CN108007633A - A kind of micro- gasbag-type flexible 3 D force snesor - Google Patents

A kind of micro- gasbag-type flexible 3 D force snesor Download PDF

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Publication number
CN108007633A
CN108007633A CN201711116017.3A CN201711116017A CN108007633A CN 108007633 A CN108007633 A CN 108007633A CN 201711116017 A CN201711116017 A CN 201711116017A CN 108007633 A CN108007633 A CN 108007633A
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China
Prior art keywords
flexible
air bag
miniature air
micro
force transmission
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CN201711116017.3A
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CN108007633B (en
Inventor
潘宏青
何飞
赵星
双丰
胡广宇
许玉云
孙玉香
曹会彬
王耀雄
高放
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Hefei Institutes of Physical Science of CAS
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Hefei Institutes of Physical Science of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The present invention relates to a kind of micro- gasbag-type flexible 3 D force snesor, including flexible force transmission column and the flexible base that is arranged on below flexible force transmission column;The bottom of the flexible force transmission column is equipped with some equally distributed upper miniature air bags;Lower miniature air bag is offered on the flexible base;Micro pressure sensor is equipped with the upper miniature air bag and lower miniature air bag.From above technical scheme, the present invention with certain arrangement mode in flexible force transmission column and flexible base by embedding miniature air bag and lower miniature air bag, and measure the air pressure change in each miniature air bag by being arranged on the micro pressure sensor in each miniature air bag, so as to calculate the loading force being subject to, the measurement of three-dimensional force is realized.Present invention reduces the difficulty of processing of flexible 3 D force snesor, ease for use is improved.

