CN107869966A - 3-dimensional form measuring method and 3-dimensional form measuring instrument - Google Patents

3-dimensional form measuring method and 3-dimensional form measuring instrument Download PDF

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Publication number
CN107869966A
CN107869966A CN201710902006.1A CN201710902006A CN107869966A CN 107869966 A CN107869966 A CN 107869966A CN 201710902006 A CN201710902006 A CN 201710902006A CN 107869966 A CN107869966 A CN 107869966A
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China
Prior art keywords
view data
gray code
cycle
phase values
candy strip
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Chinese (zh)
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千贺大辅
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Juki Corp
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Juki Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254Projection of a pattern, viewing through a pattern, e.g. moiré
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2545Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention provides the 3-dimensional form measuring method that can suppress measurement accuracy reduction.This method includes following step:Make candy strip one side phase shift of sinuous lightness distribution while projecting to object;Obtain the 1st view data of the image for the object that multiple expression candy strips are projected to;The respective relative phase values of multiple pixels of the view data of brightness calculation the 1st based on multiple 1st view data;Cycle different multiple Gray code patterns are projected to object, obtain the 2nd view data of the image of multiple objects for representing Gray code pattern and being projected to;The striped number of the respective candy strip of multiple pixels of the 1st view data is calculated based on multiple 2nd view data;The respective absolute phase values of multiple pixels of the 1st view data are calculated based on relative phase values and striped number;The respective absolute phase values of multiple pixels based on the 1st view data calculate object 3-dimensional shape.The composite value of multiple Gray code patterns is that the cycle of Gray code is shorter than the cycle of candy strip.

Description

3-dimensional form measuring method and 3-dimensional form measuring instrument
Technical field
The present invention relates to 3-dimensional form measuring method and 3-dimensional form measuring instrument.
Background technology
One kind as the 3-dimensional form measuring method of object, it is known that such as the phase-shifting method disclosed in patent document 1.Moving Xiang Fazhong, the figure for the object that lightness is projected to the stripe pattern projection that sinusoidal wave shape changes to object, acquirement candy strip As data.In addition, in phase-shifting method, the relative phase values projected to the candy strip of each point of object are calculated.In order to The 3-dimensional shape of object is calculated according to relative phase values, implemented based on relative phase values and striped number to each of object The phase connection that absolute phase values in point are calculated.
Patent document 1:Japanese Unexamined Patent Publication 2001-124534 publications
In phase connection, it is known to use space encoding pattern is projected to the method for the space encoding method of object. Use in the case that space encoding method carries out phase connection, by candy strip and space encoding pattern 1 in a manner of corresponding to 1 ground Space encoding pattern is projected.That is, with cycle of candy strip for being used in phase-shifting method and in space encoding method The border in consistent, candy strip cycle in the cycle of the space encoding pattern used and the border one in the cycle of space encoding pattern The mode of cause projects candy strip and space encoding pattern to object.But right with candy strip and space encoding pattern 1 In the case that mode corresponding to 1 ground is projected to object, by the noise that the phase boundaries position of candy strip is included, calculate Absolute phase values be possible to include big error.The absolute phase values of each point of the 3-dimensional shape based on object of object are counted Calculate.Therefore, if absolute phase values include error, the measurement accuracy of the 3-dimensional shape of object reduces.
The content of the invention
The purpose of the mode of the present invention is, there is provided a kind of 3-dimensional shape measure side for the reduction that can suppress measurement accuracy Method and 3-dimensional form measuring instrument.
According to the 1st mode of the present invention, there is provided a kind of 3-dimensional form measuring method, it includes following step:Make sinusoidal wave shape Lightness distribution candy strip one side phase shift projection on one side to object, obtain what multiple expression candy strips were projected to 1st view data of the image of the object;Based on the brightness of multiple 1st view data, to the 1st view data Multiple respective relative phase values of pixel are calculated;Cycle different multiple Gray code patterns are projected to the object, taken Obtain the 2nd view data of the image of multiple objects for representing the Gray code patterns and being projected to;Based on multiple described 2 View data, the striped number of multiple respective candy strips of pixel of the 1st view data is calculated; Based on the relative phase values and the striped number, to multiple respective absolute phases of pixel of the 1st view data Place value is calculated;And multiple respective absolute phase values of pixel based on the 1st view data, to the object 3-dimensional shape calculated, the composite value of multiple Gray code patterns is week of the cycle than the candy strip of Gray code Phase is short.
