CN108010600B - Charged particle beam diffusing device, X-ray emitting device, method of generating charged particle beam, and method of generating X-ray - Google Patents
Charged particle beam diffusing device, X-ray emitting device, method of generating charged particle beam, and method of generating X-ray Download PDFInfo
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- 238000010894 electron beam technology Methods 0.000 claims description 13
- 238000010884 ion-beam technique Methods 0.000 claims description 9
- 239000002131 composite material Substances 0.000 claims description 4
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
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- H—ELECTRICITY
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Abstract
The invention discloses a charged particle beam diffusing device, an X-ray emitting device, a method for generating a charged particle beam and a method for generating X-rays. A charged particle beam diffusing device comprising a first quadrupole lens and a second quadrupole lens, the first quadrupole lens being located upstream; wherein the first and second quadrupole lenses are arranged such that the first quadrupole lens concentrates the incident charged particle beam in a first direction and diverges the incident charged particle beam in a second direction, the second quadrupole lens being configured to diverge the incident charged particle beam in the first direction and concentrate the incident charged particle beam in the second direction; wherein the first direction and the second direction are perpendicular to each other.
Description
Technical Field
The present invention relates to the field of detection, and in particular to a charged particle beam diffusing device, an X-ray emitting device, a method of generating a charged particle beam, and a method of generating X-rays.
Background
The electronic linear accelerator is a ray device which is widely applied in the field of X-ray detection at present, has the advantages of diversified product quantity, wide energy coverage area and adjustment range, and is more environment-friendly than a common irradiation source, so that the electronic linear accelerator is widely applied.
The size of the beam spot of the charged particle beam generated from the accelerating tube is small due to the constraint of the tube body structure and physical conditions of the accelerating tube, and the diameter of the general beam spot is about 3mm or even smaller.
However, with the continuous expansion of the field of electron linear accelerators, the field of food irradiation and mineral exploitation currently puts new demands on target spot size: the method needs a large range of X-ray irradiation, prolongs the service life of the target and improves the irradiation efficiency of the sample.
There is a need for an economical, simple-structure X-ray target diffusing device that can meet the demands placed on large target devices in the X-ray application market.
Disclosure of Invention
The invention provides a charged particle beam diffusing device, an X-ray emitting device, a method for generating a charged particle beam and a method for generating X-rays, and has the advantages of simple structure, low cost and simplicity and convenience in operation.
According to an aspect of the present invention, there is provided a charged particle beam diffusing device comprising a first quadrupole lens and a second quadrupole lens arranged along an optical axis of the charged particle beam diffusing device and spaced apart from each other by a distance, the first quadrupole lens being located upstream and the second quadrupole lens being located downstream in a direction along which the charged particle beam is incident,
wherein the first and second quadrupole lenses are arranged such that the first quadrupole lens is capable of converging the incident charged particle beam in a first direction and of diverging the incident charged particle beam in a second direction, the second quadrupole lens being configured to be capable of diverging the incident charged particle beam in the first direction and of converging the incident charged particle beam in the second direction; wherein the first direction and the second direction are perpendicular to each other.
In one embodiment, the first and second quadrupole lenses are magnetic quadrupole lenses, respectively.
In one embodiment, the first and second quadrupole lenses are respectively electro-quadrupole lenses.
In one embodiment, the magnetic field direction of the second quadrupole lens and the magnetic field direction of the first quadrupole lens are perpendicular to each other, so that the particle beam passing through the second quadrupole lens forms a particle beam spot with a cross section of a nearly circular shape with an enlarged diameter.
In one embodiment, the first and second quadrupole lenses are spaced apart by a first distance that allows the charged particle beam passing through the first quadrupole lens to be converged at a point and subsequently incident on the second quadrupole lens, the charged particle beam incident on the second quadrupole lens having a cross-sectional dimension that is greater than the cross-sectional dimension of the charged particle beam incident on the first quadrupole lens.
In one embodiment, the charged particle beam is an ion beam or an electron beam.
According to an aspect of the present disclosure, there is provided an X-ray emitting device including the above-described charged particle beam diffusing device and a target disposed downstream of the charged particle beam diffusing device in a charged particle beam incident direction.
In one embodiment, the target is a second distance from the second quadrupole lens, which can allow the charged particle beam passing through the second quadrupole lens to converge at a point in the second direction, after which the charged particle beam cross-sectional size is increased, irradiating the target with the increased cross-sectional size.
