CN107946384B - 一种硅-pedot:pss杂化太阳能电池及其制备方法 - Google Patents

一种硅-pedot:pss杂化太阳能电池及其制备方法 Download PDF

Info

Publication number
CN107946384B
CN107946384B CN201711220995.2A CN201711220995A CN107946384B CN 107946384 B CN107946384 B CN 107946384B CN 201711220995 A CN201711220995 A CN 201711220995A CN 107946384 B CN107946384 B CN 107946384B
Authority
CN
China
Prior art keywords
pedot
pss
type silicon
silicon
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201711220995.2A
Other languages
English (en)
Other versions
CN107946384A (zh
Inventor
赵红英
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangxi Xinjiayi Integrated Technology Co ltd
Original Assignee
Suzhou Asia Ao Xin Enterprise Management Consulting Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Asia Ao Xin Enterprise Management Consulting Co Ltd filed Critical Suzhou Asia Ao Xin Enterprise Management Consulting Co Ltd
Priority to CN201711220995.2A priority Critical patent/CN107946384B/zh
Publication of CN107946384A publication Critical patent/CN107946384A/zh
Application granted granted Critical
Publication of CN107946384B publication Critical patent/CN107946384B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035272Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
    • H01L31/035281Shape of the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)

Abstract

本发明涉及一种硅‑PEDOT:PSS杂化太阳能电池及其制备方法,用以提高硅‑PEDOT:PSS杂化太阳能电池的光电转换效率。硅‑PEDOT:PSS杂化太阳能电池的制作方法包括:硅基底的清洗;硅基底的表面钝化处理;硅纳米线/PEDOT:PSS复合膜的制备;PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层的制备;背面界面层的制备;正面银栅电极的制备;背面电极的制备。

