CN107957626A - A kind of six-freedom parallel automatic deflection adjusting system and method towards optical mirror slip - Google Patents

A kind of six-freedom parallel automatic deflection adjusting system and method towards optical mirror slip Download PDF

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CN107957626A
CN107957626A CN201711286688.4A CN201711286688A CN107957626A CN 107957626 A CN107957626 A CN 107957626A CN 201711286688 A CN201711286688 A CN 201711286688A CN 107957626 A CN107957626 A CN 107957626A
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CN107957626B (en
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叶鑫
张之敬
张恒
邵超
周登宇
吴飞飞
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Beijing Institute of Technology BIT
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

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Abstract

A kind of six-freedom parallel automatic deflection adjusting system and method towards optical mirror slip, belongs to optical mirror slip precise automatic mounting technology field.The automatic deflection adjusting of eyeglass is realized based on the inclined measurement result in center and six-freedom parallel structure.Automatic deflection adjusting system is mainly made of lens barrel adjustment module, align measurement module and automatic deflection adjusting module.Automatic deflection adjusting method calculates two sphere centre coordinates of lens to be assembled based on align measurement data, six-degree-of-freedom parallel connection mechanism is driven to realize tuningout again, by the way of measurement and adjustment alternately, often carry out a tuningout, center need to be remeasured partially to verify whether tuningout result meets the requirements, if being unsatisfactory for requiring, need to be fitted again optical axis again tuningout untill precision reaches requirement.The present invention realizes the integration of align measurement and eyeglass adjust automatically, can quickly measure center of lens and be deviated partially with adjustment, not only ensure that the tuningout precision of eyeglass met the requirements, but also substantially increase eyeglass adjustment efficiency.

Description

A kind of six-freedom parallel automatic deflection adjusting system and method towards optical mirror slip
Technical field
The present invention relates to a kind of six-freedom parallel automatic deflection adjusting system and method towards optical mirror slip, and in particular to one Six-freedom parallel deviation system and automatical and efficient tuningout algorithm of the kind towards optical mirror slip, belong to optical mirror slip precision assembly Automated assembly and optical system and field of electromechanical technology.
Background technology
With making rapid progress for the technology of aerospace and numeral science and technology, optical lens group has been widely used for space flight The fields such as device, unmanned plane, intelligent robot, digital camera and civilian mobile phone, are cured high efficiency, the assembling demand of high reliability Hair is strong.But current common situation is the measurement and adjustment substantially manually progress inclined to center of lens, assembly precision Reliability and efficiency of assembling be all difficult to ensure that, so there is an urgent need for a kind of relatively reliable, more efficiently eyeglass assembly system.
By document and patent retrieval, measured partially with center of lens with eyeglass assemble relevant assembling ＆ adjusting system or device just like Under several：
(1) application number CN201310411023, it is entitled：The inclined detection device in center and detection method, disclose one Kind is simple in structure, can fast and efficiently detect the inclined detection device in the inclined center in measured lens center and method, solves mechanical Three coordinate methods in, it is more painstaking to read data for measurement every time, takes long, the problems such as efficiency is low, and precision is not high, but It is that this method is limited only to quickly to measure that center of lens is inclined, does not propose the scheme of tuningout.
(2) application number CN201410115050.4, it is entitled：Optical lens assistant resetting device, discloses one kind Optical lens assistant resetting device, solves and detects the center of optical lens respectively in the prior art partially and lens separation measurement is smart Technical problem low, of high cost is spent, improves optical lens adjustment efficiency.However, although this device realizes align measurement The combination that both are measured with eyeglass interval measurement, but still measuring how center of lens is to the rear is adjusted without proposition Partially.
Although in conclusion there are many measuring apparatus inclined for optical mirror slip center at present, it is typically only capable to realize mirror The automation of piece align measurement, still needs when eyeglass is inclined there are center and is artificially adjusted, although efficiency is compared to pure Hand assembled has large increase, but still eyeglass can not be realized from the automation for measuring tuningout whole process.
A kind of inclined automatic measurement in center towards optical mirror slip provided by the invention and deviation system are using measurement and adjustment Mode alternately, realize align measurement and eyeglass adjustment very high integrity, yet there are no similar research into Fruit.
The content of the invention
The purpose of the present invention is for existing optical mirror slip center it is inclined measuring apparatus processing eyeglass there are center it is inclined when still Need artificially to be adjusted, the less efficient state of the art, there is provided a kind of six-freedom parallel towards optical mirror slip is automatic Deviation system and method, by the way of measurement and adjustment alternately, realize the height of align measurement and eyeglass adjustment Integration.
A kind of six-freedom parallel automatic deflection adjusting system and method towards optical mirror slip, including one kind is towards optical mirror slip Six-freedom parallel automatic deflection adjusting system, referred to as " automatic deflection adjusting system "；A kind of and six freedom towards optical mirror slip Degree automatic deflection adjusting method in parallel, referred to as " automatic deflection adjusting method ".
The automatic deflection adjusting system realizes the integration of align measurement and eyeglass adjust automatically, can not only realize eyeglass The inclined quick measurement in center, and based on the inclined measurement result in center, it is proposed that eyeglass is realized using six-freedom parallel structure The automatic deflection adjusting method of tuningout；This automatic deflection adjusting system is in eyeglass assembling process, it is proposed that using measurement and adjustment alternately into Capable mode, often carries out a tuningout, to remeasure that center is partially to verify whether tuningout result disclosure satisfy that requirement, such as Fruit is unsatisfactory for required precision, then needs to be fitted optical axis tuningout again again, untill precision reaches requirement, can so ensure The tuningout precision of eyeglass meets the requirements；
Wherein, automatic deflection adjusting system is mainly made of lens barrel adjustment module, align measurement module and automatic deflection adjusting module； Automatic deflection adjusting system can realize align measurement and the very high integrity of eyeglass adjustment；
Provide that the reference axis of automatic deflection adjusting system adjusts the shaft of lower air-float turntable in module for lens barrel；For with two The simple lens of sphere, the line of two centre ofs sphere are the optical axis of lens.
Wherein, lens barrel adjustment module includes lower air-float turntable, four-dimensional adjustment platform, Drawtube gripper mechanism and amesdial measuring machine Structure；Amesdial measuring mechanism includes amesdial motion platform, upper amesdial, lower amesdial；Lower air-float turntable is fixed on equipment work Make on platform, four-dimension adjustment platform is fixed on lower air-float turntable, and amesdial measuring mechanism is fixed on equipment workbench.Lower air supporting turns Platform has central through hole, and through-hole diameter isThrough hole is located at lower air-float turntable shaft, to allow light beam can be by lower gas Floating turntable,；
Wherein, diameterScope beArrive
Four-dimension adjustment platform includes two straight-line displacement platforms, a leveling platform and a lens barrel fixture；Two straight-line displacement platforms Axis of movement stack space is orthogonal, leveling platform is fixed on two straight-line displacement platforms, and lens barrel fixture is fixed on leveling On platform；Four-dimension adjustment platform center has a diameter ofPerforation through hole, so as to allow light beam can by the four-dimension adjust platform, it is contemplated that Light path may be hindered by not getting through the entity part in hole in straight-line displacement platform moving process, thus the through hole of four-dimensional adjustment platform than The through hole of lower air-float turntable is big；
Wherein, diameterScope beFor ease of manual adjustment, preferentially examine Graduated fine thread driving leveling platform is marked in worry, i.e., drives leveling platform with micrometer；
Leveling platform mainly includes working plate and lower plate；The rotating contact face of working plate and lower plate is sphere, level-off When the centre of sphere at will not produce horizontal displacement, here be designed as the centre of sphere away from the high h of table top, if lower amesdial is just apart from table top H, that is, descend amesdial to be just directed toward at the centre of sphere for adjusting contact with platform sphere, then, will not at lower amesdial height during tuningout There is horizontal displacement, so would not produce horizontal displacement when adjusting the angle, realize the separated adjustment of angle and offset, keep away The error in principle is exempted from；
Wherein, the scope of height h is 40mm to 60mm；
Amesdial measuring mechanism mainly includes upper amesdial, lower amesdial, slide, x-y two-dimension translational platforms；
Above-mentioned tetrameric connection mode is：Upper amesdial and lower amesdial on slide, ensure all by screw lock The measurement axis of upper amesdial and lower amesdial is in same perpendicular；Slide is fixed by screws in x-y two-dimension translationals On platform.