According to the 2nd mode of the present invention, there is provided a kind of 3-dimensional form measuring instrument, it has:Projection arrangement, it makes sine Candy strip one side phase shift of wavy lightness distribution is while projection projects cycle different multiple Gray code patterns to object To the object;Filming apparatus, it obtains the 1st figure of the image of multiple objects for representing the candy strip and being projected to As data, the 2nd view data of the image of the multiple objects for representing the Gray code patterns and being projected to of acquirement;With respect to phase Place value calculating part, its brightness based on multiple 1st view data are respective to multiple pixels of the 1st view data Relative phase values are calculated;Striped number calculating part, it is based on multiple 2nd view data, to the 1st view data The striped numbers of multiple respective candy strips of pixel calculated;Absolute phase values calculating part, it is based on institute Relative phase values and the striped number are stated, multiple respective absolute phase values of pixel of the 1st view data are entered Row calculates;And 3-dimensional shape calculating part, its multiple described respective absolute phase values of pixel based on the 1st view data, The 3-dimensional shape of the object is calculated, the composite values of multiple Gray code patterns is the cycle of Gray code than the bar The cycle of line pattern is short.
The effect of invention
According to the mode of the present invention, there is provided the 3-dimensional form measuring method and 3-dimensional of a kind of reduction that can suppress measurement accuracy Form measuring instrument.
Brief description of the drawings
Fig. 1 is the figure for an example for showing schematically the 3-dimensional form measuring instrument involved by present embodiment.
Fig. 2 is the functional block diagram for an example for representing the control device involved by present embodiment.
Fig. 3 is the flow chart for an example for representing the 3-dimensional measuring method involved by present embodiment.
Fig. 4 is the figure for an example for representing the candy strip involved by present embodiment.
Fig. 5 is an example of the view data for representing the object that the candy strip involved by present embodiment is projected to Figure.
Fig. 6 is the figure of an example of the brightness for the pixel for representing the view data involved by present embodiment.
Fig. 7 is an example for showing schematically relative phase values and absolute phase values involved by present embodiment Figure.
Fig. 8 is the figure for an example for representing the Gray code pattern involved by present embodiment.
Fig. 9 is an example of the view data for representing the object that the Gray code pattern involved by present embodiment is projected to The figure of son.
Figure 10 is brightness change, the 2nd view data N brightness for representing the 1st view data involved by present embodiment Change, the figure by the way that multiple Gray code patterns to be synthesized to the relation between secondary digital, the striped number of striped to generate.
Figure 11 is the figure for showing schematically the relation between the relative phase values involved by present embodiment and Gray code.
Figure 12 be show schematically involved by present embodiment phase connection before relative phase values and Gray code and phase The figure of the relation between absolute phase values after the connection of position.
The explanation of label
1 ... 3-dimensional form measuring instrument, 2 ... workbench, 3 ... projection arrangements, 4 ... filming apparatus, 5 ... control devices, 6 ... Input unit, 7 ... display devices, 31 ... light sources, 32 ... optical modulation elements, 33 ... projection optical systems, 41 ... image optics systems System, 42 ... capturing elements, 51 ... input and output portions, 52 ... pattern generation portions, 53 ... view data obtaining sections, 54 ... relative phases It is worth calculating part, 55 ... striped number calculating parts, 56 ... absolute phase values calculating parts, 57 ... 3-dimensional shape calculating parts, 58 ... storages Portion, M ... view data (the 1st view data), N ... view data (the 2nd view data), PB ... candy strips, PR ... Gray codes Pattern.
Embodiment
Below, embodiment involved in the present invention is illustrated referring to the drawings, but the present invention is not limited to this.Under The structural element for the embodiment that face illustrates can be appropriately combined.In addition, sometimes without using the structural element of a part.
