CN108020194A - A kind of measuring method of plane parallelism - Google Patents
A kind of measuring method of plane parallelism Download PDFInfo
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- CN108020194A CN108020194A CN201610970778.4A CN201610970778A CN108020194A CN 108020194 A CN108020194 A CN 108020194A CN 201610970778 A CN201610970778 A CN 201610970778A CN 108020194 A CN108020194 A CN 108020194A
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- plane
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
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- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The present invention relates to a kind of measuring method of plane parallelism, the measuring method comprises the following steps：The first part with transition plane and the second part with plane to be measured are assembled to obtain build-up member, the flatness of transition plane and the flatness of plane to be measured is measured and the depth of parallelism between the transition plane and plane to be measured is obtained according to the first flatness of transition plane and the flatness of plane to be measured；The flatness of measuring basis plane, the build-up member and the 3rd part with datum plane are assembled, and the flatness for measuring transition plane again obtains the second flatness of transition plane；The depth of parallelism between the transition plane and datum plane is obtained according to the flatness of the second flatness of the transition plane and datum plane；According to the depth of parallelism between the depth of parallelism between the transition plane and plane to be measured and the transition plane and datum plane, the depth of parallelism maximum between the datum plane and plane to be measured is obtained.The measuring method can be realized when the spacing between two planes is too small, the measurement of plane parallelism.
Description
Technical field
The present invention relates to the technical field of high-accuracy mechanical adjustment and detection, more particularly to a kind of measurement of plane parallelism
Method.
Background technology
In precision optical machinery adjustment and detection process, in order to ensure the performance of equipment, there are some to need measurement two micro-
The occasion of the depth of parallelism between small spacing plane.Such as in the pump and valve of delicate flow control, after fluid channel assembling, between runner inner wall
Need to possess the higher depth of parallelism, be changed with reducing along range of flow.Such as in the application of micro-displacement sensor, in order to obtain microbit
The higher measurement accuracy of displacement sensor and measurement the linearity, it is necessary between the sensitive face and measuring surface of micro-displacement sensor have compared with
The high depth of parallelism, as capacitance sensor sensitive face and measuring surface between the depth of parallelism need to be less than 5 μm, grating ruler reading head and grid
The depth of parallelism between ruler need to be less than 20 μm.That is, during spacing very little between two planes required with the depth of parallelism,
For example the spacing of fluid channel inner wall is grade, the distance between the sensitive face of capacitance sensor and measuring surface are less than 1mm, high-precision
The distance between grating ruler reading head and grid ruler are spent for 2mm or so, are surveyed using common micrometer or three coordinate measuring machine
Amount, since probe diameter is in more than 3mm, can not stretch between two planes and directly measure, therefore between two planes
Away from it is too small when, the depth of parallelism of plane is difficult to directly detect.
The content of the invention
Present invention seek to address that in the prior art when the spacing between two planes is too small, the depth of parallelism of plane is difficult to
The technical problem directly detected, there is provided a kind of when the spacing between two planes is too small, the depth of parallelism of plane can measure
Plane parallelism measuring method.
The embodiment of the present invention provides a kind of measuring method of plane parallelism, and the measuring method comprises the following steps：
The first part with transition plane and the second part with plane to be measured are assembled to obtain build-up member,
Wherein, the transition plane is parallel with plane to be measured, and the normal of the normal direction of the transition plane and the plane to be measured
Direction is opposite；
The flatness of the flatness and plane to be measured that measure transition plane obtains the first flatness of transition plane and to be measured
The flatness of plane, and the transition plane is obtained according to the first flatness of transition plane and the flatness of plane to be measured and is treated
Survey the depth of parallelism between plane；
The flatness of measuring basis plane, the build-up member and the 3rd part with datum plane are assembled,
The flatness for measuring transition plane again obtains the second flatness of transition plane；
The transition plane and benchmark are obtained according to the flatness of the second flatness of the transition plane and datum plane
The depth of parallelism between plane；
According between the depth of parallelism between the transition plane and plane to be measured and the transition plane and datum plane
The depth of parallelism, obtain the depth of parallelism maximum between the datum plane and plane to be measured.
Compared with prior art, beneficial effect is technical scheme：By setting a transition plane, realize
To the measurement of paralleism between two planes of small spacing.