Description

一种硅-PEDOT:PSS杂化太阳能电池及其制备方法
技术领域
本发明涉及太阳能电池技术领域,特别是涉及一种硅-PEDOT:PSS杂化太阳能电池及其制备方法。
背景技术
无机太阳电池因其造价过于昂贵,而无法得到大规模的应用。有机太阳能电池由于其材料便宜、退火温度低、制作过程简单等优势而有希望降低太阳能电池的生产成本,然而有机太阳能电池的效率远低于无机太阳能电池。因此基于无机和有机半导体材料的有机无机杂化太阳能电池越来越受到了人们的青睐,它提供了一种既可以简化制造步骤又可以降低成本的生产技术。无机材料与有机材料相比,它最大的优势为载流子迁移率高,材料的载流子迁移率高则意味着其平均自由程长,可以有效减少电子-空穴对的复合几率。而对于有机材料,电子迁移率一般较低,在电子输运过程损失严重,因而有机光伏电池的光电转化效率较低。有机无机杂化太阳能电池可以结合有机材料和无机材料的优势,避免各自的缺陷,以得到较高的光电转换效率。
发明内容
本发明的目的是克服上述现有技术的不足,提供一种硅-PEDOT:PSS杂化太阳能电池及其制备方法。
为实现上述目的,本发明提出的一种硅-PEDOT:PSS杂化太阳能电池的制备方法,包括以下步骤:(1)硅基底的清洗:将n型硅片依次在丙酮、乙醇、去离子水中超声清洗10-30分钟,并用氮气吹干,接着将吹干的n型硅片置于浓硫酸/双氧水混合溶液中,100-120℃下热处理40-60分钟,接着用去离子水冲洗n型硅片,最后利用氢氟酸去除所述n型硅片的表面的自然氧化硅层;(2)硅基底的表面钝化处理:将步骤1得到n型硅片用氮气吹干,然后浸入饱和五氯化磷的氯苯溶液中,在110℃下热处理40-60分钟,接着将n型硅片从饱和五氯化磷的氯苯溶液中取出并依次在氯苯和四氢呋喃中清洗,接着将n型硅片放置于甲基氯化镁的四氢呋喃溶液中,以在n型硅片表面形成硅-甲基钝化层;(3)硅纳米线/PEDOT:PSS复合膜的制备:在步骤2得到的n型硅片的正面旋涂含有n型硅纳米线的PEDOT:PSS溶液,转速为1000-2000转/分钟,旋涂时间为2-4分钟,然后置于氮气氛围中进行退火处理,退化温度为110-120℃,退火时间为12-20分钟,形成致密的硅纳米线/PEDOT:PSS复合膜;(4)PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层的制备:在硅纳米线/PEDOT:PSS复合膜表面旋涂含有硫化亚铜纳米颗粒和氧化石墨烯的PEDOT:PSS溶液;转速为1000-2000转/分钟,旋涂时间为2-4分钟,然后置于氮气氛围中进行退火处理,退化温度为100-120℃,退火时间为5-15分钟,形成致密的PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层;(5)背面界面层的制备:在所述n型硅片背面沉积氟化锂薄膜,接着旋涂聚乙烯亚胺溶液,然后置于氮气氛围中进行退火处理,退化温度为100-110℃,退火时间为10-20分钟,以形成氟化锂/聚乙烯亚胺复合背面界面层;(6)正面银栅电极的制备:在真空环境下利用热蒸镀法,在n型硅片正面蒸镀正面银栅电极;(7)背面电极的制备:在真空环境下利用热蒸镀法,在n型硅片背面蒸镀背面铝电极。
作为优选,在所述步骤3中,在所述步骤3中,所述n型硅纳米线的长度为200-400nm,所述n型硅纳米线的直径为10-40nm,所述硅纳米线/PEDOT:PSS复合膜的厚度为50-90纳米。
作为优选,所述含有n型硅纳米线的PEDOT:PSS溶液的制备方法为:采用金属离子辅助化学刻蚀法在n型硅基底的上表面制备n型硅纳米线阵列,然后利用刀片将n型硅纳米线阵列刮入PEDOT:PSS溶液中,以形成所述含有n型硅纳米线的PEDOT:PSS溶液。
作为优选,在所述步骤4中,所述硫化亚铜纳米颗粒的粒径为10-30nm,所述PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层的厚度为20-40nm。
作为优选,在所述步骤5中,所述氟化锂薄膜的厚度为0.5-2纳米,旋涂聚乙烯亚胺溶液的转速为1000-3000转/分钟,旋涂时间为2-5分钟,所述聚乙烯亚胺溶液的质量浓度为0.2-0.4mg/ml。
作为优选,所述正面银栅电极的厚度为100-200纳米,所述正面银栅电极中的主栅线的宽度为0.3-0.7mm,副栅线的宽度为0.05mm,相邻副栅线之间的间隔为0.95mm。
作为优选,所述背面铝电极的厚度为200-300nm。
本发明还提供了一种硅-PEDOT:PSS杂化太阳能电池,所述硅-PEDOT:PSS杂化太阳能电池为采用上述方法制备形成的硅-PEDOT:PSS杂化太阳能电池。
