CN107934908A - Nano materials and preparation method thereof - Google Patents
Nano materials and preparation method thereof Download PDFInfo
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- CN107934908A CN107934908A CN201710337940.3A CN201710337940A CN107934908A CN 107934908 A CN107934908 A CN 107934908A CN 201710337940 A CN201710337940 A CN 201710337940A CN 107934908 A CN107934908 A CN 107934908A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/04—Networks or arrays of similar microstructural devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/001—Bonding of two components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
- G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
Abstract
This application discloses a kind of nano materials, including Ecoflex transfer layers and multiple nm walls for being fixed on the Ecoflex transfer layers；Wherein, each nm wall includes one or more 1-dimention nano conductive structure and the Ecoflex materials by one or more conductive nano structure cladding as nm wall；Wherein, the 1-dimention nano conduction is generally vertical is fixed on the Ecoflex transfer layers；Wherein, in the case where the Ecoflex transfer layers are not stretched, the 1-dimention nano conductive structure in the adjacent nm wall outer surface is in contact with each other at one or more nodes.Disclosed herein as well is the method for preparing this nano materials and include the strain gauges of this nano materials.
Description
Technical field
This application involves nano materials field, more particularly to profit includes the nano materials and its system of Ecoflex
Preparation Method.
Background technology
Strain gauge is that a kind of change that mechanical deformation is converted into electrical characteristic (such as resistance or capacitance) carrys out perception
Change sensor.With the continuous development of sensor technology, strain gauge be used to detect the small-scale movement of human body,
Such as face, chest, neck are fluctuated in emotion, breathing, delicate movement when swallowing and speaking.These movement detections for
The damage of vocal cords is diagnosed, respiratory disease, angina pectoris, assesses bone spacing, determines the change of spine shape, detects Parkinson
Disease, measures posture and movement, analyze the change of facial expression and monitoring sclerosis of the skin all play the role of it is highly important.
To realize above-mentioned target well, strain gauge needs to have excellent tensility, and pliability is highly sensitive
Degree, High Linear, restorability, durability, quick reaction and resume speed, biocompatibility etc..
Resistance-type strain gauge is to be realized by the change of the detection resistance in sensor mechanism deformation to stress
Detection.Compared with piezoelectric type strain gauge and capacitance-type strain gauge force snesor, resistance-type strain gauge possesses the measurement of bigger
The sensitivity of scope and higher.However, due to resistance change and the non-linear dependence of stress so that by measuring resistance
Value change causes difficulty to obtain stress.Secondly, wide-measuring range is difficult in same device while deposits with high sensitivity
.
Traditional strain gauge is made by metal and silicon.These sensors possess inexpensive and technical maturity excellent
Gesture, but very poor pliability and tensility are often shown, the stress of measurement fixed-direction is only used for, and cannot be embedded in
Into substrate material.Therefore it is various to be based on new material, such as carbon nanotubes, graphene, metal nanometer line, nano particle
And the flexible extensible strain gauge of semi-conducting polymer is developed.
The content of the invention
This application provides a kind of nano materials, including Ecoflex transfer layers and it is fixed on the Ecoflex and turns
Move multiple nm walls on layer；Wherein, each nm wall includes one or more 1-dimention nano conductive structure and by institute
State Ecoflex material of the one or more conductive nano structure cladding as nm wall；Wherein, the 1-dimention nano is conductive basic
Vertical is fixed on the Ecoflex transfer layers；Wherein, in the case where the Ecoflex transfer layers are not stretched, phase
1-dimention nano conductive structure in the adjacent nm wall outer surface is in contact with each other at one or more nodes.
Particularly, the 1-dimention nano conductive structure includes carbon nanotubes, metal nanometer line or nanofiber.
Particularly, the length of the 1-dimention nano conductive structure is 5 to 50 microns.
Particularly, the thickness of the Ecoflex transfer layers is 5 to 50 microns.
Present invention also provides a kind of strain gauge to include foregoing any nano materials.
Include preparing on the first substrate present invention also provides a kind of method for preparing nano materials generally vertical
1-dimention nano conductive structure network；Uncured Ecoflex transfer layers are formed on the second substrate；The 1-dimention nano is led
Electric structural network is transferred on the Ecoflex transfer layers and the Ecoflex transfer layers is cured；And described in removing
First and second substrates, and form electrode on the Ecoflex transfer layers.
