CN107800026B - A kind of adjustment method of the outer beam path alignment of laser - Google Patents
A kind of adjustment method of the outer beam path alignment of laser Download PDFInfo
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- CN107800026B CN107800026B CN201711026432.XA CN201711026432A CN107800026B CN 107800026 B CN107800026 B CN 107800026B CN 201711026432 A CN201711026432 A CN 201711026432A CN 107800026 B CN107800026 B CN 107800026B
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- laser
- photosensitive device
- collimation
- expanding lens
- beam expanding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Laser Surgery Devices (AREA)
- Lasers (AREA)
Abstract
The present invention relates to laser fields, and the embodiment of the invention discloses a kind of adjustment methods of beam path alignment outside laser, comprising: successively install laser, collimation chamber and beam expanding lens and photosensitive device is placed in the light output end of the beam expanding lens；Opening laser makes it generate laser；The deflection direction for being set to the intracavitary reflecting mirror of the collimation is adjusted, is radiated at laser successively on the photosensitive device by the collimation chamber and beam expanding lens, forms hot spot and diffraction ring；The photosensitive device is mobile to the direction far from the beam expanding lens, while the deflection direction of the reflecting mirror is adjusted, until the hot spot and diffraction ring are completely coincident.Through the foregoing embodiment, the present invention only can carry out collimation debugging to optical path outside laser by a simple photosensitive device of structure, abandoned complicated calibrating installation, improved debugging precision, and easy to operate, improve work efficiency.
Description
Technical field
Embodiment of the present invention is related to laser field, more particularly to a kind of adjustment method of beam path alignment outside laser.
Background technique
It is needed in industrial application or design, it is desirable that the light of laser output is propagated along another parallel light path, is needed simultaneously
Beam-expanding collimation processing is done, therefore optical path to increase collimation chamber outside laser.The collimated chamber of optical path is collimated by beam expanding lens again, it is desirable that
Light passes through along beam expanding lens center.If laser and beam expanding lens axis have deviation, then will lead to generation aberration, to subsequent when debugging
Laser application has adverse effect on.But when debugging laser alignment optical path, generally requires and increase a calibration after collimating chamber
Device, using the debugging standard as collimation chamber.The calibrating installation generally comprises two for calibrating frame member and being fixed in frame member
A aperture, aperture have certain intervals distance.Intracavitary mirror deflection direction is collimated by adjusting repeatedly, makes optical path
Successively pass through from the center of two apertures, achievees the purpose that collimated light path, finally remove calibrating installation, in the defeated of collimator
Outlet connection beam expanding lens, to realize the collimation to light beam and expand.The debugging process is relative complex, the dismounting comprising calibrating installation
And the alignment repeatedly of diaphragm, if the frame member or collimator of calibration have error, may result in laser can not Accurate collimation.
Summary of the invention
Embodiment of the present invention mainly solving the technical problems that provide a kind of adjustment method of the outer beam path alignment of laser,
It is able to solve the problem of debugging process complexity.
In order to solve the above technical problems, the technical solution that embodiment of the present invention uses is: a kind of outer light of laser
The adjustment method of road collimation, comprising: laser, collimation chamber and beam expanding lens are successively installed and photosensitive device is placed in described expand
The light output end of mirror；Opening laser makes it generate laser；The deflection direction for being set to the intracavitary reflecting mirror of the collimation is adjusted,
It is radiated at laser successively on the photosensitive device by the collimation chamber and beam expanding lens, forms hot spot and diffraction ring；It will be described
Photosensitive device is mobile to the direction far from the beam expanding lens, while adjusting the deflection direction of the reflecting mirror, until the hot spot
It is completely coincident with diffraction ring.
Preferably, after installing the laser and collimation chamber, the method also includes: the photosensitive device is placed in
The light equipped at outlet port of the collimation chamber；Opening laser makes it generate laser；According to the presence or absence of hot spot on the photosensitive device
And change in location, the deflection direction of the intracavitary reflecting mirror of the collimation is adjusted, makes laser from the delivery outlet of the collimation chamber
Heart output.