本发明与现有技术相比具有下列优点:
(1)本发明通过对n型硅片的表面缺陷态进行最大限度的修复,以得到高质量的异质结,以提高硅-PEDOT:PSS杂化太阳能电池的光电转换效率。
(2)本发明的n型硅片表面具有硅纳米线/PEDOT:PSS复合膜,一部分PEDOT:PSS形成异质结的同时,另一部分PEDOT:PSS与n型硅纳米线形成高质量的异质结,有效提高了硅与PEDOT:PSS的接触面积,同时由于n型硅纳米线的随机排列,可以将电子有效传输至n型硅片,进而提高其光电转换效率。
(3)本发明的硅纳米线/PEDOT:PSS复合膜表面具有PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层,通过添加氧化石墨烯和硫化亚铜纳米颗粒,从而提高复合导电层的导电率,并通过优化硫化亚铜纳米颗粒的粒径,使得复合导电层保持优异导电率的同时也具有优异的透光率,而氧化石墨烯的存在提高了PEDOT:PSS的功函,有利于电池中载流子的分离与传输,进而提高太阳能电池的开路电压和填充因子。
(4)本发明在背面铝电极与N型硅片之间设置了氟化锂/聚乙烯亚胺复合背面界面层,氟化锂与聚乙烯亚胺的配合作用,有效降低接触电阻,增强内建电势,改善背接触以抑制电荷复合。
(5)本发明使用简单的、低温的过程制备硅-PEDOT:PSS杂化太阳能电池,有效降低生产成本的同时得到一高光电转换效率的硅-PEDOT:PSS杂化太阳能电池。
附图说明
图1为本发明的硅-PEDOT:PSS杂化太阳能电池的结构示意图;
图中:1、n型硅片;2、硅-甲基钝化层;3、硅纳米线/PEDOT:PSS复合膜;4、PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层;5、氟化锂/聚乙烯亚胺复合背面界面层;6、正面银栅电极;7、背面铝电极。
具体实施方式
本发明具体实施例提出的一种硅-PEDOT:PSS杂化太阳能电池的制备方法,包括以下步骤:(1)硅基底的清洗:将n型硅片依次在丙酮、乙醇、去离子水中超声清洗10-30分钟,并用氮气吹干,接着将吹干的n型硅片置于浓硫酸/双氧水混合溶液中,100-120℃下热处理40-60分钟,接着用去离子水冲洗n型硅片,最后利用氢氟酸去除所述n型硅片的表面的自然氧化硅层;(2)硅基底的表面钝化处理:将步骤1得到n型硅片用氮气吹干,然后浸入饱和五氯化磷的氯苯溶液中,在110℃下热处理40-60分钟,接着将n型硅片从饱和五氯化磷的氯苯溶液中取出并依次在氯苯和四氢呋喃中清洗,接着将n型硅片放置于甲基氯化镁的四氢呋喃溶液中,以在n型硅片表面形成硅-甲基钝化层;(3)硅纳米线/PEDOT:PSS复合膜的制备:在步骤2得到的n型硅片的正面旋涂含有n型硅纳米线的PEDOT:PSS溶液,转速为1000-2000转/分钟,旋涂时间为2-4分钟,然后置于氮气氛围中进行退火处理,退化温度为110-120℃,退火时间为12-20分钟,形成致密的硅纳米线/PEDOT:PSS复合膜;(4)PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层的制备:在硅纳米线/PEDOT:PSS复合膜表面旋涂含有硫化亚铜纳米颗粒和氧化石墨烯的PEDOT:PSS溶液;转速为1000-2000转/分钟,旋涂时间为2-4分钟,然后置于氮气氛围中进行退火处理,退化温度为100-120℃,退火时间为5-15分钟,形成致密的PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层;(5)背面界面层的制备:在所述n型硅片背面沉积氟化锂薄膜,接着旋涂聚乙烯亚胺溶液,然后置于氮气氛围中进行退火处理,退化温度为100-110℃,退火时间为10-20分钟,以形成氟化锂/聚乙烯亚胺复合背面界面层;(6)正面银栅电极的制备:在真空环境下利用热蒸镀法,在n型硅片正面蒸镀正面银栅电极;(7)背面电极的制备:在真空环境下利用热蒸镀法,在n型硅片背面蒸镀背面铝电极。
