CN107902265B - Sealing transfer device - Google Patents
Sealing transfer device Download PDFInfo
- Publication number
- CN107902265B CN107902265B CN201711354018.1A CN201711354018A CN107902265B CN 107902265 B CN107902265 B CN 107902265B CN 201711354018 A CN201711354018 A CN 201711354018A CN 107902265 B CN107902265 B CN 107902265B
- Authority
- CN
- China
- Prior art keywords
- shaft hole
- connecting piece
- transfer device
- cabin body
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000012546 transfer Methods 0.000 title claims abstract description 22
- 238000007789 sealing Methods 0.000 title claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims abstract description 30
- 239000007789 gas Substances 0.000 claims description 15
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000004519 grease Substances 0.000 claims description 4
- 229920001296 polysiloxane Polymers 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 5
- 238000002955 isolation Methods 0.000 abstract description 2
- 108010066057 cabin-1 Proteins 0.000 description 10
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000012356 Product development Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
- B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
- B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
- B65D81/2076—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere in an at least partially rigid container
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D43/00—Lids or covers for rigid or semi-rigid containers
- B65D43/14—Non-removable lids or covers
- B65D43/20—Non-removable lids or covers linearly slidable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D43/00—Lids or covers for rigid or semi-rigid containers
- B65D43/26—Mechanisms for opening or closing, e.g. pedal-operated
Abstract
The invention discloses a sealing transfer device, which comprises a cabin body, a cover plate and a transmission shaft, wherein the cabin body comprises a bottom plate, a side wall connected to the bottom plate, a shaft hole formed in the side wall and a limit cover connected to the side wall, the shaft hole comprises an open end and a closed end, a channel is formed between the limit cover and the side wall, and the length direction of the channel is parallel to the axial direction of the shaft hole; one end of the transmission shaft is provided with a piston head, the other end of the transmission shaft is provided with a first connecting piece, and the piston head can be inserted from the opening end of the shaft hole in an axially movable manner and forms a closed cavity with the closed end of the shaft hole; the cover plate includes a limiting plate having a side edge movably inserted into the passage, and a second connecting member fixed to the limiting plate and capable of being connected to the first connecting member. The device not only can realize the isolation between the sample and the air in the conveying process, but also can be automatically opened in the vacuum state of the electron microscope chamber, and the sample to be detected is well protected. In addition, the device can also be used for transporting and storing samples.
Description
Technical Field
The invention relates to a sealing transfer device which is applied to electrochemical research.
Background
In scientific research and product development, people are sometimes interested in the surface information of the materials and products studied by themselves. And a scanning electron microscope is an electron microscope that scans the surface of a sample with an electron beam to obtain information of the sample. It can produce a high resolution image of the surface of the sample, and the image is three-dimensional, and a scanning electron microscope can be used to identify the surface structure of the sample. However, in the process of putting the sample into the scanning electron microscope from the sample preparation room, some samples react with air, and particularly, the surface of the sample can be damaged greatly, so that the observation result of the electron microscope cannot directly display the surface performance of the sample which people want to see. Therefore, the problem that the samples are polluted by air in the process of transporting and placing the samples into an electron microscope is not solved, and the special samples cannot be observed by the electron microscope.
The special sample stage of the electron microscope refers to a protection device which can be used for realizing the transportation of the sample and the observation process in the electron microscope.
Disclosure of Invention
In order to solve the technical problems, the invention aims to provide a sealing and transferring device.
The invention provides a sealing transfer device which comprises a cabin body, a cover plate and a transmission shaft,
the cabin body comprises a bottom plate, a side wall connected to the bottom plate, a shaft hole formed in the side wall, and a limit cover connected to the side wall, wherein the shaft hole comprises an open end and a closed end, a channel is formed between the limit cover and the side wall, and the length direction of the channel is parallel to the axial direction of the shaft hole;
one end of the transmission shaft is provided with a piston head, the other end of the transmission shaft is provided with a first connecting piece, and the piston head can be inserted from the opening end of the shaft hole in an axially movable manner and forms a closed cavity with the closed end of the shaft hole;
the cover plate comprises a limiting plate, a second connecting piece and a transmission shaft, wherein the side edge of the limiting plate is movably inserted into the channel, the second connecting piece is fixed on the limiting plate and can be connected with the first connecting piece, and the first connecting piece is matched with the second connecting piece to realize that the transmission shaft drives the cover plate to move.
