CN107942553A - A kind of stabilising arrangement and its method of work, mechanical arm, display panel production equipment - Google Patents
A kind of stabilising arrangement and its method of work, mechanical arm, display panel production equipment Download PDFInfo
- Publication number
- CN107942553A CN107942553A CN201810003061.1A CN201810003061A CN107942553A CN 107942553 A CN107942553 A CN 107942553A CN 201810003061 A CN201810003061 A CN 201810003061A CN 107942553 A CN107942553 A CN 107942553A
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- China
- Prior art keywords
- mechanical arm
- jet
- nozzle
- displacement
- stabilising arrangement
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0008—Balancing devices
- B25J19/0012—Balancing devices using fluidic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Treatment Of Fiber Materials (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a kind of stabilising arrangement and its method of work, mechanical arm, display panel production equipment；The stabilising arrangement includes：Displacement sensor, controller, and it is arranged on the first jet of the end of mechanical arm, second nozzle；The first jet is located at the upper surface of the mechanical arm, and its jet direction is vertical with the upper surface of the mechanical arm；The second nozzle is located at the lower surface of the mechanical arm, and its jet direction is vertical with the lower surface of the mechanical arm；Institute's displacement sensors are used for the vertical direction displacement for detecting the mechanical arm, and trigger the controller and control the first jet or the second nozzle jet according to direction of displacement.The present invention can effectively reduce mechanical arm trembling in the handling process, substantially reduce the harmful effect caused by substrate of trembling, and reduction was trembled to stable dead time, effectively improve substrate yield, productive temp is reduced, improves mobility and production capacity, lifts product quality.
Description
Technical field
The present invention relates to display panel manufacturing technology field, particularly relates to a kind of stabilising arrangement and its method of work, machinery
Arm, display panel production equipment.
Background technology
As TFT-LCD Display Techniques are constantly progressive, in order to realize more economic cutting mode, the size of substrate is also got over
Come bigger.In the production process of display panel generation equipment, mechanical arm is inevitably used to larger-size substrate
Carried；When carrying, the vibration caused by the movement of mechanical arm causes the substrate of carrying many harmful effects, including：
Substrate dither be easy to cause stress damage, causes module panel product intensity to decline, in some instances it may even be possible to base in process of production
The direct fragmentation of plate, seriously affects yield and product quality；Particularly, need to be carried by mechanical arm after the complete photoresist glue of base plate coating
Vacuum drying is carried out when process to next equipment, and trembling so that photoresist glue is flowed at base plate recess for mechanical arm, makes
Into substrate surface photoresist glue uneven thickness one, significant impact is produced to product quality；Fluctuated in addition, mechanical arm trembles
Greatly, and substrate to be located at equipment gap smaller, need to wait for mechanical arm recover to smaller amplitude it is even static when could carry out substrate and take
Action is put, this waiting process need to spend 3~5s times, seriously affect productive temp and production mobility.
The content of the invention
In view of this, it is an object of the invention to propose a kind of stabilising arrangement and its method of work, mechanical arm, display panel
Production equipment, can effectively reduce mechanical arm trembling in displacement process, substantially reduce the bad shadow caused by substrate that trembles
Ring, reduction was trembled to stable dead time, effectively improved substrate yield, reduced productive temp, is improved mobility and production capacity, is carried
Rise product quality.
In a first aspect, the present invention provides a kind of stabilising arrangement, including：Displacement sensor, controller, and it is arranged on machine
First jet, the second nozzle of the end of tool arm；The first jet is located at the upper surface of the mechanical arm, and its jet direction
It is vertical with the upper surface of the mechanical arm；The second nozzle is located at the lower surface of the mechanical arm, and its jet direction and institute
The lower surface for stating mechanical arm is vertical；Institute's displacement sensors are used for the vertical direction displacement for detecting the mechanical arm, and trigger institute
State controller and the first jet or the second nozzle jet are controlled according to direction of displacement.
In some embodiments, the first jet and the second nozzle include the adjustable mouth of openings of sizes；
The controller is additionally operable to control the nozzle part opening size of the first jet or the second nozzle according to displacement.
In some embodiments, the nozzle part opening size of the first jet and the second nozzle is proportional to the machine
The vertical direction displacement of tool arm.