The align measurement module mainly includes autocollimator adjustment mechanism, autocollimator and 45 ° of speculums；Autocollimatic By adjusting autocollimator and the pose of 45 ° of speculums during straight instrument installation, ensure that autocollimator optical axis and system reference axis are coaxial Degree；
Autocollimator adjustment mechanism includes a supporting plate, three screw adjustment mechanisms, and pallets level is placed in rack.Spiral shell Nail adjustment mechanism is made of three screws and a metallic plate, and a part for metallic plate is connected with rack by two screws, gold Belong to plate another part to be connected with supporting plate by a screw, supporting plate can be adjusted in the position of rack by adjusting screw；Two Screw adjustment mechanism is arranged in supporting plate both sides, and a screw adjustment mechanism is arranged in supporting plate end face；Autocollimator is lain in a horizontal plane in On supporting plate, wherein, autocollimator end is fixed with ccd cameras；45 ° of speculums are used for light beam of transferring, the horizon light of collimator Line turnover is vertical light.
Automatic deflection adjusting module mainly includes z-axis displacement platform, upper air-float turntable, six-degree-of-freedom parallel connection mechanism, six degree of freedom power Sensor and pneumatic adsorption head；The connection mode of five parts is：Z-axis displacement platform is placed vertically, and its axis of movement is with being Reference axis of uniting is parallel；Upper air-float turntable is connected by a pinboard with z-axis displacement platform, and to ensure the shaft of upper air-float turntable Exist with the concentricity of system reference axisWithin；The base of six-degree-of-freedom parallel connection mechanism passes through with upper air-float turntable Coupling Shaft is connected, and six-degree-of-freedom parallel connection mechanism is upside down, and ensures the z-axis and system benchmark of six-degree-of-freedom parallel connection mechanism The concentricity of axis existsWithin；One end of six degree of freedom force snesor and the working face of six-degree-of-freedom parallel connection mechanism It is connected, and ensures that the geometrical axis of six degree of freedom force snesor exists with the concentricity of system reference axisWithin； One end of pneumatic suction head is connected with six degree of freedom force snesor, and the geometrical axis of the pneumatic suction head ensured and system base The concentricity of fiducial axis existsWithin；
Automatic deflection adjusting method mainly includes gathered data, calculates sphere centre coordinate and quick tuningout；
Step 1, gathered data, collection in advance treat the radius of curvature of adjustment lens, diameter, material, thickness, lens separation and Parameter based on lens barrel internal diameter；
Step 2, the data by collecting, carry out geometry and calculate to determine to treat the space coordinate of the adjustment lens centre of sphere；
If treating simple lens of the adjustment lens for two spheres, corresponding two sphere centre coordinates of two sphere simple lenses calculate such as Formula (1) and (2)：
The sphere centre coordinate value being calculated all is the value in tuningout coordinate system, and tuningout coordinate system is defined as：
The x of tuningout coordinate system, y-axis and autocollimator x in itself, y-axis overlap, the z-axis of tuningout coordinate system straight up, with The benchmark overlapping of axles of automatic deflection adjusting system, the z-axis origin of tuningout coordinate system are set to autocollimator light beam from top to bottom, and the of contact The intersection point of first sphere of one piece of lens；
The step of calculating sphere centre coordinate is as follows：
Step 2.1 adjusts autocollimator focal length, and allow autocollimator focuses on centre of sphere O2, allow air-float turntable to rotate 360 °, then centre of sphere O2Reflection cursor on autocollimator ccd cameras draws a circle, further according to the structure ruler of pneumatic suction head Radius of curvature very little and by absorption sphere, determines centre of sphere O2Z-axis coordinate, such as formula (1)：
Wherein,It is centre of sphere O2Z-axis coordinate, dxRepresent the diameter of the contact surface of pneumatic suction head bottom and eyeglass, L After representing that eyeglass is adsorbed, contact surface to the distance of origin O, R2Represent by the radius of curvature of absorption minute surface, by absorption minute surface Referred to as " sphere 2 "；
Step 2.2 adjusts autocollimator focal length, and allow autocollimator focuses on O1The centre of sphere, allow air-float turntable rotate 360 °, then centre of sphere O1Reflection cursor on autocollimator ccd cameras draws a circle, can calculate the partially true χ in lens centre at this time, So that it is determined that centre of sphere O1Z-axis coordinate such as formula (2)：
Wherein,It is centre of sphere O1Z-axis coordinate, R1Represent the radius of curvature of lens sphere not to be adsorbed, it is not to be adsorbed Lens sphere be known as " sphere 1 ", d12Represent the thickness of lens, χ represents that the center of eyeglass is inclined, and cos χ represent that the inclined χ's in center is remaining String value；
Step 2.3 calculates coordinate equation below (3) in tuningout coordinate system of the centre of sphere 1 and the centre of sphere 2, (4)：
Wherein, the centre of sphere O that ccd cameras collect respectively twice1And O2Reflection cursor on autocollimator ccd cameras is drawn Go out two circles, X1.0, X1.180, Y1.0And Y1.180Centre of sphere O is represented respectively1Corresponding circle in positive direction of the x-axis, negative direction of the x-axis, y-axis just The coordinate value of four points corresponding to direction and negative direction of the y-axis；X2.0、X2.180、Y2.0And Y2.180Centre of sphere O is represented respectively2It is corresponding Coordinate value of the circle in four points corresponding to positive direction of the x-axis, negative direction of the x-axis, positive direction of the y-axis and negative direction of the y-axis；
βT(1) centre of sphere O is represented1Vertical axis magnifying power into detector target surface imaging process, βT(2) centre of sphere O is represented2To spy The vertical axis magnifying power in device target surface imaging process is surveyed, represents the centre of sphere O of sphere 22The enlargement ratio being imaged relative to sphere 1, Represent the centre of sphere O of sphere 22Image distance when being imaged relative to sphere 1；
Step 3, quick tuningout is realized with six-degree-of-freedom parallel connection mechanism, step 3.1 to step 3.5 is six-degree-of-freedom parallel Structure realizes a complete round of quick tuningout, and a wheel tuningout mainly includes the following steps：
(i=1,2；J=1,2,3,4,5 sphere center positions of the centre of sphere i after the completion of jth time tuningout) is represented； Coordinate of the centre ofs sphere of the centre of sphere i after the completion of jth time tuningout in x, y, z axis is represented respectively；TAjRepresent jth time tuningout Kinematic matrix；
Step 3.1 adjusts lens position in the horizontal plane that x-axis, y-axis form, and the translational movement in x directions is, y side To translational movement be, make centre of sphere O2Move on the reference axis of automatic deflection adjusting system, the fortune of six-degree-of-freedom parallel connection mechanism Dynamic matrix such as formula (5)：
For centre of sphere O2Start anteposition in the x-axis coordinate of tuningout coordinate system in tuningout,For centre of sphere O2Before tuningout starts Positioned at the y-axis coordinate of tuningout coordinate system, the centre of sphere is obtained after adjusting for the first time
Step 3.2 six-degree-of-freedom parallel connection mechanism is rotated around x-axis, rotation angle θ2So thatLine and xz planes It is parallel, the kinematic matrix such as formula (6) of six-degree-of-freedom parallel connection mechanism：
θ2For lens axisWith the y-axis of tuningout coordinate system formed by angle, calculation formula such as (7)：
Step 3.3 six-degree-of-freedom parallel connection mechanism is moved along y, z-axis, and y directions amount of movement isZ directions amount of movement is Δ ZA3, after adjusting third timeLine is in xz planes, is allowedReturn toThe position of point；Six-degree-of-freedom parallel The kinematic matrix of structure such as formula (8)：
-ΔZA3Calculation formula such as (9) and (10)：
Step 3.4 six-degree-of-freedom parallel connection mechanism is rotated around y-axis, rotation angle θ1So that after adjustment Line It is parallel with yz planes, the kinematic matrix such as formula (11) of six-degree-of-freedom parallel connection mechanism：
θ1For lens axisWith the x-axis of tuningout coordinate system formed by angle, calculation formula such as (12)：
Step 3.5 is moved along x, z-axis, and x-axis direction adjustment amount isZ-axis direction adjustment amount is-Δ ZA5；Allow the 5th time After adjustmentLine is overlapped with z-axis, and is allowedReturn toThe position of point, the kinematic matrix of six-degree-of-freedom parallel connection mechanism Such as formula (13)：
-ΔZA5Calculation formula such as (14)：
So far, from step 1 to step 3, automatic deflection adjusting method is completed.