Particularly, the 1-dimention nano conductive structure includes carbon nanotubes, metal nanometer line or nanofiber；Described first
Substrate includes silicon substrate.
Particularly, the length of the 1-dimention nano conductive structure is 5 to 50 microns.
Particularly, the thickness of the Ecoflex transfer layers is 5 to 50 microns.
Particularly, second substrate includes PEN or PDMS material；The method be additionally included in second substrate and
Formed between the Ecoflex transfer layers one layer of cured Ecoflex connecting layer be used to being connected second substrate with it is described
Ecoflex transfer layers.
Hereinafter reference will be made to the drawings to the detailed description of the exemplary embodiment of the application.
Brief description of the drawings
It is combined in the description and the attached drawing of a part for constitution instruction shows embodiments herein, and even
It is used for the principle for explaining the application together with its explanation.
Fig. 1 a-1f show the process flow diagram that nano materials are prepared according to the application one embodiment；
Fig. 2 show the method flow diagram that nano materials are prepared using technological process shown in Fig. 1 a-1f；
Fig. 3 a-3g show the process flow diagram according to the application another embodiment preparation nano materials；
Fig. 4 show the method flow diagram that nano materials are prepared using technological process shown in Fig. 3 a-3g；
Fig. 5 show side section and vertical view SEM figures according to the nano materials of the application one embodiment；
Under conditions of Fig. 6 show according to the nano materials of the application one embodiment in tensionless winkler foundation and has a stretching
Vertical view SEM figure；
Fig. 7 show the conjunction prepared according to the long carbon nanotubes of 10 microns and 15 microns of the use of the application one embodiment
The curve map changed into the resistance variations ratio of nano material with level of stretch；
Fig. 8 show 10 microns and 15 microns of long carbon for having different densities according to the use of the application one embodiment
The curve map that nano materials resistance variations ratio prepared by nanotube changes with level of stretch；
Fig. 9 show the resistance variations ratios of nano materials prepared by the vertical carbon nano tube network of traditional use with
The curve map of level of stretch change；
Figure 10 show the resistance variations ratio according to the nano materials of the application one embodiment with drawing numbers
Variation diagram；And
Figure 11 show the change with temperature according to the resistance variations ratios of the nano materials of the application one embodiment
Change figure
Embodiment
Hereinafter reference will be made to the drawings each exemplary embodiment of the application is described in detail.It should be noted that unless in addition have
Body illustrates that the unlimited system of component and the positioned opposite of step, numerical expression and the numerical value otherwise illustrated in these embodiments is originally
The scope of application.
The description only actually at least one exemplary embodiment is illustrative to be never used as to the application below
And its application or any restrictions that use.
It may be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but suitable
In the case of, the technology, method and apparatus should be considered as part for specification.
In shown here and discussion all examples, any occurrence should be construed as merely exemplary, without
It is as limitation.Therefore, other examples of exemplary embodiment can have different values.
It should be noted that similar label and letter represent similar terms in following attached drawing, therefore, once a certain item exists
It is defined, then it need not be further discussed in subsequent attached drawing in one attached drawing.
Carbon nanotubes is easy to the substrate for being embedded into flexible extensible, becomes resistance because of its unique mechanically and electrically performance
One of ideal material of formula flexibility stress sensor.The existing carbon nano tube network for forming strain gauge is that plane is led mostly
Electric network, that is to say, that carbon nanotubes is often random distribution and direction, and hereby power mutually interconnects by Robert Van de Walle each other
Connect.Since this power is weaker, when exterior pulling force effect, phase can occur between the carbon nanotubes for being connected or being in contact originally
To slip, thus the connection between some carbon nanotubes, which will will disconnect, causes carbon nanotubes connection dot density and number of conductive paths
The reduction of amount, so as to cause resistance to increase, realizes the proportional relation of resistance and exterior tensile deformation.It is based on here it is common
The operation principle of the resistance-type strain gauge of carbon nanotubes.
However, in the structure of plane conductive network of carbon nanotubes, carbon nanotubes link node is under small pulled out condition
Number of fracture proportion shared in total nodal point number is much smaller than ratio of the number of fracture of the node under big stretching shared by remaining node
Example, consequently leads to not very sensitive to small stretching based on strain gauge prepared by plane conductive network of carbon nanotubes.Thus
The resistance of initiation and the non-linear dependence of strain also seriously limit the practicality of strain gauge.
