CN107902109B - MEMS micro thruster array chip with thrust range-increasing module - Google Patents
MEMS micro thruster array chip with thrust range-increasing module Download PDFInfo
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- CN107902109B CN107902109B CN201711042484.6A CN201711042484A CN107902109B CN 107902109 B CN107902109 B CN 107902109B CN 201711042484 A CN201711042484 A CN 201711042484A CN 107902109 B CN107902109 B CN 107902109B
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- 239000007921 spray Substances 0.000 claims abstract description 37
- 239000010408 film Substances 0.000 claims abstract description 26
- 239000003814 drug Substances 0.000 claims abstract description 8
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 8
- 239000003380 propellant Substances 0.000 claims abstract description 5
- 239000010409 thin film Substances 0.000 claims abstract description 5
- 239000002070 nanowire Substances 0.000 claims description 6
- 229910021426 porous silicon Inorganic materials 0.000 claims description 3
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
- B64G1/00—Cosmonautic vehicles
- B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
- B64G1/40—Arrangements or adaptations of propulsion systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
- B64G1/00—Cosmonautic vehicles
- B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
- B64G1/40—Arrangements or adaptations of propulsion systems
- B64G1/403—Solid propellant rocket engines
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02K—JET-PROPULSION PLANTS
- F02K9/00—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof
- F02K9/08—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof using solid propellants
- F02K9/10—Shape or structure of solid propellant charges
- F02K9/14—Shape or structure of solid propellant charges made from sheet-like materials, e.g. of carpet-roll type, of layered structure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02K—JET-PROPULSION PLANTS
- F02K9/00—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof
- F02K9/08—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof using solid propellants
- F02K9/32—Constructional parts; Details not otherwise provided for
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- Combustion & Propulsion (AREA)
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Abstract
The invention relates to an MEMS micro thruster array chip with a thrust range-increasing module, which comprises an ignition layer, a medicine chamber layer and the thrust range-increasing module which are sequentially arranged from bottom to top; an outer spray hole is formed in the upper surface of the thrust range extending module, an inner spray hole is formed in the lower surface of the thrust range extending module, and a monocrystalline silicon thin film is arranged between the inner spray hole and the outer spray hole and serves as a diaphragm between the inner spray hole and the outer spray hole; and a high-energy nano energy-containing film grows or is deposited on the inner wall of the inner spray hole to serve as a propellant of the thrust range-increasing module. Under the condition of not changing the structure and performance parameters of a core machine, the invention realizes the regulation and control of key technical indexes of the MEMS micro-thruster array chip by adding the thrust range-extending module, and is beneficial to realizing the batch, low cost, serialization and type spectrum of the MEMS micro-thruster array chip.
Description
Technical Field
The invention relates to a micro thruster array chip, in particular to an MEMS micro thruster array chip with a thrust range extending module.
Background
The micro-nano satellite and the micro-nano satellite constellation become one of the current international important research hotspots, and relevant research is carried out in all aerospace major countries. Due to the limitation of volume and load capacity, the micro-nano satellites which are launched and researched at present do not have complete attitude and orbit control capacity and only have limited orbit maneuvering capacity. MEMS micro-propulsion systems based on MEMS technology and microelectronic technology are produced at the same time and become powerful competitors of micro-spacecraft attitude and orbit control technologies such as micro-satellites and micro-satellite constellations.
With the progress of the MEMS technology, the diameter of the micro medicine chamber of the MEMS micro thruster array chip enters the sub-millimeter scale, which is beneficial to improving the integration level, the miniaturization and the light weight of the MEMS micro thruster unit. However, as the diameter of the micro-chamber decreases, the thrust that can be provided by the MEMS micro-thrust unit also decreases, and there is a technical conflict between the improvement of the integration level and the micro-thrust performance.
At present, the mainstream structure of the MEMS micro-thruster array chip is still the "sandwich" structure proposed by TRW company in 90 s of the 20 th century, that is, the MEMS micro-thruster unit is composed of an ignition layer, a chemical chamber layer and a jet orifice layer. In the traditional sandwich structure, the change of the technical indexes of the MEMS micro thruster unit requires modification of design parameters and structural parameters of the micro thruster, the development period is long, the cost is high, and the mass production and serialization of products are not facilitated.
Disclosure of Invention
The invention aims to provide an MEMS micro-thruster array chip with a thrust range extending module, which solves the contradiction between the performance indexes of the MEMS micro-thrust technology, such as integration level, micro-thrust/micro-impulse and the like.
The technical scheme for realizing the purpose of the invention is as follows: an MEMS micro thruster array chip with a thrust range-increasing module comprises an ignition layer, a medicine chamber layer and the thrust range-increasing module which are sequentially arranged from bottom to top;
an outer spray hole is formed in the upper surface of the thrust range extending module, an inner spray hole is formed in the lower surface of the thrust range extending module, and a monocrystalline silicon thin film is arranged between the inner spray hole and the outer spray hole and serves as a diaphragm between the inner spray hole and the outer spray hole; and a high-energy nano energy-containing film grows or is deposited on the inner wall of the inner spray hole to serve as a propellant of the thrust range-increasing module.