In the following description, XYZ orthogonal coordinate system is set, with reference to XYZ orthogonal coordinate system and to the position relationship in each portion Illustrate.The direction of X-axis parallel to predetermined surface is set to X-direction, by parallel to the Y-axis of predetermined surface orthogonal to X-axis Direction be set to Y direction, Z-direction will be set to parallel to the direction of the Z axis orthogonal with predetermined surface.In addition, will be using X-axis in The rotation of the heart or incline direction are set to θ X-directions, and the rotation centered on Y-axis or incline direction are set into θ Y-directions, will be with Z axis Centered on rotation or incline direction be set to θ Z-directions.X/Y plane is predetermined surface.
[3-dimensional measurement apparatus]
Fig. 1 is the figure for an example for showing schematically the 3-dimensional form measuring instrument 1 involved by present embodiment.Such as Fig. 1 Shown, 3-dimensional form measuring instrument 1 has:Workbench 2, it is supported to the object S as measurement object thing;Projection arrangement 3, it is to the object S projection patterns for being supported in workbench 2;Filming apparatus 4, it obtains the image for the object S that pattern is projected to Data;And control device 5.
Projection arrangement 3 has:Light source 31, it produces light;Optical modulation element 32, it carries out light to the light projected from light source 31 Modulation;And projection optical system 33, it projects the pattern generated by optical modulation element 32 to object S.
Optical modulation element 32 includes DMD (Digital Mirror Device:DMD).In addition, optical modulating element Part 32 can include through the liquid crystal panel of type, can also include the liquid crystal panel of reflection-type.Optical modulation element 32 is based on from control Pattern data that device 5 processed exports and generate pattern light.Projection arrangement 3 will be patterned based on pattern data after pattern light Expose to object S.
Filming apparatus 4 has:Imaging optical system 41, it is imaged to the pattern light reflected by object S;And clap Element 42 is taken the photograph, it obtains object S view data via imaging optical system 41.Capturing element 42 is passed comprising cmos image Sensor (Complementary Metal Oxide Semiconductor Image Sensor) or ccd image sensor The solid-state image pickup element of (Charge Coupled Device Image Sensor).
Control device 5 includes computer system, and projection arrangement 3 and filming apparatus 4 are controlled.Control device 5 has: Arithmetic processing apparatus, it includes processor as such as CPU (Central Processing Unit);And storage device, It includes memory and storage as such as ROM (Read Only Memory) or RAM (Random Access Memory) Device.Arithmetic processing apparatus implements calculation process according to the computer program stored in the storage device.
Control device 5 is connected with input unit 6 and display device 7.Input unit 6 include computer keyboard, mouse and Touch panel it is at least one, by the way that input signal is exported to control device 5 by operation.Display device 7 includes such as liquid Crystal display (Liquid Crystal Display:) or organic el display (Organic LCD Electroluminescence Display:OELD flat-panel monitor as).
In the present embodiment, 3-dimensional form measuring instrument 1 is based on phase-shifting method, and object S 3-dimensional shape is measured. In the case of being measured based on phase-shifting method to object S 3-dimensional shape, implementing phase connection.3-dimensional form measuring instrument 1 is based on Space encoding method, implementing phase connection.
Projection arrangement 3 is based on phase-shifting method, makes candy strip PB one side phase shifts of sinuous lightness distribution while projection To object S.In addition, projection arrangement 3 is based on space encoding method, a kind of Gray code pattern P R as space encoding pattern is thrown Shadow is to object S.
Projection arrangement 3 projects cycle different multiple Gray code pattern P R to object S.In the present embodiment, project Device 3 by multiple Gray code pattern P R composite value be Gray code cycle it is shorter than candy strip PB cycle in a manner of, by bar Line pattern P B and Gray code pattern P R are projected to object S.
In the present embodiment, project at least one Gray code pattern P R in object S multiple Gray code pattern P R Cycle it is shorter than candy strip PB cycle.
In addition, projection arrangement 3 is at least the one of the border in the cycle of Gray code with multiple Gray code pattern P R composite value Part projects candy strip PB and Gray code pattern P R to object S from the mode of the boundary shifts in candy strip PB cycle.
