CN108020723A - Ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit - Google Patents
Ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit Download PDFInfo
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- CN108020723A CN108020723A CN201711042176.3A CN201711042176A CN108020723A CN 108020723 A CN108020723 A CN 108020723A CN 201711042176 A CN201711042176 A CN 201711042176A CN 108020723 A CN108020723 A CN 108020723A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/025—Measuring very high resistances, e.g. isolation resistances, i.e. megohm-meters
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Abstract
The invention discloses a kind of ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit, including capacitor type non-refrigeration focal surface reading circuit input stage array and four ultra-high resistance test structures, by this four ultra-high resistance test structures, quick, accurate measurement can be carried out to the feedback resistance of capacitor type non-refrigeration focal surface reading circuit using conventional high resistant instrument；By being detected to the ultra-high resistance test structure on four angles of capacitor type non-refrigeration focal surface reading circuit, both the resistance value and uniformity requirement of reading circuit input stage feedback resistance had been ensured, it also ensure that the performance of capacitor type non-refrigeration focal surface reading circuit, while ensure that the performance of focus planar detector.
Description
Technical field
The present invention relates to a kind of ultra-high-impedance measuring device, and in particular, to is read for capacitor type non-refrigeration focal surface
The ultra-high-impedance measuring device of circuit.
Technical background
In the design of capacitor type non-refrigeration focal surface reading circuit, since uncooled fpa detector is to pixel dimension
Limitation, generally require each pixel for less than or equal to 30 microns * 30 microns, causing capacitor type uncooled fpa detector
Capacitance is very small, reaches several pF magnitudes.In face of so small detector capacitance, capacitor type non-refrigeration focal surface reads electricity
Road can use voltage follower (SFD) type, or resistance feedback trsanscondutance amplifier type (RTIA), wherein performance are most preferably
RTIA types.Since detector capacitance is pF magnitudes, feedback resistance is caused to be up to tens G ohm magnitudes above, Cai Nengman
Sufficient design requirement.Also, there is higher requirement to the precision and homogeneity of the feedback resistance in input stage element circuit array,
As one of most important parameter of capacitor type uncooled fpa detector reading circuit, the test method of the big resistance becomes electricity
One of key technology that must be broken through in appearance type uncooled fpa detector development process.
Existing technical solution for directly with special ultra-high-impedance measuring instrument to the superelevation feedback resistance of reading circuit into
Row measurement.Directly the superelevation feedback resistance of reading circuit is measured with special ultra-high-impedance measuring instrument, is lacked there are following
Point：
1. special ultra-high-impedance measuring instrument is expensive；
2. special ultra-high-impedance measuring instrument is complicated, it is difficult to the superelevation feedback resistance of reading circuit is carried out in real time,
Online, accurate detection；
3. special ultra-high-impedance measuring instrument is complicated, it is difficult to the uniformity of the superelevation feedback resistance of reading circuit into
Row monitoring in real time.
The content of the invention
It is an object of the invention to invent a kind of ultra-high-impedance measurement for capacitor type non-refrigeration focal surface reading circuit
Device, so that in readout circuit chip test and screening process, can quickly and accurately measure feedback resistance resistance value, ensure
The performance and quality of capacitor type non-refrigeration focal surface reading circuit.
A kind of ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit of the invention, including capacitor type
Non-refrigeration focal surface reading circuit pixel input unit array and four ultra-high resistance test structures.
Wherein, four ultra-high resistance test structures are located at the capacitor type non-refrigeration focal surface reading circuit picture respectively
The upper left corner, the upper right corner, the lower left corner, the lower right corner of plain input unit array.
Wherein, the ultra-high resistance test structure includes multiple evenly distributed ultra-high resistance modules respectively.
Preferably, the multiple evenly distributed ultra-high resistance module number is 50.
Wherein, the multiple evenly distributed ultra-high resistance module is connected in parallel by two metal contact wires.
Wherein, the ultra-high resistance test structure includes the pad of two connection metal contact wires.
Wherein, the ultra-high resistance module includes multiple evenly distributed ultra-high resistances.
Preferably, the multiple evenly distributed ultra-high resistance quantity is 20.
Wherein, the multiple evenly distributed ultra-high resistance is connected in parallel.
Wherein, the resistance value of the ultra-high resistance and the capacitor type non-refrigeration focal surface reading circuit pixel input unit battle array
The feedback resistance of row is identical.
Wherein, the shape of the ultra-high resistance, material and manufacture craft read electricity with the capacitor type non-refrigeration focal surface
The feedback resistance of road pixel input unit array is identical.