Description

A kind of micro- gasbag-type flexible 3 D force snesor
Technical field
The present invention relates to physical measuring instrument technical field, and in particular to a kind of micro- gasbag-type flexible 3 D force snesor.
Background technology
Mechanics sensor is the senser element that various mechanical meaurement amounts are converted to electric signal, is widely used in producing, gives birth to Various aspects in work.And with the quick hair of the electromechanical assemblies such as portable electronic equipment, wearable device, intelligent robot Exhibition, the microminiature sensor with small, light-weight, low-power consumption and high reliability start to widely apply.According to system Make the property of material, mechanics sensor can be divided into all solid state, semisolid and flexible structure, and wherein flexible structure can be applied to tactile The environment of the appropriate elasticity of the needs such as sensor, robot skin or matching complex appearance, thus there is wider applicability.
The force snesor used at present is mostly all solid state or semi-solid structure, and the design based on flexible structure is less.And Most of force snesors are that mechanical information is converted directly into electric signal based on capacitance principle or piezoresistive principles, this is needed in flexibility The signal processing circuit of inside configuration integrated complex, is unfavorable for the manufacture of array sensor.
The content of the invention
It is an object of the invention to provide a kind of micro- gasbag-type flexible 3 D force snesor, which can not only realize The measurement of three-dimensional force, additionally it is possible to reduce the difficulty of processing of flexible 3 D force snesor, improve ease for use.
To achieve the above object, present invention employs following technical scheme:
A kind of micro- gasbag-type flexible 3 D force snesor, including flexible force transmission column and be arranged on it is soft below flexible force transmission column Property pedestal;The bottom of the flexible force transmission column is equipped with some equally distributed upper miniature air bags;Offered on the flexible base Lower miniature air bag;Micro pressure sensor is equipped with the upper miniature air bag and lower miniature air bag.With in flexible Elastic force post Axis is center line, and miniature air bag is uniformly and symmetrically distributed along the bottom cylindrical week of flexible force transmission column on several.
Further, the bottom surface of the flexible force transmission column is Nian Jie with the top surface of flexible base is connected, and flexible force transmission column The central axes three of central axes, the central axes of flexible base and lower miniature air bag overlaps.
Further, the upper miniature air bag is the groove for being opened in flexible force transmission column bottom, and the lower end of the groove is opened Sealed at mouthful by the top surface of flexible base.Miniature air bag is evenly distributed on the periphery of lower miniature air bag on several, and upper miniature Air bag is not contacted with lower miniature air bag or not connected.
Further, the lower miniature air bag is the through hole being opened among flexible base, and the open top of the through hole Place uses silicone rubber seal by the sealing bottom surface of flexible force transmission column at bottom opening.
Further, the lower miniature air bag is half buried via hole for being opened in the opening upwards among flexible base, and should be partly The top open part of buried via hole is by the sealing bottom surface of flexible force transmission column.
Further, the upper miniature air bag and lower miniature air bag are distributed using staggered floor.Upper miniature air bag senses tangential force, Lower miniature air bag senses normal pressure.
Further, the flexible force transmission column is using cylinder made of flexible silicone rubber material.
Further, the flexible base is using the cushion made of flexible silicone rubber material with irregular figure Piece.
From above technical scheme, the present invention by flexible force transmission column and flexible base with certain arrangement mode Miniature air bag and lower miniature air bag in embedding, and measured by being arranged on the micro pressure sensor in each miniature air bag each micro- Air pressure change in type air bag, so as to calculate the loading force being subject to, realizes the measurement of three-dimensional force.Present invention reduces flexibility three The difficulty of processing of dimensional force sensor, improves ease for use.
Brief description of the drawings
Fig. 1 is the structure diagram of the present invention;
Fig. 2 is the cross-sectional view of the present invention.
Wherein:
1st, flexible force transmission column, 21-24, upper miniature air bag, 3, flexible base, 4, lower miniature air bag.
Embodiment
The present invention will be further described below in conjunction with the accompanying drawings:
A kind of micro- gasbag-type flexible 3 D force snesor as Figure 1-Figure 2, including flexible force transmission column 1 and be arranged on it is soft Property the lower section of force-transmitting pole 1 flexible base 3.The bottom of the flexible force transmission column 1 is equipped with 4 equally distributed upper miniature air bag 21- 24.Using the central axes of flexible Elastic force post as center line, 4 upper miniature air bags symmetrically divide along the bottom cylindrical week of flexible force transmission column Cloth.Lower miniature air bag 4 is offered on the flexible base 3.It is equipped with the upper miniature air bag 21-24 and lower miniature air bag 4 Micro pressure sensor;The micro pressure sensor, for detecting the air pressure change in upper miniature air bag or lower miniature air bag. The lower surface of the flexible base 3 is Nian Jie with signal acquisition circuit or other supporting structures to realize the fixation of whole sensor.
Further, the flexible force transmission column 1 is using elastic cylinder, cylindrical shape made of flexible silicone rubber material Ensure that flexible force transmission column 1 will not be subject to additional friction caused by irregular contour into x/y plane during any direction flexural deformation. The flexible force transmission column 1, can change size and height according to the actual requirements, so as to fulfill different transducer range and sensitive Degree.
Further, the bottom surface of the flexible force transmission column 1 is Nian Jie with the top surface of flexible base 3 is connected, and flexible force transmission column 1 Central axes, flexible base 3 central axes and lower miniature air bag 4 central axes three overlap.
Further, the upper miniature air bag 21-24 is to be opened in 1 bottom of the flexible force transmission column groove that Open Side Down, And sealed at the lower ending opening of the groove by the top surface of flexible base 3.4 upper miniature air bag 21-24 are evenly distributed on down miniature The periphery of air bag 4, and upper miniature air bag 21-24 is not contacted with lower miniature air bag 4 or not connected.It is miniature on symmetrical two groups two-by-two Air bag 21,24 and 22,23 is respectively induced the active force on x and y directions or y and x directions.The upper miniature air bag 21-24, can To change size and shape according to the actual requirements, the air pressure in adjusting in miniature air bag, so as to fulfill different transducer ranges And sensitivity.
Further, the lower miniature air bag 4 is the through hole for being opened in 3 center of flexible base, and is opened at the top of the through hole By the sealing bottom surface of flexible force transmission column 1 at mouthful, silicone rubber seal is used at bottom opening.Alternatively, the lower miniature air bag 4 is to open Half buried via hole of the opening upwards at 3 center of flexible base is located at, and the top open part of half buried via hole is by the bottom surface of flexible force transmission column 1 Sealing.The lower miniature air bag 4, for sensing the active force on z directions.The lower miniature air bag 4, can be according to the actual requirements Change size and shape, the air pressure in lower miniature air bag is adjusted, so as to fulfill different transducer ranges and sensitivity.
Further, the upper miniature air bag 21-24 and lower miniature air bag 4 are distributed using staggered floor.Upper miniature air bag 21-24 It is arranged on more than the top of flexible base 3 and is easy to sense tangential force, lower miniature air bag 4 is arranged on sensing normal direction pressure in flexible base 3 Power is insensitive to tangential force.When upper miniature air bag 21-24 is deformed by tangential force, it will not cause or significantly reduce lower miniature air bag 4 deformation.
Further, the flexible base 3 is using the cushion made of flexible silicone rubber material with irregular figure Piece.Preferably, the irregular figure is rectangle or circle.
The operation principle of the present invention:
In use, when force acting on transducer of the present invention, the power applied is decomposed by flexible force transmission column 1 Three directions of x, y, z.Deform after upper miniature air bag and lower miniature air bag stress on three directions, passed by each micro pressure Sensor measures the air pressure change of each miniature air bag, so as to perceive the stressing conditions of all directions.The calculating side of all directions stress Method is as follows:
Fx=α (P24-P21)
Fy=β (P22-P23)
Fz=γ P4
Wherein, Fx, Fy and Fz are respectively the power that micro pressure sensor is subject in three sides of x, y, z;P21、P22、P23、 P24And P4The pressure of respectively upper miniature air bag 21,22,23,24 and lower miniature air bag 4;α, β and γ are conversion coefficient.
Embodiment described above is only that the preferred embodiment of the present invention is described, not to the model of the present invention Enclose and be defined, on the premise of design spirit of the present invention is not departed from, technical side of the those of ordinary skill in the art to the present invention The various modifications and improvement that case is made, should all fall into the protection domain that claims of the present invention determines.