Brief description of the drawings
Fig. 1 is a kind of flow chart of embodiment of measuring method of plane parallelism of the present invention；
Fig. 2 is the flow chart of the measuring method another kind embodiment of plane parallelism of the present invention；
Fig. 3 is a kind of structure diagram of embodiment of measuring method that measurement object implements plane parallelism of the present invention；
Fig. 4 is the structure diagram for the measuring method that flaky electric capacity sensor implements plane parallelism of the present invention；
Fig. 5 is the structure diagram for the measuring method that column capacitance sensor implements plane parallelism of the present invention.
In figure, P11, transition plane, P12, plane to be measured, P13, datum plane, 11, first containing transition plane P11
Part, 12, the second part containing plane P12 to be measured, 13, the 3rd part containing transition plane P13, the 14, first department of assembly
Part；P41, transition plane, P42, plane to be measured, P43, datum plane, 41, the first part containing transition plane P41,42, piece
Shape capacitance sensor, 43, the 3rd part containing datum plane P43, the 44, second build-up member；P51, transition plane, P52, treat
Survey plane, P53, datum plane, 51, the first part containing transition plane P51,52, column capacitance sensor, 53, contain base
The 3rd part of directrix plane P53, the 54, the 3rd build-up member.
Embodiment
The embodiment of the present invention is described further below in conjunction with the accompanying drawings.
As shown in Figure 1, the present invention provides a kind of measuring method of the plane parallelism of embodiment, the measuring method includes
Following steps：
Step S1, the first part with transition plane and the second part with plane to be measured are assembled and filled
With component, wherein, the transition plane is parallel with plane to be measured, and the normal direction of the transition plane and the plane to be measured
Normal direction it is opposite；
Step S2, the flatness of the flatness and plane to be measured that measure transition plane obtain the first flatness of transition plane
The flatness β 2 of β 1 and plane to be measured, and institute is obtained according to the first flatness β 1 of transition plane and the flatness β 2 of plane to be measured
State the depth of parallelism α 12 between transition plane and plane to be measured；
Step S3, the flatness of measuring basis plane, by the build-up member with datum plane the 3rd part into
Luggage is matched somebody with somebody, and the flatness for measuring transition plane again obtains the second flatness β 11 of transition plane；
Step S4, the transition is obtained according to the flatness β 3 of the second flatness β 1 of the transition plane and datum plane
Depth of parallelism α 13 between plane and datum plane；
Step S5, according to the depth of parallelism α 12 and the transition plane and base between the transition plane and plane to be measured
Depth of parallelism α 13 between directrix plane, obtains the depth of parallelism maximum α 23max between the datum plane and plane to be measured.
Specifically, the normal direction of the transition plane is opposite with the normal direction of the datum plane.
The measuring method of the plane parallelism of the present invention, by setting first part with transition plane, will have
There are the first part of transition plane and the second part with plane to be measured to be assembled to obtain build-up member to obtain the mistake
The depth of parallelism between plane and plane to be measured is crossed, then by the build-up member with there is the 3rd part of datum plane into luggage
It is equipped with to obtain the depth of parallelism between the transition plane and datum plane, finally according between the transition plane and plane to be measured
The depth of parallelism and the transition plane and datum plane between the depth of parallelism, obtain between the datum plane and plane to be measured
Depth of parallelism maximum, that is, realize the measurement of the depth of parallelism between two planes to small spacing.
In specific implementation, the step of flatness β 3 of measuring basis plane can in step S1, step S2, step S3 or
Before step S4.The flatness β 3 of measuring basis plane in step S3, that is, determine the 3rd part position after, measuring basis is put down
The flatness in face, is easy to implement the measurement after the build-up member is assembled with the 3rd part with datum plane and walks
Suddenly.
In step s3, the build-up member is assembled with the 3rd part with datum plane and then once surveyed
Measure the flatness of the transition plane so that the depth of parallelism between the transition plane and datum plane is more accurate.
In specific implementation, before general assembling, there are the desired value of depth of parallelism assembling between datum plane and plane to be measured.
According to the definition of flatness and the depth of parallelism, the parallel angle value of two interplanars is not higher than the Planeness value of any of which plane.Such as
Shown in Fig. 2, before the step S1, the measuring method further includes：
Step S01, sets the first flatness β 1 and the second flatness β 11 of the transition plane to be put down less than or equal to benchmark
The half of depth of parallelism desired value α 230 between face and plane to be measured.
Specifically, the depth of parallelism maximum α 23max between the datum plane and plane to be measured are less than or equal to benchmark
Depth of parallelism desired value α 230 between plane and plane to be measured.
