection module 10 is provided with the first connectivity port, the second company
Connect port and the 3rd connectivity port.Wherein, the electric polarity of the first connectivity port and second connection end mouth and the 3rd connectivity port
Electric polarity is opposite.In capacitance structure, two electrodes, which need to provide opposite polarity electric charge, can just make formation side in capacitance structure
To the more uniform electric field of consistent and intensity, and then make the measurement of capacitance more accurate.In three connectivity ports, the first connecting pin
Mouth is used to be electrically connected with electrode of substrate 22, and second connection end mouth is used to be electrically connected with breaking the first termination electrode of inductor to be measured, the
Three connectivity ports are used to be electrically connected with breaking the second termination electrode of inductor to be measured.So set, the connection of switching first can be passed through
Port is connected with second connection end mouth and the 3rd connectivity port respectively, realizes the capacitance size of two sections of breaking inductors 30 to be measured
Measurement, it is simple, convenient, fast.
In one of the embodiments, capacitive detection module 10 is additionally provided with power supply and controlling switch.Wherein, power supply is used for
To breaking inductor 30 to be measured voltage is provided with the capacitance that electrode of substrate 22 is formed.Controlling switch is used for Switching power respectively to the
Two connectivity ports and the 3rd connectivity port provide voltage.Since the measurement of capacitance size needs two electrodes to capacitance structure
It is upper that opposite polarity voltage is provided, so, need to set a power supply in the capacity measurement module in this programme.Certainly, the electricity
Source can also provide required electric energy for the electronic component of other electricity consumptions in capacitive detection module 10 at the same time.
In one of the embodiments, electrode of substrate 22 is metallic plate or graphite cake.Graphite and most of metal belong to electricity
Good conductor, and more electric charges can be carried as electrode, and more electric charges are loaded on two electrodes of capacitance structure
It can cause the electric field strength bigger between capacitance, measured value on the one hand can be made more accurate, on the one hand can adapt to electrode
Between dielectric it is thicker when, the measurement of capacitance.
The device of above-mentioned detection breaking inductor off position to be measured, by setting electrode of substrate 22 and breaking inductance to be measured
Form capacitance structure between device 30, and using one of electrode of the electrode of substrate 22 as the structure of capacitance and breaking inductance to be measured
The electrode that device is formed is connected respectively to two opposite polarity voltage ends of capacitive detection module 10, so as to quickly measure and obtain
The size of the capacitance formed between open circuit inductor and substrate to be measured.
It is simple present invention also provides one kind according to the above, and can easily and efficiently detect breaking inductance to be measured
The detection method of device off position, as shown in Fig. 2, method includes step S110-S130：
Step S110:Breaking inductor 30 to be measured is placed on an electrode of substrate 22 and forms capacitance structure.Will be to be measured disconnected
Road inductor 30 is placed on the capacitance that can make breaking inductor 30 to be measured on an electrode of substrate 22 and be formed on electrode of substrate 22
Structure is relatively stablized, easy to measure.
Step S120:Detect and record the capacitance size between breaking inductor 30 and electrode of substrate 22 to be measured.Passing through will
Opposite polarity connectivity port is respectively connected on two electrodes in capacitance structure in capacity measurement module, makes capacitive junctions configuration
Into stable electric field, so that the capacitance size under measuring certain voltage, and the capacitance size measured is recorded so as to subsequent analysis.
Step S130:Open circuit electricity to be measured is judged according to the capacitance size between breaking inductor 30 to be measured and electrode of substrate 22
The position of sensor open circuit.
Since under identical environment, capacitance size only projects electricity between overlapping area, interelectrode distance and electrode between electrode
Three factors of medium are related, and the size of capacitance projects overlapping area and dielectric dielectric constant in just between electrode respectively
It is related, be negatively correlated with interelectrode distance.It is specific to be measured disconnected in this programme breaking inductor off position detection method to be measured
Dielectric between road inductor 30 and electrode of substrate 22 is to judge, so according to specific breaking inductor 30 to be measured and substrate electricity
The positive correlation of overlapping area and the negative correlation energy with interelectrode distance are projected between capacitance size and electrode between pole 22
Enough three orthogonal straight lines of formation, and the intersection point of orthogonal straight lines, that is, breaking inductor off position to be measured, this method is simple, convenient
And measurement is accurate.
In one of the embodiments, as shown in figure 3, according to the electricity between breaking inductor 30 to be measured and electrode of substrate 22
Hold size and judge that the specific method of the position of the breaking open circuit of inductor 30 to be measured includes step S210-S230：
Step S210:Detect and record in breaking inductor 30 to be measured between first segment inductance coil and electrode of substrate 22
First capacitance.