The implementation process of automatic deflection adjusting system of the present invention, includes the following steps：
Step I, equipment will ensure the coaxial of " autocollimator, lower air-float turntable shaft, upper air-float turntable shaft " when installing Degree is within 3 microns；
Step II, z-axis displacement platform rise, and automatic deflection adjusting module is put and is lifted easy to place lens barrel；
Step III, lens barrel is placed on four-dimensional adjustment platform and with lens barrel fixture clamping；
Step IV, adjusts the position of amesdial measuring mechanism, amesdial and lower amesdial is directed toward lower air-float turntable Rotation axis, and allow two amesdials to contact lens barrel outer surface at the same time, prepare the circle run-out tolerance of measurement lens barrel；
Step V, lower air-float turntable rotate one week, and the lens barrel outer contour run-out tolerance measured according to two amesdials is intended Lens barrel axis is closed, analyzes the drift angle of lens barrel axis in space；
Step VI, by adjusting the two straight-line displacement platforms and a leveling platform of four-dimensional adjustment platform, makes lens barrel axis and oneself The benchmark overlapping of axles of dynamic deviation system；
Step VII, pneumatic suction head start to work, manually eyeglass are placed at pneumatic suction head and is adsorbed；
Step VIII, using automatic deflection adjusting method, first time tuningout is completed to eyeglass；
Step IX, measurement center of lens sees whether meet required precision partially, if center is partially still larger, beyond precision It is required that then repeat step VIII；If center has met required precision partially, continue step X；
Step X, z-axis displacement platform decline, slowly eyeglass are put into lens barrel, when six degree of freedom force snesor detects mirror When piece has touched spacer ring, stop motion immediately；
Step XI, manually smears ultraviolet photo-curing bonding agent using dispenser on eyeglass circumference, utilizes ultraviolet According to curing, fixing len；Automatic deflection adjusting module moves up, and prepares to install next eyeglass；
So far, from step I to step XI, a kind of six-freedom parallel automatic deflection adjusting system towards optical mirror slip is completed Implementation process.
Beneficial effect
A kind of six-freedom parallel automatic deflection adjusting system and method towards optical mirror slip provided by the invention, with existing skill Art is compared, and is had the advantages that：
(A) automatic deflection adjusting system of the present invention can not only be realized compared with the inclined automatic measuring equipment in traditional center The inclined measurement of center of lens, and be not required to manually adjust during adjustment eyeglass, the six-degree-of-freedom parallel connection mechanism for automatic deflection adjusting has Very high kinematic accuracy, substantially can pass through eyeglass disposable tuningout with regard to that can reach adjustment required precision, while parallel institution It is enable to respond quickly, i.e. this assembling realizes increasingly automated, can be greatly enhanced eyeglass adjustment efficiency；
(B) tuningout algorithm can measure in real time treats that the sphere centre coordinate of adjustment minute surface and center are inclined, and according to current measurement Value adjustment eyeglass, measurement and adjustment, which intersect, to be carried out, untill adjustment meets precision；Compared with traditional artificial adjustment eyeglass, It so can more ensure the precision of adjustment；
(C) sphere centre coordinate for treating adjustment minute surface that the input of automatic deflection adjusting algorithm measures for autocollimator, exports as six certainly By the adjustment amount of degree parallel institution.And the sphere centre coordinate that autocollimator measures directly reflects that center is inclined, six-degree-of-freedom parallel connection mechanism Directly it is connected with eyeglass, so this tuningout algorithm is direct solves with center partially for the eyeglass adjustment alignment issues of object function 's；
(D) this automatic deflection adjusting system proposes autocollimator under, automatic deflection adjusting module in upper inversion type topology layout, So be conducive to the assembling of follow-up eyeglass；With traditional autocollimator upper, layout of the lens barrel under is compared, this layout be from Dynamic tuningout module provides the facility on operating space；
(E) lens barrel adjustment module of the present invention, leveling platform therein, can not only be real compared with traditional leveling platform The trickle adjustment of existing angle, and by using the mode of sphere-contact, ensure that during leveling, lens barrel surrounds ball all the time Rotated at heart position, without producing offset error during leveling；Compared with traditional leveling platform, this leveling platform is being adjusted Offset error will not be produced during whole angle, there is less adjusting number, and the leveling efficiency of higher.
Brief description of the drawings
Fig. 1 is a kind of structure chart of six-freedom parallel automatic deflection adjusting system towards optical mirror slip of the invention；
Fig. 2 is that the lens barrel in a kind of six-freedom parallel automatic deflection adjusting system towards optical mirror slip of the invention adjusts module Schematic diagram；
Fig. 3 is the align measurement mould in a kind of six-freedom parallel automatic deflection adjusting system towards optical mirror slip of the invention Block schematic diagram；
Fig. 4 is the automatic deflection adjusting module in a kind of six-freedom parallel automatic deflection adjusting system towards optical mirror slip of the invention It is intended to；
Fig. 5 is two centre ofs sphere of eyeglass in a kind of six-freedom parallel automatic deflection adjusting method towards optical mirror slip of the invention Z-axis coordinate solve schematic diagram；
Fig. 6 is that two centre of sphere lines are being adjusted in a kind of six-freedom parallel automatic deflection adjusting method towards optical mirror slip of the invention Change procedure schematic diagram in inclined coordinate system.
Fig. 7 is a kind of embodiment flow of six-freedom parallel automatic deflection adjusting method towards optical mirror slip of the invention Figure.
Illustrate
Wherein, 1-1- lens barrels adjustment module, 1-2- align measurement modules, 1-3- automatic deflection adjusting modules；
Wherein, 2-1- amesdials motion platform, the upper amesdials of 2-2-, 2-3-lower amesdial, 2-4-lens barrel, 2-5- Drawtube gripper mechanism, 2-6-four-dimension adjustment platform, 2-7-lower air-float turntable；
Wherein, 3-1- autocollimators adjusting mechanism, 3-2-autocollimator, 3-3-45 ° speculum；
Wherein, 4-1-Z axis displacement platform, 4-2-upper air-float turntable, 4-3-six-degree-of-freedom parallel connection mechanism, 4-4-six are freely Spend force snesor, 4-5-pneumatic suction head.