Preferably, the photosensitive device is sensitive film.
Preferably, the photosensitive device is visible light conversion sheet.
Preferably, the light output end of the light delivery outlet and the beam expanding lens of the photosensitive device and the collimation chamber is flat
Row.
Preferably, the reflecting mirror has two pieces, is respectively arranged on the light input port and delivery outlet of the collimation chamber.
Preferably, the sensitive film is blank sheet of paper.
Preferably, the visible light conversion sheet is frequency multiplication piece.
The beneficial effect of embodiment of the present invention is: being in contrast to the prior art, the embodiment of the present invention provides one kind
The adjustment method of the outer beam path alignment of laser only carries out optical path outside laser by a simple photosensitive device of structure quasi-
Straight debugging, has abandoned complicated calibrating installation, has improved debugging precision, and easy to operate, improve work efficiency.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only of the invention some
Embodiment for those of ordinary skill in the art without any creative labor, can also be according to these
Attached drawing obtains other attached drawings.
Fig. 1 is a kind of flow chart of the adjustment method of the outer beam path alignment of laser provided in an embodiment of the present invention；
Fig. 2 is hot spot on photosensitive device in a kind of adjustment method of the outer beam path alignment of laser provided in an embodiment of the present invention
And the schematic diagram of diffraction ring variation；
Fig. 3 is the process debugged in advance in the adjustment method of beam path alignment outside a kind of laser provided in an embodiment of the present invention
Figure.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Refering to fig. 1 and Fig. 2, Fig. 1 be the outer beam path alignment of laser provided by the invention adjustment method flow chart, Fig. 2
It is the signal of hot spot and diffraction ring variation on photosensitive device in the adjustment method of the outer beam path alignment chamber of laser provided by the invention
Scheme, the adjustment method of the outer beam path alignment of laser provided by the invention includes:
11: by laser, collimation chamber and beam expanding lens is successively installed and the light that photosensitive device is placed in the beam expanding lens is defeated
Outlet；
The photosensitive device is the output end for abutting and being parallel to the beam expanding lens, between photosensitive device and beam expanding lens
Distance is in 20MM or so, in this way convenient for observation.The photosensitive device is sensitive film or visible light conversion sheet, when laser is sent out
It when the laser penetrated is visible light, is then debugged using sensitive film, it is preferable that sensitive film is debugged using blank sheet of paper, and blank sheet of paper was both
It is economical to be seen everywhere again, it is very easy to use；When the laser of laser transmitting is black light, then turned using visible light
It changes piece to be debugged, the laser irradiation of black light can be shown as visible light in visible light conversion sheet, it is preferable that visible light
Conversion sheet uses frequency multiplication piece.
12: opening laser makes it generate laser；
13: adjust the deflection direction for being set to the intracavitary reflecting mirror of the collimation, make laser successively by the collimation chamber with
Beam expanding lens is radiated on the photosensitive device, forms hot spot and diffraction ring；
Laser at this time will increase power, be in order to which the projection for making laser beam on photosensitive device is high-visible in this way.
Due to there is two sides mirror in beam expanding lens, so can be seen that diffraction ring and hot spot on photosensitive device, in laser beam not from expanding
When the center oculo cardiac reflex of two mirrors of mirror, the center of hot spot and diffraction ring would not be overlapped.That is phenomenon shown in the A in Fig. 2.
14: the photosensitive device is mobile to the direction far from the beam expanding lens, while adjusting the deflection of the reflecting mirror
Direction, until the hot spot and diffraction ring are completely coincident；
Deflection direction by adjusting collimation intracavity reflecting mirror can enable the center of laser beam mirror from beam expanding lens
It reflects, the center of such diffraction ring and hot spot can be overlapped, and be shown in this way on photosensitive device further through by photosensitive device movement
Whether the diffraction ring shown will reduce, be completely coincident convenient for observation diffraction ring and hot spot in this way.Phenomenon shown in D is in Fig. 2
Phenomenon after being completely coincident.If only only adjust reflecting mirror because being to visually observe, may be observed visually diffraction ring and
The center of hot spot is overlapped, but not of uniform size, can also have error in this way, only center and size, which are completely coincident, could indicate light
Road collimates.