Filming apparatus 4 obtains view data (the 1st figure of the image for the object S that multiple expression candy strip PB are projected to As data) M.In addition, filming apparatus 4 obtains the picture number of the image for the object S that multiple expression Gray code pattern P R are projected to According to (the 2nd view data) N.
[control device]
Fig. 2 is the functional block diagram for an example for representing the control device 5 involved by present embodiment.Control device 5 has Have:Input and output portion 51, pattern generation portion 52, view data obtaining section 53, relative phase values calculating part 54, striped number calculate Portion 55, absolute phase values calculating part 56,3-dimensional shape calculating part 57, storage part 58.
Pattern generation portion 52 generates pattern data.By the pattern data that pattern generation portion 52 generates via input and output portion 51 And export to optical modulation element 32.Optical modulation element 32 generates pattern light based on the pattern data generated by pattern generation portion 52. In the present embodiment, pattern generation portion 52 generates candy strip data and Gray code pattern data and is used as pattern data.Light Modulation element 32 generates candy strip light based on the candy strip data generated by pattern generation portion 52.The base of optical modulation element 32 In the Gray code pattern data generated by pattern generation portion 52, Gray code pattern light is generated.
View data obtaining section 53 obtains view data via input and output portion 51 from capturing element 42.In this embodiment party In formula, view data obtaining section 53 obtains the view data M and table for the image for representing the object S that candy strip PB is projected to Show the view data N of the image for the object S that Gray code pattern P R is projected to.
Brightness of the relative phase values calculating part 54 based on multiple images data M, to view data M multiple pixel ps each Relative phase values θ p calculated.Relative phase values calculating part 54 is each projected based on the candy strip PB after expression phase shift The brightness of the multiple images data M of the object S arrived image same point, couple view data M corresponding with point pixel p Relative phase values θ p calculated.Multiple point respective brightness of the relative phase values calculating part 54 based on view data M, to figure As the respective relative phase values θ p of data M multiple pixel ps are calculated.
Striped number calculating part 55 is based on multiple images data N, to the view data M respective bar graph of multiple pixel ps Case PB striped frequency n is calculated.Striped frequency n refers to project simultaneously into object S candy strip PB multiple stripeds , on the basis of specific striped and mark the respective numbering of multiple stripeds.In other words, striped frequency n is to represent to throw simultaneously The value of striped in shadow to object S candy strip PB multiple stripeds, that No. n-th is counted from the striped of benchmark.
Absolute phase values calculating part 56 is based on relative phase values θ p and striped frequency n, to view data M multiple pixel ps Respective absolute phase values θ a are calculated.
The respective absolute phase values θ a of multiple pixel ps of the 3-dimensional shape calculating part 57 based on view data M, pair and picture number Calculated according to each self-corresponding object S of M multiple pixel ps multiple respective altitude informations of point, to object S 3-dimensional shape Calculated.
[3-dimensional measuring method]
Next, the 3-dimensional measuring method involved by present embodiment is illustrated.Fig. 3 is to represent present embodiment institute The flow chart of one example of the 3-dimensional measuring method being related to.
Pattern generation portion 52 generates candy strip data.Candy strip data output to projection arrangement 3 optical modulation element 32.Projection arrangement 3 makes lightness be distributed sinuous candy strip PB one side phase shift while projecting to object S.Filming apparatus 4 takes Obtain the view data M (step S10) of the image for the object S that multiple expression candy strip PB are projected to.
In the present embodiment, projection arrangement 3 makes candy strip PB while using pi/2 as unit phase shift while projecting to object S.Filming apparatus 4 obtains the view data M using pi/2 by the candy strip PB of the unit phase shift object S projected to.View data Obtaining section 53 obtains view data M via input and output portion 51 from the capturing element 42 of filming apparatus 4.
Fig. 4 is the figure for an example for representing the candy strip PB involved by present embodiment.As shown in figure 4, bar graph Case PB is included:Amount of phase shift is the candy strip PB1 of 0 [°], amount of phase shift is the candy strip PB2 of 90 [°], amount of phase shift is 180 [°] Candy strip PB3, amount of phase shift be 270 [°] candy strip PB4.Projection arrangement 3 by candy strip PB1, candy strip PB2, Candy strip PB2 and candy strip PB4 each projects to object S successively.