其中,在所述步骤3中,在所述步骤3中,所述n型硅纳米线的长度为200-400nm,所述n型硅纳米线的直径为10-40nm,所述硅纳米线/PEDOT:PSS复合膜的厚度为50-90纳米。所述含有n型硅纳米线的PEDOT:PSS溶液的制备方法为:采用金属离子辅助化学刻蚀法在n型硅基底的上表面制备n型硅纳米线阵列,然后利用刀片将n型硅纳米线阵列刮入PEDOT:PSS溶液中,以形成所述含有n型硅纳米线的PEDOT:PSS溶液。在所述步骤4中,所述硫化亚铜纳米颗粒的粒径为10-30nm,所述PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层的厚度为20-40nm。在所述步骤5中,所述氟化锂薄膜的厚度为0.5-2纳米,旋涂聚乙烯亚胺溶液的转速为1000-3000转/分钟,旋涂时间为2-5分钟,所述聚乙烯亚胺溶液的质量浓度为0.2-0.4mg/ml。所述正面银栅电极的厚度为100-200纳米,所述正面银栅电极中的主栅线的宽度为0.3-0.7mm,副栅线的宽度为0.05mm,相邻副栅线之间的间隔为0.95mm。所述背面铝电极的厚度为200-300nm。
如图1所示,本发明根据上述方法制备的硅-PEDOT:PSS杂化太阳能电池,所述硅-PEDOT:PSS杂化太阳能电池从下至上背面铝电极7、氟化锂/聚乙烯亚胺复合背面界面层5、n型硅片1、硅-甲基钝化层2、硅纳米线/PEDOT:PSS复合膜3、PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层4以及正面银栅电极6。
实施例1:
一种硅-PEDOT:PSS杂化太阳能电池的制备方法,包括以下步骤:(1)硅基底的清洗:将n型硅片依次在丙酮、乙醇、去离子水中超声清洗20分钟,并用氮气吹干,接着将吹干的n型硅片置于浓硫酸/双氧水混合溶液中,110℃下热处理50分钟,接着用去离子水冲洗n型硅片,最后利用氢氟酸去除所述n型硅片的表面的自然氧化硅层;(2)硅基底的表面钝化处理:将步骤1得到n型硅片用氮气吹干,然后浸入饱和五氯化磷的氯苯溶液中,在110℃下热处理60分钟,接着将n型硅片从饱和五氯化磷的氯苯溶液中取出并依次在氯苯和四氢呋喃中清洗,接着将n型硅片放置于甲基氯化镁的四氢呋喃溶液中,以在n型硅片表面形成硅-甲基钝化层;(3)硅纳米线/PEDOT:PSS复合膜的制备:在步骤2得到的n型硅片的正面旋涂含有n型硅纳米线的PEDOT:PSS溶液,转速为2000转/分钟,旋涂时间为2分钟,然后置于氮气氛围中进行退火处理,退化温度为115℃,退火时间为15分钟,形成致密的硅纳米线/PEDOT:PSS复合膜;(4)PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层的制备:在硅纳米线/PEDOT:PSS复合膜表面旋涂含有硫化亚铜纳米颗粒和氧化石墨烯的PEDOT:PSS溶液;转速为1500转/分钟,旋涂时间为3分钟,然后置于氮气氛围中进行退火处理,退化温度为110℃,退火时间为12分钟,形成致密的PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层;(5)背面界面层的制备:在所述n型硅片背面沉积氟化锂薄膜,接着旋涂聚乙烯亚胺溶液,然后置于氮气氛围中进行退火处理,退化温度为110℃,退火时间为15分钟,以形成氟化锂/聚乙烯亚胺复合背面界面层;(6)正面银栅电极的制备:在真空环境下利用热蒸镀法,在n型硅片正面蒸镀正面银栅电极;(7)背面电极的制备:在真空环境下利用热蒸镀法,在n型硅片背面蒸镀背面铝电极。
其中,在所述步骤3中,在所述步骤3中,所述n型硅纳米线的长度为300nm,所述n型硅纳米线的直径为20nm,所述硅纳米线/PEDOT:PSS复合膜的厚度为60纳米。所述含有n型硅纳米线的PEDOT:PSS溶液的制备方法为:采用金属离子辅助化学刻蚀法在n型硅基底的上表面制备n型硅纳米线阵列,然后利用刀片将n型硅纳米线阵列刮入PEDOT:PSS溶液中,以形成所述含有n型硅纳米线的PEDOT:PSS溶液。在所述步骤4中,所述硫化亚铜纳米颗粒的粒径为20nm,所述PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层的厚度为30nm。在所述步骤5中,所述氟化锂薄膜的厚度为1纳米,旋涂聚乙烯亚胺溶液的转速为2000转/分钟,旋涂时间为4分钟,所述聚乙烯亚胺溶液的质量浓度为0.2mg/ml。所述正面银栅电极的厚度为120纳米,所述正面银栅电极中的主栅线的宽度为0.5mm,副栅线的宽度为0.05mm,相邻副栅线之间的间隔为0.95mm。所述背面铝电极的厚度为260nm。
将上述方法制备的硅-PEDOT:PSS杂化太阳能电池,通过各层之间的配合作用,该硅-PEDOT:PSS杂化太阳能电池的开路电压为0.59V,短路电流为29.5mA/cm2,填充因子为0.75,光电转换效率为13.1%。
以上所述是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也视为本发明的保护范围。

