CN107817363A - A kind of resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer - Google Patents
A kind of resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer Download PDFInfo
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- CN107817363A CN107817363A CN201711018583.0A CN201711018583A CN107817363A CN 107817363 A CN107817363 A CN 107817363A CN 201711018583 A CN201711018583 A CN 201711018583A CN 107817363 A CN107817363 A CN 107817363A
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- transducer
- single phase
- acoustic wave
- surface acoustic
- phase unidirectional
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
- G01P15/0975—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements by acoustic surface wave resonators or delay lines
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Abstract
The invention discloses a kind of resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer, it is characterized in that, two groups including the being respectively arranged on cantilever beam upper surface middle part and end oscillators sensitive to acceleration signal, oscillator positioned at end is as reference, two groups of oscillators form difference structure, are advantageous to reduce the influence of temperature and transverse acceleration；The structural parameters of two groups of oscillators are identical, and output end is connected and passes through frequency mixer mixing, and the change that the change of external acceleration is converted into frequency exports；Two groups of oscillators include a SAW delay line and a feedback amplifier, and SAW delay line uses the resonance single phase unidirectional transducer with Gaussian function frequency response, and it includes inputting transducer and output transducer.The advantages of present invention has good frequency response, stability height, high sensitivity, the linearity is good, insertion loss is low, and anti-noise jamming ability is strong, it is adapted to the application demand in the fields such as automobile, steamer, train.
Description
Technical field
The present invention relates to a kind of resonance single phase unidirectional transducer (Resonant Single Phase Unidirectional
Transducer, RSPUDT) type surface acoustic wave acceleration transducer, and in particular to a kind of resonance list with Gaussian function frequency response
Phase unilateral transducer type surface acoustic wave acceleration transducer, belongs to acceleration transducer technical field.
Background technology
The species of acceleration transducer has a lot, can be divided into different types according to the difference of its application scenario, in recent years
Developed rapidly with the popularization of technology of Internet of things.Acceleration transducer can sense the change of acceleration signal, then by it
Frequency change or voltage change are converted into, realizes that quick response or processing in real time provide support for subsequent conditioning circuit.
The stability of different types of acceleration transducer, sensitiveness, the linearity, response speed, temperature effect and anti-dry
Immunity all differs from one another.In the vehicular applications field that automobile, steamer, train etc. are run at high speed, ambient noise is to acceleration
The interference of sensing is larger, it is necessary to both have, the low-loss of and can elimination ambient noise, miniaturization, height sensitive to acceleration signal
The acceleration transducer of stability.With going deep into for application, it is more desirable to realize acceleration wireless and passive monitors.
Due to traditional piezoresistance type acceleration sensor and capacitance acceleration transducer, in temperature effect, sensitivity, sound
Answer speed etc. not ideal enough, there has been proposed surface acoustic wave acceleration transducer.But this traditional surface acoustic wave accelerates
Spend sensor to form using conventional delay line oscillator or resonator type oscillator, the interference of ambient noise influences to pass sometimes
The effect of sensor sensing.In addition, traditional surface acoustic wave acceleration transducer uses common low-loss single phase unidirectional transducer
(Single Phase Unidirectional Transducer, i.e. SPUDT), while device loss is reduced, frequency response is led to
Band ripple and group delay fluctuation are larger so that device overall performance declines.And the beam type of traditional single-ended fixation adds
Though the sensitivity of velocity sensor is preferable, less stable.
The content of the invention
The technical problems to be solved by the invention are：Surface acoustic wave existing for traditional surface acoustic wave acceleration transducer prolongs
The problem of slow line frequency response passband ripple and group delay fluctuation are larger, and cantilever beam stability is not high, there is provided one kind has sensitivity
Height, the linearity is good, insertion loss is low, and anti-noise jamming ability is strong, is adapted to the application in the fields such as automobile, steamer, train and needs
The acceleration transducer asked.
In order to solve the above problems, the technical solution adopted by the present invention is：A kind of resonance single phase unidirectional transducer (Single
Phase Unidirectional Transducer, i.e. SPUDT) type surface acoustic wave acceleration transducer, it is characterised in that bag
Include two groups of oscillators sensitive to acceleration signal for being respectively arranged on cantilever beam upper surface middle part and end, the vibration positioned at end
Device forms difference structure as reference, two groups of oscillators, is advantageous to reduce the influence of temperature and transverse acceleration；Two groups of oscillators
Structural parameters it is identical, output end be connected and pass through frequency mixer mixing, the change of external acceleration is converted into frequency
Change output；Two groups of oscillators include a SAW delay line and a feedback amplifier, SAW delay line are adopted
With the resonance single phase unidirectional transducer (RSPUDT-RSPUDT structures) with Gaussian function frequency response, it includes inputting transducer
(RSPUDT structures) and output transducer (RSPUDT structures).