OXYZ composition tuningout coordinate systems in wherein Fig. 5, O1BAnd O2BFor the actual sphere center position of two spheres, O1And O2Generation Table theory sphere center position, i.e. lens do not have center it is inclined in the case of ideal position；O is uniformly used in the description1And O2Instead of χ tables Show that the center of lens is inclined, dx is the adsorption orifice diameter dimension of pneumatic suction head, and L is the length dimension of pneumatic suction head；
OXYZ in wherein Fig. 6 is tuningout coordinate system,Represent that lens obtain centre of sphere position after being adjusted in first time Put, θ1For lens axisWith the x-axis of tuningout coordinate system formed by angle, θ2For lens axisWith tuningout coordinate Angle formed by the y-axis of system；
Flow chart when wherein Fig. 7 is specific implementation lens automatic deflection adjusting.
Embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
Embodiment 1
Referring to the drawings 1, this optics assembling ＆ adjusting system mainly includes 1-1 lens barrels adjustment module, 1-2 align measurements module and 1- 3 automatic deflection adjusting module these three major parts compositions.By the coordination of various pieces, align measurement and mirror can be realized The very high integrity of piece adjustment.
Reference axis using the shaft of air-float turntable on 4-2 as whole system, ensures that air-float turntable and 3-2 are certainly under 2-7 respectively The concentricity of collimator optical axis and reference axis is within positive and negative 3 microns.
Referring to the drawings 2, the pose of module adjustment lens barrel is adjusted by 1-1 lens barrels, 1-1 lens barrels, which adjust module, includes amesdial Measuring mechanism and the four-dimensional adjustment platforms of 2-6.Lens barrel is placed on the four-dimensional adjustment platforms of 2-6, with 2-5 Drawtube gripper mechanism fixed mirrors Cylinder, by adjusting the displacement platform of amesdial measuring mechanism, adjusts the position of amesdial, amesdial gauge outfit is touched the mother of lens barrel Line, wherein, just the amesdial under table top 40mm, i.e. 2-3 is just directed toward two dimension tune contact with platform ball to amesdial needs under 2-3 Then at amesdial height be not in horizontal displacement under 2-3 during tuningout at the centre of sphere in face.
Air-float turntable rotates a circle under 2-7, and two amesdials measure reading, can judge mirror according to the bounce of amesdial The offset vector of cylinder mechanical axis, so as to be adjusted using the four-dimensional adjustment platforms of 2-6 to lens barrel pose, makes the mechanical axis of lens barrel with being The benchmark overlapping of axles of system.
Referring to the drawings 3,3-2 autocollimator components are disposed across under workbench, by adjusting the 3-1 adjusting screws of collimator With 3-3 speculums so that the reference axis concentricity of collimator optical axis and system is within 3 microns.Needs are assembled each The information such as the radius of curvature of eyeglass, material, eyeglass interval, thickness input computer, calculates the reason at each curvature mirror center By position.
Referring to the drawings 4,1-3 automatic deflection adjustings module is utilized to complete the tuningout of eyeglass.4-1Z axle positions moving stage is allowed to rise, by tuningout Module is lifted easy to place lens barrel.Pneumatic suction head is started to work, and eyeglass manually is placed on 4-5 pneumatic suction heads and is adsorbed,
Referring to the drawings 5, according to the adsorption orifice diameter dimension dx of pneumatic suction head and length dimension L, the ball of lens ball surface 2 Radius surface R2, centre of sphere O can be calculated2Z-axis coordinateThe spherical radius R of thickness, lens ball surface 2 further according to lens1, Calculate centre of sphere O1Z-axis coordinateThen 3-2 autocollimators are controlled by computer, adjust automatically 3-2 autocollimators are burnt Away from making 3-2 autocollimators focal point to the theoretical sphere center position of tested sphere；The upper air-float turntables of 4-2 drive eyeglass rotation one In week, if eyeglass is inclined there are center, will occur a circular trace, 3-2 auto-collimations on the ccd camera photosurfaces of collimator Instrument can go out the actual sphere center position of tested sphere according to circular trace DATA REASONING；3-2 autocollimator focal lengths are adjusted again, are repeated Above step, measures the actual sphere center position of another sphere of same lens；Tested eyeglass is gone out by computer fitting Optical axis, and calculate the inclined numerical value of center of lens；
Referring to the drawings 6, after two sphere sphere centre coordinates of simple lens are calculated, centre of sphere physical location O is obtained1O2, with six certainly Quick tuningout is realized by degree parallel institution, first makes centre of sphere O2Move on the reference axis of automatic deflection adjusting system, obtain the shape of attached drawing 6 State；The pose of six-degree-of-freedom parallel connection mechanism adjustment lens is recycled, allows two centre of sphere lines finally base with automatic deflection adjusting system Fiducial axis overlaps；
Referring to the drawings 7, with six-degree-of-freedom parallel connection mechanism complete one wheel tuningout after, it is necessary to measure center of lens see partially whether Meet the requirements, if center is partially still bigger, beyond the requirement of precision, then repeatedly tuningout step；If center is partially full Sufficient required precision, then 4-1Z axle positions moving stage decline, eyeglass is put into lens barrel, during this, if eyeglass occurs with lens barrel Touching, then six degree of freedom force snesor can produce signal and feed back to system, stop the descending motion of 4-1Z axle position moving stage.
After eyeglass is put into lens barrel installation site, center of lens is measured again and sees whether meet the requirements partially, if be unsatisfactory for Tuningout step is then repeated, manually ultraviolet photo-curing bonding agent is smeared in eyeglass and lens barrel joint place if meeting, utilizes purple Outside line illumination curing, fixing len；Automatic deflection adjusting module moves up, and prepares to install next eyeglass.
In conclusion the foregoing is merely a prefered embodiment of the invention, it is not intended to limit the scope of the present invention. Within the spirit and principles of the invention, any modification, equivalent replacement, improvement and so on, should be included in the present invention's Within protection domain.

Claims (10)

  1. A kind of 1. six-freedom parallel automatic deflection adjusting system towards optical mirror slip, it is characterised in that：The automatic deflection adjusting system is real Show the integration of align measurement and eyeglass adjust automatically, can not only realize the inclined quick measurement of center of lens, Er Qieji In the inclined measurement result in center, it is proposed that realize the automatic deflection adjusting method of eyeglass tuningout using six-freedom parallel structure；This is certainly Dynamic deviation system is in eyeglass assembling process, it is proposed that by the way of measurement and adjustment alternately, a tuningout is often carried out, Remeasuring center, partially to verify whether tuningout result disclosure satisfy that requirement, if being unsatisfactory for required precision, needs Again optical axis tuningout again is fitted, untill precision reaches requirement, can so ensure that the tuningout precision of eyeglass meets the requirements；
    Wherein, automatic deflection adjusting system is mainly made of lens barrel adjustment module, align measurement module and automatic deflection adjusting module；Automatically Deviation system can realize align measurement and the very high integrity of eyeglass adjustment；
    Wherein, lens barrel adjustment module includes lower air-float turntable, four-dimensional adjustment platform, Drawtube gripper mechanism and amesdial measuring mechanism； Amesdial measuring mechanism includes amesdial motion platform, upper amesdial, lower amesdial；Lower air-float turntable is fixed on equipment workbench On, four-dimension adjustment platform is fixed on lower air-float turntable, and amesdial measuring mechanism is fixed on equipment workbench；Lower air-float turntable tool There is central through hole, through-hole diameter isThrough hole is located at lower air-float turntable shaft, so as to which light beam can be turned by lower air supporting Platform.