Claims (8)

1.一种硅-PEDOT:PSS杂化太阳能电池的制备方法,其特征在于:包括以下步骤:
(1)硅基底的清洗:将n型硅片依次在丙酮、乙醇、去离子水中超声清洗10-30分钟,并用氮气吹干,接着将吹干的n型硅片置于浓硫酸/双氧水混合溶液中,100-120℃下热处理40-60分钟,接着用去离子水冲洗n型硅片,最后利用氢氟酸去除所述n型硅片的表面的自然氧化硅层;
(2)硅基底的表面钝化处理:将步骤1得到n型硅片用氮气吹干,然后浸入饱和五氯化磷的氯苯溶液中,在110℃下热处理40-60分钟,接着将n型硅片从饱和五氯化磷的氯苯溶液中取出并依次在氯苯和四氢呋喃中清洗,接着将n型硅片放置于甲基氯化镁的四氢呋喃溶液中,以在n型硅片表面形成硅-甲基钝化层;
(3)硅纳米线/PEDOT:PSS复合膜的制备:在步骤2得到的n型硅片的正面旋涂含有n型硅纳米线的PEDOT:PSS溶液,转速为1000-2000转/分钟,旋涂时间为2-4分钟,然后置于氮气氛围中进行退火处理,退化温度为110-120℃,退火时间为12-20分钟,形成致密的硅纳米线/PEDOT:PSS复合膜;
(4)PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层的制备:在硅纳米线/PEDOT:PSS复合膜表面旋涂含有硫化亚铜纳米颗粒和氧化石墨烯的PEDOT:PSS溶液;转速为1000-2000转/分钟,旋涂时间为2-4分钟,然后置于氮气氛围中进行退火处理,退化温度为100-120℃,退火时间为5-15分钟,形成致密的PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层;
(5)背面界面层的制备:在所述n型硅片背面沉积氟化锂薄膜,接着旋涂聚乙烯亚胺溶液,然后置于氮气氛围中进行退火处理,退化温度为100-110℃,退火时间为10-20分钟,以形成氟化锂/聚乙烯亚胺复合背面界面层;
(6)正面银栅电极的制备:在真空环境下利用热蒸镀法,在n型硅片正面蒸镀正面银栅电极;
(7)背面电极的制备:在真空环境下利用热蒸镀法,在n型硅片背面蒸镀背面铝电极。
2.根据权利要求1所述的硅-PEDOT:PSS杂化太阳能电池的制备方法,其特征在于:在所述步骤3中,所述n型硅纳米线的长度为200-400 nm,所述n型硅纳米线的直径为10-40nm,所述硅纳米线/PEDOT:PSS复合膜的厚度为50-90纳米。
3.根据权利要求2所述的硅-PEDOT:PSS杂化太阳能电池的制备方法,其特征在于:所述含有n型硅纳米线的PEDOT:PSS溶液的制备方法为:采用金属离子辅助化学刻蚀法在n型硅基底的上表面制备n型硅纳米线阵列,然后利用刀片将n型硅纳米线阵列刮入PEDOT:PSS溶液中,以形成所述含有n型硅纳米线的PEDOT:PSS溶液。
4.根据权利要求1所述的硅-PEDOT:PSS杂化太阳能电池的制备方法,其特征在于:在所述步骤4中,所述硫化亚铜纳米颗粒的粒径为10-30nm,所述PEDOT:PSS/硫化亚铜纳米颗粒/氧化石墨烯复合导电层的厚度为20-40nm。
5.根据权利要求1所述的硅-PEDOT:PSS杂化太阳能电池的制备方法,其特征在于:在所述步骤5中,所述氟化锂薄膜的厚度为0.5-2纳米,旋涂聚乙烯亚胺溶液的转速为1000-3000转/分钟,旋涂时间为2-5分钟,所述聚乙烯亚胺溶液的质量浓度为0.2-0.4 mg/ml。
6.根据权利要求1所述的硅-PEDOT:PSS杂化太阳能电池的制备方法,其特征在于:所述正面银栅电极的厚度为100-200纳米,所述正面银栅电极中的主栅线的宽度为0.3-0.7mm,副栅线的宽度为0.05mm,相邻副栅线之间的间隔为0.95mm。
7.根据权利要求1所述的硅-PEDOT:PSS杂化太阳能电池的制备方法,其特征在于:所述背面铝电极的厚度为200-300nm。
8.一种硅-PEDOT:PSS杂化太阳能电池,其特征在于,所述硅-PEDOT:PSS杂化太阳能电池为采用权利要求1-7任一项所述的方法制备形成的硅-PEDOT:PSS杂化太阳能电池。
CN201711220995.2A 2017-11-28 2017-11-28 一种硅-pedot:pss杂化太阳能电池及其制备方法 Active CN107946384B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711220995.2A CN107946384B (zh) 2017-11-28 2017-11-28 一种硅-pedot:pss杂化太阳能电池及其制备方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711220995.2A CN107946384B (zh) 2017-11-28 2017-11-28 一种硅-pedot:pss杂化太阳能电池及其制备方法

