CN107943128B - 一种多自由度的音圈隔振抑振结构及其控制方法 - Google Patents
一种多自由度的音圈隔振抑振结构及其控制方法 Download PDFInfo
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- CN107943128B CN107943128B CN201711422441.0A CN201711422441A CN107943128B CN 107943128 B CN107943128 B CN 107943128B CN 201711422441 A CN201711422441 A CN 201711422441A CN 107943128 B CN107943128 B CN 107943128B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
- G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
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- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Vibration Prevention Devices (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
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CN107943128A CN107943128A (zh) | 2018-04-20 |
CN107943128B true CN107943128B (zh) | 2018-12-28 |
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CN108667206B (zh) * | 2018-05-15 | 2019-07-12 | 北京控制工程研究所 | 一种基于分离式双膜簧的智能挠性作动器 |
KR102601236B1 (ko) * | 2018-11-30 | 2023-11-13 | 주식회사 씨케이머티리얼즈랩 | 광대역 액추에이터 |
CN113588189A (zh) * | 2021-08-04 | 2021-11-02 | 重庆大学 | 一种磁悬浮式空间全自由度绝对位姿传感*** |
CN114233785A (zh) * | 2021-11-30 | 2022-03-25 | 沈阳航天新光集团有限公司 | 动力吸振装置 |
CN114608775B (zh) * | 2022-03-15 | 2024-04-30 | 中国科学院长春光学精密机械与物理研究所 | 一种基于粗精级驱动组件的支腿型多维微振动模拟器 |
CN114967777B (zh) * | 2022-05-04 | 2023-06-30 | 西北工业大学 | 一种基于音圈作动器的超静主动隔振平台及方法 |
CN115208124B (zh) * | 2022-09-16 | 2022-12-20 | 中国科学院宁波材料技术与工程研究所 | 一种集成主动阻尼的精密运动平台及其控制架构 |
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JPH1089403A (ja) * | 1996-09-10 | 1998-04-07 | Nikon Corp | 防振装置 |
CN102394548B (zh) * | 2011-09-22 | 2013-06-19 | 北京航空航天大学 | 一种音圈隔振/抑振结构及其控制方法 |
CN102820761A (zh) * | 2012-07-30 | 2012-12-12 | 北京航空航天大学 | 一种基于非线性膜簧的音圈作动器 |
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