Fig. 5 is one of the view data M for representing the object S that the candy strip PB involved by present embodiment is projected to The figure of example.As shown in figure 5, view data M is included:View data M1, the striped for the object S that candy strip PB1 is projected to The view data M3 and bar for the object S that view data M2, the candy strip PB3 for the object S that pattern P B2 is projected to are projected to The view data M4 for the object S that line pattern P B4 is projected to.The acquirement multiple images data of view data obtaining section 53 M (M1, M2, M3、M4)。
Fig. 6 is the brightness a for the pixel p (x, y) for representing the view data M1 involved by present embodiment1, view data M2 Pixel p (x, y) brightness a2, view data M3 pixel p (x, y) brightness a3And view data M4 pixel p (x, y) Brightness a4An example figure.In 4 view data M (M1, M2, M3, M4), pixel p (x, y) is from the same of object S The pixel that the light of any is injected.As shown in fig. 6, relative brightness is changed with candy strip PB amount of phase shift.
Relative phase values calculating part 54 is based on multiple images data M (M1, M2, M3, M4) brightness, to view data M's Multiple respective relative phase values θ p of pixel p are calculated (step S20).
The multiple points respective relative phase values θ p's and view data M for the object S that candy strip PB is projected to is multiple The respective relative phase values θ p of pixel p are corresponding to 1 pair of 1 ground.Multiple pixels of the relative phase values calculating part 54 to view data M The respective relative phase values θ p of p are calculated, the object S projected to candy strip PB multiple respective relative phases of point Value θ p are calculated.
Relative phase values calculating part 54 is based on (1) formula, and the relative phase values θ p (x, y) of pixel p (x, y) are calculated.
【Formula 1】
Relative phase values calculating part 54 is calculated relative phase values θ p on whole pixel ps.By on whole The relative phase values θ p of pixel p are calculated, so as to calculate the phase all put on the candy strip PB object S projected to To phase value θ p.
Fig. 7 is an example for showing schematically relative phase values θ p and absolute phase values θ a involved by present embodiment Figure.Calculated as shown in fig. 7, relative phase values θ p are every 1 phases for being directed to candy strip PB.(1) formula is anyway Function is cut, therefore as shown in fig. 7, the relative phase values θ p of each pixel p turn into the value (- π of candy strip PB 1 phase of correspondence Value between~π).
In order to be calculated according to relative phase values θ p object S 3-dimensional shape, implement exhausted at each point to object S The phase connection calculated phase value θ a.In the present embodiment, in order to which phase connects, projected using by Gray code pattern To object S space encoding method.In the present embodiment, the striped frequency n based on space encoding method to candy strip PB Calculated.As shown in fig. 7, being based on relative phase values θ p and striped frequency n, absolute phase values θ a (=θ p+2n π) are counted Calculate.
Fig. 8 is the figure for an example for representing the Gray code pattern P R involved by present embodiment.Gray code pattern P R is The code of light and shade is with the pattern of defined periodic reversal.As shown in figure 8, Gray code pattern P R is included:Code is with than candy strip PB's The Gray code pattern P R1 of cycle short mechanical periodicity, code are with the Ge Lai of the mechanical periodicity different from Gray code pattern P R1 cycle Code pattern P R2, code with the Gray code pattern P R3 of the mechanical periodicity different from the cycle of Gray code pattern P R1, PR2, code with Pueraria lobota The Gray code pattern P R4 of Lay code pattern P R1, PR2, PR3 cycle different mechanical periodicity.Projection arrangement 3 is by Gray code pattern PR1, Gray code pattern P R2, Gray code pattern P R3 and Gray code pattern P R4 each project to object S successively.
Fig. 9 is the one of the view data N for representing the object S that the Gray code pattern P R involved by present embodiment is projected to The figure of individual example.View data N is included:View data N1, the Gray code pattern for the object S that Gray code pattern P R1 is projected to View data N3, Ge Lai for the object S that view data N2, the Gray code pattern P R3 for the object S that PR2 is projected to are projected to The view data N4 for the object S that code pattern P R4 is projected to.The acquirement multiple images data of view data obtaining section 53 N (N1, N2, N3、N4)。
Striped number calculating part 55 is based on multiple images data N, to the view data M respective bar graph of multiple pixel ps The striped frequency n of case is calculated (step S30).