A kind of ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit of the invention, by non-system
Separately design ultra-high resistance part of detecting on four angles of the pixel input unit array of cold circuit of focal plane readout, by this four
A ultra-high resistance test structure, using conventional resistive instrument can to the feedback resistance of capacitor type non-refrigeration focal surface reading circuit into
Row is quick, accurately measurement；By to the ultra-high resistance test structure on four angles of capacitor type non-refrigeration focal surface reading circuit into
Row detection, had both ensured the resistance value and uniformity requirement of reading circuit input stage feedback resistance, also ensure that capacitor type non-brake method Jiao
The performance of plane reading circuit, while ensure that the performance of focus planar detector.
Brief description of the drawings
By reading the detailed description made to non-limiting example made with reference to the following drawings, of the invention is other
Feature, objects and advantages will become more apparent upon：
Fig. 1 is the signal of capacitor type uncooled fpa detector and reading circuit that one embodiment of the present of invention provides
Figure；
Fig. 2 is the capacitor type non-refrigeration focal surface reading circuit pixel input unit electricity that one embodiment of the present of invention provides
Road schematic diagram；
Fig. 3 is the ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit that one embodiment of the present of invention provides
The laying out pattern of measuring device；
Fig. 4 is the ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit that one embodiment of the present of invention provides
The laying out pattern of one ultra-high resistance test structure of measuring device；
Fig. 5 is the ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit that one embodiment of the present of invention provides
The laying out pattern of one ultra-high resistance module of measuring device.
The same or similar reference numeral represents the same or similar component in attached drawing.
Embodiment
To make the purpose of the present invention, content and advantage clearer, with reference to the accompanying drawings and examples, to the tool of the present invention
Body embodiment is described in further detail.
Fig. 1 is the schematic diagram of a kind of capacitor type uncooled fpa detector of the present invention and reading circuit, in figure 1 be for
Capacitor type non-refrigeration focal surface reading circuit, 2 be detector array, and 3 be pixel input unit array, and 4 be pixel input unit
Circuit, 5 be the enlarged drawing of pixel input-cell circuitry.
Fig. 2 is used for capacitor type non-refrigeration focal surface reading circuit pixel input-cell circuitry schematic diagram for the present invention is a kind of,
Due to limitation of the uncooled fpa detector to pixel dimension, generally require less than or equal to 30 microns * 30 microns, cause capacitance
The capacitance of each pixel of type uncooled fpa detector is very small, reaches several pF magnitudes.In face of so small detection
Device capacitance, capacitor type non-refrigeration focal surface reading circuit can use voltage follower (SFD) type, or resistance feedback across
Lead amplification type (RTIA).Wherein performance most preferably RTIA types.Since detector capacitance is pF magnitudes, cause feedback resistance
The up to magnitude of more than 100G, can be only achieved the effect of low-pass filtering.On the other hand, in input stage element circuit, the big electricity
The resistance accuracy and homogeneity of resistance are one of most important parameter of capacitor type uncooled fpa detector reading circuit.In Fig. 2
The as ultra-high-impedance resistance of feedback resistance 206, resistance value Rf, 207 be capacitance, and 208 be operational amplifier, and 209 be MOS
Pipe.
Fig. 3 is the laying out pattern of the ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit, it is wrapped
The reading circuit input stage array of non-refrigeration focal surface containing capacitor type and four ultra-high resistance test structures, four ultra-high resistance tests
Structure is respectively 301,302,303,304 in Fig. 3, on four angles of capacitor type non-refrigeration focal surface reading circuit 1, respectively
Four ultra-high resistance test structures are placed, wherein the domain of four ultra-high resistance test structures, material and technique are all identical.
Fig. 4 is one of a kind of ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit of the invention
The laying out pattern of ultra-high resistance test structure, a ultra-high resistance test structure can include multiple ultra-high resistance moulds being connected in parallel
Block, an example as the present embodiment provides include 50 superelevation being connected in parallel electricity for a ultra-high resistance test structure 300
Hinder module 1002,1003 ... 1048,1049,1050, ultra-high resistance test structure 300 further include two metal contact wires 403,
404 and two pads 401,402, two metal contact wires are used to be connected in parallel 50 ultra-high resistance modules, two pads difference
It is connected with two metal contact wires, for probe test.
Fig. 5 is one in a kind of ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit of the invention
The laying out pattern of a ultra-high resistance module, a ultra-high resistance module can include multiple ultra-high resistances being connected in parallel, such as this reality
Apply an example that example provides for a ultra-high resistance module 100 include 20 ultra-high resistances 501 being connected in parallel, 502,
The metal contact wires of 503 ... 518,519,520 and two 531,532, two metal contact wires are used to be connected in parallel 20 superelevation
Resistance.