Step S220:Detect and record in breaking inductor 30 to be measured between second segment inductance coil and electrode of substrate 22
Second capacitance.
Step S230:According to the ratio of the first capacitance and the second capacitance judge breaking inductor off position to be measured with
The distance between open circuit 30 two termination electrodes of inductor to be measured.
In above-mentioned steps S210-S230, for convenience of description, two sections that breaking inductor 30 to be measured is disconnected claim respectively
Make first segment inductance coil and second segment inductance coil, first segment inductance coil and second segment inductance coil is electric with substrate respectively
Capacitance is measured between pole 22 and is accordingly referred to as the first capacitance and the second capacitance.
The principle for detecting breaking inductor off position to be measured is：It is as shown in Figure 1, specific breaking open circuit to be measured is electric
On the base plate 20, open circuit inductor 30 and electrode of substrate 22 to be measured constitute two capacitance structures for the placement of sensor level, i.e., and the
The first capacitance structure, shape between second end inductance coil and electrode of substrate 22 are formed between one section of inductance coil and electrode of substrate 22
Into the second capacitance structure.The material of same inductor outer layer covers is usually identical, so two capacitance structures at this time
Dielectric is identical, and electrode distance is identical, and inductance coil width of the general breaking inductor 30 to be measured on same length direction
Also it is identical, so when the first capacitance of the first capacitance structure for measuring and the second capacitance structure the second capacitance ratio with
The ratio of the distance of open circuit inductor off position two termination electrodes of distance to be measured is identical, thus can according to the first capacitance and
The ratio of second capacitance is judged between 30 two termination electrodes of breaking inductor off position to be measured and breaking inductor to be measured
Distance, realize breaking inductor off position to be measured on breaking inductor first direction to be measured (such as length direction) position.
In addition, when breaking inductor 30 to be measured is placed on matrix and forms capacitance structure with base electrode vertically, first measured is electric
Hold the ratio of the first capacitance of structure and the second capacitance of the second capacitance structure and breaking inductor off position to be measured away from
Therefore ratio with a distance from both ends by the ratio of the first capacitance and the second capacitance on the contrary, can also judge open circuit electricity to be measured
The distance between sensor off position and breaking 30 both ends of inductor to be measured, realize breaking inductor off position to be measured to be measured
The position of breaking inductor such as length direction.
In one of the embodiments, as shown in figure 4, according to the electricity between breaking inductor 30 to be measured and electrode of substrate 22
Hold size and judge that the specific method of the position of the breaking open circuit of inductor 30 to be measured can also be step S310-S320：
Step S310:Detect and record in breaking inductor 30 to be measured between any one section of inductance coil and electrode of substrate 22
Capacitance.
Step S320:According to the specification with being measured under the same terms between identical and intact inductor and electrode of substrate 22
Capacitance ratio, between 30 two termination electrodes of off position and breaking inductor to be measured for judging breaking inductor 30 to be measured
Distance.
In above-mentioned steps S310-S320, the principle for detecting breaking inductor off position to be measured is：As shown in Figure 1,
By the placement of specific breaking breaking inductor level to be measured on the base plate 20, open circuit inductor 30 to be measured and 22 structure of electrode of substrate
Into two capacitance structures, i.e., the first capacitance structure, the second inductor wire are formed between first segment inductance coil and electrode of substrate 22
The second capacitance structure is formed between circle and electrode of substrate 22.It is brand-new intact with breaking 30 same size of inductor to be measured by one
Inductor, placed using the modes of emplacement identical with breaking inductor 30 to be measured and form electricity with electrode of substrate 22 on the base plate 20
Hold structure.At this time, the material of brand-new intact inductor outer layer covers and the material of 30 outer layer covers of breaking inductor to be measured are
Identical, so the electricity between open circuit inductor 30 to be measured and the tested brand-new intact inductor and base electrode of same size
Medium is identical, and electrode distance is identical, and the inductance coil width between both ends is also identical, so when measure from one end one section it is to be measured
Capacitance between breaking inductor 30 and electrode of substrate 22 and brand-new intact inductor the same end from same size measure
Capacitance ratio be tested in breaking inductor 30 to be measured that section of inductance coil length and same size it is brand-new complete
The ratio of the length of good inductor is identical, therefore can be according to the identical inductance of the intact and specification with being measured under the same terms
The ratio of capacitance between device and electrode of substrate 22, judges breaking 30 off position of inductor to be measured and breaking inductor to be measured
The distance between 30 two termination electrodes, realize breaking inductor off position to be measured on breaking inductor first direction to be measured
The position of (such as length direction).In addition, capacitance is formed with base electrode when breaking inductor 30 to be measured is placed on matrix vertically
During structure, capacitance between one section of breaking inductor 30 and electrode of substrate 22 to be measured measuring at this time from one end and from identical rule
The ratio for the capacitance that brand-new intact inductor the same end of lattice measures in breaking inductor 30 to be measured with being tested that section of electricity
Feel coil length with the length of the brand-new intact inductor of same size ratio on the contrary, therefore also can according to it is identical
Under the conditions of capacitance between the identical inductor and electrode of substrate 22 of the intact and specification that measures ratio, judge open circuit to be measured
The distance between inductor off position and breaking 30 both ends of inductor to be measured, realize that breaking inductor off position to be measured is being treated
Survey the position of breaking inductor such as length direction.