Further, a sealing layer is arranged between the limiting plate and the side wall.
Further, the sealing layer is vacuum silicone grease.
Further, the second connecting piece is perpendicular to the limiting plate.
Further, the first connecting piece and the second connecting piece are buckled with each other.
Further, the cabin body is cuboid, and the side wall encloses the storage space of the cabin body. The length and width of the cabin body are in the range of 2cm-5cm, preferably 4cm long and 3.5cm wide, and the height direction of the cabin body is lower than 1.7cm.
Further, the number of the transmission shafts is equal to that of the shaft holes.
Further, the shaft holes are respectively formed in a pair of opposite side walls of the cabin body, and the limit covers are respectively arranged on the pair of side walls.
Further, the cabin body further comprises an objective table, and the objective table is detachably arranged in the storage space.
Still further, set up the mounting hole on the bottom plate, the objective table includes third connecting piece and is used for placing the platform portion of waiting to shift the article, and platform portion and third connecting piece are conductive material, and platform portion and third connecting piece electricity are connected, and the third connecting piece is through the mounting hole from the bottom plate protrusion to the cabin outside.
By means of the scheme, the invention has at least the following advantages: the sealing transfer device not only can realize the isolation of the sample and the air in the conveying process, but also can be automatically opened in the vacuum state of the electron microscope chamber, and the sample to be detected is perfectly protected. In addition, the device can also be used for transporting and storing samples.
The foregoing description is only an overview of the present invention, and is intended to provide a better understanding of the present invention, as it is embodied in the following description, with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
FIG. 1 is a schematic view of a split construction of a seal transfer device;
FIG. 2 is a front view of the pod;
FIG. 3 is a left side view of the pod;
FIG. 4 is a top view of the pod;
fig. 5 is a front view of the cover plate;
FIG. 6 is a left side view of the cover plate;
FIG. 7 is a top plan view of the cover plate;
FIG. 8 is a schematic view of a drive shaft;
FIG. 9 is a schematic diagram of a stage;
wherein: 1-cabin, 2-apron, 3-transmission shaft, 4-objective table, 11-shaft hole, 12-lateral wall, 13-bottom plate, 14 limit cap, 15-mounting hole, 16-passageway, 17-storage space, 21-limiting plate, 22-second connecting piece, 31-piston head, 32-first connecting piece, 41-platform portion, 42-third connecting piece.
Detailed Description
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention.
Referring to fig. 1 to 9, a seal transfer device comprises a cabin 1, a cover plate 2 and a transmission shaft 3.
The cabin body 1 comprises a bottom plate 13, a side wall 12 connected to the bottom plate 13, a shaft hole formed in the side wall 12, and a limit cover 14 connected to the side wall 12, wherein the shaft hole 11 comprises an open end and a closed end, a channel 16 is formed between the limit cover 14 and the side wall 12, and the length direction of the channel 16 is parallel to the axial direction of the shaft hole 11. In this embodiment, the cabin 1 is a cuboid, and the side walls 12 enclose a storage space 17 of the cabin 1. The length and width of the cabin body 1 are in the range of 2cm-5cm, preferably 4cm long and 3.5cm wide, and the height direction of the cabin body 1 is lower than 1.7cm.
The drive shaft 3 has a piston head 31 at one end and a first connecting member 32 at the other end, and the piston head 31 is inserted axially movably from the open end of the shaft hole 11 and forms a closed chamber with the closed end of the shaft hole 11. The number of the transmission shafts 3 is equal to that of the shaft holes 11. The shaft holes 11 are respectively formed in a pair of opposite side walls 12 of the cabin 1, and the limit covers 14 are respectively formed in the pair of side walls 12.