In specific implementation, the step of flatness of the first flatness of the measurement transition plane and plane to be measured, tool
Body is：
Pass through the first flatness of three coordinate measuring engine measurement transition plane and the flatness of plane to be measured；
The step of flatness of the measuring basis plane, be specially：
Pass through the flatness of three coordinate measuring engine measurement datum plane.
That is, the measuring method of the present invention can be implemented to measure by using three coordinate measuring machine, without extra
Increase equipment, measurement process is simple, directly perceived, and the spacing between two planes is any small measurable.
In specific implementation, according to the depth of parallelism between the transition plane and plane to be measured and the transition plane with
The depth of parallelism between datum plane, obtains the depth of parallelism maximum between the datum plane and plane to be measured, is specially：
α 23max=α 13+ α 12；
Wherein, the maximum of the depth of parallelism on the basis of α 23max between plane and plane to be measured, α 12 are plane to be measured and mistake
Cross the depth of parallelism between plane, the depth of parallelism on the basis of α 13 between plane and transition plane.
In specific implementation, first part can be the retaining element of second part, and second part is
Micro-displacement sensor, the 3rd part are the detection object of micro-displacement sensor.
In addition, in measurement process, from the influence of spacing size between datum plane and plane to be measured, therefore, benchmark is put down
Spacing between face and plane to be measured is arbitrarily small, using the above method measurable depth of parallelism between the two.
Fig. 3 is a kind of structure diagram of embodiment of measuring method that measurement object implements plane parallelism of the present invention.
In specific implementation, after the first part 13 installation containing datum plane P13, then install containing plane to be measured
During the second part 12 of P12 (being not shown on figure), it need to ensure the depth of parallelism between plane P12 and datum plane P13 to be measured.Benchmark
Plane P13 is oppositely arranged with plane P12 to be measured, and the spacing between two planes refer to is small, and the probe of existing measuring device can not stretch into
Directly measured between two planes.Even if spacing between datum plane P13 and plane P12 to be measured is big to can stretch into existing survey
The probe of device is measured, since the probe length of three coordinate measuring machine is limited, the datum plane P11 and plane P12 to be measured that can stretch into
Between gap depth it is limited, the region of measurable datum plane P13 and plane P12 to be measured are also limited, can be with even if existing
Directly measure, also can not between perfect measurement datum plane P13 and plane P12 to be measured the depth of parallelism situation.As shown in figure 3, this
The measuring method of invention plane parallelism measures the plane between the 3rd part 13 and the second part 12, and setting contains base
The 3rd part 11 of directrix plane P13, i.e., in order to measure the depth of parallelism between plane P12 and datum plane P13 to be measured, with second
In the part that part 12 connects, first part 11 is selected, contains the transition parallel with plane P12 to be measured in the first part 11
Plane P11, and the normal direction of transition plane P11 is identical with the normal direction of datum plane P13, with plane P12's to be measured
Normal direction is on the contrary, the first part 11 and the second part 12 are assembled to obtain build-up member to measure.
Then specific measurement process is as follows, first by the second part 12 containing plane P12 to be measured with containing transition plane
The 3rd part 11 of P11 is assembled together, and forms the first build-up member 14.Using three coordinate measuring engine measurement plane P12 to be measured
With transition plane P11, the first flatness β 1 of the flatness β 2 and transition plane P11 of plane P12 to be measured are obtained.According to be measured flat
The plane degrees of data of face P12 and transition plane P11, using three coordinate measuring machine analysis software, can calculate plane P12 to be measured with
Depth of parallelism α 12 between transition plane P11.Again using datum plane P13 on the 3rd part 3 of three coordinate measuring engine measurement, obtain
The flatness β 3 of datum plane P13.First build-up member 14 and the part 13 containing datum plane are assembled together, using three
Coordinate measuring machine measures the transition plane P11 on the first part 11 again, obtains the second flatness β 11 of transition plane P11.Root
According to the data of the second flatness β 11 of the flatness β 3 and transition plane P11 of datum plane P13, using three coordinate measuring machine point
Software is analysed, the depth of parallelism α 13 between datum plane P13 and transition plane P11 can be calculated.According to datum plane P13 and transition
Parallel degrees of data α 13 between plane P11, and the parallel degrees of data α 12 between plane P12 to be measured and transition plane P11, can count
Calculate the depth of parallelism α 23 between datum plane P13 and plane P12 to be measured：α 23max=α 12+ α 13.By substep assembling and measure,
The measurement of the depth of parallelism between the datum plane P13 and plane P23 to be measured of achievable small spacing.