In one of the embodiments, as shown in figure 5, according to the electricity between breaking inductor 30 to be measured and electrode of substrate 22
Hold size and judge that the specific method of the position of the breaking open circuit of inductor 30 to be measured further includes step S410-S440：
Step S410：Detect and record first pair of opposite point of any one section of inductance coil in breaking inductor 30 to be measured
Not close to first pair of capacitance during electrode of substrate 22 between electrode of substrate 22.
Step S420：Detect and record second pair of opposite point of any one section of inductance coil in breaking inductor 30 to be measured
Not close to second pair of capacitance during electrode of substrate 22 between electrode of substrate 22.
Step S430：Judge the off position of breaking inductor to be measured respectively with first according to the ratio of first pair of capacitance
Distance between two surfaces of opposite.
Step S440：Judge the off position of breaking inductor to be measured respectively with second according to the ratio of second pair of capacitance
Distance between two surfaces of opposite.
As shown in fig. 6, for convenience of description, it is contemplated that all break for hexahedral each face of rectangle with to be measured a cross section
Road inductor 30 contacts, and will be divided into six faces around breaking inductor 30 to be measured, breaking inductor 30 to be measured at this time possesses
Three pairs of opposites.Above-mentioned steps S210-S230 and step S310-S320 mainly for detection of breaking inductor 30 to be measured open circuit
The distance at positional distance both ends (length direction), what it was utilized is that dielectric in capacitance structure and electrode distance are all identical and electric
The overlapping area difference that extremely mutually projects measures the position of open circuit.And in above-mentioned steps S410-S440, then it is main to utilize
The overlapping area that dielectric and electrode mutually project is all identical, and electrode distance difference measures off position and other four faces
The distance between.
Its principle is：As shown in Figure 1, by the placement of specific breaking breaking inductor level to be measured on the base plate 20, treat
The two sections of inductance coils surveyed in breaking inductor 30 and electrode of substrate 22 constitute two capacitance structures, i.e. the first inductance coil and
The first capacitance structure is formed between electrode of substrate 22, the second capacitance structure is formed between the second inductance coil and electrode of substrate 22.
The material of same inductor outer layer covers is usually identical, i.e., the dielectric in capacitance structure is identical.Due to open circuit electricity to be measured
Frontal projected area of any one section of inductance coil in a pair of of opposite is identical in sensor 30, therefore can be approximately considered and electrode of substrate
In 22 capacitance structures formed, the overlapping area that electrode mutually projects is identical.At this time, any one section in breaking inductor 30 to be measured
Capacitance size and the interelectrode distance dependent for the capacitance structure that inductance coil is formed with electrode of substrate 22.Therefore, will be to be measured
When the opposite of any one section of inductance coil is respectively for substrate in breaking inductor 30 two capacitance sizes measuring only with
Electrode distance is related in capacitance structure, so as to judge breaking inductor to be measured according to the ratio of two capacitances measured
The off position distance between two opposites respectively.Therefore pass through above-mentioned steps S410-S440 combination step S210-S230 or step
Rapid S310-S320, can obtain the breaking inductor trip point to be measured uniquely judged, realize the smart decision bits of trip point.
Above-mentioned breaking inductor off position detection method to be measured, by the way that breaking inductor to be measured is placed on substrate electricity
Capacitance structure is formed on extremely, and simultaneously base plate electrode and open circuit to be measured are measured by providing voltage to the capacitance structure of formation
Capacitance size is formed in inductor between two sections of inductance coils, realizes and combines open circuit to be measured using the influence factor of capacitance size
Two sections of measurement capacitances between inductance coil and electrode of substrate quickly judge breaking inductor off position to be measured in inductor
The distance between two termination electrodes of breaking inductor to be measured.Thus, it is possible to the off position of smart decision bits breaking inductor to be measured
(coordinate), realizes simple, quick, the accurately judgement to the breaking invalid position of closed breaking inductor to be measured, after raising
Continuous grinding and polishing and the detection efficiency of X-ray detection.