In some embodiments, the controller controls the first jet or the second nozzle according to displacement
Nozzle part opening size when, based on equation below：
S=(Cm+Cv)*Min-Max scaling(a)
Wherein, S is nozzle part opening area；A is the displacement of mechanical arm；Min-Max scaling are linear normalization
Function, for the displacement to be normalized；CmFor mechanical arm quality constant；CvIt is normal for mechanical arm transporting velocity
Number.
In some embodiments, the end of the mechanical arm is additionally provided with for carrying out stopping spacing protection to substrate
Head.
In some embodiments, the material of the protective head is rubber.
In some embodiments, the mechanical arm is internally provided with is connected with the first jet and the second nozzle
Gas transfer pipeline.
Second aspect, the present invention provides a kind of method of work of the stabilising arrangement described in as above any one, including：
The vertical direction displacement of the mechanical arm is detected by institute's displacement sensors；
The first jet or the second nozzle jet are controlled according to direction of displacement by the controller.
The third aspect, the present invention provides a kind of mechanical arm, including stabilising arrangement as described above.
Fourth aspect, the present invention provides a kind of display panel production equipment, including mechanical arm as described above.
From the above it can be seen that stabilising arrangement provided by the invention and its method of work, mechanical arm, display panel life
Equipment is produced, by setting displacement sensor and the nozzle with jet in mechanical arm tail end, when mechanical arm position during the motion
Displacement sensor real-time detection mechanical arm movement, when detecting mechanical arm tail end relative to main shaft upper and lower displacement (i.e. so-called to tremble)
When, displacement sensor trigger controller, controls nozzle to spray air-flow according to direction of displacement, and machine is maintained by the reaction force of air-flow
The balance of tool arm, so that mechanical arm keeps stablizing during whole board carrying.Technical scheme can be effective
Mechanical arm trembling in displacement process is reduced, substantially reduces the harmful effect caused by substrate of trembling, reduction is trembled to stabilization
Dead time, effectively improve substrate yield, reduce productive temp, improve mobility and production capacity, lift product quality.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, without creative efforts, can be with
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is mechanical arm mode of transport schematic diagram of the prior art；
Fig. 2 trembles process schematic for mechanical arm of the prior art；
Fig. 3 is the stabilising arrangement structure diagram of the embodiment of the present invention；
Fig. 4 is that the stabilising arrangement of the embodiment of the present invention moves up working state schematic representation；
Fig. 5 is that the stabilising arrangement of the embodiment of the present invention moves down working state schematic representation.
Embodiment
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
It should be noted that all statements for using " first " and " second " are for differentiation two in the embodiment of the present invention
The non-equal entity of a same names or non-equal parameter, it is seen that " first " " second " should not only for the convenience of statement
The restriction to the embodiment of the present invention is interpreted as, following embodiment no longer illustrates this one by one.
The embodiment of the present invention provides a kind of stabilising arrangement and its method of work, mechanical arm, display panel production equipment, is used for
Solve in the prior art, the existing shortcomings in carrying substrate process of the mechanical arm in display panel generation equipment.With reference to
Fig. 1 and Fig. 2, mechanical arm in the prior art is in carrying substrate, after the A points shown in Fig. 2 move to B points, mechanical arm 100
Upper and lower displacement (a trembling) movement relative to main shaft 110 can be produced, i.e., on reciprocal between position 1-1 and position 1-2
Bottom offset；Mechanical arm 100 is waited to recover that to stable state next action could be continued now it is necessary to be stagnated in B points, this mistake
3~5s is up to the time required to journey.Due to trembling for mechanical arm 100, many harmful effects can be produced to display panel production process,
Product quality is such as influenced, seriously affect productive temp and produces mobility.
In order to solve the above technical problems, an embodiment of the present invention provides a kind of stabilising arrangement, which is applied to aobvious
Show the mechanical arm in panel generation equipment.With reference to figure 3, the stabilising arrangement includes：Displacement sensor 1, controller 2, Yi Jishe
Put first jet 3, the second nozzle 4 in the end of mechanical arm 100.First jet 3 is located at the upper surface of mechanical arm 100, and its
Jet direction is vertical with the upper surface of mechanical arm 100.Second nozzle 4 is located at the lower surface of mechanical arm 100, and its jet direction with
The lower surface of mechanical arm 100 is vertical.In the embodiment of the present invention, the upper surface of mechanical arm 100 refers to for placing mechanical arm 100
Surface, and the lower surface of mechanical arm 100 then refers to the surface opposite with upper surface in the vertical direction.Displacement sensor 1 is used
In the displacement of 100 in the vertical direction of detection mechanical arm, it can judge that mechanical arm 100 is current whether in state of trembling, and
Determine current direction of displacement.When the judgement mechanical arm 100 of displacement sensor 1, which is currently at, trembles state, sent to controller 1
Signal, trigger controller 1 control 4 jet of first jet 3 or second nozzle according to direction of displacement accordingly, and anti-by air-flow makees
Mechanical arm 100 is firmly set to be in the horizontal level relative to main shaft 110 all the time, so as to prevent the generation that mechanical arm 100 trembles.