In addition to realize above-mentioned measuring method, in Automatic manual transmission order, need the containing plane P12 to be measured first
Two parts 12 are assembled with the first part 11 containing transition plane P11,12 one of both of the first part 11 and the second part
Assembled again with the 3rd part 13 containing datum plane P13, the first assembling formed so as to the first part 11 and the second part 12
Component 14 can independently be placed on three coordinate measuring machine and measure.
Fig. 4 is the structure diagram for the measuring method that flaky electric capacity sensor implements plane parallelism of the present invention.
In specific implementation, micro-displacement sensor can be flaky electric capacity sensor 42, installation sheet capacitance sensor 42
When, in order to ensure the measurement accuracy of capacitance sensor and the measurement linearity, it is desirable to the sensitive face of capacitance sensor and tested surface it
Between the depth of parallelism need to be less than 5 μm, and be smaller than 1mm between the sensitive face of capacitance sensor and tested surface, can not directly adopt
With the depth of parallelism between three coordinate measuring engine measurement sensitive face and tested surface.The sensitive face of capacitance sensor is plane P42 to be measured,
Plane P43 on the basis of tested surface.Select opposite with plane P42 to be measured with the first part 41 of the connection of flaky electric capacity sensor 42
Plane as transition plane P41.During installation, first flaky electric capacity sensor 42 and the first part 41 are linked together, formed
Second build-up member 44.Using plane P42 to be measured on the second build-up member of three coordinate measuring engine measurement 44 and transition plane P41 it
Between depth of parallelism α 12.Such as the three coordinate measuring machine using Carl Zeiss companies, it can be calculated and treated by Calypso softwares
Survey the depth of parallelism between plane P42 and transition plane P41.Tested surface i.e. datum plane P43 is measured using three coordinate measuring machine again
Flatness after, the second build-up member 44 is installed on the 3rd part 43, is put down again using three coordinate measuring engine measurement transition
The flatness of face P41, can be according to the plane degrees of data and the plane number of degrees of transition plane P41 of tested surface in Calypso softwares
According to calculating depth of parallelism α 13 between the two.The final depth of parallelism α 23 calculated between tested surface and sensitive face is i.e. to be measured flat
Depth of parallelism α 23 between face P42 and datum plane P43：α 23max=α 12+ α 13.
In installation process, the depth of parallelism α 23max to ensure between tested surface and sensitive face are less than 5 μm, generally require and ask
The depth of parallelism α 12 between depth of parallelism α 13 and sensitive face and transition plane P41 between tested surface and transition plane P41 is less than
2.5 μm, and the flatness of the transition plane P41 selected need to be less than 2.5 μm.If in installation process, tested surface and transition plane P41
Between depth of parallelism α 13, the depth of parallelism α 12 between sensitive face and transition plane P41 exceed 2.5 μm, can be in connection flaky electric capacity
Sensor 42 and the first part 41 or when being connected the second build-up member 44 and three parts 43, repair the contact between fixing body
Face, and repeatedly install, until depth of parallelism α 13, depth of parallelism α 12 reach requirement.It is flat between tested surface and sensitive face in order to ensure
Row degree α 23 is less than or equal to 5 μm, and the measurement accuracy of used three coordinate measuring machine need to be less than or equal to 2 μm.
Fig. 5 is the structure diagram for the measuring method that column capacitance sensor implements plane parallelism of the present invention.
In specific implementation, micro-displacement sensor can be column capacitance sensor 52, installation column capacitance sensor 52
When, in order to ensure the measurement accuracy of capacitance sensor and the measurement linearity, it is desirable to the sensitive face of capacitance sensor and tested surface it
Between the depth of parallelism need to be less than 5 μm, and be smaller than 1mm between the sensitive face of capacitance sensor and tested surface, can not directly adopt
With the depth of parallelism between three coordinate measuring engine measurement sensitive face and tested surface.The sensitive face of column capacitance sensor 52 is to be measured flat
Face P52, plane P53 on the basis of tested surface.Select on the first part 51 for being connected with column capacitance sensor 52 with plane to be measured
Plane opposite P52 is as transition plane P51.During installation, 52 and first part 51 of column capacitance sensor is first connected to one
Rise, form the 3rd build-up member 54.Put down using plane P52 to be measured on the 3rd build-up member 54 of three coordinate measuring engine measurement with transition
Depth of parallelism α 12 between the P51 of face, then calculates the depth of parallelism between plane P52 and transition plane P51 to be measured.Three are used again
After coordinate measuring machine measures the tested surface i.e. flatness of datum plane P53, the 3rd build-up member 54 and the 3rd part 53 are carried out
Assembling, can be according to the plane degrees of data and mistake of tested surface again using the flatness of three coordinate measuring engine measurement transition plane P51
The plane degrees of data of plane P51 is crossed, calculates depth of parallelism α 13 between the two.Finally calculate between tested surface and sensitive face
Depth of parallelism α 23 be depth of parallelism α 23 between plane P52 and datum plane P53 to be measured：α 23max=α 12+ α 13.