  2. A kind of 2. six-freedom parallel automatic deflection adjusting system towards optical mirror slip as claimed in claim 1, it is characterised in that： Provide that the reference axis of automatic deflection adjusting system adjusts the shaft of lower air-float turntable in module for lens barrel；For the list with two spheres Lens, the line of two centre ofs sphere are the optical axis of lens；
    The through-hole diameter of lower air-float turntableScope beArrive
  3. A kind of 3. six-freedom parallel automatic deflection adjusting system towards optical mirror slip as claimed in claim 1, it is characterised in that： Lens barrel adjustment mould four-dimensional adjustment platform in the block includes two straight-line displacement platforms, a leveling platform and a lens barrel fixture；Two straight The axis of movement of displacement of the lines platform is stacked space is orthogonal, and leveling platform is fixed on two straight-line displacement platforms, and lens barrel fixture is consolidated It is scheduled on leveling platform；Four-dimension adjustment platform center has a diameter ofPerforation through hole, so as to allow light beam can by the four-dimension adjust Platform, it is contemplated that light path may be hindered by not getting through the entity part in hole in straight-line displacement platform moving process, so four-dimensional adjustment platform Through hole it is bigger than the through hole of lower air-float turntable；
    Leveling platform mainly includes working plate and lower plate；The rotating contact face of working plate and lower plate is sphere, ball during level-off Horizontal displacement will not be produced at the heart, here be designed as the centre of sphere away from the high h of table top, if lower amesdial just apart from table top h, i.e., Lower amesdial is just directed toward at the centre of sphere for adjusting contact with platform sphere, then during tuningout, is not at lower amesdial height Horizontal displacement, so would not produce horizontal displacement when adjusting the angle, realize the separated adjustment of angle and offset, avoid Error in principle；
    Amesdial measuring mechanism mainly includes upper amesdial, lower amesdial, slide, x-y two-dimension translational platforms；
    Above-mentioned tetrameric connection mode is：Upper amesdial and lower amesdial on slide, ensure thousands of all by screw lock The measurement axis of table and lower amesdial is divided to be in same perpendicular；Slide is fixed by screws on x-y two-dimension translational platforms.
  4. A kind of 4. six-freedom parallel automatic deflection adjusting system towards optical mirror slip as claimed in claim 3, it is characterised in that：
    The through through-hole diameter of four-dimension adjustment platformScope beFor ease of Manual adjustment, pays the utmost attention to graduated fine thread driving leveling platform is marked, i.e., drive leveling platform with micrometer.
  5. A kind of 5. six-freedom parallel automatic deflection adjusting system towards optical mirror slip as claimed in claim 3, it is characterised in that： Lower amesdial is 40mm to 60mm apart from the scope of table top h.
  6. A kind of 6. six-freedom parallel automatic deflection adjusting system towards optical mirror slip as claimed in claim 1, it is characterised in that： The align measurement module mainly includes autocollimator adjustment mechanism, autocollimator and 45 ° of speculums；Autocollimator is installed When by adjusting autocollimator and the pose of 45 ° of speculums, ensure autocollimator optical axis and system reference axis concentricity；
    Autocollimator adjustment mechanism includes a supporting plate, three screw adjustment mechanisms, and pallets level is placed in rack；Screw tune Complete machine structure is made of three screws and a metallic plate, and a part for metallic plate is connected with rack by two screws, metallic plate Another part is connected by a screw with supporting plate, and supporting plate can be adjusted in the position of rack by adjusting screw；Two screws Adjustment mechanism is arranged in supporting plate both sides, and a screw adjustment mechanism is arranged in supporting plate end face；Autocollimator lies in a horizontal plane in supporting plate On, wherein, autocollimator end is fixed with ccd cameras；45 ° of speculums are used for light beam of transferring, and the horizontal light of collimator is turned Roll over for vertical light；
    Automatic deflection adjusting module mainly includes z-axis displacement platform, upper air-float turntable, six-degree-of-freedom parallel connection mechanism, six degree of freedom power sensing Device and pneumatic adsorption head；The connection mode of five parts is：Z-axis displacement platform is placed vertically, and its axis of movement and system base Fiducial axis is parallel；Upper air-float turntable is connected by a pinboard with z-axis displacement platform, and to ensure the shaft of upper air-float turntable with being The concentricity of system reference axis existsWithin；The base of six-degree-of-freedom parallel connection mechanism passes through switching with upper air-float turntable Axis is connected, and six-degree-of-freedom parallel connection mechanism is upside down, and ensures the z-axis and system reference axis of six-degree-of-freedom parallel connection mechanism Concentricity existsWithin；One end of six degree of freedom force snesor and the working face of six-degree-of-freedom parallel connection mechanism are connected, And ensure that the geometrical axis of six degree of freedom force snesor exists with the concentricity of system reference axisWithin；Pneumatically One end of adsorption head is connected with six degree of freedom force snesor, and the geometrical axis of the pneumatic suction head ensured and system reference axis Concentricity existWithin.
  7. A kind of 7. six-freedom parallel automatic deflection adjusting method towards optical mirror slip, it is characterised in that：Mainly include gathered data, Calculate sphere centre coordinate and quick tuningout；
    Radius of curvature, diameter, material, thickness, lens separation and the lens barrel of adjustment lens are treated in step 1, gathered data, in advance collection Parameter based on internal diameter；
    Step 2, the data by collecting, carry out geometry and calculate to determine to treat the space coordinate of the adjustment lens centre of sphere；
    Step 3, quick tuningout is realized with six-degree-of-freedom parallel connection mechanism；
    So far, from step 1 to step 3, automatic deflection adjusting method is completed.