Further, since the tensility of carbon nanotubes in itself only has 40%, less than traditional substrate material such as PDMS etc., because
This carbon nanotubes under big stretching may be pulled off or be produced relative sliding between substrate.The fracture of carbon nanotubes can be led
The irremediable increase of device resistance is caused, and opposite slide of carbon nanotubes and substrate can then cause carbon nanotubes to be discharged in pulling force
Fold or bending are produced afterwards, so as to also make resistance can not be returned to initial value.Therefore, the stress for being prepared using carbon nanotubes
For sensor, main challenge is exactly the restorability of device resistance and the sensitivity under small pulled out condition.
Vertical carbon nano tube network can solve the above problems to a certain extent.So-called vertical carbon nano tube network is exactly
Carbon nanotubes is fixed on substrate in substantially vertical manner.Certain those skilled in the art know, due to carbon nanotubes
Growth is realized by a series of physical chemical process, it is impossible to expects that every carbon nanotubes is all given birth in a manner of absolute vertical
Length on substrate, therefore is herein apt using generally vertical description.
In vertical carbon nano tube network, carbon nanotubes is by close to being fixed on substrate in other words with small in a manner of vertical
The angle tilt of angle is fixed on substrate, and conductive network of carbon nanotubes is formed with the carbon nanotubes of surrounding.Therefore, even if small
Under pulled out condition, carbon nanotubes can also be moved with flexible substrate, cause substantial amounts of node to disconnect, and with substrate such as PDMS's
Stretching, carbon nanotubes are thinned out, and the number that node caused by equal length stretching is lower disconnects diminishes, but remaining number of network nodes also exists
Tail off, therefore the ratio for causing disconnected node number to account for remaining nodal point number is stablized relatively.
But this vertical carbon nanotube network is also problematic.Due to the frictional force between adjacent carbon nanotubes
Hereby power etc. interacts with Robert Van de Walle, limits carbon nanotubes and is moved in stretching and release with substrate, when causing stretching
Sensitivity (Gauge Factor, abbreviation GF) is unable to reach the desirable level of GF=7, can only achieve GF=2 or so.In addition,
After stretching release, resistance can not also recover initial value.
In order to solve this problem, researcher in this field has attempted many different substrates, but all can not
Find good alternative material.
Ecoflex is the silicone of the platinum catalysis produced by Smooth-On companies, is that one kind simply possesses multiduty
Silica gel material.It is usually used to and prepares prosthese or mask.Present inventor has found that Ecoflex is a kind of non-by research
Often soft polymeric material, its Young's modulus is 125kPa, similar with the pliability of human skin.It is existing compared to other
Material such as PDMS, can realize enough high caking ability between Ecoflex and carbon nanotubes.Ecoflex also has extraordinary
Ductility,
Its degree of stretch can be up to 900%, therefore be highly suitable for preparing and be used for such as strain gauge or pressure
Sensor or even the nano materials of triboelectricity, optical signal transmission or flexible solar structure.In addition, as remembering above
Carry, Ecoflex is a kind of polymer relative to ambient stable, and good waterproof performance, being suitable for long-term sensing should
With.Importantly, by experiment present inventor obtained it is a kind of by Ecoflex and one-dimensional electric nano material for example
The special material of carbon nanotubes synthesis, this material are very suitable for for preparing the device such as strain gauge or pressure sensor
Part.
The application is described in detail with reference to the accompanying drawings and examples.
Fig. 1 a-1f are the process flow diagram that nano materials are prepared according to the application one embodiment.Fig. 2 is root
The method flow diagram of nano materials is prepared according to the technological process of Fig. 1 introductions.
In step 202, as shown in Figure 1a, vertical carbon nano tube network 102 is prepared.According to one embodiment, can utilize
Catalyst synthesizes vertical carbon nano tube network using PECVD on a substrate 104.According to one embodiment, catalyst can use
Iron or other materials, substrate 104 can be silicon substrates.The producer can be given birth to by controlling the dosage of catalyst to control
The density of long carbon nanotubes.The relation of density and sensor performance in relation to carbon nanotubes, will be detailed behind the application
Introduce.
According to one embodiment, silicon substrate 104 can be placed in the chamber of high vacuum state first, and with 30sccm
Flow velocity be passed through hydrogen and nitrogen be passed through with the flow velocity of 10sccm, and chamber temp is heated to 850 DEG C；Then with 35sccm
Flow velocity be passed through reacting gas CH4, and the power of plasma is fixed on 200 watts.According to different embodiments, in order to control
The length of vertical carbon nanotubes, reaction time can be differed at 40 seconds to 120 seconds.Length and sensors in relation to carbon nanotubes
The relation of energy, will be discussed in detail behind the application.