In installation process, the depth of parallelism α 23max to ensure between tested surface and sensitive face are less than 5 μm, generally require and ask
The depth of parallelism α 12 between depth of parallelism α 13 and sensitive face and transition plane P51 between tested surface and transition plane P51 is less than
2.5 μm, and the flatness of the transition plane P51 selected need to be less than 2.5 μm.If in installation process, tested surface and transition plane P51
Between depth of parallelism α 13, the depth of parallelism α 12 between sensitive face and transition plane P51 exceed 2.5 μm, can be in connection column capacitance
Sensor 52 and the first part 51 or when being connected the 3rd build-up member 54 and three parts 53, repair the contact between fixing body
Face, and repeatedly install, until depth of parallelism α 13, depth of parallelism α 12 reach requirement.It is flat between tested surface and sensitive face in order to ensure
Row degree α 23 is less than or equal to 5 μm, and the measurement accuracy of used three coordinate measuring machine need to be less than or equal to 2 μm.
The above embodiments and description only illustrate the principle of the present invention and most preferred embodiment, is not departing from this
On the premise of spirit and scope, various changes and modifications of the present invention are possible, these changes and improvements both fall within requirement and protect
In the scope of the invention of shield.
Claims (7)
- A kind of 1. measuring method of plane parallelism, it is characterised in that：The measuring method comprises the following steps：The first part with transition plane and the second part with plane to be measured are assembled to obtain build-up member, its In, the transition plane is parallel with plane to be measured, and the normal side of the normal direction of the transition plane and the plane to be measured To opposite；The flatness of the flatness and plane to be measured that measure transition plane obtains the first flatness of transition plane and plane to be measured Flatness, and the transition plane and to be measured flat is obtained according to the first flatness of transition plane and the flatness of plane to be measured The depth of parallelism between face；The flatness of measuring basis plane, the build-up member and the 3rd part with datum plane is assembled, again The flatness of measurement transition plane obtains the second flatness of transition plane；The transition plane and datum plane are obtained according to the flatness of the second flatness of the transition plane and datum plane Between the depth of parallelism；According to flat between the depth of parallelism between the transition plane and plane to be measured and the transition plane and datum plane Row degree, obtains the depth of parallelism maximum between the datum plane and plane to be measured.
- 2. measuring method according to claim 1, it is characterised in that：According between the transition plane and plane to be measured The depth of parallelism between the depth of parallelism and the transition plane and datum plane, obtains between the datum plane and plane to be measured Depth of parallelism maximum, is specially：α 23max=α 13+ α 12；Wherein, the maximum of the depth of parallelism on the basis of α 23max between plane and plane to be measured, α 12 put down for plane to be measured with transition The depth of parallelism between face, the depth of parallelism on the basis of α 13 between plane and transition plane.
- 3. measuring method according to claim 1, it is characterised in that：In first part by with transition plane and Before the step of the second part with plane to be measured is assembled to obtain build-up member, the measuring method further includes：First flatness of the transition plane is set and the second flatness be respectively less than or equal to datum plane and plane to be measured it Between depth of parallelism desired value half.
- 4. measuring method according to claim 3, it is characterised in that：It is parallel between the datum plane and plane to be measured Spend maximum and be less than or equal to depth of parallelism desired value between datum plane and plane to be measured.
- 5. measuring method according to claim 1, it is characterised in that：The normal direction of the transition plane and the benchmark The normal direction of plane is opposite.
- 6. measuring method according to claim 2, it is characterised in that：It is described measurement transition plane the first flatness and treat The step of surveying the flatness of plane, is specially：Pass through the first flatness of three coordinate measuring engine measurement transition plane and the flatness of plane to be measured；The step of flatness of the measuring basis plane, be specially：Pass through the flatness of three coordinate measuring engine measurement datum plane.
- 7. according to the measuring method described in claim 1-6 any one, it is characterised in that：First part is described second The retaining element of part, second part are micro-displacement sensor, and the 3rd part is the detection pair of micro-displacement sensor As.
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| CN201610970778.4A CN108020194B (en) | 2016-10-28 | 2016-10-28 | Plane parallelism measuring method |
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