The variation of A to D is in Fig. 2: the variation in A to B is by mobile photosensitive device, and diffraction ring becomes smaller, becomes in B to C
Change is the center of diffraction ring and hot spot to be made to be overlapped by being offset to by adjusting the deflection angle of collimation intracavity reflecting mirror, last shape
It completes to be overlapped at diffraction ring and spot size and center, i.e. the result indicated in D.
It should be noted that stain is hot spot in Fig. 2, thick lines ring and hachure ring are diffraction rings, because expanding
There are two mirrors in mirror, so generating two diffraction rings.
In embodiments of the present invention, only optical path outside laser is collimated by a structure simple photosensitive device
Debugging has abandoned complicated calibrating installation, has improved debugging precision, and easy to operate, improve work efficiency.
Referring to Fig. 3, Fig. 3 is preparatory in a kind of adjustment method of the outer beam path alignment of laser provided in an embodiment of the present invention
The flow chart of debugging；After installing the laser and collimation chamber, i.e., before installing beam expanding lens, the method is also wrapped
It includes:
111: the photosensitive device is placed in the light equipped at outlet port of the collimation chamber；
The photosensitive device is the delivery outlet for being close to and being parallel to the beam expanding lens, between photosensitive device and beam expanding lens
Distance is in 20MM or so, in this way convenient for observation.
112: opening laser makes it generate laser:
113: according to the presence or absence of hot spot and change in location on the photosensitive device, adjusting the intracavitary reflecting mirror of the collimation
Direction is deflected, exports laser from the center of the delivery outlet of the collimation chamber；
When no adjusting collimates intracavitary reflecting mirror, laser beam cannot be from the defeated of collimation chamber after intracavitary possibly into collimation
Outlet output or the output that may be exported but cannot collimate from the delivery outlet of collimation chamber.When laser beam cannot be from collimation chamber output
It is that no any hot spot image is shown on photosensitive device when mouth output, adjusts the deflection angle of reflecting mirror at this time, make laser
Beam can then show hot spot in this way on photosensitive device, continue to adjust reflecting mirror and observe sense from collimation chamber delivery outlet output
The change in location of hot spot enables laser beam to export from the center of collimation chamber delivery outlet on electro-optical device, that is to say, that passes through adjusting
Mirror deflecting angle, hot spot of the hot spot on photosensitive device can be made to occur, and position is mobile, and mobile position is in collimation
When the center of the part of chamber delivery outlet face and photosensitive device, then can confirm the output of laser from collimation chamber by naked eyes
The center of mouth outputs, and not is accurately that this part is rough debugging, is to install because visually observing
Laser beam can be entered in beam expanding lens and can be exported from the delivery outlet of beam expanding lens by collimation chamber after beam expanding lens.
It should be noted that the output electric current of laser does not need very by force at this time, it is only necessary to laser beam can be made photosensitive
Visible on device, the debugging of external optical path at this time is intended merely to that laser beam is enable to enter peace below after collimating chamber
In the beam expanding lens of dress, but it cannot be guaranteed that laser beam is exported from beam expanding lens center, if it is not smart to collimate intracavitary reflecting mirror installation
Really cause laser that cannot export along beam expanding lens, then subsequent debugging can not be carried out, because not can determine that laser position.
Mode the above is only the implementation of the present invention is not intended to limit the scope of the invention, all to utilize this
Equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content, it is relevant to be applied directly or indirectly in other
Technical field is included within the scope of the present invention.