  8. A kind of 8. six-freedom parallel automatic deflection adjusting method towards optical mirror slip as claimed in claim 7, it is characterised in that： Assume to treat simple lens of the adjustment lens for two spheres in step 2, corresponding two sphere centre coordinates of two sphere simple lenses calculate Such as formula (1) and (2)：
    The sphere centre coordinate value being calculated all is the value in tuningout coordinate system, and tuningout coordinate system is defined as：
    The x of tuningout coordinate system, y-axis and autocollimator x in itself, y-axis overlap, and the z-axis of tuningout coordinate system is straight up, and automatic The benchmark overlapping of axles of deviation system, the z-axis origin of tuningout coordinate system are set to autocollimator light beam from top to bottom, first piece of contact The intersection point of first sphere of lens；
    The step of calculating sphere centre coordinate is as follows：
    Step 2.1 adjusts autocollimator focal length, and allow autocollimator focuses on centre of sphere O2, allow air-float turntable to be rotated by 360 °, then ball Heart O2Reflection cursor on autocollimator ccd cameras draws a circle, structure size further according to pneumatic suction head and is inhaled The radius of curvature of attached sphere, determines centre of sphere O2Z-axis coordinate, such as formula (1)：
    <mrow> <msub> <mi>Z</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> </msub> <mo>=</mo> <mi>L</mi> <mo>+</mo> <msqrt> <mrow> <msubsup> <mi>R</mi> <mn>2</mn> <mn>2</mn> </msubsup> <mo>-</mo> <msup> <mrow> <mo>(</mo> <mfrac> <msub> <mi>d</mi> <mi>x</mi> </msub> <mn>2</mn> </mfrac> <mo>)</mo> </mrow> <mn>2</mn> </msup> </mrow> </msqrt> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </mrow>
    Wherein,It is centre of sphere O2Z-axis coordinate, dxRepresent the diameter of the contact surface of pneumatic suction head bottom and eyeglass, L is represented After eyeglass is adsorbed, contact surface to the distance of origin O, R2Represent, by the radius of curvature of absorption minute surface, by absorption minute surface to be known as " sphere 2 "；
    Step 2.2 adjusts autocollimator focal length, and allow autocollimator focuses on O1The centre of sphere, allow air-float turntable to be rotated by 360 °, then Centre of sphere O1Reflection cursor on autocollimator ccd cameras draws a circle, the partially true χ in lens centre can be calculated at this time, so that really Determine centre of sphere O1Z-axis coordinate such as formula (2)：
    <mrow> <msub> <mi>Z</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> </msub> <mo>=</mo> <msub> <mi>Z</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> </msub> <mo>-</mo> <msubsup> <mi>O</mi> <mn>1</mn> <mo>&amp;prime;</mo> </msubsup> <msub> <mi>O</mi> <mn>2</mn> </msub> <mo>=</mo> <mi>L</mi> <mo>+</mo> <msqrt> <mrow> <msubsup> <mi>R</mi> <mn>2</mn> <mn>2</mn> </msubsup> <mo>-</mo> <msup> <mrow> <mo>(</mo> <mfrac> <msub> <mi>d</mi> <mi>x</mi> </msub> <mn>2</mn> </mfrac> <mo>)</mo> </mrow> <mn>2</mn> </msup> </mrow> </msqrt> <mo>-</mo> <mrow> <mo>(</mo> <msub> <mi>R</mi> <mn>1</mn> </msub> <mo>+</mo> <msub> <mi>R</mi> <mn>2</mn> </msub> <mo>-</mo> <msub> <mi>d</mi> <mn>12</mn> </msub> <mo>)</mo> </mrow> <mo>&amp;CenterDot;</mo> <mi>c</mi> <mi>o</mi> <mi>s</mi> <mi>&amp;chi;</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>2</mn> <mo>)</mo> </mrow> </mrow>
    Wherein,It is centre of sphere O1Z-axis coordinate, R1Represent the radius of curvature of lens sphere not to be adsorbed, not to be adsorbed is saturating Mirror sphere is known as " sphere 1 ", d12Represent the thickness of lens, χ represents that the center of eyeglass is inclined, and cos χ represent the cosine value of the inclined χ in center；
    Step 2.3 calculates coordinate equation below (3) in tuningout coordinate system of the centre of sphere 1 and the centre of sphere 2, (4)：
    <mrow> <mtable> <mtr> <mtd> <mrow> <msub> <mi>X</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> </msub> <mo>=</mo> <mfrac> <mrow> <msub> <mi>X</mi> <mn>1.0</mn> </msub> <mo>-</mo> <msub> <mi>X</mi> <mn>1.180</mn> </msub> </mrow> <mrow> <mn>4</mn> <msub> <mi>&amp;beta;</mi> <mi>T</mi> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </mrow> </mfrac> </mrow> </mtd> </mtr> <mtr> <mtd> <mrow> <msub> <mi>Y</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> </msub> <mo>=</mo> <mfrac> <mrow> <msub> <mi>Y</mi> <mn>1.0</mn> </msub> <mo>-</mo> <msub> <mi>Y</mi> <mn>1.180</mn> </msub> </mrow> <mrow> <mn>4</mn> <msub> <mi>&amp;beta;</mi> <mi>T</mi> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </mrow> </mfrac> </mrow> </mtd> </mtr> <mtr> <mtd> <mrow> <msub> <mi>Z</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> </msub> <mo>=</mo> <mi>L</mi> <mo>+</mo> <msqrt> <mrow> <msubsup> <mi>R</mi> <mn>2</mn> <mn>2</mn> </msubsup> <mo>-</mo> <msup> <mrow> <mo>(</mo> <mfrac> <msub> <mi>d</mi> <mi>x</mi> </msub> <mn>2</mn> </mfrac> <mo>)</mo> </mrow> <mn>2</mn> </msup> </mrow> </msqrt> <mo>-</mo> <mrow> <mo>(</mo> <msub> <mi>R</mi> <mn>1</mn> </msub> <mo>+</mo> <msub> <mi>R</mi> <mn>2</mn> </msub> <mo>-</mo> <msub> <mi>d</mi> <mn>12</mn> </msub> <mo>)</mo> </mrow> <mo>&amp;CenterDot;</mo> <mi>cos</mi> <mi>&amp;chi;</mi> </mrow> </mtd> </mtr> </mtable> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>3</mn> <mo>)</mo> </mrow> </mrow>
    <mrow> <mtable> <mtr> <mtd> <mrow> <msub> <mi>X</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> </msub> <mo>=</mo> <mfrac> <mrow> <mfrac> <mrow> <msub> <mi>X</mi> <mn>2.0</mn> </msub> <mo>-</mo> <msub> <mi>X</mi> <mn>2.180</mn> </msub> </mrow> <mrow> <mn>4</mn> <msub> <mi>&amp;beta;</mi> <mi>T</mi> </msub> <mrow> <mo>(</mo> <mn>2</mn> <mo>)</mo> </mrow> </mrow> </mfrac> <mo>-</mo> <mfrac> <msub> <mi>L</mi> <msub> <mi>M</mi> <mn>21</mn> </msub> </msub> <msub> <mi>R</mi> <mn>1</mn> </msub> </mfrac> <msub> <mi>X</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> </msub> </mrow> <msub> <mi>&amp;beta;</mi> <mn>21</mn> </msub> </mfrac> <mo>+</mo> <mfrac> <msub> <mi>Z</mi> <msub> <mi>O</mi> <mrow> <mn>2</mn> <mi>B</mi> </mrow> </msub> </msub> <msub> <mi>Z</mi> <msub> <mi>O</mi> <mrow> <mn>1</mn> <mi>B</mi> </mrow> </msub> </msub> </mfrac> <msub> <mi>X</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> </msub> </mrow> </mtd> </mtr> <mtr> <mtd> <mrow> <msub> <mi>Y</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> </msub> <mo>=</mo> <mfrac> <mrow> <mfrac> <mrow> <msub> <mi>Y</mi> <mn>2.0</mn> </msub> <mo>-</mo> <msub> <mi>Y</mi> <mn>2.180</mn> </msub> </mrow> <mrow> <mn>4</mn> <msub> <mi>&amp;beta;</mi> <mi>T</mi> </msub> <mrow> <mo>(</mo> <mn>2</mn> <mo>)</mo> </mrow> </mrow> </mfrac> <mo>-</mo> <mfrac> <msub> <mi>L</mi> <msub> <mi>M</mi> <mn>21</mn> </msub> </msub> <msub> <mi>R</mi> <mn>1</mn> </msub> </mfrac> <msub> <mi>Y</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> </msub> </mrow> <msub> <mi>&amp;beta;</mi> <mn>21</mn> </msub> </mfrac> <mo>+</mo> <mfrac> <msub> <mi>Z</mi> <msub> <mi>O</mi> <mrow> <mn>2</mn> <mi>B</mi> </mrow> </msub> </msub> <msub> <mi>Z</mi> <msub> <mi>O</mi> <mrow> <mn>1</mn> <mi>B</mi> </mrow> </msub> </msub> </mfrac> <msub> <mi>Y</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> </msub> </mrow> </mtd> </mtr> <mtr> <mtd> <mrow> <msub> <mi>Z</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> </msub> <mo>=</mo> <mi>L</mi> <mo>+</mo> <msqrt> <mrow> <msubsup> <mi>R</mi> <mn>2</mn> <mn>2</mn> </msubsup> <mo>-</mo> <msup> <mrow> <mo>(</mo> <mfrac> <msub> <mi>d</mi> <mi>x</mi> </msub> <mn>2</mn> </mfrac> <mo>)</mo> </mrow> <mn>2</mn> </msup> </mrow> </msqrt> </mrow> </mtd> </mtr> </mtable> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>4</mn> <mo>)</mo> </mrow> </mrow>
    Wherein, the centre of sphere O that ccd cameras collect respectively twice1And O2Reflection cursor on autocollimator ccd cameras draws two A circle, X1.0, X1.180, Y1.0And Y1.180Centre of sphere O is represented respectively1Corresponding circle is in positive direction of the x-axis, negative direction of the x-axis, positive direction of the y-axis With the coordinate value of four points corresponding to negative direction of the y-axis；X2.0、X2.180、Y2.0And Y2.180Centre of sphere O is represented respectively2Corresponding circle is in x The coordinate value of four points corresponding to axis positive direction, negative direction of the x-axis, positive direction of the y-axis and negative direction of the y-axis；
    βT(1) centre of sphere O is represented1Vertical axis magnifying power into detector target surface imaging process, βT(2) centre of sphere O is represented2To detector target Vertical axis magnifying power in the imaging process of face, represents the centre of sphere O of sphere 22The enlargement ratio being imaged relative to sphere 1,Represent ball The centre of sphere O in face 22Image distance when being imaged relative to sphere 1.