In one embodiment, the target is a high Z value, high melting point composite target.
In one embodiment, the charged particle beam is an ion beam or an electron beam.
According to an aspect of the present disclosure, there is provided a method of generating a divergent charged particle beam, comprising:
arranging a first quadrupole lens and a second quadrupole lens such that the charged particle beam passes through the first quadrupole lens and the second quadrupole lens in sequence, wherein the first quadrupole lens is configured to be capable of condensing the incident charged particle beam in a first direction and to be capable of diverging the incident charged particle beam in a second direction; the second quadrupole lens is configured to be capable of condensing the charged particle beam in a first direction and to be capable of diverging the incident charged particle beam in a second direction; wherein the first direction and the second direction are perpendicular to each other.
In one embodiment, the charged particle beam is an ion beam or an electron beam.
In one embodiment, the first and second quadrupole lenses are spaced apart by a first distance that allows the charged particle beam passing through the first quadrupole lens to be converged at a point and then incident on the second quadrupole lens, the charged particle beam incident on the second quadrupole lens having a cross-sectional dimension that is greater than the cross-sectional dimension of the charged particle beam incident on the first quadrupole lens.
According to an aspect of the present disclosure, there is provided a method of generating X-rays, comprising:
generating a divergent charged particle beam using the method of generating a divergent charged particle beam described above;
so that the charged particle beam passing through the second quadrupole lens irradiates the target to generate X-rays.
In one embodiment, the target is a second distance from the second quadrupole lens, which can allow the charged particle beam passing through the second quadrupole lens to converge at a point in the second direction, after which the charged particle beam cross-sectional size is increased, irradiating the target with the increased cross-sectional size.
Drawings
FIG. 1 is a schematic principal elevation view of an X-ray emitting device of one embodiment of the present invention;
FIG. 2 is a schematic top plan view of an X-ray emitting device according to an embodiment of the present invention;
FIG. 3 is a schematic perspective view of a magnetic quadrupole lens according to an embodiment of the invention;
fig. 4 is a perspective cutaway view of a magnetic quadrupole lens in accordance with an embodiment of the invention.
Detailed Description
While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It should be understood, however, that the drawings and detailed description thereto are not intended to limit the invention to the particular form disclosed, but on the contrary, the intention is to cover all modifications, equivalents and alternatives falling within the spirit and scope of the present invention as defined by the appended claims. The figures are for illustration purposes and are not drawn to scale.
Various embodiments according to the present invention are described below with reference to the accompanying drawings.
An embodiment of the present invention provides a charged particle beam diffusing device comprising a first quadrupole lens and a second quadrupole lens arranged along an optical axis of the charged particle beam diffusing device and spaced apart from each other by a distance S, the first quadrupole lens being located upstream and the second quadrupole lens being located downstream in a direction of incidence of the charged particle beam,
wherein the first and second quadrupole lenses are arranged such that the first quadrupole lens condenses the incident charged particle beam in the first direction and diverges the incident charged particle beam in the second direction, the second quadrupole lens being configured to condense the incident charged particle beam in the first direction and diverges the incident charged particle beam in the second direction; wherein the first direction and the second direction are perpendicular to each other.
As shown in fig. 1, for convenience of explanation, the present disclosure is explained using a X, Y, Z three-dimensional coordinate system in which an X direction and a Y direction are perpendicular and a Z direction is perpendicular to the X direction and the Y direction. The first direction may be the X-direction, fig. 1 is a view of the charged particle beam diffusing device in the X-Z plane, and the second direction may be the Y-direction, fig. 2 is a view of the charged particle beam diffusing device in the Y-Z plane. In fig. 1 and 2, the incident direction of the charged particle beam 1 is along the Z direction. In one embodiment, the charged particle beam 1 is an ion beam or an electron beam.
For illustration purposes, the direction of the charged particle beam is indicated by arrows in the drawings. In one embodiment, the incident charged particle beam 1 is a charged particle beam having a circular beam spot, however, it should be appreciated that the charged particle beam may be a beam of other profiles. The incident charged particle beam 1 has a smaller cross-sectional size, and in practical applications, the incidence of the charged particle beam on the target will produce X-rays with a small cross-sectional size and concentrated energy, which is not suitable for applications requiring a lower energy and a larger area of radiation coverage. The diverging device of the present disclosure may convert a circular charged particle beam with a small cross-sectional size into a charged particle beam with a much larger cross-sectional size.