Claims (7)
1. a kind of adjustment method of the outer beam path alignment of laser characterized by comprising
Laser, collimation chamber and beam expanding lens are successively installed, opening laser makes it generate laser；
Photosensitive device is placed in the light equipped at outlet port of the collimation chamber, according to the presence or absence of hot spot and position on the photosensitive device
Variation adjusts the deflection direction of the intracavitary reflecting mirror of the collimation, exports laser from the center of the delivery outlet of the collimation chamber,
Enter beam expanding lens；
Photosensitive device is placed in the light output end of the beam expanding lens, adjusts the deflection side for being set to the intracavitary reflecting mirror of the collimation
To making laser, successively the process collimation chamber and beam expanding lens are radiated on the photosensitive device, form hot spot and diffraction ring；
The photosensitive device is mobile to the direction far from the beam expanding lens, while the deflection direction of the reflecting mirror is adjusted, directly
It is completely coincident to the hot spot and diffraction ring.
2. adjustment method according to claim 1, which is characterized in that
The photosensitive device is sensitive film.
3. adjustment method according to claim 1, which is characterized in that
The photosensitive device is visible light conversion sheet.
4. adjustment method according to claim 1, which is characterized in that
The photosensitive device is parallel with the light output end of the light delivery outlet of the collimation chamber and the beam expanding lens.
5. adjustment method according to claim 1, which is characterized in that
The reflecting mirror has two pieces, is respectively arranged on the light input port and delivery outlet of the collimation chamber.
6. adjustment method according to claim 2, which is characterized in that
The sensitive film is blank sheet of paper.
7. adjustment method according to claim 3, which is characterized in that
The visible light conversion sheet is frequency multiplication piece.
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| CN111010868B (en) * | 2018-08-08 | 2022-01-11 | 西安大医集团股份有限公司 | Method and device for correcting collimator of radiotherapy equipment |
| CN112260043A (en) * | 2020-10-16 | 2021-01-22 | 北京卓镭激光技术有限公司 | Laser light path debugging device and laser light path debugging method |
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| CN1335484A (en) * | 2001-07-26 | 2002-02-13 | 华中科技大学 | Diffraction light-free space linearity measurer |
| CN101577582A (en) * | 2008-05-09 | 2009-11-11 | 北京航空航天大学 | Diffraction-free laser communication device for transmission among serial ports of computers |
| CN102214891B (en) * | 2010-04-07 | 2014-02-19 | 深圳市大族激光科技股份有限公司 | Method for adjusting lasers |
| CN101866059B (en) * | 2010-05-14 | 2011-08-24 | 中国科学院上海光学精密机械研究所 | Collimation method of capillary in laser electron accelerator |
| CN102393370B (en) * | 2011-11-08 | 2014-04-09 | 中国科学院上海光学精密机械研究所 | Measuring device and measuring method for film photo-thermal property |
| CN104020563B (en) * | 2014-05-26 | 2016-07-06 | 中国计量学院 | The calibration apparatus of digit optical phase reversal device and method |
| CN104330897B (en) * | 2014-09-30 | 2016-08-24 | 西北核技术研究所 | A kind of multi-path laser light beam autocollimation device |
| CN204545700U (en) * | 2014-12-24 | 2015-08-12 | 大族激光科技产业集团股份有限公司 | The collimator apparatus of Z axis galvanometer assembly, Z axis galvanometer assembly and colimated light system |
| JP2016205972A (en) * | 2015-04-21 | 2016-12-08 | オプトウエア株式会社 | Scan type glossy cylindrical-surface-shape inspection device |
| CN105758770A (en) * | 2015-11-03 | 2016-07-13 | 大族激光科技产业集团股份有限公司 | Integrated substance component and granularity analyzing system and method |
| CN106841236B (en) * | 2016-12-13 | 2023-04-11 | 中国科学院西安光学精密机械研究所 | Transmission optical element defect testing device and method |
| CN106695129B (en) * | 2016-12-27 | 2019-05-21 | 广州市翔声激光科技有限公司 | A kind of dotted line is overlapped focusing auxiliary system and its auxilary focusing method |
| CN106681014B (en) * | 2017-02-16 | 2019-02-01 | 中国科学院上海光学精密机械研究所 | The method of high-precision beam path alignment suitable for device of high power laser |
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