Striped number calculating part 55 uses the method for space encoding to the striped number of the candy strip PB in view data M N is calculated.
The brightness that Figure 10 is the view data M for representing the projected fringe pattern P B involved by present embodiment and photographing becomes Change, projection Gray code pattern P R and the view data N that photographs brightness change, by by multiple Gray code pattern P R synthesize and The figure of relation between the Gray code GC (striped time digital) of generation, striped frequency n.
Striped number calculating part 55 generates multiple Gray code pattern P B synthesis on view data M multiple pixels respectively Value is Gray code GC.Gray code GC is the code being made up of same striped number code.Gray code GC was generated with the defined cycle. In the present embodiment, Gray code GC cycle is shorter than candy strip PB cycle.
Striped time number is to be projected to the combination of light and shade code during object S and be prescribed based on multiple Gray code pattern P R 's.Gray code pattern P R includes the pattern that light and shade code alternately inverts.In the present embodiment, in 4 Gray code pattern P R When (PR1, PR2, PR3, PR4) is projected to object S some point, pass through this 4 Gray code pattern P R plain code and the group of private mark Close, striped time number is provided based on 2 systems.In the example shown in Figure 10, as striped time number, it is specified that having “0x0000”、“0x0001”、“0x0010”、“0x0011”、“0x0100”、“0x0101”、“0x0110”、“0x0111”。
In the present embodiment, the period L r of the Gray code pattern P R projected for the first time light and shade code is than candy strip PB's Period L b is short.The period L r of the Gray code pattern P R of second of projection light and shade code is the Gray code pattern P R of projection for the first time 2 times of the period L r of light and shade code.The period L r of the Gray code pattern P R of third time projection light and shade code is the Pueraria lobota of second of projection 2 times of the period L r of Lay code pattern P R light and shade code.The period L r of the Gray code pattern P R of 4th projection light and shade code is the 2 times of the period L r of the code of the Gray code pattern P R projected three times light and shade.
1 Gray code GC is as defined in 1 striped time number.That is, Gray code GC and striped time number are 1 pair of 1 ground pair Answer.In the present embodiment, Gray code GC cycle is shorter than candy strip PB cycle.In the present embodiment, Gray code GC cycle is the 3/4 of candy strip PB cycle.That is, the length of the 3 cycle corresponding amounts of candy strip PB and the 4 of Gray code GC The equal length of cycle corresponding amount.
Candy strip PB cycle is being set to Lb, the cycle of Gray code pattern is being set to Lr, above or equal to 0.5 Number less than 1 is set to T, when being set to i above or equal to 0 integer, in the present embodiment, meets the condition of (2) formula.
【Formula 2】
Lr=T × Lb × 2i…(2)
In the example shown in Figure 10, number T is 3/4.That is, Gray code pattern P R1 period L r is (3/4) × Lb.Ge Lai Code pattern P R2 period L r is (6/4) × Lb.Gray code pattern P R3 period L r is (12/4) × Lb.Gray code pattern P R4 Period L r be (24/4) × Lb.
As described above, according to multiple Gray code pattern P R composite value pair and striped time number and digital 1 pair of 1 ground of striped time Corresponding Gray code GC is calculated, and striped frequency n is calculated.
Absolute phase values calculating part 56 is based on relative phase values θ p and striped frequency n, to view data M multiple pixel ps Respective absolute phase values θ a are calculated (step S40).
The respective absolute phase values θ a of multiple pixel ps of the 3-dimensional shape calculating part 57 based on view data M, to the 3 of object S Dimension shape is calculated (step S50).
3-dimensional shape calculating part 57 is based on absolute phase values θ a, according to the principle of triangulation, to view data M each picture Altitude information in plain p is calculated.In each point on the surface of altitude information and object S in view data M each pixel p Altitude information is corresponding to 1 pair of 1 ground.Altitude information in each point on object S surface represents the coordinate of each point in 3-dimensional space Value.3-dimensional shape data calculating part 58 is calculated object S 3-dimensional shape data based on the altitude information in each point.