Publications (2)

Publication Number Publication Date
CN107946384A CN107946384A (zh) 2018-04-20
CN107946384B true CN107946384B (zh) 2019-06-14

Family

ID=61950499

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711220995.2A Active CN107946384B (zh) 2017-11-28 2017-11-28 一种硅-pedot:pss杂化太阳能电池及其制备方法

Country Status (1)

Country Link
CN (1) CN107946384B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108565341B (zh) * 2018-05-04 2021-07-16 宝德照明集团有限公司 一种硅异质结太阳能电池及其制备方法
CN108417719B (zh) * 2018-05-04 2021-08-24 苏州宝澜环保科技有限公司 一种硅基核壳结构光伏电池及其制备方法
CN108539027B (zh) * 2018-05-07 2021-04-27 苏州宝澜环保科技有限公司 一种有机无机杂化太阳能电池及其制备方法
CN108807679B (zh) * 2018-06-11 2021-12-03 贵溪穿越光电科技有限公司 一种Si-PEDOT:PSS有机无机杂化太阳能电池及其制备方法
CN109087967A (zh) * 2018-08-10 2018-12-25 暨南大学 一种氧化亚铜薄膜及其制备方法与应用

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013173082A (ja) * 2012-02-23 2013-09-05 Saitama Univ 有機薄膜の成膜方法とそれを用いて形成した太陽電池
CN103346260A (zh) * 2013-07-24 2013-10-09 苏州大学 有机薄膜钝化的有机-无机杂化太阳能电池及其制备方法
CN106784332A (zh) * 2017-02-04 2017-05-31 河南师范大学 一种PEDOT:PSS‑MoO3/硅纳米线阵列有机无机杂化太阳能电池的制备方法
CN106960895A (zh) * 2017-05-15 2017-07-18 江苏康德蛋业有限公司 一种用于畜牧养殖设备的透光盖板及其制备方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7605327B2 (en) * 2003-05-21 2009-10-20 Nanosolar, Inc. Photovoltaic devices fabricated from nanostructured template

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013173082A (ja) * 2012-02-23 2013-09-05 Saitama Univ 有機薄膜の成膜方法とそれを用いて形成した太陽電池
CN103346260A (zh) * 2013-07-24 2013-10-09 苏州大学 有机薄膜钝化的有机-无机杂化太阳能电池及其制备方法
CN106784332A (zh) * 2017-02-04 2017-05-31 河南师范大学 一种PEDOT:PSS‑MoO3/硅纳米线阵列有机无机杂化太阳能电池的制备方法
CN106960895A (zh) * 2017-05-15 2017-07-18 江苏康德蛋业有限公司 一种用于畜牧养殖设备的透光盖板及其制备方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Opto-electric investigation for Si/organic heterojunction single-nanowire;Zhenhai Yang等;《Scientific Report》;20171106;第7卷(第14575期);全文