  9. A kind of 9. six-freedom parallel automatic deflection adjusting method towards optical mirror slip as claimed in claim 7, it is characterised in that： Step 3 realizes a complete round of quick tuningout especially by step 3.1 to step 3.5 for six-degree-of-freedom parallel connection mechanism；One Wheel tuningout mainly includes the following steps：
    Represent sphere center positions of the centre of sphere i after the completion of jth time tuningout； Coordinate of the centre ofs sphere of the centre of sphere i after the completion of jth time tuningout in x, y, z axis is represented respectively；TAjRepresent jth time tuningout Kinematic matrix；
    Step 3.1 adjusts lens position in the horizontal plane that x-axis, y-axis form, and the translational movement in x directions isY directions Translational movement isMake centre of sphere O2Move on the reference axis of automatic deflection adjusting system, the movement square of six-degree-of-freedom parallel connection mechanism Battle array is such as formula (5)：
    <mrow> <msub> <mi>T</mi> <mrow> <mi>A</mi> <mn>1</mn> </mrow> </msub> <mo>=</mo> <mfenced open = "[" close = "]"> <mtable> <mtr> <mtd> <mn>1</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mrow> <mo>-</mo> <msub> <mi>X</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> </msub> </mrow> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mrow> <mo>-</mo> <msub> <mi>Y</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> </msub> </mrow> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> <mtd> <mn>0</mn> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> </mtr> </mtable> </mfenced> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>5</mn> <mo>)</mo> </mrow> </mrow>
    For centre of sphere O2Start anteposition in the x-axis coordinate of tuningout coordinate system in tuningout,For centre of sphere O2Tuningout start anteposition in The y-axis coordinate of tuningout coordinate system, the centre of sphere is obtained after adjusting for the first time
    Step 3.2 six-degree-of-freedom parallel connection mechanism is rotated around x-axis, rotation angle θ2So thatLine is parallel with xz planes, The kinematic matrix of six-degree-of-freedom parallel connection mechanism such as formula (6)：
    <mrow> <msub> <mi>T</mi> <mrow> <mi>A</mi> <mn>2</mn> </mrow> </msub> <mo>=</mo> <mfenced open = "[" close = "]"> <mtable> <mtr> <mtd> <mn>1</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mrow> <msub> <mi>cos&amp;theta;</mi> <mn>2</mn> </msub> </mrow> </mtd> <mtd> <mrow> <mo>-</mo> <msub> <mi>sin&amp;theta;</mi> <mn>2</mn> </msub> </mrow> </mtd> <mtd> <mn>0</mn> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mrow> <msub> <mi>sin&amp;theta;</mi> <mn>2</mn> </msub> </mrow> </mtd> <mtd> <mrow> <msub> <mi>cos&amp;theta;</mi> <mn>2</mn> </msub> </mrow> </mtd> <mtd> <mn>0</mn> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> </mtr> </mtable> </mfenced> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>6</mn> <mo>)</mo> </mrow> </mrow>
    θ2For lens axisWith the y-axis of tuningout coordinate system formed by angle, calculation formula such as (7)：
    <mrow> <mi>t</mi> <mi>a</mi> <mi>n</mi> <mi>&amp;theta;</mi> <mn>2</mn> <mo>=</mo> <mfrac> <mrow> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>-</mo> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> </mrow> <mrow> <msubsup> <mi>Y</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>-</mo> <msubsup> <mi>Y</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> </mrow> </mfrac> <mo>=</mo> <mfrac> <mrow> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>-</mo> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> </mrow> <msubsup> <mi>Y</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> </mfrac> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>7</mn> <mo>)</mo> </mrow> </mrow>
    Step 3.3 six-degree-of-freedom parallel connection mechanism is moved along y, z-axis, and y directions amount of movement isZ directions amount of movement is Δ ZA3, make After third time adjustsLine is in xz planes, is allowedReturn toThe position of point；Six-degree-of-freedom parallel connection mechanism Kinematic matrix such as formula (8)：
    <mrow> <msub> <mi>T</mi> <mrow> <mi>A</mi> <mn>3</mn> </mrow> </msub> <mo>=</mo> <mfenced open = "[" close = "]"> <mtable> <mtr> <mtd> <mn>1</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mrow> <mo>-</mo> <msubsup> <mi>Y</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>2</mn> <mo>)</mo> </mrow> </msubsup> </mrow> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> <mtd> <mrow> <mo>-</mo> <msub> <mi>&amp;Delta;Z</mi> <mrow> <mi>A</mi> <mn>3</mn> </mrow> </msub> </mrow> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> </mtr> </mtable> </mfenced> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>8</mn> <mo>)</mo> </mrow> </mrow>
    -ΔZA3Calculation formula such as (9) and (10)：
    <mrow> <mo>-</mo> <msub> <mi>&amp;Delta;Z</mi> <mrow> <mi>A</mi> <mn>3</mn> </mrow> </msub> <mo>=</mo> <mo>-</mo> <msqrt> <mrow> <msup> <mrow> <mo>&amp;lsqb;</mo> <msubsup> <mi>Y</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>&amp;rsqb;</mo> </mrow> <mn>2</mn> </msup> <mo>+</mo> <msup> <mrow> <mo>&amp;lsqb;</mo> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>&amp;rsqb;</mo> </mrow> <mn>2</mn> </msup> </mrow> </msqrt> <mo>&amp;lsqb;</mo> <mi>c</mi> <mi>o</mi> <mi>s</mi> <mrow> <mo>(</mo> <msub> <mi>&amp;theta;</mi> <mn>2</mn> </msub> <mo>+</mo> <msub> <mi>&amp;alpha;</mi> <mn>2</mn> </msub> <mo>)</mo> </mrow> <mo>-</mo> <mi>c</mi> <mi>o</mi> <mi>s</mi> <mrow> <mo>(</mo> <msub> <mi>&amp;alpha;</mi> <mn>2</mn> </msub> <mo>)</mo> </mrow> <mo>&amp;rsqb;</mo> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>9</mn> <mo>)</mo> </mrow> </mrow>
    <mrow> <msub> <mi>&amp;alpha;</mi> <mn>2</mn> </msub> <mo>=</mo> <mo>-</mo> <mi>arctan</mi> <mfrac> <msubsup> <mi>Y</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> </mfrac> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>10</mn> <mo>)</mo> </mrow> </mrow>
    Step 3.4 six-degree-of-freedom parallel connection mechanism is rotated around y-axis, rotation angle θ1So that after adjustmentLine and yz Plane is parallel, the kinematic matrix such as formula (11) of six-degree-of-freedom parallel connection mechanism：