In one embodiment, the charged particle beam is first incident on the first quadrupole lens 2, the first quadrupole lens 2 converging the incident charged particle beam in a first direction, i.e. the X-direction, and diverging the incident charged particle beam in a second direction, i.e. the Y-direction, such that the charged particle beam decreases in size in the X-direction and increases in size in the Y-direction after passing through the first quadrupole lens; after passing through the first quadrupole lens 2, the charged particle beam passes through a distance, which is shown as passing through a drift section S in the figure, and the charged particle beam I enters the second quadrupole lens 3, and the second quadrupole lens 3 is arranged to scatter the incident charged particle beam in a first direction, i.e. the X direction, and to collect the incident charged particle beam in a second direction, i.e. the Y direction, so that a particle beam spot II having an enlarged cross section in a diameter and being nearly circular can be formed. It will be appreciated that the magnetic field strength of the first quadrupole lens 2 and the second quadrupole lens 3 determine their respective ability to focus the charged particle beam or to diverge the charged particle beam, as well as the drift section S for the charged particle beam between the first quadrupole lens 2 and the second quadrupole lens 3, which have different parameters. It will be appreciated that the combination of the effects of the charged particle beam dispersing device on the charged particle beam in the X-direction and the Y-direction results in the charged particle beam forming a spatially modified profile particle beam.
In one embodiment, the drift section S for the charged particle beam between the first quadrupole lens 2 and the second quadrupole lens 3 is such that, in the first direction, the charged particle beam passing through the first quadrupole lens 2 is concentrated at a point between the first quadrupole lens 2 and the second quadrupole lens 3 and then diverged, and is incident on the second quadrupole lens 3, and the size of the spot of the charged particle beam incident on the second quadrupole lens 3 is larger than the size of the original spot of the incident charged particle beam, or the cross-sectional size of the charged particle beam incident on the second quadrupole lens 3 is larger than the cross-sectional size of the charged particle beam incident on the first quadrupole lens 2.
In one embodiment of the present disclosure, the drift section S for the charged particle beam between the first quadrupole lens 2 and the second quadrupole lens 3 is such that, in the second direction, the charged particle beam passing through the first quadrupole lens 2 is diverged between the first quadrupole lens 2 and the second quadrupole lens 3, and the cross-sectional size of the charged particle beam is increased.
According to one embodiment of the present disclosure, the first and second quadrupole lenses 2 and 3 are magnetic quadrupole lenses, respectively. The magnetic field direction of the second quadrupole lens 3 and the magnetic field direction of the first quadrupole lens 2 are perpendicular to each other, and the particle beam passing through the second quadrupole lens 3 can be formed into a nearly circular particle beam spot having an enlarged diameter. The shape and configuration of the magnetic quadrupole lens is schematically shown in fig. 3 and 4.
As shown in fig. 3 and 4, the magnetic quadrupole lens may comprise four magnetic poles, for example four magnetic poles may be arranged on four sides of a square, whereby two magnetic south poles are arranged on opposite sides of the square and two magnetic north poles are arranged on the other two sides. The charged particle beam passes through a channel defined by four poles, in which channel there is a magnetic field applied by the four poles. However, it should be appreciated that four poles may be arranged at the four corners of a square. For example, two magnetic south poles are arranged at opposite corners of a square, while two magnetic north poles are arranged at other two corners. Likewise, the four poles define a channel through which the charged particle beam passes. In one embodiment, the magnetic quadrupole lens has a magnetic gradient of 13T/m and a center field strength of 2600Guass.
For example, in one embodiment, the incident charged particle beam 1 is an electron beam in a high energy state, such as an electron beam emitted from an electron gun, accelerated to a nominal energy through an acceleration tube. For example, the electron beam energy is 14MeV, and the beam spot shape of the electron beam is a circle with a radius of 1 mm. After passing through the first quadrupole lens of the charged particle beam diffusing device in the present embodiment, the cross-sectional size of the charged particle beam on the second quadrupole lens 3 is 5.64mm in length in the X direction and 7.10mm in length in the Y direction; after passing through the second quadrupole lens 3, the charged particle beam is formed on the target 4 at a predetermined distance in the case shown in fig. 1 and 2 so that the cross-sectional size of the charged particle beam is 32.5mm in length in the X direction and 32.8mm in length in the Y direction.