Also Published As

Publication number Publication date
CN107946384A (zh) 2018-04-20

Similar Documents

Publication Publication Date Title
CN107946384B (zh) 一种硅-pedot:pss杂化太阳能电池及其制备方法
CN107946471B (zh) 一种基于硅纳米线阵列的异质结光伏电池及其制备方法
CN102263204B (zh) 一种有机-无机杂化太阳能电池及其制备方法
CN104993006B (zh) 一种过渡金属氧化物‑硅异质结太阳能电池及其制备方法
CN107994119B (zh) 一种有机无机杂化太阳能电池及其制备方法
CN107946470B (zh) 一种异质结太阳能电池及其制备方法
US20100078067A1 (en) Carbon nanotube film based solar cell and fabricating method thereof
CN105720197B (zh) 一种自驱动宽光谱响应硅基杂化异质结光电传感器及其制备方法
CN105405976B (zh) 一种高迁移率有机小分子掺杂的三元太阳能电池
CN104022224A (zh) 可溶液加工的平面异质结钙钛矿太阳电池及其制备方法
CN108172657B (zh) 一种黑硅太阳能电池及其制备方法
CN106601916B (zh) 基于异质结阴极缓冲层的有机太阳能电池及其制备方法
WO2019144335A1 (zh) 一种异质结光伏电池及其制备方法
CN104253222B (zh) 有机串联叠层太阳电池的中间连接层及构成的高效太阳电池
CN108539023B (zh) 基于联硼化合物修饰的钙钛矿型太阳能电池及其制备方法
CN106876595B (zh) 一种n型硅异质结太阳能电池及其制备方法
CN103367641A (zh) 以高功函石墨烯衍生物为中间层的有机太阳能电池及制备
Gao et al. High‐Efficiency Graphene‐Oxide/Silicon Solar Cells with an Organic‐Passivated Interface
CN101656278B (zh) 基于无序网状碳纳米管薄膜的太阳能微电池的制备方法
CN109851571B (zh) 一种共轭有机小分子界面修饰材料、制备方法及其构成的有机太阳电池
CN116782675A (zh) 一种钙钛矿太阳能电池及其制备方法
CN108011045B (zh) 一种硅微米柱阵列有机无机杂化太阳能电池及其制备方法
CN105261704A (zh) 碳骨架包覆的高稳定性有机薄膜太阳能电池及其制备方法
CN111883665B (zh) 一种通过在电荷传输层掺杂纳米粒子构建内部电场的有机太阳能电池及其制备方法
CN106449791B (zh) 一种石墨烯/砷化镓太阳电池的制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right
TA01 Transfer of patent application right

Effective date of registration: 20190521

Address after: 215311 No. 2 Dongping Road, Bacheng Town, Kunshan City, Suzhou, Jiangsu, China 2

Applicant after: SUZHOU YAAOXIN ENTERPRISE MANAGEMENT CONSULTING Co.,Ltd.

Address before: 528000 E6-8, Second Floor, Block C, Hongyi Building Materials City, Foshan City, Guangdong Province, North of Henan Industrial Avenue, Heya Village Committee, Chancheng District, Foshan City (Residence Declaration)

Applicant before: FOSHAN BAOYUEMEI TECHNOLOGY Co.,Ltd.

GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20231010

Address after: Room 309, Building 10, Youth Cloud Digital Economy Industrial Park, No. 122 Yishang Avenue, Yichun Economic and Technological Development Zone, Yichun City, Jiangxi Province, 336000

Patentee after: Jiangxi Xinjiayi Integrated Technology Co.,Ltd.

Address before: 215311 No. 2 Dongping Road, Bacheng Town, Kunshan City, Suzhou, Jiangsu, China 2

Patentee before: SUZHOU YAAOXIN ENTERPRISE MANAGEMENT CONSULTING Co.,Ltd.