There can be the side wall of individual layer in the carbon nanotubes 102 that the step is formed, it is possible to have the side wall of multilayer.Production
The method of the raw vertical carbon nano tube network with single or multiple lift side wall is all ripe.If using the carbon with single layer wall
Nanotube can also further improve the transparency of synthetic material in the application, so as to provide more preferable application effect.When
So, other metal nanometer line or conductions such as one-dimensional vertical conductive material such as zinc oxide nanowire, nano silver wire can also be used
The replacement Sexual behavior mode as carbon nanotubes such as nanofiber.
In step 204, substrate 106 is prepared.According to one embodiment, substrate can use cured Ecoflex layers.Such as figure
Shown in 1b, uncured Ecoflex is injected in mould 108, it is then small by heating such as 15 minutes or standing such as 12
When so that Ecoflex is cured as film.According to one embodiment, the Ecoflex film layers 106 as substrate can have number
The thickness of millimeter.
In step 206, uncured Ecoflex transfer layers 110 of one layer of spin coating on substrate 106, as illustrated in figure 1 c.According to
One embodiment, the amount of the Ecoflex of spin coating can be about as much as 5-50 microns in this step, such as 15 microns thick
Ecoflex., can be according to the material utilization amount of carbon length of tube adjusting Ecoflex transfer layers 110 according to one embodiment.According to one
A embodiment, the thickness of Ecoflex transfer layers 110 can be similar with the length of vertical carbon nanotubes.
In step 208, vertical carbon nano tube network 102 is transferred on uncured Ecoflex transfer layers 110, such as schemed
Shown in 1d, and Ecoflex transfer layers 110 are cured after the transfer.According to one embodiment, put by vertical carbon nanotubes
Do not apply any external force during Ecoflex transfer layers 110, and the weight for relying solely on silicon substrate 104 causes carbon nanometer
Managed network 102 is absorbed among uncured Ecoflex transfer layers 110.Carried out according to one embodiment, after the completion of transfer cured
When time can be 2 small, solidification temperature can be 70 DEG C, naturally it is also possible to using other different solidification temperatures and time.By
There is very high viscosity in Ecoflex polymer, thus in the curing process carbon nanotubes by Ecoflex coat so as to form
Multiple nm walls, as seen in the following figures.
It should be noted that cladding described herein can be carbon nanotubes 102 by Ecoflex transfer layers 110 completely or
Part coats, such as the upper end of part carbon nanotubes can be protruded from outside Ecoflex transfer layers 110.
In step 210, silicon substrate 104 is removed, effect is as shown in fig. le.Due to the curing process in step 208, carbon nanometer
Strong adhesive force between pipe 102 and Ecoflex transfer layers 108, therefore can be by smoothly from carbon nanometer in this step silicon substrate 104
Pipe is removed from nm wall in other words.
In step 212, electrode 112 is formed at 108 both ends of Ecoflex transfer layers, shown in Fig. 1 f.According to one embodiment,
Copper wire can be fixed on by 108 both ends of Ecoflex transfer layers by silver paste and be used as electrode.It can certainly use other known
Method forms electrode.
Certainly, those skilled in the art know, subsequently also have some conventional steps, such as encapsulation etc..Because no
It is the emphasis of the application, is not just repeated here herein.
Fig. 3 a-3g are the process flow diagram that nano materials are prepared according to the application one embodiment.Fig. 4 is root
The method flow diagram of nano materials is prepared according to the technological process of Fig. 3 introductions.
In step 402, as shown in Figure 3a, vertical carbon nano tube network 302 is prepared.According to one embodiment, can utilize
Catalyst synthesizes vertical carbon nano tube network on substrate 304 using PECVD.According to one embodiment, catalyst can use
Iron or other materials, substrate 304 can be silicon substrates.The producer can be given birth to by controlling the dosage of catalyst to control
The density of long carbon nanotubes.The relation of density and nano materials performance in relation to carbon nanotubes, will behind the application
It can be discussed in detail.