The beam spot of the charged particles entering the charged particle beam diffusing device is expanded by a plurality of times, for example, 32 times, and the bombardment area is far larger than the original beam spot area, so that the power is dispersed in the whole expanded beam spot area, the peak power density is greatly reduced, and a good effect is achieved on heat dissipation of the target 4.
In embodiments of the present disclosure, the charged particle beam diffusing device may control the charged particle beam spot shape by controlling the electromagnetic field strength of the quadrupole lenses. On the premise that parameters of the front-stage linear acceleration system are unchanged, the purpose of changing the beam spot shape can be achieved by changing the electromagnetic field intensity and the installation position of the quadrupole lens, and therefore different ray shape requirements can be met.
Embodiments of the present disclosure also provide an X-ray emitting device comprising the charged particle beam diffusing device described above and a target 4. The description of the charged particle beam diffusing device is not repeated here. The target 4 is arranged downstream of the charged particle beam diffusing device in the direction of incidence of the charged particle beam. The distance between the target 4 and the second quadrupole lens 3 is a second distance which is capable of allowing the charged particle beam passing through the second quadrupole lens 3 to converge at a point in the second direction (Y-direction), after which the charged particle beam cross-sectional size is increased, irradiating the target 4 with the increased cross-sectional size. The second distance may be determined according to the actually required cross-sectional dimensions of the charged particle beam. However, it should be seen that the second distance should be larger than the distance at which the second quadrupole lens 3 converges the charged particle beam at a point. In one embodiment, the target 4 of the X-ray emitting device is a high Z, high melting point composite target. The charged particle beam is an ion beam or an electron beam.
The beam spot incident on the target 4 from the charged particle beam diffusing device is expanded several times, for example, 32 times, compared with the original beam spot, and the bombardment area is far larger than the original beam spot area, so that the power is dispersed in the whole expanded beam spot area, the peak power density is greatly reduced, and a good effect is achieved on the heat dissipation of the target 4. And the electromagnetic field intensity of the quadrupole lens of the charged particle beam diffusion device and the installation position of the quadrupole lens are changed, so that the purpose of changing the beam spot shape is achieved, and different ray shape requirements can be met. For example, an elliptical charged particle beam bombards a composite target, producing X-rays of the same shape.
Embodiments of the present disclosure also provide a method of generating a charged particle beam, comprising:
the first quadrupole lens 2 and the second quadrupole lens 3 are arranged such that the charged particle beam passes through the first quadrupole lens 2 and the second quadrupole lens 3 in sequence, wherein the first quadrupole lens 2 is configured to be capable of condensing the incident charged particle beam in a first direction and to be capable of diverging the incident charged particle beam in a second direction; the second quadrupole lens 3 is configured to be capable of condensing the charged particle beam in a first direction and to be capable of diverging the incident charged particle beam in a second direction; wherein the first direction and the second direction are perpendicular to each other.
In one embodiment, according to the method of generating a charged particle beam, the charged particle beam is made to first enter the first quadrupole lens 2, the first quadrupole lens 2 condenses the incident charged particle beam in a first direction, i.e., the X direction, and diverges the incident charged particle beam in a second direction, i.e., the Y direction, such that the charged particle beam is reduced in size first in the X direction and then increased in size in the Y direction after passing through the first quadrupole lens 2; after passing through the first quadrupole lens 2, the charged particle beam passes through a distance, which is shown as passing through a drift section S in the figure, and then enters the second quadrupole lens 3, and the second quadrupole lens 3 is arranged to scatter the incident charged particle beam in a first direction, i.e., X-direction, and to collect the incident charged particle beam in a second direction, i.e., Y-direction, so that a particle beam spot having a nearly circular cross section with an enlarged diameter can be formed. It will be appreciated that the magnetic field strength of the first quadrupole lens 2 and the second quadrupole lens 3 determine their respective ability to focus the charged particle beam or to diverge the charged particle beam, as well as the drift section S for the charged particle beam between the first quadrupole lens 2 and the second quadrupole lens 3, which have different parameters.