Each technical characteristic of above example can be combined arbitrarily, to make description succinct, not to above-described embodiment
In each technical characteristic it is all possible combination be all described, as long as however, lance is not present in the combination of these technical characteristics
Shield, is all considered to be the scope of this specification record.
Above example only expresses the several embodiments of the present invention, its description is more specific and detailed, but can not
Therefore it is construed as limiting the scope of the patent.It should be pointed out that for those of ordinary skill in the art,
On the premise of not departing from present inventive concept, various modifications and improvements can be made, these belong to protection scope of the present invention.
Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
- A kind of 1. inductor off position detection device, it is characterised in that including：Electrode of substrate, the electrode of substrate are used to form capacitance structure between breaking inductor to be measured；Capacitive detection module, the capacitive detection module are used to detecting and obtaining the breaking inductor to be measured and substrate electricity The size of the capacitance formed between pole.
- 2. device according to claim 1, it is characterised in that the electrode of substrate is towards the breaking inductor to be measured Simultaneously it is provided with the first insulating layer.
- 3. device according to claim 1, it is characterised in that：The electrode of substrate is backwards to the breaking inductor to be measured Simultaneously it is provided with the second insulating layer.
- 4. device according to claim 1, it is characterised in that：The capacitive detection module is at least provided with the first connecting pin Mouth and second connection end mouth；The electric polarity of first connectivity port is opposite with the electric polarity of the second connection end mouth；First connectivity port is electrically connected with the electrode of substrate；The second connection end mouth is used to be electrically connected with the termination electrode of the breaking inductor to be measured.
- 5. device according to claim 4, it is characterised in that：The capacitive detection module is additionally provided with the 3rd connecting pin Mouthful；The electric polarity of first connectivity port is opposite with the electric polarity of the 3rd connectivity port；The second connection end mouth is used to be electrically connected with the first termination electrode of the breaking inductor to be measured；3rd connectivity port is used to be electrically connected with the second termination electrode of the breaking inductor to be measured.
- 6. device according to claim 5, it is characterised in that：The capacitive detection module is additionally provided with power supply and control is opened Close；The power supply is used to provide voltage with the capacitance that the electrode of substrate is formed to the breaking inductor to be measured；The controlling switch is used to switch the power supply respectively to the second connection end mouth and the 3rd connectivity port offer Voltage.
- 7. according to the device described in claim 1-6 any one, it is characterised in that：The electrode of substrate is metallic plate or graphite Plate.
- A kind of 8. inductor off position detection method, it is characterised in that the described method includes：Breaking inductor to be measured is placed on an electrode of substrate and forms capacitance structure；Detect and record the capacitance size between the breaking inductor to be measured and electrode of substrate；The breaking inductor open circuit to be measured is judged according to the capacitance size between the breaking inductor to be measured and electrode of substrate Position.
- 9. detection method according to claim 8, it is characterised in that according to the breaking inductor to be measured and electrode of substrate Between capacitance size judge that the specific method of the position of the breaking inductor open circuit to be measured includes：Detect and record the first capacitance in the breaking inductor to be measured between first segment inductance coil and the electrode of substrate Value；Detect and record the second capacitance in the breaking inductor to be measured between second segment inductance coil and the electrode of substrate Value；Off position and institute in the breaking inductor to be measured are judged according to the ratio of first capacitance and the second capacitance State the distance between two termination electrodes of breaking inductor to be measured；Alternatively, judging the specific method of the breaking inductor off position to be measured includes：Detect and record the capacitance in the breaking inductor to be measured between any one section of inductance coil and the electrode of substrate；Capacitance according to the specification with being measured under the same terms between identical and intact inductor and the electrode of substrate Ratio, judge in the breaking inductor to be measured between two termination electrodes of off position and the breaking inductor to be measured away from From.
- 10. detection method according to claim 9, it is characterised in that according to the breaking inductor to be measured and substrate electricity Capacitance size between pole judges that the specific method of the position of the breaking inductor open circuit to be measured further includes：Detect and record the first opposite of any one section of inductance coil in the breaking inductor to be measured respectively close to the base First pair of capacitance during plate electrode between the electrode of substrate；Detect and record the second opposite of any one section of inductance coil described in the breaking inductor to be measured respectively close to institute Second pair of capacitance when stating electrode of substrate between the electrode of substrate；Judge the off position of the breaking inductor to be measured respectively with described first according to the ratio of first pair of capacitance Distance between two surfaces of opposite；Judge the off position of the breaking inductor to be measured respectively with described second according to the ratio of second pair of capacitance Distance between two surfaces of opposite.
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