According to one embodiment, silicon substrate 304 can be placed in the chamber of high vacuum state first, and with 30sccm
Flow velocity be passed through hydrogen and nitrogen be passed through with the flow velocity of 10sccm, and chamber temp is heated to 850 DEG C；Then with 35sccm
Flow velocity be passed through reacting gas CH4, and the power of plasma is fixed on 200 watts.According to different embodiments, in order to control
The length of vertical carbon nanotubes, reaction time can be differed at 40 seconds to 120 seconds.Length and synthesis nanometer in relation to carbon nanotubes
The relation of material property, will be discussed in detail behind the application.
There can be the side wall of individual layer in the carbon nanotubes 302 that the step is formed, it is possible to have the side wall of multilayer.When
So, other replacing as carbon nanotubes such as one-dimensional vertical conductive material such as zinc oxide nanowire, nano silver wire can also be used
For Sexual behavior mode.
In step 404, first layer Ecoflex is formed on substrate 306 as connecting layer 308, as shown in Figure 3b, and is carried out
Cure.According to one embodiment, substrate 306 can use PEN or PDMS material.According to one embodiment, hardening time can be with
It it is 30 minutes, solidification temperature can be 70 DEG C.According to one embodiment, the thickness after Ecoflex connecting layers 308 cure can be
50-150 microns, such as particularly 100 microns.
In step 406, the uncured Ecoflex polymer of one layer of spin coating on connecting layer 308, as transfer layer 310, such as
Shown in Fig. 3 c.According to one embodiment, the amount of the Ecoflex of spin coating can about reach 15 microns after hardening in this step
It is thick.Since the wetability between Ecoflex and 306 material of substrate such as PEN or PDMS is bad, it is connected using Ecoflex
Layer 308 is used to improve the degree of wetting between substrate 306 and Ecoflex transfer layers 310, and as Ecoflex transfer layers 310
Support.
In step 408, vertical carbon nano tube network 302 is transferred on uncured Ecoflex transfer layers 310, such as schemed
Shown in 3d.According to one embodiment, do not apply during carbon nano tube network 302 is placed in Ecoflex transfer layers 310 and appoint
What external force, and the weight of silicon substrate 304 is relied solely on so that carbon nano tube network 302 is absorbed among Ecoflex transfer layers 310.
When the cured time is carried out according to one embodiment, after the completion of transfer can be 2 small, solidification temperature can be 70 DEG C, certainly
Other different solidification temperatures and time can be used.Since Ecoflex polymer has very high viscosity, curing
Carbon nanotubes is coated so as to form multiple nm walls by Ecoflex in journey, as seen in the following figures.
In step 410, substrate 304 is removed, effect is as shown in Figure 3 e.Due to the curing process in step 308, carbon nanotubes
Strong adhesive force between 302 and Ecoflex transfer layers 308, therefore can be by smoothly from carbon nanotubes in this step silicon substrate 304
Nm wall is removed in other words.
In step 412, substrate 306 is removed, effect is as illustrated in figure 3f.Formed in materials such as the step PEN or PDMS
Substrate 306 is removed from Ecoflex connecting layers 308.
In step 414, electrode 312 is formed at 310 both ends of Ecoflex transfer layers, as shown in figure 3g.According to an implementation
Example, can be fixed on 310 both ends of Ecoflex transfer layers by copper wire by silver paste and be used as electrode.
Certainly, those skilled in the art know, subsequently also have some conventional steps, such as encapsulation etc..Because no
It is the emphasis of the application, is not just repeated here herein.
Fig. 5 show side section and vertical view according to the nano materials of the application one embodiment
SEM schemes.As seen from the figure, carbon nanotubes is coated by Ecoflex in the curing process, forms synthesis knot one by one
Structure, in this application we be called nm wall.
Nano materials provided herein can have different applications, such as can be used for preparing stress sensing
Device, pressure sensor (such as being superimposed two layers of nano materials) or triboelectricity device etc..Passed below using stress
Illustrated exemplified by sensor application.
Under conditions of Fig. 6 show according to the nano materials of the application one embodiment in tensionless winkler foundation and has a stretching
Vertical view SEM figure.As seen from the figure, in the case of no stretching, nm wall contact close to each other；Under tension, at least
The reduction of node quantity is separated from each other or contacted between the nm wall of part.Specifically, there is the synthesis nanometer material of said structure
The micromechanism of the stress of material-sensitivity Behavioral change includes two parts：First, the carbon nanometer being covered by Ecoflex
The stretching of pipe.Carbon nanotubes has elasticity well, and 40% can be stretched under the action of tensile stress.Therefore exist
In the case that Ecoflex transfer layers are stretched, carbon nanotubes can be stretched so as to cause contact to be tied together therewith
Point is reduced.But anyway, the stretching of these carbon nanotubes is limited be subject to the structure for the nm wall being coated on outside it, therefore this
Although increase of kind of the mechanism on nano materials overall resistance has influence, influence to be also than relatively limited.