In one embodiment, the first quadrupole lens 2 and the second quadrupole lens 3 are spaced apart by a first distance (i.e. the drift segment S described above) which allows the charged particle beam passing through the first quadrupole lens 2 to be converged at a point in the drift segment S and subsequently to be incident on the second quadrupole lens 3, and the cross-sectional size (including the X-direction and the Y-direction) of the charged particle beam incident on the second quadrupole lens 3 is larger than the cross-sectional size of the charged particle beam incident on the first quadrupole lens 2. It should be noted that the dimensions mentioned here are understood as spatial dimensions or as areas of the cross section of the charged particle beam.
In one embodiment, the drift section S for the charged particle beam between the first quadrupole lens 2 and the second quadrupole lens 3 is such that, in the first direction, the charged particle beam passing through the first quadrupole lens 2 is concentrated at a point between the first quadrupole lens 2 and the second quadrupole lens 3 and subsequently diverges, the diverged charged particle beam is incident on the second quadrupole lens 3, and the size of the spot of the charged particle beam incident on the second quadrupole lens 3 is larger than the size of the original spot of the incident charged particle beam, or the cross-sectional size of the charged particle beam incident on the second quadrupole lens 3 is larger than the cross-sectional size of the charged particle beam incident on the first quadrupole lens 2. In the present embodiment, the drift section S for the charged particle beam between the first quadrupole lens 2 and the second quadrupole lens 3 is such that, in the second direction, the charged particle beam passing through the first quadrupole lens 2 is diverged between the first quadrupole lens 2 and the second quadrupole lens 3, and the cross-sectional size of the charged particle beam is increased.
In one embodiment, according to the method of generating a charged particle beam, the first quadrupole lens 2 and the second quadrupole lens 3 are magnetic quadrupole lenses, respectively, and the magnetic field direction of the second quadrupole lens 3 and the magnetic field direction of the first quadrupole lens 2 are perpendicular to each other, so that the particle beam passing through the second quadrupole lens 3 can form a particle beam spot having a nearly circular cross section with an enlarged diameter. The shape and configuration of the magnetic quadrupole lens is schematically shown in fig. 3 and 4, and the structure of the magnetic quadrupole lens is known in the art and will not be repeated here.
In one embodiment, the charged particle beam is an ion beam or an electron beam.
With the above method of generating a divergent charged particle beam, the beam spot of the incident charged particle beam is enlarged several times, for example, by 32 times. The charged particle beam with enlarged beam spot has bombarded area far greater than that of original beam spot, so that the power is dispersed in the whole enlarged beam spot area and the peak power density is lowered greatly.
Embodiments of the present disclosure also provide a method of generating X-rays, comprising:
generating a divergent charged particle beam using the above method of generating a divergent charged particle beam; and
so that the charged particle beam passing through the second quadrupole lens 3 irradiates the target to generate X-rays.
In one embodiment, the target 4 is a second distance from the second quadrupole lens 3, which allows the charged particle beam passing through the second quadrupole lens 3 to converge at a point in the second direction, after which the charged particle beam cross-sectional size increases as the charged particles travel, such that the cross-sectional area of the charged particle beam impinging on the target increases. When the charged particle beam having an increased cross-sectional size irradiates the target 4, rays are generated over an increased area, and the energy of the rays is smaller.
By using the method for generating X-rays of this embodiment, the beam spot incident on the target is enlarged several times, for example, by 32 times, compared with the original beam spot, and the bombardment area is far greater than the original beam spot area, so that the power is dispersed in the whole enlarged beam spot area, the peak power density is greatly reduced, and a better effect is achieved on heat dissipation of the target.
Although a few embodiments of the present general inventive concept have been shown and described, it would be appreciated by those skilled in the art that changes may be made in these embodiments without departing from the principles and spirit of the general inventive concept, the scope of which is defined in the claims and their equivalents.
Claims (13)
1. A charged particle beam diffusing device comprising a first quadrupole lens (2) and a second quadrupole lens (3) arranged along an optical axis of the charged particle beam diffusing device and spaced apart from each other by a distance, the first quadrupole lens (2) being located upstream and the second quadrupole lens (3) being located downstream in a direction of incidence of the charged particle beam,
wherein the first quadrupole lens (2) and the second quadrupole lens (3) are arranged such that the first quadrupole lens (2) is capable of converging an incident charged particle beam in a first direction and of diverging an incident charged particle beam in a second direction, the second quadrupole lens (3) being configured to be capable of diverging an incident charged particle beam in the first direction and of converging an incident charged particle beam in the second direction; wherein the first direction and the second direction are perpendicular to each other;
wherein the first quadrupole lens (2) and the second quadrupole lens (3) are spaced apart by a first distance which allows the charged particle beam passing through the first quadrupole lens (2) to be converged at a point and subsequently to be incident on the second quadrupole lens (3), the cross-sectional size of the charged particle beam incident on the second quadrupole lens (3) being larger than the cross-sectional size of the charged particle beam incident on the first quadrupole lens (2).