The cover plate 2 includes a limiting plate 21 whose side edge is movably inserted into the passage, and a second connecting member 22 fixed to the limiting plate 21 and capable of being connected to the first connecting member 32. The second connecting piece 22 is arranged perpendicular to the limiting plate 21. The first connecting piece 32 and the second connecting piece 22 cooperate to realize that the transmission shaft 3 drives the cover plate 2 to move. In this embodiment, the first connecting member 32 and the second connecting member 22 are connected by buckling.
In a more preferred embodiment, a sealing layer is provided between the limiting plate 21 and the side wall 12. More preferably, the sealing layer is a vacuum silicone grease.
The cabin 1 further comprises an object stage 4, the object stage 4 being detachably arranged in the storage space 17. Specifically, the bottom plate 13 is provided with the mounting hole 15, the object stage 4 includes a third connecting member 42 and a platform portion 41 for placing the object to be transferred, the platform portion 41 and the third connecting member 42 are both made of conductive materials, the platform portion 41 is electrically connected with the third connecting member 42, and the third connecting member 42 protrudes from the bottom plate 13 to the outside of the cabin 1 through the mounting hole 15.
Working principle:
the specific matching mode is as follows: when the device is used in a non-vacuum atmosphere, for example, in a glove box filled with argon, the third connecting piece 42 of the objective table 4 is inserted into the mounting hole 15 of the cabin body 1, so that the platform part 41 of the objective table 4 is positioned in the storage space 17 inside the cabin body 1, a sample to be measured is placed on the platform part 41 of the objective table 4, the highest point of the sample is ensured to be lower than the side wall 12, and if the sample is sensitive to certain atmospheres, such as a metal lithium sheet is sensitive to air or water vapor, the third connecting piece 42 and the mounting hole 15 can be arranged in a sealing way.
The piston head 31 of the transmission shaft 3 is partially placed in the shaft hole 11 of the cabin body 1, one end of the shaft hole 11 is of a closed structure, and the piston head 31 is of a sealing structure relative to the shaft hole wall of the shaft hole 11 and has certain friction resistance, so that after the shaft hole 11 is inserted into the piston head 31, a certain amount of compressed air is formed in a sealing cavity between the piston head 31 and the closed end of the shaft hole 11, and the air pressure of the compressed air can be adjusted by the depth of the piston head 31 inserted into the shaft hole 11. In addition, the closed end of the shaft hole 11 can be a selective plug structure, the closed end of the shaft hole 11 can be pulled out in advance, then the piston head 31 is plugged into the shaft hole 11, the transmission shaft 3 is deeply inserted into the shaft hole 11 for a certain depth, and then the closed end of the shaft hole 11 is plugged to realize closed compressed gas pressure adjustment.
After the transmission shaft 3 is plugged into the cabin body 1, the first connecting piece 32 of the transmission shaft 3 is connected with the second connecting piece 22 of the cover plate 2, the connection can be buckle or rivet, and the like, the limiting plate 21 of the cover plate 2 is plugged into the channel 16 between the limiting cover 14 and the side wall 12 of the cabin body 1 while the connection is carried out, the limiting cover 14 is partially connected with the side wall 12, and the other part of the limiting cover is suspended and connected with the side wall 12, and the channel 16 for the movement of the limiting plate 21 is formed between the suspended part and the side wall 12.
After the first connecting piece 32 and the second connecting piece 22 are successfully connected, and meanwhile, the limiting plate 21 is plugged into the channel of the residual side wall 12 of the limiting cover 14, the transmission shaft 3 is pushed to finally realize that the limiting plate 21 completely covers the inner space of the cabin body 1 formed by the side wall 12 and the bottom plate 13, and a sealing layer such as vacuum silicone grease can be smeared on the contact part between the limiting plate 21 and the side wall 12 in advance, so that a sealing structure is formed between the limiting plate 21 and the cabin body 1 after the limiting plate 21 covers the cabin body 1.