In an embodiment of the present invention, ultra-high resistance 501,502,503 ... 518,519,520 resistance value and capacitor type are non-
Feedback resistance 206 in refrigeration focal surface reading circuit is identical, i.e., domain, material are identical with technique.Therefore, superelevation
The resistance value of resistive module 100, i.e. metal contact wires 431, the resistance value at 432 both ends, are reduced to the 1/20 of feedback resistance 206, i.e., one
The resistance of a ultra-high resistance module is RAB=Rf/20。
With reference to figure 2, Fig. 4 and Fig. 5, by the ultra-high resistance module 1001 identical with ultra-high resistance module 100, ultra-high resistance mould
Block 1002, ultra-high resistance module 1003 ... ultra-high resistance module 1048, ultra-high resistance module 1049, ultra-high resistance module
1050, and the resistance value of ultra-high resistance test structure that metal contact wires 403,404 and pad 401,402 are formed, i.e. pad
401st, the resistance value at 402 both ends of pad, is reduced to 100 resistance R of ultra-high resistance moduleAB1/50, i.e. ultra-high resistance test knot
The resistance of structure 300 is reduced to the 1/1000 of feedback resistance 206, i.e. Rtest=RAB/ 50=Rf/1000。
A kind of ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit of the invention, it is non-by capacitor type
Refrigeration focal surface reading circuit input stage array and four ultra-high resistance test structures 301,302,303,304 form；It is each super
High resistance test structure is by using 1000 ultra-high resistances (feedback resistance R with pixel input unit arrayfIt is identical)
Parallel connection, realizes that the resistance of each ultra-high resistance test structure is reduced to the 1/1000 of feedback resistance 206, and about 600M Ω are left
The right side, then can be to capacitor type non-refrigeration focal surface reading circuit pixel input unit array feedback resistance R with common high resistant instrumentf
Fast and accurately measured；Surveyed by four ultra-high resistances being distributed in capacitor type non-refrigeration focal surface reading circuit surrounding
Structure 301,302,303,304 is tried, can also be to the equal of capacitor type non-refrigeration focal surface reading circuit pixel input unit array
Even property is tested.
A kind of ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit of the invention, with conventional high resistant
Instrument can carry out the input stage feedback resistance of capacitor type non-refrigeration focal surface reading circuit quick, accurate measurement；And pass through
Ultra-high resistance part of detecting on four angles of capacitor type non-refrigeration focal surface reading circuit is detected, both ensures reading circuit
The resistance value and uniformity requirement of input stage feedback resistance；It also ensure that testing for capacitor type non-refrigeration focal surface reading circuit
Property；It ensure that the performance of uncooled fpa detector at the same time.
Although be described in detail on example embodiment and its advantage, it should be understood that do not depart from the present invention spirit and
In the case of protection domain defined in the appended claims, various change, substitutions and modifications can be carried out to these embodiments.It is right
In other examples, those of ordinary skill in the art should be readily appreciated that while keeping in the scope of the present invention, measurement
The order of method can change.
In addition, the application range of the present invention is not limited to technique, mechanism, the system of the specific embodiment described in specification
Make, material composition, means, method and step., will be easy as those of ordinary skill in the art from the disclosure
Ground understands, for current technique that is existing or will developing later, mechanism, manufacture, material composition, means, method or
Step, the knot that wherein they perform the function being substantially the same with the corresponding embodiment of the invention described or acquisition is substantially the same
Fruit, can apply them according to the present invention.Therefore, appended claims of the present invention are intended to these techniques, mechanism, system
Make, material composition, means, method or step are included in its protection domain.
Claims (11)
1. a kind of ultra-high-impedance measuring device for capacitor type non-refrigeration focal surface reading circuit, including capacitor type non-brake method are burnt
Plane reading circuit pixel input unit array and four ultra-high resistance test structures.
2. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 1 measures dress
Put, it is characterised in that four ultra-high resistance test structures are located at the capacitor type non-refrigeration focal surface reading circuit respectively
The upper left corner, the upper right corner, the lower left corner, the lower right corner of pixel input unit array.
3. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 1 measures dress
Put, it is characterised in that the ultra-high resistance test structure includes multiple evenly distributed ultra-high resistance modules respectively.
4. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 3 measures dress
Put, it is characterised in that the multiple evenly distributed ultra-high resistance module number is 50.
5. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 3 or 4 measures
Device, it is characterised in that the multiple evenly distributed ultra-high resistance module is connected in parallel by two metal contact wires.
6. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 5 measures dress
Put, it is characterised in that the ultra-high resistance test structure includes the pad of two connection metal contact wires.
7. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 3 measures dress
Put, it is characterised in that the ultra-high resistance module includes multiple evenly distributed ultra-high resistances.
8. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 7 measures dress
Put, it is characterised in that the multiple evenly distributed ultra-high resistance quantity is 20.
9. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 7 or 8 measures
Device, it is characterised in that the multiple evenly distributed ultra-high resistance is connected in parallel.
10. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 9 measures dress
Put, it is characterised in that the resistance value of the ultra-high resistance and the capacitor type non-refrigeration focal surface reading circuit pixel input unit
The feedback resistance of array is identical.
11. a kind of ultra-high-impedance for capacitor type non-refrigeration focal surface reading circuit according to claim 10 measures dress
Put, it is characterised in that shape, material and the manufacture craft of the ultra-high resistance read electricity with the capacitor type non-refrigeration focal surface
The feedback resistance of road pixel input unit array is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711042176.3A CN108020723B (en) | 2017-10-30 | 2017-10-30 | Ultra-high impedance measuring device for capacitive uncooled focal plane readout circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711042176.3A CN108020723B (en) | 2017-10-30 | 2017-10-30 | Ultra-high impedance measuring device for capacitive uncooled focal plane readout circuit |
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| CN108020723A true CN108020723A (en) | 2018-05-11 |
| CN108020723B CN108020723B (en) | 2020-12-04 |
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| CN201711042176.3A Active CN108020723B (en) | 2017-10-30 | 2017-10-30 | Ultra-high impedance measuring device for capacitive uncooled focal plane readout circuit |
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Citations (8)
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|---|---|---|---|---|
| JPH0424569A (en) * | 1990-05-18 | 1992-01-28 | Onoda Cement Co Ltd | Calculating system of sheet resistance |
| CN1794438A (en) * | 2005-10-27 | 2006-06-28 | 中国科学院上海技术物理研究所 | Reliability screening method of infrared focus planardetector |
| CN102564599A (en) * | 2011-12-23 | 2012-07-11 | 电子科技大学 | Readout circuit in infrared focal plane array and reference resistor of readout circuit as well as manufacturing method of reference resistor |
| CN103776544A (en) * | 2014-01-09 | 2014-05-07 | 电子科技大学 | Readout circuit of uncooled infrared focal plane array |
| CN104729722A (en) * | 2015-04-14 | 2015-06-24 | 中国电子科技集团公司第四十四研究所 | CTIA type CMOS focal plane readout circuit and signal readout control method |
| CN104897290A (en) * | 2014-03-04 | 2015-09-09 | 中航（重庆）微电子有限公司 | Pixel equivalent circuit and testing method for focal plane array infrared detector |
| CN105092054A (en) * | 2015-07-28 | 2015-11-25 | 昆明物理研究所 | Testing evaluation device for pyroelectric non-refrigeration infrared focal plane detector |
| CN106597111A (en) * | 2016-12-12 | 2017-04-26 | 南京工程学院 | High-precision 2D resistor array reading circuit |
-
2017
- 2017-10-30 CN CN201711042176.3A patent/CN108020723B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0424569A (en) * | 1990-05-18 | 1992-01-28 | Onoda Cement Co Ltd | Calculating system of sheet resistance |
| CN1794438A (en) * | 2005-10-27 | 2006-06-28 | 中国科学院上海技术物理研究所 | Reliability screening method of infrared focus planardetector |
| CN102564599A (en) * | 2011-12-23 | 2012-07-11 | 电子科技大学 | Readout circuit in infrared focal plane array and reference resistor of readout circuit as well as manufacturing method of reference resistor |
| CN103776544A (en) * | 2014-01-09 | 2014-05-07 | 电子科技大学 | Readout circuit of uncooled infrared focal plane array |
| CN104897290A (en) * | 2014-03-04 | 2015-09-09 | 中航（重庆）微电子有限公司 | Pixel equivalent circuit and testing method for focal plane array infrared detector |
| CN104729722A (en) * | 2015-04-14 | 2015-06-24 | 中国电子科技集团公司第四十四研究所 | CTIA type CMOS focal plane readout circuit and signal readout control method |
| CN105092054A (en) * | 2015-07-28 | 2015-11-25 | 昆明物理研究所 | Testing evaluation device for pyroelectric non-refrigeration infrared focal plane detector |
| CN106597111A (en) * | 2016-12-12 | 2017-04-26 | 南京工程学院 | High-precision 2D resistor array reading circuit |
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