CN107815661B - 圆形磁力电极装置及包括其的卷绕式表面改性设备 - Google Patents
圆形磁力电极装置及包括其的卷绕式表面改性设备 Download PDFInfo
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- CN107815661B CN107815661B CN201711303886.7A CN201711303886A CN107815661B CN 107815661 B CN107815661 B CN 107815661B CN 201711303886 A CN201711303886 A CN 201711303886A CN 107815661 B CN107815661 B CN 107815661B
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- 238000009413 insulation Methods 0.000 claims abstract description 32
- 238000007789 sealing Methods 0.000 claims abstract description 29
- 230000004888 barrier function Effects 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 9
- 239000003507 refrigerant Substances 0.000 claims description 8
- 239000003795 chemical substances by application Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000003466 welding Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000002788 crimping Methods 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 4
- 239000011553 magnetic fluid Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 4
- 230000008676 import Effects 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920006280 packaging film Polymers 0.000 description 2
- 239000012785 packaging film Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 241000233855 Orchidaceae Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000004992 fission Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
Description
Claims (7)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910042849.8A CN109706432B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
CN201711303886.7A CN107815661B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711303886.7A CN107815661B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
Related Child Applications (1)
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CN201910042849.8A Division CN109706432B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
Publications (2)
Publication Number | Publication Date |
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CN107815661A CN107815661A (zh) | 2018-03-20 |
CN107815661B true CN107815661B (zh) | 2019-08-20 |
Family
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Family Applications (2)
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CN201711303886.7A Active CN107815661B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
CN201910042849.8A Active CN109706432B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
Family Applications After (1)
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CN201910042849.8A Active CN109706432B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
Country Status (1)
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CN (2) | CN107815661B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110220048A (zh) * | 2019-04-18 | 2019-09-10 | 厦门阿匹斯智能制造***有限公司 | 一种磁场角度可调的磁钢 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4581118A (en) * | 1983-01-26 | 1986-04-08 | Materials Research Corporation | Shaped field magnetron electrode |
JPS59197569A (ja) * | 1983-04-25 | 1984-11-09 | Kawasaki Heavy Ind Ltd | スパツタリング装置の電極部構造 |
CN2067281U (zh) * | 1990-02-26 | 1990-12-12 | 辽宁省环境保护科学研究所 | 一种多功能的磁控溅射离子镀膜装置 |
JP3611324B2 (ja) * | 2002-06-03 | 2005-01-19 | 信越化学工業株式会社 | マグネトロンプラズマ用磁場発生装置 |
CN102822381B (zh) * | 2010-03-31 | 2015-06-17 | 野马真空***股份有限公司 | 圆柱形旋转磁控管溅射阴极装置以及使用射频发射来沉积材料的方法 |
CN201746583U (zh) * | 2010-06-25 | 2011-02-16 | 合肥科烨电物理设备制造有限公司 | 一种潘宁放电离子源柔性材料真空镀膜电极 |
CN103643221B (zh) * | 2013-09-14 | 2015-10-28 | 北京印刷学院 | 具有磁场增强旋转阵列电极的等离子体装置 |
CN203881703U (zh) * | 2014-03-17 | 2014-10-15 | 天津英科联合科技有限公司 | 一种可调节磁性大小的磁性电极 |
CN104532200B (zh) * | 2014-12-24 | 2017-05-17 | 四川亚力超膜科技有限公司 | 一种柱状旋转磁控溅射靶 |
-
2017
- 2017-12-11 CN CN201711303886.7A patent/CN107815661B/zh active Active
- 2017-12-11 CN CN201910042849.8A patent/CN109706432B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN107815661A (zh) | 2018-03-20 |
CN109706432A (zh) | 2019-05-03 |
CN109706432B (zh) | 2021-04-06 |
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Effective date of registration: 20190522 Address after: 317700 No. 136 Wushicun, Wanyuan Street, Jiaojiang District, Taizhou City, Zhejiang Province Applicant after: Chen Yanyu Address before: 101100 Building 5062, No. 6, Caoyuan Yijia, Tongzhou District, Beijing Applicant before: Chen Liguo |
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Effective date of registration: 20210108 Address after: No.18-91, Gongye Road, South Taihu high tech Industrial Park, Wuxing District, Huzhou City, Zhejiang Province Patentee after: Zhejiang julibao Textile Technology Co., Ltd Address before: 317700 No. 136 Wushicun, Wanyuan Street, Jiaojiang District, Taizhou City, Zhejiang Province Patentee before: Chen Yanyu |