Compared with the prior art, the invention has the following remarkable advantages:
(1) according to the invention, by modifying parameters such as the aperture of the thrust range-extending module, the microstructure and the film thickness of the high-energy nano energy-containing film, the micro-thrust and micro-impulse performance of the MEMS micro-thruster array chip can be conveniently modified, the structure and the process parameters of the core machine do not need to be modified, the mass production and serialization of the MEMS micro-thruster array chip are favorably realized, and the process flexibility and the performance flexibility of the MEMS micro-thrust system are favorably enhanced;
(2) the high-energy nano energy-containing film has the advantages of high energy density, high burning speed, small critical diameter of stable burning, large specific impulse and the like, and the energy-containing film is compatible with an MEMS (micro-electromechanical systems) process and can be prepared in batches.
Drawings
Fig. 1 is a structural diagram of a thrust range extending module in the present invention.
Fig. 2(a) and 2(b) are structural diagrams of a MEMS micro-thruster array chip having a nozzle layer and without a nozzle layer, respectively.
Detailed Description
With reference to fig. 1 and fig. 2, an MEMS micro thruster array chip with a thrust range extending module includes an ignition layer, a charge chamber layer, and a thrust range extending module, which are sequentially disposed from bottom to top;
an outer spray hole is formed in the upper surface of the thrust range extending module, an inner spray hole is formed in the lower surface of the thrust range extending module, and a monocrystalline silicon thin film is arranged between the inner spray hole and the outer spray hole and serves as a diaphragm between the inner spray hole and the outer spray hole; and a high-energy nano energy-containing film grows or is deposited on the inner wall of the inner spray hole to serve as a propellant of the thrust range-increasing module.
The high-energy nano energy-containing film is a porous silicon nano energy-containing film, a CuO nanowire/Al energy-containing film, a Mg nanowire/polytetrafluoroethylene or a CuO/Al reactive multilayer film.
The energy conversion element on the ignition layer, the medicine chamber on the medicine chamber layer, the inner spray hole and the outer spray hole of the thrust stroke-increasing module are positioned in a vertical direction. The ignition layer, the explosive chamber layer and the thrust stroke-increasing module are connected through bonding.
Furthermore, a spray orifice layer is arranged between the medicine chamber layer and the thrust stroke-increasing module. The energy conversion element on the ignition layer, the explosive chamber on the explosive chamber layer, the inner and outer spray holes of the spray hole layer and the inner spray hole and the outer spray hole of the thrust range-extending module are positioned in a corresponding way in the vertical direction; the ignition layer, the explosive chamber layer, the jet orifice layer and the thrust stroke-increasing module are connected through bonding.
The present invention will be described in detail with reference to examples.
Examples
An MEMS micro thruster array chip with a thrust range-increasing module comprises an ignition layer, a medicine chamber layer and the thrust range-increasing module which are sequentially arranged from bottom to top;
as shown in fig. 1, an outer nozzle hole 2-5 is formed in an upper surface 2-1 of the thrust range-extending module, an inner nozzle hole 2-4 is formed in a lower surface 2-2 of the thrust range-extending module, and a monocrystalline silicon thin film 2-6 is arranged between the inner nozzle hole 2-4 and the outer nozzle hole 2-5 and serves as a diaphragm between the inner nozzle hole and the outer nozzle hole; and 2-3 high-energy nano energetic films grow or are deposited on the inner wall of the inner spray hole to serve as propellants of the thrust range-increasing module. High-energy nano energetic films include, but are not limited to, novel porous silicon nano energetic films, CuO nanowire/Al energetic films, Mg nanowire/polytetrafluoroethylene, CuO/Al reactive multilayer films, and other novel integrable nano energetic films; the high-energy nano energy-containing film is prepared by adopting a graphical MEMS process method such as Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), an electrochemical corrosion process or a primary battery corrosion process. The energy density of the high-energy nano energy-containing film is more than 4KJ/g, the burning rate is high, the critical diameter of stable burning rate is small, and the micron-scale level can be achieved.
As shown in fig. 2(a) and 2(b), the thrust range-increasing module 2 and the core engine module 1 are structurally bonded and integrated to function as a multiplier for adjusting micro thrust and micro impulse of the core engine. The core machine module has two schemes, one is only composed of an ignition layer and a powder chamber layer, and the other is composed of an ignition layer, a powder chamber layer and a jet orifice layer.
The MEMS micro thruster array chip with the thrust range extending module comprises the following processing steps:
step 3, photoetching and etching blind holes on the 2-2 surfaces of the monocrystalline silicon wafer to prepare an inner jet hole array 2-4;
step 4, growing or depositing a high-energy nano energetic film 2-3 with a three-dimensional structure on the inner wall of the inner spray hole array of the 2-2 surfaces by adopting a graphical MEMS process;
and 5, after the thrust range-extending module is manufactured, combining the thrust range-extending module with the core machine module through a bonding process to finish the manufacturing of the micro-thrust system based on the MEMS micro-thruster array.