Specifically, with reference to figure 4, when displacement sensor 1 detects that mechanical arm 100 is currently at raised state, triggering control
Device 1 processed controls 3 upward jet of first jet (with reference to the direction of arrow in figure 4), makes mechanical arm 100 fast by the reaction force of air-flow
Speed returns to the horizontal level relative to main shaft 110.With reference to figure 5, when displacement sensor 1 detects that mechanical arm 100 is currently at down
During shifting state, trigger controller 1 controls 4 downward jet of second nozzle (with reference to the direction of arrow in figure 5), passes through the reaction of air-flow
Power makes mechanical arm 100 quickly return to the horizontal level relative to main shaft 110.In the practical work process of mechanical arm 100, first
Nozzle 3 and the meeting of second nozzle 4 cooperating syringe under the coordinative role of displacement sensor 1 and controller 2, in a dynamic equilibrium
Process, maintains horizontal level relative to main shaft 4 by mechanical arm 100 all the time, so that the movement of trembling of mechanical arm is thoroughly eliminated,
Effectively solve because mechanical arm tremble caused by harmful effect；And can carry out without waiting it is next pick and place action, reduce shake
Quiver to stable dead time (<1s), and mechanical arm translational speed can be improved, greatly speeds up production process, effectively improve substrate
Yield, reduces productive temp, improves mobility and production capacity, lifts product quality.
In an optional embodiment, first jet and second nozzle include the adjustable mouth of openings of sizes.Displacement
Sensor can also displacement of the detection mechanical arm when vertical direction is subjected to displacement, correspondingly, controller can also basis
Displacement controls the nozzle part opening size of first jet or second nozzle.Specifically, controller is in control first jet or the
During the nozzle part opening size of two nozzles, the nozzle part opening size of first jet and second nozzle is proportional to the vertical direction of mechanical arm
Displacement；It is corresponding so that spray namely when the displacement of mechanical arm is bigger, then the nozzle part opening of first jet or second nozzle is bigger
Tolerance bigger.
Further, when controller controls the nozzle part opening size of first jet or second nozzle according to displacement, base
In equation below：
S=(Cm+Cv)*Min-Max scaling(a)
In above-mentioned formula：S is nozzle part opening area, is characterized as the nozzle part opening size of first jet or second nozzle, right
Should be in the jet amount size of first jet or second nozzle.
A is the displacement of mechanical arm, is characterized as displacement when mechanical arm in the vertical direction trembles.
Min-Max scaling are linear normalization function, for the displacement to be normalized, specifically
, Min-Max scaling (a)=(a-amin)/(amax-amin).Wherein, amaxFor the maximum displacement of mechanical arm, aminIt is tactile
Send out the maximum displacement of the mechanical arm of the stabilising arrangement work of the present embodiment.Pass through normalized so that the displacement of mechanical arm
The value of size is in 0 to 1 section, the convenient nozzle part opening area for corresponding to first jet or second nozzle.
CmFor mechanical arm quality constant, preset according to the quality of the mechanical arm of practical application；CvCarried for mechanical arm
Velocity constant, presets according to the fixing speed of the mechanical arm carrying substrate of practical application.
In an optional embodiment, with reference to figure 3, Fig. 4, Fig. 5, the end of mechanical arm 100 is additionally provided with for base
Plate 200 carries out stopping spacing protective head 5.The protective head 5 of 100 end of mechanical arm is arranged on from 200 end position of substrate to it
Stop it is spacing, can effectively prevent in the handling process substrate 200 from 100 end of mechanical arm slide.In addition, protective head 5
It is arranged between first jet 3 and substrate 200, additionally it is possible to prevent that substrate 200 is moved to the top of first jet 3, so as to avoid
The high-speed gas that first jet 3 sprays blow off substrate 200.The material of protective head 5 is preferably rubber.