The built sealed transfer device is taken out of a non-vacuum atmosphere (glove box), then is transferred into a vacuumizable sealed space (such as a sample transfer bin of a scanning electron microscope) to vacuumize the sealed container, at the moment, the gas sealed in the shaft hole 11 gradually expands to push the piston head 31 to move outwards along the shaft hole 11 along with the reduction of the air pressure in the sealed space, the transmission shaft 3 drives the cover plate 2 to move outwards along with the cabin body, a part of gas is sealed between the cover plate 2 and the cabin body 1, and along with the reduction of the air pressure in the sealed space, the part of gas also expands and pushes the cover plate 2 to move in a direction away from the bottom plate 13, at the moment, the limiting cover 14 can well play a role of limiting the cover plate 2 to leave the surface of the side wall 12, the sealed space is continuously vacuumized to further reduce the air pressure, the thrust of the gas sealed in the shaft hole 11 to the piston head 31 is also larger and larger, the transmission shaft 3 and the cover plate 2 are driven to be further away from the cabin, at this time, attention needs to be paid to the fact that before the cover plate 2 is just before the cabin cannot be completely sealed, the gas sealed in the cabin is still stored (such as argon stored in a glove box), because before the sealed space is vacuumized, the sealed space is sometimes filled with gas harmful to the sample (such as air versus lithium sheets) and the argon well protects the sample on the object table 4, until the harmful gas in the sealed space is largely pumped out of the sealed space, and when possible damage to the sample is reduced to an acceptable degree, through some previous adjustment control (such as the pre-sealed gas amount in the shaft hole 11, the size exceeding the cabin 1 after the limit plate 21 seals the cabin 1), under the degree, the limit plate 21 contacts the seal to the cabin 1, after that, the transmission shaft 3 and the cover plate 2 will be further away from the cabin until the cover plate 2 does not shield the sample on the object stage 4, and since a certain friction coefficient exists between the piston head 31 (made of rubber) and the inner wall of the shaft hole 11 (made of plastic), the gas enclosed in the shaft hole 11 is larger and larger along with the enclosed space of the shaft hole, and the gas pressure of the gas is smaller and smaller until the piston head 31 is not pushed to move in the shaft hole 11, and then the relative movement between the transmission shaft 3 and the cover plate 2 and the cabin 1 will be stopped.
After the observation of the sample is completed, gas can be slowly injected into the closed space to enable the air pressure in the closed space to rise, and when the air pressure in the closed space is larger than the air pressure of the closed gas in the shaft hole 11 and the friction force between the piston head 31 and the shaft hole 11, the transmission shaft 3 drives the cover plate 2 to be close to the cabin body, and further, the cover plate 2 covers the cabin body to well preserve the sample.
The material of the cabin body 1 and the cover plate 2 can be plastic or stainless steel, and the first connecting piece 32 of the transmission shaft 3 can also be plastic or stainless steel. The stage 4 is preferably made of a metal material, since it is always necessary to conduct electricity to the sample during the test, and at this time, the stage 4 can receive electrons from the outside through the third connector 42 to the stage 41 and further to the sample, thereby realizing observation.
Fig. 2-7 show specific length parameters (in cm) of the relevant structure for better disclosure of the invention, and for better understanding and implementation of the invention by other reading patents, these length parameters are not limited as to specific ranges or proportions.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, and it should be noted that it is possible for those skilled in the art to make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.