    <mrow> <msub> <mi>T</mi> <mrow> <mi>A</mi> <mn>4</mn> </mrow> </msub> <mo>=</mo> <mfenced open = "[" close = "]"> <mtable> <mtr> <mtd> <mrow> <mi>c</mi> <mi>o</mi> <mi>s</mi> <mrow> <mo>(</mo> <mo>-</mo> <msub> <mi>&amp;theta;</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> </mrow> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mrow> <mi>s</mi> <mi>i</mi> <mi>n</mi> <mrow> <mo>(</mo> <mo>-</mo> <msub> <mi>&amp;theta;</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> </mrow> </mtd> <mtd> <mn>0</mn> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> </mtr> <mtr> <mtd> <mrow> <mo>-</mo> <mi>s</mi> <mi>i</mi> <mi>n</mi> <mrow> <mo>(</mo> <mo>-</mo> <msub> <mi>&amp;theta;</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> </mrow> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mrow> <mi>c</mi> <mi>o</mi> <mi>s</mi> <mrow> <mo>(</mo> <mo>-</mo> <msub> <mi>&amp;theta;</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> </mrow> </mtd> <mtd> <mn>0</mn> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> </mtr> </mtable> </mfenced> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>11</mn> <mo>)</mo> </mrow> </mrow>
    θ1For lens axisWith the x-axis of tuningout coordinate system formed by angle, calculation formula such as (12)：
    <mrow> <msub> <mi>tan&amp;theta;</mi> <mn>1</mn> </msub> <mo>=</mo> <mfrac> <mrow> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>-</mo> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> </mrow> <mrow> <msubsup> <mi>X</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>-</mo> <msubsup> <mi>X</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> </mrow> </mfrac> <mo>=</mo> <mfrac> <mrow> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>2</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>-</mo> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> </mrow> <mrow> <mo>-</mo> <msubsup> <mi>X</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> </mrow> </mfrac> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>12</mn> <mo>)</mo> </mrow> </mrow>
    Step 3.5 is moved along x, z-axis, and x-axis direction adjustment amount isZ-axis direction adjustment amount is-Δ ZA5；Allow the 5th time and adjust AfterwardsLine is overlapped with z-axis, and is allowedReturn toThe position of point, the kinematic matrix of six-degree-of-freedom parallel connection mechanism is such as Formula (13)：
    <mrow> <msub> <mi>T</mi> <mrow> <mi>A</mi> <mn>5</mn> </mrow> </msub> <mo>=</mo> <mfenced open = "[" close = "]"> <mtable> <mtr> <mtd> <mn>1</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mrow> <mo>-</mo> <msubsup> <mi>X</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>4</mn> <mo>)</mo> </mrow> </msubsup> </mrow> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> <mtd> <mrow> <mo>-</mo> <msub> <mi>&amp;Delta;Z</mi> <mrow> <mi>A</mi> <mn>5</mn> </mrow> </msub> </mrow> </mtd> </mtr> <mtr> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>0</mn> </mtd> <mtd> <mn>1</mn> </mtd> </mtr> </mtable> </mfenced> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>13</mn> <mo>)</mo> </mrow> </mrow>
    -ΔZA5Calculation formula such as (14)：
    <mrow> <mo>-</mo> <msub> <mi>&amp;Delta;Z</mi> <mrow> <mi>A</mi> <mn>5</mn> </mrow> </msub> <mo>=</mo> <msqrt> <mrow> <msup> <mrow> <mo>&amp;lsqb;</mo> <msubsup> <mi>X</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>&amp;rsqb;</mo> </mrow> <mn>2</mn> </msup> <mo>+</mo> <msup> <mrow> <mo>&amp;lsqb;</mo> <msubsup> <mi>Z</mi> <msub> <mi>O</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </msubsup> <mo>&amp;rsqb;</mo> </mrow> <mn>2</mn> </msup> </mrow> </msqrt> <mo>&amp;lsqb;</mo> <mi>c</mi> <mi>o</mi> <mi>s</mi> <mrow> <mo>(</mo> <msub> <mi>&amp;theta;</mi> <mn>1</mn> </msub> <mo>+</mo> <msub> <mi>&amp;alpha;</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>-</mo> <mi>c</mi> <mi>o</mi> <mi>s</mi> <mrow> <mo>(</mo> <msub> <mi>&amp;alpha;</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>&amp;rsqb;</mo> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>14</mn> <mo>)</mo> </mrow> </mrow>
  10. 10. a kind of six-freedom parallel automatic deflection adjusting system towards optical mirror slip as claimed in claim 1, its feature exist In：The implementation process of the automatic deflection adjusting system, includes the following steps：
    Step I, equipment will ensure the concentricity of " autocollimator, lower air-float turntable shaft, upper air-float turntable shaft " 3 when installing Within micron；
    Step II, z-axis displacement platform rise, and automatic deflection adjusting module is put and is lifted easy to place lens barrel；
    Step III, lens barrel is placed on four-dimensional adjustment platform and with lens barrel fixture clamping；
    Step IV, adjusts the position of amesdial measuring mechanism, amesdial and lower amesdial is directed toward the rotation of lower air-float turntable Axis, and allow two amesdials to contact lens barrel outer surface at the same time, prepare the circle run-out tolerance of measurement lens barrel；
    Step V, lower air-float turntable rotate one week, and the lens barrel outer contour run-out tolerance measured according to two amesdials is fitted mirror Cylinder axis, analyzes the drift angle of lens barrel axis in space；
    Step VI, by adjusting the two straight-line displacement platforms and a leveling platform of four-dimensional adjustment platform, makes lens barrel axis be adjusted with automatic The benchmark overlapping of axles of inclined system；
    Step VII, pneumatic suction head start to work, manually eyeglass are placed at pneumatic suction head and is adsorbed；
    Step VIII, using automatic deflection adjusting method, first time tuningout is completed to eyeglass；
    Step IX, measurement center of lens sees whether meet required precision partially, if center is partially still larger, beyond wanting for precision Ask, then repeat step VIII；If center has met required precision partially, continue step X；
    Step X, z-axis displacement platform decline, slowly eyeglass are put into lens barrel, when six degree of freedom force snesor has detected eyeglass During through touching spacer ring, stop motion immediately；
    Step XI, is manually smeared ultraviolet photo-curing bonding agent using dispenser on eyeglass circumference, is consolidated using ultraviolet illumination Change, fixing len；Automatic deflection adjusting module moves up, and prepares to install next eyeglass；
    So far, from step I to step XI, a kind of reality of the six-freedom parallel automatic deflection adjusting system towards optical mirror slip is completed Apply process.
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CN111193182A (en) * 2020-01-08 2020-05-22 联耀光学(深圳)有限公司 Multi-single-tube semiconductor laser coupled single-core optical fiber assembling and adjusting device
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CN111895924A (en) * 2020-07-15 2020-11-06 广州精点科技有限公司 Automatic lens thickness measuring device
CN113917644A (en) * 2021-10-29 2022-01-11 中国科学院光电技术研究所 Lens six-degree-of-freedom micro-motion platform
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