In an optional embodiment, with reference to figure 3, mechanical arm 100 is internally provided with and first jet 3 and second nozzle
The gas transfer pipeline 6 of 4 connections.6 one end of gas transfer pipeline is connected with a nozzle 3 and second nozzle 4, the other end and display surface
Source of the gas inside or outside plate production equipment is connected.Gas transfer pipeline 6 is arranged on the inside of mechanical arm 100, is effectively utilized
The inner space of mechanical arm 100, makes mechanical arm 100 not accounted on the whole after the stabilising arrangement there is provided the embodiment of the present invention
With unnecessary space, the space availability ratio of equipment is improved.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of steady as described in any one foregoing embodiment
Determine the method for work of device, comprise the following steps：
Step 1: the vertical direction displacement of the mechanical arm is detected by institute's displacement sensors；
Step 2: the first jet or the second nozzle jet are controlled according to direction of displacement by the controller.
The method of work of the present embodiment corresponds to corresponding stabilising arrangement in previous embodiment, and stablizes with corresponding
The beneficial effect of device embodiment, details are not described herein.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of mechanical arm, and the mechanical arm includes foregoing
Stabilising arrangement described in one embodiment of anticipating.By setting the stabilising arrangement of the embodiment of the present invention on the robotic arm, make the machine
Tool arm can effectively reduce trembling in handling process, substantially reduce the harmful effect caused by substrate of trembling, reduction tremble to
Stable dead time, effectively improves substrate yield, reduces productive temp, improves mobility and production capacity, lifts product quality.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of display panel production equipment, the display surface
Plate production equipment includes the mechanical arm described in previous embodiment.By setting stablizing for the embodiment of the present invention to fill on the robotic arm
Put, the mechanical arm is effectively reduced trembling in handling process, substantially reduce the harmful effect caused by substrate of trembling,
Those of ordinary skills in the art should understand that：The discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples；Under the thinking of the present invention, above example
Or can also be combined between the technical characteristic in different embodiments, step can be realized with random order, and be existed such as
Many other changes of the upper different aspect of the invention, for simplicity, they are not provided in details.
In addition, to simplify explanation and discussing, and in order not to obscure the invention, can in the attached drawing provided
To show or can not show that the known power ground with integrated circuit (IC) chip and other components is connected.Furthermore, it is possible to
Device is shown in block diagram form, to avoid obscuring the invention, and this have also contemplated that following facts, i.e., on this
The details of the embodiment of a little block diagram arrangements be the platform that height depends on implementing the present invention (that is, these details should
It is completely in the range of the understanding of those skilled in the art).Elaborating detail (for example, circuit) with the description present invention's
In the case of exemplary embodiment, it will be apparent to those skilled in the art that can be in these no details
In the case of or implement the present invention in the case that these details change.Therefore, these descriptions are considered as illustrating
It is property rather than restricted.
Although having been incorporated with specific embodiment of the invention, invention has been described, according to retouching above
State, many replacements of these embodiments, modifications and variations will be apparent for those of ordinary skills.Example
Such as, other memory architectures (for example, dynamic ram (DRAM)) can use discussed embodiment.
The embodiment of the present invention be intended to fall within the broad range of appended claims it is all it is such replace,
Modifications and variations.Therefore, within the spirit and principles of the invention, any omission, modification, equivalent substitution, the improvement made
Deng should all be included in the protection scope of the present invention.
Claims (10)
- A kind of 1. stabilising arrangement, it is characterised in that including：Displacement sensor, controller, and be arranged on the end of mechanical arm First jet, second nozzle；The first jet is located at the upper surface of the mechanical arm, and its jet direction and the mechanical arm Upper surface it is vertical；The second nozzle is located at the lower surface of the mechanical arm, and under its jet direction and the mechanical arm Surface is vertical；Institute's displacement sensors are used to detect the vertical direction displacement of the mechanical arm, and trigger the controller according to Direction of displacement controls the first jet or the second nozzle jet.
- 2. stabilising arrangement according to claim 1, it is characterised in that the first jet and the second nozzle include The adjustable mouth of openings of sizes；The controller is additionally operable to control the first jet or the second nozzle according to displacement Nozzle part opening size.