Second of change mechanism is based on the contact node between the carbon nanotubes in adjacent nano wall outer surface
Separation is reduced.That is, carbon nanotubes in adjacent nano wall outer surface in the case of tensionless winkler foundation may at one or
It is in contact with each other at multiple nodes；But under tension, the contact at the one or more node may be disconnected or separated.
In contrast, influence of second of the mechanism to nano materials resistance is much larger than the first mechanism.Since vertical carbon pipe is embedded in
In Ecoflex, the influence of the frictional force between a large amount of carbon pipes is broken away from, therefore the structure of the application nm wall is made frictional force
Into negative effect fall below it is minimum.
The length of carbon nanotubes for the application nano materials performance there is influence, certainly should according to different
With the length of carbon nanotubes can be different, but utilizes the structure of the application, and the length of carbon nanotubes cannot be too short, no
Above-mentioned nanometer wall construction can not then be formed.For example, in the case of using 15 microns thick of Ecoflex transfer layers, if carbon
The length of nanotube is 5 microns, and after Ecoflex layers are cured, surface can not just form the structure of nm wall, carbon nanotubes
Flooded completely by Ecoflex polymer, the synthetic upper surface formed is flat, the sensitivity pole of such synthetic material
Difference, only 0.5 or so.This is because not forming a nanometer wall construction, all carbon nanotubes are fixed on Ecoflex by collective and turn
Move in layer, therefore above-mentioned second of change mechanism can not play a role completely.Opposite, using 15 microns thick
In the case of Ecoflex transfer layers, if the length of carbon nanotubes is 10 microns or 15 microns, be cured at Ecoflex layers with
Afterwards, a nanometer wall construction can be formed, and there is the sheet resistance of 3.8k Ω/sq and 2.2k Ω/sq respectively.Thus,
Relation between Ecoflex transfer layers and the length of carbon nanotubes is also critically important, and in general can use has and carbon nanometer
The similar Ecoflex transfer layers of length of tube.
Fig. 7 show the resistance using the nano materials of 10 microns and 15 microns long of carbon nanotubes preparation with stretching
Degree and the curve map changed.As seen from the figure, embodied using the nano materials of 10 microns of carbon nanotubes preferably sensitive
(gauge factor, abbreviation GF) i.e. slope of a curve is spent, can reach 18.This is because the nanometer that short nanotube is formed
The number of nodes that wall contacts each other is fewer than the node for the nm wall that relatively long carbon nanotubes is formed, therefore identical
Under pulled out condition, the separated change ratio of node is with regard to bigger, therefore sensitivity is with regard to higher.
Fig. 8 show the synthesis nanometer material prepared using 10 microns and 15 microns long of the carbon nanotubes with different densities
The curve map that material resistance variations ratio changes with level of stretch.It is as shown in the figure, micro- using the carbon nanotubes such as 10 of equal length
Rice, the dosage of catalyst such as iron is bigger, and carbon nanotube density is lower, and the sensitivity of nano materials is higher, but linearly more
Difference.This is because the density of carbon nanotubes is low, total contact node quantity is relatively few, therefore will be more sensitive to stretching, because
This high sensitivity；But stretch range is bigger, the increase of node disconnection number is faster in the case that carbon nanotube density is low, therefore
The ratio of resistance variations is higher, therefore nano materials is linear poorer.
Using 10 microns of long carbon nanotubes nano materials high sensitivity in using 15 microns of carbon nanotubes
Nano materials, this matches with result above and explanation；But in the case where significantly stretching, using 15 microns
The linear carbon nanotubes for being better than 10 microns of the nano materials of carbon nanotubes.It is in contact with each other this is because carbon nanotubes is longer
Node it is more, therefore with longer carbon nanotubes nano materials stretching produce nodal point number change relative to residue
The change of the ratio of nodal point number is relatively more stable.