Preferably, the frequency response of the SAW delay line in oscillator described in two groups is the frequency response of Gaussian function.
Preferably, the material of the cantilever beam uses quartz crystal.
Preferably, the both ends of the cantilever beam are fixed, and mass is loaded with the middle part of its lower surface.
It is highly preferred that the mass is cube structure.
Preferably, the weighting scheme that two transducers of the SAW delay line use for：Input in transducer
Transducing function and reflective function use withdraw-weighted, and output transducer is not weight wide-band transducer.
Preferably, the output end of the frequency mixer connects a low pass filter.
Preferably, the SAW delay line is fixed on cantilever beam upper surface, the preparation of two SAW delay lines
Technique uses semiconductor planar technique.
In order to further reduce passband ripple and group delay fluctuation, improve frequency response and the group delay property of device, the present invention
It is proposed a kind of resonance with Gaussian function frequency response of the strong cantilever beam structure fixed using both-end of good frequency response, stability
Single phase unidirectional transducer (RSPUDT structures) type surface acoustic wave acceleration transducer.
The output frequency response of SAW delay line in the present invention is the frequency response of Gaussian function, this delay line type wave filter
It make use of Gaussian function that there is the advantages of minimum time delay bandwidth product, and there is the gaussian filtering function of eliminating noise, therefore
The resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer has good frequency response, stability height, high sensitivity, line
Property degree is good, insertion loss is low, and the advantages of anti-noise jamming ability is strong, being adapted to the application in the fields such as automobile, steamer, train needs
Ask.
The present invention realizes that its internal interdigital transducer can be connected with antenna, be easily formed using SAW device
Wireless and passive type surface acoustic wave acceleration transducer, therefore this technology has bright application prospect.
Brief description of the drawings
Fig. 1 is the structural representation of resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer provided by the invention
Figure；
Fig. 2 is the structural representation of the SAW delay line in the oscillator of cantilever beam upper surface middle part；
Fig. 3 is the top view of cantilever beam.
Embodiment
To become apparent the present invention, hereby with preferred embodiment, and accompanying drawing is coordinated to be described in detail below.
Embodiment
As shown in figure 1, it is a kind of resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer provided by the invention
Structural representation, it is respectively arranged on two groups of the upper surface middle part of the cantilever beam 1 and end oscillators sensitive to acceleration signal,
Oscillator positioned at end forms difference structure as reference, two groups of oscillators, and the structural parameters of two groups of oscillators are identical,
Output end, which is connected and passes through frequency mixer 8, to be mixed, and the change that the change of external acceleration is converted into frequency exports；Two groups of oscillators
Include a SAW delay line and a feedback amplifier, SAW delay line is used with Gaussian function frequency response
Resonance single phase unidirectional transducer, it includes inputting transducer and output transducer (i.e. interdigital transducer, as shown in Figure 2).It is located at
The oscillator of the upper surface left end of cantilever beam 1 includes the input transducer 1 in left side and the output transducer 1 on right side, and input is changed
Frequency mixer 8 is connected after being connected after the energy connection feedback amplifier 1 of device 1 with the output end of output transducer 1；Positioned at cantilever beam
The oscillator of 1 upper surface middle part includes the input transducer 24 in left side and the output transducer 25 on right side, inputs transducer 24
Frequency mixer 8 is connected after being connected after connection feedback amplifier 27 with the output end of output transducer 25, the output end of frequency mixer connects
A low pass filter 9 is connect, filters out HF noise signal output.The weighting scheme that two transducers use for：Input transducer
In transducing function and reflective function use withdraw-weighted, output transducer is does not weight wide-band transducer.
The centre frequency of SAW delay line is 68MHz, and therefore, the centre frequency of oscillator is 68MHz.With Gauss
The relative bandwidth of the SAW delay line of filter function is small (arrowband), and is filter with low insertion loss device.As long as the increasing of amplifier
Benefit can compensate for the loss of delay line and meet certain phase condition, and oscillator just being capable of starting of oscillation.
As shown in figure 3, cantilever beam 1 is rectangle structure, the material of its substrate uses quartz crystal, the following table of the cantilever beam
Face is identical with the structure of upper surface.The SAW delay line is fixed on the upper surface of cantilever beam 1, and two surface acoustic waves prolong
The preparation technology of slow line uses semiconductor planar technique.The both ends of cantilever beam 1 are fixed, and square is loaded with the middle part of its lower surface
The mass 10 of structure.
Claims (8)
1. a kind of resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer, it is characterised in that outstanding including being respectively arranged on
Arm beam (1) upper surface middle part and two groups of oscillators sensitive to acceleration signal of end, the oscillator positioned at end is as ginseng
Examine, two groups of oscillators form difference structures, and the structural parameters of two groups of oscillators are identical, and output end is connected and passes through frequency mixer
(8) it is mixed, the change that the change of external acceleration is converted into frequency exports；Two groups of oscillators prolong including a surface acoustic wave
Slow line and a feedback amplifier, SAW delay line use the resonance single phase unidirectional transducer with Gaussian function frequency response,
It includes inputting transducer and output transducer.
2. resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer as claimed in claim 1, it is characterised in that two
The frequency response of SAW delay line in the group oscillator is the frequency response of Gaussian function.
3. resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer as claimed in claim 1, it is characterised in that institute
The material for stating cantilever beam (1) uses quartz crystal.
4. the resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer as described in any one of claim 1 or 3, its
It is characterised by, the both ends of the cantilever beam (1) are fixed, and mass (10) is loaded with the middle part of its lower surface.
5. resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer as claimed in claim 4, it is characterised in that institute
It is cube structure to state mass (10).
6. resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer as claimed in claim 1, it is characterised in that institute
State weighting scheme that two transducers of SAW delay line use for：The transducing function and reflective function inputted in transducer
Withdraw-weighted is used, output transducer is not weight wide-band transducer.
7. resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer as claimed in claim 1, it is characterised in that institute
The output end for stating frequency mixer connects a low pass filter (9).
8. resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer as claimed in claim 1, it is characterised in that institute
State SAW delay line and be fixed on cantilever beam (1) upper surface, the preparation technology of two SAW delay lines uses semiconductor
Planar technology.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711018583.0A CN107817363A (en) | 2017-10-26 | 2017-10-26 | A kind of resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711018583.0A CN107817363A (en) | 2017-10-26 | 2017-10-26 | A kind of resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer |
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| CN107817363A true CN107817363A (en) | 2018-03-20 |
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| CN201711018583.0A Pending CN107817363A (en) | 2017-10-26 | 2017-10-26 | A kind of resonance single phase unidirectional transducer type surface acoustic wave acceleration transducer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110836679A (en) * | 2019-11-04 | 2020-02-25 | 兰州中联电子科技有限公司 | SAW surface acoustic wave passive wireless sensor device |
| CN114046916A (en) * | 2022-01-12 | 2022-02-15 | 南通大学 | Self-powered pressure measurement system based on surface acoustic wave sensor and working method thereof |
| WO2023020306A1 (en) * | 2021-08-20 | 2023-02-23 | 南通大学 | Surface acoustic wave amplifier capable of achieving wavelet reconstruction function |
Citations (6)
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|---|---|---|---|---|
| US4306456A (en) * | 1979-03-30 | 1981-12-22 | Thomson-Csf | Elastic wave accelerometer |
| CN101489811A (en) * | 2006-05-18 | 2009-07-22 | 米其林研究和技术股份有限公司 | System and method for interrogating a SAW via direct physical connection |
| CN201653603U (en) * | 2010-03-11 | 2010-11-24 | 卢子譞 | Acoustic surface wave force sensor based on cantilever beam |
| CN102539827A (en) * | 2012-01-20 | 2012-07-04 | 东华大学 | Wavelet transformation type low insertion loss acoustic surface wave delay line type acceleration sensor |
| CN103765414A (en) * | 2011-03-22 | 2014-04-30 | Ess技术有限公司 | Finite impulse response filter for producing outputs having different phases |
| CN104764902A (en) * | 2015-03-20 | 2015-07-08 | 中国科学院声学研究所 | High-sensitivity acoustic surface wave acceleration sensor |
-
2017
- 2017-10-26 CN CN201711018583.0A patent/CN107817363A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4306456A (en) * | 1979-03-30 | 1981-12-22 | Thomson-Csf | Elastic wave accelerometer |
| CN101489811A (en) * | 2006-05-18 | 2009-07-22 | 米其林研究和技术股份有限公司 | System and method for interrogating a SAW via direct physical connection |
| CN201653603U (en) * | 2010-03-11 | 2010-11-24 | 卢子譞 | Acoustic surface wave force sensor based on cantilever beam |
| CN103765414A (en) * | 2011-03-22 | 2014-04-30 | Ess技术有限公司 | Finite impulse response filter for producing outputs having different phases |
| CN102539827A (en) * | 2012-01-20 | 2012-07-04 | 东华大学 | Wavelet transformation type low insertion loss acoustic surface wave delay line type acceleration sensor |
| CN104764902A (en) * | 2015-03-20 | 2015-07-08 | 中国科学院声学研究所 | High-sensitivity acoustic surface wave acceleration sensor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110836679A (en) * | 2019-11-04 | 2020-02-25 | 兰州中联电子科技有限公司 | SAW surface acoustic wave passive wireless sensor device |
| WO2023020306A1 (en) * | 2021-08-20 | 2023-02-23 | 南通大学 | Surface acoustic wave amplifier capable of achieving wavelet reconstruction function |
| CN114046916A (en) * | 2022-01-12 | 2022-02-15 | 南通大学 | Self-powered pressure measurement system based on surface acoustic wave sensor and working method thereof |
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Application publication date: 20180320 |