Claims (9)
1. A seal transfer device, characterized in that: it comprises a cabin body, a cover plate and a transmission shaft,
the cabin body comprises a bottom plate, a side wall connected to the bottom plate, a shaft hole formed in the side wall, and a limit cover connected to the side wall, wherein the shaft hole comprises an open end and a closed end, a channel is formed between the limit cover and the side wall, and the length direction of the channel is parallel to the axial direction of the shaft hole;
one end of the transmission shaft is provided with a piston head, the other end of the transmission shaft is provided with a first connecting piece, and the piston head can be inserted from the opening end of the shaft hole in an axially movable manner and forms a closed cavity with the closed end of the shaft hole;
the cover plate comprises a limiting plate and a second connecting piece, wherein the side edge of the limiting plate is movably inserted into the channel, and the second connecting piece is fixed on the limiting plate and can be connected with the first connecting piece; a sealing layer is arranged between the limiting plate and the side wall;
the piston head part of the transmission shaft is placed in the shaft hole of the cabin body, and as one end of the shaft hole is of a closed structure, a certain amount of compressed air is formed in a sealing cavity between the piston head and the closed end of the shaft hole after the shaft hole is inserted into the piston head;
and taking out the built sealed transfer device from the glove box filled with argon, transferring the sealed transfer device into a sample transfer bin of the scanning electron microscope, and vacuumizing, wherein the gas sealed in the shaft hole gradually expands to push the piston head to move outwards along the shaft hole along with the reduction of the air pressure in the sealed space, so that the transmission shaft can drive the cover plate to move outwards along the shaft hole until the piston head is not pushed to move in the shaft hole, and then, the relative movement between the transmission shaft and the cover plate and the cabin body is stopped.
2. A seal transfer device according to claim 1, wherein: the sealing layer is vacuum silicone grease.
3. A seal transfer device according to claim 1, wherein: the second connecting piece is perpendicular to the limiting plate.
4. A seal transfer device according to claim 1, wherein: the first connecting piece and the second connecting piece are buckled with each other.
5. A seal transfer device according to claim 1, wherein: the cabin body is cuboid, and the side walls enclose a storage space of the cabin body.
6. A seal transfer device according to claim 1, wherein: the number of the transmission shafts is equal to that of the shaft holes.
7. A seal transfer device according to claim 1, wherein: the shaft holes are respectively formed on a pair of opposite side walls of the cabin body, and the limit covers are also respectively arranged on the pair of side walls.
8. A seal transfer device according to claim 5, wherein: the cabin body also comprises an objective table, and the objective table is detachably arranged in the storage space.
9. A seal transfer device as defined in claim 8, wherein: the bottom plate on set up the mounting hole, the objective table include the third connecting piece and be used for placing the platform portion of waiting to shift the article, platform portion with the third connecting piece is conductive material, just platform portion with the third connecting piece electricity is connected, the third connecting piece passes through the mounting hole follow the bottom plate is outstanding to the cabin body is outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711354018.1A CN107902265B (en) | 2017-12-15 | 2017-12-15 | Sealing transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711354018.1A CN107902265B (en) | 2017-12-15 | 2017-12-15 | Sealing transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107902265A CN107902265A (en) | 2018-04-13 |
| CN107902265B true CN107902265B (en) | 2023-10-27 |
Family
ID=61869815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711354018.1A Active CN107902265B (en) | 2017-12-15 | 2017-12-15 | Sealing transfer device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107902265B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110514685A (en) * | 2019-09-29 | 2019-11-29 | 广西师范大学 | A kind of loading instrument for the test of in-situ scanning Electronic Speculum |
| US20220216031A1 (en) * | 2019-10-21 | 2022-07-07 | Shanghai Nemor Optoelectronic Technology Co., Ltd | Sample protection device for scanning electron microscopy |
| CN117038547B (en) * | 2023-09-28 | 2023-12-05 | 江苏快克芯装备科技有限公司 | Sealing transfer mechanism and chip packaging equipment |
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| TW201222617A (en) * | 2010-10-07 | 2012-06-01 | Hitachi High Tech Corp | Sample device for charged particle beam |
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| JPH11201920A (en) * | 1998-01-13 | 1999-07-30 | Takayuki Ichikawa | Sample observing and analyzing method by vacuum system observing and analyzing device, and sample box for same device |
| JPH11213931A (en) * | 1998-01-28 | 1999-08-06 | Kanagawa Prefecture | Sample introducing device |
| CN1238552A (en) * | 1999-01-12 | 1999-12-15 | 张亚利 | Auxiliary device for testing electronic microscope |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN107902265A (en) | 2018-04-13 |
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