Claims (8)

  1. A kind of 1. micro- gasbag-type flexible 3 D force snesor, it is characterised in that:Including flexible force transmission column and it is arranged on flexible force transmission Flexible base below column;The bottom of the flexible force transmission column is equipped with some equally distributed upper miniature air bags;The flexibility base Lower miniature air bag is offered on seat;Micro pressure sensor is equipped with the upper miniature air bag and lower miniature air bag.
  2. A kind of 2. micro- gasbag-type flexible 3 D force snesor according to claim 1, it is characterised in that:The upper miniature gas Capsule and lower miniature air bag are distributed using staggered floor.
  3. A kind of 3. micro- gasbag-type flexible 3 D force snesor according to claim 1, it is characterised in that:The upper miniature gas Capsule is the groove for being opened in flexible force transmission column bottom, and is sealed at the lower ending opening of the groove by the top surface of flexible base.
  4. A kind of 4. micro- gasbag-type flexible 3 D force snesor according to claim 1, it is characterised in that:Miniature gas under described Capsule is the through hole being opened among flexible base, and the top open part of the through hole is by the sealing bottom surface of flexible force transmission column, bottom Opening uses silicone rubber seal.
  5. A kind of 5. micro- gasbag-type flexible 3 D force snesor according to claim 1, it is characterised in that:Miniature gas under described Capsule is half buried via hole for being opened in the opening upwards among flexible base, and the top open part of half buried via hole is by flexible force transmission column Sealing bottom surface.
  6. A kind of 6. micro- gasbag-type flexible 3 D force snesor according to claim 1, it is characterised in that:The flexible force transmission The bottom surface of column it is Nian Jie with the top surface of flexible base be connected, and the central axes of flexible force transmission column, the central axes of flexible base and under The central axes three of miniature air bag overlaps.
  7. A kind of 7. micro- gasbag-type flexible 3 D force snesor according to claim 1, it is characterised in that:The flexible force transmission Column is using cylinder made of flexible silicone rubber material.
  8. A kind of 8. micro- gasbag-type flexible 3 D force snesor according to claim 1, it is characterised in that:The flexible base For using the elastomeric pad made of flexible silicone rubber material with irregular figure.
CN201711116017.3A 2017-11-13 2017-11-13 Micro-air-bag type flexible three-dimensional force sensor Active CN108007633B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110440974A (en) * 2019-07-15 2019-11-12 中国科学院合肥物质科学研究院 A kind of micro- air bag multi-dimension force sensor with overload protection function

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10170545A (en) * 1996-12-13 1998-06-26 Miyota Co Ltd Self-diagnostic function for acceleration sensor and acceleration sensor with self-diagnostic function
CN100999079A (en) * 2006-12-28 2007-07-18 中国科学院合肥物质科学研究院 Bionic finger surface flexible contact sensor array of robot paw
CN102706489A (en) * 2012-06-13 2012-10-03 哈尔滨工业大学 Flexible three-dimensional force touch sensor of multi-fingered hands of human-simulated robot and three-dimensional force detecting system thereof
CN104359597A (en) * 2014-11-13 2015-02-18 中国科学院重庆绿色智能技术研究院 Electronic skin based on three-dimensional flexible substrate graphene and preparing method thereof
CN106840476A (en) * 2017-01-25 2017-06-13 东南大学 The three-dimensional quick sensing element of carbon nanomaterial field-effect flexible force and preparation method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10170545A (en) * 1996-12-13 1998-06-26 Miyota Co Ltd Self-diagnostic function for acceleration sensor and acceleration sensor with self-diagnostic function
CN100999079A (en) * 2006-12-28 2007-07-18 中国科学院合肥物质科学研究院 Bionic finger surface flexible contact sensor array of robot paw
CN102706489A (en) * 2012-06-13 2012-10-03 哈尔滨工业大学 Flexible three-dimensional force touch sensor of multi-fingered hands of human-simulated robot and three-dimensional force detecting system thereof
CN104359597A (en) * 2014-11-13 2015-02-18 中国科学院重庆绿色智能技术研究院 Electronic skin based on three-dimensional flexible substrate graphene and preparing method thereof
CN106840476A (en) * 2017-01-25 2017-06-13 东南大学 The three-dimensional quick sensing element of carbon nanomaterial field-effect flexible force and preparation method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110440974A (en) * 2019-07-15 2019-11-12 中国科学院合肥物质科学研究院 A kind of micro- air bag multi-dimension force sensor with overload protection function
CN110440974B (en) * 2019-07-15 2020-11-13 中国科学院合肥物质科学研究院 Micro-airbag multi-dimensional force sensor with overload protection function

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