- 3. stabilising arrangement according to claim 2, it is characterised in that the mouth of the first jet and the second nozzle Openings of sizes is proportional to the vertical direction displacement of the mechanical arm.
- 4. stabilising arrangement according to claim 3, it is characterised in that the controller is according to displacement control described the During the nozzle part opening size of one nozzle or the second nozzle, based on equation below：S=(Cm+Cv)*Min-Max scaling(a)Wherein, S is nozzle part opening area；A is the displacement of mechanical arm；Min-Max scaling are linear normalization function, For the displacement to be normalized；CmFor mechanical arm quality constant；CvFor mechanical arm transporting velocity constant.
- 5. stabilising arrangement according to claim 1, it is characterised in that the end of the mechanical arm is additionally provided with for base Plate carries out stopping spacing protective head.
- 6. stabilising arrangement according to claim 5, it is characterised in that the material of the protective head is rubber.
- 7. stabilising arrangement according to claim 1, it is characterised in that the mechanical arm is internally provided with and the described first spray The gas transfer pipeline that mouth is connected with the second nozzle.
- A kind of 8. method of work of stabilising arrangement as described in claim 1 to 7 any one, it is characterised in that including：The vertical direction displacement of the mechanical arm is detected by institute's displacement sensors；The first jet or the second nozzle jet are controlled according to direction of displacement by the controller.
- 9. a kind of mechanical arm, it is characterised in that including the stabilising arrangement as described in claim 1 to 7 any one.
- 10. a kind of display panel production equipment, it is characterised in that including mechanical arm as claimed in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810003061.1A CN107942553B (en) | 2018-01-02 | 2018-01-02 | Stabilizing device, working method thereof, mechanical arm and display panel production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810003061.1A CN107942553B (en) | 2018-01-02 | 2018-01-02 | Stabilizing device, working method thereof, mechanical arm and display panel production equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107942553A true CN107942553A (en) | 2018-04-20 |
| CN107942553B CN107942553B (en) | 2020-05-22 |
Family
ID=61937311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810003061.1A Expired - Fee Related CN107942553B (en) | 2018-01-02 | 2018-01-02 | Stabilizing device, working method thereof, mechanical arm and display panel production equipment |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003266359A (en) * | 2002-03-08 | 2003-09-24 | Tatsumo Kk | Conveyance device having damping function |
| CN1543673A (en) * | 2001-08-20 | 2004-11-03 | ��ʽ���簲����� | Robot hand |
| CN1929108A (en) * | 2005-09-05 | 2007-03-14 | 东京毅力科创株式会社 | Conveying chamber, substrate processing device, and substrate disorder detection method |
| CN101190525A (en) * | 2006-11-22 | 2008-06-04 | 富士迈半导体精密工业（上海）有限公司 | Automatic correction mechanical arm |
| CN102017114A (en) * | 2008-04-25 | 2011-04-13 | 塞米西斯科株式会社 | Substrate quality tester |
| CN103273494A (en) * | 2013-05-21 | 2013-09-04 | 深圳市华星光电技术有限公司 | Liquid crystal displayer substrate carrying device and using method thereof |
-
2018
- 2018-01-02 CN CN201810003061.1A patent/CN107942553B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1543673A (en) * | 2001-08-20 | 2004-11-03 | ��ʽ���簲����� | Robot hand |
| JP2003266359A (en) * | 2002-03-08 | 2003-09-24 | Tatsumo Kk | Conveyance device having damping function |
| CN1929108A (en) * | 2005-09-05 | 2007-03-14 | 东京毅力科创株式会社 | Conveying chamber, substrate processing device, and substrate disorder detection method |
| CN101190525A (en) * | 2006-11-22 | 2008-06-04 | 富士迈半导体精密工业（上海）有限公司 | Automatic correction mechanical arm |
| CN102017114A (en) * | 2008-04-25 | 2011-04-13 | 塞米西斯科株式会社 | Substrate quality tester |
| CN103273494A (en) * | 2013-05-21 | 2013-09-04 | 深圳市华星光电技术有限公司 | Liquid crystal displayer substrate carrying device and using method thereof |
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| Publication number | Publication date |
|---|---|
| CN107942553B (en) | 2020-05-22 |
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Granted publication date: 20200522 Termination date: 20220102 |