Fig. 9 show the resistance variations ratios of nano materials prepared by the vertical carbon nano tube network of traditional use with
The curve map of level of stretch change.As seen from the figure level of stretch be 100% in the case of, resistance variations ratio less than 2.5, but
Be as shown in fig. 7, in the embodiment of the present application use nano materials prepared by 10 microns of carbon nanotubes level of stretch for
Resistance variations ratio can be up to 8 in the case of 100%, be nano materials prepared by conventional vertical carbon nano tube network
Nearly four times.
Figure 10 show the resistance variations ratio according to the nano materials of the application one embodiment with drawing numbers
Variation diagram.As seen from the figure after the stretching of 400 times is lived through, the resistance susceptibility for the nano materials that the application provides becomes
Change little, it is seen that it is with good reliability.
Figure 10 show the change with temperature according to the resistance variations ratios of the nano materials of the application one embodiment
Change figure.As seen from the figure, with the rise of temperature, the resistance value of nano materials has declined, but amplitude is very small.This
Illustrate that the temperature stability for the nano materials that the application provides is fine.
In the application, vertical carbon nanotubes is shifted as medium using Ecoflex layers, formed vertical carbon nanotubes and
The nanometer wall construction that Ecoflex is mixed so that reached sensitive using the transducer sensitivity of this nano materials
The desirable level (GF=3~18) of degree.This is because two kinds of coefficient knots of change mechanism of foregoing nano materials
Fruit.Carbon nanotubes in one side nm wall is stretched with the stretching of transfer layer, and in nm wall microstructured edge or outer
The carbon nanotubes on surface and the carbon nanotubes at edge in adjacent nano wall form tunnel junctions, and the mechanism in stretching is received with vertical carbon
Nanotube networks are similar but do not have the drawbacks of numerical value carbon nano tube network.Further, since carbon nanotubes is coated by Ecoflex,
So its Ecoflex with cladding is moved together in outer masterpiece used time, carbon nanotubes, from the influence of frictional force, is ensured
The stability of sensor.
Although some specific embodiments of the application are described in detail by example, the skill of this area
Art personnel it should be understood that example above merely to illustrate, rather than in order to limit scope of the present application.The skill of this area
Art personnel are it should be understood that can modify above example in the case where not departing from the scope and spirit of the present application.This Shen
Scope please is defined by the following claims.
Claims (10)
1. a kind of nano materials, including
Ecoflex transfer layers and the multiple nm walls being fixed on the Ecoflex transfer layers；
Wherein, each nm wall includes one or more 1-dimention nano conductive structure and by described one or more nanometer
Conductive structure cladding becomes the Ecoflex materials of nm wall；
Wherein, the 1-dimention nano conduction is generally vertical is fixed on the Ecoflex transfer layers；
Wherein, it is one-dimensional in the adjacent nm wall outer surface in the case where the Ecoflex transfer layers are not stretched
Conductive nano structure is in contact with each other at one or more nodes.
2. nano materials as claimed in claim 1, wherein the 1-dimention nano conductive structure includes carbon nanotubes, metal
Nano wire or nanofiber.
3. nano materials as claimed in claim 1, wherein the length of the 1-dimention nano conductive structure is micro- for 5 to 50
Rice.
4. nano materials as claimed in claim 3, wherein the thickness of the Ecoflex transfer layers is 5 to 50 microns.
A kind of 5. any nano materials in strain gauge, including claim 1-4.
6. a kind of method for preparing nano materials, including
Generally vertical 1-dimention nano conductive structure network is prepared on the first substrate；
Uncured Ecoflex transfer layers are formed on the second substrate；
By in the 1-dimention nano conductive structure network transitions to the Ecoflex transfer layers and to the Ecoflex transfer layers
Cured；And
First and second substrate is removed, and electrode is formed on the Ecoflex transfer layers.
7. method as claimed in claim 6, wherein the 1-dimention nano conductive structure includes carbon nanotubes, metal nanometer line or
Nanofiber；First substrate includes silicon substrate.
8. the method for claim 7, wherein the length of the 1-dimention nano conductive structure is 5 to 50 microns.
9. method as claimed in claim 8, wherein the thickness of the Ecoflex transfer layers is 5 to 50 microns.
10. method as claimed in claim 6, wherein second substrate includes PEN or PDMS material；The method is also wrapped
Include and one layer of cured Ecoflex connecting layer is formed between second substrate and the Ecoflex transfer layers for being connected institute
State the second substrate and the Ecoflex transfer layers.
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