2. Charged particle beam diffusing device according to claim 1, wherein the first (2) and second (3) quadrupole lenses are magnetic quadrupole lenses, respectively.
3. Charged particle beam diffusing device according to claim 1, wherein the first (2) and second (3) quadrupole lenses are respectively electro-quadrupole lenses.
4. The charged particle beam diffusing device according to claim 2, wherein the magnetic field direction of the second quadrupole lens (3) and the magnetic field direction of the first quadrupole lens (2) are perpendicular to each other, so that the particle beam passing through the second quadrupole lens (3) can form a particle beam spot having a nearly circular cross section with an enlarged diameter.
5. The charged particle beam diffusing apparatus of claim 1 wherein the charged particle beam is an ion beam or an electron beam.
6. X-ray emitting device comprising a charged particle beam diffusing device according to any of claims 1-5 and a target (4), said target (4) being arranged downstream of said charged particle beam diffusing device in the direction of incidence of the charged particle beam.
7. The X-ray emitting device according to claim 6, wherein the target (4) is at a second distance from the second quadrupole lens (3) capable of allowing the charged particle beam passing through the second quadrupole lens (3) to converge at a point in the second direction, after which the charged particle beam cross-sectional size is increased to irradiate the target (4) with the increased cross-sectional size.
8. The X-ray emitting device of claim 7, wherein the target is a high Z value, high melting point composite target.
9. The X-ray emitting device of claim 7, wherein the charged particle beam is an ion beam or an electron beam.
10. A method of generating a divergent charged particle beam, comprising:
-arranging a first quadrupole lens (2) and a second quadrupole lens (3) such that the charged particle beam passes through the first quadrupole lens (2) and the second quadrupole lens (3) in sequence, wherein the first quadrupole lens (2) is configured to be capable of condensing the incoming charged particle beam in a first direction and to be capable of diverging the incoming charged particle beam in a second direction; the second quadrupole lens (3) is configured to be capable of condensing the charged particle beam in a first direction and to be capable of diverging the incident charged particle beam in a second direction; wherein the first direction and the second direction are perpendicular to each other;
wherein the first quadrupole lens (2) and the second quadrupole lens (3) are spaced apart by a first distance which allows the charged particle beam passing through the first quadrupole lens (2) to be converged at a point and subsequently to be incident on the second quadrupole lens (3), the cross-sectional size of the charged particle beam incident on the second quadrupole lens (3) being larger than the cross-sectional size of the charged particle beam incident on the first quadrupole lens (2).
11. The method of generating a diverging charged particle beam of claim 10, wherein the charged particle beam is an ion beam or an electron beam.
12. A method of generating X-rays, comprising:
generating a diverging charged particle beam using the method of generating a diverging charged particle beam of claim 10 or 11;
so that the charged particle beam passing through the second quadrupole lens (3) irradiates the target to generate X-rays.
13. The method of generating X-rays according to claim 12, wherein the target (4) is at a second distance from the second quadrupole lens (3) capable of allowing the charged particle beam passing through the second quadrupole lens (3) to converge at a point in the second direction, after which the charged particle beam cross-sectional size is increased, irradiating the target (4) with the increased cross-sectional size.
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| CN2415436Y (en) * | 2000-04-07 | 2001-01-17 | 中国原子能科学研究院 | Heavy ion irradiation device |
| JP2012163537A (en) * | 2011-02-09 | 2012-08-30 | Kobe Steel Ltd | X-ray analyzer and x-ray analysis method |
| CN103733298A (en) * | 2011-09-05 | 2014-04-16 | 株式会社日立高新技术 | Charged particle beam apparatus |
| TW201703093A (en) * | 2015-07-02 | 2017-01-16 | Ｉｃｔ積體電路測試股份有限公司 | System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics |
| CN208093168U (en) * | 2017-12-28 | 2018-11-13 | 同方威视技术股份有限公司 | Charged particle beam disperser and X-ray emission device |
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