[functions and effects]
Figure 11 is to show schematically the relation between the relative phase values θ p involved by present embodiment and Gray code GC Figure.Figure 12 be show schematically involved by present embodiment phase connection before relative phase values θ p and Gray code GC and phase The figure of the relation between absolute phase values θ a after connection.As shown in FIG. 11 and 12, according to present embodiment, multiple Gray codes Pattern P R composite value is that Gray code GC cycle is shorter than candy strip PB cycle.In addition, the border in Gray code GC cycle Stagger with the border in candy strip PB cycle.Therefore, even the phase boundaries opening position in candy strip PB contains noise In the case of carried out the situation of phase connection, also the situation containing big error in the absolute phase values θ a that are calculated is entered Row suppresses.Therefore, the reduction to the measurement accuracy of object S 3-dimensional shape suppresses.
In addition, in the present embodiment, the candy strip PB length of 3 cycle corresponding amounts and Gray code GC 4 cycles pair The equal length that should be measured.Reduction therefore, it is possible to the measurement accuracy of the 3-dimensional shape to object S suppresses, and based on striped Digital implementation candy strip PB phase connection.

Claims (5)

1. a kind of 3-dimensional form measuring method, it includes following step:
Make candy strip one side phase shift of sinuous lightness distribution while projection obtains multiple expression stripeds to object 1st view data of the image for the object that pattern is projected to;
Based on the brightness of multiple 1st view data, to the respective relative phase values of multiple pixels of the 1st view data Calculated;
Cycle different multiple Gray code patterns are projected to the object, multiple expression Gray code patterns is obtained and is projected 2nd view data of the image of the object arrived;
Based on multiple 2nd view data, to multiple respective candy strips of pixel of the 1st view data Striped number calculated;
It is respective absolutely to multiple pixels of the 1st view data based on the relative phase values and the striped number Phase value is calculated;And
Multiple respective absolute phase values of pixel based on the 1st view data, the 3-dimensional shape of the object is carried out Calculate,
The composite value of multiple Gray code patterns is that the cycle of Gray code is shorter than the cycle of the candy strip.
2. 3-dimensional form measuring method according to claim 1, wherein,
Boundary shifts of at least a portion on the border in the cycle of the Gray code from the cycle of the candy strip.
3. 3-dimensional form measuring method according to claim 1 or 2, wherein,
The cycle of the candy strip is being set to Lb,
The cycle of the Gray code pattern is set to Lr,
Number above or equal to 0.5 less than 1 is set to T,
When being set to i above or equal to 0 integer,
Meet Lr=T × Lb × 2iCondition.
4. 3-dimensional form measuring method according to claim 3, wherein,
Several T are 3/4.
5. a kind of 3-dimensional form measuring instrument, it has:
Projection arrangement, it makes candy strip one side phase shift of sinuous lightness distribution project on one side to object, by the cycle not Same multiple Gray code patterns are projected to the object;
Filming apparatus, it obtains the 1st view data of the image of multiple objects for representing the candy strip and being projected to, Obtain the 2nd view data of the image of multiple objects for representing the Gray code pattern and being projected to;
Relative phase values calculating part, its brightness based on multiple 1st view data, to the multiple of the 1st view data The respective relative phase values of pixel are calculated;
Striped number calculating part, it is based on multiple 2nd view data, to multiple pixels of the 1st view data The striped number of the respective candy strip is calculated;
Absolute phase values calculating part, it is based on the relative phase values and the striped number, to the more of the 1st view data The individual respective absolute phase values of the pixel are calculated;And
3-dimensional shape calculating part, its multiple described respective absolute phase values of pixel based on the 1st view data, to described The 3-dimensional shape of object is calculated,
The composite value of multiple Gray code patterns is that the cycle of Gray code is shorter than the cycle of the candy strip.
CN201710902006.1A 2016-09-28 2017-09-28 3-dimensional form measuring method and 3-dimensional form measuring instrument Pending CN107869966A (en)

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