According to the invention, on the basis of not modifying the MEMS micro-thruster array core machine module, the thrust range-extending modules with different thrust performances are additionally arranged on the core machine module to meet the requirements of micro-spacecrafts with different specifications on the thrust performances, so that the mass, low cost, serialization and type-spectrum of the MEMS micro-thruster array chip are favorably realized, and the product which is originally required to be customized and researched is changed into a shelf product.
Claims (7)
1. An MEMS micro thruster array chip with a thrust range-increasing module is characterized by comprising an ignition layer, a medicine chamber layer and the thrust range-increasing module which are sequentially arranged from bottom to top;
an outer spray hole is formed in the upper surface of the thrust range extending module, an inner spray hole is formed in the lower surface of the thrust range extending module, and a monocrystalline silicon thin film is arranged between the inner spray hole and the outer spray hole and serves as a diaphragm between the inner spray hole and the outer spray hole; and a high-energy nano energy-containing film grows or is deposited on the inner wall of the inner spray hole to serve as a propellant of the thrust range-increasing module.
2. The MEMS micro-thruster array chip with a thrust range extending module of claim 1, wherein the high energy nano energetic film is a porous silicon nano energetic film, a CuO nanowire/Al energetic film, a Mg nanowire/teflon film, or a CuO/Al reactive multilayer film.
3. The MEMS micro-thruster array chip with the thrust range extending module as claimed in claim 1 or 2, wherein the energy transforming elements on the ignition layer, the chambers of the chamber layer, and the inner and outer nozzles of the thrust range extending module are vertically aligned.
4. The MEMS micro-thruster array chip with a thrust range extending module of claim 3, wherein the ignition layer, the charge chamber layer and the thrust range extending module are connected by bonding.
5. The MEMS micro-thruster array chip with the thrust range extending module as claimed in claim 1 or 2, wherein a nozzle layer is further disposed between the chemical chamber layer and the thrust range extending module.
6. The MEMS micro-thruster array chip with a thrust range extending module of claim 5, wherein the transducer elements on the ignition layer, the chamber of the chamber layer, the inner nozzle holes and the outer nozzle holes of the nozzle layer, and the inner nozzle holes and the outer nozzle holes of the thrust range extending module correspond in position in the vertical direction.
7. The MEMS micro-thruster array chip with a thrust range extending module of claim 6, wherein the ignition layer, the charge chamber layer, the orifice layer and the thrust range extending module are connected by bonding.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711042484.6A CN107902109B (en) | 2017-10-31 | 2017-10-31 | MEMS micro thruster array chip with thrust range-increasing module |
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| CN201711042484.6A CN107902109B (en) | 2017-10-31 | 2017-10-31 | MEMS micro thruster array chip with thrust range-increasing module |
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| CN107902109A CN107902109A (en) | 2018-04-13 |
| CN107902109B true CN107902109B (en) | 2020-07-31 |
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| CN113212805B (en) * | 2021-06-10 | 2023-03-03 | 中国科学院微小卫星创新研究院 | Nanowire array electric propulsion system capable of on-orbit autonomous repair |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101892925A (en) * | 2010-06-23 | 2010-11-24 | 中北大学 | Aircraft range-extending technique |
| CN102260125A (en) * | 2011-06-21 | 2011-11-30 | 南京理工大学 | Dielectric Al/CuO composite film energetic electric ignition bridge and ignition bridge array |
| CN104196650A (en) * | 2014-06-23 | 2014-12-10 | 西北工业大学 | Silicon-based MEMS array propeller and preparation method thereof |
| CN205373544U (en) * | 2015-11-26 | 2016-07-06 | 南京理工大学 | Carbon film electricity priming sytem transducing unit |
| CN106043743A (en) * | 2016-06-03 | 2016-10-26 | 西北工业大学 | Non-gunpowder thermal expansion type miniature propeller and preparation method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6516604B2 (en) * | 2000-03-27 | 2003-02-11 | California Institute Of Technology | Micro-colloid thruster system |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101892925A (en) * | 2010-06-23 | 2010-11-24 | 中北大学 | Aircraft range-extending technique |
| CN102260125A (en) * | 2011-06-21 | 2011-11-30 | 南京理工大学 | Dielectric Al/CuO composite film energetic electric ignition bridge and ignition bridge array |
| CN104196650A (en) * | 2014-06-23 | 2014-12-10 | 西北工业大学 | Silicon-based MEMS array propeller and preparation method thereof |
| CN205373544U (en) * | 2015-11-26 | 2016-07-06 | 南京理工大学 | Carbon film electricity priming sytem transducing unit |
| CN106043743A (en) * | 2016-06-03 | 2016-10-26 | 西北工业大学 | Non-gunpowder thermal expansion type miniature propeller and preparation method thereof |
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